JPH0545217A - Method for adjusting line sensor - Google Patents

Abstract

PURPOSE:To adjust the direction of a light-receiving axis of a line sensor, which is formed by arranging light receiving parts in a straight line, easily in a short time. CONSTITUTION:An adjusting tool 4, which is provided with a light source 2, a reflecting surface 3 for reflecting the light from the light source 2 so as to form a narrow linear beam, and a positioning mark 5, is used. At the time of setting the adjusting tool 4, the positioning mark 5 is positioned at a reference so that a beam axis to be reflected by the reflecting surface 3 coincides with an object light-receiving axis of the line sensor 1. The beam reflected by the reflecting surface 3 is received by the line sensor 1, and while the direction of the line sensor 1 is adjusted so that light-receiving quantity of each light receiving part 1a of the line sensor 1 is equal to each other. The beam reflected by the reflecting surface 3 of the adjusting tool 4 is received by the line sensor 1, and the direction of the line sensor 1 can be adjusted, looking at the condition of the light receiving signal. Setting of the adjusting tool 4 is facilitated by setting the positioning mark 5 as a reference.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of adjusting a line sensor for receiving reflected light from a material to be inspected and performing inspection.

[0002]

2. Description of the Related Art As shown in FIG. 4, a surface inspection machine, a sheet material inspection machine, a copper clad laminate inspection machine, etc. irradiate the surface of a material 10 to be inspected which is sent on an inspection table 9 in an inspection process with light. In addition, the reflected light from this surface is received by the line sensor 1,
By processing the received light signal with an image processing device or the like and analyzing it, the surface condition of the inspected material 10 can be inspected. In this inspection machine, the line sensor 1 is formed by arranging a large number of light receiving portions 1a formed of light receiving elements in a linear array as shown in FIG. By passing the inspection material 10, the surface of the inspection material 10 can be inspected in a wide range.

However, since the line sensor 1 is formed by providing the light receiving portion 1a in a slender linear shape as described above, the light receiving axis (line of sight) of the line sensor 1 is one plane (perpendicular to the paper surface of FIG. 4). When the line sensor 1 tilts in the direction of the arrow in FIG. 4B with respect to the position where the line sensor 1 is normally set, that is, in the direction perpendicular to the plane of the light receiving axis, The surface inspection of the inspection material 10 cannot be performed correctly.

[0004]

Therefore, the signal received by the line sensor 1 is recorded in a memory to obtain an image, and the direction of the line sensor 1 is determined from this image. Although it has been attempted to adjust the orientation, this method has a problem that it takes time and effort.

The present invention has been made in view of the above points, and an object thereof is to make it possible to easily adjust the direction of a line sensor in a short time.

[0006]

A method of adjusting a line sensor according to the present invention includes a light source 2 and a light source 2 for adjusting a direction of a light receiving axis of a line sensor 1 formed by linearly arranging light receiving portions 1a. Using the adjustment jig 4 formed by providing the reflecting surface 3 that reflects the light from the light source 2 as a long and narrow linear luminous flux and providing the alignment mark 5 in the vicinity of the reflecting surface 3, Alignment mark 5 so that the light axis reflected by the reflecting surface 3 coincides with the light receiving axis.
The adjustment jig 4 is set with reference to the line, and the light beam reflected by the reflecting surface 3 is received by the line sensor 1 and the light receiving amount of each light receiving portion 1a of the line sensor 1 is set to be substantially equal. It is characterized in that the orientation of the sensor 1 is adjusted.

[0007]

Function: The light ray reflected from the reflecting surface 3 of the adjusting jig 4 is received by the line sensor 1, and the direction of the line sensor 1 is adjusted while observing the state of the received light signal to perform the adjustment in real time. You can Further, the adjustment jig 4 can be set accurately and quickly by aligning with the alignment mark 5 as a reference.

[0008]

EXAMPLES The present invention will be described in detail below with reference to examples. Figure 3
Shows an adjustment jig 4 used in the present invention, which is formed by providing a light source cover 12 which is opened only on the front surface on a rear upper surface of a plate-shaped substrate 11 and mounting a reflector 13 on the front portion of the substrate 11. I am doing it. Inside the light source cover 12, a light source 2 formed of a straight tube fluorescent lamp that linearly irradiates light or a linearly arranged glass fiber is attached, and the inner surface of the light source cover 12 is painted black to form a light source. The light from 2 is reflected and prevented from leaking. Reflector 13
Is formed by projecting a reflecting portion 16 on the upper surface of the front edge of the connecting plate piece 15 as shown in FIG. The reflecting portion 16 is formed as a member that is long in parallel with the light source 2, and the reflecting surface 3 is formed on the inclined surface of the reflecting portion 16 facing the light source 2 side.
Is formed. The reflecting surface 3 is formed as a mirror or a metal polishing surface, and is formed as an elongated surface parallel to the light source 2. Therefore, the light emitted from the light source 2 is reflected by the reflecting surface 3 as an elongated linear luminous flux. Further, inclined surfaces 17 are formed at both ends of the reflecting portion 16 so as to extend from the upper end of the reflecting portion 16 to the lower end of the reflecting portion 16, and each of the inclined surfaces 17 extends the reflecting surface 3 in the longitudinal direction. The alignment mark 5 is displayed and provided as a straight line along the line. The alignment mark 5 is provided so as to extend from the upper end to the lower end of the inclined surface 20. Reflector 13
For example, as shown in FIG. 3, an engaging recess 17 is provided on the front edge of the substrate 11, an engaging projection 18 is provided on the connection plate piece 15, and the engaging projection 18 is engaged with the engaging recess 17. The adjustment jig 4 is detachably attached to the front end of the substrate 11. Several kinds of reflectors 13 having different inclination angles of the reflecting surface 3 are prepared.

On the other hand, the line sensor 1 is formed by linearly arranging a large number of light receiving portions 1a formed of light receiving elements, and the light receiving portion 1 is provided above the inspection table 9 in the inspection process.
It is arranged horizontally with a facing downward. In adjusting the orientation of the line sensor 1 arranged in this way,
First, as shown in FIG. 1A, the adjustment jig 4 is attached to the line sensor 1
It is placed and set on the inspection table 9 at a position below.
The setting position of the adjusting jig 4 is predetermined on the inspection table 9. That is, the line sensor 1 in the correct direction
Is arranged, the light receiving axis of the line sensor 1 is also set in the correct direction.
Of the adjusting jig 4 such that the optical axis of the bundle of light rays reflected by the reflecting surface 3 coincides with the light receiving axis of the reflecting surface 3, that is, the longitudinal direction of the reflecting surface 3 is parallel to the longitudinal direction of the line sensor 1. The set position is fixed. When the adjusting jig 4 is set and light is emitted from the light source 2 in this way, the light is reflected by the reflecting surface 3 as a long and narrow linear light beam, and is received by each light receiving portion 1 a of the line sensor 1. At this time,
When the surface 1c of the light receiving axis of the line sensor 1 does not coincide with the direction of the reflecting surface 3 as shown in (a) b,
The light reflected by the reflecting surface 3 is received only by a part of the light receiving portions 1a of the line sensor 1, and a light receiving signal curve having a narrow peak as shown by B in FIG. 2A is obtained. . This light reception signal curve can be displayed on the image processing device 14 connected to the line sensor 1 and can be confirmed in real time, and it can be confirmed that the orientation of the line sensor 1 is incorrect.

When the orientation of the line sensor 1 is thus incorrect, the image processing device 14 adjusts the orientation by rotating the line sensor 1 in the horizontal direction while checking the light reception signal curve. When the surface 1c of the light receiving axis of the line sensor 1 is aligned with the direction of the reflection surface 3 as shown in 2 (b), the light reflected by the reflection surface 3 is arranged in a straight line in the line sensor 1. The light is received by all the light receiving sections 1a, and a light receiving signal curve having a flat peak as shown by B in FIG. 2B is obtained. Since this received light signal curve can be displayed on the image processing device 14 connected to the line sensor 1 and confirmed in real time,
The orientation of the line sensor 1 can be correctly adjusted in real time while observing the received light signal curve displayed by the image processing device 14.

When the adjusting jig 4 is set to adjust the direction of the line sensor 1 as described above, the reflecting surface 3 of the adjusting jig 4 is provided at the height h. It is difficult to position the adjusting jig 4 on the basis of the reflecting surface 3. Therefore, in the present invention, the alignment jig 5 is provided with the alignment mark 5, and the alignment mark 5 is aligned with, for example, the reference line 19 provided on the surface of the inspection table 9, so that the alignment jig 5 is adjusted. Positioning can be done. Moreover, as shown in FIG. 1B, since the alignment mark 5 is provided so as to reach the lower end of the adjustment jig 4, the reference line 19 on the surface of the inspection table 9 and the alignment mark 5 are directly aligned. The adjustment jig 4 can be positioned with high accuracy. The reference line 19 is a line drawn along the light receiving axis of the line sensor 1 when the line sensor 1 is arranged in the correct orientation.

Further, as shown by a solid line and a chain line in FIG. 1A, when the mounting angles of the line sensors 1 are different, the reflecting surface 3 of the adjusting jig 4 is inclined according to the mounting angles of the respective line sensors 1. Although it is necessary to change the angle, there are several types of reflectors 13 having different inclination angles of the reflection surface 3, so that the reflection surface 3 having the reflection surface 3 that is inclined according to the inclination angle of the line sensor 1 is prepared. By replacing it with body 13,
It can be dealt with easily. The adjustment accuracy of the line sensor 1 can be improved by reducing the width d of the reflecting surface 3 of the adjustment jig 4, and if the light source 2 emits a parallel light beam, the line sensor can be adjusted. The accuracy of adjustment 1 can be further increased.

[0013]

As described above, according to the present invention, when adjusting the direction of the light receiving axis of the line sensor formed by arranging the light receiving portions in a straight line, the light source and the light from the light source are elongated linear light fluxes. Using an adjustment jig that is formed by providing a reflection surface that reflects light, set the adjustment jig so that the light axis reflected by the reflection surface matches the light receiving axis of the line sensor to be set. Since the line sensor receives the reflected light ray and adjusts the direction of the line sensor so that the light receiving amounts of the light receiving portions of the line sensor are substantially equal, the light ray reflected from the reflecting surface of the adjustment jig is adjusted. It is possible to easily adjust the direction of the line sensor in real time by receiving the light with the line sensor and adjusting the direction of the line sensor while observing the state of the received light signal. Further, since the alignment mark is provided in the vicinity of the reflection surface and the adjustment jig is set based on the alignment mark, the adjustment jig can be set accurately and quickly. It is a thing.

[Brief description of drawings]

FIG. 1 shows an embodiment of the present invention, in which (a) is a schematic configuration diagram and (b) is a perspective view of a reflector.

2A and 2B show an operation of adjusting the orientation of the line sensor in the above, wherein FIG. 2A shows a state where the orientation of the line sensor is incorrect, and FIG. 2B shows a state where the orientation of the line sensor is adjusted correctly. It is a figure explaining.

FIG. 3 is a perspective view of the above adjustment jig.

4A and 4B show a surface inspection by a line sensor, wherein FIG. 4A is a schematic sectional view and FIG. 4B is a schematic plan view.

[Explanation of symbols]

 1 Line sensor 2 Light source 3 Reflective surface 4 Adjustment jig 5 Alignment mark

Claims (1)

[Claims] 1. A light source and a reflecting surface for reflecting light from the light source as an elongated linear luminous flux when adjusting the direction of the light receiving axis of a line sensor formed by arranging light receiving portions in a straight line. Using an adjustment jig that is provided with an alignment mark near the reflection surface, align with the alignment mark so that the light axis of the line sensor is aligned with the light receiving axis of the line sensor to be set. Then, the adjustment jig is set, the light rays reflected by the reflecting surface are received by the line sensor, and the orientation of the line sensor is adjusted so that the light receiving amounts of the respective light receiving portions of the line sensor are substantially equal. How to adjust the line sensor.