JP5789914B2 - Tuning fork type piezoelectric vibrating piece and piezoelectric device - Google Patents

Description

  The present invention relates to a tuning fork type piezoelectric vibrating piece, and more particularly to a piezoelectric device such as a piezoelectric vibrator or a piezoelectric oscillator in which a tuning fork type piezoelectric vibrating piece is housed in a package.

  Conventionally, piezoelectric devices such as piezoelectric vibrators and piezoelectric oscillators have been widely used in communication devices such as mobile phones, information devices such as personal computers, and various other electronic devices. Especially recently, with the high performance and miniaturization of electronic equipment, it is possible to achieve further miniaturization, with a high quality that suppresses the CI value low and exhibits a high Q value (resonance sharpness), There is a demand for a piezoelectric device having high stability.

  In general, the resonance frequency of a tuning fork type piezoelectric vibrating piece is inversely proportional to the square of the length of the vibrating arm and proportional to the arm width. Therefore, if it is attempted to shorten the length of the vibrating arm at the same resonance frequency, the arm width must be reduced in the same manner, which causes a problem that the CI value increases. Therefore, by forming grooves in the longitudinal direction on the front and back main surfaces of the vibrating arm and providing excitation electrodes on the inner surface, even if the length of the vibrating arm is shortened, the field efficiency is reduced without unnecessarily reducing the arm width. A method of improving the CI and suppressing the CI value low is widely adopted.

  Further, the tuning fork type piezoelectric vibrating piece oscillates not only at the target fundamental frequency but also at undesired harmonic frequencies. In order to prevent the influence of such harmonics, the CI value of the harmonic is made larger than the CI value of the fundamental wave, that is, the CI value ratio (= harmonic CI value / fundamental CI value) is set to be larger than 1.0. Therefore, a method for making it difficult to generate harmonics is known. For example, a tuning fork type piezoelectric vibrating piece that is small in size, has a small fundamental wave CI value, and has a good CI value ratio by changing the arm width of the vibrating arm from the base side to the tip side taper. (For example, refer to Patent Document 1).

On the other hand, the Q value of the tuning-fork type piezoelectric vibrating piece is generally expressed by an equation of Q = 1 / (ω · C ₁ · R ₁ ). Here, ω is an angular frequency, C ₁ is an equivalent series capacitance, and R ₁ is an equivalent series resistance. Equivalent series resistance _{R 1} is approximately equal to the CI value. In order to increase the Q value, it is necessary to increase the arm width of the vibrating arm, but the length of the vibrating arm must also be increased in order to suppress the occurrence of the higher-order vibration mode associated therewith. I can't plan. Therefore, by providing a wide weight at the tip of the vibrating arm, even if the vibrating arm is shortened, it is possible to suppress the occurrence of higher-order vibration modes and obtain stability of the vibration frequency, and to increase the Q value. A type piezoelectric vibrating piece is known (see, for example, Patent Documents 2 and 3).

JP 2006-311090 A JP 2005-5896 A JP 2009-27711 A

  The longitudinal grooves formed on the front and back main surfaces of the vibrating arm of the tuning-fork type piezoelectric vibrating piece are preferably formed longer in order to suppress the CI value lower. However, as described in Patent Document 3, if the groove portion is extended to the region of the weight portion at the tip of the vibrating arm, the mass effect of the weight portion that lowers the frequency is impaired, and the vibrating arm may not be shortened sufficiently. .

Further, when the tuning fork type piezoelectric vibrating piece is actually used, the value of the load capacity varies depending on the use condition. Therefore, even if the predetermined nominal frequency is set at the time of manufacture, there is a possibility that the frequency may vary during actual use. In particular, when a large value of C ₁ tuning fork type resonator element, when actually using the tuning fork type resonator element, there is a possibility that the frequency varies greatly due to variation of the load capacitance. As can be seen from the above general formula of the Q value, in order to eliminate or suppress the influence due to the variation in load capacity due to the use conditions, the value of C ₁ of the tuning fork type piezoelectric vibrating piece is reduced, that is, the Q value is sufficiently reduced It needs to be bigger.

  On the other hand, since the cross-sectional area and the cross-sectional shape of the connecting portion between the vibrating arm and the weight portion change suddenly with the presence or absence of the groove portion or the width near the connecting portion, the bending of the vibrating arm locally Stress concentration due to vibration is likely to occur. For this reason, there is a possibility that the vibration of the vibrating arm becomes unstable or undesirable vibration is generated, and in the worst case, the connecting portion between the vibrating arm and the weight portion may be damaged.

  Accordingly, the present invention has been made in view of the above-described conventional problems, and an object of the present invention is to allow a vibrating arm to bend and vibrate satisfactorily and stably in a tuning fork type piezoelectric vibrating piece. In both cases, the vibration characteristics are improved and the miniaturization is realized.

  A further object of the present invention is to provide a piezoelectric device such as a piezoelectric vibrator and an oscillator that can be miniaturized with high performance by providing such a tuning-fork type piezoelectric vibrating piece.

  The inventors of the present application have studied various effects of the range in which the groove portion is provided on the vibrating arm on the Q value of the piezoelectric vibrating piece. As a result, when having a weight portion at the tip of the vibrating arm that is reduced in width from the base portion to the tip side, the Q value is affected between the length of the weight portion and the groove tip position along the longitudinal direction of the vibrating arm. I found that there is a relationship. The present invention has been made to achieve the above object based on such findings.

The tuning fork type piezoelectric vibrating piece of the present invention has a crystal axis of quartz as an X axis as an electric axis, a Y axis as a mechanical axis, and a Z axis as an optical axis,
The base material is a quartz crystal Z plate whose principal surface is a plane including the Y ′ axis and the X axis, in which the X axis is the rotation axis and the Y axis is tilted in the range of 0 ° to 5 ° toward the Z axis. ,
The base,
A width extending in the first direction along the Y ′ axis from the base and orthogonal to the first direction and in the second direction along the X axis is from the base to the first direction. The width gradually decreases over the entire length in the direction and is aligned with the second direction, and alternately approaches and separates from each other within a plane including the first direction and the second direction. A pair of vibrating arms that bend and vibrate repeatedly;
A groove provided on at least one main surface side of the front and back main surfaces of the pair of vibrating arms in a front-back relationship;
Excitation electrodes provided on the front and back main surfaces including the inner surfaces of the groove portions of the pair of vibrating arms and side surfaces connected to the front and back main surfaces;
A weight part integrally provided at the tip of the vibrating arm in the first direction and having a portion that is wider in the second direction than the tip of the vibrating arm;
With
Along the first direction of the vibrating arm, the weight side is a positive direction and the base end side is a negative direction with reference to a connection position P that is a boundary between the vibrating arm and the weight portion,
The length of the weight portion along the first direction is Lw,
When the length along the first direction from the connecting position P to the tip position G in the first direction of the groove is Lg,
−0.1 ≦ Lg / Lw ≦ 0.1
Satisfied,
The weight portion has a tapered portion in which the width along the second direction gradually widens from the connecting position P toward the tip side along the first direction of the vibrating arm;
An inclination angle formed between an outer edge of the tapered portion and the second direction is 50 ° or more and 80 ° or less,
The width along the second direction of the portion on the weight portion side of the groove portion is gradually reduced from the base side toward the weight portion side,
The depth of the portion on the weight portion side of the groove portion is gradually shallower from the base side toward the weight portion side.

As described later, by defining the position of the tip of the groove from the relationship with the weight length in this way, the tuning fork-type piezoelectric vibrating piece can be reduced in size while ensuring good and stable bending vibration, and its vibration characteristics can be reduced. It is possible to optimally set both the Q value and the CI value.
In addition, since the rigidity of the weight portion gradually increases as the width increases from the connecting portion with the vibrating arm in the tapered portion, the stress concentration on the connecting portion with the vibrating arm is alleviated during flexural vibration of the vibrating arm, and vibration occurs. It is possible to better stabilize the flexural vibration of the arm and suppress the generation of undesirable vibrations such as harmonics.

  In one embodiment, the mass of the weight portion can be maintained by providing the groove portion so that the distal end position G thereof is located on the proximal end side with respect to the connection position P with the weight portion, so that the length of the vibrating arm is shortened. Even in this case, the Q value can be improved and the size can be reduced without reducing the effect of the weight part, in which the generation of the higher-order vibration mode is suppressed and the stability of the vibration frequency can be obtained.

In another embodiment, the weight portion, along said second direction of said more tapered section first direction of the distal end side wide you are have a constant part.

  In one embodiment, the groove portion of each vibrating arm is formed to have a portion that gradually decreases in width from the base side toward the tip side, whereby the CI value ratio, that is, the CI value of the second harmonic mode. / The CI value of the fundamental wave mode can be made larger than 1, and oscillation in the harmonic mode can be suppressed.

In another embodiment, the top end of the excitation electrode in the first direction is located closer to the base side than the top end of the groove portion in the first direction in plan view .
In another embodiment, the vibrating arm, the first in the direction of the first tapered portion in the vicinity of connecting portion between the base portion, a second tapered than the first tapered portion in the weight portion The first taper portion has a width that is steeperly reduced as the width along the second direction extends from the base side toward the weight side than the second taper portion , The width of the groove located in the first taper portion of the vibrating arm is constant . This improves the rigidity in the vicinity of the connecting portion between the vibrating arm and the base, thereby reducing the stress concentration that can occur during bending vibration of the vibrating arm, making the bending vibration of the vibrating arm more stable, and preventing vibration leakage. It is possible to suppress the CI value.

In this case, in another embodiment, the region of the groove portion located in the first tapered portion has a constant width, and the region of the groove portion located in the second tapered portion is directed from the base side toward the distal end side. By reducing the width , the CI value ratio can be increased , and a larger space can be secured for routing the wiring drawn from the excitation electrode of the vibrating arm to the base side. This is advantageous in the film forming process.

According to another aspect of the present invention, the tuning-fork type piezoelectric vibrating piece of the present invention described above, by providing a package in which the tuning fork type piezoelectric resonator element is housed, and excellent Q value and a small possibility A piezoelectric device is provided.

The top view of the Example of the tuning fork type piezoelectric vibrating piece by this invention. FIG. 2 is a partially enlarged plan view showing one vibrating arm in FIG. 1. The diagram which shows the relationship between the groove tip position of a vibrating arm, and Q value. The longitudinal cross-sectional view of the piezoelectric vibrator which mounts the tuning fork type piezoelectric vibrating piece of FIG.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 shows a preferred embodiment of a tuning-fork type piezoelectric vibrating piece to which the present invention is applied. The tuning fork type piezoelectric vibrating piece 1 according to this embodiment includes a base 2 and a pair of vibrating arms 3 and 4 extending in parallel from the base. Grooves 5 and 6 extending in the longitudinal direction are formed on the front and back main surfaces of the vibrating arms 3 and 4, respectively. Wide weight portions 7 and 8 are integrally provided at the tips of the vibrating arms, respectively. Even if the length of the vibrating arm is shortened by the weight portion, the vibration frequency can be stabilized by suppressing the generation of the higher-order vibration mode, so that the entire piezoelectric vibrating piece 1 is downsized in the longitudinal direction. be able to.

  The piezoelectric vibrating reed 1 further includes a pair of support arms 9 and 10 extending in parallel with the vibrating arms 3 and 4 from both ends of the base 2 in the width direction. On both sides of the base portion 2, notches 11 and 12 are formed in the vicinity of the connecting portion with the support arms 9 and 10. By this notch, vibration leakage from the vibrating arm to the support arm side through the base can be suppressed.

  The piezoelectric vibrating reed 1 can be formed in a desired shape using a known photoetching technique with a piezoelectric material such as quartz, lithium tantalate, or lithium niobate. In particular, when quartz is used, in the orthogonal coordinate system composed of the X axis (electrical axis), Y axis (mechanical axis), and Z axis (optical axis) of the crystal crystal axis, the X axis and the Y axis are centered on the X axis. A crystal Z plate cut out by rotating the XY plane including the axis counterclockwise in the range of 0 ° to 5 ° is used. In this case, as shown in FIG. 1, the crystal Z plate is usually oriented with the Y axis in the longitudinal direction of the vibrating arm.

  The vibrating arms 3, 4 have first excitation electrodes 13, 14 formed on the front and back main surfaces including the inner surfaces of the grooves 5, 6, and second excitation electrodes 15, 16 formed on the side surfaces thereof. In the present embodiment, the range in which the first excitation electrodes 13 and 14 are provided is to a position slightly ahead of the tips of the grooves 5 and 6. In another embodiment, the first excitation electrode may be provided over the entire length of the groove. The first excitation electrode 13 and the second excitation electrode 15 of one of the vibrating arms are connected to the second excitation electrode 16 and the first excitation electrode 14 of the other vibrating arm, respectively. Lead electrodes 17 and 18 are formed on the surfaces of the support arms 9 and 10, respectively, one of which is the first excitation electrode 15 and the second excitation electrode 14, and the other is the first excitation electrode 13 and the second excitation electrode 16. Are connected to each other through wiring provided on the base 2.

  In FIG. 2, one vibrating arm 3 is shown with the excitation electrode omitted. Since the other vibrating arm 4 is configured substantially the same as the vibrating arm 3, the description thereof is omitted.

  The vibrating arm 3 is formed to have a reduced width so that the width gradually decreases from the base 2 side toward the tip. The vibrating arm 3 of the present embodiment has a first taper portion 3a provided in the vicinity of the connecting portion with the base portion 2 along the longitudinal direction thereof, and a second taper portion 3b continuous from the tip end side. The second taper portion 3b is formed so as to be relatively gently reduced in width to the tip thereof at a substantially constant rate, and the first taper portion 3a is formed to be steeper than the second taper portion 3b. As a result, the vibration arm has a higher rigidity at the connecting portion with the base 2, so stress concentration due to the bending vibration is alleviated, the bending vibration is stabilized more stably, and vibration leakage from the connecting portion is suppressed. Thus, the CI value can be reduced.

  The groove 5 has a portion that gradually decreases in width so that the cross-sectional area gradually decreases from the base 2 side toward the distal end side. In the groove portion 5 of the present embodiment, a region 5a corresponding to the first taper portion 3a of the vibrating arm 3 is formed with a constant width along the longitudinal direction, and a region 5b corresponding to the second taper portion 3b is formed at the tip thereof. Until then, the width is reduced relatively slowly at a constant rate. By providing the reduced width portion in the groove portion 5, the piezoelectric vibrating reed 1 can have its CI value ratio = CI value of the second harmonic mode / CI value of the fundamental mode greater than 1, and the harmonic mode Oscillation can be suppressed. Further, since the wiring 5 is routed from the excitation electrode to the base 2 side by having the constant width region 5a, a larger space can be secured. It is advantageous in the process.

  The cross-sectional area of the groove 5 can be gradually reduced by gradually decreasing the depth of the groove toward the tip of the vibrating arm 3. However, in the wet etching of the groove portion, high-precision processing can be easily performed by reducing the width as described above, rather than processing in the depth direction. Thereby, the variation in shape among the individual piezoelectric vibrating reeds 1 and the accompanying variation in vibration characteristics and impact resistance can be prevented or suppressed.

  The weight portion 7 has a tapered portion 7 a that gradually widens from the connecting position P with the vibrating arm to the tip side along the longitudinal direction of the vibrating arm 3. Most of the weight portion 7 that is continuous to the tip side from the tapered portion 7a is a rectangular portion 7b having a constant width. The taper portion 7a increases in width from the connection position P with the vibrating arm 3 and gradually increases in rigidity. Therefore, the bending vibration of the vibrating arm can be satisfactorily stabilized because the stress concentration on the connecting portion between the vibrating arm and the weight portion 7 is alleviated, and undesirable vibrations such as harmonics are suppressed. Is done.

  At this time, the tapered portion 7a is preferably set so that the inclination angle θ is about 50 to 80 ° with reference to the width direction orthogonal to the longitudinal direction of the vibrating arm 3. When the piezoelectric vibrating piece 1 is formed using the crystal Z plate as described above, the tapered portion is formed when the piezoelectric vibrating piece is externally processed by wet etching by setting the inclination angle θ in this way. This is advantageous because it is possible to prevent or suppress the formation of protrusions called fins at the corners of the vibrating arm 3 and the side surface of the vibrating arm 3.

  The groove portion 5 has a total length that is shorter than the entire length of the vibrating arm 3 along the longitudinal direction, and the tip position G is disposed slightly closer to the base 2 side than the connection position P between the weight portion 7 and the vibrating arm 3. As shown in the figure, the length Lw of the weight portion 7 and the connection position P are defined when the connecting position P is set as a reference, that is, 0 in the longitudinal direction of the vibrating arm 3 and the distal end side is a positive direction and the proximal end side is a negative direction. The groove portion 5 is provided so that the length Lg from the groove portion tip position G to the groove portion tip position G satisfies −0.1 ≦ Lg / Lw <0.

  The inventors of the present application studied the influence of the tip position G of the groove portion 5 on the Q value of the piezoelectric vibrating piece 1 in relation to the weight portion length Lw. FIG. 3 shows the result of confirming the change of the Q value with respect to the ratio of the length Lg from the connecting position P to the groove tip position G with respect to the weight part length Lw by experiment. In the figure, a solid line indicates a change in Q value, and a broken line indicates a corresponding change in CI value.

  From the experimental results in FIG. 3, it can be seen that the range of −0.1 ≦ Lg / Lw ≦ 0.1 is the optimum range for both the Q value and the CI value. However, in the range of 0 <Lg / Lw ≦ 0.1, since the groove portion 5 enters the weight portion 7, the mass of the weight portion decreases accordingly. Therefore, even if the length of the vibrating arm 3 is shortened, there is a possibility that the function and effect of the weight portion 7 that the stability of the vibration frequency can be obtained by suppressing the generation of the higher order vibration mode is somewhat impaired. However, since the length of the groove portion 5 entering the weight portion is limited to the above range, it is considered that there is no substantial influence in normal use. Further, when Lg / Lw = 0, that is, when the groove tip position G is on the connection position P between the weight 7 and the vibrating arm 3, the rigidity at the boundary is greatly reduced, so that the inclination of the tapered portion 7a is increased. It is preferable to increase the angle θ as much as possible to relieve stress concentration during vibration of the vibrating arm.

  FIG. 4 shows an embodiment of a piezoelectric vibrator on which the tuning fork type piezoelectric vibrating piece 1 of FIG. 1 is mounted. The piezoelectric vibrator 21 of the present embodiment includes a surface mount type package 22 for accommodating the piezoelectric vibrating piece 1. The package 22 includes a rectangular box-shaped base 23 made of, for example, a ceramic material, and a rectangular flat plate-shaped lid 24 made of glass or the like.

  The base 23 has a mount electrode 25 formed at a position corresponding to the support arms 9 and 10 of the piezoelectric vibrating reed 1 on the bottom surface of the space defined therein. The piezoelectric vibrating reed 1 is electrically connected to the inside of the base 23 and mechanically fixed and supported by aligning the support arms with the corresponding mount electrodes 25 and bonding them with the conductive adhesive 26. The lid 24 is airtightly bonded to the upper end of the base 23 and hermetically seals the piezoelectric vibrating piece in the package 22. In this state, when a predetermined current is applied to the piezoelectric vibrating piece 1 from the outside via the mount electrode 25, the vibrating arms 3 and 4 bend and vibrate in a direction approaching and separating from each other at a predetermined frequency.

  The present invention is not limited to the above embodiments, and can be implemented with various modifications or changes within the technical scope thereof. For example, the present invention can be applied to a tuning-fork type piezoelectric vibrating piece having a structure in which a supporting arm is not fixed and cantilevered and fixed at a base, and a piezoelectric gyro element having a vibrating arm extending from the base. it can. Moreover, in the said Example, although the groove part was provided in the front and back both main surfaces of a vibrating arm, a groove part can also be provided only in either the front side or the back side main surface. Furthermore, the present invention can be applied to various piezoelectric devices such as a piezoelectric oscillator in addition to the piezoelectric vibrator.

DESCRIPTION OF SYMBOLS 1 ... Piezoelectric vibration piece, 2 ... Base part, 3, 4 ... Vibration arm, 3a ... 1st taper part, 3b ... 2nd taper part, 5, 6 ... Groove part, 5a, 5b ... area | region, 7, 8 ... Weight part, 7a ... tapered portion, 9,10 ... support arm, 11,12 ... notch, 13,14 ... first excitation electrode, 15,16 ... second excitation electrode, 17,18 ... extraction electrode, 21 ... piezoelectric vibrator, 22 ... Package, 23 ... Base, 24 ... Lid, 25 ... Mount electrode, 26 ... Conductive adhesive.

Claims (5)

The crystal axis of the crystal is the X axis as the electrical axis, the Y axis as the mechanical axis, and the Z axis as the optical axis,
The base material is a quartz crystal Z plate whose principal surface is a plane including the Y ′ axis and the X axis, in which the X axis is the rotation axis and the Y axis is tilted in the range of 0 ° to 5 ° toward the Z axis. ,
The base,
A width extending in the first direction along the Y ′ axis from the base and orthogonal to the first direction and in the second direction along the X axis is from the base to the first direction. The width gradually decreases over the entire length in the direction and is aligned with the second direction, and alternately approaches and separates from each other within a plane including the first direction and the second direction. A pair of vibrating arms that bend and vibrate repeatedly;
A groove provided on at least one main surface side of the front and back main surfaces of the pair of vibrating arms in a front-back relationship;
Excitation electrodes provided on the front and back main surfaces including the inner surfaces of the groove portions of the pair of vibrating arms and side surfaces connected to the front and back main surfaces;
A weight part integrally provided at the tip of the vibrating arm in the first direction and having a portion that is wider in the second direction than the tip of the vibrating arm;
With
Along the first direction of the vibrating arm, the weight side is a positive direction and the base end side is a negative direction with reference to a connection position P that is a boundary between the vibrating arm and the weight portion,
The length of the weight portion along the first direction is Lw,
When the length along the first direction from the connecting position P to the tip position G in the first direction of the groove is Lg,
−0.1 ≦ Lg / Lw ≦ 0.1
Satisfied,
The weight portion has a tapered portion in which the width along the second direction gradually widens from the connecting position P toward the tip side along the first direction of the vibrating arm;
An inclination angle formed between an outer edge of the tapered portion and the second direction is 50 ° or more and 80 ° or less,
The width along the second direction of the portion on the weight portion side of the groove portion is gradually reduced from the base side toward the weight portion side,
The tuning-fork type piezoelectric vibrating piece according to claim 1, wherein a depth of the groove portion on the weight portion side gradually decreases from the base portion side toward the weight portion side. In claim 1,
The tuning fork-type piezoelectric vibrating piece according to claim 1, wherein the weight portion has a portion having a constant width along the second direction on the tip side in the first direction from the tapered portion. In claim 1 or 2,
The tuning-fork type piezoelectric vibrating piece according to claim 1, wherein a tip end of the excitation electrode in the first direction is located closer to the base side than a tip end of the groove portion in the first direction. In any one of Claims 1 thru | or 3,
The vibrating arm is
Along the first direction,
A first tapered portion in the vicinity of the connecting portion with the base portion;
A second taper portion that is closer to the weight portion than the first taper portion;
Including
The first taper portion has a width that is steeperly reduced as the width along the second direction is closer to the weight portion side than the second taper portion,
A width of the groove located in the first tapered portion of the vibrating arm is constant;
A tuning-fork type piezoelectric vibrating piece characterized by the above. A tuning fork type piezoelectric vibrating piece according to any one of claims 1 to 4,
A package containing the tuning-fork type piezoelectric vibrating piece;
A piezoelectric device comprising:

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