JP4682589B2 - Piezoelectric actuator and light sweep device using the same - Google Patents

Piezoelectric actuator and light sweep device using the same Download PDF

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JP4682589B2
JP4682589B2 JP2004326187A JP2004326187A JP4682589B2 JP 4682589 B2 JP4682589 B2 JP 4682589B2 JP 2004326187 A JP2004326187 A JP 2004326187A JP 2004326187 A JP2004326187 A JP 2004326187A JP 4682589 B2 JP4682589 B2 JP 4682589B2
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arm
piezoelectric
mirror
light beam
support
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JP2006141081A (en
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雅昭 葉山
幸治 野村
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Panasonic Corp
Panasonic Holdings Corp
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Panasonic Corp
Matsushita Electric Industrial Co Ltd
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Description

本発明は、圧電駆動型のアクチュエータおよびこれを用いた光線掃引装置に関するものである。   The present invention relates to a piezoelectric drive type actuator and a light beam sweeping device using the same.

従来、レーザープリンタなどに用いられるレーザーから発せられた光線を掃引する光線掃引装置としては、多角形状の回転体の側面にミラーを設けたポリゴンミラーが用いられ、このポリゴンミラーを回転させることにより感光体ドラムの走査面上にレーザー光線を掃引させていた。   Conventionally, as a light beam sweeping device for sweeping light beams emitted from a laser used in a laser printer or the like, a polygon mirror provided with a mirror on the side surface of a polygonal rotating body is used. The laser beam was swept onto the scanning surface of the body drum.

なお、この出願の発明に関する先行技術文献情報としては、例えば、特許文献１が知られている。
特開平１１−２８１９０８号公報 As prior art document information relating to the invention of this application, for example, Patent Document 1 is known.
Japanese Patent Laid-Open No. 11-281908

そして、近年カラーレーザープリンタの普及やプリンタの小型化に伴い、光線掃引装置の小型化が命題となっている。   In recent years, with the widespread use of color laser printers and miniaturization of printers, miniaturization of light beam sweeping devices has become a proposition.

しかしながら、ポリゴンミラーを用いた光線掃引装置においては、ポリゴンミラーを小型化することに加え、このポリゴンミラーを駆動させる駆動装置が別途必要となるためその小型化が非常に困難なものとなっていた。   However, in the light beam sweeping apparatus using the polygon mirror, in addition to downsizing the polygon mirror, a separate drive device for driving the polygon mirror is required, so that downsizing is very difficult. .

そこで、本発明はこのような問題を解決し光線掃引装置を小型化することを目的とする。   Therefore, the present invention aims to solve such problems and reduce the size of the light beam sweeper.

そして、この目的を達成するために本発明は、光源から発せられた光線を掃引させるアクチュエータを、支持体と、一端がこの支持体に支持された第１のアームと、この第１のアームの他端部に支持されるとともに前記第１のアームの一端から他端に至る延出方向とは逆向きに延出された第２のアームとを備え、これら第１、第２のアームを同一平面に設けるとともに、前記第１のアームに圧電薄膜からなる圧電駆動電極と、前記第２のアームの支持部側に圧電薄膜からなる第２の圧電駆動電極を設け、前記圧電駆動電極の駆動周波数を前記第１のアームの自己共振周波数と前記第２のアームの自己共振周波数との間に設定したものである。 In order to achieve this object, the present invention provides an actuator for sweeping light emitted from a light source, a support, a first arm supported at one end by the support, and the first arm. A second arm supported by the other end and extended in the direction opposite to the extending direction from one end of the first arm to the other end, and the first and second arms are the same. A piezoelectric drive electrode made of a piezoelectric thin film is provided on the first arm, and a second piezoelectric drive electrode made of a piezoelectric thin film is provided on the support side of the second arm, and the drive frequency of the piezoelectric drive electrode is provided. Is set between the self-resonant frequency of the first arm and the self-resonant frequency of the second arm.

このような構成とすることで、光線を掃引させる為のアクチュエータを小型化でき、ひいてはこのアクチュエータを用いた光線掃引装置を小型化できるのである。   By adopting such a configuration, the actuator for sweeping the light beam can be reduced in size, and thus the light beam sweeping device using this actuator can be reduced in size.

以下、本発明の一実施形態について図を用いて説明する。   Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

図１はレーザービームプリンタの感光ユニットを模式的に表したものであり、光源となるレーザー１と、このレーザー１から発せられたレーザー光線２が照射される感光ドラム３と、レーザー光線２を反射させるとともにその反射方向を可変させることでレーザー光線２を感光ドラム３の走査面上を掃引させる光線掃引装置４により形成されている。   FIG. 1 schematically shows a photosensitive unit of a laser beam printer. A laser 1 serving as a light source, a photosensitive drum 3 irradiated with a laser beam 2 emitted from the laser 1, and a laser beam 2 are reflected. It is formed by a light beam sweeping device 4 that sweeps the laser beam 2 on the scanning surface of the photosensitive drum 3 by changing the reflection direction.

そして、この感光ユニットに用いられる光線掃引装置４におけるミラー５を駆動させる圧電アクチュエータ６は図２に示されるように、基本的にシリコン基板をベースとしたもので、外部取り付け用に設けられた支持体７から一方向に延出された第１のアーム８と、この第１のアーム８の先端部分から支持体７側に向けて延出された第２のアーム９がシリコン基板で一体に形成されており、第１のアーム８の支持体７側の表面に圧電駆動電極１０が設けられた構成となっている。   The piezoelectric actuator 6 for driving the mirror 5 in the light beam sweeping device 4 used in this photosensitive unit is basically based on a silicon substrate as shown in FIG. 2, and is provided for external mounting. A first arm 8 extending in one direction from the body 7 and a second arm 9 extending from the distal end portion of the first arm 8 toward the support body 7 are integrally formed of a silicon substrate. The piezoelectric drive electrode 10 is provided on the surface of the first arm 8 on the support 7 side.

また、この圧電駆動電極１０の構成は、図３に示されるようにチタン酸ジルコン酸鉛（ＰＺＴ）により形成された圧電薄膜１１を上部電極１２と下部電極１３により挟み込んだ構成であり、これらの上部電極１２、下部電極１３および圧電薄膜１１は第１のアーム８を形成するシリコン基板上に順次スパッタリングにより形成されるものである。   The piezoelectric drive electrode 10 has a structure in which a piezoelectric thin film 11 formed of lead zirconate titanate (PZT) is sandwiched between an upper electrode 12 and a lower electrode 13 as shown in FIG. The upper electrode 12, the lower electrode 13, and the piezoelectric thin film 11 are sequentially formed on the silicon substrate on which the first arm 8 is formed by sputtering.

また、図２に示される第２のアーム９の開放端側に設けられているミラー５は金やアルミの層として形成されるもので、この層も圧電駆動電極１０と同様にスパッタリングにより形成されるものである。   Further, the mirror 5 provided on the open end side of the second arm 9 shown in FIG. 2 is formed as a layer of gold or aluminum, and this layer is also formed by sputtering like the piezoelectric driving electrode 10. Is.

そして、この圧電アクチュエータ６は図３に示される上部電極１２と下部電極１３との間に駆動電圧を印加することにより圧電駆動電極１０が上下方向に撓むため、この撓みにより第１のアーム８及び第２のアーム９が上下方向に撓むことになり、この第２のアーム９の撓みによりその表面に形成されたミラー５の角度が変化することが出来るものである。   In the piezoelectric actuator 6, since the piezoelectric driving electrode 10 is bent in the vertical direction by applying a driving voltage between the upper electrode 12 and the lower electrode 13 shown in FIG. 3, the first arm 8 is bent by this bending. The second arm 9 is bent in the vertical direction, and the angle of the mirror 5 formed on the surface of the second arm 9 can be changed by the bending of the second arm 9.

具体的には図４に示されるように、先ず第１のアーム８が圧電駆動電極１０により機械的に下方に撓ませた場合、第１のアーム８の先端部分に支持されている第２のアーム９の支持部１４が矢印１５で示すように下方に移動することになるが、第２のアーム９は先端側の慣性モーメントにより矢印１６で示すように上方に撓むこととなる。次に第１のアーム８を圧電駆動電極１０により機械的に上方に撓ませた場合、第１のアーム８の先端に支持されている第２のアーム９の支持部１４が矢印１７で示すように上方に移動することになるが、第２のアーム９は先端側の慣性モーメントにより矢印１８で示すように下方に撓むこととなる。   Specifically, as shown in FIG. 4, when the first arm 8 is first mechanically bent downward by the piezoelectric drive electrode 10, the second arm 8 is supported by the tip portion of the first arm 8. The support portion 14 of the arm 9 moves downward as indicated by an arrow 15, but the second arm 9 bends upward as indicated by an arrow 16 due to the moment of inertia on the distal end side. Next, when the first arm 8 is mechanically bent upward by the piezoelectric drive electrode 10, the support portion 14 of the second arm 9 supported at the tip of the first arm 8 is indicated by an arrow 17. However, the second arm 9 bends downward as indicated by the arrow 18 due to the moment of inertia on the distal end side.

この構成によれば、ミラー５の傾斜角の可変幅が第１のアーム８の撓み角と第２のアーム９の撓み角との合成により形成されるため、圧電アクチュエータ６として大きな可変幅を確保することができ、圧電アクチュエータ６を小型のものと出来る構造となっている。   According to this configuration, since the variable width of the tilt angle of the mirror 5 is formed by the combination of the bending angle of the first arm 8 and the bending angle of the second arm 9, a large variable width is secured as the piezoelectric actuator 6. The piezoelectric actuator 6 can be made small.

また、図２に示されるように長さの違う第１、第２のアーム８，９を一体的に振動させる場合、第１のアーム８と第２のアーム９における自己共振周波数が異なるため、この圧電アクチュエータ６の周波数特性は図５に示されるように、２つの共振周波数１９，２０間に比較的周波数特性が平坦となる領域２１が形成されることとなる。   In addition, when the first and second arms 8 and 9 having different lengths are vibrated integrally as shown in FIG. 2, the self-resonant frequencies in the first arm 8 and the second arm 9 are different. As shown in FIG. 5, the piezoelectric actuator 6 has a frequency characteristic in which a region 21 having a relatively flat frequency characteristic is formed between the two resonance frequencies 19 and 20.

そこで、この２つの共振周波数１９，２０間の比較的周波数特性が平坦となる領域２１において圧電駆動電極１０の駆動周波数を設定することで、周波数変動に対して撓み特性の変化が生じにくい安定した圧電アクチュエータ６を形成できるのである。   Therefore, by setting the drive frequency of the piezoelectric drive electrode 10 in the region 21 where the frequency characteristic between the two resonance frequencies 19 and 20 is relatively flat, the change in the bending characteristic is less likely to occur with respect to the frequency fluctuation. The piezoelectric actuator 6 can be formed.

すなわち、圧電アクチュエータ６を駆動するにあたりその撓み量を大きくしようとした場合、通常、圧電駆動電極１０の駆動周波数を第１、第２のアーム８，９の自己共振周波数１９，２０のいずれか、例えば自己共振特性が大きい第２のアーム９の自己共振周波数２０に合わせることにより、圧電アクチュエータ６として大きな撓みを発生することが出来るのであるが、この自己共振周波数２０の領域においては周波数変動に対する撓み量の変化が大きくなることから、この撓み量を安定化させるには圧電駆動電極１０に対する駆動周波数を非常に厳格に制御しなければならず、また、経時変化に伴う自己共振周波数２０の変動により製品寿命が短命なものとなってしまうが、先に述べたように周波数特性の安定した領域２１に圧電駆動電極１０の駆動周波数を確保することで、そのような問題が解決できるのである。   That is, when trying to increase the amount of deflection in driving the piezoelectric actuator 6, the drive frequency of the piezoelectric drive electrode 10 is usually set to one of the self-resonant frequencies 19 and 20 of the first and second arms 8 and 9, For example, by adjusting the self-resonance frequency 20 of the second arm 9 having a large self-resonance characteristic, it is possible to generate a large deflection as the piezoelectric actuator 6. Since the amount of change becomes large, in order to stabilize the amount of bending, the drive frequency for the piezoelectric drive electrode 10 must be controlled very strictly, and due to fluctuations in the self-resonant frequency 20 with time. Although the product life is short-lived, as described above, the piezoelectric drive current is applied to the region 21 having a stable frequency characteristic. By securing the driving frequency of 10, it is that such a problem can be solved.

なお、圧電駆動電極１０の駆動周波数を第１のアーム８の自己共振周波数１９と第２のアーム９の自己共振周波数２０との間に設定することで、撓み量が周波数特性のピークの時のものと比べて減少するが、撓み量の減少を抑制するにあたっては破線に示されるように第１、第２のアーム８，９の自己共振周波数１９，２０を近づけることで、２つの自己共振周波数１９，２０間における周波数特性の安定した領域２１の撓み量が見かけ上底上げされ、圧電アクチュエータ６の撓み量の減少を抑制することが出来るのである。   In addition, by setting the drive frequency of the piezoelectric drive electrode 10 between the self-resonant frequency 19 of the first arm 8 and the self-resonant frequency 20 of the second arm 9, the amount of deflection is at the peak of the frequency characteristic. In order to suppress the decrease in the amount of deflection, the two self-resonant frequencies can be reduced by bringing the self-resonant frequencies 19 and 20 of the first and second arms 8 and 9 closer as shown by the broken line. The amount of bending of the region 21 having a stable frequency characteristic between 19 and 20 is apparently raised, and a decrease in the amount of bending of the piezoelectric actuator 6 can be suppressed.

また、この圧電アクチュエータ６を用いて光線掃引装置４を形成する場合、第２のアーム９の撓み量が重要となるのであるが、レーザー１から発せられたレーザー光線２をミラー５で反射させながらその反射角を可変させることで感光ドラム３の走査線上に正確に掃引させなければならず、第２のアーム９のミラー５が設けられる領域が撓むことは好ましくなく、この領域における撓みを抑制するため図３に示されるように、ミラー５が設けられる領域での第２のアーム９の厚みを大きくし基板強度を上げることが望ましい。   Further, when the beam sweep device 4 is formed using this piezoelectric actuator 6, the amount of bending of the second arm 9 is important, but the laser beam 2 emitted from the laser 1 is reflected by the mirror 5 while being reflected. By varying the reflection angle, it is necessary to accurately sweep the scanning line of the photosensitive drum 3, and it is not preferable that the region where the mirror 5 of the second arm 9 is provided is bent, and the bending in this region is suppressed. Therefore, as shown in FIG. 3, it is desirable to increase the thickness of the second arm 9 in the region where the mirror 5 is provided to increase the substrate strength.

さらに第１のアーム８の先端部分、つまり第２のアーム９の支持部１４となる領域においても同様に厚みを大きくし基板強度を上げることが望ましい。   Furthermore, it is desirable to increase the thickness of the first arm 8 by increasing the thickness in the same manner in the tip portion of the first arm 8, that is, the region serving as the support portion 14 of the second arm 9.

なお、このような圧電アクチュエータ６において撓み量を大きくするには、第２のアーム９の支持部１４側に対して、さらに、破線で示す圧電駆動電極２２を設けることでその駆動力が上乗せされて撓み量を大きくすることが出来るのである。ただし、第１のアーム８と第２のアーム９は図４で示したようにその撓み方向が逆向きとなることから、第１のアーム８に設けられた圧電駆動電極１０と第２のアーム９に設けられた圧電駆動電極２２はそれぞれ駆動電圧が反転するように制御するものである。   In order to increase the amount of bending in such a piezoelectric actuator 6, the driving force is added by providing a piezoelectric driving electrode 22 indicated by a broken line on the support portion 14 side of the second arm 9. Therefore, the amount of deflection can be increased. However, since the bending directions of the first arm 8 and the second arm 9 are opposite as shown in FIG. 4, the piezoelectric drive electrode 10 and the second arm provided on the first arm 8 are reversed. Each of the piezoelectric drive electrodes 22 provided at 9 is controlled so that the drive voltage is inverted.

本発明は、圧電駆動型のアクチュエータおよびこれを用いた光線掃引装置に関して小型化できるという効果を有し、特にレーザープリンタ用途に有用である。   INDUSTRIAL APPLICABILITY The present invention has an effect that it can be miniaturized with respect to a piezoelectric drive type actuator and a light beam sweeping device using the same, and is particularly useful for laser printer applications.

本発明の一実施形態における感光体ユニットの模式図Schematic diagram of a photoreceptor unit according to an embodiment of the present invention. 同感光体ユニットに用いられる圧電アクチュエータの上面図Top view of the piezoelectric actuator used in the photoconductor unit 同圧電アクチュエータに用いられる圧電駆動電極の断面図Sectional view of the piezoelectric drive electrode used in the piezoelectric actuator 同圧電アクチュエータの動作状態を示す模式図Schematic diagram showing the operating state of the piezoelectric actuator 同圧電アクチュエータの周波数特性図Frequency characteristics of the piezoelectric actuator

符号の説明Explanation of symbols

１ 光源（レーザー）
２ 光線（レーザー光線）
４ 光線掃引装置
５ ミラー
６ 圧電アクチュエータ
７ 支持体
８ 第１のアーム
９ 第２のアーム
１０ 圧電駆動電極
１１ 圧電薄膜 1 Light source (laser)
2 rays (laser rays)
DESCRIPTION OF SYMBOLS 4 Light sweeping device 5 Mirror 6 Piezoelectric actuator 7 Support body 8 1st arm 9 2nd arm 10 Piezoelectric drive electrode 11 Piezoelectric thin film

Claims (5)

支持体と、一端がこの支持体に支持された第１のアームと、この第１のアームの他端部に支持されるとともに前記第１のアームの一端から他端に至る延出方向とは逆向きに延出された第２のアームとを備え、これら第１、第２のアームを同一平面に設けるとともに、前記第１のアームに圧電薄膜からなる圧電駆動電極と、前記第２のアームの支持部側に圧電薄膜からなる第２の圧電駆動電極を設け、前記圧電駆動電極の駆動周波数を前記第１のアームの自己共振周波数と前記第２のアームの自己共振周波数との間に設定したことを特徴とする圧電アクチュエータ。 A support, a first arm having one end supported by the support, and a direction extending from one end of the first arm to the other end while being supported by the other end of the first arm. A second arm extending in the opposite direction, the first and second arms being provided on the same plane, a piezoelectric drive electrode made of a piezoelectric thin film on the first arm, and the second arm A second piezoelectric drive electrode made of a piezoelectric thin film is provided on the support side of the first electrode, and the drive frequency of the piezoelectric drive electrode is set between the self-resonant frequency of the first arm and the self-resonant frequency of the second arm. A piezoelectric actuator characterized by that. 第１のアームにおける第２のアームの接続部分の厚みを前記第２のアームの厚みより大きくしたことを特徴とする請求項１に記載の圧電アクチュエータ。 2. The piezoelectric actuator according to claim 1, wherein a thickness of a connection portion of the second arm in the first arm is larger than a thickness of the second arm. 光源から発せられた光線をミラーに照射し、前記ミラーを駆動させることにより反射光線を掃引させる光線掃引装置において、前記ミラーを駆動させるアクチュエータは、支持体と、一端がこの支持体に支持された第１のアームと、この第１のアームの他端に支持されるとともに前記第１のアームの一端から他端に至る延出方向とは逆向きに延出された第２のアームと、これら第１、第２のアームを同一平面に設けるとともに、前記第１のアームに圧電薄膜からなる圧電駆動電極と、前記第２のアームの支持部側に圧電薄膜からなる第２の圧電駆動電極を設け、前記圧電駆動電極の駆動周波数を前記第１のアームの自己共振周波数と前記第２のアームの自己共振周波数との間に設定し、前記ミラーを前記第２のアームにおける他端側の表面に設けたことを特徴とする光線掃引装置。 In the light beam sweeping device that sweeps the reflected light beam by irradiating the mirror with the light beam emitted from the light source and driving the mirror, the actuator for driving the mirror has a support and one end supported by the support. A first arm and a second arm supported by the other end of the first arm and extending in a direction opposite to the extending direction from one end of the first arm to the other end; and The first and second arms are provided on the same plane, the piezoelectric drive electrode made of a piezoelectric thin film is provided on the first arm, and the second piezoelectric drive electrode made of a piezoelectric thin film is provided on the support portion side of the second arm. And the driving frequency of the piezoelectric driving electrode is set between the self-resonant frequency of the first arm and the self-resonant frequency of the second arm, and the mirror is disposed on the other surface of the second arm. In Rays sweep and wherein the digit. 第１のアームにおける第２のアームの接続部分の厚みを前記第２のアームの厚みより大きくしたことを特徴とする請求項３に記載の光線掃引装置。 The light beam sweeping apparatus according to claim 3, wherein a thickness of a connection portion of the second arm in the first arm is larger than a thickness of the second arm. 第２のアームにおいてミラーが設けられた領域の厚みを他の部分の厚みより大きくしたことを特徴とする請求項３に記載の光線掃引装置。 4. The light beam sweeping apparatus according to claim 3, wherein the thickness of the area where the mirror is provided in the second arm is made larger than the thickness of the other part.
JP2004326187A 2004-11-10 2004-11-10 Piezoelectric actuator and light sweep device using the same Expired - Fee Related JP4682589B2 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03106885U (en) * 1990-02-20 1991-11-05
JPH0739018U (en) * 1993-12-25 1995-07-14 東光株式会社 Laser pointer
WO1996014687A1 (en) * 1994-11-07 1996-05-17 Matsushita Electric Industrial Co., Ltd. Piezoelectric actuator and pyroelectric infrared-ray sensor using the same
JPH09105676A (en) * 1995-10-12 1997-04-22 Matsushita Electric Ind Co Ltd Piezoelectric actuator and pyroelectric type infrared sensor using the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03106885U (en) * 1990-02-20 1991-11-05
JPH0739018U (en) * 1993-12-25 1995-07-14 東光株式会社 Laser pointer
WO1996014687A1 (en) * 1994-11-07 1996-05-17 Matsushita Electric Industrial Co., Ltd. Piezoelectric actuator and pyroelectric infrared-ray sensor using the same
JPH09105676A (en) * 1995-10-12 1997-04-22 Matsushita Electric Ind Co Ltd Piezoelectric actuator and pyroelectric type infrared sensor using the same

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