JPS5128494B2 - - Google Patents
Info
- Publication number
- JPS5128494B2 JPS5128494B2 JP8951871A JP8951871A JPS5128494B2 JP S5128494 B2 JPS5128494 B2 JP S5128494B2 JP 8951871 A JP8951871 A JP 8951871A JP 8951871 A JP8951871 A JP 8951871A JP S5128494 B2 JPS5128494 B2 JP S5128494B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Dicing (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8951871A JPS5128494B2 (en) | 1971-11-09 | 1971-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8951871A JPS5128494B2 (en) | 1971-11-09 | 1971-11-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4854867A JPS4854867A (en) | 1973-08-01 |
| JPS5128494B2 true JPS5128494B2 (en) | 1976-08-19 |
Family
ID=13973003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8951871A Expired JPS5128494B2 (en) | 1971-11-09 | 1971-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5128494B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6330142Y2 (en) * | 1979-10-23 | 1988-08-12 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3888685T2 (en) * | 1988-10-10 | 1994-10-20 | Ibm | Method for breaking a plate-shaped workpiece, in particular a semiconductor wafer, and device for breaking said workpiece sandwiched between two foils. |
| JPH04352452A (en) * | 1991-05-30 | 1992-12-07 | Sharp Corp | Dividing method for wafer |
| JP6866664B2 (en) * | 2017-02-06 | 2021-04-28 | 日亜化学工業株式会社 | Manufacturing method of light emitting device |
-
1971
- 1971-11-09 JP JP8951871A patent/JPS5128494B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6330142Y2 (en) * | 1979-10-23 | 1988-08-12 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4854867A (en) | 1973-08-01 |