JPS58153902A - Fabry-perot type optical modulator - Google Patents
Fabry-perot type optical modulatorInfo
- Publication number
- JPS58153902A JPS58153902A JP57037691A JP3769182A JPS58153902A JP S58153902 A JPS58153902 A JP S58153902A JP 57037691 A JP57037691 A JP 57037691A JP 3769182 A JP3769182 A JP 3769182A JP S58153902 A JPS58153902 A JP S58153902A
- Authority
- JP
- Japan
- Prior art keywords
- fabry
- plates
- perot
- modulation
- optical modulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims description 16
- 230000003247 decreasing effect Effects 0.000 claims 1
- 238000002834 transmittance Methods 0.000 abstract description 11
- 230000007423 decrease Effects 0.000 abstract description 4
- 230000005540 biological transmission Effects 0.000 description 19
- 238000010586 diagram Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 239000005083 Zinc sulfide Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Filters (AREA)
- Spectrometry And Color Measurement (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
Description
【発明の詳細な説明】
本発明はファブリペロ型光学変調器に関するものである
。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a Fabry-Perot optical modulator.
第１図に示すように２枚の透明な平板１，２を微少な間
隔ｄをもたせて、ヌペーサ３を介して平行に配置すると
、いわゆるファブリペロ干渉器になり、第２甲に示すよ
うな光学透過特性を持つようになる。ここで平板１，２
の内側の向い合う面の反射率をＲとし外側の面は反射率
ゼロとすると、垂直入射光の場合 λ＝２ｎｄ／ｍなる
波長の光の透過率は１００％である。こζで、ｎは空気
または真空の屈折率であり、ｎ ＝ １であり、ｍは正
の整数である。一方、 λ＝ ４ｎｄ／（２ｍ−１）な
る時、透過率が最低になり。As shown in Fig. 1, when two transparent flat plates 1 and 2 are arranged in parallel with a small distance d between them via a Nupaca 3, it becomes a so-called Fabry-Perot interferometer, and the optical Becomes transparent. Here, flat plates 1 and 2
Assuming that the reflectance of the inner facing surfaces is R and the reflectance of the outer surface is zero, the transmittance of light with a wavelength of λ=2nd/m is 100% in the case of vertically incident light. where n is the refractive index of air or vacuum, n = 1, and m is a positive integer. On the other hand, when λ=4nd/(2m-1), the transmittance is the lowest.
でｍ１ｎ＝（１−Ｒ）／（１千Ｒ） −−−−（１
）であられされる。So, m1n=(1-R)/(1,000R) -----(1
).
ここで、τｍｉｎは最低透過率、ｍは正の整数であり、
ｎ ＝ １である。Here, τmin is the minimum transmittance, m is a positive integer,
n=1.
ｍ ＝ １の透過ピ〜りの半値巾ＷはＨの値で決まり第
３図に示すようになシ、式（２）で表わすことができる
。The half-width W of the transmission peak when m=1 is determined by the value of H, and can be expressed by equation (2) as shown in FIG.
但し、λ０＝＝２ｎｄ である。However, λ0==2nd.
さて、ここで微少間隔ｄを変化させることによリ、透過
帯域を変化させることができる。従って、赤外フィルタ
などと組み合せて、特定波長帯域の光を変調することが
できる。Now, by changing the minute distance d, the transmission band can be changed. Therefore, in combination with an infrared filter or the like, light in a specific wavelength band can be modulated.
ところが、この場合の変調度は大きくとれない。However, in this case, the degree of modulation cannot be increased.
たとえばＲｍ６６％とすると、（２）式又は第３図より
！＝０，１３３Ｘ２ｄとなシ、このとき波長のスケール
で半値幅に相当する分だけ振らしたときの透過特性は第
４図のようになゐ。図において、曲線６は微少間隔ｄを
変化させないときの特性、曲線６は微少間隔ｄをｄ−Ｗ
に変化させたときの特性である。このとき、特定波長帯
域（λ＝２ｄ−〜２ｄ＋！−）における光の透過率は、
曲２ ２
線６については図中７で示した領域となり、ｒＯＮ中８
０ｑ６となる。一方向線６については８で示した領域と
なり゛ｒｏｔｙ−キ２５％となり、結局変調度としては
でＯＮ −ｒｏｔｙキ８Ｏ−２５＝５５％程度であり大
きく変調できない。。For example, if Rm is 66%, then from equation (2) or Figure 3! =0.133X2d, and in this case, when the wavelength scale is swung by an amount corresponding to the half width, the transmission characteristics are as shown in Fig. 4. In the figure, curve 6 is the characteristic when the minute distance d is not changed, and curve 6 is the characteristic when the minute distance d is changed to d-W.
This is the characteristic when changed to . At this time, the light transmittance in the specific wavelength band (λ=2d-~2d+!-) is
For song 2 2 line 6, the area is indicated by 7 in the figure, and 8 in rON.
It becomes 0q6. Regarding the one-way line 6, it is in the area indicated by 8, and the rotary key is 25%, and the modulation degree is approximately 55% (ON-roty key 8O-25), and cannot be significantly modulated. .
本発明はこの変調度を大きく改善することのできるファ
ブリペロ型光学変調器を提供するものである。以下図面
を用いてその一実施例を詳細に説萌する。The present invention provides a Fabry-Perot optical modulator that can greatly improve the degree of modulation. One embodiment will be explained in detail below using the drawings.
第６図は本発明によるファブリペロ型光変調器の原理を
示すダブルファブリペロ干渉器の構成である。図におい
て、１１．１２．１３は透明な平板で、平板１１．１３
の外側の面は反射率ゼロとし、内側の面は反射率Ｒとす
る。平板１２は両面ともに反射率Ｒとする。各平板１１
．１２．１３はスペーサ１４により一定間隔ｄを保って
配される。この構成で平板１２の位置のみが微変動（Δ
ｄ）すれば、各面間隔は一方はｄ＋Δｄ、他方はｄ−Δ
ｄとなり、この２重ファブリペロ干渉器は第６図に示す
ような光変調機能を発揮することになる。ここで、２１
はΔｄ ＝Ｏ，すなわちダブルファブリペロ型変調器が
０１ｇのときの光透過特性、２３．２４はΔｄも０のと
き、すなわち各ダブルファブリペロ干渉器がＯＦＦのと
きの各光透過特性、２２は曲線２３，２４を合成して得
られるダブルファブリペロ型変調器がＯＦＦのときの光
透過特性である。FIG. 6 shows the configuration of a double Fabry-Perot interferometer showing the principle of the Fabry-Perot optical modulator according to the present invention. In the figure, 11.12.13 is a transparent flat plate, and the flat plate 11.13
The outer surface of is assumed to have a reflectance of zero, and the inner surface is assumed to have a reflectance of R. The flat plate 12 has a reflectance R on both sides. Each flat plate 11
．． 12 and 13 are arranged at a constant distance d by a spacer 14. With this configuration, only the position of the flat plate 12 changes slightly (Δ
d) Then, the spacing between each surface is d + Δd on one side and d - Δ on the other.
d, and this double Fabry-Perot interferometer exhibits an optical modulation function as shown in FIG. Here, 21
are the light transmission characteristics when Δd = O, that is, the double Fabry-Perot modulator is 01 g, 23.24 are the light transmission characteristics when Δd is also 0, that is, when each double Fabry-Perot interferometer is OFF, and 22 is the light transmission characteristic when the double Fabry-Perot interferometer is OFF. This is a light transmission characteristic obtained by combining curves 23 and 24 when the double Fabry-Perot modulator is OFF.
ここで、前記と同様Ｒｍ６６俤、 Ｗ ＝Ｑ、１３３Ｘ
２ｄ 。Here, as above, Rm66, W = Q, 133X
2d.
Δｃｉ＝ｗとすると、特定波長帯域における曲線２１に
よる光透過率は７０）ｌキ、７６チ、曲線２２による光
透過率７０ｙｙキ ４チである。したがって特定波長帯
域の光変調度は約７０％に向上する。これはファブリペ
ロを２重にし、両者ｔ−１ｅ逆方向に変調したことによ
る効果で、特に光を遮断する機能が改善されていること
が明らかである。透過機能は若干低下するが、透過帯の
珍状が、急傾斜で立上り、立下っているので、透過率低
下の程度は少ない。When Δci=w, the light transmittance according to the curve 21 in the specific wavelength band is 70)l, 76ch, and the light transmittance according to the curve 22 is 70yyx4. Therefore, the degree of optical modulation in the specific wavelength band is improved to about 70%. This is the effect of duplicating Fabry-Perot and modulating both in t-1e opposite directions, and it is clear that the light blocking function is particularly improved. Although the transmission function is slightly reduced, since the transmission band has a unique shape with steep slopes rising and falling, the degree of reduction in transmittance is small.
変調器の機能として重要なものは、変調率であるが、こ
の変調率は微少間隔の金動率に左右されると同時に使用
する特定波長帯域の幅にも影響をうける。この特定波長
帯域の幅にあわせて、透過領域の半値幅を決定すること
が望ましい。An important function of a modulator is the modulation rate, which is influenced by the metal dynamic rate of minute intervals and also by the width of the specific wavelength band used. It is desirable to determine the half-width of the transmission region in accordance with the width of this specific wavelength band.
式（２）で示すように、この半値幅は平行平面の反射率
Ｒで決まるので、要求される仕様に基づいてＲ値の設計
をすることになる。但し、第２図に示すように、高次の
透過ピークが短波長側に存在するので、特定波長帯域の
幅には上限があり、最大で、中心波長（λｏ＝２ｎｄ）
の６０チ程度である。As shown in equation (2), this half-width is determined by the reflectance R of the parallel plane, so the R value is designed based on the required specifications. However, as shown in Figure 2, since the higher-order transmission peak exists on the short wavelength side, there is an upper limit to the width of the specific wavelength band, and the maximum is the center wavelength (λo = 2nd).
It is about 60 inches.
従って、第３図に示すように、平行平面の反射率は約２
４係以上でなければ、本変調器は機能を発揮しないこと
がわかる。Therefore, as shown in Figure 3, the reflectance of parallel planes is approximately 2.
It can be seen that this modulator does not function unless the ratio is 4 or higher.
特定波長帯域が狭くてよい場合、Ｒ値を大きくして透過
ピークの半値幅を狭くして、微少間隔の変動率を少くて
すむようにできる。従って、Ｒ値は変調器の要求仕様に
あわせて決定することになるが、この場合も２４チ以上
の反射率が必要である。If the specific wavelength band can be narrow, the R value can be increased to narrow the half-width of the transmission peak, so that the rate of fluctuation of minute intervals can be reduced. Therefore, the R value is determined according to the required specifications of the modulator, and in this case as well, a reflectance of 24 or more is required.
一方、外側に面する平面は、干渉現象になんらのかかわ
りもないことが望ましく、干渉面と平行でなくわすかな
角をなし又理想的には反射率Ｒはゼロがよい。現実には
、反射率をゼロにすることは不可能なので、なるべく反
射率を低くする。その反射率をＲｍとすると、この反射
による損失率は（２１ｍ −１ｍ２）である。実用上は
、Ｒｍ＝０．１で損失率が約２０チ程度まで許される。On the other hand, it is preferable that the plane facing the outside has no relation to the interference phenomenon, is not parallel to the interference surface but forms a slight angle, and ideally has a reflectance R of zero. In reality, it is impossible to reduce the reflectance to zero, so the reflectance is made as low as possible. If the reflectance is Rm, then the loss rate due to this reflection is (21 m -1 m2). In practice, when Rm=0.1, a loss rate of about 20 inches is allowed.
揶７図に本発明によるファブリペロ型変調器の一実施例
を示す。平板３１．３３はゲルマニウム板で外側の面は
硫化亜鉛蒸着膜で反射防止コーティングしてあり、特定
波長帯域１４〜１６μｍで平均反射率２チになっている
。中央の平板３２に対向した面と、中央の平板３２の両
面は反射率６６チにしてあり各々の間隔ｄは７．６μで
、平行度はλ／１０ｏ（λ＝１５．ｃｉ）である。平板
３１．３３は保持台３６に固定されており、中央の平板
３２は、積層圧電素子３４を介し゛て保持台にセットさ
れている。積層圧電素子３４は変調用電源３６から、電
圧を加えられることにより、厚さが１μｍ減少するよう
構成されており、したがって電圧印加により、平板３１
と３２の間隔は１μｍ減じ６．６μｍとなり、一方、平
板３２と３３の間隔は１μｍ増すので８．６μｍとなる
。この結果、各ファブリペロ干渉計の光透過特性は第６
図の曲線２３及び２４の状態になり両者の合成透過率は
曲線２２の状態になり、はとんど光を通さない。この実
施例ではＲｍによる光学損失を加味すると、電圧印加時
の光透過率（１４〜１６μｍ帯）は７ｏｙシ＝４チ印加
していない時の透過率は７０１ ＝ ７２ ａｌｌ、で
あり、光変調率は６８チを達成している。FIG. 7 shows an embodiment of a Fabry-Perot modulator according to the present invention. The flat plates 31 and 33 are germanium plates whose outer surfaces are anti-reflection coated with a zinc sulfide vapor-deposited film, and have an average reflectance of 2 cm in a specific wavelength band of 14 to 16 μm. The surface facing the central flat plate 32 and both sides of the central flat plate 32 have a reflectance of 66 inches, the distance d between each is 7.6 μ, and the parallelism is λ/10o (λ=15.ci). The flat plates 31 and 33 are fixed to a holding stand 36, and the central flat plate 32 is set on the holding stand via a laminated piezoelectric element 34. The laminated piezoelectric element 34 is configured such that its thickness decreases by 1 μm when a voltage is applied from the modulation power source 36.
The distance between the plates 32 and 32 is reduced by 1 μm to 6.6 μm, while the distance between the flat plates 32 and 33 is increased by 1 μm to 8.6 μm. As a result, the light transmission characteristics of each Fabry-Perot interferometer are
The state of curves 23 and 24 in the figure is reached, and the combined transmittance of both becomes the state of curve 22, where almost no light passes through. In this example, when optical loss due to Rm is taken into account, the light transmittance (14 to 16 μm band) when voltage is applied is 7oy = 4 The transmittance when no voltage is applied is 701 = 72 all, and the light modulation The rate has achieved 68chi.
実施例１の場合と同様の構成で、中央板を固定し、両側
の平板を積層圧電素子で変動させる方式を第８図８に示
す。図中第７図と同一部分には同一符号を付して説明を
省略する。４４．４５は積層圧電素子である。この場合
、平板３１と３３は互に同一方向に変位するように設計
する。実施例１と異るのは、この場合、変位の程度をそ
れぞれ別々に加減できるので、たとえば長波長側にかた
よらせる割合を少し押え気味にして、高次の透過ピーク
が特定波長帯域にかからないようにし、一方、短波長側
への変位は、゛ピークのすそ引きを考慮して大きめにす
ることができる。これによシ変調効率は７０％を越える
ことが出来た。FIG. 8 shows a system in which the center plate is fixed and the flat plates on both sides are moved by laminated piezoelectric elements, with the same configuration as in Example 1. Components in the figure that are the same as those in FIG. 7 are designated by the same reference numerals, and their explanation will be omitted. 44 and 45 are laminated piezoelectric elements. In this case, the flat plates 31 and 33 are designed to be mutually displaced in the same direction. The difference from Embodiment 1 is that in this case, the degree of displacement can be adjusted separately, so for example, the ratio of shifting toward longer wavelengths can be slightly suppressed so that the high-order transmission peak does not fall in a specific wavelength band. On the other hand, the displacement toward the short wavelength side can be made larger in consideration of the narrowing of the peak. As a result, the modulation efficiency was able to exceed 70%.
尚、第６図かられかるように本発明によるファプリペロ
ー変調器は、利用波長帯域のみに注目すると、フィルタ
の併用なしで変調できる。但し、１’ ”’ｆ１
高次の透過ピークを遮断しなければいけないので、利用
波長帯域及びそれよシ長波長帯域を透過し、隣接する高
次の透過ピーク及びそれよ〕短波長帯域を遮断するよう
なローパスフィルタの併用が必要である。As can be seen from FIG. 6, the Fabry-Perot modulator according to the present invention can perform modulation without using a filter if only the wavelength band to be used is focused. However, since it is necessary to block the higher-order transmission peak, the wavelength band used and the longer wavelength band are transmitted, and the adjacent higher-order transmission peak and the shorter wavelength band are blocked. It is necessary to use a low-pass filter such as
しかし、ローパスフィルタより比較的高価で、透過効率
が悪い帯域フィルタを使う必要はなくなる。However, it is no longer necessary to use a bandpass filter, which is relatively more expensive and has lower transmission efficiency than a low-pass filter.
また、積層圧電素子を用いることにより、第７図、第８
図に示すように、比較的容易に本発明の７アプリペロ変
調器を構成することができた。In addition, by using a laminated piezoelectric element, it is possible to
As shown in the figure, it was possible to construct the 7-approximate modulator of the present invention relatively easily.
以上のように本発明は３社の平板を利用して、各平板間
に形成される微少な間隔を、＝方の間隔が減少した′と
き他方の間隔が増大するよう変化させたブアブリベロ型
光学変調器あり、従来のファブν・σｂ型光孝変、調器
に比して変調度を大幅に向上させることができる。As described above, the present invention utilizes flat plates from three companies and changes the minute distance formed between each flat plate so that when the distance on the = side decreases, the distance on the other side increases. With a modulator, the degree of modulation can be significantly improved compared to conventional fab ν/σb type optical modulators and modulators.
第１図は従来のファブリペロ干渉器の構成を示す断面図
、第２図は第１図の７アプリペロ干渉器の透過特性を示
す図、第３図はファブリペロ干渉器し１次透過帯の半値
巾と平行平面の反射率の関堡を示す図、第４図は従来の
ファブリペロ変調器め変調の様子を示す図、第５図は本
発明のダブルファブリペロ干渉器の原理構成を示す断面
図、第６図は本発明によるファブリペロ型光変調器の変
調の様子を示す図、第７図は本発明によるファブリペロ
型光変調器の一実施例を示す断面図、第８図は本発明に
よるファブリペロ型光変調器の他の実施例を示す断面図
である。
１１．１２，１３・・・・・・透明な平板、１４・・・
・・・スペーサ、３１．３２．３３・・・・・・ゲルマ
ニウム平板、３４．４４．４５・・・・・・積層圧電素
子、３５・・・・・・保持台、３６・・・・・・電源。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名第１
図
ｄ
ボ眠艮（入λ
第３ｔ！１
第４図
第５図
４
第６図
第７図Figure 1 is a cross-sectional view showing the configuration of a conventional Fabry-Perot interferometer, Figure 2 is a diagram showing the transmission characteristics of the 7-application-Perot interferometer shown in Figure 1, and Figure 3 is a diagram showing the half-width of the first-order transmission band of the Fabry-Perot interferometer. 4 is a diagram showing the state of modulation in a conventional Fabry-Perot modulator, and FIG. 5 is a sectional view showing the principle configuration of the double Fabry-Perot interferometer of the present invention. FIG. 6 is a diagram showing the state of modulation of the Fabry-Perot optical modulator according to the present invention, FIG. 7 is a sectional view showing an embodiment of the Fabry-Perot optical modulator according to the present invention, and FIG. 8 is a diagram showing the Fabry-Perot optical modulator according to the present invention. FIG. 7 is a cross-sectional view showing another example of the optical modulator. 11.12,13...Transparent flat plate, 14...
... Spacer, 31.32.33 ... Germanium flat plate, 34.44.45 ... Laminated piezoelectric element, 35 ... Holding stand, 36 ... ·power supply. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Fig. d Bo Sleep (Enter λ) 3rd t! 1 Fig. 4 Fig. 5 Fig. 4 Fig. 6 Fig. 7
Claims (2)
以上の平面である光学板を中央に配し微少な間隔を介し
てその両側に前記平板をはさむように２枚の透明平板を
配装置し、中央部の平板の各面と両側の平板との向い合
う面との微少な間隔を、一方の間隔が減じている時は他
方は増大するように変化させることを特徴とするファブ
リペロ型光学変調器。(1) Transparent to a specific wavelength band, with a reflectance of 24% on both sides
The above-mentioned flat optical plate is placed in the center, and two transparent flat plates are placed on both sides of the flat plate with a slight interval between them, and each surface of the central flat plate is connected to the flat plates on both sides. A Fabry-Perot optical modulator characterized in that the minute distance between opposing surfaces is changed so that when one distance is decreased, the other distance is increased.
微少間隔を変化させることを特徴とする特許請求の範囲
第１項記載のファプリペロ 型光学変調器。(2) The Fappre-Perot optical modulator according to claim 1, characterized in that the minute spacing between the parallel planes is changed by energizing the laminated piezoelectric element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57037691A JPS58153902A (en) | 1982-03-09 | 1982-03-09 | Fabry-perot type optical modulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57037691A JPS58153902A (en) | 1982-03-09 | 1982-03-09 | Fabry-perot type optical modulator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58153902A true JPS58153902A (en) | 1983-09-13 |
| JPS628765B2 JPS628765B2 (en) | 1987-02-24 |
Family
ID=12504580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57037691A Granted JPS58153902A (en) | 1982-03-09 | 1982-03-09 | Fabry-perot type optical modulator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58153902A (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63271322A (en) * | 1987-04-30 | 1988-11-09 | Olympus Optical Co Ltd | Transmissivity characteristic varying element |
| JPS6446720A (en) * | 1987-07-15 | 1989-02-21 | American Telephone & Telegraph | Fabry-perot cavity |
| JPH0194312A (en) * | 1987-10-06 | 1989-04-13 | Sharp Corp | Variable interference device |
| JPH02262024A (en) * | 1989-02-21 | 1990-10-24 | Internatl Business Mach Corp <Ibm> | Tunable optical filter |
| JPH02278132A (en) * | 1989-02-21 | 1990-11-14 | Internatl Business Mach Corp <Ibm> | Optical filter |
| JPH04226412A (en) * | 1990-04-30 | 1992-08-17 | Internatl Business Mach Corp <Ibm> | Optical filter |
| JPH04232910A (en) * | 1990-05-31 | 1992-08-21 | Alcatel Nv | Optical apparatus |
| EP0667548A1 (en) * | 1994-01-27 | 1995-08-16 | AT&T Corp. | Micromechanical modulator |
| JP2004012642A (en) * | 2002-06-04 | 2004-01-15 | Nec Corp | Tunable filter, method of manufacturing the same, and optical switching apparatus using the same |
| JP2006189575A (en) * | 2005-01-05 | 2006-07-20 | Ricoh Co Ltd | Optical element, laser machining apparatus, and laser manipulation apparatus |
| JP2012108370A (en) * | 2010-11-18 | 2012-06-07 | Denso Corp | Wavelength-selective filter |
| JP2014233344A (en) * | 2013-05-31 | 2014-12-15 | Hoya株式会社 | Optical filter element, wavelength variable optical bandpass filter module, wavelength variable light source apparatus, and spectroscopic endoscope apparatus |
-
1982
- 1982-03-09 JP JP57037691A patent/JPS58153902A/en active Granted
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63271322A (en) * | 1987-04-30 | 1988-11-09 | Olympus Optical Co Ltd | Transmissivity characteristic varying element |
| JPS6446720A (en) * | 1987-07-15 | 1989-02-21 | American Telephone & Telegraph | Fabry-perot cavity |
| JPH0194312A (en) * | 1987-10-06 | 1989-04-13 | Sharp Corp | Variable interference device |
| JP2528533B2 (en) * | 1989-02-21 | 1996-08-28 | インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン | Tunable optical filter |
| JPH02262024A (en) * | 1989-02-21 | 1990-10-24 | Internatl Business Mach Corp <Ibm> | Tunable optical filter |
| JPH02278132A (en) * | 1989-02-21 | 1990-11-14 | Internatl Business Mach Corp <Ibm> | Optical filter |
| JPH04226412A (en) * | 1990-04-30 | 1992-08-17 | Internatl Business Mach Corp <Ibm> | Optical filter |
| JPH04232910A (en) * | 1990-05-31 | 1992-08-21 | Alcatel Nv | Optical apparatus |
| EP0667548A1 (en) * | 1994-01-27 | 1995-08-16 | AT&T Corp. | Micromechanical modulator |
| JP2004012642A (en) * | 2002-06-04 | 2004-01-15 | Nec Corp | Tunable filter, method of manufacturing the same, and optical switching apparatus using the same |
| JP2006189575A (en) * | 2005-01-05 | 2006-07-20 | Ricoh Co Ltd | Optical element, laser machining apparatus, and laser manipulation apparatus |
| JP4523420B2 (en) * | 2005-01-05 | 2010-08-11 | 株式会社リコー | Optical element, laser processing apparatus and laser manipulation apparatus |
| JP2012108370A (en) * | 2010-11-18 | 2012-06-07 | Denso Corp | Wavelength-selective filter |
| JP2014233344A (en) * | 2013-05-31 | 2014-12-15 | Hoya株式会社 | Optical filter element, wavelength variable optical bandpass filter module, wavelength variable light source apparatus, and spectroscopic endoscope apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS628765B2 (en) | 1987-02-24 |
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