JP3593313B2 - Perpendicular magnetic recording head and method of manufacturing the same - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a perpendicular magnetic recording head that performs recording by applying a perpendicular magnetic field to a recording medium such as a disk having a hard film, and in particular, can appropriately form a main pole layer from an insulating layer to a yoke layer by plating. In addition, the present invention relates to a perpendicular magnetic recording head capable of improving the efficiency of passing magnetic flux from the yoke layer to the main pole layer, and a method of manufacturing the same.
[0002]
[Prior art]
As a device for recording magnetic data at a high density on a recording medium such as a disk, there is a perpendicular magnetic recording system. FIG. 27 is a sectional view showing a general structure of a perpendicular magnetic recording head used in the apparatus of the perpendicular magnetic recording system.
[0003]
As shown in FIG. 27, a perpendicular magnetic recording head H of a perpendicular magnetic recording system is provided on a side end surface of a slider 1 which floats on a recording medium and moves or slides. 1a, the perpendicular magnetic recording head H is disposed between a non-magnetic film 2 and a non-magnetic coating film 3.
[0004]
The perpendicular magnetic recording head H includes an auxiliary magnetic pole layer 4 formed of a ferromagnetic material and a main magnetic pole layer 5 formed of the same ferromagnetic material formed on the auxiliary magnetic pole layer 4 at intervals. The end face 4a of the auxiliary pole layer 4 and the end face 5a of the main pole layer 5 appear on the surface Ha facing the recording medium M. The auxiliary magnetic pole layer 4 and the main magnetic pole layer 5 are magnetically connected to each other at a magnetic connecting portion 6 on the back side of the opposing surface Ha.
[0005]
Al between the auxiliary pole layer 4 and the main pole layer 5₂O₃, SiO₂The non-magnetic insulating layer 7 made of an inorganic material such as the above is located, and at the opposing surface Ha, the end surface 7a of the non-magnetic insulating layer 7 is connected to the end surface 4a of the auxiliary magnetic pole layer 4 and the end surface 5a of the main magnetic pole layer 5. And appear between.
[0006]
A coil layer 8 made of a conductive material such as Cu is embedded in the non-magnetic insulating layer 7.
[0007]
As shown in FIG. 27, the thickness hw of the end face 5a of the main pole layer 5 is smaller than the thickness hr of the end face 4a of the auxiliary pole layer 4. As shown in the plan view of FIG. 28, the width of the end face 5a of the main magnetic pole layer 5 in the track width direction (the X direction in the drawing) is the track width Tw, and the width is the track width of the auxiliary magnetic pole layer 4. It is sufficiently smaller than the width dimension Wr of the end face 4a in the width direction.
[0008]
A recording medium M on which magnetic recording is performed by the perpendicular magnetic recording head H moves in the Z direction with respect to the perpendicular magnetic recording head H. A hard film Ma is provided on the surface of the recording medium M, and a soft film Mb is provided on the surface. ing.
[0009]
When a recording magnetic field is induced in the auxiliary magnetic pole layer 4 and the main magnetic pole layer 5 by energizing the coil layer 8, the end surface 4 a of the auxiliary magnetic pole layer 4 and the end surface 5 a of the main magnetic pole layer 5 The leakage recording magnetic field vertically passes through the hard film Ma of the recording medium M, and passes through the soft film Mb. Here, as described above, the area of the end face 5a of the main magnetic pole layer 5 is sufficiently smaller than the area of the end face 4a of the auxiliary magnetic pole layer 4, so that the magnetic flux is generated at the portion facing the end face 5a of the main magnetic pole layer 5. Magnetic data is recorded by the magnetic flux φ on the hard film Ma at the portion where φ is concentrated and the end face 5a faces.
[0010]
As shown in the plan view of FIG. 28, the main pole layer 5 has a narrow front region 5c having a length L1 formed in the height direction rearward from the facing surface Ha, and a base region of the front region 5c. And a yoke portion 5b whose width in the track width direction (X direction in the drawing) gradually increases from the end toward the rear in the height direction.
[0011]
The length L1 of the front region 5c may be formed as short as possible to reduce magnetic saturation in the front region 5c and concentrate the magnetic flux flowing from the yoke 5c from the front end face 5a of the main pole layer 5. It is preferable because it can be generated.
[0012]
However, if the length L1 is too short, it is difficult to accurately form a fine pattern in the front region 5c, and the track width Tw of the front end face 5a is formed to be wider than a predetermined value, or FIG. As shown in the figure, the width dimension in the track width direction (X direction in the drawing) is formed so as to increase in the height direction (Y direction in the drawing), and the control of the track width Tw and the shape of the front region 5c is very difficult. was difficult.
[0013]
The problem of such a shape change is largely due to the single layer in which the front region 5c of the main magnetic pole layer 5 and the yoke portion 5b are integrally formed. Therefore, the yoke portion 5b is formed separately from the front region 5c. The structure is considered.
[0014]
FIG. 29 is a vertical sectional view of the conventional perpendicular magnetic recording head shown in FIG. 27, which is improved. The yoke layer 10 is formed on the nonmagnetic insulating layer 7 as shown in FIG. The front end face 10a of the yoke layer 10 is located rearward in the height direction (Y direction in the drawing) from the opposing face Ha, and is formed to rise vertically from the nonmagnetic insulating layer 7. Further, as shown in FIG. 29, the main magnetic pole layer 5 is formed from the nonmagnetic insulating layer 7 on the opposing surface Ha to the yoke layer 10. A plan view of the perpendicular magnetic recording head shown in FIG. 29 has, for example, a plan shape as shown in FIG. 30, and as shown in FIG. The main pole layer 5 has a narrow front area 5c in which the front end face 5a is formed with the track width Tw and a base end of the front area 5c. And a rear region 5d having a wider width in the track width direction.
[0015]
29 and 30, when the main magnetic pole layer 5 is overlaid on the yoke layer 10, the length L2 of the front region 5c of the main magnetic pole layer 5 in the height direction (Y direction in the drawing) is reduced. Even if the yoke layer 10 is formed longer than before, by forming the yoke layer 10 as close to the opposing surface Ha as possible, the magnetic flux from the yoke layer 10 can be appropriately adjusted without the front region 5c reaching magnetic saturation. It can be guided to the front region 5c of the main magnetic pole layer 5.
[0016]
With the structure shown in FIG. 30, the front region 5c of the main magnetic pole layer 5 can be formed longer in the height direction, so that the pattern accuracy is improved and the front region 5c is formed with a predetermined track width Tw and a predetermined shape. I thought it could be done.
[0017]
[Problems to be solved by the invention]
However, in the perpendicular magnetic recording head shown in FIG. 29, the front end face 10a of the yoke layer 10 is formed to rise vertically from the upper surface of the nonmagnetic insulating layer 7, so that the distance between the nonmagnetic insulating layer 7 and the front end face 10a is increased. Has a large step. For this reason, the following problems occurred during the step of forming the main magnetic pole layer 5. FIGS. 31 and 32 are one process charts showing a manufacturing method for forming the main magnetic pole layer 5.
[0018]
As shown in FIG. 31, a yoke layer 10 is formed on the nonmagnetic insulating layer 7, and a plating base layer 11 is formed from the nonmagnetic insulating layer 7 to the yoke layer 10. This plating base layer 11 is a base for growing the main magnetic pole layer 5 by plating in the next step. Further, a resist layer 12 is formed on the plating underlayer 11.
[0019]
As shown in FIG. 31, the front end face 10a of the yoke layer 10 is formed to rise vertically from above the nonmagnetic insulating layer 7, so that a large step A exists between the front end face 10a and the nonmagnetic insulating layer 7. Occurs.
[0020]
Therefore, the resist layer 12 applied from the nonmagnetic insulating layer 7 to the yoke layer 10 has a thickness H2 of the resist layer 12 applied on the yoke layer 10 and the resist layer 12 applied on the nonmagnetic insulating layer 7. A difference occurs between the thickness H3 of the resist layer 12 and the thickness H3.
[0021]
In the next step shown in FIG. 32, a punch pattern 12a for forming the main magnetic pole layer 5 is formed on the resist layer 12 by exposure and development. At this time, the step A is formed on the resist layer 12 on the yoke layer 10. Since the thickness of the resist layer 12 rapidly increases in the portion of the step A, the lower surface of the resist layer 12 applied to the portion of the step A is not properly exposed, and the resist which is not exposed and developed to the portion of the step A The layer 12b tends to remain.
[0022]
Then, even if the main magnetic pole layer 5 is to be plated and grown on the plating underlying layer 11 exposed in the punching pattern 12a, if the resist layer 12b remains in the punching pattern 12a, the plating underlying layer 11 is covered with the resist layer 12b, plating cannot be properly performed, and the main pole layer 5 having an extremely thin film thickness is formed on the resist layer 12b, or the main pole layer 5 Defective products are likely to be formed, for example, no 5 is formed.
[0023]
If there is a large step A between the yoke layer 10 and the nonmagnetic insulating layer 7 and there is a large difference in the thickness of the resist layer 12, the pattern accuracy of the punched pattern 12a is reduced. The front region 5c cannot be formed with a predetermined track width Tw and a predetermined shape, and a perpendicular magnetic recording head that can cope with a narrow track cannot be manufactured.
[0024]
If the front end face 10a of the yoke layer 10 rises vertically from above the nonmagnetic insulating layer 7 and the yoke layer 10 is formed in a substantially rectangular shape at a position overlapping the main pole layer 5, the yoke layer 10 The magnetic flux easily leaks from the front end face 10a, that is, the magnetic flux is not appropriately guided from the yoke layer 10 to the main magnetic pole layer 5, and the magnetic flux passage efficiency is reduced, leading to a reduction in recording density.
[0025]
Therefore, the present invention is to solve the above-mentioned conventional problems, and by making the front end face of the yoke layer a gentle inclined surface or a curved surface, the main magnetic pole layer is appropriately applied from the insulating layer to the yoke layer. It is an object of the present invention to provide a perpendicular magnetic recording head that can be formed by plating and that can improve the efficiency of passing magnetic flux from the yoke layer to the main pole layer, and a method of manufacturing the same.
[0026]
[Means for Solving the Problems]
According to the present invention, the auxiliary magnetic pole layer and the main magnetic pole layer are located at an interval on the surface facing the recording medium, and the recording magnetic field is applied to the auxiliary magnetic pole layer and the main magnetic pole layer rearward in the height direction from the opposing surface. A perpendicular magnetic recording head for recording magnetic data on the recording medium by a perpendicular magnetic field concentrated on the main magnetic pole layer,
A connection layer that rises from the auxiliary pole layer is provided behind the facing surface in the height direction, and the coil layer is wound around the connection layer,
The upper surface of the coil layer is covered with an insulating layer, and the front end surface on the opposite surface side is located rearward in the height direction on the insulating layer, and the front end surface is inclined or curved in the height direction from the lower surface to the upper surface. A plane yoke layer is formed, and a base end of the yoke layer is magnetically connected to the connection layer;
A main pole layer is formed from the insulating layer on the opposing surface to the yoke layer.Yes,
The front end face of the main magnetic pole layer appearing on the facing surface is formed in a shape in which the width dimension in the track width direction increases from the lower surface to the upper surface.It is characterized by the following.
[0027]
In the present invention, the front end surface of the yoke layer has an inclined surface or a curved surface inclined in the height direction from the lower surface to the upper surface.
[0028]
Thus, in the present invention, unlike the related art, the yoke layer does not have a shape in which the front end surface rises as a vertical surface, but has a shape in which the front end surface rises in the height direction with a gentle slope or curved surface. The resist layer used for forming the main magnetic pole layer from the insulating layer located in front of the layer to the yoke layer can be formed with a substantially uniform thickness, and therefore, the resist in the punched pattern formed on the resist layer can be formed. The layer can be removed by appropriate exposure and development from top to bottom. Therefore, in the present invention, a resist pool does not occur in the punched pattern as in the related art, and a plating base layer for forming a main magnetic pole layer can be exposed on one surface in the punched pattern. The main pole layer can be appropriately formed by plating in a predetermined shape.
[0029]
Further, in the present invention, as described above, the front end surface of the yoke layer gradually rises from the insulating layer so that the film thickness gradually increases, and from the insulating layer used when forming the main magnetic pole layer. Since the thickness of the resist layer over the yoke layer can be made substantially constant, the main pole layer can be formed with high pattern accuracy, and the front end face of the main pole layer has a predetermined track width Tw and a predetermined shape. Easy to form with high precision.
[0030]
Further, in the present invention, when the front end surface of the yoke layer has a gentle slope or a curved surface so that the film thickness gradually increases in the height direction, the magnetic flux from the yoke layer is applied to the main pole layer. It is guided smoothly, and leakage of magnetic flux from the front end face can be suppressed more than before. That is, in the present invention, the efficiency of passing magnetic flux from the yoke layer to the main magnetic pole layer can be improved, and the magnetic flux can be concentrated on the main magnetic pole layer. Therefore, a perpendicular magnetic recording head excellent in high recording density can be provided. It is possible to manufacture.
[0031]
Further, in the present invention, it is preferable that the upper surface of the insulating layer and the upper surface of the connection layer be a flattened surface that is the same. Thereby, the yoke layer and the main magnetic pole layer can be formed with high pattern accuracy.
[0032]
PreviousRecordOf the main pole layerIt is preferable that both end surfaces of the front end surface are formed as inclined surfaces or curved surfaces.
[0033]
In the present invention, it is preferable that the saturation magnetic flux density of the main magnetic pole layer is higher than the saturation magnetic flux density of the yoke layer. In the present invention, the main pole layer and the yoke layer can be formed separately. For this reason, it is possible to select a magnetic material having a higher saturation magnetic flux density than the yoke layer for the main magnetic pole layer, thereby concentrating magnetic flux on the main magnetic pole layer and appropriately coping with high recording density. It is possible to produce a possible perpendicular magnetic recording head.
[0034]
Further, in the present invention, the cross-sectional area of the yoke layer at a position where the yoke layer and the main magnetic pole layer overlap with each other in a direction parallel to the opposing surface is a cross-sectional area of the main magnetic pole layer in a direction parallel to the opposing surface. Preferably, it is larger than the area. As a result, it is possible to improve the efficiency of passing magnetic flux from the yoke layer to the main pole layer.
[0035]
A method of manufacturing a perpendicular magnetic recording head according to the present invention includes the following steps.
(A) forming an auxiliary pole layer with a magnetic material;
(B) forming a connection layer on the auxiliary pole layer behind the surface facing the recording medium in the height direction, and then forming an insulating base layer on the auxiliary pole layer between the facing surface and the connection layer; After forming a coil layer through, a step of filling the coil layer with an insulating layer,
(C) shaving the surface of the insulating layer so that the upper surface of the insulating layer and the upper surface of the connection layer are flush with each other;
(D) forming, on the upper surface of the insulating layer and the upper surface of the connection layer, a plating underlayer in the form of a yoke layer whose front end face is located rearward in the height direction from the opposing surface and extends to above the connection layer;
(E) forming a yoke layer by plating with a magnetic material on the plating base layer, wherein the front end surface of the yoke layer is formed into a sloped surface or a curved surface inclined in the height direction from the lower surface to the upper surface;
(F) forming a plating base layer on the insulating layer and the yoke layer, forming a resist layer on the plating base layer, and then forming the resist layer on the yoke layer from the insulating layer on the facing surface; Form a punch pattern that extends toAnd
At this time, the punched pattern in which at least the inner width dimension in the track width direction at the opposing surface extends from the lower surface to the upper surface is formed on the resist layer.Process and
(G) a step of plating a main pole layer with a magnetic material on the plating base layer exposed in the punching pattern, and then removing the resist layer;
[0036]
In the present invention, the plating underlayer for forming the yoke layer is formed on the insulating layer in the step (d), and the yoke layer is grown by plating on the plating underlayer in the step (e). In the step (d), the periphery of the plating underlayer is not surrounded by a resist layer or the like, and only the plating underlayer is formed on the planarized insulating layer. The front end face of the yoke layer that grows by plating from the plating base layer without the surroundings grows while being rounded, and the front end face of the yoke layer is formed as an inclined surface or a curved surface inclined from the lower surface to the upper surface in the height direction. be able to.
[0037]
In the present invention, since the front end surface of the yoke layer has a gentle slope or a curved surface, the resist layer formed from the insulating layer in front of the yoke layer to the yoke layer in the step (f). Can be made substantially uniform.
[0038]
For this reason, when forming the main magnetic pole layer punching pattern on the resist layer by exposure and development, the resist layer in the punching pattern can be appropriately exposed and developed from the lower surface to the entire upper surface, and can be removed. As shown in FIG.
[0039]
Therefore, the plating underlayer for forming the main magnetic pole layer is appropriately exposed in the blanking pattern. Therefore, in the step (g), the main magnetic pole layer is appropriately plated and grown on the plating underlayer in a predetermined shape. It is possible to do.
[0040]
In the present invention, in the step (d), it is preferable that the plating underlayer is formed in the following steps.
(H) forming a plating base layer on the insulating layer upper surface and the connection layer upper surface, and further forming a resist layer on the plating base layer;
(I) removing the remaining resist layer while leaving a yoke layer-shaped resist layer whose front end face is located rearward in the height direction from the opposing surface and extends to above the connection layer;
(J) a step of removing the resist layer after removing a plating base layer not covered with the resist layer;
[0041]
Alternatively, in the present invention, in the step (d), the plating underlayer may be formed in the following steps.
(K) A resist layer is formed on the upper surface of the insulating layer and the upper surface of the connection layer, and further, the front end surface of the resist layer is located rearward in the height direction from the opposing surface and extends to the upper side of the connection layer. Forming a pattern on the resist layer,
(L) a step of removing the resist layer after forming a plating base layer by sputtering in the blanking pattern;
[0042]
According to the above-described method for forming the plating underlayer, the periphery of the plating underlayer is not surrounded by the resist layer or the like, and only the insulating layer is spread around the plating underlayer. Therefore, when the yoke layer is grown on the plating base layer by plating, the periphery of the yoke layer grows rounded, and the front end surface of the yoke layer is inclined or curved in a height direction from the lower surface to the upper surface. It can be formed as a surface.
[0044]
Thereby, the front end face of the main magnetic pole layer can be formed in a shape whose width dimension gradually increases from the lower surface to the upper surface.
[0045]
Further, in the present invention, it is preferable that, in the step (g), the plating base layer formed other than under the main magnetic pole layer is further removed.
[0046]
BEST MODE FOR CARRYING OUT THE INVENTION
FIG. 1 is a longitudinal sectional view showing the structure of a magnetic head having a perpendicular magnetic recording head according to a first embodiment of the present invention.
[0047]
The perpendicular magnetic recording head H shown in FIG. 1 applies a perpendicular magnetic field to the recording medium M to magnetize the hard film Ma of the recording medium M in the vertical direction.
[0048]
The recording medium M is disk-shaped, and has a hard film Ma with high residual magnetization on its surface and a soft film Mb with high magnetic permeability inside, and the center of the disk is rotated about the rotation axis. Let me do.
[0049]
The slider 30 of the perpendicular magnetic recording head H is made of Al₂O₃The slider 30 is made of a ceramic material such as TiC, and the facing surface 30a of the slider 30 faces the recording medium M. When the recording medium M rotates, the slider 30 floats from the surface of the recording medium M due to airflow on the surface. , Or the slider 30 slides on the recording medium M. In FIG. 1, the moving direction of the recording medium M with respect to the slider 30 is the illustrated Z direction. The perpendicular magnetic head H is provided on the trailing side end surface of the slider 30.
[0050]
On the side end surface 30b of the slider 30, Al₂O₃Or SiO₂A non-magnetic insulating layer 54 made of an inorganic material such as_RIs formed.
[0051]
The reading section H_RConsists of a lower shield layer 52, a gap layer 55, a magnetoresistive element 53, and an upper shield layer 51 from below. The magnetoresistance effect element 53 is an anisotropic magnetoresistance effect (AMR) element, a giant magnetoresistance effect (GMR) element, a tunnel type magnetoresistance effect (TMR) element, or the like.
[0052]
On the upper shield layer 51, Al₂O₃Or SiO₂A non-magnetic insulating layer 31 made of an inorganic material such as the above is formed, and a perpendicular magnetic recording head H for recording of the present invention is provided on the non-magnetic insulating layer 31. The perpendicular magnetic recording head H is covered with a protective layer 13 formed of an inorganic non-magnetic insulating material or the like. The surface H1a of the perpendicular magnetic recording head H facing the recording medium is substantially the same as the surface 30a of the slider 30.
[0053]
In the perpendicular magnetic recording head H, the auxiliary magnetic pole layer 21 is formed by plating a ferromagnetic material such as permalloy (Ni-Fe). The upper shield layer 51 may also be used as the auxiliary magnetic pole layer 21. The nonmagnetic insulating layer 31 is formed below the auxiliary magnetic pole layer 21 (between the auxiliary magnetic pole layer 21 and the side end surface 30b of the slider 30) and around the auxiliary magnetic pole layer 21. As shown in FIG. 1, the surface (upper surface) 21a of the auxiliary pole layer 21 and the surface (upper surface) 31a of the nonmagnetic insulating layer 31 are located on the same plane.
[0054]
As shown in FIG. 1, a connection layer 25 such as Ni—Fe is formed on the surface 21 a of the auxiliary magnetic pole layer 21 behind the opposing surface H <b> 1 a in the height direction (Y direction in the drawing).
[0055]
Around the connection layer 25, the surface 21 a of the auxiliary pole layer 21 and the surface 31 a of the nonmagnetic insulating layer 31₂O₃And the like, and a coil layer 27 made of a conductive material such as Cu is formed on the insulating base layer 26. The coil layer 27 is formed by a frame plating method or the like, and is spirally patterned around the connection layer 25 so as to have a predetermined number of turns. On the connection end 27a on the winding center side of the coil layer 27, a bottom raising layer 77 also formed of a conductive material such as Cu is formed.
[0056]
The coil layer 27 and the bottom raising layer 77 are covered with an insulating layer 32 made of an organic material such as a resist material, and further covered with an insulating layer 33.
[0057]
Preferably, the insulating layer 33 is formed of an inorganic insulating material. As the inorganic insulating material, AlO, Al₂O₃, SiO₂, Ta₂O₅, TiO, AlN, AlSiN, TiN, SiN, Si₃N₄, NiO, WO, WO₃, BN, CrN, SiON.
[0058]
The surface (upper surface) 25a of the connection layer 25, the surface (upper surface) 77a of the bottom raising layer 77, and the surface (upper surface) 33a of the insulating layer 33 are processed to be the same surface. Such a flattening process is performed by using a CMP technique or the like as described in a manufacturing method described later.
[0059]
In the first embodiment, a yoke layer 35 is formed on the insulating layer 33. As shown in FIG. 1, the front end surface 35a of the yoke layer 35 is formed rearward in the height direction (Y direction in the drawing) from the facing surface H1a. The base end 35c of the yoke layer 35 is formed on the upper surface of the connection layer 25, and the base end 35c and the connection layer 25 are magnetically connected. Since the insulating layer 33 below the yoke layer 35 is formed with a flat surface, the yoke layer 35 can be formed with high pattern accuracy.
[0060]
Further, in the present invention, the front end surface 35a of the yoke layer 35 is an inclined surface or a curved surface inclined from the lower surface to the upper surface (Z direction in the drawing) in the height direction (Y direction in the drawing).
[0061]
As shown in FIG. 1, a lead layer 36 is formed on the surface 77a of the bottom raising layer 77, and a recording current can be supplied from the lead layer 36 to the bottom raising layer 77 and the coil layer 27. The lead layer 36 can be formed of the same material as the yoke layer 35, and the yoke layer 35 and the lead layer 36 can be formed simultaneously by plating.
[0062]
Also, as shown in FIG. 1, a main layer made of a magnetic material such as NiFe is formed on the insulating layer 33 located on the side of the facing surface H1a with respect to the yoke layer 35 to the yoke layer 35 via a plating underlayer 71. A pole layer 24 is formed. Further, a nonmagnetic layer 40 is formed on the main magnetic pole layer 24 so as to overlap. The front end surfaces 24a and 40a of the main magnetic pole layer 24 and the nonmagnetic layer 40 both emerge from the facing surface H1a.
[0063]
In the embodiment shown in FIG. 1, the main pole layer 24 and the yoke layer 35 are formed to have a length of L3 from the facing surface H1a to the height direction. Are partly overlapped and magnetically connected, the length L3 is not limited. Therefore, the main magnetic pole layer 24 and the nonmagnetic layer 40 may be formed longer in the height direction, and may extend to the same position as the rear end face 35b of the yoke layer 35 as shown in FIG.
[0064]
As shown in FIGS. 1 and 2, the protective layer 13 covers the nonmagnetic layer 40 and the yoke layer 35.
[0065]
When the non-magnetic layer 40 is overlaid on the main magnetic pole layer 24 as shown in FIGS. 1 and 2, the step of removing the plating underlayer 71 formed except under the main magnetic pole layer 24 is performed as described above. The plating underlayer 71 can be removed without reducing the height dimension of the main magnetic pole layer 24, and when the plating underlayer 71 is removed, both end surfaces of the main magnetic pole layer 24 in the track width direction (X direction in the drawing). In some cases, the constituent material of the plating underlayer 71 may adhere to the substrate, but even in this case, the attached film can be removed without reducing the height of the main pole layer 24. Also, by cutting both end surfaces of the main magnetic pole layer 24, the track width Tw of the main magnetic pole layer 24 can be reduced, and a perpendicular magnetic recording head capable of narrowing the track can be manufactured. The track width of the main magnetic pole layer 24 can be reduced without reducing the height dimension of the main magnetic pole layer 24.
[0066]
Preferably, the non-magnetic layer 40 is formed of a non-magnetic metal material. As the non-magnetic metal material, NiP, NiCu, NiMn, NiW, NiB, Pd, Rh, Ru, Au, and Cu can be selected. Among them, it is preferable to select NiP. When the nonmagnetic layer 40 is made of NiP, it has excellent heat resistance and good adhesion to the main magnetic pole layer 24 in addition to ease of continuous plating in manufacturing. Further, since the hardness of the main magnetic pole layer 24 can be made equal, the amount of processing of the nonmagnetic layer 40 and the main magnetic pole layer 24 by ion milling, which will be described later, can be made equal, and the workability can be improved. .
[0067]
The nonmagnetic layer 40 is a NiP alloy, and the concentration of the element P is preferably 8% by mass or more and 15% by mass or less. This makes it possible to stably be non-magnetic even with external factors such as heat generation. The measurement of the alloy composition of the nonmagnetic layer 40 such as a NiP alloy can be specified by a combined X-ray analyzer such as SEM or TEM, or a waveform dispersion type line analyzer.
[0068]
The reason for selecting the non-magnetic metal material is that the non-magnetic layer 40 can be continuously formed on the main magnetic pole layer 24 to be formed by plating, so that the manufacturing process can be simplified.
[0069]
FIG. 3 is a longitudinal sectional view of a magnetic head equipped with a perpendicular magnetic recording head according to another embodiment of the present invention.
[0070]
3 differs from FIG. 1 in that the nonmagnetic layer 40 is not provided on the upper surface of the main magnetic pole layer 24. Therefore, in FIG. 3, the effect of providing the above-described nonmagnetic layer 40 cannot be obtained. However, also in this embodiment, the front end surface 35a of the yoke layer 35 extends from the lower surface to the upper surface in the height direction (Y direction in the drawing). The effect of the present invention, which will be described later, can be obtained by being formed with an inclined surface or a curved surface.
[0071]
Next, the shapes of the front end faces 24a and 40a of the main magnetic pole layer 24 and the nonmagnetic layer 40 in FIGS. 1 and 2 will be described.
[0072]
As shown in FIGS. 4 and 5, a plating base layer 71 is formed between the insulating layer 33 and the main magnetic pole layer 24. The main magnetic pole layer 24 is formed by plating on the plating base layer 71, and the height dimension H1 of the main magnetic pole layer 24 is set to a predetermined value.
[0073]
As shown in FIGS. 4 and 5, both end surfaces 24d of the front end surface 24a of the main magnetic pole layer 24 have a width dimension in the track width direction (X direction in the drawing) from the lower surface to the upper surface (Z direction in the drawing). It is formed in a shape that gradually spreads. As shown in FIG. 4, the both side end surfaces 24d, 24d are preferably formed as inclined surfaces or curved surfaces as shown in FIG.
[0074]
Further, as shown in FIGS. 4 and 5, the front end face 40a of the nonmagnetic layer 40 formed on the main magnetic pole layer 24 is also formed in such a shape that the width in the track width direction gradually increases from the lower surface to the upper surface. ing. As shown in FIGS. 4 and 5, both end surfaces 40d, 40d of the front end surface 40a are continuous surfaces with both end surfaces 24d, 40d of the main pole layer 24. Therefore, in FIG. Both end surfaces 40d of the front end surface 40d are inclined surfaces, and in FIG. 5, both end surfaces 40d of the front end surface 40a are curved surfaces.
[0075]
As shown in FIGS. 4 and 5, the track width Tw is regulated by the width in the track width direction of the upper surface (trailing side end surface) 24g of the main magnetic pole layer 24.
[0076]
Even when the nonmagnetic layer 40 is not overlaid on the main magnetic pole layer 24 as shown in FIG. 3, the front end face 24a of the main magnetic pole layer 24 has a width in the track width direction (X direction in the drawing) from the lower surface to the upper surface. It is a shape whose dimensions gradually widen, and at this time, it is preferable that both side surfaces 24d, 24d of the front end surface 24a are inclined surfaces or curved surfaces.
[0077]
As described above, when the both end surfaces 24d, 24d of the front end surface 24a of the main magnetic pole layer 24 are inclined surfaces or curved surfaces, and the front end surface 24a has a substantially inverted trapezoidal shape, recording is actually performed on the recording medium. At this time, even if a skew angle is generated as shown by a broken line in FIG. 10, the end face 24d shown in (iii) does not largely protrude obliquely from the recording track width Tw1 to the side. Therefore, fringing due to the both end surfaces 24d can be prevented, and the off-track performance can be improved.
[0078]
On the other hand, FIG. 33 is a front view of the conventional main pole layer 5 shown in FIG. 27 or 29. If the end face 5a of the main pole layer 5 is square or rectangular as shown in FIG. Has a skew angle with respect to the moving tangent direction (Z direction in the drawing) of the recording medium, the side 5b of the main magnetic pole layer gives an oblique leakage magnetic field within the track width Tw1 as shown by a broken line. Fringing F occurs, which causes a reduction in off-track performance.
[0079]
Therefore, it is preferable that the front end face 24a of the main magnetic pole layer 24 has a substantially inverted trapezoidal shape as in the present invention.
[0080]
Next, a planar shape of the main magnetic pole layer 24 and the yoke layer 35 as viewed from directly above will be described below. The plan view described below is applicable to any of the perpendicular magnetic recording heads shown in FIGS.
[0081]
As shown in the plan view of FIG. 6, the yoke layer 35 has a narrower width dimension Wy in the track width direction in the front area 35d on the side of the facing surface H1a, and gradually has a smaller width dimension in the track width direction in the rear area 35e. It is a planar shape that becomes larger. The main magnetic pole layer 24 is overlaid on the front region 35d. The width Wy of the front region 35d in the track width direction (X direction in the drawing) is formed to be wider than the track width Tw.
[0082]
As shown in FIG. 6, the main magnetic pole layer 24 has its upper surface (trailing side end surface) of the front end surface 24a regulated by the track width Tw, and maintains its width dimension or becomes slightly wider toward the rear in the height direction. It is formed with a short length dimension.
[0083]
In the present invention, the front end face 24a of the main magnetic pole layer 24 exposed on the facing surface H1a needs to be larger than the area of the front end face 21b of the auxiliary magnetic pole layer 21. For example, as shown in FIG. It is preferable that the width dimension Wr of the auxiliary magnetic pole layer 21 in the track width direction is formed to be sufficiently larger than the track width Tw.
[0084]
In FIG. 7, the yoke layer 35 does not have the front region 35d, and has a shape in which the width dimension Wy gradually increases toward the height direction (the Y direction in the drawing). The main magnetic pole layer 24 is overlaid on the yoke layer 35.
[0085]
As shown in FIG. 7, the main magnetic pole layer 24 has the upper surface (the trailing end surface) of the front end surface 24a regulated by the track width Tw, and keeps its width dimension or becomes slightly wider to face rearward in the height direction. It is formed with a short length dimension.
[0086]
In FIG. 8, the shape of the yoke layer 35 is the same as that of FIG. 7, but the width of the rear region 24e of the main pole layer 24 gradually increases, and the rear region 24e and the yoke layer 35 overlap. ing. However, the yoke layer 35 may be further formed closer to the facing surface H1a, and a part of the narrow front region 24f of the main pole layer 24 may also overlap the yoke layer 35. As a result, a magnetic flux can be smoothly introduced from the yoke layer 35 to the main magnetic pole layer 24, and a perpendicular magnetic recording head capable of coping with high recording density can be manufactured.
[0087]
Further, a front region 35d as shown in FIG. 6 may be formed in the yoke layer 35.
[0088]
In FIG. 9, the shape of the yoke layer 35 is the same as that of FIGS. 7 and 8, but the width of the rear region 24e of the main pole layer 24 gradually increases. It is formed to extend in the height direction (Y direction in the figure). The rear end of the rear region 24e may extend to the same plane as the rear end surface 35b of the yoke layer 35 as shown in FIG.
[0089]
Further, a front region 35d as shown in FIG. 6 may be formed in the yoke layer 35. Further, the main magnetic pole layer 24 is not formed with the rear region 24e whose width dimension gradually increases, and keeps the track width Tw in the height direction or slightly exceeds the track width Tw in the height direction. The wide narrow front region 24f may be extended in the height direction.
[0090]
In the plan views shown in FIGS. 6 to 9 described above, in each of the yoke layers 35, a region in which the width dimension Wy gradually increases toward the height direction is formed. In particular, the yoke layers 35 and the main magnetic pole are formed. At the position where the layer 24 overlaps, the width of the yoke layer 35 in the track width direction is larger than the width of the main pole layer 24 in the track width direction.
[0091]
The thickness of the yoke layer 35 is substantially equal to the thickness of the main pole layer 24, or the thickness of the yoke layer 35 is formed larger than the thickness of the main pole layer 24.
[0092]
Therefore, at a position where the yoke layer 35 and the main magnetic pole layer 24 overlap, the cross-sectional area of the yoke layer 35 in a direction parallel to the opposing surface H1a is in a direction parallel to the opposing surface H1a of the main magnetic pole layer 24. Is larger than the cross-sectional area. As a result, the recording magnetic field can be appropriately guided from the yoke layer 35 to the main magnetic pole layer 24, the magnetic flux passage efficiency is improved, and the overwrite characteristics can be improved.
[0093]
When the main magnetic pole layer 24 and the yoke layer 35 are separately formed as shown in FIGS. 1 to 3 and the main magnetic pole layer 24 is overlapped on the yoke layer 35, the width of the main magnetic pole layer 24 is reduced. It is preferable to form the front region 24f formed by the above process so as to be extended, since the entire width of the front region 24f can be formed with a substantially track width Tw with high pattern accuracy. In such a case, by forming the yoke layer 35 as close to the opposing surface H1a as possible, magnetic saturation of the main magnetic pole layer 24 can be suppressed, and magnetic flux can be concentrated on the main magnetic pole layer 24.
[0094]
6 to 9 are examples, and the planar shapes of the main pole layer 24 and the yoke layer 35 are not limited to these planar shapes. In the present invention, at a position where the main magnetic pole layer 24 and the yoke layer 35 overlap, a cross-sectional area of the yoke layer 35 in a direction parallel to the opposing surface H1a is parallel to the opposing surface H1a of the main magnetic pole layer 24. It may be formed in any planar shape as long as it is larger than the cross-sectional area in any direction.
[0095]
In the present invention, the front end surface 35a of the yoke layer 35 is formed as an inclined surface or a curved surface inclined in the height direction from the lower surface to the upper surface in any of the embodiments shown in FIGS.
[0096]
The method of forming such a front end face 35a will be described in detail in a later manufacturing method, but the following effects can be obtained.
[0097]
That is, in the present invention, when the main magnetic pole layer 24 formed from the insulating layer 33 located forward of the yoke layer 35 to the yoke layer 35 is formed using a resist layer, the main magnetic pole layer 24 is formed on the resist layer. A punching pattern for forming 24 is formed by exposure and development. At this time, if the front end surface 35a of the yoke layer 35 is a gentle slope or a curved surface, it is formed from the insulating layer 33 to the yoke layer 35. Since the resist layer to be formed can be formed with a substantially constant thickness, the resist layer in the punched pattern can be appropriately exposed and developed from the upper surface to the lower surface, and the resist pool does not occur in the punched pattern as in the related art. .
[0098]
Therefore, in the present invention, the plating underlayer 71 can be exposed on one surface in the punching pattern, and the main pole layer 24 having a predetermined shape can be appropriately grown on the plating underlayer 71 by plating.
[0099]
When the front end surface 35a of the yoke layer 35 is formed as a gentle slope or a curved surface as described above, the thickness of the resist layer for forming the main pole layer 24 can be substantially uniform. The pattern accuracy can be improved, and thus the main magnetic pole layer 24 can be formed with high pattern accuracy.
[0100]
In particular, as described above, the front end face 24a that appears on the facing surface H1a of the main pole layer 24 has its upper surface (trailing side end face) regulated in the track width direction as the track width Tw. It becomes possible to set Tw with a predetermined dimension with high accuracy. Therefore, according to the present invention, it is possible to manufacture a perpendicular magnetic recording head capable of coping with a narrow track.
[0101]
Further, in the present invention, the front end surface 35a of the yoke layer 35 has a gentle slope or a curved surface, so that the magnetic flux is smoothly guided from the yoke layer 35 to the main magnetic pole layer 24, The passage efficiency can be improved. That is, in the present invention, the magnetic flux leaking from the front end face 35a of the yoke layer 35 can be reduced, the magnetic flux can be appropriately concentrated on the main magnetic pole layer 24, and the perpendicular magnetic recording that can appropriately cope with future high recording density can be achieved. A head can be manufactured.
[0102]
Further, in the present invention, as described above, the upper surface 33a of the insulating layer 33 and the upper surface 25a of the connection layer 25 are flattened surfaces made the same by the CMP technique or the like.
[0103]
Therefore, the yoke layer 35 and the main magnetic pole layer 24 can be formed on the insulating layer 33 with high pattern accuracy.
[0104]
In the present invention, since the main magnetic pole layer 24 and the yoke layer 35 can be formed separately, the main magnetic pole layer 24 and the yoke layer 35 can be formed of different magnetic materials. In such a case, it is preferable to select a magnetic material so that the saturation magnetic flux density of the main magnetic pole layer 24 is higher than the saturation magnetic flux density of the yoke layer 35. When the main magnetic pole layer 24 is formed of a magnetic material having a higher saturation magnetic flux density than the yoke layer 35, the magnetic flux φ having a high density is perpendicularly applied to the hard film Ma from the main magnetic pole layer 24 having a small width Tw and a small thickness. The overwriting characteristics can be improved in the direction.
[0105]
A magnetic material such as Ni—Fe, Co—Fe, or Ni—Fe—Co is selected for the main magnetic pole layer 24 and the yoke layer 35, but the same magnetic material is selected for the main magnetic pole layer 24 and the yoke layer 35. In this case, it is possible to make a difference in the saturation magnetic flux density by changing the composition ratio.
[0106]
In the perpendicular magnetic recording head shown in FIG. 1 to FIG. A recording magnetic field is induced. As shown in FIGS. 1 to 3, on the opposing surface H1a, the leakage recording magnetic field from the front end surface 24a of the main magnetic pole layer 24 and the front end surface 21b of the auxiliary magnetic pole layer 21 penetrates the hard film Ma of the recording medium M, and It passes through the film Mb. Since the area of the front end face 24a of the main magnetic pole layer 24 is sufficiently smaller than the area of the front end face 21b of the auxiliary magnetic pole layer 21, the magnetic flux φ of the leakage recording magnetic field concentrates on the front end face 24a of the main magnetic pole layer 24, The concentrated magnetic flux φ magnetizes the hard film Ma in the vertical direction, thereby recording magnetic data.
[0107]
Next, a method for manufacturing the perpendicular magnetic recording head of the present invention will be described below. FIGS. 11 to 26 are process diagrams showing the manufacturing process of the perpendicular magnetic recording head according to the present invention. FIGS. 11 to 13 show common manufacturing steps of the perpendicular magnetic recording head shown in FIGS.
[0108]
In the step shown in FIG. 11, after forming the auxiliary magnetic pole layer 21 made of a magnetic material on the non-magnetic insulating layer 31, the non-magnetic insulating layer 31 also fills the rear of the auxiliary magnetic pole layer 21 in the height direction (Y direction in the drawing). Further, the upper surfaces of the auxiliary magnetic pole layer 21 and the nonmagnetic insulating layer 31 are flattened by using a CMP technique or the like.
[0109]
Next, a connection layer 25 made of a magnetic material is formed by plating behind the auxiliary pole layer 21 in the height direction (Y direction in the drawing), and an inorganic insulating material is sputtered from the upper surface of the auxiliary pole layer 21 to the upper surface of the connection layer 25. To form an insulating underlayer 26.
[0110]
Next, as shown in FIG. 12, a coil layer 27 is formed on the insulating base layer 26 by a frame plating method, and a raised layer 77 is formed by the same plating. At this time, the coil layer 27 is formed at a position sufficiently lower than the height of the connection layer 25. Then, the coil layer 27 and the bottom raising layer 77 are covered with an insulating layer 32 made of an organic material, and an inorganic insulating material is sputtered to form an insulating layer 33 covering all the layers.
[0111]
Next, each layer formed in the state shown in FIG. 12 is polished from above in the figure by using a CMP technique or the like. This polishing is performed up to the position of the horizontal plane (LL plane) crossing all of the insulating layer 33, the connection layer 25, and the bottom raising layer 77.
[0112]
As a result of the polishing, as shown in FIG. 13, the surface 25a of the connection layer 25, the surface 33a of the insulating layer 33, and the surface 77a of the bottom-up layer 77 are all processed to be the same plane.
[0113]
The steps up to here are the common manufacturing steps in each embodiment. Next, a method of manufacturing the perpendicular magnetic recording head having the structure shown in FIG. 1 will be described.
[0114]
FIG. 14 is a plan view, in which a plating base layer 72 is formed by sputtering on the entire surface of the flattened insulating layer 33. Next, a resist layer 80 is formed on the plating base layer 72, and the remaining resist layer is removed while leaving the pattern 80a in the shape of the yoke layer 35 on the resist layer 80. Depending on the type of the resist layer 80, there are those where the exposed and developed portions are removed and those where the exposed and developed portions are removed. Exposes and develops the resist layer 80 other than the pattern 80a to remove that portion. When the resist layer 80 from which a portion that is not exposed and developed is used, the inside of the pattern 80a is exposed and developed, and the resist layer 80 that is not exposed and developed is removed. Thus, the resist layer 80 having the pattern 80a shown in FIG. 14 can be left.
[0115]
The pattern 80a includes a yoke pattern 80c in a region where the yoke layer 35 is formed, and a common pattern 80d located behind the yoke pattern 80c for energizing plating.
[0116]
The pattern 80a has its front end face 80b located rearward in the height direction (Y direction in the drawing) from the opposing face H1a, and the yoke pattern 80c of the pattern 80a extends to the connection layer 25. .
[0117]
Next, after removing the plating base layer 72 not covered with the resist layer 80 by ion milling, the resist layer 80 is removed.
[0118]
Thus, the plating base layer 72 having the shape of the pattern 80a is left on the insulating layer 33.
[0119]
Next, FIG. 15 is a plan view. In this step, the resist pattern 76 covers the common pattern 80d. FIG. 18 shows a vertical sectional view at this time. Then, the yoke layer 35 is grown by plating on the plating base layer 72 of the yoke pattern 80c.
[0120]
Alternatively, the yoke layer 35 may be formed by the following method.
FIG. 16 is a plan view. In this step, a resist layer 73 is formed on the insulating layer 33. Further, on the resist layer 73, a blanking pattern 73a having a planar shape of the yoke layer 35 is formed by exposure and development. The blanking pattern 73a includes a yoke pattern 73c in a region where the yoke layer 35 is formed, and a plating common pattern 73d located behind the yoke pattern 73c. The punched pattern 73a has a front end surface 73b located rearward of the facing surface H1a in the height direction (Y direction in the drawing), and a yoke pattern 73c of the punched pattern 73a is formed to extend to the connection layer 25. I have.
[0121]
Then, a plating base layer 72 is formed by sputtering in the punched pattern 73a, and the resist layer 73 is removed.
[0122]
In the step shown in FIG. 17, the common pattern 73d is covered with a resist layer 74. FIG. 18 shows a vertical sectional view at this time. Then, the yoke layer 35 is grown by plating on the plating base layer 72 formed on the yoke pattern 73c not covered with the resist layer 74.
[0123]
Next, after the steps of FIGS. 15 and 17, the resist layers 76 and 74 are removed, and the plating underlayer 72 on the common patterns 80 d and 73 d is removed. As shown in FIG.
[0124]
As shown in FIG. 19, the yoke layer 35 formed by plating on the plating base layer 72 has a front end surface 35a having a smoothly rounded shape or a gentle slope. The reason why the front end face 35a has a gentle slope or a curved face is that the periphery of the plating base layer 72 on the yoke pattern 73c is not surrounded by the resist layer or the like at the time of the step of FIG. 15 or FIG. This is because the periphery of the yoke pattern 73c is open.
[0125]
15 and 17, or FIG. 18, the plating underlayer 72 formed on the insulating layer 33 is surrounded by the resist layers 74 and 76 except on the common pattern 75d. You can see that it has not been done.
[0126]
As described above, when the periphery of the plating base layer 72 is not surrounded by the resist layer or the like and is open, the end surface of the yoke layer 35 that is plated and grown on the plating base layer 72 grows smoothly and roundly. Then, it becomes an inclined surface or a curved surface.
[0127]
In the present invention, at least a region in front of the front end face 72b of the plating base layer 72 is not required to be covered with the resist layer. For example, both end faces in the track width direction (X direction in the drawing) of the plating base layer 72 are formed of resist. It may be covered by a layer. In this case, at least the yoke layer 35 formed by plating on the plating base layer 72 is formed as a sloped surface or a curved surface whose front end surface 35a is inclined in the height direction from the lower surface to the upper surface.
[0128]
Although not shown in FIG. 19, it is preferable that the lead layer 36 is formed on the upper surface 77a of the bottom raising layer 77 by plating at the same step as the steps shown in FIGS.
[0129]
Next, FIG. 20 is a plan view. In this step, a plating base layer 71 is formed by sputtering on the yoke layer 35 and the insulating layer 33 extending around the yoke layer 35, and a resist layer 75 is formed thereon. A punch pattern 75a for forming the main magnetic pole layer 24 is formed on the layer 75 by exposure and development.
[0130]
As shown in FIG. 20, the front end face 75b of the punched pattern 75a is formed on the same plane as the facing surface H1a, and the punched pattern 75a is formed to extend over the yoke layer 35. In this step, the cutout pattern 75a may be formed so that the rear end face 75d extends further rearward in the height direction (Y direction in the drawing) as shown by a dashed line.
[0131]
FIG. 21 is a longitudinal sectional view of the perpendicular magnetic recording head taken along line MM shown in FIG. 20 and viewed from the direction of the arrow.
[0132]
As shown in FIG. 21, the resist pattern 75a formed in the resist layer 75 has no resist pool as in the related art, and the plating base layer 71 is appropriately exposed in the resist pattern 75a. I have.
[0133]
This is because the front end surface 35a of the yoke layer 35 has a gentle slope or a curved surface as described above, and thus, from the insulating layer 33 ahead of the yoke layer 35 to the yoke layer 35. The thickness of the formed resist layer 75 can be made substantially uniform, and the resist layer 75 in the cutout pattern 75a formed on the resist layer 75 can be removed by appropriately exposing and developing from the upper surface to the lower surface. I have.
[0134]
Next, the resist layer 75 in the present invention has a shape shown in FIG. 22 when viewed from the facing surface H1a side.
[0135]
As shown in FIG. 22, the inner end faces 75e, 75e of the cutout pattern 75a formed on the resist layer 75 gradually increase in width in the track width direction (X direction in the drawing) from the lower surface to the upper surface (Z direction in the drawing). Spread out and formed. The inner end surface 75e may be formed as a curved surface as shown in FIG. 22, or may be formed as an inclined surface.
[0136]
In order to form the cut pattern 75a having such a shape on the resist layer 75, after applying the resist layer 75, the cut pattern 75a is formed by exposure and development, and further, the inner side surface 75e of the cut pattern 75a is subjected to heat treatment. , The inner side surface 75e can be formed as an inclined surface or a curved surface.
[0137]
Next, as shown in FIGS. 23 and 24, the main magnetic pole layer 24 is grown by plating on the plating base layer 71 exposed in the punched pattern 75a. At this time, as shown in FIG. 23, the main magnetic pole layer 24 is plated and grown to a predetermined thickness H1.
[0138]
Further, in the present invention, a nonmagnetic layer 40 made of a nonmagnetic metal material such as NiP is formed on the main magnetic pole layer 24 by plating. Then, the resist layer 75 is removed.
[0139]
In the present invention, as shown in FIG. 21, there is no resist pool in the punched pattern 75a, and the plating underlayer 71 is properly exposed on one surface in the punched pattern 75a. Therefore, the main magnetic pole layer 24 can be appropriately plated and grown from the plating base layer 71 to form the main magnetic pole layer 24 having a predetermined shape.
[0140]
Further, in the present invention, since the front end surface 35a of the yoke layer 35 has a gentle slope or a curved surface, the resist layer 75 can be formed with a substantially uniform film thickness. It is easy to form a pattern 75a of the main magnetic pole layer 24 with high precision.
[0141]
In particular, the dimension in the track width direction of the upper surface (the trailing side end surface) of the front end surface 24a of the main magnetic pole layer 24 is regulated as a minute track width Tw. It is possible to manufacture a perpendicular magnetic recording head which can be formed in a predetermined size and can cope with a future track narrowing.
[0142]
FIG. 25 is a front view showing a state where the resist layer 75 has been removed. As shown in FIG. 25, on the plating base layer 71, the main pole layer 24 and the non-magnetic pole layer 24 whose both end surfaces are inclined or curved so that the width in the track width direction gradually increases from the lower surface to the upper surface. The magnetic layer 40 is laminated.
[0143]
As shown in FIG. 25, since the plating underlayer 71 is formed not only under the main pole layer 24 but also in other regions, the plating underlayer 71 other than under the main pole layer 24 is removed. There must be.
[0144]
In the step shown in FIG. 25, the plating base layer 71 formed other than under the main magnetic pole layer 24 is removed by anisotropic ion milling. At this time, the upper surface 40e of the nonmagnetic layer 40 is also shaved under the influence of the ion milling.
[0145]
Further, as shown in FIG. 26, a part of the removed plating base layer 71a is reattached to both end surfaces 24d and 40d of the main magnetic pole layer 24 and the nonmagnetic layer 40 (arrow direction C). The attached films 78, 78 attached to the end faces are removed by anisotropic ion milling. Also at this time, the upper surface 40e of the nonmagnetic layer 40 is shaved under the influence of the ion milling. The removal of the plating underlayer 71 and the adhesion film 78 is particularly effective when the plating underlayer 71 is formed of a magnetic material. This is because the track width Tw increases when the adhesion film 78 is made of a magnetic material. On the other hand, when the adhesion film 78 is a non-magnetic plating material, it is not particularly necessary to remove the adhesion film 78. Further, when the plating base layer 71 is formed in a range that does not affect the electrical characteristics, it is not particularly necessary to remove the plating base layer 71.
[0146]
As described above, in the present invention, since the nonmagnetic layer 40 is formed on the main magnetic pole layer 24, when the plating base layer 71 and the adhered film 78 are removed by ion milling, the upper surface of the nonmagnetic layer 40 is removed. The height dimension H1 of the main magnetic pole layer 24 does not decrease only by removing 40e.
[0147]
Further, both side end surfaces 24d of the main magnetic pole layer 24 and both side end surfaces 40d of the nonmagnetic layer 40 are further cut by anisotropic ion milling to obtain a width dimension of an upper surface (trailing side end surface) 24g of the main magnetic pole layer 24. When the track width Tw determined by the above is reduced, the upper surface 40e of the nonmagnetic layer 40 is cut by ion milling, but the height dimension H1 of the main magnetic pole layer 24 does not decrease.
[0148]
Therefore, when the non-magnetic layer 40 is formed on the main magnetic pole layer 24 as in the present invention, the height dimension H1 of the main magnetic pole layer 24 is maintained at a constant value without decreasing. Thus, it is possible to realize the removal of the plating base layer 71a and the adhesion film 78 and the narrowing of the track.
[0149]
In the present invention, it is preferable that the ion milling is performed at an angle of about 45 ° to 70 ° with respect to the vertical direction with respect to the plating underlayer 71. If the angle is 45 ° or more and 60 ° or less, the removal of the plating base layer 71a and the adhesion film 78 and the narrowing of the track can be performed in one ion milling process, and the manufacturing process can be simplified.
[0150]
However, the step of removing the plating base layer 71a, the step of removing the adhesion film 78, and the step of narrowing the track may be performed by ion milling having different milling angles.
[0151]
In the present invention, the height dimension H1 of the main magnetic pole layer 24 is preferably 0.25 μm or more and about 0.5 μm or less, and the track width Tw of the main magnetic pole layer 24 is 0.7 μm or less. Preferably, it is 0.5 μm or less.
[0152]
In the present invention, the plating base layer 72 for forming the yoke layer 35 and the plating base layer 71 for forming the main magnetic pole layer 24 may be a magnetic plating material or a non-magnetic plating material. Good. When a non-magnetic metal material such as Cu is used for the plating underlayer 71 for forming the main magnetic pole layer 24, the plating underlayer 71 slightly extends under the main magnetic pole layer 24 so that the plating underlayer 71 remains. Since the plating may be performed, etching control can be facilitated as compared with the case where a magnetic plating material is used for the plating base layer 71.
[0153]
In the case of manufacturing the perpendicular magnetic recording head shown in FIG. 2, the rear end face 75d of the cut pattern 75a formed in the resist layer 75 in the step shown in FIG. 20 is further extended in the height direction (Y direction in the figure) (reference numeral 75c). Region), the rear end face 75d may be aligned with the rear end face 35b of the yoke layer 35.
[0154]
When the perpendicular magnetic recording head shown in FIG. 3 is manufactured, only the main magnetic pole layer 24 may be grown by plating in the punched pattern 75a formed in the resist layer 75 in the steps of FIGS. .
[0155]
In the present invention, the resist layer 75 shown in FIG. 22 does not have to be formed so that the inner width dimension in the track width direction (X direction in the drawing) on the facing surface H1a extends from the lower surface to the upper surface. The effect of the present invention can be obtained even if the front end face 24a of the main magnetic pole layer 24 is formed in the shape of a square or a rectangle as in the related art.
[0156]
In the embodiment shown in FIG. 1 and FIG._RIs formed, but this may not be formed.
[0157]
【The invention's effect】
As described above, in the present invention, the front end surface of the yoke layer formed on the insulating layer is formed as a slope or a curved surface inclined in the height direction from the lower surface to the upper surface.
[0158]
Therefore, when the main magnetic pole layer formed from the insulating layer located in front of the yoke layer to the yoke layer is formed using the resist layer, the thickness of the resist layer can be substantially uniform. When a cut pattern for forming the main pole layer is formed on the resist layer by exposure and development, a resist pool does not occur in the cut pattern as in the related art.
[0159]
Therefore, according to the present invention, the plating underlayer is exposed on one surface of the punching pattern, and the main pole layer having a predetermined shape can be appropriately grown on the plating underlayer by plating.
[0160]
Further, when the front end face of the yoke layer is formed with a gentle inclined surface or a curved surface as described above, the thickness of the resist layer for forming the main pole layer can be formed substantially uniformly, so that the pattern accuracy is improved. Therefore, the main pole layer can be formed with high pattern accuracy, and the front end face of the main pole layer can be formed with a predetermined track width Tw and a predetermined shape.
[0161]
Further, in the present invention, the front end surface of the yoke layer has a gentle slope or a curved surface, so that the magnetic flux is smoothly guided from the yoke layer to the main magnetic pole layer, and the efficiency of passing the magnetic flux is improved. Can be done. That is, according to the present invention, a perpendicular magnetic recording head capable of reducing the magnetic flux leaking from the front end face of the yoke layer, appropriately concentrating the magnetic flux on the main magnetic pole layer, and appropriately coping with future high recording density is manufactured. can do.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view of a magnetic head including a perpendicular magnetic recording head according to a first embodiment of the present invention;
FIG. 2 is a longitudinal sectional view of a magnetic head having a perpendicular magnetic recording head according to a second embodiment of the present invention;
FIG. 3 is a vertical sectional view of a magnetic head including a perpendicular magnetic recording head according to a third embodiment of the present invention;
FIG. 4 is a partial front view of a perpendicular magnetic recording head according to the present invention,
FIG. 5 is another partial front view of the perpendicular magnetic recording head according to the present invention;
FIG. 6 is a plan view of the perpendicular magnetic recording head of FIGS. 1 to 3,
FIG. 7 is another plan view of the perpendicular magnetic recording head of FIGS. 1 to 3;
FIG. 8 is another plan view of the perpendicular magnetic recording head of FIGS. 1 to 3;
FIG. 9 is another plan view of the perpendicular magnetic recording head of FIGS. 1 to 3;
FIG. 10 is an explanatory diagram showing a state in which a skew angle has occurred in a magnetic head according to the present invention;
FIG. 11 is a process diagram showing a method for manufacturing a perpendicular magnetic recording head according to the present invention;
12 is a process drawing performed after the step shown in FIG. 11,
13 is a process chart performed after the step shown in FIG. 12,
14 is a view showing a step performed after the step shown in FIG. 13;
FIG. 15 is a process drawing performed after the step shown in FIG. 14,
FIG. 16 is a process chart performed next to the step shown in FIG. 13 instead of FIG. 14;
17 is a view showing a step performed after the step shown in FIG. 16;
FIG. 18 is a longitudinal sectional view at a stage where a yoke layer is not formed in the steps of FIGS. 15 and 17;
FIG. 19 is a longitudinal sectional view at a stage where a yoke layer is formed in the steps of FIGS. 15 and 17;
FIG. 20 is a process drawing performed after the step shown in FIGS. 15, 17, and 19;
FIG. 21 is a vertical cross-sectional view of the perpendicular magnetic recording head of FIG. 20 taken along line MM.
FIG. 22 is a front view of the perpendicular magnetic recording head shown in FIG. 20;
FIG. 23 is a process drawing performed after the step shown in FIG. 22;
FIG. 24 is a longitudinal sectional view of the perpendicular magnetic recording head at the time of the step of FIG. 23;
FIG. 25 is a view showing a step performed after the steps of FIGS. 23 and 24;
FIG. 26 is a process drawing performed next to the step in FIG. 25;
FIG. 27 is a longitudinal sectional view showing the structure of a conventional perpendicular magnetic recording head.
FIG. 28 is a plan view of FIG. 27;
FIG. 29 is a longitudinal sectional view showing the structure of an improved conventional perpendicular magnetic recording head.
30 is a plan view of FIG. 29,
FIG. 31 is a process chart showing a method for manufacturing the perpendicular magnetic recording head of FIG. 29;
32 is a view showing a step performed after the step shown in FIG. 31;
FIG. 33 is an explanatory view showing a state in which a skew angle has occurred in a conventional magnetic head.
[Explanation of symbols]
H perpendicular magnetic recording head
H1a Opposing surface
M recording medium
Ma hard film
Mb soft film
21 Auxiliary pole layer
24 Main magnetic pole layer
24a, 35a, 40a Front end face
25 Connection layer
27 Coil layer
33 insulating layer
35 Yoke layer
40 Non-magnetic layer
73, 74, 75, 76, 80 resist layer
71, 72 Plating underlayer

Claims (9)

A coil layer for providing a recording magnetic field to the auxiliary magnetic pole layer and the main magnetic pole layer rearward in the height direction from the opposing surface, wherein the auxiliary magnetic pole layer and the main magnetic pole layer are positioned at an interval on a surface facing the recording medium. Is provided, and in a perpendicular magnetic recording head that records magnetic data on the recording medium by a perpendicular magnetic field concentrated on the main magnetic pole layer,
A connection layer rising from the auxiliary pole layer is provided behind the facing surface in the height direction, and the coil layer is wound around the connection layer,
The upper surface of the coil layer is covered with an insulating layer, and the front end surface on the opposite surface side is located rearward in the height direction on the insulating layer, and the front end surface is inclined or curved in the height direction from the lower surface to the upper surface. A plane yoke layer is formed, and a base end of the yoke layer is magnetically connected to the connection layer;
A main pole layer is formed from the insulating layer on the opposing surface to the yoke layer ,
The perpendicular magnetic recording head according to claim 1, wherein a front end surface of the main magnetic pole layer that appears on the opposing surface is formed in a shape in which a width dimension in a track width direction increases from a lower surface to an upper surface . 2. The perpendicular magnetic recording head according to claim 1, wherein the upper surface of the insulating layer and the upper surface of the connection layer are flattened surfaces that are flush with each other. 3. The perpendicular magnetic recording head according to claim 1, wherein both end surfaces of the front end surface of the main magnetic pole layer are formed as inclined surfaces or curved surfaces. The main saturation magnetic flux density of the magnetic pole layer, a perpendicular magnetic recording head according to any one of 3 claims 1 higher than the saturation magnetic flux density of the yoke layer. A cross-sectional area of the yoke layer at a position where the yoke layer and the main magnetic pole layer overlap each other in a direction parallel to the opposing surface is larger than a cross-sectional area of the main magnetic pole layer in a direction parallel to the opposing surface. Item 5. The perpendicular magnetic recording head according to any one of Items 1 to 4 . A method for manufacturing a perpendicular magnetic recording head, comprising the following steps.
(A) forming an auxiliary pole layer with a magnetic material;
(B) forming a connection layer on the auxiliary pole layer behind the surface facing the recording medium in the height direction, and then forming an insulating base layer on the auxiliary pole layer between the facing surface and the connection layer; After forming a coil layer through, a step of filling the coil layer with an insulating layer,
(C) shaving the surface of the insulating layer so that the upper surface of the insulating layer and the upper surface of the connection layer are flush with each other;
(D) forming, on the upper surface of the insulating layer and the upper surface of the connection layer, a plating underlayer in the form of a yoke layer whose front end face is located rearward in the height direction from the opposing surface and extends to above the connection layer;
(E) forming a yoke layer by plating with a magnetic material on the plating base layer, wherein the front end surface of the yoke layer is formed into a sloped surface or a curved surface inclined in the height direction from the lower surface to the upper surface;
(F) forming a plating base layer on the insulating layer and the yoke layer, forming a resist layer on the plating base layer, and then forming the resist layer on the yoke layer from the insulating layer on the facing surface; Forming a punch pattern extending to
At this time, at least the inner width dimension in the track width direction at the opposing surface is formed on the resist layer, wherein the punched pattern extends from the lower surface to the upper surface .
(G) a step of plating a main pole layer with a magnetic material on the plating base layer exposed in the punching pattern, and then removing the resist layer; 7. The method for manufacturing a perpendicular magnetic recording head according to claim 6 , wherein in the step (d), the plating underlayer is formed in the following steps.
(H) forming a plating base layer on the insulating layer upper surface and the connection layer upper surface, and further forming a resist layer on the plating base layer;
(I) removing a remaining resist layer, leaving a yoke layer-shaped resist layer whose front end face is located rearward in the height direction from the opposing surface and extends to above the connection layer;
(J) removing the resist layer after removing the plating base layer not covered by the resist layer; 7. The method for manufacturing a perpendicular magnetic recording head according to claim 6 , wherein in the step (d), the plating underlayer is formed in the following steps.
(K) A resist layer is formed on the upper surface of the insulating layer and the upper surface of the connection layer, and further, the front end surface of the resist layer is located rearward in the height direction from the opposing surface and extends to the upper side of the connection layer. Forming a pattern on the resist layer,
(L) a step of removing the resist layer after forming a plating base layer by sputtering in the blanking pattern; Wherein (g) at step method of manufacturing a perpendicular magnetic recording head according to any one of claims 6 to 8 further remove the plating base layer formed on the other below the main magnetic pole layer.

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