JPS63174302U - - Google Patents
Info
- Publication number
- JPS63174302U JPS63174302U JP18631386U JP18631386U JPS63174302U JP S63174302 U JPS63174302 U JP S63174302U JP 18631386 U JP18631386 U JP 18631386U JP 18631386 U JP18631386 U JP 18631386U JP S63174302 U JPS63174302 U JP S63174302U
- Authority
- JP
- Japan
- Prior art keywords
- grating
- peeling
- duplication
- relief
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Mechanical Optical Scanning Systems (AREA)
Description
第１図はこの考案の一実施例を示す概略断面図
、第２図はその作成工程を示す断面図、第３図は
変形例を示す概略断面図、第４図は従来例を示す
概略断面図、第５図は異なる従来例を示す概略断
面図である。
６……グレーテイング。
Fig. 1 is a schematic sectional view showing one embodiment of this invention, Fig. 2 is a sectional view showing the manufacturing process, Fig. 3 is a schematic sectional view showing a modified example, and Fig. 4 is a schematic sectional view showing a conventional example. FIG. 5 is a schematic sectional view showing a different conventional example. 6... Grating.
Claims (1)
向けた傾斜形状としたことを特徴とする複製用レ
リーフ型グレーテイング。 A relief-type grating for duplication, characterized in that the cross-sectional shape of the grating is inclined in the direction of peeling by an oblique peeling method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18631386U JPS63174302U (en) | 1986-12-03 | 1986-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18631386U JPS63174302U (en) | 1986-12-03 | 1986-12-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63174302U true JPS63174302U (en) | 1988-11-11 |
Family
ID=31135760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18631386U Pending JPS63174302U (en) | 1986-12-03 | 1986-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63174302U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009516225A (en) * | 2005-11-18 | 2009-04-16 | ナノコンプ オイ リミテッド | Manufacturing method of diffraction grating |
-
1986
- 1986-12-03 JP JP18631386U patent/JPS63174302U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009516225A (en) * | 2005-11-18 | 2009-04-16 | ナノコンプ オイ リミテッド | Manufacturing method of diffraction grating |