JP4236535B2 - Large pellicle storage container - Google Patents
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- JP4236535B2 JP4236535B2 JP2003283891A JP2003283891A JP4236535B2 JP 4236535 B2 JP4236535 B2 JP 4236535B2 JP 2003283891 A JP2003283891 A JP 2003283891A JP 2003283891 A JP2003283891 A JP 2003283891A JP 4236535 B2 JP4236535 B2 JP 4236535B2
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- 238000003860 storage Methods 0.000 title claims description 39
- 230000003014 reinforcing effect Effects 0.000 claims description 27
- 239000000463 material Substances 0.000 claims description 18
- 229920005989 resin Polymers 0.000 claims description 11
- 239000011347 resin Substances 0.000 claims description 11
- 238000007666 vacuum forming Methods 0.000 claims description 11
- 239000000853 adhesive Substances 0.000 description 19
- 230000001070 adhesive effect Effects 0.000 description 19
- 238000004140 cleaning Methods 0.000 description 7
- 230000001681 protective effect Effects 0.000 description 6
- 230000002787 reinforcement Effects 0.000 description 6
- 238000009434 installation Methods 0.000 description 5
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 4
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
- -1 polyethylene terephthalate Polymers 0.000 description 4
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- 239000004065 semiconductor Substances 0.000 description 3
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 239000000020 Nitrocellulose Substances 0.000 description 1
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- 229910052751 metal Inorganic materials 0.000 description 1
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- 150000002739 metals Chemical class 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
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- 229920000573 polyethylene Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
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- Preparing Plates And Mask In Photomechanical Process (AREA)
- Packaging Frangible Articles (AREA)
Description
本発明は、ＬＳＩや液晶パネルを製造する際のリソグラフィー工程で使用されるフォトマスクや、レティクルに異物が付着することを防止するために用いられるペリクルの収納容器に関し、特に液晶用大型ペリクルの収納容器に関するものである。 The present invention relates to a photomask used in a lithography process when manufacturing an LSI or a liquid crystal panel, and a pellicle storage container used to prevent foreign matter from adhering to a reticle, and particularly to storing a large pellicle for liquid crystal. It relates to the container.
従来、半導体回路パターン等の製造に於いては、一般にペリクルと呼ばれる防塵手段を用いて、フォトマスクやレティクルへの異物の付着を防止することが行われている（例えば特許文献１）。ペリクルはフォトマスク或いはレティクルの形状に合わせた形状を有する厚さ数ミリ程度の枠体の上縁面に、厚さ10μm以下のニトロセルロース或いはセルロース誘導体などの透明な高分子膜（以下、ペリクル膜という）を展張して接着し、かつ該枠体の下縁面に粘着材を塗着すると共に、この粘着材上に所定の接着力で保護フィルムを粘着させたものである。 2. Description of the Related Art Conventionally, in the manufacture of semiconductor circuit patterns and the like, it has been practiced to prevent foreign matter from adhering to a photomask or reticle using a dust-proof means generally called a pellicle (for example, Patent Document 1). The pellicle is a transparent polymer film (hereinafter referred to as a pellicle film) such as nitrocellulose or a cellulose derivative having a thickness of 10 μm or less on the upper edge surface of a frame of about several millimeters thick having a shape matched to the shape of a photomask or reticle. The adhesive is applied to the lower edge surface of the frame body, and a protective film is adhered to the adhesive material with a predetermined adhesive force.
前記粘着材は、ペリクルをフォトマスク或いはレティクルに固着するためのものであり、また、保護フィルムは該粘着材がその用に供するまで該粘着材の接着力を維持するために、該粘着材の接着面を保護するものである。このペリクルを製造者から使用者に運搬するに当たっては、ペリクル膜等に異物が付着するのを防ぎ、或いはペリクルが損傷するのを防ぐために、該ペリクルをトレイと蓋とからなる収納容器に収納し、更に防塵袋等に収納して運搬するのが一般的である。 The pressure-sensitive adhesive is for fixing the pellicle to a photomask or reticle, and the protective film is used to maintain the adhesive strength of the pressure-sensitive adhesive until the pressure-sensitive adhesive is used for that purpose. It protects the adhesive surface. When transporting this pellicle from the manufacturer to the user, in order to prevent foreign matter from adhering to the pellicle film or the like or to prevent the pellicle from being damaged, the pellicle is stored in a storage container composed of a tray and a lid. Further, it is generally carried in a dustproof bag or the like.
従来、前述の構造を有する収納容器への収納は、図８及び図９に示すように行われていた。即ち、図に於いて、ペリクル膜52は展張（ピンと張った）状態で枠体51の一方の上縁面に接着され、枠体51の他の面（下縁面）には適当な厚さの粘着材53が設けられ、さらに粘着材53の下面には保護フィルムが貼り付けられてペリクルを構成している。このペリクルは、トレイ55の平坦な面である設置面55ａの上に保護フィルムが接するように置かれる。 Conventionally, storage in a storage container having the above-described structure has been performed as shown in FIGS. That is, in the figure, the pellicle film 52 is bonded to one upper edge surface of the frame 51 in a stretched state, and an appropriate thickness is applied to the other surface (lower edge surface) of the frame 51. An adhesive material 53 is provided, and a protective film is attached to the lower surface of the adhesive material 53 to constitute a pellicle. The pellicle is placed so that the protective film is in contact with the installation surface 55a which is a flat surface of the tray 55.
トレイ55の設置面55ａ上に載置されたペリクルは、トレイ55に設けられた突起状のポスト55ｂによって、左右の動きが拘束され、そして蓋56を上方からかぶせ、クリップ57によって蓋56とトレイ55との４隅を固定することによって収納されていた。この結果、前記ペリクルは蓋56の斜面56ａと、ポスト55ｂと、設置面55ａとに囲まれて拘束されて収納された状態となっていた。またクリップ57のかわりに、粘着テープを用いて全周を密閉することも行なわれている。 The pellicle placed on the installation surface 55 a of the tray 55 is restrained from moving left and right by a protruding post 55 b provided on the tray 55, and covers the lid 56 from above. It was stored by fixing four corners with 55. As a result, the pellicle was in a state of being restrained and enclosed by the inclined surface 56a of the lid 56, the post 55b, and the installation surface 55a. Further, instead of the clip 57, the entire circumference is sealed with an adhesive tape.
収納容器は樹脂材料を用いて、射出成形や真空成形にて製造するのが一般である。しかし５インチ、６インチの半導体用ペリクルの収納容器は、射出成形で成形することも多いが、面積が１０００cm２以上ともなる大型ペリクル用の収納容器は、真空成形する場合が多い。真空成形の方が薄肉で大型一体成形品が容易にできるからである。 The storage container is generally manufactured by injection molding or vacuum molding using a resin material. However, 5 inch and 6 inch semiconductor pellicle storage containers are often molded by injection molding, but large pellicle storage containers having an area of 1000 cm 2 or more are often vacuum-molded. This is because the vacuum forming is thinner and a large integrated product can be easily formed.
上記収納容器は経時的に形状が変化しないことを想定しており、ペリクルに塵埃を付着させないための密封性と、ペリクル膜に非接触な状態で確実に保持しうる保持性とが要求される。小型の収納容器であれば変形が問題となることはほとんどないが、１０００cm２以上ともなる大型ペリクル用の収納容器の場合には、両端を持って運ぶ際のたわみやねじれ、縦置きで保管した際の自重による変形、温度による反りなどの変形が生じる場合がある。 It is assumed that the shape of the storage container does not change over time, and a sealing property for preventing dust from adhering to the pellicle and a holding property capable of reliably holding the pellicle film in a non-contact state are required. . Deformation is unlikely to be a problem if it is a small storage container, but in the case of a storage container for a large pellicle with a size of 1000 cm 2 or more, it is stored with deflection, twisting, and vertical installation when carrying with both ends. In some cases, deformation due to its own weight or warpage due to temperature may occur.
トレイや蓋が反ったりねじれたりすると、粘着材にその変形が転写してしまう。トレーに反りがあると粘着剤の一部に局所的に重量がかかり、粘着剤が変形する可能性がある。また、蓋に反りやねじれが発生するとペリクルをトレイに押しつけることになり、さらに粘着剤にトレイの反りを転写させる可能性がある。特に大型ペリクル収納容器は、５インチや６インチの半導体用ペリクル収納容器に比べ、面積が大きいために収納容器の反りやねじれが大きくなる。そのため収納容器の変形が粘着剤に転写しやすく、貼付不良が発生する頻度が高くなる。マスクやレチクルの下面に貼り付けて使用するときは、大型ペリクルでは重量が大きいために小型ペリクルでは問題にならないような小さな貼付不良でも経時的に貼付不良部が広がり、エアーパスと呼ばれるペリクル内外をつなぐ隙間ができ、その箇所からペリクル内に異物が侵入し、ペリクルの機能を果たさなくなることがある。 If the tray or lid is warped or twisted, the deformation is transferred to the adhesive material. If the tray is warped, a part of the adhesive is locally weighted, and the adhesive may be deformed. Further, when the lid is warped or twisted, the pellicle is pressed against the tray, and the warp of the tray may be transferred to the adhesive. In particular, a large pellicle storage container has a larger area than a 5-inch or 6-inch semiconductor pellicle storage container, and thus warps and twists of the storage container increase. Therefore, the deformation of the storage container is easily transferred to the pressure-sensitive adhesive, and the frequency of occurrence of defective sticking increases. When sticking to the underside of a mask or reticle, the large pellicle is heavy, so even a small sticking failure that does not cause a problem with a small pellicle spreads over time, and the poor sticking part spreads over time, connecting the inside and outside of the pellicle called an air path. A gap may be formed, and foreign matter may enter the pellicle from that position, and the pellicle function may not be performed.
また反りやたわみによってトレイや蓋がペリクルに接触すると、蓋などの摩耗粉がペリクル膜に付着し、ペリクルの機能を果たさなくなることがある。さらにケースの反りは、蓋とトレイの嵌合性を損ない、蓋とトレイの隙間から異物が混入し、ペリクルに付着する可能性がある。 Further, when the tray or lid comes into contact with the pellicle due to warpage or deflection, wear powder such as the lid may adhere to the pellicle film, and the pellicle function may not be performed. Further, warping of the case impairs the fitting property between the lid and the tray, and foreign matter may enter from the gap between the lid and the tray and adhere to the pellicle.
そこで従来からも、特許文献２に示すように、ペリクルの粘着材の変形を防ぐために、ペリクル装着台にリブを設け、成形時の装着台の変形を抑える方法が提案されている。しかし装着台にリブを一体成形することは、容器内面側の構造が複雑になり、洗浄性に問題がある。 Thus, as shown in Patent Document 2, conventionally, in order to prevent deformation of the adhesive material of the pellicle, a method has been proposed in which ribs are provided on the pellicle mounting base to suppress deformation of the mounting base during molding. However, integrally forming the ribs on the mounting base complicates the structure on the inner surface side of the container and has a problem in cleaning properties.
真空成形においてトレイや蓋の剛性を向上させるために、成形用シートの板厚を厚くすることが考えられるが、大型ペリクル用の収納容器では重量が重くなってしまうため、取り回しの観点から好ましくない。そこで特許文献３には、トレイ又は蓋の平面部に所定形状の段差部（凹凸を設けたもの）を設け、平面部の剛性を高めて変形を防止する構成が開示されている。しかしこの構成にあっても、真空成形では表面を突出させれば裏面が後退するため、収納容器の内面に凹凸ができることになる。すると洗浄性、検査性が低下し、ケース洗浄タクト（所要時間）が増大するため、収納容器の内面は極力平坦であることが望ましい。 In order to improve the rigidity of the tray and lid in vacuum forming, it is conceivable to increase the thickness of the forming sheet, but it is not preferable from the viewpoint of handling because the storage container for large pellicles becomes heavy. . Therefore, Patent Document 3 discloses a configuration in which a stepped portion having a predetermined shape (provided with irregularities) is provided on a flat portion of a tray or a lid to increase the rigidity of the flat portion to prevent deformation. However, even in this configuration, in vacuum forming, if the front surface is protruded, the back surface is retracted, so that the inner surface of the storage container is uneven. Then, the cleaning property and the inspection property are deteriorated, and the case cleaning tact (required time) is increased. Therefore, it is desirable that the inner surface of the storage container is as flat as possible.
そこで本発明は、大型ペリクル用の収納容器において、特に真空成形を用いて製造した容器であっても、洗浄性を損なわずに剛性を向上させることのできる大型ペリクル収納容器を提供することを目的としている。 Accordingly, an object of the present invention is to provide a large pellicle storage container capable of improving rigidity without impairing cleaning properties even in a container manufactured using vacuum forming, particularly for a large pellicle storage container. It is said.
上記課題を解決するために、本発明の代表的な構成は、ペリクルを収納して保管、搬送するために用いられる大型ペリクル収納容器であって、ペリクルを収納する樹脂材料からなるトレイと、前記トレイを被覆する樹脂材料からなる蓋とからなり、前記トレイまたは蓋の少なくとも一方の外面側にハニカム板からなる補強板を取り付けたことを特徴とする。これによりケースの変形を防止することが可能となり、ペリクルの粘着材や枠体が変形することを防止することができる。またリブを設ける必要がないため凹凸がなく、洗浄効果が向上する。 In order to solve the above problems, a typical configuration of the present invention is a large pellicle storage container used for storing, storing, and transporting a pellicle, which includes a tray made of a resin material that stores the pellicle, The lid is made of a resin material that covers the tray, and a reinforcing plate made of a honeycomb plate is attached to at least one outer surface of the tray or the lid. As a result, the case can be prevented from being deformed, and the pellicle adhesive and the frame can be prevented from being deformed. Moreover, since it is not necessary to provide a rib, there is no unevenness and the cleaning effect is improved.
また前記補強板をトレイまたは蓋の外面側に取り付けたのは、洗浄性の観点から、内面側は平坦であることが望ましいからである。 The reason why the reinforcing plate is attached to the outer surface side of the tray or the lid is that the inner surface side is preferably flat from the viewpoint of cleanability.
また前記トレイまたは蓋は、真空成形にて製造したものであることを特徴とする。収納容器を大型化するためには真空成形が有利であり、また真空成形の場合にこそ剛性向上に困難性があり、本発明の有用性が増大するからである。 Further, the tray or the lid is manufactured by vacuum forming. This is because vacuum forming is advantageous for increasing the size of the storage container, and it is difficult to improve rigidity in the case of vacuum forming, and the usefulness of the present invention is increased.
また前記補強板の形状が、格子状、または枠状、或いは角を落とした形状、若しくは筋交いに配置されていれば好ましい。 Moreover, it is preferable if the shape of the reinforcing plate is arranged in a lattice shape, a frame shape, a shape with a cut corner, or a brace.
また前記補強板は、トレイまたは蓋の略中央の平面部に取り付けたことを特徴とする。当該平面部が強度的に不足するからである。 Further, the reinforcing plate is attached to a flat portion at a substantially center of the tray or the lid. This is because the plane portion is insufficient in strength.
また前記トレイは、ペリクルを載置する位置を隆起させて構成していることを特徴とする。真空成形においては内面側を隆起させれば外面側は後退するため、この後退した部分に補強板を配置することにより、収納容器の外周面において突出部を少なくすることができる。 Further, the tray is formed by raising a position where the pellicle is placed. In vacuum forming, if the inner surface side is raised, the outer surface side retreats. Therefore, by arranging a reinforcing plate in the retracted portion, the number of protrusions can be reduced on the outer peripheral surface of the storage container.
前記補強板がハニカム板であることにより、重量の増加を少なくして剛性を向上させることができる。 More and this the reinforcing plate is a honeycomb plate, it is possible to improve the rigidity with less weight gain.
本発明によれば、剛性が高く、かつ洗浄性に優れた大型ペリクル用の収納容器を提供することができる。このため、ペリクルの粘着材や枠体が変形することがなく、ペリクルのマスクやレティクルに対する貼付不良を防止することができる。また、輸送中にペリクルと大型ペリクル収納容器が擦れることによって発生する小さな塵がペリクルに付着することを防ぐことができる。これらのことから、製造者から使用者に輸送する間にペリクルの機能を損なうことがなく、使用者は常に安定した品質のペリクルを使用することができ、本発明は品質の安定化に大きく貢献する。 According to the present invention, it is possible to provide a storage container for a large pellicle that has high rigidity and excellent cleaning properties. For this reason, the adhesive material and frame of the pellicle are not deformed, and sticking defects to the pellicle mask and reticle can be prevented. Further, it is possible to prevent small dust generated by rubbing between the pellicle and the large pellicle storage container during transportation from adhering to the pellicle. Therefore, the function of the pellicle is not impaired during transportation from the manufacturer to the user, and the user can always use a pellicle with a stable quality, and the present invention greatly contributes to the stabilization of the quality. To do.
本発明に係る大型ペリクル収納容器の実施形態について、図を用いて説明する。図１は大型ペリクル収納容器を説明する断面図、図２はトレイの外面側を説明する斜視図、図３は補強板を取り付ける形態を説明する例を示す図、図４は補強板にハニカムを使用した例を示す図、図５は二重構造のトレイによってハニカムを一体的に構成した例を示す図、図６はトレイの隆起部の外面側に補強板を設けた例を示す図、図７は蓋の外面側に補強板を設けた例を示す図である。 An embodiment of a large pellicle storage container according to the present invention will be described with reference to the drawings. FIG. 1 is a cross-sectional view illustrating a large pellicle storage container, FIG. 2 is a perspective view illustrating the outer surface side of the tray, FIG. 3 is a diagram illustrating an example in which a reinforcing plate is attached, and FIG. FIG. 5 is a diagram showing an example in which a honeycomb is integrally formed by a double structure tray, FIG. 6 is a diagram showing an example in which a reinforcing plate is provided on the outer surface side of the raised portion of the tray, and FIG. 7 is a view showing an example in which a reinforcing plate is provided on the outer surface side of the lid.
図１（ａ）に示すように大型ペリクル収納容器は、内部にペリクル１を収納するものであり、トレイ２と、蓋３とからなる。ペリクル１は、ペリクル膜11と、ペリクル膜11が貼着された枠体12、および枠体12をマスクやレティクルに貼着するための粘着材13などから構成されている。ここで本実施形態においてペリクル１は、ペリクル膜11の面積が１０００cm２を越える大型ペリクルである。 As shown in FIG. 1A, the large pellicle storage container stores the pellicle 1 therein, and includes a tray 2 and a lid 3. The pellicle 1 includes a pellicle film 11, a frame 12 to which the pellicle film 11 is attached, and an adhesive material 13 for attaching the frame 12 to a mask or a reticle. Here, in this embodiment, the pellicle 1 is a large pellicle in which the area of the pellicle film 11 exceeds 1000 cm 2 .
トレイ２には、周辺に沿ってペリクル１が載置される隆起部21が形成されており、隆起部21の内側（中央側）は平面部22となっている。トレイ２は真空成形にて製造されており、隆起部21の外面側には溝部23が形成されている。また隆起部21の上部には、ペリクル１の保護フィルムの外形部と接し、横方向の移動を拘束する複数の突起24が起立突設されている。収納するペリクルの面積が１０００cm２を越えるため、平面部22の面積もこれに準じたものとなっている。 A raised portion 21 on which the pellicle 1 is placed is formed along the periphery of the tray 2, and the inner side (center side) of the raised portion 21 is a flat portion 22. The tray 2 is manufactured by vacuum forming, and a groove portion 23 is formed on the outer surface side of the raised portion 21. In addition, a plurality of protrusions 24 that stand in contact with the outer shape of the protective film of the pellicle 1 and restrain lateral movement are provided on the upper portion of the raised portion 21. Since the area of the pellicle to be stored exceeds 1000 cm 2 , the area of the plane portion 22 is also equivalent to this.
蓋３はトレイ２と同様に真空成形にて製造されており、図１（ｂ）に示すようにトレイ２にかぶせることによってペリクル１を収納する。トレイ２と蓋３とをあわせた後は、不図示の粘着テープを周辺を端辺に張り巡らすことによって密封する。 The lid 3 is manufactured by vacuum forming like the tray 2 and houses the pellicle 1 by covering the tray 2 as shown in FIG. After the tray 2 and the lid 3 are combined, the adhesive tape (not shown) is sealed by stretching the periphery around the edge.
トレイ２および蓋３の材質は特に指定はないが、アクリル樹脂やポリエチレンテレフタレート樹脂、アクリルニトリル・ブタジエン・スチレン樹脂等を用いればよい。更に上記樹脂以外に、ポリエチレンテレフタレート以外のポリエステル樹脂、ポリエチレンやポリプロピレン等のオレフィン系樹脂、ポリスチレンやアクリロニトリル・スチレン樹脂などのポリスチレン系樹脂等を用いることもできる。 The materials of the tray 2 and the lid 3 are not particularly specified, but acrylic resin, polyethylene terephthalate resin, acrylonitrile / butadiene / styrene resin, or the like may be used. In addition to the above resins, polyester resins other than polyethylene terephthalate, olefin resins such as polyethylene and polypropylene, polystyrene resins such as polystyrene, acrylonitrile / styrene resins, and the like can also be used.
上記構成にあって、一般にトレイ２と蓋３とは外周近傍を屈曲させているため、周辺部ではある程度の剛性を有している。しかし平面部22は強度が弱く、またその面積が１０００cm２以上ともなると、容器全体の剛性が十分でなくなり、反りやたわみが生じやすい。そこで本発明においては、トレイ２の外面側に、補強板４を取り付けている。これにより、容器全体の剛性を飛躍的に向上させることができる。 In the above configuration, since the tray 2 and the lid 3 are generally bent in the vicinity of the outer periphery, the peripheral portion has a certain degree of rigidity. However, the strength of the flat portion 22 is weak, and if the area is 1000 cm 2 or more, the rigidity of the entire container becomes insufficient, and warping and deflection are likely to occur. Therefore, in the present invention, the reinforcing plate 4 is attached to the outer surface side of the tray 2. Thereby, the rigidity of the whole container can be improved dramatically.
補強板４の材料としては、金属や、エンジニアリングプラスチック、および後述するハニカム板などを使用することができる。補強板４は取り回しや重量の関係から、厚みが５ｍｍ以下程度であることが望ましい。補強板４をトレイ２に取り付けるためには、例えば接着剤を用いてもよいし、両面テープ（発塵、発ガスしないもの）を用いて固定してもよい。 As the material of the reinforcing plate 4, metals, engineering plastics, honeycomb plates described later, and the like can be used. The reinforcing plate 4 desirably has a thickness of about 5 mm or less because of handling and weight. In order to attach the reinforcing plate 4 to the tray 2, for example, an adhesive may be used, or it may be fixed using a double-sided tape (one that does not generate dust or gas).
補強板４の形状は、トレイ２の反りやたわみを防止しうるものであれば良く、特定するものではない。図２に示す補強板４は、トレイ２の対角に筋交いのように配置した例である。また図３に示すようにさまざまな形状が考えられる。トレイ２裏面の全面に一枚の補強板４を配置することが強度、洗浄性の面からは望ましいが（図３（ａ））、重量が重くなるため、格子状に設けたり（図３（ｃ）（ｅ）（ｆ））、また枠状にしたりすることでもよい（図３（ｇ））。また、手により把持する取り回し性を考慮して、補強板４の角を落とすことも有効である（図（ｂ）（ｄ）（ｈ））。またねじれの変形を防止するためには、筋交いのように配置することが有効である（図３（ｉ））。すなわち、長手方向、短手方向に連続した形状で配置したものであればよい。 The shape of the reinforcing plate 4 is not particularly specified as long as it can prevent warping and deflection of the tray 2. The reinforcing plate 4 shown in FIG. 2 is an example in which the reinforcing plate 4 is arranged diagonally on the diagonal of the tray 2. Various shapes are possible as shown in FIG. Although it is desirable from the viewpoint of strength and detergency that a single reinforcing plate 4 is disposed on the entire back surface of the tray 2 (FIG. 3 (a)), since the weight increases, it may be provided in a lattice shape (FIG. 3 ( c) (e) (f)) or a frame shape (FIG. 3G). It is also effective to drop the corners of the reinforcing plate 4 in consideration of the handling property to be gripped by hand (FIGS. (B), (d), and (h)). Moreover, in order to prevent the deformation | transformation of a twist, it is effective to arrange | position like a brace (FIG.3 (i)). That is, what is necessary is just to arrange | position with the shape which followed the longitudinal direction and the transversal direction.
また上記した如く、補強板４の素材としては、ハニカム板を用いることが特に有効である。図４に示すようにハニカム板41は蜂の巣形状のハニカムの両側開口面に板材を接着して構成したものであり、これを接着剤や両面テープを用いて固定する。ハニカム板41はその厚みに比して非常に剛性が高く、かつ軽量である。さらには、軽量であるため重量の増加が少なく、トレイ２の外面全体に配置しても支障がないことからも、きわめて有効にトレイ２の剛性を高めることができる。 As described above, it is particularly effective to use a honeycomb plate as the material of the reinforcing plate 4. As shown in FIG. 4, the honeycomb plate 41 is configured by adhering a plate material to both side opening surfaces of a honeycomb-shaped honeycomb, and this is fixed using an adhesive or a double-sided tape. The honeycomb plate 41 is very rigid and light in weight compared to its thickness. Furthermore, since it is lightweight, there is little increase in weight, and there is no problem even if it is arranged on the entire outer surface of the tray 2, so that the rigidity of the tray 2 can be increased very effectively.
またハニカムを用いる場合、図５に示すように、トレイ２を二重構造の第一トレイ２ａと第二トレイ２ｂとから構成し、その間にハニカム42を配置することでもよい。この場合、ハニカム42の両側開口面に第一トレイ２ａと第二トレイ２ｂとを直接接着することが好ましい。これによりさらに剛性の向上を図ることができると共に、凹凸部を極力排除し、洗浄性を向上させることができる。 When a honeycomb is used, as shown in FIG. 5, the tray 2 may be composed of a first tray 2a and a second tray 2b having a double structure, and the honeycomb 42 may be disposed therebetween. In this case, it is preferable to directly bond the first tray 2a and the second tray 2b to the opening surfaces on both sides of the honeycomb 42. As a result, the rigidity can be further improved, the uneven portion can be eliminated as much as possible, and the cleaning property can be improved.
また図６に示すように、ペリクルを載置する隆起部21の外面側に形成された溝部23に、補強板４を配置することでもよい。さらには、補強板４を埋め込んだ溝部23を樹脂材料５によって充填することが望ましい。これによりトレイ２の背面側に凹凸部をなくすことができ、剛性の向上と共に、洗浄性の向上を図ることができる。 In addition, as shown in FIG. 6, the reinforcing plate 4 may be disposed in the groove portion 23 formed on the outer surface side of the raised portion 21 on which the pellicle is placed. Furthermore, it is desirable to fill the groove portion 23 in which the reinforcing plate 4 is embedded with the resin material 5. Thereby, an uneven part can be eliminated on the back side of the tray 2, and it is possible to improve the washing performance as well as the rigidity.
なお、上記実施形態においてはトレイ２に補強板を取り付けた場合について説明したが、蓋３も同様に剛性が高いことが好ましい。蓋３の平面部がたわんで収納したペリクル１のペリクル膜11に接触する場合があるからである。従って図７に示すように、トレイ２または蓋３のいずれか一方または両方に補強板４を取り付けることによって、本発明の効果を得ることができる。 In addition, although the case where the reinforcement board was attached to the tray 2 was demonstrated in the said embodiment, it is preferable that the lid | cover 3 is also highly rigid similarly. This is because the planar portion of the lid 3 may come into contact with the pellicle film 11 of the pellicle 1 that is bent and stored. Therefore, as shown in FIG. 7, the effect of the present invention can be obtained by attaching the reinforcing plate 4 to either one or both of the tray 2 and the lid 3.
また、上記実施形態においてはトレイ２および蓋３は真空成形にて製造したものとして説明したが、射出成形にて形成したものであっても、同様に本発明を適用してその効果を得ることができる。 In the above embodiment, the tray 2 and the lid 3 are described as being manufactured by vacuum molding. However, even if the tray 2 and the lid 3 are formed by injection molding, the present invention is similarly applied to obtain the effect. Can do.
１…ペリクル
２…トレイ
２ａ…第一トレイ
２ｂ…第二トレイ
３…蓋
４…補強板
５…樹脂材料
11…ペリクル膜
12…枠体
13…粘着材
21…隆起部
22…平面部
23…溝部
24…突起
41…ハニカム板
42…ハニカム
51…枠体
52…ペリクル膜
53…粘着材
54…保護フィルム
55…トレイ
55ａ…設置面
55ｂ…ポスト
56…フタ
56ａ…斜面
57…クリップ
DESCRIPTION OF SYMBOLS 1 ... Pellicle 2 ... Tray 2a ... 1st tray 2b ... 2nd tray 3 ... Lid 4 ... Reinforcement plate 5 ... Resin material
11 ... Pellicle membrane
12 ... Frame
13… Adhesive
21 ... Uplift
22… Plane
23… Groove
24 ... Protrusions
41 ... Honeycomb plate
42 ... Honeycomb
51 ... Frame
52 ... Pellicle membrane
53… Adhesive
54… Protective film
55 ... Tray
55a ... Installation surface
55b ... post
56 ... Lid
56a ... Slope
57… Clip
Claims (7)
ペリクルを収納する樹脂材料からなるトレイと、前記トレイを被覆する樹脂材料からなる蓋とからなり、
前記トレイまたは蓋の少なくとも一方の外面側にハニカム板からなる補強板を取り付けたことを特徴とする大型ペリクル収納容器。 A large pellicle storage container used to store, transport and store pellicles,
A tray made of a resin material that houses a pellicle, and a lid made of a resin material that covers the tray,
A large pellicle storage container, wherein a reinforcing plate made of a honeycomb plate is attached to at least one outer surface of the tray or the lid.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003283891A JP4236535B2 (en) | 2003-07-31 | 2003-07-31 | Large pellicle storage container |
| TW94102874A TWI285179B (en) | 2003-07-31 | 2005-01-28 | Container for housing a large pellicle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003283891A JP4236535B2 (en) | 2003-07-31 | 2003-07-31 | Large pellicle storage container |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008288361A Division JP4337988B2 (en) | 2008-11-11 | 2008-11-11 | Large pellicle storage container |
| JP2008296858A Division JP4493711B2 (en) | 2008-11-20 | 2008-11-20 | Large pellicle storage container and manufacturing method thereof |
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| JP2005049765A JP2005049765A (en) | 2005-02-24 |
| JP4236535B2 true JP4236535B2 (en) | 2009-03-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP2003283891A Expired - Fee Related JP4236535B2 (en) | 2003-07-31 | 2003-07-31 | Large pellicle storage container |
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| TW (1) | TWI285179B (en) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006080060A1 (en) * | 2005-01-27 | 2006-08-03 | Asahi Kasei Emd Corporation | Case for housing large-sized pellicle |
| JP4391435B2 (en) * | 2005-03-22 | 2009-12-24 | 信越化学工業株式会社 | Pellicle storage container |
| JP4664746B2 (en) * | 2005-06-20 | 2011-04-06 | 信越化学工業株式会社 | Large pellicle container for lithography |
| JP2007025183A (en) * | 2005-07-15 | 2007-02-01 | Shin Etsu Polymer Co Ltd | Storage container for pellicle |
| JP4694299B2 (en) * | 2005-08-05 | 2011-06-08 | 信越ポリマー株式会社 | Pellicle storage container |
| JP4668724B2 (en) * | 2005-08-08 | 2011-04-13 | 信越ポリマー株式会社 | Pellicle storage container |
| JP2007047238A (en) * | 2005-08-08 | 2007-02-22 | Shin Etsu Polymer Co Ltd | Housing container for pellicle |
| AT9090U1 (en) * | 2005-10-07 | 2007-04-15 | Magna Steyr Fahrzeugtechnik Ag | MOTOR VEHICLE EXTERIOR TANK |
| JP2007328226A (en) * | 2006-06-09 | 2007-12-20 | Shin Etsu Chem Co Ltd | Pellicle storage container and method for manufacturing the same |
| JP4963041B2 (en) * | 2006-06-16 | 2012-06-27 | 旭化成イーマテリアルズ株式会社 | Pellicle storage container |
| JP2008083618A (en) * | 2006-09-29 | 2008-04-10 | Asahi Kasei Electronics Co Ltd | Reinforcing material for pellicle storage container |
| JP4672636B2 (en) * | 2006-11-02 | 2011-04-20 | 信越化学工業株式会社 | Pellicle storage container |
| JP4796946B2 (en) * | 2006-11-30 | 2011-10-19 | 信越化学工業株式会社 | Pellicle storage container |
| JP4822357B2 (en) * | 2007-04-20 | 2011-11-24 | 信越化学工業株式会社 | Pellicle storage container and manufacturing method thereof |
| JP4955449B2 (en) * | 2007-05-10 | 2012-06-20 | 信越化学工業株式会社 | Pellicle storage container |
| JP5464859B2 (en) * | 2008-02-01 | 2014-04-09 | 旭化成イーマテリアルズ株式会社 | Pellicle storage container |
| JP4798636B2 (en) * | 2008-08-08 | 2011-10-19 | リンナイ株式会社 | Pull-out dishwasher |
| JP2011034020A (en) * | 2009-08-06 | 2011-02-17 | Shin-Etsu Chemical Co Ltd | Pellicle storage container |
| JP5626850B2 (en) * | 2010-05-10 | 2014-11-19 | 旭化成イーマテリアルズ株式会社 | Pellicle storage container |
| JP5684752B2 (en) * | 2012-03-29 | 2015-03-18 | 信越化学工業株式会社 | Pellicle storage container |
| WO2013168782A1 (en) * | 2012-05-11 | 2013-11-14 | 株式会社ニコン | Substrate case, substrate conveyance case, case cover, substrate conveyance system, and method for conveying substrate |
| KR102460875B1 (en) * | 2014-04-17 | 2022-10-31 | 신에쓰 가가꾸 고교 가부시끼가이샤 | Pellicle container |
| JP6359377B2 (en) * | 2014-08-08 | 2018-07-18 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate processing equipment |
-
2003
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| JP2005049765A (en) | 2005-02-24 |
| TW200626444A (en) | 2006-08-01 |
| TWI285179B (en) | 2007-08-11 |
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