JP2014238376A - Measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a three-dimensional measuring device with a portal structure that can suppress an ABBE error accompanying attitude change in position relation of a measuring linear encoder and read a coordinate position of a gauge head with high precision.SOLUTION: A measuring device includes: a first carriage 12 which can move in a first axial direction along guides 14A-14D of a base 14; a second carriage 18 which can move in a second axial direction along guides for movement in the second axial direction; an auxiliary carriage 60 which can move in the first axial direction along the guides 14A-14D of the base 14; a first driving mechanism 40 which moves the auxiliary carriage 60 in the first axial direction; and a plurality of first transmission means of transmitting driving force for movement in the first axial direction by engaging the first carriage 12 with the auxiliary carriage 60. The plurality of first transmission means are arranged across the range of movement of the center of gravity of a first moving body which moves in the first axial direction, including the first and second carriages 12, 18, accompanying movement of the first and second carriages.

Description

  The present invention relates to a measuring apparatus, and in particular, a three-axis drive stage including a Y-shaped carriage that can move in the Y-axis direction, an X carriage that moves in the X-axis direction, and a Z carriage that moves in the Z-axis direction. It relates to a three-dimensional measuring apparatus having

  Generally, a three-axis driving stage of a three-dimensional measuring machine having a portal structure includes a base for mounting a workpiece, a Y carriage, an X carriage, and a Z carriage. The Y carriage has a portal structure in which the upper ends of a pair of legs are connected by an X guide. And the air bearing guide arrange | positioned at the both sides of a base supports the lower end of a pair of leg part of Y carriage so that a movement to a Y-axis direction is possible. The X carriage is supported by the X guide connecting the upper end of the Y carriage so as to be movable in the X-axis direction via the air guide. The X carriage supports the Z carriage via an air guide so as to be movable in the Z-axis direction. A measuring element for measuring an object to be measured is provided at the lower end of the Z carriage, and is movable in the three axial directions of the X axis, the Y axis, and the Z axis.

  Here, in order to read the position coordinates of the probe in the X-axis direction, a linear encoder for X-coordinate measurement is arranged in the X guide. In order to read position coordinates in the Y-axis direction, a Y-coordinate measuring linear encoder is disposed in the vicinity of the lower end of one leg of the Y carriage. Furthermore, in order to read the position coordinate in the Z-axis direction, a linear encoder for measuring the Z coordinate is arranged on the Z carriage. The drive mechanism for moving the Y carriage in the Y direction is provided at the lower end of the leg on the side where the linear encoder for Y coordinate measurement is arranged, and by moving one leg with this drive mechanism The entire Y-carriage having the portal structure is moved in the Y-axis direction.

  When the Y carriage of the above-described general portal-type three-dimensional measuring machine is moved in the Y-axis direction, a moment around the Z-axis is generated in the Y carriage due to driving force and inertial force. That is, one leg portion provided with the drive mechanism first moves in the Y-axis direction, and then the other leg portion moves in the Y-axis direction with a delay. Furthermore, since the drive mechanism for moving the Y carriage in the Y-axis direction is provided at the lower end of one leg, a moment about the X-axis is generated in the Y carriage. That is, the lower end of the leg portion of the Y carriage moves in the Y-axis direction first, and the upper end of the Y carriage moves in the Y-axis direction with a delay. Due to these moments, when the Y-axis coordinate position of the probe is read by the Y-axis linear encoder, an ABBE error accompanying a change in the posture of the Y carriage occurs at the Y-coordinate position of the probe.

  In order to eliminate this error, Patent Document 1 discloses a gate in which a center-of-gravity tracking block that follows the movement of the center of gravity in the X-axis direction of the Y-axis direction moving body accompanying the movement of the X carriage is disposed in the vicinity of the X guide. A three-dimensional measuring machine having a mold structure is disclosed. Since the center-of-gravity tracking block is disposed between the drive carriage, which is the drive means for the Y-axis moving body, and the Y carriage, the drive carriage gives to move the Y-axis moving body in the Y-axis direction. Force is always applied to the Y carriage via the center of gravity tracking block. Thereby, the Y-axis direction moving body can move in the Y-axis direction with the moment around the Z-axis being suppressed. In addition, since the center-of-gravity tracking block is disposed in the vicinity of the X guide, a driving force is applied to a place near the center of gravity in the Z-axis direction. As a result, the Y-axis direction moving body can move in the Y-axis direction with a small moment around the X-axis generated in the Y carriage. Therefore, the ABBE error accompanying the change in the posture of the Y carriage is suppressed at the Y coordinate position of the probe, and the Y coordinate position of the probe can be read with high accuracy.

Japanese Patent Laid-Open No. 7-139936

  However, although the center of gravity tracking block is arranged in the vicinity of the X guide in the three-dimensional measuring machine of Patent Document 1, the center of gravity in the Z-axis direction of the Y-axis direction moving body of a general portal-type three-dimensional measuring machine. Is not necessarily in the vicinity of the X guide. For example, in the case of a three-dimensional measuring instrument having a short movable range in the X-axis direction and a long movable range in the Z direction, the pair of legs of the Y carriage is long with respect to the X guide, so the weight of the legs of the Y carriage Becomes larger. For this reason, since the weight of the Y carriage is heavier than that of the X-axis direction moving body, the center of gravity in this case is lower than the position where the X guide is located, and the center of gravity is low. It is difficult to match the center of gravity tracking block to the center of gravity for such a low center of gravity three-dimensional measuring machine. That is, the center of gravity tracking block itself, a driving mechanism such as a guide rail for driving the center of gravity tracking block, and the like must be arranged in the space between the pair of legs of the Y carriage and the X guide. The dimension measuring machine becomes large and the cost is high. Furthermore, since the scanning range of the probe is narrowed, only a small measurement object can be measured for the size of the three-dimensional measuring machine. When moving the center of gravity in the Z-axis direction to the same height as the X guide, such as by placing a heavy object above the Y-axis direction moving body, the scanning range of the probe cannot be narrowed even with the arrangement as in Patent Document 1. However, as the weight of the Y-axis direction moving body increases, the control performance of the Y-direction moving body decreases.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a three-dimensional measuring machine capable of measuring with high accuracy by suppressing a moment when a workpiece is measured by moving a Y carriage, an X carriage, and a Z carriage.

  An aspect of the present invention is a measuring apparatus having a base having a guide for moving in the first axial direction and a guide for moving in the second axial direction orthogonal to the first axial direction. A first carriage movable in the first axial direction along the guide of the base, and a second carriage movable in the second axial direction along the guide for moving in the second axial direction. A carriage, an auxiliary carriage movable in the first axial direction along the guide of the base, a first drive mechanism for moving the auxiliary carriage in the first axial direction, and the first carriage and the auxiliary carriage. And a plurality of first transmission means for transmitting a driving force for engaging and moving in the first axial direction, wherein the plurality of first transmission means are the first and second carriages. The first movement that moves in the first axial direction including the first and second carriages accompanying the movement Disposed of so as to sandwich the moving range of the center of gravity, out of the plurality of first transmission means, the driving force of at least one transmission means is controllable. A measuring device.

  ADVANTAGE OF THE INVENTION According to this invention, the three-dimensional measuring machine which suppresses the moment at the time of measuring a to-be-measured object by moving a Y carriage, an X carriage, and a Z carriage can be provided.

It is a perspective view of the three-dimensional measuring machine which concerns on one Embodiment of this invention. It is a top view of the three-dimensional measuring machine which concerns on one Embodiment of this invention. It is a rear view of the three-dimensional measuring machine which concerns on one Embodiment of this invention. It is sectional drawing of A-A 'of FIG. It is the schematic which shows the XY control system which concerns on one Embodiment of this invention.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings.

  First, the three-dimensional measuring machine 10 according to the present embodiment will be described. FIG. 1 is a perspective view of a three-dimensional measuring machine 10 according to the present embodiment, FIG. 2 is a plan view of the three-dimensional measuring machine 10, and FIG. 3 is a rear view of the three-dimensional measuring machine 10. FIG. 4 is a cross-sectional view taken along the line AA ′ in FIG. The three-dimensional measuring machine 10 includes a base 14, a Y carriage 12, an X carriage 18, a Z carriage 22, and a probe 24. In the drawing, the direction in which the Y carriage 12 moves is defined as the Y axis direction, the direction in which the X carriage 18 moves is defined as the X axis direction, and the direction in which the Z carriage 22 moves is defined as the Z axis.

  The base 14 is used to place a workpiece (not shown), which is an object to be measured, when measuring, and guide surfaces 14A, 14B, 14C, and 14D for moving the Y carriage 12 are arranged on both sides. . The Y carriage (first carriage) 12 moves in the Y axis direction (first axis direction) along the guide surfaces 14A, 14B, 14C, and 14D.

  The Y carriage 12 is configured in a portal structure with a pair of leg portions 12A (one leg portion) and 12B (the other leg portion) and an X guide 12C connecting the upper ends of the leg portions 12A and 12B. ing. The legs 12A and 12B are supported by the air pads 31A, 31B, 31C, and 31D facing each other along the guide surfaces 14A, 14B, 14C, and 14D so as to be movable in the Y-axis direction. An X carriage (second carriage) 18 is supported on the X guide 12C at the top of the portal structure so as to be movable in the X axis direction (second axis direction) along the X guide 12C.

  The X carriage 18 moves an X slider 18A for moving the X carriage 18 along the X guide 12C in the X axis direction, and a Z carriage (third carriage) 22 in the Z axis direction (third axis direction). And a Z guide 18B for making it possible. Further, the X carriage 18 includes a driving mechanism in the Z-axis direction and a measuring instrument such as a linear encoder for measuring position coordinates.

  A measuring element 24 is provided at the lower end of the Z carriage 22. Then, the three-dimensional measuring machine 10 moves the measuring element 24 in three directions of the X, Y, and Z axes, and detects the measurement point of a workpiece (not shown) placed on the base 14 to detect the workpiece shape. Measure etc.

  The three-dimensional measuring machine 10 includes a drive carriage (auxiliary carriage) 60. The driving carriage 60 has a portal structure in which the outer sides of the pair of leg portions 12A and 12B of the Y carriage 12 are surrounded like outer shells and are connected by X guides 12C. The drive carriage 60 is connected to the Y carriage via the first drive force transmission means 41 and the second drive force transmission means 42. The drive carriage 60 shares the same guide surfaces 14A, 14B, 14C, and 14D as the Y carriage, and moves in the Y-axis direction along the guide surfaces 14A, 14B, 14C, and 14D.

  The first driving force transmission means 41 includes a sphere 41A fixed to the leg portion 12A of the Y carriage 12 and a block 41B fixed to the driving carriage 60. Note that the sphere 41A is rotatably fitted in the recess of the block 41B. The second driving force transmission means 42 includes a voice coil motor mover 42 A fixed to the leg 12 B of the Y carriage 12 and a voice coil motor stator 42 B fixed to the drive carriage 60.

  A drive mechanism 40 is disposed at the lower end of the drive carriage 60 on the leg 12 </ b> A side of the Y carriage 12. The drive mechanism (first drive mechanism) 40 includes a shaft-type linear motor mover 40B fixed to the drive carriage 60, a stator 40C arranged parallel to the Y-axis direction, and both ends of the stator as bases. 14 is provided with fixing portions 40A and 40D. Further, a cable (not shown) connected to the mover 40B is provided. Further, on both side surfaces of the base 14, in order to measure the position of the Y-axis direction moving body (first moving body), a linear encoder 16A (first position detecting means) and 17A (second position detecting means) is fixed. A sensor 16B for reading the coordinates of 16A is fixed to the lower end of the leg portion 12A of the Y carriage, and a sensor 17B for reading the coordinates of 17A is fixed to the lower end of the leg portion 12B of the Y carriage. The Y-axis direction moving body is a general term for all moving bodies that move in the Y-axis direction, including the X carriage 18, the Y carriage 12, the Z carriage 22, and the measuring element 24. The X-axis direction moving body (second moving body) is a general term for all moving bodies that move in the X-axis direction, including the X carriage 18, the Z carriage 22, and the measuring element 24. Further, the Z-axis direction moving body (third moving body) is a general term for all moving bodies that move in the Z-axis direction, including the Z carriage 22 and the measuring element 24.

  Here, the center-of-gravity position in the Z-axis direction of the center of gravity of the Y-axis direction moving body changes as the Z carriage 22 moves. The first driving force transmission means 41 and the second driving force transmission means 42 are used for the movement range of the center of gravity position in the Z-axis direction of the Y-axis moving body when the Z carriage 22 is moved from the upper end to the lower end of the movement range. It is fixed so that it is located at the center (near the center).

  A drive mechanism (second drive mechanism) 50 for moving the Z carriage in the X-axis direction is disposed near the upper end of the drive carriage 60. The drive mechanism 50 includes a drive motor 50A as a drive source, a ball screw shaft 50C arranged parallel to the X-axis direction, a nut (second transmission means) 50D as a mover, and both ends of the ball screw shaft 50C. Bearings 50B and 50E that are fixed to the drive carriage 60 are provided. The drive motor 50A is connected to the end of the Y carriage 12 on the leg 12A side on the same axis as the ball screw shaft 50C. This is because a measurement error may occur due to the driving reaction force when moving the X-axis direction moving body. That is, the lower end of the leg portion of the Y carriage is supported so as to be movable in the Y axis direction, but the movement is constrained in the X axis direction. Transforms into When the reaction force for driving the X-axis direction moving body is transmitted to the Y carriage, the X-axis linear encoder disposed on the X guide at the top of the Y carriage is displaced from the position of the base, resulting in a measurement error. . Therefore, in order to reduce this measurement error, the above configuration is adopted.

  Here, among the centroids of the X-axis direction moving body, the centroid position in the Z-axis direction changes as the Z carriage 22 moves. The nut member 50D is fixed to the X carriage 18 so that the nut member 50D is positioned approximately at the center of the movement range of the center of gravity in the Z-axis direction of the X-axis moving body when the Z carriage 22 is moved from the upper end to the lower end of the movement range. ing. Further, the position of the nut member 50D also coincides with the position of the center of gravity in the X-axis direction and the Y-axis direction of the X-axis direction moving body.

  A linear encoder (not shown) is fixed to the X guide 12C in parallel with the X-axis direction on the lower surface of the X guide 12C connecting the upper end of the Y carriage 12. A sensor (not shown) that reads the coordinates of the linear encoder is fixed to the X carriage 18.

  Next, an XY control system 300 for moving the pair of leg portions 12A and 12B of the Y carriage 12 evenly in the movement of the Y-axis direction moving body in the Y-axis direction will be described with reference to FIG.

  First, the target value calculation unit 301 has a target value matrix Tin = (Xin, Yin, 0) composed of target values Xin, Yin of the X and Y coordinates of the measuring element 24 and a rotation amount θin = 0 around the Z axis. Is output. Then, the probe coordinate calculation unit 310 outputs a current value matrix Tout. Tout is composed of the current value Xout and Yout of the X and Y coordinates of the output measuring element 24 and the current value θout of the rotation amount θ around the Z axis, and Tout = (Xout, Yout, θout). Next, the subtracter 302 subtracts Tout from Tin, and the subtraction value is input to the PID compensator 303. The output value from the PID compensator 303 is input to the drive transmission force calculation unit 304. The drive transmission force calculation unit 304 is a non-interacting matrix, and three control values UX, UYc, and UYr corresponding to the input values are obtained. Output.

  The control value UX is input to the drive mechanism 50, and the drive motor 50A is driven by the control value UX. When the drive motor 50A is driven, a transmission force FX in the X-axis direction is generated between the drive carriage 60 and the X carriage 18, and the X-axis direction moving body moves in the X-axis direction.

  The control value UYc is input to the drive mechanism 40, and the mover 40B is driven by the control value UYc. When the mover 40B is driven, a force in the Y-axis direction is generated between the base 14 and the drive carriage 60. The force generated between the base 14 and the drive carriage 60 is distributed by the first and second drive transmission means 41 and 42 (a plurality of first transmission means) and is transmitted from the drive transmission means 41 in the Y-axis direction. A force FYl is generated and transmitted to the legs 12A of the engaged Y carriage 12.

  The control value UYr is input to the second driving force transmission means 42 provided between the leg 12B of the Y carriage 12 and the driving carriage 60. The mover 42A of the voice coil motor is driven by the control value UYr and the force generated between the distributed base 14 and the drive carriage 60. When the mover 42A of the voice coil motor is driven, a transmission force FYr in the Y-axis direction is generated between the drive carriage 60 and the Y carriage 12. Then, the transmission force FYr in the Y-axis direction is transmitted to the leg portion 12B of the Y carriage 12. Then, the Y-axis direction moving body moves in the Y-axis direction by the transmission forces FYl and FYr in the Y-axis direction.

  The amount of movement of the X-axis direction moving body is read by a sensor (not shown) of a linear encoder installed on the lower surface of the X guide 12C in parallel with the X-axis direction, and a value Xout is output. The amount of movement of the Y-axis direction moving body is read by linear encoder sensors 16B and 17B installed on the pair of legs 12A and 12B of the Y carriage 12, and values Ylout and Yrout are output.

  The values Xout, Ylout, and Yrout are input to the probe coordinate calculation unit 310. The stylus coordinate calculation unit 310 determines the position and orientation of the stylus 24 based on various dimensional information of the moving body in the Y-axis direction such as the length of the X guide 12C and the reading values Xout, Ylout, Yrout of the three sensors. The matrix Tout = (Xout, Yout, θout) is calculated.

  With the control values UX, UYc, UYr having the X coordinate input value (Xin−Xout) of the probe 24 as an input value, the probe 24 only moves in the X axis direction, and moves around the Y axis and the Z axis. There is no rotation. With the control values UX, UYc, UYr having the input value (Yin-Yout) of the Y coordinate of the probe 24 as an input value, the probe 24 only moves in the Y axis direction, and moves around the X axis and the Z axis. There is no rotation. With the control amounts UX, UYc, UYr whose input value is the θ coordinate input value (0−θout) of the probe 24, the probe 24 only moves in the θ direction and moves in the X axis direction and the Y axis direction. Does not occur.

  With the above configuration, the XY control system 300 forms a closed feedback loop. The transmission force FYl of the first drive transmission means 41 and the transmission force FYr of the second drive transmission means 42 are generated so that the rotation amount θin = 0 around the Z axis of the contactor 24 is generated. Even if the direction moving body is driven in the Y-axis direction, no moment around the Z-axis is generated in the Y-axis direction moving body. That is, when the Y carriage moves in the Y-axis direction, the pair of leg portions 12A and 12B move evenly.

  The drive carriage 60 has a portal structure in which a pair of legs 12A and 12B of the Y carriage 12 are surrounded like an outer shell and connected by an X guide 12C. With this structure, the first and second drive transmission means 41 and 42 are provided on the respective leg portions 12A and 12B below the X guide 12C of the Y carriage 12 so as to sandwich the center of gravity of the Y-axis moving body. It becomes possible, and the height to be arranged in the Z-axis direction can be freely selected. Here, sandwiching the center of gravity of the Y-axis moving body means that the center of gravity of the Y-axis moving body is moved by moving each carriage in the Y-axis moving body, and the range of movement of the center of gravity is defined as the first and second. In this state, the drive transmission means 41 and 42 are sandwiched. That is, the drive transmission means may be arranged so that the range of movement of the center of gravity of the Y-axis moving body when each carriage in the Y-axis driving body moves is within the range passing through the first and second drive transmission means. Even if the position of the center of gravity in the Z direction of the moving body in the Y direction is lower than that of the X guide 12C, the driving force is applied so that a moment around the X axis does not occur by arranging the driving force transmitting means at the height. It is possible to make it.

  Further, the first driving force transmission means 41 and the second driving force transmission means 42 change the center of gravity position in the Z-axis direction of the Y-axis direction moving body when the Z carriage 22 is moved from the upper end to the lower end of the movement range. It is arranged at almost the center height of the range. Therefore, even when there is a movement of the center of gravity in the Z-axis direction, the generated moment around the X-axis can be minimized.

  In this embodiment, the scanning range of the probe 24 is not narrowed by arranging an extra drive mechanism that moves the center of gravity position in the Z-axis direction of the Y-axis direction moving body. That is, it is not necessary to move the center of gravity position in the Z-axis direction to the same height as the X guide 18 by placing a heavy object on the Y-axis direction moving body. There is no need to consider a decrease in the control performance of the Y-axis direction moving body.

  Further, since the bearings 50B and 50E of the driving mechanism 50 that transmits the driving force in the X-axis direction to the X carriage 18 are fixed to the driving carriage 60, the driving reaction force when moving the X carriage 18 is transmitted to the driving carriage 60. , Not transmitted to the Y carriage 12. Accordingly, the Y carriage 12 is not deformed in the X-axis direction by the driving reaction force when the X carriage 18 is moved.

  Further, since the mounting position of the nut member 50D in the Z-axis direction is set to the position of the center of gravity of the X-axis direction moving body, the moment generated in the X-axis direction moving body is kept small, and the X-axis direction moving body moves in the X-axis direction. Rotation around the Y axis and the X axis at the time can be suppressed.

  With these effects, the ABBE error due to the positional change of the positional relationship of the measurement linear encoders provided in the X carriage, the Y carriage, and the Z carriage can be suppressed small, and the coordinate position of the probe can be read with higher accuracy. .

  As described above, according to the present embodiment, it is possible to minimize the generation of moment of each axis when driving the three-dimensional measuring machine, and it is possible to measure the workpiece with high accuracy.

  Further, according to the present embodiment, the drive carriage 60 has a portal structure in which the pair of leg portions 12A and 12B of the Y carriage 12 is surrounded like an outer shell and connected along the X guide 12C. Therefore, an extra installation area for the drive carriage 60 is not required. Therefore, the installation space of the three-dimensional measuring machine 10 is kept small, and does not hinder the work loading from the back of the base 14 or the work measurement.

  In this embodiment, a shaft type linear motor is used for the drive mechanism 40 of the Y carriage 12. However, the present invention is not limited to this, and other methods such as other types of linear motor, ball screw drive, friction drive, etc. are used. May be. Furthermore, in this embodiment, the ball screw drive is used for the movement of the X carriage 18. However, the present invention is not limited to this, and other methods such as a linear motor and a friction drive may be used.

  Further, although two linear encoders 16A and 17A and sensors 16B and 17B for reading the coordinate position are used at the lower ends of the leg portions 12A and 12B of the Y carriage 12, means for measuring the rotation of the Y carriage around the Z axis. There are many possible ways. For example, a gyroscope and an accelerometer may be substituted for the linear encoder 17A and the sensor 17B of the leg portion 12B of the Y carriage 12. Further, the moment around the Z axis of the Y carriage 12 is predicted based on the drive motion applied to the X carriage 18 and the Y carriage 12 without measurement, and the control amount to the drive transmission means is calculated using this predicted value. May be.

  Various combinations of driving force transmission methods from the driving carriage 60 to the Y carriage 12 are conceivable. In this embodiment, the first driving force transmission unit 41 is used as the first driving force transmission unit, and the second driving force transmission unit 42 is used as the second driving force transmission unit. The reverse may be possible. That is, the mover 42A and the stator 42B of the voice coil motor may be located on the leg 12A side of the Y carriage 12, and the sphere 41A and the block 41B may be located on the leg 12B side of the Y carriage 12. Furthermore, the second driving force transmission means 42 may be used as both the first driving force transmission means and the second driving force transmission means. The driving source 40 may be disposed also at the lower end of the leg portion 12B of the Y carriage 12, and the driving force transmitting means 41 may be used as both the first driving force transmitting means and the second driving force transmitting means. Not only the above method but also a combination of two or more driving force transmission means may be used. Further, although the first and second driving force transmission means 41 and 42 are controlled as the driving force transmission means, it may be a method in which one of them can be controlled and the other is not controlled.

  In this embodiment, as a means for driving the drive carriage 60 in the Y-axis direction, the drive mechanism 40 is disposed on the base 14 on the leg 12A side of the Y carriage 12, and this drive mechanism 40 is arranged in the Y-axis direction. On the other hand, you may arrange | position in the position on the opposite side symmetrical. In other words, the Y carriage 12 may be disposed on the leg 12B side. Moreover, you may arrange | position not only one side of the base 14, but both sides. Furthermore, a drive mechanism may be disposed on or under the base 14 separately from the base 14, or a square groove may be provided above or below the base 14. In addition, although an air guide or the like is used as a guide for each carriage, a mechanical guide such as a rolling bearing may be used.

  In the present embodiment, the case where the present invention is applied to a three-dimensional measuring machine has been described. However, the present invention is not limited to this, and if there is a carriage configured in a gate shape, two-dimensional or three-dimensional or more multidimensional measurement is possible. You may apply to the machine. Moreover, you may apply not only to a measuring machine but to portal type stages, such as a machine tool.

  As mentioned above, although preferable embodiment of this invention was described, this invention is not limited to these embodiment, A various deformation | transformation and change are possible within the range of the summary.

DESCRIPTION OF SYMBOLS 10 3D measuring machine 12 Y carriage 12C X guide 14 Base 14A-14D Guide surface 18 X carriage 60 Drive carriage 41 1st drive force transmission means 42 2nd drive force transmission means 40 Drive mechanism

Claims (11)

A base having a guide for moving in the first axial direction;
A first carriage having a guide for moving in a second axial direction orthogonal to the first axial direction, and movable in the first axial direction along the guide of the base;
A second carriage movable in the second axial direction along a guide for moving in the second axial direction;
An auxiliary carriage movable in the first axial direction along the guide of the base;
A first drive mechanism for moving the auxiliary carriage in the first axial direction;
A plurality of first transmission means for engaging the first carriage and the auxiliary carriage and transmitting a driving force for moving in the first axial direction;
With
The plurality of first transmission means move the center of gravity of the first moving body that moves in the first axial direction including the first and second carriages as the first and second carriages move. It is arranged so as to sandwich the range,
The measuring apparatus characterized in that the driving force of at least one of the plurality of first transmission means is controllable.
First position detecting means for detecting a first position of the first carriage;
Second position detecting means for detecting a second position of the first carriage;
Control means for controlling the driving force of the first transmission means;
Further comprising
The control means drives the first transmission means based on the first and second positions of the legs of the first carriage detected by the first and second position detection means. The measuring apparatus according to claim 1, wherein the force is controlled.
The first moving body is:
A third carriage movable in a third axial direction orthogonal to each of the first axial direction and the second axial direction;
A probe attached to the third carriage;
Further comprising
The plurality of first transmission means is configured to move the second moving body including the second and third carriages and the measuring element within a range movable in the second axial direction. The measuring apparatus according to claim 1, wherein the measuring apparatus is disposed so as to sandwich a range in which the center of gravity of the movable body moves.
The position of the plurality of first transmission means in the third axial direction is a third movement of the first moving body that moves in the third axial direction including the third carriage and the measuring element. The measuring apparatus according to claim 3, wherein the measuring apparatus is located in the vicinity of the center of the third axial movement range of the body.
The measuring apparatus according to claim 1, wherein the auxiliary carriage includes a second drive mechanism for moving the second carriage in the second axial direction.
The position of the second transmission means in the third axial direction is located in the vicinity of the center of the moving range of the third moving body in the third axial direction of the second moving body. The measuring apparatus according to claim 5.
7. The auxiliary carriage has a portal structure that surrounds an outer side of a leg portion of the first carriage and is connected by a guide for moving in the second axial direction. The measuring device according to claim 1.
The measurement apparatus according to claim 1, wherein the guide of the base is shared by the first carriage and the auxiliary carriage.
A base having a guide for moving in the first axial direction;
A guide for moving in the second axial direction; and a first carriage having leg portions provided on both sides of the guide and movable in the first axial direction along the guide of the base ,
A second carriage having a guide for moving in the third axial direction and movable in the second axial direction along the guide of the first carriage;
A third carriage having a probe and movable in the third axial direction along a guide of the second carriage;
An auxiliary carriage movable in the first axial direction along the guide of the base;
A drive mechanism for moving the auxiliary carriage in the first axial direction;
A plurality of transmission means for engaging each of the leg portions provided on both sides of the guide with the auxiliary carriage and transmitting a driving force for moving in the first axial direction;
A three-dimensional measuring apparatus comprising:
The three-dimensional measuring apparatus according to claim 9, wherein the plurality of transmission units are provided below the guide of the first carriage.
The three-dimensional measurement apparatus according to claim 9, wherein a driving force of at least one of the plurality of transmission units is controllable.

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