JP5989110B2 - Substrate storage container that suppresses entry of dust, etc. - Google Patents

Description

  The present invention relates to a substrate storage container, and in particular, suppresses intrusion of dust and the like due to an air flow that flows from the outside of the container body at the moment when the lid that closes the container body opening is removed from the peripheral edge of the opening. The present invention relates to a substrate storage container.

  As a container for storing a substrate such as a semiconductor wafer, a container having a container body, a lid, and a seal member has been conventionally known. The container main body has a substrate storage space in which a plurality of substrates can be stored therein, and has an opening peripheral edge portion in which one end of the container main body opening communicating with the substrate storage space is formed. The lid can be attached to and detached from the peripheral edge of the opening, has a seal member attaching portion, and can close the container main body opening. The seal member is attached to the seal member mounting portion of the lid, can contact the peripheral edge of the opening, is interposed between the peripheral edge of the opening and the lid, and is in close contact with the peripheral edge of the opening, A container main body opening part is obstruct | occluded in an airtight state with a cover body (for example, refer patent document 1 below).

JP 2003-170969 A

  In the substrate storage container provided with such a sealing member, in order to take out the substrate from the inside of the container main body (substrate storage space), the lid that closes the container main body opening is removed from the peripheral edge of the opening. If it does (it tries to open), the seal member which is in close contact with the peripheral edge of the opening becomes longer in the depth direction. Therefore, the volume of the internal space formed by the container main body and the lid is increased. Further, in the process of removing the lid from the peripheral edge of the opening, the inside of the container body temporarily becomes negative pressure. Then, at the moment when the lid is removed from the peripheral edge of the opening, the airflow flows from the outside to the inside of the container body. Along with this air flow, dust (including dust) may enter the inside of the container body from the outside. Then, there is a risk that intruding dust or the like adheres to a substrate such as a semiconductor wafer and the substrate is contaminated and becomes defective.

  As a means of slowing down the speed of airflow, for example, slowing down the opening speed of the lid to moderate the change in pressure inside the internal space, or reducing the airtightness of the seal member, It is conceivable to reduce the difference between the external pressure and the external pressure. However, in the former, the efficiency of taking out the substrate from the substrate storage container (required time) is lowered, and in the latter, intrusion of dust or the like due to a decrease in the airtightness of the seal member is likely to occur.

  The present invention provides a substrate storage container that can suppress the intrusion of dust and the like due to an airflow that is about to flow in from the outside of the container body at the moment when the lid that closes the container body opening is removed from the periphery of the opening. The purpose is to provide.

  The present invention includes a container main body having an opening peripheral edge portion in which a substrate storage space capable of storing a plurality of substrates is formed, and an opening peripheral edge portion formed at one end portion and communicating with the substrate storage space. A lid that can be attached to and detached from the container, has a seal member attachment portion, and can close the container body opening, and is attached to the seal member attachment portion of the lid, and abuts on the peripheral edge of the opening A seal member that is interposed between the peripheral edge of the opening and the lid and is in close contact with the peripheral edge of the opening to close the container main body opening in an airtight state together with the lid; The direction connecting the one end portion of the container body and the other end portion with respect to the one end portion is referred to as a near depth direction, and the direction perpendicular to the near depth direction is referred to as an orthogonal direction, Along the near depth direction A first opening inner surface, a second opening inner surface along the orthogonal direction inside the first opening inner surface than the first opening inner surface in a state where the lid closes the container main body opening, and more than the seal member An airflow baffle wall extending from the inner surface of the second opening on the inner side in the orthogonal direction, wherein the lid body closing the container body opening is removed from the peripheral edge of the opening. The present invention relates to a substrate storage container comprising: an airflow baffle wall provided on a path of an airflow that flows in from outside and flows along the inner surface of the first opening and the inner surface of the second opening.

  Moreover, it is preferable that the said airflow baffle wall is comprised mainly by the filter which has air permeability.

  Further, the air flow baffle wall is elastically deformable, and is compressed between the opening peripheral portion and the inner surface of the lid in a state where the lid closes the container main body opening, When the lid is removed from the peripheral edge of the opening, it is preferable that the seal member is also in contact with the inner surface of the lid even when the seal member is separated from the peripheral edge of the opening.

  Moreover, it is preferable that the surface where the airflow in the airflow baffle wall collides on the path of the airflow is inclined toward the outside in the orthogonal direction with respect to the near depth direction.

  According to the present invention, the substrate storage that can suppress the intrusion of dust and the like due to the airflow that is about to flow in from the outside of the container body at the moment when the lid that closes the container body opening is removed from the peripheral edge of the opening. A container can be provided.

It is a disassembled perspective view which shows the board | substrate storage container which concerns on 1st Embodiment of this invention. It is a plane sectional view of the substrate storage container concerning a 1st embodiment. It is a plane sectional view expanding and showing the circumference of the seal member and air flow baffle wall of the substrate storage container concerning a 1st embodiment. FIG. 4 is a plan sectional view showing a state in which the cover body is started to be removed from the state shown in FIG. 3. FIG. 5 is a plan sectional view showing a state where a lid is further removed from the state shown in FIG. 4. It is a plane sectional view expanding and showing the circumference of the air current baffle wall of the substrate storage container concerning a 2nd embodiment.

  Hereinafter, a substrate storage container according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is an exploded perspective view showing a substrate storage container according to the first embodiment of the present invention. FIG. 2 is a plan sectional view of the substrate storage container according to the first embodiment. FIG. 3 is an enlarged plan sectional view showing the periphery of the sealing member and the airflow baffle wall of the substrate storage container according to the first embodiment. FIG. 4 is a plan sectional view showing a state in which the cover body is started to be removed from the state shown in FIG. FIG. 5 is a plan sectional view showing a state in which the lid is further removed from the state shown in FIG.

  Here, for convenience of explanation, a direction (right direction in FIG. 2) from the container body 2 described later to the lid body 3 is defined as the front direction D11, and the opposite direction is defined as the depth direction D12. This is defined as the front depth direction D1. The near depth direction D1 can also be referred to as a direction connecting one end of the container body 2 and the other end with respect to the one end. Further, a direction from the lower wall 24 to the upper wall 23 to be described later (a direction from the back surface to the front surface in FIG. 2) is defined as an upward direction D21, and the opposite direction is defined as a downward direction D22. Together, it is defined as the vertical direction D2. Further, a direction (downward direction in FIG. 2) from the second side wall 26 to be described later to the first side wall 25 is defined as the left direction D31, and the opposite direction is defined as the right direction D32. It is defined as D3. A direction orthogonal to the near depth direction D1 and extending in the plane direction is defined as an orthogonal direction D2-D3.

  Further, the substrate W (see FIGS. 1 and 2 etc.) stored in the substrate storage container 1 is a disk-shaped silicon wafer, glass wafer, sapphire wafer, etc., and is a thin one used in the industry. The substrate W in this embodiment is a silicon wafer having a diameter of 450 mm.

  As shown in FIGS. 1 to 3, the substrate storage container 1 includes a container body 2, a lid body 3, a seal member 4, a substrate support plate-like portion 5, and a front retainer (not shown). ing.

  The container body 2 has an opening peripheral part 28 in which a container body opening 21 is formed at one end and a cylindrical wall part 20 with the other end closed. A substrate storage space 27 is formed in the container body 2. The substrate storage space 27 is formed so as to be surrounded by the wall portion 20. The substrate support plate-shaped portion 5 is disposed in a portion of the wall portion 20 that forms the substrate storage space 27. A plurality of substrates W can be stored in the substrate storage space 27.

  The substrate support plate-like portion 5 is provided on the wall portion 20 so as to make a pair in the left-right direction D3 in the substrate storage space 27. The substrate support plate-like portion 5 is provided on the near side D11 side and constitutes a large part of the substrate support plate-like portion 5, and the back side substrate support provided on the end portion in the depth direction D12 side. Unit 52. When the container body opening 21 is not closed by the lid 3, the plate-like body 51 has the edges of the plurality of substrates W in a state in which the adjacent substrates W are spaced apart and arranged in parallel. Can be supported.

  The back substrate support portion 52 is disposed so as to make a pair with a later-described front retainer in the substrate storage space 27, and can support the edges of the plurality of substrates W. The back side substrate support portion 52 cooperates with the front retainer when the container main body opening 21 is closed by the lid 3, and the edge portions of the plurality of substrates W are formed as plate-like portions of the substrate support plate-like portion 5. The rear portions of the plurality of substrates W are supported while being separated from the main body 51 and arranged in parallel.

  The lid 3 can be attached to and detached from the opening peripheral edge 28 (container main body opening 21), and can close the container main body opening 21. The front retainer is provided in a portion of the lid 3 that faces the substrate storage space 27 when the container main body opening 21 is closed by the lid 3. The front retainer is disposed so as to make a pair with the back side substrate support portion 52 of the substrate support plate-like portion 5.

  The front retainer can support the front portions of the edges of the plurality of substrates W when the container main body opening 21 is closed by the lid 3. When the container main body opening 21 is closed by the lid 3, the front retainer cooperates with the back side substrate support portion 52 of the substrate support plate-like portion 5 to support the plurality of substrates W, thereby adjacent to the front retainer. A plurality of substrates W are held in a state in which the substrates W to be separated are separated from each other at a predetermined interval and arranged in parallel. Hereinafter, each part will be described in detail.

  The wall portion 20 of the container body 2 includes a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The back wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of a plastic material or the like. In the first embodiment, they are integrally formed of polycarbonate.

  As shown in FIGS. 1 to 3, the first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the back wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 form an opening peripheral portion 28 that forms a container body opening 21 having a positional relationship facing the back wall 22. Configure.

  The opening peripheral edge 28 is provided at one end of the container main body 2, and the back wall 22 is located at the other end of the container main body 2. The outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped. The inner surface of the wall portion 20, that is, the inner surface of the back wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 are surrounded by these. 27 is formed. The container main body opening 21 formed in the opening peripheral edge portion 28 is surrounded by the wall portion 20 and communicates with the substrate storage space 27 formed in the container main body 2.

The opening peripheral edge portion 28 includes a first opening inner surface 281 along the near depth direction D1, a second opening inner surface 282 along the orthogonal direction D2-D3, and an air flow baffle wall 283.
The second opening inner surface 282 is an inner surface along the orthogonal direction D2-D3 inside the orthogonal direction D2-D3 relative to the first opening inner surface 281 in a state where the lid 3 closes the container main body opening 21.
In addition, the 1st opening inner surface 281 should just look along macroscopically along the near depth direction D1, and does not need to be parallel to the near depth direction D1. Similarly, the second opening inner surface 282 only needs to be along the orthogonal direction D2-D3 when viewed macroscopically, and may not be parallel to the orthogonal direction D2-D3.

  The airflow baffle wall 283 extends from the second opening inner surface 282 on the inner side in the orthogonal direction D2-D3 than the seal member 4. As shown in FIG. 4, the airflow baffle wall 283 flows into the first opening inner surface by flowing from the outside of the container body 2 at the moment when the lid 3 closing the container body opening 21 is removed from the opening peripheral edge 28. 281 and the second opening inner surface 282 are provided on the path of the airflow A1 that flows along the inner surface 282.

The air flow baffle wall 283 may be configured such that the base end portion 283B of the airflow baffle wall 283 is airtightly insert-molded into the opening peripheral edge portion 28 of the container main body 2, or the fitting groove formed in the opening peripheral edge portion 28 of the container main body 2. The base end portion 283B may be configured to be airtightly fitted.
In the first embodiment, the airflow baffle wall 283 is configured mainly with a filter having air permeability. A part of the airflow baffle wall 283 may be constituted by other than the filter. The filter can pass through the air flow A1, but does not pass all or a part of dust or the like that tends to enter the inside of the container body 2 with the air flow A1.

  The airflow baffle wall 283 can be elastically deformed. As shown in FIG. 3, the air flow baffle wall 283 is compressed between the opening peripheral portion 28 and the inner surface 32 of the lid 3 in a state where the lid 3 closes the container main body opening 21. Further, as shown in FIG. 4, the airflow baffle wall 283 has a lid body at the distal end portion 283 </ b> A even when the seal member 4 is separated from the opening peripheral edge portion 28 when the lid body 3 is removed from the opening peripheral edge portion 28. 3 is in contact with the inner surface 32 of the substrate.

  The airflow baffle wall 283 along the near depth direction D1 is compressed so that a crushing margin of, for example, 1 to 3 mm is formed compared to the state where the airflow baffle wall 283 and the inner surface 32 of the lid 3 are in contact with each other without being compressed. . The length of the airflow baffle wall 283 along the near depth direction D1 can be arbitrarily set. Moreover, the length of the airflow baffle wall 283 along the near depth direction D1 has a length equal to or longer than the crushing allowance in the uncompressed state, and is, for example, 4 to 10 mm.

  The lid body 3 has a substantially rectangular shape that substantially matches the shape of the opening peripheral edge portion 28 of the container body 2. The lid 3 is detachable from the opening peripheral edge 28 of the container body 2. By attaching the lid 3 to the opening peripheral edge 28, the lid 3 can close the container body opening 21. A seal member fitting groove 31 is formed on the outer peripheral edge portion of the lid body 3 along the outer peripheral edge portion of the lid body 3 as a seal member mounting portion.

  As shown in FIG. 3, the base end portion 42 of the seal member 4 is fitted in the seal member fitting groove 31, whereby the seal member 4 is attached to the lid 3. The seal member 4 is made of, for example, elastically deformable POE (polyoxyethylene), PEE, fluorine rubber, or silicon rubber. The annular seal member 4 is arranged so as to go around the outer peripheral edge of the lid 3. The seal member 4 can come into contact with the opening peripheral edge portion 28 at the distal end portion 41. The seal member 4 is interposed between the opening peripheral portion 28 and the lid body 3 so as to be in close contact with the opening peripheral portion 28, thereby closing the container body opening portion 21 together with the lid body 3 in an airtight state.

  When the lid 3 is mounted on the opening peripheral edge 28, the outer peripheral edge of the lid 3 abuts on the inner peripheral edge of the opening peripheral edge 28 of the container body 2 via the seal member 4. Thereby, the seal member 4 is sandwiched between the outer peripheral edge portion of the lid body 3 and the inner peripheral edge portion of the opening peripheral edge portion 28 and elastically deforms, and the lid body 3 closes the container body opening portion 21 in a sealed state. By removing the lid 3 from the opening peripheral edge 28, the substrate W can be taken into and out of the substrate storage space 27 in the container body 2.

  Next, the operation and action when removing the lid 3 from the opening peripheral edge 28 of the container body 2 will be described. As shown in FIG. 3, in a state where the lid 3 is attached to the opening peripheral portion 28 of the container main body 2 and the container main body opening 21 is closed in an airtight state, the seal member 4 It is in close contact with the inner surface 282 of the second opening. The airflow baffle wall 283 is compressed between the second opening inner surface 282 and the inner surface 32 of the lid 3.

  When the lid 3 is gradually moved in the front direction D11 from the state shown in FIG. 3, the shapes (lengths) of the seal member 4 and the airflow baffle wall 283 are gradually restored in the front depth direction D1. In a state where the seal member 4 is in close contact with the second opening inner surface 282 of the opening peripheral edge portion 28, the container body opening portion 21 is closed in an airtight state, so that the inside of the container body 2 is in a negative pressure state.

  Further, when the lid 3 is gradually moved in the front direction D11, as shown in FIG. 4, the shapes (lengths) of the seal member 4 and the airflow baffle wall 283 are further restored in the front depth direction D1. Then, first, the front end portion 41 of the seal member 4 is separated from the second opening inner surface 282. Note that the tip portion 283A of the airflow baffle wall 283 is in contact with the inner surface 32 of the lid 3. When the distal end portion 41 of the seal member 4 is separated from the second opening inner surface 282, the inside of the container main body 2 is in a negative pressure state and the container main body opening 21 is not blocked. Air (outside air) becomes an air flow A1 and flows into the container body 2. Here, since the airflow baffle wall 283 is mainly composed of a filter, the air pressure inside the container body 2 does not become the same as the external pressure from the negative pressure state, but gradually approaches the external pressure.

  As shown in FIG. 4, the air flow A <b> 1 flows along the first opening inner surface 281 and the second opening inner surface 282 of the opening peripheral edge portion 28 while avoiding the seal member 4. Further, dust or the like tends to enter the inside of the container body 2 along with the airflow A1. The airflow A1 and dust collide with the airflow baffle wall 283 that is in contact with the inner surface 32 of the lid 3. The collided airflow A1 passes through the airflow baffle wall 283 mainly composed of a filter. On the other hand, all or a part of the bumped dust cannot pass through the airflow baffle wall 283. Accordingly, it is possible to suppress the amount of dust or the like that enters the inside of the container body 2 (on the downstream side of the airflow baffle wall 283).

  Further, when the lid 3 is gradually moved in the front direction D11, as shown in FIG. 5, the shape (length) of the air flow baffle wall 283 is further restored in the front depth direction D1. Then, the tip 283 </ b> A of the airflow baffle wall 283 is separated from the inner surface 32 of the lid 3. Thereby, the air pressure inside the container body 2 is completely the same as the pressure outside the container body 2.

According to the substrate storage container 1 according to the first embodiment having the above configuration, the following effects can be obtained.
The opening peripheral edge 28 has a first opening inner surface 281 along the near depth direction D1 and an inner side in the orthogonal direction D2-D3 with respect to the first opening inner surface 281 in a state where the lid 3 closes the container main body opening 21. A second opening inner surface 282 along the orthogonal direction D2-D3, and an airflow baffle wall 283 extending from the second opening inner surface 282 inside the orthogonal direction D2-D3 relative to the seal member 4, and the container body opening 21 is At the moment when the closed lid 3 is removed from the opening peripheral portion 28, the lid 3 is provided on the path of the air flow A1 that flows from the outside of the container body 2 and flows along the first opening inner surface 281 and the second opening inner surface 282. An air flow baffle wall 283.

  Therefore, according to the first embodiment, the lid 3 that closes the container main body opening 21 flows from the outside of the container main body 2 at the moment when the lid 3 is removed from the opening peripheral edge 28, and the first opening inner surface 281 and the first inner surface 281. The airflow A1 flowing along the inner surface 282 of the two openings hits the airflow baffle wall 283. For this reason, dust or the like that tends to enter the inside of the container main body 2 along with the air flow A <b> 1 is less likely to enter the inside of the container main body 2.

  Further, in the first embodiment, the air flow baffle wall 283 is configured mainly with a filter having air permeability. Therefore, according to the first embodiment, it is possible to suppress dust and the like that is about to enter the inside of the container main body 2 along with the air flow A1, and about the air current A1, It can flow into the inside of the container body 2. Accordingly, dust and the like are unlikely to diffuse after hitting the airflow baffle wall 283, and the speed of the airflow A1 is reduced, so that the dust is easily captured by the airflow baffle wall 283. In addition, dust or the like captured by the airflow baffle wall 283 is easily collected in a corner portion formed by the second opening inner surface 282 and the airflow baffle wall 283.

  In the first embodiment, the airflow baffle wall 283 can be elastically deformed, and the opening peripheral portion 28 and the inner surface 32 of the lid 3 are in a state where the lid 3 closes the container body opening 21. When the lid 3 is removed from the opening peripheral edge 28, the seal member 4 is also in contact with the inner surface 32 of the lid 3 when it is separated from the opening peripheral edge 28. Therefore, according to the first embodiment, even if the seal member 4 is separated from the opening peripheral portion 28 and the container main body opening 21 is not blocked, the airflow A1 and dust from the outside of the container main body 2 are not covered by the lid. 3 hits against the air flow baffle wall 283 that is in contact with the inner surface 32 of the air. All or a part of the bumped dust or the like cannot pass through the airflow baffle wall 283. Accordingly, it is possible to suppress the amount of dust or the like that enters the inside of the container body 2 (on the downstream side of the airflow baffle wall 283).

  Hereinafter, a substrate storage container according to a second embodiment of the present invention will be described. FIG. 6 is an enlarged plan sectional view showing the periphery of the airflow baffle wall of the substrate storage container according to the second embodiment. In FIG. 6, illustration of the lid 3 is omitted.

In the second embodiment, as shown in FIG. 6, the surface 283C where the airflow collides with the airflow baffle wall 283 on the path of the airflow A1 is inclined toward the outside in the orthogonal direction D2-D3 with respect to the near depth direction D1. The angle θ is inclined. The inclination angle θ is, for example, 45 degrees or more. The airflow baffle wall 283 is made of a non-breathable member. Here, the airflow baffle wall 283 may be molded simultaneously with the opening peripheral edge 28 of the container body 2, or may be insert-molded into the opening peripheral edge 28 after being formed as a separate part. Alternatively, the airflow baffle wall 283 may be attached to the opening peripheral edge 28 after being formed as a separate part.
The second embodiment is different from the first embodiment mainly in the configuration described above, but the other configurations are the same as those in the first embodiment. Therefore, in 2nd Embodiment, about the same member as 1st Embodiment, it shows with the same code | symbol and abbreviate | omits description.

According to the substrate storage container according to the second embodiment having the above configuration, the following effects can be obtained.
In the second embodiment, the surface 283C where the airflow collides with the airflow baffle wall 283 on the path of the airflow A1 is inclined outward in the orthogonal direction D2-D3 with respect to the near depth direction D1. For this reason, dust or the like entering the container body 2 can be pushed back upstream by the airflow baffle wall 283. This effect is particularly prominent when the airflow baffle wall 283 is made of a non-breathable member.

  The present invention is not limited to the above-described embodiments, and can be modified within the technical scope described in the claims. For example, when the lid 3 is removed from the opening peripheral portion 28, the seal member 4 may be in contact with the inner surface 32 of the lid 3 even when the airflow baffle wall 283 is separated from the opening peripheral portion 28. it can.

In 1st Embodiment, the airflow baffle wall 283 may be comprised from the member which does not have air permeability.
Moreover, in 1st Embodiment and 2nd Embodiment, although the front-end | tip part 41 of the sealing member 4 becomes a structure contact | abutted to the 2nd opening inner surface 282, it is not restrict | limited to this. The seal member 4 may be in contact with the inner surface 281 of the first opening, as long as it can hold the substrate container 1 in an airtight state when the lid 3 is closed.

  The shape of the container main body and the lid, the number of substrates that can be stored in the container main body, and the dimensions thereof are the shape of the container main body 2 and the lid 3 in this embodiment, and the number of substrates W that can be stored in the container main body 2. The dimensions are not limited. For example, the substrate support plate-like portion is not limited to the configuration of the substrate support plate-like portion 5 of the present embodiment.

DESCRIPTION OF SYMBOLS 1 Substrate storage container 2 Container main body 3 Lid 4 Seal member 21 Container main body opening 27 Substrate storage space 28 Opening peripheral edge 31 Seal member fitting groove (sealing member mounting portion)
32 Inner surface 281 First opening inner surface 282 Second opening inner surface 283 Air flow baffle wall 283C Surface where air flow collides D11 Front direction D12 Depth direction D2-D3 orthogonal direction W Substrate

Claims (3)

A container main body having an opening peripheral edge portion in which a substrate storage space capable of storing a plurality of substrates is formed, and a container main body opening portion communicating with the substrate storage space is formed at one end;
A lid that can be attached to and detached from the peripheral edge of the opening, has a seal member attaching portion, and can close the opening of the container body
It is attached to the seal member mounting portion of the lid body, can be brought into contact with the peripheral edge portion of the opening, is interposed between the peripheral edge portion of the opening and the lid body, and is in close contact with the peripheral edge portion of the opening. And a sealing member that closes the container main body opening in an airtight state together with the lid,
When the direction connecting the one end portion of the container main body and the other end portion with respect to the one end portion is referred to as a near depth direction, and when the direction orthogonal to the near depth direction is referred to as an orthogonal direction, the opening peripheral edge portion corresponds to the near depth direction. A first opening inner surface along the second opening inner surface along the orthogonal direction inside the orthogonal direction with respect to the first opening inner surface in a state where the lid closes the container main body opening, and the seal member The container is an airflow baffle wall extending from the inner surface of the second opening on the inner side in the orthogonal direction than when the lid body closing the container main body opening is removed from the peripheral edge of the opening. An airflow baffle wall provided on a path of an airflow flowing from the outside of the main body and flowing along the inner surface of the first opening and the inner surface of the second opening;
Equipped with a,
The air flow baffle wall is elastically deformable, and is compressed between the peripheral edge of the opening and the inner surface of the lid in a state where the lid closes the opening of the container body. body even when the sealing member when removed from the opening edge is spaced from said opening edge, substrate storage container that has contact with the inner surface of the lid. The substrate storage container according to claim 1, wherein the airflow baffle wall is configured mainly with a filter having air permeability. 2. The substrate storage container according to claim 1, wherein a surface of the airflow baffle wall where the airflow collides on the path of the airflow is inclined outward in the orthogonal direction with respect to the near depth direction.

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