JPH0226278A - Ultrasonic motor - Google Patents

Ultrasonic motor

Info

Publication number
JPH0226278A
JPH0226278A JP63173346A JP17334688A JPH0226278A JP H0226278 A JPH0226278 A JP H0226278A JP 63173346 A JP63173346 A JP 63173346A JP 17334688 A JP17334688 A JP 17334688A JP H0226278 A JPH0226278 A JP H0226278A
Authority
JP
Japan
Prior art keywords
trapezoidal
ultrasonic motor
protrusion
projected
vibrating body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63173346A
Other languages
Japanese (ja)
Other versions
JP2543145B2 (en
Inventor
Takahiro Nishikura
西倉 孝弘
Katsu Takeda
克 武田
Osamu Kawasaki
修 川崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP63173346A priority Critical patent/JP2543145B2/en
Publication of JPH0226278A publication Critical patent/JPH0226278A/en
Application granted granted Critical
Publication of JP2543145B2 publication Critical patent/JP2543145B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To lengthen the lifetime of a motor and to improve its reliability either by keeping trapezoidal inclination to a projected body of an oscillating body in the circumferential direction or in the diametrical direction, or by keeping curvature to the contact surface of the projected body with the frictional material. CONSTITUTION:An oscillating body 22 of a disc type ultrasonic motor is composed of an elastic body 20 and a piezoelectric body 21. On this occasion, projected bodies 23 are provided to the oscillating body 22 which have trapezoidal inclinations in the circumferential direction. The width of the vertex of each trapezoidal projected body 23 therefore becomes narrow, so that the contact state of a friction material with the trapezoidal projected body 23 is always constant. There will be no scratch caught by the angles of the projected body 23 even in a low speed rotation and the motor can rotate stably. Flexural rigidity can also be reduced. By the way, a projected body 23 may have a trapezoidal inclination in the diametrical direction or may have a curvature to the contact surface with the friction material.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は圧電体の弾性振動を用いて駆動力を発生する超
音波モータの突起体形状に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to the shape of a protrusion of an ultrasonic motor that generates driving force using elastic vibrations of a piezoelectric body.

従来の技術 近年、圧電セラミック等の圧電体を用いた振動体に弾性
振動を励振し、これを駆動力とした超音波モータが注目
されている。
2. Description of the Related Art In recent years, ultrasonic motors have attracted attention in which elastic vibrations are excited in a vibrating body using a piezoelectric material such as a piezoelectric ceramic, and the vibrations are used as a driving force.

以下、図面を参照しながら超音波モータの従来技術につ
いて詳細に説明する。
Hereinafter, the conventional technology of an ultrasonic motor will be explained in detail with reference to the drawings.

第4図は径方向1次、周方向3次以上の円環形超音波モ
ータの切り欠き斜視図であり、円環形の弾性体1に円環
膨圧電体2を貼合せて振動体3を構成している。4は耐
磨耗性材料の摩擦材、5は弾性体であり、互いに貼合せ
られて移動体6を構成している。移動体6は摩擦材4を
介して振動体3と接触している。圧電体2に電界を印加
すると振動体3の周方向に曲げ振動の進行波が励起され
、移動体6を駆動する。尚、同図中の矢印は移動体6の
回転方向を示す。
FIG. 4 is a cutaway perspective view of an annular ultrasonic motor with primary order in the radial direction and tertiary or higher order in the circumferential direction. are doing. Reference numeral 4 indicates a friction material made of a wear-resistant material, and reference numeral 5 indicates an elastic body, which are pasted together to form a moving body 6. The moving body 6 is in contact with the vibrating body 3 via the friction material 4. When an electric field is applied to the piezoelectric body 2, a traveling wave of bending vibration is excited in the circumferential direction of the vibrating body 3, thereby driving the movable body 6. Note that the arrow in the figure indicates the rotation direction of the moving body 6.

第5図は第4図の超音波モータに使用した圧電体2の電
極構造の一例を示している。同図では円周方向に9波の
弾性波がのるようにしである。AおよびBはそれぞれ2
分の1波長相当の小領域から成る電極群で、Cは4分の
3波長相当、Dは4分の1波長相当の電極である。電極
CおよびDは電極群AとBに位置的に4分の1波長く=
90度)の位相差を作るために設けている。電極AとB
内の隣り合う小電極部は互いに反対に厚み方向に分極さ
れている。圧電体2の弾性体1との接着面は、第5図に
示めされた面と反対の面であり、電極はベタ電極である
。使用時には、電極群AおよびBは同図に斜線で示した
ように、それぞれ短絡して用いられる。
FIG. 5 shows an example of the electrode structure of the piezoelectric body 2 used in the ultrasonic motor of FIG. In the figure, nine elastic waves are placed in the circumferential direction. A and B are each 2
This is an electrode group consisting of a small region corresponding to one-quarter wavelength, where C is an electrode corresponding to three-quarter wavelength and D is an electrode corresponding to one-quarter wavelength. Electrodes C and D are positionally 1/4 wave longer than electrode groups A and B =
This is provided to create a phase difference of 90 degrees. Electrodes A and B
Adjacent small electrode portions within the electrode are polarized in opposite directions in the thickness direction. The adhesive surface of the piezoelectric body 2 with the elastic body 1 is the opposite surface to the surface shown in FIG. 5, and the electrode is a solid electrode. During use, electrode groups A and B are short-circuited, as indicated by diagonal lines in the figure.

以上のように構成された超音波モータの圧電体2の電極
AおよびBに V 1−V o xsin(ωt)       −−
−(1)V2−V○xcos(ωt)−−−(2)ただ
し、vo:電圧の瞬時値 ω:角周波数 t:時間 で表される電圧v1およびv2をそれぞれ印加すれば、
振動体3には ξ−ξo ×(cos(ωt)xcos(kx)+5i
n(ωt)xsin(kx)) −vo xcos(ωt−kx )      −−−
(3)ただし ξ:曲げ振動の振幅値 ξ0:曲げ振動の瞬時値 k :波数(2π/λ) λ:波長 X :位置 で表せる、円周方向に進行する曲げ振動の進行波が励起
される。
V 1 -V ox sin (ωt) -- to the electrodes A and B of the piezoelectric body 2 of the ultrasonic motor configured as above.
-(1)V2-V○xcos(ωt)---(2) However, vo: Instantaneous value of voltage ω: Angular frequency t: If voltages v1 and v2 expressed in time are respectively applied,
The vibration body 3 has ξ−ξo×(cos(ωt)xcos(kx)+5i
n(ωt)xsin(kx)) −vo xcos(ωt−kx) ---
(3) where ξ: amplitude value of bending vibration ξ0: instantaneous value of bending vibration k: wave number (2π/λ) λ: wavelength .

第6図は振動体3の表面のA点が進行波の励起によって
、長軸2w、短軸2uの楕円運動をし、振動体3上に加
圧して設置された移動体6が、楕円の頂点近傍で接触す
ることにより、摩擦力により波の進行方向とは逆方向に
V−ω×uの速度で運動する様子を示している。
FIG. 6 shows that point A on the surface of the vibrating body 3 moves in an ellipse with the long axis 2w and the short axis 2u due to the excitation of the traveling wave, and the movable body 6 placed under pressure on the vibrating body 3 moves in an ellipse. This figure shows how the waves move at a speed of V-ω×u in the direction opposite to the direction of wave travel due to frictional force due to contact near the apex.

機械出力を大きくとるには、振動体の進行方向の変位成
分Uを太き(すればよい。そのために、第7図に示すよ
うに振動体に柱状の突起体7を設ける。柱状の突起体7
により、曲げ振動による進行方向の成分Uは拡大される
ので、機械出力を増大できる。
In order to increase the mechanical output, the displacement component U in the traveling direction of the vibrating body should be made thicker.For this purpose, as shown in FIG. 7, a columnar protrusion 7 is provided on the vibrator. 7
As a result, the component U in the traveling direction due to bending vibration is expanded, so that the mechanical output can be increased.

第8図は径方向2次、周方向3次以上の曲げ撮動モード
を使用した円板形超音波モータの切り欠き斜視図である
。円板形の弾性体8に円板形圧電体9を貼合せて振動体
10を構成している。11は耐磨耗性材料の摩擦材、1
2は弾性体であり、互いに貼合せられて移動体13を構
成している。
FIG. 8 is a cutaway perspective view of a disc-shaped ultrasonic motor using a bending imaging mode of 2nd order in the radial direction, 3rd order or more in the circumferential direction. A vibrating body 10 is constructed by bonding a disk-shaped piezoelectric body 9 to a disk-shaped elastic body 8. 11 is a friction material made of wear-resistant material; 1
Reference numeral 2 denotes an elastic body, which is pasted together to form the movable body 13.

移動体13は摩擦材11を介して振動体10に設けられ
た柱状の突起体15と加圧接触している。
The movable body 13 is in pressure contact with a columnar protrusion 15 provided on the vibrating body 10 via the friction material 11 .

圧電体9に電界を印加すると振動体10の周方向に曲げ
振動の進行波が励起され、移動体13は回転軸14を中
心にして回転する。
When an electric field is applied to the piezoelectric body 9, a traveling wave of bending vibration is excited in the circumferential direction of the vibrating body 10, and the movable body 13 rotates about the rotation axis 14.

第9図は円板形超音波モータの振動体10の振動状態と
径方向の撮動変位分布図である。機械出力を太き(とる
ためには、変位の大きいところから出力を取り出せばよ
いので、変位の最大点に柱状の突起体15を設けている
FIG. 9 is a diagram showing the vibration state of the vibrating body 10 of the disc-shaped ultrasonic motor and the photographed displacement distribution in the radial direction. In order to obtain a large mechanical output, it is sufficient to extract the output from a location where the displacement is large, so a columnar protrusion 15 is provided at the point of maximum displacement.

第10図は柱状の突起体16近傍の超音波モータの動作
のモデル図である。柱状の突起体16の先端は摩擦材1
7に接触して、摩擦力で移動体18を駆動する。柱状の
突起体16の先端の接触面はいつも摩擦材17と平行で
はな(、その角から接触する、一方、柱状の突起体16
と摩擦材17との接触は、突起体16の周方向の幅18
がかなりの値(例えば2〜5 m m )を持つため、
常に一定の状態ではない。また、柱状の突起体16の接
触面の角がでていたりバリが出ていると、ある瞬間、摩
擦材17が突起体16の角と接触するので、摩擦材17
を機械的に損傷したり、接触面積が小さ(なり、動力伝
達が効率良くできないという問題がある。
FIG. 10 is a model diagram of the operation of the ultrasonic motor in the vicinity of the columnar protrusion 16. The tip of the columnar protrusion 16 is the friction material 1
7 and drives the moving body 18 by frictional force. The contact surface of the tip of the columnar protrusion 16 is not always parallel to the friction material 17 (it comes into contact with it from its corner, but the contact surface of the columnar protrusion 16
The contact between the friction material 17 and the circumferential width 18 of the protrusion 16
has a considerable value (e.g. 2-5 mm), so
It's not always in a constant state. Furthermore, if the contact surface of the columnar protrusion 16 has protruding corners or burrs, the friction material 17 will come into contact with the corner of the protrusion 16 at a certain moment.
There are problems in that the contact area may be mechanically damaged or the contact area may become small, resulting in inefficient power transmission.

また、柱状の突起体16と摩擦材17との接触状態が一
定しないため、低速回転時においてその影響が太き(、
特性が不安定になるという問題がある。
In addition, since the contact state between the columnar protrusion 16 and the friction material 17 is not constant, the influence is greater during low speed rotation (,
There is a problem that the characteristics become unstable.

発明が解決しようとする課題 従来の超音波モータは、機械出力の取り出しを柱状の突
起体16でおこなうため、接触状態を一定にできず、摩
擦材17を損傷したり、動力伝達の効率が悪(出力効率
が小さいという問題点がある。
Problems to be Solved by the Invention In conventional ultrasonic motors, the mechanical output is extracted using the columnar protrusions 16, so the contact state cannot be kept constant, which may damage the friction material 17 or reduce the efficiency of power transmission. (There is a problem that the output efficiency is low.

本発明はかかる点に鑑みてなされたもので、出力の大き
く、効率の良い、しかも長寿命で高信頼性の超音波モー
タを提供することを目的としている。
The present invention has been made in view of these points, and an object of the present invention is to provide an ultrasonic motor that has a large output, high efficiency, long life, and high reliability.

課題を解決するための手段 振動体の移動体との接触面に、周方向において台形状の
突起体を設け、接触面に接触して設置された移動体を駆
動する。
Means for Solving the Problem A trapezoidal protrusion is provided in the circumferential direction on the contact surface of the vibrating body with the movable body, and the movable body placed in contact with the contact surface is driven.

作  用 上記のように構成することにより、接触状態を一定に保
つとともに摩擦材を機械的に損傷するすることなく、し
かも効率良(振動体の振動を移動体に伝達することがで
き、低速回転時でも安定で、出力の大きい、効率の良い
、しかも長寿命で高信頼性の超音波モータを実現するこ
とができる。
Function By configuring as described above, the contact state is kept constant, the friction material is not mechanically damaged, and it is efficient (the vibration of the vibrating body can be transmitted to the moving body, allowing low-speed rotation This makes it possible to realize an ultrasonic motor that is stable, has a large output, is highly efficient, has a long life, and is highly reliable.

実施例 実施例1 以下、図面に従って本発明の実施ff1l 1について
詳細な説明を行う。
Embodiments Embodiment 1 Hereinafter, embodiment ff1l1 of the present invention will be described in detail with reference to the drawings.

第1図は本発明の円板形超音波モータの振動体の斜視図
である。同図において、弾性体20は圧電体21と共に
振動体22を構成している。23は振動体22に設けら
れた周方向に台形状の傾斜をもつ突起体である。従って
、台形状の突起体23の頂点の幅は狭くなり、摩擦材1
7と台形状の突起体23との接触状態は常に一定で、低
速回転時でも突起体23の角による引っ掛かりがな(安
定して回転することができる。また、台形状の突起体2
3とすることにより、曲げ剛性を小さ(できるため曲げ
振動による進行方向の速度成分Uを拡大されるため、機
械出力を大きくとれる。また突起体23の角で摩擦材1
7を機械的に損傷することもない。また、ここでは詳細
に記述しないが、円環形超音波モータに対しても全(同
様である。
FIG. 1 is a perspective view of a vibrating body of a disc-shaped ultrasonic motor of the present invention. In the figure, an elastic body 20 and a piezoelectric body 21 constitute a vibrating body 22. 23 is a protrusion provided on the vibrating body 22 and having a trapezoidal slope in the circumferential direction. Therefore, the width of the apex of the trapezoidal protrusion 23 becomes narrower, and the friction material 1
The contact state between the trapezoidal protrusion 23 and the trapezoidal protrusion 7 is always constant, and even when rotating at low speed, there is no catch by the corners of the protrusion 23 (stable rotation is possible.
3, the bending rigidity can be reduced (as a result, the velocity component U in the traveling direction due to bending vibration can be expanded, so a large mechanical output can be obtained.Furthermore, at the corner of the protrusion 23, the friction material 1
7 will not be mechanically damaged. Further, although not described in detail here, the same applies to the annular ultrasonic motor.

実施例2 以下、図面に従って本発明の実施例2について詳細な説
明を行う。
Example 2 Example 2 of the present invention will be described in detail below with reference to the drawings.

第2図は本発明の円板形超音波モータの振動体の斜視図
である。同図において、実施例1と異なる点は、周方向
に台形状の傾斜を持つ突起体24に径方向にも同様に台
形状の傾斜を設けた点である。これにより、加工時や圧
電体接着時等に振動体22に生じた静撓みによる摩擦材
17と突起体24との径方向の不均一接触状態を一定に
保つことにより、さらに、特性の安定化が図れるもので
ある。
FIG. 2 is a perspective view of the vibrating body of the disc-shaped ultrasonic motor of the present invention. In the figure, the difference from Example 1 is that the protrusion 24 having a trapezoidal slope in the circumferential direction is also provided with a trapezoidal slope in the radial direction. This further stabilizes the characteristics by keeping constant the uneven contact state in the radial direction between the friction material 17 and the protrusion 24 due to static deflection that occurs in the vibrating body 22 during processing or piezoelectric bonding. This is something that can be achieved.

実施例3 以下、図面に従って本発明の実施例3について詳細な説
明を行う。
Example 3 Hereinafter, Example 3 of the present invention will be described in detail with reference to the drawings.

第3図は本発明の円板形超音波モータの振動体の斜視図
である。同図において、弾性体20は圧電体21と共に
振動体22を構成している。そして、突起体の摩擦材1
7と接する面に振動体22の弾性振動の1/2波長より
小さい曲率を持つ突起体25を設けたものである。
FIG. 3 is a perspective view of the vibrating body of the disc-shaped ultrasonic motor of the present invention. In the figure, an elastic body 20 and a piezoelectric body 21 constitute a vibrating body 22. And the friction material 1 of the protrusion
A protrusion 25 having a curvature smaller than 1/2 wavelength of the elastic vibration of the vibrating body 22 is provided on the surface in contact with the vibrating body 7 .

これにより、常に一点で摩擦材と曲率を持つ突起体25
が接触するため、振動体の初期撓みの影響や摩擦材17
の面精度にほとんど影響されず、安定した特性かえられ
るものである。また、摩擦材17を損傷させることもな
く長寿命化がはかれる。
As a result, the friction material and the protrusion 25 with curvature are always located at one point.
contact, the influence of the initial deflection of the vibrating body and the friction material 17
It is almost unaffected by the surface accuracy of the surface, and stable characteristics can be changed. Furthermore, the friction material 17 is not damaged and its life can be extended.

ここでは、周方向に台形状の傾斜を持つ突起体23に曲
率を設けたものについて述べたが、突起体の形状はこの
限りではな(、柱状でも、径方向に台形状の傾斜を持つ
突起体24でも良(、また径方向に曲率を同時に持たせ
ても良い事は言うまでもない。
Here, we have described the protrusion 23 having a trapezoidal inclination in the circumferential direction with a curvature, but the shape of the protrusion is not limited to this. It goes without saying that the body 24 may be used (and it goes without saying that it may also have curvature in the radial direction at the same time).

発明の効果 本発明では、振動体の突起体に周方向あるいは径方向に
台形状の傾斜を持たせたり、突起体の摩擦材と接する面
に曲率を持たせることにより、曲げ剛性を小さ(できる
とともに、接触状態を常に一定状態に保つことができる
ので、振動を移動体に効率良く伝達でき、よって、出力
の大きい、効率の良い、しかも摩擦材の機械的損傷を小
さくすることにより、長寿命で低速回転時においても安
定に回転する信頼性の高い超音波モータを提供できる。
Effects of the Invention In the present invention, the bending rigidity can be reduced by giving the protrusions of the vibrating body a trapezoidal inclination in the circumferential or radial direction, and by giving the protrusions a curvature to the surface in contact with the friction material. At the same time, since the contact state can always be kept constant, vibrations can be efficiently transmitted to the moving object, resulting in large output and high efficiency, as well as a long life by minimizing mechanical damage to the friction material. This makes it possible to provide a highly reliable ultrasonic motor that rotates stably even at low speeds.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例における円板形超音波モータ
の振動体の斜視図、第2図は本発明の第2の実施例にお
ける円板形超音波モータの振動体の斜視図、第3図は本
発明の第3の実施例における円板形超音波モータの振動
体の斜視図、第4図は従来の円環形超音波モータの切り
欠き斜視図、第5図は第4図の超音波モータに用いた圧
電体の形状と電極構造を示す平面図、第6図は超音波モ
ータの動作原理の説明図、第7図は振動体に突起体を設
けた円環形超音波モータの切り欠き斜視図、第8図は従
来の円板形超音波モータの切り欠き斜視図、第9図は円
板形振動体の径方向の変位分布図、第10図は突起体近
傍の超音波モータの動作のモデル図である。 20・・・・・・弾性体、21・・・・・・圧電体、2
2・・・・・・振動体、23・・・・・・周方向に台形
状の傾斜を持つ突起体24・・・・・・径方向にも台形
状の傾斜を持つ突起体、25・・・・・・曲率を持つ突
起体。 代理人の氏名 弁理士 粟野重孝 ほか1名1図 第2図 第 図 25向卑と符つ突起体 第 図 第 図 第 図 第 図 第 図 第 図 ハ
FIG. 1 is a perspective view of a vibrating body of a disc-shaped ultrasonic motor in an embodiment of the present invention, and FIG. 2 is a perspective view of a vibrating body of a disc-shaped ultrasonic motor in a second embodiment of the present invention. FIG. 3 is a perspective view of a vibrating body of a disc-shaped ultrasonic motor according to a third embodiment of the present invention, FIG. 4 is a cutaway perspective view of a conventional annular ultrasonic motor, and FIG. A plan view showing the shape and electrode structure of the piezoelectric body used in the ultrasonic motor, Fig. 6 is an explanatory diagram of the operating principle of the ultrasonic motor, and Fig. 7 shows an annular ultrasonic motor with protrusions on the vibrating body. 8 is a cutaway perspective view of a conventional disk-shaped ultrasonic motor, FIG. 9 is a radial displacement distribution diagram of a disk-shaped vibrating body, and FIG. 10 is a cutout perspective view of a conventional disc-shaped ultrasonic motor. FIG. 3 is a model diagram of the operation of a sonic motor. 20...Elastic body, 21...Piezoelectric body, 2
2... Vibrating body, 23... Protrusion body having a trapezoidal inclination in the circumferential direction 24... Protrusion body having a trapezoidal inclination also in the radial direction, 25. ...Protrusion with curvature. Name of agent: Patent attorney Shigetaka Awano and 1 other person 1 Figure 2 Figure 25 Protrusion with a base and mark Figure Figure Figure Figure Figure C

Claims (3)

【特許請求の範囲】[Claims] (1)圧電体を交流電圧で駆動して、前記圧電体と弾性
体とから構成される振動体に弾性進行波を励振すること
により、前記振動体上に接触して設置された移動体を移
動させる超音波モータにおいて、前記振動体の前記移動
体との接触面側に周方向において台形状の突起体を設け
、前記突起体に接触して設置された前記移動体を、駆動
することを特徴とする超音波モータ。
(1) By driving a piezoelectric body with an alternating current voltage and exciting an elastic traveling wave in a vibrating body composed of the piezoelectric body and an elastic body, a moving body placed in contact with the vibrating body can be moved. In the ultrasonic motor for moving, a trapezoidal protrusion is provided in the circumferential direction on a contact surface side of the vibrating body with the movable body, and the movable body installed in contact with the protrusion is driven. Features an ultrasonic motor.
(2)周方向において台形状の突起体に、さらに径方向
にも台形状の傾斜を付与したことを特徴とする特許請求
の範囲第1項に記載の超音波モータ。
(2) The ultrasonic motor according to claim 1, characterized in that the trapezoidal protrusion in the circumferential direction is further provided with a trapezoidal inclination in the radial direction.
(3)圧電体を交流電圧で駆動して、前記圧電体と弾性
体とから構成される振動体に弾性進行波を励振すること
により、前記振動体上に接触して設置された移動体を移
動させる超音波モータにおいて、前記振動体の前記移動
体との接触面側に突起体を設け、前記突起体の表面にお
ける移動体との接触面側に曲率を持たせたことを特徴と
する超音波モータ。
(3) By driving a piezoelectric body with an alternating current voltage and exciting an elastic traveling wave in a vibrating body composed of the piezoelectric body and an elastic body, a moving body placed in contact with the vibrating body can be moved. In the ultrasonic motor for moving, a protrusion is provided on the side of the contact surface of the vibrating body with the movable body, and the surface of the protrusion has a curvature on the side of the contact surface with the movable body. sonic motor.
JP63173346A 1988-07-12 1988-07-12 Ultrasonic motor Expired - Lifetime JP2543145B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63173346A JP2543145B2 (en) 1988-07-12 1988-07-12 Ultrasonic motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63173346A JP2543145B2 (en) 1988-07-12 1988-07-12 Ultrasonic motor

Publications (2)

Publication Number Publication Date
JPH0226278A true JPH0226278A (en) 1990-01-29
JP2543145B2 JP2543145B2 (en) 1996-10-16

Family

ID=15958714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63173346A Expired - Lifetime JP2543145B2 (en) 1988-07-12 1988-07-12 Ultrasonic motor

Country Status (1)

Country Link
JP (1) JP2543145B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011142732A (en) * 2010-01-06 2011-07-21 Olympus Corp Ultrasonic motor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62259484A (en) * 1986-05-02 1987-11-11 Hiroshi Shimizu Piezoelectric driving apparatus
JPS6311073A (en) * 1986-06-30 1988-01-18 Canon Inc Vibrating wave motor
JPH01255484A (en) * 1988-04-05 1989-10-12 Aisin Seiki Co Ltd Elastic body for ultrasonic motor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62259484A (en) * 1986-05-02 1987-11-11 Hiroshi Shimizu Piezoelectric driving apparatus
JPS6311073A (en) * 1986-06-30 1988-01-18 Canon Inc Vibrating wave motor
JPH01255484A (en) * 1988-04-05 1989-10-12 Aisin Seiki Co Ltd Elastic body for ultrasonic motor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011142732A (en) * 2010-01-06 2011-07-21 Olympus Corp Ultrasonic motor

Also Published As

Publication number Publication date
JP2543145B2 (en) 1996-10-16

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