JPH02154343A - Manufacture of double-sided stamper - Google Patents
Manufacture of double-sided stamperInfo
- Publication number
- JPH02154343A JPH02154343A JP30851888A JP30851888A JPH02154343A JP H02154343 A JPH02154343 A JP H02154343A JP 30851888 A JP30851888 A JP 30851888A JP 30851888 A JP30851888 A JP 30851888A JP H02154343 A JPH02154343 A JP H02154343A
- Authority
- JP
- Japan
- Prior art keywords
- stamper
- double
- glass substrate
- sided
- electroformed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 32
- 239000011521 glass Substances 0.000 claims abstract description 28
- 239000011347 resin Substances 0.000 claims abstract description 14
- 229920005989 resin Polymers 0.000 claims abstract description 14
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 12
- 238000005323 electroforming Methods 0.000 claims abstract description 6
- 238000000206 photolithography Methods 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 abstract description 14
- 230000033458 reproduction Effects 0.000 abstract 2
- 238000001746 injection moulding Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は光デイスク複製のために用いられる両面型スタ
ンパの製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for manufacturing a double-sided stamper used for optical disk duplication.
従来、光デイスク複製用スタンパの製造は、ガラス基板
の表面上にフォトレジスト膜を塗布し。Conventionally, a stamper for optical disk duplication is manufactured by coating a photoresist film on the surface of a glass substrate.
このフォトレジスト膜に凹凸状の微細パターンを形成し
、この微細パターン表面上に導電性皮膜を形成した後、
電鋳法により前記導電性皮膜上に金属皮膜を析出形成し
、この金属皮膜を前記ガラス基板から剥離してスタンパ
を得るようにしている。After forming an uneven fine pattern on this photoresist film and forming a conductive film on the surface of this fine pattern,
A metal film is deposited and formed on the conductive film by electroforming, and this metal film is peeled off from the glass substrate to obtain a stamper.
このようなスタンパを射出成形用スタンパとして用いる
場合、まず金属皮膜の析出面をラップ若しくはポリッシ
ングにより研磨することにより、スタンパの厚みを均一
にし、かつ鏡面出しを行う。When such a stamper is used as a stamper for injection molding, the surface on which the metal film is deposited is first polished by lapping or polishing to make the thickness of the stamper uniform and to give it a mirror finish.
そして、この研磨面を射出成形機の金型に取り付け、溶
融樹脂を射出させ金型を締めることにより。Then, this polished surface is attached to the mold of an injection molding machine, molten resin is injected, and the mold is tightened.
光ディスクを複製製造することになる。This will produce copies of optical discs.
しかしながら、上記のように製造された従来の光デイス
ク複製用スタンパでは、型締めの圧力。However, in the conventional optical disk duplication stamper manufactured as described above, the mold clamping pressure is high.
金型と溶融樹脂の温度差、溶融樹脂圧等によってスタン
パが変形してしまい、成形によって得られる光ディスク
の品質（信号特性等）が低下し１歩留りの低下も余儀な
くされてしまうという問題があった。There was a problem in that the stamper was deformed due to the temperature difference between the mold and the molten resin, the pressure of the molten resin, etc., resulting in a decrease in the quality (signal characteristics, etc.) of the optical disc obtained by molding, and a decrease in yield. .
本発明はこのような従来技術の事情に鑑みてなされたも
のであって、信号特性の良好な高品質の光ディスクを多
数複製可能なスタンパを提供することを目的とする。The present invention has been made in view of the circumstances of the prior art, and it is an object of the present invention to provide a stamper that can reproduce a large number of high-quality optical discs with good signal characteristics.
上記目的を達成するため、本発明によれば、ガラス基板
の表面上にフォトレジスト膜を設け、フォトリソグラフ
ィーにより該フォトレジスト膜に凹凸微細パターンを形
成する工程と、ガラス基板の凹凸微細パターンが設けら
れている側及びその反対側の面上にそれぞれ導電性皮膜
を形成した後、電鋳法により各導電性皮膜上に層を形成
する工程と、両面に電ｕＪｔｌが形成された一対のガラ
ス基板を、凹凸微細パターンの形成されている面側同士
を常温硬化性樹脂で接着する工程と、常温硬化性樹脂に
より接着された電ｔ４層とガラス基板との間で剥離を行
い、両面型スタンパを得る工程とを具備することを特徴
とする両面型スタンパの製造方法が提供される。In order to achieve the above object, the present invention provides a step of providing a photoresist film on the surface of a glass substrate and forming a concavo-convex fine pattern on the photoresist film by photolithography; A step of forming a conductive film on each side of the conductive film and the opposite side thereof, and then forming a layer on each conductive film by an electroforming method, and a pair of glass substrates with electrolytic uJtl formed on both sides. A double-sided stamper is formed by bonding the surfaces on which the uneven fine pattern is formed with a room-temperature-curing resin, and peeling off the glass substrate and the electric T4 layer bonded with the room-temperature-curing resin. Provided is a method for manufacturing a double-sided stamper, comprising the steps of: obtaining a double-sided stamper;
本発明では、ガラス基板の両面に電鋳層を形成し、さら
に１両面に′＃、ｇ ＩＩＩＪが設けられた一対のガラ
ス基板を凹凸微細パターン側の電鋳層を対向させて常温
硬化性樹脂で接着して両面型スタンパとすることにより
、スタンパの平面度が著しく向上し、また光デイスク複
製時にスタンパの変形も防止されるようになり、信号特
性の良好な高品質の光ディスクが歩留り良く、大・量に
複製できるようになる。In the present invention, an electroformed layer is formed on both sides of a glass substrate, and a pair of glass substrates each having '# and g By adhering it to a double-sided stamper, the flatness of the stamper is significantly improved, and deformation of the stamper is also prevented during optical disk duplication, resulting in a high yield of high-quality optical disks with good signal characteristics. It becomes possible to reproduce in large quantities.
次に本発明を実施例により更に詳述する。 Next, the present invention will be explained in more detail with reference to Examples.
（実施例１）
第１図は本発明の実施例による両面型スタンパの製造方
法の工程図である。(Example 1) FIG. 1 is a process diagram of a method for manufacturing a double-sided stamper according to an example of the present invention.
先ず、ガラス基板ｌの片面にフォトレジスト膜２を塗布
しく工程Ａ）、レーザー露光・現像することにより凹凸
微細パターン２′を形成する（工程Ｂ）０次にガラス基
板１の両面に無電解メツキ、真空蒸着、Ｎｉスパッタ等
により導電性皮膜３を形成しく工程Ｃ）、その後Ｎ１電
鋳を行い、電鋳Ｎ４を形成する（工程Ｄ）。First, a photoresist film 2 is coated on one side of the glass substrate 1 (Step A), and an uneven fine pattern 2' is formed by laser exposure and development (Step B).Next, both sides of the glass substrate 1 are electroless plated. A conductive film 3 is formed by vacuum evaporation, Ni sputtering, etc. (Step C), and then N1 electroforming is performed to form electroformed N4 (Step D).
この両面に電膜層４が形成されたガラス基板１と。A glass substrate 1 having an electrical film layer 4 formed on both sides thereof.
同様にして作製した両面に電ｔＪＪ！４が形成された別
のガラス基板１とを、凹凸微細パターン２′が形成され
た電鋳層４の面同士を対向させ常温硬化性＊ ＩＩＩ
５で接着する（工程Ｅ）、そして常温硬化性樹脂５で接
着された一組の電鋳層４を両側のガラス基板ｌから剥離
し、残留フォトレジストを除去して両面スタンバ６を得
る（工程Ｆ）、この時の両面スタンパ６の平面度は殆ん
どＯであった０以上のようにして作製した両面スタンバ
を射出成形機の中央部゛に固定し、各々スタンパ面に同
時に同量の溶融樹脂を射出して、同時に金型で型締めし
て光ディスクを複製した０両面スタンバ６の一方のスタ
ンパ側から複製された１枚目及び５ｏｏｏ枚目のディス
クをそれぞれＡ□、Ａｓｅ。。とじ、もう一方のスタン
パ側から複製された１枚目及び５０００枚目のディスク
をそれぞれＢ１．Ｂ、。。。とじた時、これらのディス
クからは何れも第２図に示すような良好な信号特性（Ｉ
ｎ部のトラッキング誤差信号の対半径特性）が得られた
。Electric tJJ! 4 and another glass substrate 1 on which the concavo-convex fine pattern 2' is formed, the surfaces of the electroformed layer 4 on which the concavo-convex fine pattern 2' is formed face each other to form a room-temperature curable layer*III.
5 (Step E), and a set of electroformed layers 4 bonded with room-temperature curing resin 5 are peeled off from the glass substrates 1 on both sides, and the residual photoresist is removed to obtain a double-sided standby 6 (Step E). F) At this time, the flatness of the double-sided stamper 6 was almost O. The double-sided stamper 6 manufactured in the above manner was fixed to the center of the injection molding machine, and the same amount of flatness was applied to each stamper surface at the same time. The 1st and 5oooth discs are A□ and Ase, respectively, from one stamper side of the 0-sided standber 6, in which an optical disc is produced by injecting molten resin and simultaneously clamping it with a mold. . B1. B. . . When closed, these discs all have good signal characteristics (I) as shown in Figure 2.
The n-part tracking error signal vs. radius characteristic) was obtained.
（実施例２）
Ｎｉ電電画面片側のみ凹凸微細形状を有するガラス基板
を２個１両側に凹凸微細形状を有するガラス基板を９個
作製する。片側のみ凹凸微細形状を有する２個のガラス
基板を面と面を対向させて両端におき、その間に、両側
に凹凸微細形状を有する９個のガラス基板がくるように
し、隣り合ったガラス基板のＮｉ電祈面同士を常温硬化
性樹脂で接着後、ガラス基板を剥離していき、１０個の
両面スタンバを同時に得た。出来上がった１０個の両面
スタンバの一方のスタンパ側から複製された１枚目及び
５０００枚目のディスクをそれぞれＩＡｌ、２Ａ□、３
Ａ１゜・・−、ｌ０Ａ１；ＩＡｉ、ａ、、２Ａ、、、。(Example 2) Two glass substrates each having a microscopic unevenness on one side of a Ni electronic screen and nine glass substrates having a microscopic unevenness on both sides were prepared. Two glass substrates having a microscopic unevenness on one side are placed at both ends with their surfaces facing each other, and nine glass substrates having a microscopic unevenness on both sides are placed between them. After adhering the Ni electrolytic plates to each other with a room-temperature curable resin, the glass substrate was peeled off to obtain 10 double-sided stand bars at the same time. The 1st and 5000th discs copied from one stamper side of the completed 10 double-sided stampers are IAl, 2A□, and 3, respectively.
A1°...-, l0A1; IAi, a,, 2A,,.
、・、ＩＯＡ、、、、とし、もう−方のスタンパ側から
複製された１枚目及び５０００枚目のディスクをそれぞ
れ１８１．２８１．・・・、ｌ０Ｂ１．；ＩＢ□。。。, , IOA, , , and the 1st and 5000th disks copied from the other stamper side are respectively 181.281. ..., l0B1. ;IB□. . .
２Ｂ、。。。、・・・、１０Ｂ、。ｏｏとした時、これ
らのディスクからは何れも第３図に示すような良好なる
信号特性が得られた。2B. . . ,...,10B,. oo, good signal characteristics as shown in FIG. 3 were obtained from these disks.
（比較例）
ガラス基板の表面上にフォトレジスト膜を塗布し、レー
ザー露光・現像することにより凹凸微細パターンを形成
し、Ｎｉスパッタ法により導電性皮膜を形成後、Ｎｉ電
鋳することにより、ガラス基板の片面にスタンパを形成
した。このスタンパをガラス基板から剥離し、残留フォ
トレジストを除去した後、このスタンバを射出成形機の
一方の金型に取り付け、溶融樹脂を射出し、他方の金型
で型締めを行ない光ディスクを複製した。このような従
来方法によるスタンバにより複製された１枚目及び５０
００枚目のディスクをそれぞれＤｌｙＤｇＯｌＩＯとし
た時、これらのディスクでは何れも第４図に示すように
複製枚数が多くなるにつれて悪化してしまう信号特性と
なった。(Comparative example) A photoresist film is applied on the surface of a glass substrate, and a fine pattern of convexes and convexes is formed by laser exposure and development. After forming a conductive film by Ni sputtering, Ni electroforming is performed to form a glass substrate. A stamper was formed on one side of the substrate. After peeling off the stamper from the glass substrate and removing the residual photoresist, the stamper was attached to one mold of an injection molding machine, molten resin was injected, and the other mold was clamped to reproduce an optical disk. . The first copy and 50 copies made using a standber using such a conventional method
When the 00th disk was set to DlyDgOlIO, the signal characteristics of these disks deteriorated as the number of copies increased, as shown in FIG. 4.
以上詳細に説明したように、本発明によれば。 As described in detail above, according to the present invention.
平面度が殆んど０である両面型スタンパを量産すること
が可能となる。したがって、本発明の両面型スタンパを
用いることにより、信号特性の良好な高品質の光ディス
クを大音に複製することが可能となる。It becomes possible to mass produce double-sided stampers whose flatness is almost 0. Therefore, by using the double-sided stamper of the present invention, it is possible to reproduce high-quality optical discs with good signal characteristics at high volume.
第１１閑は本発明しこよる両面型スタンパの製造方法の
工程図、第２図ないし第４図はそれぞれ実施例１、実施
例２及び比較例で複製された光ディスクの信号特性を示
す図である。
■・・ガラス基板 ２・・・フォトレジスト膜
２′・・・凹凸微細パターン ３・・・導電性皮膜４・
・・電鋳層 も・・・常温硬化性樹脂６・・
・両面スタンパ
特許出願人 株式会社 リ コ
第１図
第２図The 11th blank is a process diagram of the method for manufacturing a double-sided stamper according to the present invention, and Figures 2 to 4 are diagrams showing the signal characteristics of the optical discs reproduced in Example 1, Example 2, and Comparative Example, respectively. be. ■...Glass substrate 2...Photoresist film 2'...Micropattern of unevenness 3...Conductive film 4...
...Electroformed layer also...Room temperature curing resin 6...
・Double-sided stamper patent applicant Rico Co., Ltd. Figure 1 Figure 2
Claims (1)
フォトリソグラフィーにより該フォトレジスト膜に凹凸
微細パターンを形成する工程と、ガラス基板の凹凸微細
パターンが設けられている側及びその反対側の面上にそ
れぞれ導電性皮膜を形成した後、電鋳法により各導電性
皮膜上に電鋳層を形成する工程と、 両面に電鋳層が形成された一対のガラス基板を、凹凸微
細パターンの形成されている面側同士を対向させ常温硬
化性樹脂で接着する工程と、 常温硬化性樹脂により接着された電鋳層とガラス基板と
の間で剥離を行い、両面型スタンパを得る工程とを具備
することを特徴とする両面型スタンパの製造方法。(1) Provide a photoresist film on the surface of the glass substrate,
After forming a fine uneven pattern on the photoresist film by photolithography and forming a conductive film on the side of the glass substrate on which the fine uneven pattern is provided and the opposite side thereof, electroforming is performed. The process of forming an electroformed layer on each conductive film, and bonding a pair of glass substrates with electroformed layers formed on both sides with the surfaces on which the uneven micropatterns are formed facing each other using a room-temperature curing resin. A method for producing a double-sided stamper, comprising: a step of peeling an electroformed layer and a glass substrate bonded together using a room-temperature curing resin to obtain a double-sided stamper.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30851888A JPH02154343A (en) | 1988-12-05 | 1988-12-05 | Manufacture of double-sided stamper |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30851888A JPH02154343A (en) | 1988-12-05 | 1988-12-05 | Manufacture of double-sided stamper |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02154343A true JPH02154343A (en) | 1990-06-13 |
Family
ID=17981990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30851888A Pending JPH02154343A (en) | 1988-12-05 | 1988-12-05 | Manufacture of double-sided stamper |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02154343A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1514673A2 (en) * | 2003-09-10 | 2005-03-16 | TDK Corporation | Disc-shaped recording medium manufacturing method and stamper member usable for disc-shaped recording medium manufacturing method |
| WO2011100647A3 (en) * | 2010-02-12 | 2012-01-05 | Solexel, Inc. | Double-sided reusable template for fabrication of semiconductor substrates for photovoltaic cell and microelectronics device manufacturing |
-
1988
- 1988-12-05 JP JP30851888A patent/JPH02154343A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1514673A2 (en) * | 2003-09-10 | 2005-03-16 | TDK Corporation | Disc-shaped recording medium manufacturing method and stamper member usable for disc-shaped recording medium manufacturing method |
| EP1514673A3 (en) * | 2003-09-10 | 2005-06-08 | TDK Corporation | Disc-shaped recording medium manufacturing method and stamper member usable for disc-shaped recording medium manufacturing method |
| WO2011100647A3 (en) * | 2010-02-12 | 2012-01-05 | Solexel, Inc. | Double-sided reusable template for fabrication of semiconductor substrates for photovoltaic cell and microelectronics device manufacturing |
| CN102844883A (en) * | 2010-02-12 | 2012-12-26 | 速力斯公司 | Double-sided reusable template for semiconductor substrates for fabrication of photovoltaic cells and microelectronic devices |
| US9401276B2 (en) | 2010-02-12 | 2016-07-26 | Solexel, Inc. | Apparatus for forming porous silicon layers on at least two surfaces of a plurality of silicon templates |
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