JPS60201506A - Head for vertical magnetic recording - Google Patents

Abstract

PURPOSE:To eliminate the damage of a main magnetic pole thin film by forming a dense-structured thin film, having specular-ground surface, having hardness equivalent to that of a substrate, and having crystal structure or amorphous structure, on the end surface of the substrate for supporting a vertical magnetic recording head, consisting of a sintered body, and supporting a high-permeability magnetic thin film which is the main magnetic pole as the base layer. CONSTITUTION:A substrate 10 for supporting a main magnetic pole is a nonmagnetic material of a polycrystal sintered body having comparatively high hardness such as alumina-titanium carbide or boron nitride. The surface is ground, and a thin film 14 made of a material same as or different from the substrate, having hardness equivalent to the sintered body substrate, and having crystal or amorphous structure is formed on the substrate. Then the surface of the film is specularly ground, and a high-permeability magnetic thin film 9 such as permalloy is formed on the surface in specified thickness. Subsequently, the magnetic thin film layer 9 is etched in desired form to obtain a main magnetic pole thin film. Then another substrate 10' is worked in the same way as the above-mentioned substrate 10, and the specular ground surface is bonded to the main magnetic pole thin film 9.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a perpendicular magnetic recording head in which a method for manufacturing a main pole support is specified.

A general magnetic head for perpendicular magnetic recording has an auxiliary magnetic pole 5 and a main magnetic pole 6 disposed above and below a medium 1, as shown in FIG. A write coil 7 and a read coil 8 are wound around the auxiliary magnetic pole 5 so as not to contact the medium 1. The main magnetic pole 6 is made by adhering a high permeability magnetic thin film 9 between supporting materials 10, and polishing the main magnetic pole tip 12 in a direction perpendicular to the adhesive layer to make contact with the medium 1 so as not to create a gap. It will be done. Therefore, when recording information, the medium 1 and the main magnetic pole 6 are not rubbed together with an appropriate contact pressure and a predetermined relative speed, and both the medium 1 and the main magnetic pole tip 12 are worn out. This wear not only shortens the life of the medium 1 and the main pole 6 and reduces the reliability of the magnetic recording apparatus, but also becomes a major hindrance to high-density recording, so it is essential to minimize the wear.

Conventionally, from the point of view of reducing this wear.

Various high-hardness materials have been used for the main pole support 10, 10°. Among these high-hardness materials, polycrystalline sintered bodies such as alumina titanium carbide have high hardness and excellent abrasion resistance, and they are hard to damage the media despite their high hardness. The materials are also advantageous. However, when the main magnetic pole is constructed as shown in FIG. 2 using polycrystalline sintered bodies as supports to and to°, (1) the sintered body generally lacks density; The smoothness required for the body thin film formation process B-B' cannot be obtained. Then, the high permeability magnetic thin film forming surface B-B of this support base 10
The surface roughness of ' has the disadvantage that it makes the film thickness a of the high permeability magnetic thin film 9 formed thereon non-uniform, and causes a decrease in magnetic permeability and an increase in coercive force.

(2) Furthermore, the main magnetic pole thin film 9. Adhesive layer 1it - support stand 10
and lOo, and perform processing such as polishing in a direction perpendicular to the adhesive surface. When creating the contact surface 12 for the medium 1, as shown in FIG. layer 11
Since the support base 10 and 10° are still hard compared to the 10° and 10° edges, their edges (n-n, c-c) are likely to appear, and the sintered body that is the material for the support base is hard but brittle, so they are easily missing. 13 and generates high-hardness missing debris.Then, this missing debris mixes into the abrasive material and damages the main pole and adhesive layer, causing problems such as sag on the main pole and preventing head processing. (The generation of highly hard chips from the support base as described in 31 (2) also occurs when the medium 1 and the main magnetic pole 6 run in contact9, and is serious for both the medium 1, 1 magnetic pole & 6. However, the reliability of the high-density recording system is significantly impaired by causing serious damage.

The present invention aims to improve the above-mentioned drawbacks, and the main magnetic pole thin film of the main magnetic pole supporting base is completely formed by forming a thin film having a crystal structure or an amorphous structure on a polycrystalline sintered non-magnetic material by an appropriate method. The supporting end face has the required density and tenacity, and after mirror polishing it, a main magnetic ultra-thin film is created on that surface, and this is applied to the mirror polished surface of the other support with a similar structure. This was successfully improved by creating a main magnetic pole by adhering it to the main magnetic pole.

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will now be described in detail by way of embodiments with reference to the drawings. FIG. 4 shows the construction steps of an embodiment of the present invention. In the figure, reference numeral 10 denotes the base material of the main pole support, which is a polycrystalline sintered nonmagnetic material with relatively high hardness, for example alumina titanium carbide.

Bone Nightride etc. This surface is polished and a thin film 14 of the same or different type and having a crystal structure or an amorphous structure having a hardness comparable to that of the sintered body base material is formed thereon. This thin film 14 should be thick enough to allow subsequent mirror polishing. The thin film 14 may be, for example, an alumina crystal film formed on an alumina titanium carbide sintered body base material by a reactive sputtering method, or an alumina crystal film formed on a boron nitride sintered body base material by a reactive sputtering method. A boron nitride crystal film was formed on a boron nitride sintered body base material by a reactive sputtering method. Next, the film surface is mirror-polished, a high permeability magnetic thin film 9, for example permalloy, is formed on this surface to a predetermined thickness, and then the magnetic thin film layer 9 is etched into the desired main pole shape. Main magnetic pole thin film.

For example, the part that will become the mask 15 is etched by 7
It is formed using photoresist, and a chemical etching method, ion milling method, etc. is used. Next, add another support base material 10
' is processed in the same manner as the above-mentioned support 10, and the mirror-polished surface thereof faces the main pole thin film 9 side and is bonded. fjj! Layer material 11
For example, an adhesive such as an epoxy resin (thermal curing, catalyst curing, etc.) or glass (fusion bonding) is used. Next, the metal-containing structure surface 12 in the i direction perpendicular to the adhesive surface is brought into contact with the medium. The main pole is completed by polishing it so that it becomes possible.

According to the main pole structure of the present invention, the surface of the support base on which the main pole thin film 9 is formed is sufficiently dense and smooth, so the main pole thin film 9 formed thereon has good magnetic properties. , the film thickness distribution also becomes uniform.

Furthermore, when polishing the surfaces 12 of both supports 10, 10'' perpendicular to the adhesive surfaces to a flat or spherical surface suitable for the media running surface, even if the edges of the supports come out, the newly provided glands will not be visible. Since it is dense, no missing portion 13 occurs.

Therefore, the main pole and the adhesive layer are not damaged by debris caused by sagging or chipping of the main pole. Furthermore, even if the main magnetic pole head created in this way is made to run in contact with the medium, the entire head is highly hard, so it does not wear easily, and there is no generation of debris from the edges of the support, so the head shape does not change over time. ,
The lifespan of the media will also be extended.

The above is an explanation of one embodiment of the vA of the present invention, but the above-mentioned configuration is the same even when applied to a king pole excitation head that uses an auxiliary magnetic pole and a main magnetic pole that are integrated and arranged on one side of the medium. It is clear that the following effects can be obtained, and the present invention is not limited to the above-mentioned embodiments. The thin film 4 to be deposited on the support base material 10 only needs to be a dense and sticky film with a hardness comparable to that of the base material; for example, it may be produced by a plasma CVD method. Combinations of thin films with the same or different base materials such as silicon carbide, boron carbide, tantalum pentoxide, etc., are also effective, and in this respect, the present invention is not limited to the above embodiments.

An example in which significant effects were obtained by implementing the present invention will be described below. Table 1 shows the heights above the support stand of 7.5 mm when the configuration of the present invention is adopted and when the conventional configuration is not adopted. 'The coercive force of a thin film with demagnetization rate. The former has a coercive force 7 times lower than the latter, so the magnetic permeability is higher in the former.

This shows that as a main pole support, the former is more advantageous in terms of the first surface film thickness δ20.5 μm and the material perm p point, which do not affect the magnetic properties of the main pole. Furthermore, when the medium is run in contact with the medium for a long period of time and the frequency characteristics are measured at regular intervals, the frequency that gives I)so does not change in the main magnetic pole head implementing the present invention up to 1 million buses. First, there is no sag in the main pole thin film.9 Compared to the conventional main pole head that uses an alumina-based sintered body alone as a support, the frequency given begins to decrease after 100,000 busses. Implementation of the present invention is also effective in terms of durability.

The present invention is based on the above-mentioned principle. A thin film is deposited as a base on the end face supporting the high permeability magnetic thin film serving as the main pole of the perpendicular magnetic recording head support using the C1 sintered body γ base material. It maintains reliable recording at the same density without damaging the main pole thin film, increases the durability of the entire main pole head, and extends the service life of the main pole and media. This has the effect of significantly increasing the number of people. Its industrial value is extremely high, and it can be called a valuable invention.

[Brief explanation of the drawing]

FIG. 1 is a configuration diagram showing a perpendicular magnetic recording system. FIG. 2a is a plan view of a conventional main pole head, and FIG. 2b is a sectional view taken along lines A to X in a. FIG. 3 is a perspective view for explaining the defect 'lr of the main pole whose support is made of polycrystalline sintered material. FIG. 4 is a sectional view showing the manufacturing process of a main pole head of a magnetic head for perpendicular magnetic recording in an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Double-sided double layer perpendicular magnetic recording medium, 2... Perpendicular recording layer, 3... Medium high magnetic permeability layer, 4... Recording medium substrate,
5...Auxiliary magnetic pole, 6...Main magnetic pole, 7...Writing coil. 8... Readout coil, 9... Main magnetic pole thin film, 10
．． 10"...Main pole support base, 11...Adhesive layer, 12
...Medium contact surface 13...support stand missing part, 14.1
4-...Main pole support base thin film 115...Mask, a...
・Main pole film thickness patent applicant Nichiden Anelva Corporation

Claims (1)

[Claims] In a recording/reproducing head used for perpendicular magnetic recording, the end face of a supporting base made of a polycrystalline sintered body, which supports a high permeability magnetic thin film serving as the main magnetic pole, is preliminarily coated with a material having the same hardness as the sintered body. 1. A perpendicular magnetic recording head characterized in that a thin film with a dense structure having a crystalline structure or an amorphous structure is deposited, the surface of the film is mirror-polished, and then a high permeability magnetic thin film serving as a main pole is formed.