JP2011059335A - Method and device for adjusting light beam - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a beam adjusting device for adjusting the beam irradiation position in a short time without increasing the number of parts or enlarging the device. <P>SOLUTION: Mirrors 19a and 19b for adjustment are rotated by a tilting mechanism 101, and moved rectilinearly by a shift mechanism 102. A light 18 is adjusted by the beam-adjusting mechanism 10, a lens 12 is moved by a capacitor lens moving mechanism 121, and light having been adjusted by the beam-adjusting mechanism and passed the lens 12 and the light that have not passed through the lens 12 are irradiated on the CCD camera 13. The distance between the lens 12 and the light-receiving surface of the CCD camera 13 is the focal distance, and is set to align the center position of the lens 12 and the center position of the CCD camera. The tilt adjustment amount is calculated and corrected to provide parallel light by a beam-adjusting mechanism 10. Then, light is made to enter the CCD camera 13, without passing through the lens 12, the shift adjusted amount of the beam is calculated, and the shift and the tilt of the beam are corrected by the beam-adjusting mechanism 10 so that the light converges at the center of the CCD camera 13. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an inspection apparatus for inspecting a defect such as a semiconductor wafer.

  An example of a beam adjustment method of a laser light source of an exposure apparatus for a disk master in the prior art is described in Patent Document 1. As described in Patent Document 1, the beam diameter is changed to expose different optical disks. Although it is necessary to adjust the irradiation position of the beam, a beam irradiation position shift or the like has been observed using a beam expander, a plurality of mirrors, a lens, a reflector, and the like in the optical path.

  Even in a defect inspection apparatus, irradiating a sample with a stable beam greatly affects the performance of the apparatus. Therefore, beam adjustment is essential. For this reason, it is necessary to observe the beam shift by the illumination optical system until the beam is irradiated onto the sample.

JP 2004-185663 A

  As described above, the conventional technique has a beam expander, a plurality of mirrors, a lens, a reflector, and the like in the optical path until the beam irradiation position is monitored by an imaging device (for example, a sensor or a camera). The number of parts used up to the imaging device has been very large.

  When the number of parts to be used increases, the configuration of the optical path becomes complicated and the adjustment process increases, and the optical path length becomes long and the apparatus may become large.

  In such a conventional technique, since the number of parts is large, the number of beam adjustment processes is increased, and the length of the optical path is increased, resulting in an increase in the size of the apparatus.

  An object of the present invention is to realize a light beam adjusting method and a light beam adjusting apparatus capable of adjusting a beam irradiation position in a short time without increasing the number of parts and increasing the size of the apparatus.

  In order to achieve the above object, the present invention is configured as follows.

  The light beam adjusting method and the light beam adjusting apparatus according to the present invention irradiate the imaging unit with the light beam reflected from the reflecting mirror via the condenser lens, and the reflection angle of the reflecting mirror based on the irradiation position of the light beam. And adjusting the irradiation position of the light beam to the reflection mirror based on the irradiation position of the light beam based on the irradiation position of the light beam. The reflection direction of the light beam by the reflection mirror is adjusted.

  Further, a defect inspection apparatus is configured using the light beam adjusting apparatus.

  According to the present invention, it is possible to realize a light beam adjustment method and a light beam adjustment apparatus capable of adjusting a beam irradiation position in a short time without increasing the number of components and increasing the size of the apparatus.

1 is an overall schematic configuration diagram of a defect inspection apparatus to which the present invention is applied. It is a block diagram of the beam adjustment mechanism in the defect inspection apparatus shown in FIG. It is explanatory drawing of the light beam adjustment mechanism of the Example of this invention. It is explanatory drawing of the light beam adjustment mechanism of the Example of this invention. It is an operation | movement flowchart of the irradiation optical system adjustment of the Example of this invention. It is explanatory drawing of the tilt amount confirmation image of the Example of this invention, and a shift amount confirmation image. It is a comparison figure of the light beam adjustment mechanism using the condensing lens of the Example of this invention, and the light beam adjustment mechanism using a beam expander.

  Embodiments of the present invention will be described below with reference to the accompanying drawings.

  FIG. 1 is an overall schematic configuration diagram of a defect inspection apparatus to which the present invention is applied. Here, the defect inspection apparatus is an apparatus that inspects a semiconductor wafer for foreign matters, scratches, or the like (defects) in a semiconductor device manufacturing process.

  In FIG. 1, the defect inspection apparatus has a sample 5 mounted thereon, and a beam spot 103 which is a slit-shaped illumination region irradiated on the sample 5 in a slit shape, a detection region 104 of the image sensor, and an inspection region in the sample 5 in the XY direction. The stage unit 300 includes an X stage 301 and a Y stage 302 that can be moved relative to the optical system, a Z stage 303 that can focus on the surface of the sample 5, a theta stage 304, and a stage controller 305.

  Further, the defect inspection apparatus includes an illumination optical system 100 including a laser light source, an optical filter group and a mirror, an optical branching element (or mirror) that can be switched to a glass plate, and a beam spot imaging unit.

  Further, the defect inspection apparatus includes a detection lens 201, a spatial filter 202, an imaging lens 203, a zoom lens group 204, an image sensor (imaging means) 205, an observation optical system 206 capable of observing a detection area of the image sensor, and a polarization beam splitter 209. The detection optical system 200 includes a branch detection optical system 210 for inspecting two sensors simultaneously.

  In addition, the defect inspection apparatus includes an image processing unit 406 that processes an image obtained by the branch detection optical system 210 and a storage unit 405 that stores a defect detection result of a foreign matter or the like.

  In addition, the defect inspection apparatus includes an A / D converter, a data memory that can be delayed, a difference processing circuit that takes a signal difference between chips, a memory that temporarily stores a difference signal between chips, and a threshold that sets a pattern threshold A calculation processing unit, a signal processing unit 402 composed of a comparison circuit, an output means for outputting a defect detection result together with a storage unit 405, a control CPU unit 401 for controlling driving, coordinates, and sensors of a motor, a display unit 403, and an input unit A control system 400 including 404 is included.

  The image sensor 205 can be a CCD or TDI (Time Delay Integration) sensor. In the case of a CCD, since the pixel size is about 10 micrometers, it may be considered as linear detection, and there is no sensitivity reduction due to capturing an image that is not in focus in the scanning direction.

  On the other hand, in TDI, since images for a certain number of pixels are accumulated in the scanning direction, it is desirable to reduce the amount of images that are not in focus by taking measures such as reducing the illumination width or tilting the TDI sensor.

  The coordinate system is shown in the lower left of FIG. The XY axis is taken on the plane, and the Z axis is taken vertically upward. The optical axis of the detection optical system 200 is arranged along the Z axis.

  FIG. 2 is a configuration diagram of a beam adjustment mechanism in the defect inspection apparatus shown in FIG.

  In FIG. 2, an inspection stage 4 (stages 301 to 304) is included as a scanning unit of the transport system 3, and a sample 5 is arranged on the inspection stage 4. A light beam is output from the laser light source 1 and the light amount is adjusted by the light amount adjusting mechanism 9.

  The light beam that has passed through the light amount adjustment mechanism 9 is adjusted by the beam adjustment mechanism 10 in the tilt direction and shift direction of the beam. That is, the beam tilt and shift directions are adjusted by adjusting the positions of the two reflecting mirrors facing each other.

  Next, among the beams irradiated on the half mirror 11, the transmitted light is used for beam adjustment, and the reflected light is branched into light irradiated on the sample 5. The condensing lens 12 is moved by the condensing lens moving mechanism 121 so that the beam adjusting light is transmitted through the condensing lens 12 to irradiate the CCD camera 13, or the beam adjusting light is transmitted through the condensing lens 12. Without irradiating the CCD camera 13 or the like. Then, the tilt and shift directions of the beam are adjusted with the light applied to the CCD camera 13. Details will be described later with reference to FIGS. For example, the condenser lens moving mechanism 121 can use a motor or a stage.

  The image captured by the CCD camera 13 is captured by the beam image analysis unit 14, performs image analysis, and information on the beam shift from the correctly adjusted state (for example, the shift amount indicating the horizontal shift of the beam, A tilt amount indicating a deviation of the tilt of the beam is calculated, and an adjustment amount 15 is applied to the beam adjustment mechanism 10 via an adjustment mirror movement mechanism (reflection means movement mechanism) 500 (including the tilt adjustment mechanism 101 and the shift adjustment mechanism 102). Is commanded. Details will be described later with reference to FIG.

  The beam adjusted by the beam adjusting mechanism 10 is reflected by the half mirror 11, then reflected by the mirror 16, and irradiated on the sample 5. The beam is irradiated to a predetermined position of the sample 5 by adjusting the beam by the beam adjusting mechanism 10.

  The reflected light applied to the sample 5 passes through the detection optical system 6, is detected by the detector 17, is subjected to image processing by the image processing system 7, and defect information of the sample 5 is displayed on the display unit 403.

  FIG. 3 is an explanatory diagram of the operation of the beam adjustment mechanism 10. In FIG. 3, adjustment mirrors 19 a (first mirror) and 19 b (second mirror) are rotated by a tilt (rotation) mechanism 101 and moved linearly by a shift mechanism 102. For example, the tilt mechanism 101 and the shift mechanism 102 can use a motor or a stage.

  The tilt mechanism 101 includes a first tilt mechanism for adjusting the tilt of the first mirror 19a and a second tilt mechanism for adjusting the tilt of the second mirror 19b.

  The shift mechanism 102 includes a first shift mechanism that adjusts the shift of the first mirror 19a and a second shift mechanism that adjusts the shift of the second mirror 19b.

  The light 18 is adjusted by the beam adjusting mechanism 10, and then the condenser lens 12 is moved by the condenser lens moving mechanism 121, so that the light after passing through the optical lens 12 and the light that does not pass through the optical lens 12 are converted into the CCD camera 13. It is a mechanism that is irradiated and observed. Details of the tilt direction and the shift direction of the adjustment mirrors 19a and 19b will be described later with reference to FIG.

  FIG. 4 is an explanatory diagram of a beam adjustment method using the condenser lens 12. In FIG. 4, the condenser lens 12 and the CCD camera light receiving surface 20 are arranged such that the distance between them is the focal length 22. Further, the positions of the condenser lens center 25 and the CCD camera center 21 are aligned in advance.

  When parallel light 24 (light from infinity) is incident on the condenser lens 12, the light is collected at the CCD camera center 21 regardless of the position of the condenser lens 12. On the other hand, when the oblique light 23 is incident on the condenser lens 12, the light is irradiated to a position shifted from the CCD camera center 21.

  The beam tilt adjustment amount is calculated using the principle described above, and correction is performed by the beam adjustment mechanism 10 so that the parallel light 24 is obtained. After adjusting to the parallel light 24, the light is incident on the CCD camera light receiving surface 20 without passing through the condenser lens 12, and the shift adjustment amount of the beam is calculated. The beam adjustment mechanism 10 can correct the beam shift and tilt by correcting the light so that it converges on the center 21 of the CCD camera.

  FIG. 5 is a flowchart showing the adjustment operation of the irradiation optical system. In FIG. 5, when the beam correction operation is started (step 26), first, optical conditions are set (step 27), and when the condenser lens 12 is out of the optical path, it moves into the optical path.

  Then, the tilt amount is confirmed by the CCD camera 13 (step 28). If there is a deviation in step 28, tilt adjustment is performed by the beam adjusting mechanism 10 (step 29).

  If there is no deviation in step 28, the condenser lens 12 is moved out of the optical path without adjusting the beam tilt amount (step 30).

  After the condenser lens 12 is moved out of the optical path, the shift amount is confirmed by the CCD camera 13 (step 31).

  In step 31, if there is a deviation, the beam adjustment mechanism 10 performs a shift adjustment (step 32). If there is no deviation, the beam correction operation is terminated without adjusting the beam shift amount (step 33).

  As described above, in one embodiment of the present invention, the beam is passed through the condenser lens 12 by the condenser lens moving mechanism 121 and the tilt amount is adjusted so that the beam becomes parallel light. Since the CCD camera 13 detects and shifts the correction without passing through the condenser lens 12, there is no need to move a plurality of lenses or switch a plurality of mirrors as in the prior art. The irradiation position of the beam can be adjusted, and the adjustment process is reduced.

  Further, in the embodiment of the present invention, since the beam correction operation flow as in the prior art, that is, when the beam position is adjusted once, the relative positional relationship of a plurality of lenses may change. Therefore, it is not necessary to adjust the beam irradiation position, and the beam irradiation position can be adjusted easily and in a short time.

  FIG. 6 is a diagram showing a tilt amount confirmation image 34 and a shift amount confirmation image 35 displayed on the image display unit 403.

  6A, the tilt amount confirmation image 34 has a tilt amount (second tilt) perpendicular to the first tilt amount with the tilt amount in one direction (first tilt amount) as the X axis 36. The tilt amount is displayed with the amount) as the Y axis 37.

  Further, the screen is displayed on the screen by using a line (first line) 38 parallel to the X axis of the first tilt amount and a perpendicular line (second line) 39 at the center of the tilt amount confirmation image 34. Split display.

  The vicinity of the intersection 40 of the first line and the second line is an image 341 having no tilt amount deviation. If the image 342 is shifted in the X-axis direction of the tilt amount, adjustment is made in the X-axis direction. If the image 343 is shifted in the Y-axis direction of the tilt amount, adjustment in the Y-axis direction results in a shift in the tilt amount. It becomes possible to adjust.

  Thus, by displaying the image with the beam position adjusted near the intersection 40, the operator can easily know that the beam tilt amount has been correctly adjusted.

  In FIG. 6B, the same can be said for the shift amount confirmation image 35 as for the tilt amount confirmation image 34. The shift amount confirmation image 35 displays the shift amount with the shift amount (shift amount X) in one direction as the X axis 41 and the shift amount (shift amount Y) perpendicular to the shift amount X as the Y axis 42.

  Further, the screen is divided into four parts by using a line (first line) 43 parallel to the axis 41 of the shift amount X and a vertical line (second line) 44 at the center of the shift amount confirmation image 35. To do.

  The vicinity of the intersection 40 of the first line and the second line is an image 351 having no shift amount. If the image 352 is shifted in the X-axis direction, the shift amount is adjusted in the X-axis direction. If the image 353 is shifted in the Y-axis direction, the shift amount is shifted in the Y-axis direction. It becomes possible to adjust.

  Thus, by displaying the image with the beam position adjusted in the vicinity of the intersection 40, the operator can easily know that the beam shift amount has been correctly adjusted. For example, if the center of gravity of the beam position is calculated and the deviation from the center of the image is calculated to obtain the tilt amount and the shift amount, the beam deviation can be automatically adjusted without an operator. It is possible to constantly monitor the state of

  FIG. 7 shows a comparative view of a beam adjustment mechanism 702 using the condenser lens 12 and a beam adjustment mechanism 701 using a beam expander.

  The beam adjustment mechanism 701 using the beam expander will be described in detail. In FIG. 7A, light 703 passes through an optical axis adjusting fixed lens 704 and enters a beam expander 7067. The beam expander 707 has switching lenses 705a and 705b, and switching is performed by switching lens moving mechanisms 706a and 706b in order to switch to an arbitrary beam diameter.

  The light 703 is expanded by the beam expander 707, the light 703 is condensed by the condenser lens 12, and the beam is observed by the CCD camera 13.

  The configuration 702 of the beam adjusting mechanism using the condenser lens 12 according to the present invention will be described in detail. In FIG. 7B, the light 703 is taken in and out of the condenser lens 12 by the condenser lens moving mechanism 121 (selection of whether or not the light 703 passes through the condenser lens 12). 13, the beam having both the tilt amount and the shift amount can be observed as described above.

  Thus, in the case of the beam adjustment mechanism 702 using the condensing lens 12, the number of parts can be reduced and the adjustment process can also be reduced. In addition, by taking in and out the condenser lens 12, it is possible to observe not only the planar optical axis shift of the shift amount but also the tilt of the optical axis of the tilt amount.

  In addition, a stable apparatus state can be realized by automatically adjusting the beam tilt amount and the shift amount. Furthermore, conventionally, a lot of time is required for the adjustment of the irradiation optical system 2, but in the embodiment of the present invention, the two adjustment items of the tilt amount and the shift amount are as shown in the flowchart of FIG. It is possible to adjust the number of processes four times at most.

  In addition, the CCD camera 13 may be arranged at any position before the sample 5 is irradiated with light, so that the degree of freedom in mechanism design is increased. It is also possible to perform beam adjustment using reflected light obtained by irradiating the sample 5 with light. However, since the sample 5 is not necessarily flat, such as a patterned wafer or a glass substrate, the sample 5 Are not always detected at the same position.

  Thus, when the beam is adjusted using the reflected light, the field of view must be expanded according to the sample 5. On the other hand, when the beam is adjusted before irradiating the sample 5 with light, the sample 5 is not affected, so that the same position of the sample 5 can be irradiated with light.

  For example, it is possible to irradiate light on the same position of the sample 5 without being affected by component accuracy, component mounting error, lens aberration, variation in irradiation light position of the laser light source 1, and the like.

  The present invention can be applied to inspection of substrates other than wafers such as hard disks and liquid crystal substrates.

  Furthermore, the present invention can be applied to a wafer inspection apparatus that collects scattered light using an ellipsoidal sphere, and a wafer inspection apparatus with a pattern that inspects a defect of a wafer on which a pattern is formed, or an inspection of a defect of a hard disk. It can also be applied to a hard disk inspection device.

  Moreover, although the example mentioned above is an example of a defect inspection apparatus, the laser light source 1, the light quantity adjustment mechanism 9, the beam adjustment mechanism 10, the condensing lens 12, the condensing lens moving mechanism 121, and the CCD camera 13 shown in FIG. The beam image analysis unit 14 and the reflection means moving mechanism 500 can be configured as a light beam adjusting device.

  And when comprised as said light beam adjustment apparatus, the image display means 403 which displays the image etc. which were shown in FIG. 6 can be provided.

  DESCRIPTION OF SYMBOLS 1 ... Laser light source, 2 ... Irradiation optical system, 3 ... Conveyance system, 4 ... Inspection stage, 5 ... Sample (wafer), 6 ... Detection optical system, 7 ... Image processing system, 9 ... light quantity adjustment mechanism, 10 ... beam adjustment mechanism, 11 ... half mirror, 12 ... condensing lens, 13 ... CCD camera, 14 ... beam image analysis unit 15 ... Adjustment amount, 16 ... Mirror, 17 ... Detector, 18 ... Light, 19 ... Adjustment mirror, 20 ... CCD camera light receiving surface, 21 ... CCD camera Center, 22 ... focal length, 23 ... oblique light, 24 ... parallel light, 25 ... condenser lens center, 26 ... start of beam correction operation, 27 ... optical condition setting, 28 ..Checking CCD camera tilt amount, 29 ... Adjusting beam tilt with beam adjustment mechanism, 30 ... Move lens out of optical path, 31 ... Confirm CCD camera shift amount, 32 ... Adjust beam shift with beam adjustment mechanism, 33 ... End beam correction operation, 34 ... Tilt amount confirmation image, 35. .. Shift amount confirmation image, 36... X axis of tilt amount in one direction (first tilt amount), 37... Tilt amount perpendicular to the first tilt amount (second tilt amount) Y axis, 38... Line parallel to the first tilt amount axis (first line), 39... Line perpendicular to the first tilt amount axis (second line) 40... Intersection, 41... Shift amount X, 42... Shift amount Y, 43... Line parallel to the axis of shift amount X (first line), 44. Line perpendicular to the axis of the shift amount X (second line), 100... Illumination optical system, 101... Tilt (rotation) mechanism, 102. Shift mechanism, 103 ... Beam spot (illumination area), 104 ... Image sensor detection area, 121 ... Condensing lens moving mechanism, 200 ... Detection optical system, 201 ... Detection lens (objective) Lens), 202 ... spatial filter, 203 ... imaging lens, 204 ... zoom lens group, 205 ... image sensor, 206 ... observation optical system, 209 ... polarization beam splitter, 210 ... Branch detection optical system, 300 ... Stage unit, 301 ... X stage, 302 ... Y stage, 303 ... Z stage, 304 ... Theta stage, 305 ... Stage controller, 341... Image with no tilt amount shift, 342... Image with tilt amount shifted in the X axis direction, 343... Image with tilt amount shifted in the Y axis direction. 351: an image with no shift amount shift, 352: an image with shift amount shifted in the X-axis direction, 353 ... an image with shift amount shifted in the Y-axis direction, 400: control System 401: Control CPU unit 402 ... Signal processing unit 403 ... Display unit 404 ... Input unit 405 ... Storage unit 406 ... Image processing unit 500 ... Mirror movement mechanism for adjustment, 701... Beam adjustment mechanism using a beam expander, 702... Beam adjustment mechanism using a condensing lens, 703... Light, 704. 705... Switching lens, 706... Switching lens moving mechanism, 707.

Claims (11)

A light beam adjustment method in which a light beam from a light source is reflected by a reflection mirror to irradiate an imaging unit, and a reflection direction of the light beam by the reflection mirror is adjusted based on an irradiation position of the imaging unit of the light beam. There,
The light beam reflected from the reflection mirror is irradiated on the imaging means through a condenser lens, and the reflection angle of the reflection mirror is adjusted based on the irradiation position of the light beam,
The light beam reflected from the reflection mirror is irradiated on the imaging means without going through a condenser lens, and the irradiation position of the light beam on the reflection mirror is adjusted based on the irradiation position of the light beam,
A method of adjusting a light beam, comprising adjusting a reflection direction of the light beam by the reflection mirror. A light beam adjusting method for reflecting a light beam from a light source by a reflecting mirror, irradiating an imaging unit, and adjusting a reflection direction of the light beam by the reflecting mirror based on an irradiation position of the light beam to the imaging unit Because
The reflection angle of the reflection mirror is such that the light beam reflected from the reflection mirror irradiates the imaging means via a condenser lens, and the irradiation position of the light beam to the imaging means becomes a predetermined position. Adjust the tilt to adjust
The condensing lens is moved, the light beam reflected from the reflecting mirror is irradiated to the imaging means without passing through the condensing lens, and the irradiation position of the light beam to the imaging means is a predetermined position. So that the shift adjustment to adjust the irradiation position of the light beam to the reflection mirror,
A method of adjusting a light beam, comprising adjusting a reflection direction of the light beam by the reflection mirror. A light source that generates a light beam;
A light beam reflecting means for reflecting the light beam generated from the light source;
Imaging means to which the light beam reflected by the light beam reflecting means is irradiated;
A condenser lens;
Condensing lens moving means for moving the condensing lens in the optical path from the light beam reflecting means to the imaging means and out of the optical path;
Beam image analysis means for determining an irradiation position of the light beam to the imaging means;
Reflecting means for performing tilt adjustment for adjusting the reflection angle of the light beam reflecting means and shift adjustment for adjusting the irradiation position of the light beam to the light beam reflecting means based on the determination of the beam image analyzing means. A moving mechanism;
A light beam adjusting device comprising:   4. The light beam adjusting apparatus according to claim 3, wherein the reflecting means moving mechanism transmits the light beam reflected from the light beam reflecting means via the condenser lens based on the determination of the beam image analyzing means. By illuminating the imaging means, tilt adjustment is performed to adjust the reflection angle of the light beam reflecting means so that the irradiation position of the light beam to the imaging means becomes a predetermined position, and the condenser lens is moved. The light beam reflected from the light beam reflecting means is irradiated on the imaging means without passing through a condenser lens, and the irradiation position of the light beam on the imaging means is a predetermined position. A light beam adjustment characterized by performing a shift adjustment for adjusting an irradiation position of the light beam to the light beam reflecting means, and adjusting a reflection direction of the light beam by the light beam reflecting means. Apparatus.   5. The light beam adjusting device according to claim 4, wherein the imaging means is a CCD camera.   5. The light beam adjusting apparatus according to claim 4, wherein the light beam reflecting means includes a first reflecting mirror and a second reflecting mirror facing each other.   7. The light beam adjusting apparatus according to claim 6, wherein the reflecting means moving mechanism includes a first tilt mechanism that adjusts the tilt of the first reflecting mirror and a second tilt that adjusts the tilt of the second reflecting mirror. A light beam adjusting apparatus comprising: a tilt mechanism; a first shift mechanism that performs shift adjustment of the first reflection mirror; and a second shift mechanism that performs shift adjustment of the second reflection mirror.   5. The light beam adjusting apparatus according to claim 4, further comprising display means for displaying an image picked up by the image pickup means.   9. The light beam adjusting apparatus according to claim 8, wherein the display unit displays a tilt amount confirmation image and a shift amount confirmation image, and the tilt amount confirmation image and the shift amount confirmation image are divided into four lines by two lines. A light beam adjusting device which is divided and displayed. In a defect inspection apparatus for inspecting a defect on the sample surface by irradiating a predetermined position of the sample arranged on the inspection stage with a light beam and detecting the light reflected from the sample surface,
A light source that generates a light beam;
A light beam reflecting means for reflecting the light beam generated from the light source;
Imaging means to which the light beam reflected by the light beam reflecting means is irradiated;
A condenser lens;
Condensing lens moving means for moving the condensing lens in the optical path from the light beam reflecting means to the imaging means and out of the optical path;
Beam image analysis means for determining an irradiation position of the light beam to the imaging means;
Reflecting means for performing tilt adjustment for adjusting the reflection angle of the light beam reflecting means and shift adjustment for adjusting the irradiation position of the light beam to the light beam reflecting means based on the determination of the beam image analyzing means. A moving mechanism;
A half mirror that transmits part of the light beam reflected by the light beam reflecting means toward the imaging means and reflects the other part of the light beam;
A reflecting mirror that irradiates the light beam reflected by the half mirror to a predetermined position of the sample disposed on the inspection stage;
An image processing unit that detects light reflected from the sample surface and inspects for defects on the sample surface;
An image display unit for displaying an image processed by the image processing unit;
A defect inspection apparatus comprising:   11. The defect inspection apparatus according to claim 10, wherein the reflecting means moving mechanism is configured to cause the light beam reflected from the light beam reflecting means to pass through the condenser lens based on the determination of the beam image analyzing means. Irradiate the imaging means, perform tilt adjustment to adjust the reflection angle of the light beam reflecting means so that the irradiation position of the light beam to the imaging means becomes a predetermined position, move the condenser lens, The light beam reflected from the light beam reflecting means is irradiated on the imaging means without passing through a condensing lens, and the light beam is applied to the imaging means so that the light beam is irradiated at a predetermined position. A defect inspection apparatus characterized by performing shift adjustment for adjusting an irradiation position of the light beam to the beam reflecting means, and adjusting a reflection direction of the light beam by the light beam reflecting means.

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