JP7572870B2 - Ultraviolet irradiation equipment and ozone generator - Google Patents

Description

The present invention relates to an ultraviolet irradiation device that irradiates ultraviolet rays using an excimer lamp, and an ozone generator equipped with an ultraviolet irradiation device.

In ultraviolet irradiation devices that emit ultraviolet light for deodorization or sterilization, or in ozone generators that irradiate raw material gas containing oxygen with ultraviolet light (for example, wavelength 172 nm), it is possible to use excimer lamps as a light source.

For example, a fan is installed near the bottom or side of the device to draw in outside air, and the gas flowing around the excimer lamp is irradiated with ultraviolet light, releasing the ozone-containing gas outside the device (see Patent Documents 1 and 2).

Patent No. 6564663 Japanese Unexamined Patent Publication No. 7-187611

Excimer lamps are equipped with a lamp power supply that includes a step-up transformer, because discharge occurs when insulation breaks down due to the application of high-frequency, high-voltage power. For lamp power supplies of this type, it is necessary to ensure sufficient distance between the housing walls and other surfaces inside the device to prevent insulation breakdown.

However, to provide ultraviolet irradiation devices and ozone generators that can be used in a variety of environments, devices with a more compact size are required to make them easier to carry and install. When trying to make devices more compact, it is difficult to ensure a sufficient distance between the lamp power source and the housing walls, partition walls, etc., within the housing.

Therefore, in compact-sized ultraviolet irradiation devices and ozone generators, it is necessary to ensure sufficient insulation distance against the high-frequency high voltage applied from the lamp power supply.

The ultraviolet irradiation device of the present invention can be applied to ozone generators and the like, and is equipped with an excimer lamp that emits ultraviolet rays and is arranged in a flow path in which a fluid flows from an inlet to an outlet, and a power supply housing that is arranged at a predetermined distance from the excimer lamp and houses a lamp power supply that supplies power to the excimer lamp.

The flow path here is determined by the configuration of the ultraviolet irradiation device and the configuration of the ozone generator in which the ultraviolet irradiation device is incorporated. For example, in the case of an ozone generator, a flow path can be formed within the housing. Also, in the case of an ultraviolet irradiation device, a flow path can be formed by a tube or jacket. A flow path can be formed entirely or partially in the space inside the housing or tube of the ozone generator or ultraviolet irradiation device. Also, depending on the size of the power supply housing relative to the space inside the housing or tube, a configuration in which the power supply housing is disposed in the flow path, or a flow path can be formed according to the installation of the power supply housing.

In the present invention, the power supply housing is arranged to face the fluid supply unit provided on the inlet side. Here, "facing" includes cases where the power supply housing and the fluid supply unit face each other partially or completely. The fluid supply unit can be configured, for example, by an axial fan.

For example, if the flow path is formed entirely within the device housing or tube, the internal power supply housing can be placed closer to the center of the device than the excimer lamp. Alternatively, even if it is not placed at the center, it may be placed facing the fluid supply unit on the outlet side of the flow path. Also, if the fluid supply unit is composed of, for example, an axial fan and is placed coaxially with the tube or housing, the power supply housing can be placed coaxially with the fluid supply unit on the center side of the device or the outlet side of the device.

In the case of a lamp power supply that includes a step-up transformer, in consideration of ensuring insulation, the circuit configuration on the high voltage side of the lamp power supply in the lamp power supply housing can be arranged on the center side of the device and/or on the inlet side, and the circuit configuration on the low voltage side of the lamp power supply can be arranged on the outside of the device and/or on the outlet side.

In the device, the power supply housing can be held in a variety of configurations. Taking into consideration the placement in the flow path for the excimer lamp, the power supply housing can be configured to be held from the outlet side at the downstream end of the device. In this case, the outlet can be configured as an opening formed around the downstream end of the device. The opening can be, for example, multiple openings (such as slit shapes).

For an ultraviolet irradiation device or an ozone generator, it is possible to provide an operating unit that operates at least one of the excimer lamp or the fluid supply unit. When the power supply housing is held on the outlet side of the device, for example, the operating unit can be located in the center of the downstream end of the device so as to be surrounded by the outlet.

The power supply housing can be configured in a variety of ways. For example, the tubular member or device housing that forms the flow path can be provided with a windshield that is centered near the center of the cross section of the tubular member or device housing. The "windshield" here only needs to prevent the lamp power supply from being directly exposed to ozone, and can have a shape that simply functions as a "windbreak," or it can have a casing-like shape that partially or completely covers the lamp power supply. There are a variety of shapes and materials that can be used for the windshield.

The shape of the windshield can be of various configurations. It can be made rotationally symmetrical or linearly symmetrical with respect to the axis, and can be formed with a circular or rectangular cross section. It can also be shaped to have an opening in part, and it can have different shapes on the inlet and outlet sides. It can also be configured in a variety of sizes relative to pipes and device housings.

For example, the flow path may have a tapered shape that tapers from the downstream side to the upstream side. In this case, if the fluid supply unit is an axial fan, the outlet end or an intermediate portion of the outlet may be made larger in diameter than the fan motor unit of the axial fan, and may taper toward the inlet so as to become smaller in diameter than the fan motor unit of the axial fan.

For example, the windshield can be provided with a support that supports the excimer lamp in the flow path and a connector that electrically connects to the anode of the excimer lamp. In this case, the power supply housing, connector, and fluid supply unit can be arranged in sequence toward the inlet side. Alternatively, the excimer lamp can be arranged between the connector and the fluid supply unit, and the power supply housing, connector, excimer lamp, and fluid supply unit can be arranged in sequence toward the inlet side.

An ozone generator according to another aspect of the present invention can be installed, for example, directly above and/or horizontally, and includes a blower provided at the bottom of the housing, an excimer lamp located downstream of the blower within the housing, and a power supply housing that houses a lamp power supply that supplies power to the excimer lamp and is located within the housing at a predetermined distance from the excimer lamp, with the power supply housing being located downstream of the blower and facing the blower.

The present invention makes it possible to ensure sufficient insulation distance against the high-frequency, high-voltage applied from the lamp power supply in a compact-sized ultraviolet irradiation device or ozone generator.

1 is a schematic configuration diagram of an ozone generator according to a first embodiment. FIG. FIG. 1 is a schematic diagram of an ozone generator according to a second embodiment. FIG. 11 is a schematic diagram of an ozone generator according to a third embodiment.

Below, an embodiment of the present invention will be described with reference to the drawings.

Figure 1 is a schematic diagram of an ozone generator according to a first embodiment.

The ozone generator 10 is a compact, easily portable ozone generator, and includes an excimer lamp 20 and an axial fan (fluid supply unit) 30 in a housing 15 with a generally rectangular cross section. The axial fan 30, which is provided on the bottom 15D of the housing 15, includes a fan motor unit 32 and fan blades 34, and is positioned so that the fan axis C passes near a line X that passes vertically through the center of the cross section (as viewed from above) of the housing 15.

The excimer lamp 20 emits ultraviolet light (e.g., wavelength 172 nm) from the discharge generated in the discharge space of the light-emitting section, and is positioned so that the lamp axis is aligned along the side wall 15C of the housing 15, i.e., along the vertical direction of the device. When the axial fan 30 rotates, the inlet portion of the axial fan 30 becomes the inlet 15A of the housing 15, and the surrounding gas (here, air) flows into the housing 15.

When the axial fan 30 rotates, a flow path F is formed in the internal space S of the housing 15, through which gas flows from the inlet 15A toward the outlet 15B formed on the top surface 15U of the housing 15. Ozone is generated by irradiating the oxygen contained in the gas flowing around the excimer lamp 20 with ultraviolet light, and the gas containing the ozone is released outside the device for deodorization, sterilization, etc.

A square-shaped operating section 18 for turning the device on and off is provided in the center of the upper surface 15U of the housing 15, and an outlet port 15B consisting of multiple slit-shaped openings that open intermittently around the periphery is formed. Below the operating section 18, which is held by the portion where the openings are interrupted, a control section (not shown) is provided that receives operating signals from the operating section 18 and controls the device operation.

The lamp power supply 40 that supplies power to the excimer lamp 20 includes a voltage conversion circuit that converts AC voltage having the commercial power frequency to DC voltage, a switching circuit that converts DC voltage to high frequency voltage, and a step-up transformer (transformer board), and is housed in the power supply housing 50 so that the low-voltage circuit configuration is located on the top surface 15U side (outlet 15B side) or side wall 15C side of the housing 15, and the high-voltage circuit configuration (e.g., the high-voltage side of the step-up transformer) is located on the center side of the internal space S of the housing 15 or on the cross-sectional center line X side. Note that other power supply configurations that use a frequency converter instead of a switching circuit are also possible.

The power supply housing 50 is provided with a windshield 52 that covers the lamp power supply 40 from the internal space S within the housing 15 to prevent the lamp power supply 40 from being directly exposed to the ultraviolet rays emitted from the excimer lamp 20 and the ozone generated. The excimer lamp 20, the lamp power supply 40, and the power supply housing 50 constitute the ultraviolet irradiation device 12, and the power supply housing 50 houses the control unit 60 together with the lamp power supply 40.

Here, the windshield 52 of the power supply housing 50 has a rectangular cross section, a tapered section 53 that tapers toward the inlet 15A side, and is held at the downstream end on the top surface 15U side (outlet 15B side) of the housing 15 and extends downward. However, it may also have a circular cross section. The windshield 52 is formed so that the center of the cross section of the windshield 52 is located near the center of the cross section of the housing 15, and is spaced apart from the side wall 15C of the housing 15.

By arranging the power supply housing 50 at the center of the internal space S of the housing 15, the power supply housing 50 faces the axial fan 30 in the internal space S inside the housing 15. In other words, the power supply housing 50 is arranged in the gas flow formed by the axial fan 30. In particular, the bottom (upstream end) 52F of the windshield 52 is located coaxially opposite the fan motor section 32, which is the center of the axial fan 30.

Furthermore, the heaviest part of the lamp power supply 40 (particularly the step-up transformer) is positioned across the cross-sectional center line X inside the housing 15, and is positioned toward the center (upstream) of the internal space S of the housing 15, thereby stabilizing the center of gravity balance of the device. On the other hand, the excimer lamp 20 is positioned so as to face the fan blades 34 of the axial fan 30, faces the tapered portion 53 of the windshield 52 at a predetermined distance, and is positioned closer to the side wall 15C of the housing 15 than the windshield 52 with respect to the cross-sectional center line X of the housing 15.

A support mechanism 54 is provided on the tapered portion 53 of the windshield 52 to support the excimer lamp 20 and the auxiliary starting light source (LED) 57. The support mechanism 54 has a pair of holders 55 that hold and electrically connect both ends of the cathode (outer electrode) provided on the outer surface of the light-emitting portion of the excimer lamp 20, and the upper end is inserted from the outside to the inside of an opening provided in the windshield 52 of the power supply housing 50, and is electrically connected to the low voltage (earth) side of the lamp power supply 40 via a power supply line (not shown).

In addition, an opening may be provided in the windshield 52 of the power supply housing 50, and only the holding part 55 may be extended from the inside of the windshield 52 to the outside (into the flow path F) to support the excimer lamp 20. Also, the outer electrode may be electrically connected to the low voltage (earth) side of the lamp power supply 40 via a power supply line without going through the support mechanism 54.

Furthermore, the support mechanism 54 is provided with an opening between the pair of holding parts 55 in the vertical direction and at a position spaced a predetermined distance from the surface of the excimer lamp 20, which supports the light emitting part of the startup assist light source 57, which assists in starting the lighting of the excimer lamp, so that the light emitting part is exposed toward the excimer lamp 20. An opening may also be provided in the tapered part 53 of the windshield 52.

A connector 56 that electrically connects to the excimer lamp 20 is provided on the bottom 52F of the windshield 52, and the bottom 52F of the windshield 52 and the fan motor section 32 of the axial fan 30 are positioned opposite each other with the connector 56 in between. The high voltage side (lower side) of the lamp power supply 40 is connected to the connector 56, which is electrically connected to the anode (inner electrode) provided in the light-emitting section of the excimer lamp 20 via a power supply line 59. The excimer lamp 20 can be removed and replaced by using the holder 55 on the cathode side and the connector 56 on the anode side.

In this embodiment, the axial fan 30 is coaxially arranged on the bottom 15D of the housing 15 to form a compact ozone generator 10 with a reduced vertical length. The power supply housing 50 is arranged in the same space as the internal space S in which the excimer lamp 20 is arranged, and is held in a predetermined position relative to the housing 15 on the top surface 15U side of the housing 15 via the portion where the slit-shaped opening of the outlet 15B is interrupted in the circumferential direction.

On the other hand, the excimer lamp 20 is supported via the power supply housing 50 so that it is at a predetermined position outside the power supply housing 50 with respect to the flow path F. The housing 15 is not divided by a partition or the like, and the excimer lamp 20 and the power supply housing 50 are not arranged in separate spaces. The power supply housing 50 is arranged in the center of the internal space S of the housing 15, facing the axial fan 30.

By positioning the power supply housing 50 so that it is centered near the position that straddles the cross-sectional center line X of the housing 15 and is structured to be held from the top surface 15U side (outlet 15B side) of the housing 15, it is possible to position the high-voltage side of the lamp power supply 40 away from the top surface 15U and side wall 15C of the housing 15, and the insulation distance can be easily ensured regardless of the arrangement of the lamp power supply 40 due to the compact design.

In particular, since the connector 56 is provided at the bottom 52F of the windshield 52, which is the furthest part from the side wall 15C of the housing 15, even if the vertical and cross-sectional lengths of the housing 15 are limited due to compactness, dielectric breakdown can be reliably prevented by maintaining the distance between the connector 56 and the top surface 15U and side wall 15C of the housing 15. Furthermore, dielectric breakdown can also be prevented by configuring the high-voltage side (step-up transformer, etc.) of the lamp power supply 40 to be located on the inlet side of the housing 15 and the low-voltage side (control circuit, etc.) to be located on the side wall side (outside the device).

On the other hand, by locating the excimer lamp 20 closer to the side wall 15C than the cross-sectional center line X of the housing 15, the flow rate of gas flowing out of the axial fan 30 increases, generating a sufficient amount of gas containing ozone. This is because a backflow phenomenon occurs near the exhaust port of the axial fan 30 in an area affected by the size of the outer diameter of the fan motor section 32 of the axial fan 30, and the flow rate of gas increases toward the excimer lamp 20 located near the fan blades 34, increasing the efficiency of ozone generation. The bottom 52F of the windshield 52 is located so as to face the area where such a backflow phenomenon occurs.

Generally, vacuum ultraviolet rays with a specific peak wavelength are easily absorbed in the atmosphere, and the ultraviolet rays emitted from the excimer lamp 20 quickly attenuate, decreasing the ultraviolet intensity. The degree of this attenuation depends on the magnitude of the absorption coefficient of ultraviolet rays in the atmosphere. In an ideal measurement environment, for ultraviolet rays with a wavelength of 172 nm, the ultraviolet intensity ratio attenuates to 50% or less after a travel of about 3 mm, drops to 20% or less at about 6 mm, and the ultraviolet rays are completely absorbed at about 30 mm.

The power supply housing 50 supports the excimer lamp 20 with a support mechanism 54 provided on the windshield 52, so that the excimer lamp 20 can be stably supported so that the distance between the excimer lamp 20 and the side wall 15C of the housing 15 or the windshield 52 is optimal from the perspective of ozone generation efficiency. This prevents the ultraviolet rays emitted from the excimer lamp 20 from being blocked by the side wall 15C of the housing 15 or the windshield 52, and allows the excimer lamp 20 to be stably positioned in an area of the flow path F that has good ozone generation efficiency.

In addition, by supporting the auxiliary startup light source 57 with the support mechanism 54 provided on the windshield 52 of the power supply housing 50, the distance between the auxiliary startup light source 57 and the excimer lamp 20 facing each other while in spatial communication with each other can be stably supported so that the ultraviolet light emitted from the excimer lamp 20 is not substantially irradiated onto the auxiliary startup light source 57, and the light emitted from the auxiliary startup light source 57 is irradiated onto the excimer lamp 20.

By using the auxiliary startup light source 57 that emits light with a longer wavelength than the ultraviolet light emitted from the excimer lamp 20 and taking advantage of the difference in transmittance in air due to wavelength, the auxiliary startup light source 57 is not rapidly deteriorated by the ultraviolet light emitted from the excimer lamp 20. In this way, the support mechanism 54 has the function of supporting the excimer lamp 20 at a desired position in the flow path F, and also supports the auxiliary startup light source 57 at a desired position relative to the excimer lamp 20, preventing the respective positions from being changed before and after lamp replacement.

The windshield 52 has a tapered section 53 that tapers toward the axial fan 30 (upstream side). This allows the gas flowing out of the axial fan 30 to flow along the surface of the windshield 52, even when the power supply housing 50 is large compared to the outer diameter of the fan motor section 32 of the axial fan 30, preventing the windshield 52 itself from creating a large flow resistance.

Furthermore, by forming the windshield 52 of the power supply housing 50 up to the top surface 15U of the housing 15 and forming the outlet 15B around the power supply housing 50, it is possible to set the area of the operation unit 18 to be large, and it is also possible to accommodate the control unit provided below the operation unit 18 in the power supply housing 50.

Next, an ozone generator according to a second embodiment will be described with reference to FIG. 2. In the second embodiment, the power supply housing is rectangular. The rest of the configuration is substantially the same as that of the first embodiment.

Figure 2 is a schematic diagram of an ozone generator according to a second embodiment. The power supply housing 50' is equipped with a windshield 52' with a constant cross-sectional size and does not form a tapered portion. In addition, the operation unit 18' is provided on the outer surface of the housing 15. Since the windshield 52' does not take up space on the upper surface 15U side of the housing 15, the size of the opening 15B is enlarged, and the gas supplied from the axial fan 30 flows easily in the flow path F, allowing for a large flow rate.

Next, an ozone generator according to a third embodiment will be described with reference to FIG. 3. In the third embodiment, the bottom 52F" of the windshield 52" and the fan motor section 32 of the axial fan 30 are positioned to face each other across the connector 56" and the excimer lamp 20. The rest of the configuration is substantially the same as in the second embodiment.

Figure 3 is a schematic diagram of an ozone generator according to a third embodiment. By arranging the windshield 52", connector 56", excimer lamp 20, and axial fan 30 on the same axis, even if there is a limit to the cross-sectional length due to compactness, the distance between the connector 56" and the excimer lamp 20, particularly the outer electrode, is maintained relative to the top surface 15U and side wall 15C of the housing 15, so that insulation breakdown can be reliably prevented.

As for the excimer lamp, the lamp axis may be arranged along the vertical direction of the housing, i.e., a direction different from the flow path. If a certain distance from the side wall of the housing can be secured, it is also possible to configure the connector to be located somewhere other than the bottom of the windshield.

The ozone generators shown in the first, second, and third embodiments are configured with an axial fan and an ultraviolet irradiation device inside a housing, and oxygen-containing gas flows inside the housing, but it is also possible to configure the device as an ultraviolet irradiation device that irradiates ultraviolet rays onto various gases.

For example, it is possible to place a fluid supply unit such as a blower on the upstream side of the flow path pipe, and install an ultraviolet irradiation device with an excimer lamp and power supply housing inside the flow path pipe. It is also possible to install an axial fan in the tubular member (flow path pipe), and install an ultraviolet irradiation device equipped with an excimer lamp and power supply housing downstream of that. It is possible to irradiate ultraviolet rays not only to gases, but also to fluids including liquids.

10 Ozone generator 12 Ultraviolet irradiation device 15 Housing 20 Excimer lamp 30 Axial fan (fluid supply unit)
40 Lamp power supply 50 Power supply housing 52 Windshield 56 Connector 57 Start-up auxiliary light source (LED)
F flow path

Claims (11)

an excimer lamp that emits ultraviolet light and is disposed in a flow path through which a fluid flows from an inlet to an outlet;
a power supply housing portion that is disposed at a predetermined distance from the excimer lamp and that houses a lamp power supply that supplies power to the excimer lamp;
The power supply unit is disposed to face the fluid supply unit provided on the inlet side ,
The power supply housing is held at a downstream end from the outlet side,
11. An ultraviolet irradiation device, comprising: a nozzle for irradiating a liquid to the downstream end of the device ; The ultraviolet irradiation device according to claim 1, characterized in that the power supply housing is disposed closer to the center of the device and/or closer to the outlet than the excimer lamp, facing the fluid supply unit. 3. The ultraviolet irradiation device according to claim 1 , wherein the opening is formed in a slit shape . The ultraviolet irradiation device according to claim 1, characterized in that an operating unit for operating at least one of the excimer lamp and the fluid supply unit is disposed in the center of the downstream end of the device so as to be surrounded by the outlet. an excimer lamp that emits ultraviolet light and is disposed in a flow path through which a fluid flows from an inlet to an outlet;
a power supply housing portion that is disposed at a predetermined distance from the excimer lamp and that houses a lamp power supply that supplies power to the excimer lamp;
The power supply unit is disposed to face the fluid supply unit provided on the inlet side,
Further comprising a tubular member or a device housing that forms the flow path,
11. An ultraviolet irradiation device, comprising: a power supply housing having a windshield disposed around the center of a cross section of the tubular member or the device housing. The ultraviolet irradiation device according to claim 5, characterized in that the windshield is provided with a support part that supports the excimer lamp in the flow path and a connector that electrically connects to the anode of the excimer lamp. The connector is provided at an upstream end of the windshield,
7. The ultraviolet irradiation device according to claim 6, wherein the power supply housing, the connector, and the fluid supply unit are arranged in sequence toward the inlet side. The connector is provided at an upstream end of the windshield,
the excimer lamp is provided between the connector and the fluid supply unit;
7. The ultraviolet irradiation device according to claim 6, wherein the power supply housing, the connector, the excimer lamp, and the fluid supply unit are arranged in sequence toward the inlet side. An ultraviolet irradiation device according to any one of claims 5 to 8, characterized in that the windshield has a tapered shape that tapers from the downstream side to the upstream side of the flow path. an excimer lamp that emits ultraviolet light and is disposed in a flow path through which a fluid flows from an inlet to an outlet;
a power supply housing portion that is disposed at a predetermined distance from the excimer lamp and that houses a lamp power supply that supplies power to the excimer lamp;
The power supply unit is disposed to face the fluid supply unit provided on the inlet side,
the lamp power supply includes a step-up transformer;
The high-voltage circuit configuration of the lamp power supply is disposed on the device center side and/or the inlet side;
An ultraviolet irradiation device, characterized in that a circuit configuration on the low voltage side of the lamp power supply is arranged outside the device and/or on the outlet side. A blower provided at the bottom of the housing;
an excimer lamp disposed downstream of the blower within the housing;
a power supply housing that houses a lamp power supply that supplies power to the excimer lamp and is disposed within the housing at a predetermined distance from the excimer lamp;
The power supply housing is disposed downstream of the blower and facing the blower ,
the lamp power supply includes a step-up transformer;
A high-voltage circuit configuration of the lamp power supply is disposed on the center side of the device and/or on the bottom side of the housing;
An ozone generator characterized in that a circuit configuration on the low voltage side of the lamp power supply is arranged outside the device and/or downstream of a circuit configuration on the high voltage side of the lamp power supply .

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