JP2009121547A5 - - Google Patents

Claims (9)

A first flow path and a second flow path extending in an axial direction of the flow path respectively from an inlet and an outlet formed on two opposing side surfaces, respectively, and communicated with the first flow path and the second flow path formed in the upper part. An opening, a main body provided with a partition wall having a valve seat formed at the top extending from the bottom surface of the first flow path and the second flow path toward the opening, and attached to the top of the main body A bonnet, a diaphragm disposed so as to cover the opening of the main body and having a peripheral edge sandwiched between the main body and the bonnet, and a drive unit for driving the diaphragm, wherein the diaphragm In the diaphragm valve adapted to be pressed against and separated from the valve seat by the drive unit,
Both side surfaces of the partition wall connecting the valve seat formed at the upper end of the partition wall and the bottom surfaces of the first channel and the second channel are bottom surfaces of the first channel and the second channel. A diaphragm valve characterized by comprising a concave curved surface extending from the inflection point to an inflection point and a convex curved surface extending from the inflection point to an edge of the valve seat.   2. The diaphragm valve according to claim 1, wherein a chamfered portion is provided at an intersection between an inner peripheral surface of the opening and a ceiling surface of the first flow path and the second flow path.   The diaphragm valve according to claim 2, wherein an angle of the chamfered portion is 15 to 30 degrees with respect to a flow path axis, and a dimension in a height direction of the chamfered portion is 2 mm or more.   The diaphragm valve according to any one of claims 1 to 3, wherein an inclination angle of a side surface of the partition wall at the inflection point is 45 ° or less with respect to a flow path axis.   The diaphragm valve according to any one of claims 1 to 4, wherein an inter-surface dimension L of the diaphragm valve and an inner diameter D of the opening are determined so as to satisfy a relationship of L≤3D + 95 (mm). .   The said convex curved surface and the said concave curved surface are formed in circular arc shape, The radius of this convex curved surface is defined so that it may become smaller than the radius of this concave curved surface. The diaphragm valve according to any one of 5. The diaphragm according to claim 6, wherein a radius R ₁ of the convex curved surface and a radius R ₂ of the concave curved surface are determined so as to satisfy a relationship of 1.0R ₁ <R ₂ ≦ 1.5R _1. valve.   The diaphragm valve according to any one of claims 1 to 7, wherein a surface roughness Ra of inner peripheral surfaces of the first flow path and the second flow path is 6.3 µm or less.   The diaphragm valve according to any one of claims 1 to 8, wherein the driving unit is a manual type, an air driving type, or an electric driving type.