JP2013148472A - Pressure sensor and robot hand - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pressure sensor capable of enhancing strength to applied force by using an actuator including an electrolyte, and a robot hand.SOLUTION: A pressure sensor includes a plurality of first actuators 10 respectively arranged so as to extend in a first direction, and a plurality of second actuators 20 respectively arranged so as to extend in a second direction crossing the first direction. Each of the plurality of first actuators 10 and the plurality of second actuators 20 includes an electrolyte film, a first electrode provided on a first surface of the electrolyte film, and a second electrode provided on a second surface facing the first surface of the electrolyte film, and the plurality of first actuators 10 and the plurality of second actuators 20 cross each other so as to form a sheet-shaped (cloth-shaped) structure like a textile.

Description

  Some embodiments according to the present invention relate to a pressure sensor and a pressure measurement device using an actuator including an electrolyte.

  Conventionally, a polymer actuator is known as one of such actuators. This polymer actuator is a soft material such as rubber, but has a characteristic that it bends when voltage is applied and returns to its original state when voltage application is stopped. For example, electrodes are formed on both sides of the ion exchange membrane, and a potential difference is applied to the ion exchange membrane to cause deformation of the ion exchange membrane. Examples of such polymer electrolyte membrane type actuators are described in Japanese Patent Application Laid-Open Nos. H4-275078 and H11-169393.

Japanese Patent Laid-Open No. 4-275078 JP 11-169393 A

  By the way, in the actuator having the electrolyte membrane as described above, when a force (external stress) is applied to the electrolyte membrane from the outside, a potential difference (voltage) is generated in the electrolyte membrane. The generated voltage is related to the curvature (bending / adjusting) of the electrolyte membrane. By detecting this voltage with the electrodes on both sides of the electrolyte membrane, the actuator having the electrolyte membrane can be used as a pressure sensor for detecting the applied force (pressure).

  However, since this actuator has low mechanical strength against the applied force (hereinafter simply referred to as strength), when the installed member moves or bends when it is used as a pressure sensor, the actuator will slip or drop off. There was a problem that it was.

  Some aspects of the present invention have been made in view of the above-described problems. It is an object of the present invention to provide a pressure sensor and a robot hand that can increase strength against an applied force using an actuator including an electrolyte. One.

  The pressure sensor according to the present invention includes a plurality of first actuators arranged to extend in a first direction and a plurality of first actuators arranged to extend in a second direction intersecting with the first direction. Each of the plurality of first actuators and the plurality of second actuators includes a layer containing an electrolyte, a first electrode provided on a first surface of the layer, and A second electrode provided on a second surface opposite to the first surface, wherein a first actuator of the plurality of first actuators is a first electrode in the first actuator. One of the first electrode and the second electrode and one of the first electrode and the second electrode in one second actuator of the plurality of second actuators. Crossing under the second actuator so that the first layer of the first actuator and the first layer of the first second actuator are stacked, The other of the first electrode and the second electrode of the first actuator and the other of the first electrode and the second electrode of the other second actuator of the plurality of second actuators. The first layer of the first actuator and the second layer of the second actuator are stacked so as to cross over the second actuator. The second actuator of the second actuator includes the other one of the first electrode and the second electrode of the one second actuator and the other first actuator of the plurality of first actuators. The aforementioned layers of the one second actuator and the aforementioned other layers of the other first actuators are stacked via the other of the first electrode and the second electrode in the rotor. Cross under the other first actuator described above.

  According to such a configuration, one first actuator of the plurality of first actuators includes one of the first electrode and the second electrode of the one first actuator and the plurality of second actuators. The first layer of the first actuator and the first layer of the second actuator via one of the first electrode and the second electrode of the second actuator of the one of the actuators. Of the first electrode and the second electrode of the one first actuator and a plurality of second electrodes so as to cross the layers under the one second actuator. The first actuator via the first electrode and the other of the second electrodes in the other second actuator of the actuators As described above the layers and the aforementioned layers of the other of the second actuator of the aforementioned terpolymer are stacked, crossing over the other second actuator described above. In addition, the first second actuator that intersects the first first actuator includes the first electrode and the second electrode of the second actuator, and a plurality of second actuators. The first layer of the one second actuator and the other first actuator of the second actuator via the other of the first electrode and the second electrode of the other first actuator of the one actuator Crosses under the other first actuators so that the aforementioned layers are stacked. Thereby, it becomes possible to form a sheet-like (cloth-like) structure such as a woven fabric, and the strength against applied force (stress) is increased. Therefore, the strength against the applied force can be increased by using the first actuator and the second actuator having the layer containing the electrolyte.

  In addition, each of the plurality of first actuators is disposed so as to extend in the first direction, and each of the plurality of second actuators is disposed so as to extend in the second direction intersecting with the first direction. By forming a sheet-like (cloth-like) structure such as a woven fabric, the first actuator and the second actuator, which are pressure detection elements, are arranged in a two-dimensional predetermined region. Therefore, when a two-dimensional pressure having a predetermined spread is applied to the pressure sensor 100, a distribution (pressure distribution) with respect to the two-dimensional pressure can be obtained. Further, the pressure distribution obtained in this way can be used to obtain information such as slippage between the object to which a two-dimensional pressure is applied and the hardness and weight of the object.

  Furthermore, the first actuator and the second actuator having a layer containing an electrolyte are lightweight, have elasticity (elasticity), have excellent adhesion, are easily processed, and vibrate during operation (operation). In addition, there is a characteristic that a voltage (potential difference) is generated immediately when pressure is applied, a signal (voltage) is output as long as the pressure continues, and output of the signal (voltage) is stopped when the pressure is removed. Therefore, the pressure sensor of the present invention including a plurality of first actuators and a plurality of second actuators can be suitably applied to applications that require at least one of these features.

  Preferably, a potential difference between the above-described layer of the first actuator and the above-mentioned layer of the second actuator to be stacked is detected at a position where the plurality of first actuators and the plurality of second actuators intersect each other.

  According to this configuration, the layer including the electrolyte of the first actuator and the layer including the electrolyte of the second actuator that are stacked at positions where the plurality of first actuators and the plurality of second actuators intersect each other. A potential difference (voltage) is detected. As a result, it is possible to obtain a voltage at a level higher than the voltage generated in the actuator having a layer containing one electrolyte as a detection signal (pressure detection signal) for the applied pressure. Therefore, the level of the detection signal with respect to the applied pressure can be increased by using the first actuator and the second actuator having the layer containing the electrolyte, and the detection sensitivity with respect to the pressure can be increased.

  Preferably, in the plurality of first actuators and the plurality of second actuators, the one first actuator described above and the other first actuator described above are adjacent to each other, and the one second actuator described above is the same as the one described above. It arrange | positions so that other 2nd actuators may adjoin.

  According to such a configuration, the plurality of first actuators and the plurality of second actuators are such that the one first actuator described above and the other first actuator described above are adjacent to each other, The actuator and the other second actuator described above are arranged adjacent to each other. Thereby, in the sheet-like (cloth-like) structure formed by the plurality of first actuators and the plurality of second actuators, the strength against applied force (stress) can be further increased.

  Preferably, the first actuator of one of the plurality of first actuators and the other first actuator of the plurality of first actuators are arranged to extend in a first direction. A first member.

  According to this configuration, the first member is between the first actuator of one of the plurality of first actuators and the other first actuator of the plurality of first actuators. It arrange | positions so that it may extend in the direction of. Thereby, in the sheet-like (cloth-like) structure formed by the plurality of first actuators and the plurality of second actuators, the strength in the first direction can be reinforced by the first member. The strength against the applied force (stress) can be further increased.

  Preferably, it is arranged to extend in the second direction between one second actuator of the plurality of second actuators and another second actuator of the plurality of second actuators. A second member.

  According to such a configuration, the second member is disposed between the second actuator of one of the plurality of second actuators and the other second actuator of the plurality of second actuators. It arrange | positions so that it may extend in the direction of. Thereby, in the sheet-like (cloth-like) structure formed by the plurality of first actuators and the plurality of second actuators, it is possible to compensate the strength in the second direction by the second member, The strength against applied force (stress) can be further increased.

  The robot hand according to the present invention includes the pressure sensor described above.

  According to this configuration, the pressure sensor according to the present invention described above is provided. As a result, the pressure sensor according to the present invention can increase the strength against the applied force, so that a robot hand in which the pressure detection position (detection location) moves or bends can be easily realized (configured). it can.

  Here, when the robot hand grasps the object, a two-dimensional pressure having a predetermined spread is applied from the object to the robot hand, so the pressure sensor provided in the robot hand has a pressure distribution with respect to the two-dimensional pressure. Can be obtained. In addition, by using the pressure distribution thus obtained, it is possible to realize a robot hand that detects information such as slip (displacement) between the object to be grasped and the hardness and weight of the object.

  In general, the tactile sensor of a robot hand is lightweight, elastic (elastic), excellent in adhesion, easy to process, no vibration during operation (operation), and responds immediately when pressure is applied. It is preferable to have a feature that a signal is generated, a signal is output as long as the pressure continues, and the output of the signal stops when the pressure is removed. Since each of the plurality of first actuators and the plurality of second actuators included in the pressure sensor according to the present invention has these characteristics, a robot hand having an ideal (optimum) tactile sensor is realized (configuration). can do.

It is a top view explaining an example of the pressure sensor concerning the present invention. It is a perspective view explaining an example of the 1st actuator shown in FIG. FIG. 3 is an explanatory diagram for explaining the operation when a voltage is applied to the first actuator shown in FIGS. 1 and 2. It is explanatory drawing explaining operation | movement at the time of applying force to the 1st actuator shown in FIG. 1 and FIG. It is explanatory drawing explaining the relationship between the force applied to the 1st actuator shown in FIG. 1 and FIG. 2, and the voltage which generate | occur | produces. It is a graph which shows the relationship between the displacement amount and voltage in the 1st actuator shown in FIG. It is explanatory drawing explaining the relationship between the pressure applied to the 1st actuator installed in the metal plate, and the generated voltage. It is a graph which shows the relationship between the pressure and voltage in the 1st actuator shown in FIG. It is a principal part expansion perspective view of the pressure sensor shown in FIG. It is explanatory drawing explaining the relationship between the pressure applied to the laminated structure shown in FIG. 9, and the voltage which generate | occur | produces. It is a graph which shows the relationship between the voltage in the 1st actuator shown in FIG. 7, and the laminated structure shown in FIG. It is a top view explaining the laminated structure formed in the pressure sensor shown in FIG. It is a top view explaining the modification of the pressure sensor shown in FIG. It is a schematic side view explaining an example of the robot hand concerning the present invention.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, the drawings are schematic. Therefore, specific dimensions and the like should be determined in light of the following description. Moreover, it is a matter of course that portions having different dimensional relationships and ratios are included between the drawings. In the following description, the upper side of the drawing is “upper”, the lower side is “lower”, the left side is “left”, the right side is “right”, the front side of the page is “front”, the back side is “rear”, That's it.

[pressure sensor]
1 to 13 show an embodiment of a pressure sensor according to the present invention. FIG. 1 is a perspective view for explaining an example of a pressure sensor according to the present invention. As shown in FIG. 1, the pressure sensor 100 includes a plurality of first actuators 10 and a plurality of second actuators 20.

Each first actuator 10 has a belt-like (tape-like) shape, and is arranged so as to extend in a first direction (lateral direction or left-right direction in FIG. 1) in parallel with each other in plan view. . Similarly, each of the second actuators 20 has a belt-like (tape-like) shape, and in a plan view, parallel to each other and perpendicular to the first direction (vertical direction in FIG. 1). Alternatively, they are arranged so as to extend in the vertical direction. In FIG. 1, each row in the first direction is numbered sequentially from the left end, and the m-th row (where m is a positive integer) is expressed as X _m, and each column in the second direction is displayed from the upper end. Numbers are assigned in order, and the n-th column (where n is a positive integer) is represented as Y _n . The first actuator in the m-th row in the first direction is denoted as 10 (X _m ), and the second actuator in the n-th column in the second direction is denoted as 20 (Y _n ).

  FIG. 2 is a perspective view for explaining an example of the first actuator 10 shown in FIG. As shown in FIG. 2, the first actuator 10 includes an electrolyte membrane 15, an electrode 11, and an electrode 12. The second actuator 20 includes an electrolyte membrane 25, an electrode 21, and an electrode 22, similar to the first actuator 10. Therefore, in the following description, unless otherwise specified, only the first actuator 10 is described, and the description of the second actuator 20 is omitted.

  The electrode 11 is provided on the first surface (front surface in FIG. 2) of the electrolyte membrane 15, and the electrode 12 is provided on the second surface (rear surface in FIG. 2) facing the first surface of the electrolyte membrane 15.

  As the electrolyte membrane 15, for example, an ion conductive polymer electrolyte membrane can be used, and more specifically, for example, a fluororesin ion exchange membrane can be used. As the ion exchange membrane, either a cation exchange membrane or an anion exchange membrane can be used. For example, examples of the cation exchange membrane include a perfluorosulfonic acid membrane and a perfluorocarboxylic acid membrane.

  In the present embodiment, for example, a perfluorosulfonic acid membrane (trade name “Nafion”, a registered trademark of DuPont) is used as the electrolyte membrane 15. The electrolyte membrane 15 is formed in a rectangular shape having a short side of 2 [cm], a long side of 5 [cm], and a thickness of about 200 [μm] to 1 [mm].

  In addition, although the example of the perfluorosulfonic acid film | membrane was shown as the electrolyte membrane 15, it is not limited to this, For example, a perfluorocarboxylic acid film | membrane (brand name "Flemion", Asahi Kasei Co., Ltd. registered trademark) etc. It is possible to use a gelled ionic liquid. Similarly, the shape and dimensions of the electrolyte membrane 15 are not limited to the above-described example.

  As the electrodes 11 and 12, gold, platinum, iridium, palladium, ruthenium, carbon nanotube, or the like can be used. For the joining of the electrodes 11 and 12 to the electrolyte membrane 15, chemical plating, electroplating, vacuum deposition, sputtering, coating, pressure bonding, welding, or the like is appropriately used.

In the present embodiment, the electrodes 11 and 12 are formed by applying gold plating to the electrolyte membrane 15. In the gold plating on the electrolyte membrane 15, first, it infiltrates into an aqueous solution of dichlorophenanthroline gold (III) [Au (phen) Cl ₂ ] Cl and adsorbs gold complex ions by an ion exchange reaction. Next, the adsorbed film is immersed in an aqueous solution of sodium sulfite (Na ₂ SO ₃ ) and reduced, and gold ions taken into the film are precipitated outside. This makes it possible to apply gold plating to both sides of the film. As for the amount of gold to be plated, the amount of gold that can be plated in one plating step is 1-2 [mg / cm ² ] on one side. This is repeated to obtain the required electrode film thickness. For example, when plating is repeated about 4 to 8 times, about 10 [mg / cm ² ] gold is deposited on one side. In this case, the film thickness of the gold layer (electrode) is about 1 to 5 [μm].

  In addition, the material of the electrodes 11 and 12 is not limited to the example mentioned above, You may use another material. Similarly, the joining of the electrodes 11 and 12 to the electrolyte membrane 15 is not limited to the example described above.

  The electrolyte membrane 15 of the first actuator 10 is deformed when an electric field is applied. The reason why the electrolyte membrane 15 is deformed by the application of a voltage is not exactly elucidated, but can be roughly explained as follows.

  FIG. 3 is an explanatory diagram for explaining the operation when a voltage is applied to the first actuator 10 shown in FIGS. 1 and 2. As shown in the left diagram of FIG. 3, when a positive voltage and a negative voltage are respectively applied to the electrodes 11 and 12 of the first actuator 10 from the DC power source, the cations in the electrolyte membrane 15 move to the electrode 12 side. . As the cation moves, the water molecules (solvent) also move, so that the moisture on the electrode 12 side relatively increases and the moisture on the electrode 11 side relatively decreases. For this reason, there is a difference in the amount of moisture (solvent) in the electrolyte membrane 15 between the positive electrode side and the negative electrode side of the electrolyte membrane 15. Since the electrolyte membrane swells (swells) on the side where the amount of moisture in the electrolyte membrane 15 increases, the electrolyte membrane contracts on the side where the amount of moisture decreases, so that the first actuator 10 moves to the electrode 11 side (left side in FIG. 3). Curve and bend.

  On the other hand, as shown in the right diagram of FIG. 3, when a negative voltage and a positive voltage are applied to the electrodes 11 and 12 from the DC power source, the cations in the electrolyte membrane 15 move to the electrode 11 side. As the cation moves, water molecules (solvent) also move, so that the moisture on the electrode 11 side relatively increases and the moisture on the electrode 11 side relatively decreases. For this reason, there is a difference in the amount of moisture (solvent) in the electrolyte membrane 15 between the positive electrode side and the negative electrode side of the electrolyte membrane 15. Since the electrolyte membrane swells (swells) on the side where the amount of moisture in the electrolyte membrane 15 increases, the electrolyte membrane contracts on the side where the amount of moisture decreases, so the first actuator 10 moves to the electrode 12 side (right side in FIG. 3). Curve and bend.

  The electrolyte membrane 15 of the first actuator 10 generates a potential difference (voltage) when a force (external stress) is applied. The reason why a voltage is generated in the electrolyte membrane 15 by applying a force is not exactly elucidated, but can be roughly explained as follows.

  FIG. 4 is an explanatory diagram for explaining the operation when a force is applied to the first actuator 10 shown in FIGS. 1 and 2. As shown in the left diagram of FIG. 4, when an external force (external stress) is applied to the electrode 12 of the first actuator 10, the first actuator 10 is bent and bent to the left. At this time, water molecules (solvent) in the electrolyte membrane 15 move to the electrode 12 side. As the water molecules (solvent) move, the cations move, so that the cation density on the electrode 12 side becomes relatively high and the cation density on the electrode 11 side becomes relatively low. For this reason, there is a difference in the potential in the electrolyte membrane 15 between the electrode 12 side and the electrode 11 side of the electrolyte membrane 15, and the potential difference (voltage) at which the electrodes 11 and 12 of the first actuator 10 become a negative potential and a positive potential, respectively. Will occur.

  On the other hand, as shown in the right diagram of FIG. 4, when a force (external stress) is applied to the electrode 11 of the first actuator 10 from the outside, the first actuator 10 is bent and bent to the right. At this time, water molecules (solvent) in the electrolyte membrane 15 move to the electrode 11 side. As the water molecules (solvent) move, the cations move, so that the cation density on the electrode 11 side is relatively high and the cation density on the electrode 12 side is relatively low. For this reason, there is a difference in the potential in the electrolyte membrane 15 between the electrode 11 side and the electrode 12 side of the electrolyte membrane 15, and the potential difference (voltage) at which the electrodes 11 and 12 of the first actuator 10 become positive potential and negative potential, respectively. Will occur.

FIG. 5 is an explanatory diagram for explaining the relationship between the force applied to the first actuator 10 shown in FIGS. 1 and 2 and the generated voltage. As shown in FIG. 5, when a force F ₀ is applied to the electrode 12 of the first actuator 10 from the outside, the first actuator 10 is displaced downward by a displacement d ₀ proportional to the applied force F ₀ . At this time, the first actuator 10 generates a voltage V _{0 at} which the electrodes 11 and 12 have a negative potential and a positive potential, respectively. Although illustration is omitted, similarly, when a force F ₀ is applied to the electrode 11 of the first actuator 10 from the outside, the first actuator 10 is displaced upward by a displacement amount d ₀ . At this time, the first actuator 10 generates a voltage V _{0 at} which the electrodes 11 and 12 have a positive potential and a negative potential, respectively.

FIG. 6 is a graph showing the relationship between the displacement amount and the voltage in the first actuator 10 shown in FIG. In the graph of FIG. 6, the horizontal axis represents time, the left vertical axis represents voltage, and the right vertical axis represents displacement, and as shown in FIG. The amount of displacement is expressed as positive, and the amount of displacement is expressed as positive when the first actuator 10 is displaced downward. The solid line L1 represents the voltage V ₀ , and the broken line L2 represents the displacement d ₀ . When a force F ₀ that changes over time is alternately applied to the electrode 12 side and the electrode 11 side, the displacement d ₀ of the first actuator 10 and the voltage V ₀ generated at the electrodes 11 and 12 of the first actuator 10. Is measured, a graph as shown in FIG. 6 is obtained. As shown in FIG. 6, the voltage V ₀ generated in the first actuator 10 has a level proportional to the displacement d ₀ of the first actuator 10 and responds to a change in the displacement d ₀ of the first actuator 10. It can be seen that it has a responsiveness.

FIG. 7 is an explanatory diagram for explaining the relationship between the pressure applied to the first actuator 10 installed on the metal plate A and the generated voltage. As shown in FIG. 7, after the electrode 11 side of the first actuator 10 is placed and fixed on the metal plate A, the pressure (force) F ₀ from the outside is applied to the central portion of the electrode 12 of the first actuator 10. Is applied, the first actuator 10 bends upward. At this time, as described above, a voltage (potential difference) is generated at which the electrodes 11 and 12 of the first actuator 10 become a negative voltage and a positive voltage, respectively.

FIG. 8 is a graph showing the relationship between pressure and voltage in the first actuator 10 shown in FIG. In the graph of FIG. 8, the horizontal axis indicates time, the left vertical axis indicates voltage, the right vertical axis indicates pressure, the solid line L3 plotted by a square is a voltage V ₀ , and the broken line L4 plotted by a rhombus is a pressure F _0. Represents. When the voltage V ₀ generated at the electrodes 11 and 12 of the first actuator 10 is measured when the pressure F ₀ is applied to the first actuator 10 for a predetermined time and then the applied pressure F ₀ is removed, FIG. It becomes a graph as shown in. As shown in FIG. 8, the voltage V ₀ generated in the first actuator 10, that the level is proportional to the magnitude of the pressure F _0, and has a response that is responsive to changes in pressure F ₀ I understand. Moreover, the voltage V ₀ generated in the first actuator 10 continues generates while the pressure F ₀ are added, the pressure F ₀ is removed that level it can be seen that zero.

  Thus, the first actuator 10 having the electrolyte membrane 15 and the second actuator 20 having the electrolyte membrane 25 are lightweight, elastic (elastic), excellent in adhesion, easy to process, and in operation ( When the pressure is applied, a voltage (potential difference) is generated immediately, and a signal (voltage) is output as long as the pressure continues. When the pressure is removed, the signal (voltage) is output. It has the feature of stopping.

  FIG. 9 is an enlarged perspective view of a main part of the pressure sensor 100 shown in FIG. As shown in FIG. 9, the first actuator 10 and the second actuator 20 intersect so that the second actuator 20 is stacked on the first actuator 10, for example. In other words, the first actuator 10 crosses under the second actuator 20. As a result, at the position where the first actuator 10 and the second actuator 20 intersect (intersection position), the electrolyte membrane 15 of the first actuator 10 via the electrode 12 of the first actuator 10 and the electrode 21 of the second actuator 20. And the electrolyte membrane 25 of the 2nd actuator 20 is laminated | stacked, and the laminated structure S is formed.

  Although FIG. 9 shows an example in which the second actuator 20 intersects the first actuator 10, the present invention is not limited to this. In the pressure sensor 100, the first actuator 10 crosses over the second actuator 20, in other words, the second actuator 20 crosses under the first actuator 10. Similarly in this case, the electrolyte membrane 25 of the second actuator 20 and the electrode 22 of the second actuator 20 and the electrode 11 of the second actuator 20 and the first actuator 10 at the intersecting position where the first actuator 10 and the second actuator 20 intersect. The electrolyte membrane 15 of the first actuator 10 is laminated, and the laminated structure S is formed.

As shown in FIG. 1, each first actuator 10 and each second actuator 20 intersect in a predetermined order (rule) in the vertical direction (height direction). That is, for example, the first actuators 10 (X ₁ ) in the first row in the first direction intersect with the second actuators 20 (Y ₁ ) in the first column in the second direction and the second actuators in the second direction. It crosses over two rows of second actuators 20 (Y ₂ ). At this time, the electrode 12 of the first row and the first actuator 10 (X ₁₎ second actuator 20 of the first column (Y ₁₎ first actuator 10 of the first row via the electrode 21 of the (X ₁₎ The electrolyte membrane 15 of the first row and the electrolyte membrane 25 of the second actuator 20 (Y ₁ ) in the first row are stacked, and the electrode 11 of the first actuator 10 (X ₁ ) in the _first row and the second actuator in the second row. The electrolyte membrane 15 of the first actuator 10 (X ₁ ) in the _first row and the electrolyte membrane 25 of the second actuator 20 (Y ₂ ) in the second row are stacked via the 20 (Y ₂ ) electrodes 22. On the other hand, the second actuator 20 (Y ₁ ) in the first column in the second direction intersects the first actuator 10 (X ₁ ) in the first row in the first direction as described above, and also in the first direction. In the second row of the first actuator 10 (X ₂ ). At this time, the second actuator 20 (Y ₁ ) in the first column via the electrode 21 of the second actuator 20 (Y ₁ ) in the first column and the electrode 12 of the first actuator 10 (X ₁ ) in the first row. Of the first actuator 10 (X ₁ ) in the first row and the electrode 22 of the second actuator 20 (Y ₁ ) in the first column and the first actuator in the second row. The electrolyte membrane 25 of the second actuator 20 (Y ₁ ) in the first column and the electrolyte membrane 15 of the first actuator 10 (X ₂ ) in the second row are stacked via the 10 (X ₂ ) electrodes 11.

In addition, for example, the first actuators 10 (X ₂ ) in the second row in the first direction intersect the second actuators 20 (Y ₂ ) in the second column in the second direction and the second actuators in the second direction. It crosses over the third row of second actuators 20 (Y ₃ ). At this time, the first actuator 10 of the second row (X ₂₎ of the electrode 12 and the second column of the second actuator 20 (Y ₂₎ first actuator 10 of the second row through the electrode 21 of the (X ₂₎ The electrolyte membrane 15 of the second row and the electrolyte membrane 25 of the second actuator 20 (Y ₂ ) in the second row are laminated, and the electrode 11 of the first actuator 10 (X ₂ ) in the second row and the second actuator of the third row. The electrolyte membrane 15 of the first actuator 10 (X ₂ ) in the second row and the electrolyte membrane 25 of the second actuator 20 (Y ₂ ) in the third row are stacked via the 20 (Y ₃ ) electrodes 22. On the other hand, the second actuators 20 (Y ₂ ) in the second column in the second direction intersect the first actuators 10 (X ₂ ) in the second row in the first direction as described above, and the first direction Of the third row of the first actuator 10 (X ₃ ). At this time, the second actuator 20 (Y ₂ ) in the second column via the electrode 21 of the second actuator 20 (Y ₂ ) in the second column and the electrode 12 of the first actuator 10 (X ₂ ) in the second row. Of the first actuator 10 (X ₂ ) in the second row and the electrode 22 of the second actuator 20 (Y ₂ ) in the second column and the first actuator in the third row. The electrolyte membrane 25 of the second actuator 20 (Y ₂ ) in the _second row and the electrolyte membrane 15 of the first actuator 10 (X ₃ ) in the third row are stacked via the 10 (X ₃ ) electrodes 11.

  As described above, one first actuator 10 of the plurality of first actuators 10 includes one of the electrode 11 and the electrode 12 and one of the plurality of second actuators 20 in the one first actuator 10. The electrolyte membrane 15 of the first actuator 10 and the electrolyte membrane 25 of the second actuator 20 are stacked via one of the electrode 21 and the electrode 22 in the second actuator 20. One of the electrodes 11 and 12 of the first actuator 10 and the electrode 21 of the other second actuator 20 of the plurality of second actuators 20. The one first actuator via the other of the electrodes 22 0 electrolyte membrane 15 and electrolyte membrane 25 of other second actuator 20 are stacked so as to cross above other second actuator 20 and on one first actuator 10 described above. The one second actuator 20 that intersects the other one of the electrode 21 and the electrode 22 in the one second actuator 10 and the electrode 11 and the electrode in the other first actuator 10 among the plurality of first actuators 10. 12, the electrolyte membrane 25 of the second actuator 20 and the electrolyte membrane 15 of the other first actuator 10 are stacked under the other first actuator 10. By crossing, it becomes possible to form a sheet-like (cloth-like) structure like a woven fabric. Strength against force (stress) which is increased.

  Further, each of the plurality of first actuators 10 is disposed so as to extend in the first direction, and each of the plurality of second actuators 20 is disposed so as to extend in the second direction intersecting the first direction, By forming such a sheet-like (cloth-like) structure, the first actuator 10 and the second actuator 20 which are pressure detection elements are arranged in a two-dimensional predetermined region.

  In the present embodiment, an example in which the first direction and the second direction are orthogonal to each other is shown, but the present invention is not limited to this. It is only necessary that the first direction and the second direction intersect. Moreover, the number of the 1st actuators 10 and the 2nd actuators 20 should just be respectively plural, and may be the same or different.

Here, when a pressure is applied to the pressure sensor 100, a voltage is generated in each first actuator 10 and each second actuator 20, and the applied pressure can be detected. On the other hand, the voltage V ₀ generated in the first actuator 10 and the second actuator 20 is, for example, about 2 [mV], and is about several [mV] at the maximum. Therefore, the voltage generated in each first actuator 10 and each second actuator 20 may have a low signal level as a signal (pressure detection signal) for detecting the applied pressure. Considering the above, the pressure sensor 100 includes the electrolyte membrane 15 of the first actuator 10 that is stacked at the crossing positions where the plurality of first actuators 10 and the plurality of second actuators 20 respectively intersect, as will be described later. It is preferable to detect a potential difference (voltage) generated in the electrolyte membrane 25 of the second actuator 20.

FIG. 10 is an explanatory diagram for explaining the relationship between the pressure applied to the laminated structure S shown in FIG. 9 and the generated voltage. As shown in FIG. 10, after the electrode 11 side of the laminated structure S is placed and fixed on the metal plate A, a pressure (force) F ₀ is applied to the central portion of the electrode 22 of the laminated structure S from the outside. When is added, the laminated structure S bends upward. At this time, the first actuator 10 generates a voltage V _{1 at} which the electrodes 11 and 12 become negative and positive, respectively, and the second actuator 20 has the electrodes 21 and 22 at negative and positive voltages, respectively. A voltage V ₂ is generated.

FIG. 11 is a graph showing the voltage relationship between the first actuator 10 shown in FIG. 7 and the stacked structure S shown in FIG. In the graph of FIG. 11, the horizontal axis indicates pressure, the vertical axis indicates voltage, the square plot indicates the voltage generated in the stacked structure S shown in FIG. 10, and the rhombus plot indicates the first actuator shown in FIG. 10 represents the voltage generated at 10. As shown in FIG. 11, the voltage (V ₁ + V ₂ ) generated in the laminated structure S in the entire range of the applied pressure F ₀ is the voltage V generated in the single first actuator 10 shown in FIG. It can be seen that the level is higher than ₀ and doubles or substantially doubles (V ₁ + V ₂ ≈2 × V ₀ ).

FIG. 12 is a plan view for explaining the laminated structure S formed in the pressure sensor 100 shown in FIG. In FIG. 12, as in FIG. 1, each row in the first direction is numbered sequentially from the left end, and the m-th row (where m is a positive integer) is expressed as X _m, and the second direction A number is assigned to each column in order from the top, and the n-th column (where n is a positive integer) is represented as Y _n . The stacked structure at the intersection of the m-th row and the n-th column is denoted as S _mn . As shown in FIG. 12, each stacked structure S is formed at each crossing position of each first actuator 10 and each second actuator 20. The potential difference (voltage) of each stacked structure S is detected by the electrodes 11 and 22 provided on the lower and upper surfaces of the electrolyte membrane 15 and the electrodes 21 and 12 provided on the lower and upper surfaces of the electrolyte membrane 25, respectively. It is possible. Therefore, at the crossing positions where the plurality of first actuators 10 and the plurality of second actuators 20 cross each other, the potential difference of the stacked structure S, that is, the electrolyte membrane 15 of the stacked first actuator 10 and the second actuator 20 are stacked. By detecting the potential difference (voltage) of the electrolyte membrane 25, a voltage higher than the voltage generated in the first actuator 10 having one electrolyte membrane 15 is obtained as a detection signal (pressure detection signal) for the applied pressure. Is possible.

  Further, as shown in FIG. 1, the plurality of first actuators 10 and the plurality of second actuators 20 intersect each other alternately in the vertical direction, that is, the one first actuator 10 described above and the other first actuator described above. It is preferable that the actuators 10 be adjacent to each other, and the one second actuator 20 described above and the other second actuator 20 described above are adjacent to each other. Thereby, in the sheet-like (cloth-like) structure formed by the plurality of first actuators 10 and the plurality of second actuators 20, the strength against the applied force (stress) can be further increased.

  Although FIG. 1 shows an example in which the plurality of first actuators 10 and the plurality of second actuators 20 alternately cross each other in the vertical direction, the present invention is not limited to this. The plurality of first actuators 10 and the plurality of second actuators 20 include a plurality of first actuators 10 of the plurality of first actuators 10 so as to form a sheet-like (cloth-like) structure such as a fabric. Of the second actuator 20 crosses under one of the second actuators 20 and crosses over the other second actuator 20 of the plurality of second actuators 20. It suffices if it crosses under the other first actuators 10 of the first actuators 10. For example, the plurality of first actuators 10 and the plurality of second actuators 20 may intersect in the vertical direction for each of a plurality (plural), or in a case of intersecting one by one (alternately) and a plurality of You may combine with the case where it intersects every (plural).

FIG. 13 is a plan view for explaining a modification of the pressure sensor 100 shown in FIG. In FIG. 13, as in FIG. 1, each row in the first direction is numbered sequentially from the left end, and the m-th row (where m is a positive integer) is expressed as X _m, and the second direction A number is assigned to each column in order from the top, and the n-th column (where n is a positive integer) is represented as Y _n . The first actuator in the m-th row in the first direction is denoted as 10 (X _m ), and the second actuator in the n-th column in the second direction is denoted as 20 (Y _n ). As shown in FIG. 13, the pressure sensor 100 may further include two first reinforcing members 30 and two second reinforcing members 40.

Each first reinforcing member 30 is made of, for example, a fibrous material and has a band shape (tape shape). Among the plurality of first actuators 10, one of the first actuators 10 and the plurality of first actuators 10. The other first actuator 10 is interwoven. That is, each of the first reinforcing member 30 is disposed so as to extend in a first direction, for example, the first row and the first actuator 10 (X ₁₎ and the first actuator 10 of the second row (X ₂₎ It is arranged between the first actuators 10 (X ₂ ) in the _second row and the first actuators 10 (X ₃ ) in the third row. Thereby, in the sheet-like (cloth-like) structure formed by the plurality of first actuators 10 and the plurality of second actuators 20, the first reinforcing member 30 can reinforce the strength in the first direction. The strength against the applied force (stress) can be further increased.

  Although FIG. 13 shows an example in which the pressure sensor 100 includes the two first reinforcing members 30, the present invention is not limited to this. There may be one first reinforcing member 30 or a plurality of three or more. Further, the first reinforcing member 30 may be disposed only between a part of the plurality of first actuators 10, or may be disposed between all of the plurality of first actuators 10, or may be disposed between the plurality of first actuators 10. One actuator 10 may be arranged at a predetermined interval.

Each of the second reinforcing members 40 is, for example, a fibrous material, and is, for example, a fibrous material and has a strip shape (tape shape). The second reinforcing member 40 includes one second actuator 20 of the plurality of second actuators 20. A plurality of second actuators 20 are interwoven with other second actuators 20. That is, each of the second reinforcing member 40 is disposed so as to extend in the second direction, for example, the second actuator 20 of the first column (Y ₁₎ and the second column of the second actuator 20 (Y ₂₎ and the And the second actuator 20 (Y ₂ ) in the second row and the second actuator 20 (Y ₃ ) in the third row. Thereby, in the sheet-like (cloth-like) structure formed by the plurality of first actuators 10 and the plurality of second actuators 20, it is possible to reinforce the strength in the second direction by the second reinforcing member 40. The strength against the applied force (stress) can be further increased.

  Although FIG. 13 shows an example in which the pressure sensor 100 includes two second reinforcing members 40, the present invention is not limited to this. The second reinforcing member 40 may be one, or may be a plurality of three or more. Further, the second reinforcing member 40 may be disposed only between a part of the plurality of second actuators 20, or may be disposed between all of the plurality of second actuators 20, or may be disposed between the plurality of second actuators 20. The two actuators 20 may be arranged at a predetermined interval.

  Moreover, in FIG. 13, although the pressure sensor 100 showed the example provided with both the 1st reinforcement member 30 and the 2nd reinforcement member 40, it is not limited to this. The pressure sensor 100 may include only one of the first reinforcing member 30 and the second reinforcing member 40. Further, the first reinforcing member 30 and the second reinforcing member 40 may have different numbers. Moreover, it is preferable that the 1st reinforcement member 30 and the 2nd reinforcement member 40 cross | intersect a predetermined order (rule) to an up-down direction (height direction), and as shown in FIG. More preferably. Further, the first reinforcing member 30 and the second reinforcing member 40 preferably intersect with the plurality of first actuators 10 and the plurality of second actuators 20 in the vertical direction, respectively, and alternately intersect as shown in FIG. More preferably.

  As described above, according to the pressure sensor 100 of the present embodiment, one of the first actuators 10 includes one of the electrode 11 and the electrode 12 in the first actuator 10. The electrolyte membrane 15 of the first actuator 10 and the first actuator 20 of the first actuator 10 via one of the electrode 21 and the electrode 22 of the second actuator 20 of the second actuator 20. As the electrolyte membrane 25 is laminated, it intersects under the one second actuator 20 described above, and the other of the electrode 11 and the electrode 12 in the one first actuator 10 and the plurality of second actuators 20. Electrode 21 and electrode 22 in the other second actuator 20 Cross over the second actuator 20 described above so that the electrolyte membrane 15 of the first actuator 10 and the electrolyte membrane 25 of the second actuator 20 are stacked via the other of them. To do. In addition, the one second actuator 20 that intersects the one first actuator 10 includes the other of the electrode 21 and the electrode 22 in the one second actuator 10 and the plurality of first actuators 10. The electrolyte membrane 25 of the second actuator 20 and the electrolyte membrane 15 of the other first actuator 10 are stacked via the other electrode 11 and the other electrode 12 of the other first actuator 10. Thus, it crosses under the other first actuator 10 described above. Thereby, it becomes possible to form a sheet-like (cloth-like) structure such as a woven fabric, and the strength against applied force (stress) is increased. Therefore, the strength against the applied force can be increased by using the first actuator 10 having the electrolyte membrane 15 and the second actuator 20 having the electrolyte membrane 25.

  Further, each of the plurality of first actuators 10 is disposed so as to extend in the first direction, and each of the plurality of second actuators 20 is disposed so as to extend in the second direction intersecting the first direction, By forming such a sheet-like (cloth-like) structure, the first actuator 10 and the second actuator 20 which are pressure detection elements are arranged in a two-dimensional predetermined region. Therefore, when a two-dimensional pressure having a predetermined spread is applied to the pressure sensor 100, a distribution (pressure distribution) with respect to the two-dimensional pressure can be obtained. Further, the pressure distribution obtained in this way can be used to obtain information such as slippage between the object to which a two-dimensional pressure is applied and the hardness and weight of the object.

  Furthermore, the first actuator 10 having the electrolyte membrane 15 and the second actuator 20 having the electrolyte membrane 25 are lightweight, have elasticity (elasticity), have excellent adhesion, are easy to process, and operate (during operation). ) There is no vibration, and when pressure is applied, a voltage (potential difference) is generated in response immediately, a signal (voltage) is output as long as the pressure continues, and the output of the signal (voltage) stops when the pressure is removed Has characteristics. Therefore, the pressure sensor 100 of the present invention including the plurality of first actuators 10 and the plurality of second actuators 20 can be suitably applied to applications that require at least one of these features.

  Further, according to the pressure sensor 100 of the present embodiment, the electrolyte membrane 15 and the second actuator of the first actuator 10 that are stacked at the intersecting positions where the plurality of first actuators 10 and the plurality of second actuators 20 intersect each other. The potential difference (voltage) of the 20 electrolyte membranes 25 is detected. As a result, it is possible to obtain a voltage of a level higher than the voltage generated in the first actuator 10 having one electrolyte membrane 15 as a detection signal (pressure detection signal) for the applied pressure. Therefore, by using the first actuator 10 having the electrolyte membrane 15 and the second actuator 20 having the electrolyte membrane 25, the level of the detection signal with respect to the applied pressure can be increased, and the detection sensitivity with respect to the pressure can be increased.

  Further, according to the pressure sensor 100 of the present embodiment, the plurality of first actuators 10 and the plurality of second actuators 20 are such that the one first actuator 10 described above and the other first actuator 10 described above are adjacent to each other. The one second actuator 20 described above and the other second actuator 20 described above are arranged adjacent to each other. Thereby, in the sheet-like (cloth-like) structure formed by the plurality of first actuators 10 and the plurality of second actuators 20, the strength against the applied force (stress) can be further increased.

  Further, according to the pressure sensor 100 of the present embodiment, the first reinforcing member 30 includes one first actuator 10 of the plurality of first actuators 10 and another first actuator of the plurality of first actuators 10. 10 is arranged to extend in the first direction. Thereby, in the sheet-like (cloth-like) structure formed by the plurality of first actuators 10 and the plurality of second actuators 20, the first reinforcing member 30 can reinforce the strength in the first direction. The strength against the applied force (stress) can be further increased.

  Further, according to the pressure sensor 100 of the present embodiment, the second reinforcing member 40 includes one second actuator 20 of the plurality of second actuators 20 and another second actuator of the plurality of second actuators 20. 20 is arranged so as to extend in the second direction. Thereby, in the sheet-like (cloth-like) structure formed by the plurality of first actuators 10 and the plurality of second actuators 20, it is possible to reinforce the strength in the second direction by the second reinforcing member 40. The strength against the applied force (stress) can be further increased.

[Robot hand]
FIG. 14 is a view for illustrating an embodiment of the robot hand according to the present invention, and FIG. 14 is a schematic side view for explaining an example of the robot hand according to the present invention. Note that the same components as those of the above-described embodiment of the pressure sensor according to the present invention are denoted by the same reference numerals, and description thereof is omitted. Further, the components not shown in the drawing are the same as those in the embodiment of the pressure sensor according to the present invention described above.

  The above-described pressure sensor 100 according to the present invention can be suitably applied to, for example, a robot hand that holds an object (not shown). That is, as shown in FIG. 14, the robot hand 200 includes an arm part 110 and a hand part 150 including the pressure sensor 100 according to the present invention described above.

  The hand portion 150 has a bendable joint portion 151 and is formed in a sheet shape (cloth shape) on the surface of the hand portion 150 including the joint portion 151 from a range where the object can be contacted, for example. The aforementioned pressure sensor 100 according to the present invention is provided.

  The pressure sensor 100 detects a pressure when the hand unit 150 grips an object, and outputs a detected signal (pressure detection signal) to a control unit (not shown). The control unit controls the operation of the robot hand 200 based on the input pressure detection signal. Thus, the pressure sensor 100 of this embodiment is used as a tactile sensor for the robot hand 200.

  In general, the tactile sensor of the robot hand 200 is lightweight, has elasticity (elasticity), has excellent adhesion, is easy to process, does not vibrate during operation (operation), and responds immediately when pressure is applied. It is preferable to have a feature that a signal is generated and a signal is output as long as the pressure continues, and the output of the signal is stopped when the pressure is removed.

  Here, when the hand unit 150 grips the object, a two-dimensional pressure having a predetermined spread is applied from the object to the hand unit 150, so that the pressure sensor 100 provided in the hand unit 150 has a two-dimensional pressure. Can be obtained.

  In this embodiment, although the example which provided the pressure sensor 100 in the hand part 150 was shown, it is not limited to this. The pressure sensor 100 may be provided in a movable part of the arm part 110, for example, a part corresponding to an elbow joint.

  14 shows an example of the robot hand 200 including only the pressure sensor 100 for simplification of description, the present invention is not limited to this. The robot hand 200 may control various operations such as proximity sensors, six-axis force sensors, and torque sensors based on the sensor information.

  Thus, according to the robot hand 200 in this embodiment, the pressure sensor 100 according to the present invention described above is provided. As a result, the pressure sensor 100 according to the present invention can increase the strength against the applied force, so that the pressure detection position (detection location), for example, the arm part 110 or the joint part 151 moves or bends. The robot hand 200 can be easily realized (configured).

  Here, when the hand unit 150 grips the object, a two-dimensional pressure having a predetermined spread is applied from the object to the hand unit 150, so that the pressure sensor 100 provided in the hand unit 150 has a two-dimensional pressure. Can be obtained. Further, by using the pressure distribution thus obtained, it is possible to realize the robot hand 200 that detects information such as slippage (displacement) between the object to be grasped and the hardness and weight of the object.

  In general, the tactile sensor of the robot hand 200 is lightweight, has elasticity (elasticity), has excellent adhesion, is easy to process, does not vibrate during operation (operation), and responds immediately when pressure is applied. It is preferable to have a feature that a signal is generated and a signal is output as long as the pressure continues, and the output of the signal is stopped when the pressure is removed. Since each of the plurality of first actuators 10 and the plurality of second actuators 20 included in the pressure sensor 100 according to the present invention has these characteristics, the robot hand 200 having an ideal (optimum) tactile sensor is realized ( Configuration).

  Note that the configurations of the above-described embodiments may be combined, or some components may be replaced. The configuration of the present invention is not limited to the above-described embodiment, and various modifications may be made without departing from the scope of the present invention.

  DESCRIPTION OF SYMBOLS 10 ... 1st actuator, 20 ... 2nd actuator, 11, 12, 21, 22 ... Electrode, 15, 25 ... Electrolyte membrane, 30 ... 1st reinforcement member, 40 ... 2nd reinforcement member, 100 ... Pressure sensor, S ... Laminated structure, 200 ... Robot hand

Claims (6)

A plurality of first actuators each arranged to extend in a first direction;
A plurality of second actuators each disposed to extend in a second direction intersecting the first direction;
With
Each of the plurality of first actuators and the plurality of second actuators includes a layer containing an electrolyte, a first electrode provided on a first surface of the layer, and a first surface of the layer. A second electrode provided on the opposing second surface,
One first actuator of the plurality of first actuators includes one of the first electrode and the second electrode in the one first actuator and the plurality of second actuators. The layer of the one first actuator and the layer of the one second actuator via one of the first electrode and the second electrode of one of the second actuators. The first and second electrodes of the one first actuator and the plurality of second actuators are crossed under the one second actuator so as to be stacked. The first actuator through the other of the first electrode and the second electrode of the other second actuator of the first actuator As the layer and the layer of the other second actuator over it is stacked, crossing over the other second actuator,
The one second actuator includes the other of the first electrode and the second electrode in the one second actuator and the other first actuator of the plurality of first actuators. The other layer of the one second actuator and the other layer of the other first actuator are stacked via the other of the first electrode and the second electrode. A pressure sensor characterized by crossing under the first actuator. Detecting a potential difference between the layer of the first actuator and the layer of the second actuator stacked at a position where the plurality of first actuators and the plurality of second actuators intersect each other. The pressure sensor according to claim 1. In the plurality of first actuators and the plurality of second actuators, the one first actuator and the other first actuator are adjacent to each other, and the one second actuator and the other second actuator are adjacent to each other. The pressure sensor according to claim 1, wherein the actuator is arranged so as to be adjacent to each other. Extending in the first direction between the first actuator of one of the plurality of first actuators and the other first actuator of the plurality of first actuators. The pressure sensor according to any one of claims 1 to 3, further comprising a first member to be arranged. Extending in the second direction between the second actuator of one of the plurality of second actuators and the other second actuator of the plurality of second actuators. The pressure sensor according to any one of claims 1 to 4, further comprising a second member to be arranged. A robot hand comprising the pressure sensor according to any one of claims 1 to 5.

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