JPS5454594A - Case of micro piezo-electric vibrator - Google Patents
Case of micro piezo-electric vibratorInfo
- Publication number
- JPS5454594A JPS5454594A JP12126377A JP12126377A JPS5454594A JP S5454594 A JPS5454594 A JP S5454594A JP 12126377 A JP12126377 A JP 12126377A JP 12126377 A JP12126377 A JP 12126377A JP S5454594 A JPS5454594 A JP S5454594A
- Authority
- JP
- Japan
- Prior art keywords
- case
- vibrator
- cover part
- metal layer
- fixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
- H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE:To facilitate fixing of the vibrator and facilitate the production of the case by forming the material of the case with an insulating material such as plate glass or other and providing the support parts for fixing of the vibrator protrusively from the cover part bond of the case. CONSTITUTION:In the case of the micro piezoelectric vibrator, the case for containing a crystal vibrator 15 is constituted by the portion where a raised part 8a is provided to a glass member 8 and a cover part 11. A conductive metal layer 9 is formed in thin film from the top of the raised part 8a to the tapered and bottom flat parts and further an insulation layer 10 is formed on the bottom flat part. A bonding metal layer 12 bonding to the cover part 11 is formed on the top part of said insulating layer 10 and the bottom flat part enclosing the vibrator 15. At the same time, an electrode lead-out part 13 and a vibrating fixing metal layer 14 are formed. A soft metal 16 is interposed between the bonding metal layer 12 and the bottom face of the cover part 11 of this constitution and these are vacuum sealed. A free space is formed between the bottom face of the case and the vibrator 15 and between the cover part 11 and vibrator 15.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12126377A JPS5454594A (en) | 1977-10-08 | 1977-10-08 | Case of micro piezo-electric vibrator |
US05/907,464 US4191905A (en) | 1977-06-17 | 1978-05-19 | Sealed housings for a subminiature piezoelectric vibrator |
GB23055/78A GB1602008A (en) | 1977-06-17 | 1978-05-26 | Subminiature piezoelectric vibrator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12126377A JPS5454594A (en) | 1977-10-08 | 1977-10-08 | Case of micro piezo-electric vibrator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5454594A true JPS5454594A (en) | 1979-04-28 |
Family
ID=14806914
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12126377A Pending JPS5454594A (en) | 1977-06-17 | 1977-10-08 | Case of micro piezo-electric vibrator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5454594A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5940715A (en) * | 1982-04-27 | 1984-03-06 | Toyo Commun Equip Co Ltd | Package of piezoelectric oscillator |
US6545392B2 (en) * | 2000-03-15 | 2003-04-08 | Seiko Epson Corporation | Package structure for a piezoelectric resonator |
JP2007129326A (en) * | 2005-11-01 | 2007-05-24 | Seiko Instruments Inc | Piezoelectric resonator and manufacturing method thereof, oscillator, radio wave clock and electronic equipment |
-
1977
- 1977-10-08 JP JP12126377A patent/JPS5454594A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5940715A (en) * | 1982-04-27 | 1984-03-06 | Toyo Commun Equip Co Ltd | Package of piezoelectric oscillator |
US6545392B2 (en) * | 2000-03-15 | 2003-04-08 | Seiko Epson Corporation | Package structure for a piezoelectric resonator |
JP2007129326A (en) * | 2005-11-01 | 2007-05-24 | Seiko Instruments Inc | Piezoelectric resonator and manufacturing method thereof, oscillator, radio wave clock and electronic equipment |
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