JP2006120659A - Substrate carrier - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To achieve a compact arm structure for precisely carrying a board conveying bed that is provided at the tip of a carrying arm to which two sets of parallel links are connected in a stable state. <P>SOLUTION: A turning arm 10 has first and second carrying arms 100, 200 to which two sets of parallel links are connected, and integrates an arm 111 in the first carrying arm 100 to which turning operation is given and an arm 211 in the second carrying arm 200 at a prescribed bending angle, when synchronizing the linear move of the first and second carrying arms 100, 200 and the retraction operation of the other. A prescribed turning operation is given from one drive source of the coaxial drive source to the turning arm 10, and synchronous turning operation in the same direction is given from the other drive source to one of the first and second carrying arms 100, 200. The conveying bed of the carrying arm to which the turning operation is given in the first or second carrying arm is retracted, and the conveying bed of the other carrying arm is moved linearly. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a substrate transfer apparatus, and more particularly to a substrate transfer apparatus that has a twin arm structure having two sets of transfer arms composed of parallel links, and can transfer a substrate with high accuracy in a compact and stable state.

  In general, a semiconductor manufacturing apparatus includes a substrate transfer apparatus that holds a substrate such as a wafer by a transfer arm that operates in a predetermined sequence and moves the substrate to a predetermined position. When this type of substrate transfer apparatus is used in a multi-chamber type semiconductor manufacturing apparatus, it is required to perform various transfer operations with high accuracy and speed. In order to meet this demand, the applicant already has a twin arm consisting of two parallel links with durability, and each transfer arm operates efficiently, so that the substrate in a multi-chamber type semiconductor manufacturing apparatus, etc. Has proposed a highly durable substrate transfer apparatus that can perform high-speed transfer at high accuracy (see Patent Document 1).

  In addition, in the same multi-chamber type semiconductor manufacturing equipment, the adoption of twin arms that are driven by the interlocking operation of multiple small drive motors enables efficient transfer of substrates between the transfer chamber and the process chamber, thereby reducing costs. A transfer robot that aims to achieve this has also been proposed (see Patent Document 2).

JP 2001-185596 A. Japanese Patent Laid-Open No. 10-249757.

  By the way, in the above-mentioned patent document 1, in order to realize the expansion and contraction of the transfer arm, a linear guide for bending the two sets of parallel links with high accuracy is used. Since this linear guide includes a synchronization link, the number of members is large, the joint portion is thick, and it is difficult to reduce the thickness of the arm bending portion. In addition, the linear guide has a structure in which the bearing ball continuously rolls along a linear internal path, but there is a risk that it may be inferior in lubricity compared to a conventional ball bearing with a short rolling path, and the smoothness of the arm. When bending and extension are required, it is desired to use a proven ball bearing in a movable part such as each joint.

  On the other hand, in Patent Document 2, a gear mechanism is used for the bending operation of the parallel links, and these meshing gears are designed with a predetermined backlash. There is also a risk of occurrence. For this reason, there is a problem that the conveyance accuracy is lowered in the vacuum process, and high-precision positioning cannot be expected. An embodiment in which a belt is wound around a pulley to synchronize the rotation angle has also been proposed. However, since the belt or the like is repeatedly bent when it is wound around the pulley, there is a risk that fatigue failure will occur early. It is also conceivable to increase the diameter of the pulley used in order to ensure the life of the belt or the like. In this case, the pulley has a large diameter, and it is difficult to reduce the size of the link mechanism.

  Further, in Patent Document 2, as a simultaneous operation of twin arms, one arm is extended by a linear motion, and at the same time, another arm that takes a retreat operation is performed by turning the other arm to perform a retreat operation. Are required to be driven independently. For this reason, it must be designed as a 4-axis drive system substrate transfer device, which is an obstacle to downsizing the device.

  Therefore, the object of the present invention is to solve the above-mentioned problems of the prior art, and the bent portion of the parallel link of each arm of the twin arm has a configuration capable of realizing a compact and highly accurate operation, and is a high temperature process under vacuum. It is an object of the present invention to provide a substrate transfer apparatus that can be extended and contracted and rotated with high accuracy.

  In order to achieve the above object, according to the present invention, a short link of a first parallel link and a short link of a second parallel link are shared and connected, and a turning motion applied to an arm end of the first parallel link. A first transfer arm that linearly moves a transfer table provided at a short node on the free end side of the second parallel link by changing an angle formed by the arm of the first parallel link and the arm of the second parallel link; A second transfer arm that is substantially the same shape as the first transfer arm and performs the same operation, and a coaxial drive source that drives the first transfer arm and the second transfer arm are provided. By applying an operation from the coaxial drive source, In the substrate transfer apparatus, wherein the first transfer arm and the second transfer arm perform a linear movement of one transfer table and a retracting operation of the other transfer table in synchronization, the first parallel link of the first transfer arm The swivel motion And the arm to which the turning operation of the first parallel link of the second transport arm is given is a turning arm integrally formed with a predetermined bending angle, and the turning arm is provided with a predetermined distance from one drive source of the coaxial drive source. And the first or second transport arm is imparted with the swivel motion in the same direction in synchronization with the other drive source of the coaxial drive source. Among the arms, the transfer platform of the transfer arm to which the turning motion is applied is retracted, and the transfer platform of the other transfer arm is moved linearly.

  At this time, in the first transfer arm and the second transfer arm, the first fulcrum that connects each arm of the first parallel link by a predetermined amount from each joint constituting the shared short joint is connected. It is preferable that the connecting member is connected to the second connecting member that connects between the intermediate fulcrum on a predetermined amount on each arm from the joint of each second parallel link by a regulating member.

  Furthermore, it is preferable that the restricting member is a plate-like spring member spanned between the first connecting member and the second connecting member.

  As described above, according to the substrate transfer device of the present invention, a compact twin-arm device configuration can provide a compact device, and can transfer a substrate or the like with high accuracy, and also has heat resistance. It has excellent lubrication characteristics of the movable part, and has the effect of maintaining a clean environment for a long time under vacuum conditions.

  Hereinafter, as the best mode for carrying out the substrate transfer apparatus of the present invention, the following embodiments will be described with reference to the accompanying drawings.

Hereinafter, an embodiment of a substrate transfer apparatus of the present invention will be described with reference to the accompanying drawings. [Configuration of twin arm]
As will be described later, the substrate transfer apparatus of the present invention has two sets in which the free end of the link performs a predetermined straight movement by the deformation operation of the parallel link mechanism in which the two sets share a short joint. Deformation operation of the transfer arm and the parallel link mechanism that constitutes each transfer arm, and extension operation, retraction operation, and the entire twin arm of each of the two sets of transfer arms (hereinafter, the two sets of transfer arms are referred to as twin arms) It is comprised from the coaxial drive part which enables the turning operation | movement of. In the following description, the two pairs of transfer arms 100 and 200 constituting the twin arm will be described with 1XX and 2XX respectively attached to the members constituting the twin arms.

[Configuration of drive unit]
FIG. 1 is a front cross-sectional view for explaining the mechanism configuration of each part of the substrate transfer apparatus. The substrate transfer device 1 is supported by an opening 3 formed in the fixed portion 2 via a base plate 4 and is installed so that the entire twin arm is located in the vacuum atmosphere 5. The base plate 4 is coaxially arranged with the central axis O as the center, and three rotational drive shafts R ₁ , R ₂ , R ₃ that can be independently rotationally driven via bearings 6, 7, 8. It is fixed.

These rotational drive shafts R ₁ , R ₂ , R ₃ are solid rotational drive shaft R ₃ , and this solid rotational drive shaft R ₃ is rotatably supported by ball bearings 6 and can be rotationally driven independently. Hollow cylindrical rotary drive shaft R ₂ , and hollow cylindrical rotary drive shaft R ₂ are rotatably supported by ball bearings 7, and are hollow cylinders that can be rotationally driven with respect to base plate 4 via ball bearings 8. consists Jo rotary drive shaft R ₁ Tokyo, in each drive shaft, the rotational angle taken independently or synchronized by the rotation control unit (not shown), the rotational angular velocity, the rotational direction is controlled with high precision.

Of these rotary drive shafts, the swivel arm 10 is fixed to the upper end of the hollow cylindrical rotary shaft R ₁ located on the outermost periphery and supported by the base plate 4. In this embodiment, the swivel arm 10 is composed of a V-shaped plate having a folding angle of 120 ° as shown in the plan views of FIGS. 2 and 4, and rotates as the hollow cylindrical rotary shaft R ₁ is driven to rotate. It turns around the central axis O. The swivel arm 10 is integrally formed as one of the first parallel links 110 and 210 of the first transfer arm 100 and the second transfer arm 200 constituting a twin arm, which will be described in detail later. It has been incorporated. Thus, the twin arm is bent by the turning operation of the turning arm 10 and the cooperation (including one drive and one stop state) of the drive shafts R ₁ , R ₂ and R ₃ of the transfer arms 100 and 200. In the state (refer to FIG. 2), the turning operation with the transfer arms 100 and 200 integrated, and the extension operation of one transfer arm 100 (200) and the retracting operation of the other transfer arm 200 (100) are realized simultaneously. can do. Note that the swivel arm 10 is represented by the arms 111 and 211 when viewed as a component of the parallel links 110 and 210.

[Configuration of the first transfer arm]
The first transfer arm 100, as shown in FIGS. 1 and 2, a circular plate 109 which is fixed to the upper end of a hollow cylindrical rotary drive shaft R ₂ that the rotation center axis O coincides with the center axis of the device, one end Is an arm 112 supported by a bearing (not shown), and an imaginary line connected by the rotation center axis O and the bearing of the arm 112 is a short section 130, which faces the short section 130, The first parallel link 110 that forms a parallelogram with a virtual short link 131 that connects the end of one arm 111 of the arm 10 and the arms 111 and 112 of the first parallel link 110 are provided with upper and lower steps to be shared. The first parallel link 11 and the second parallel link 120 in which the ends of two parallelly arranged arms 121 and 122 supported as rotation axes are respectively connected to both end joints 58 and 59 of the virtual short node 131 to be connected. The lower surface attached to the end fulcrums 54 and 55 provided at the member ends of the arms 111 and 112 slightly extending the joints 58 and 59 at both ends of the virtual short bar 131 via bearings (not shown). Upper surface connection attached via a bearing (not shown) to the intermediate fulcrum 56, 57 located slightly inside the connection plate 52 and the joints 58, 59 on the arms 121, 122 side of the second parallel link 120 by a predetermined amount. The parallel holding part 50 which consists of the plate 51, the plate-like spring 53 as a regulating member fixed to the outer end of the lower surface connecting plate 52 and the upper surface connecting plate 51, and the opposite ends of the joints 58 and 59 of the second parallel link 120 And an end effector 171 on which a transport object such as a substrate (not shown) is placed is connected by a bearing (not shown) so that a part thereof functions as the virtual short bar 132. It is comprised from the conveyance stand plate 170 connected. For the sake of explanation, a part of FIG. 2 is enlarged to show the link mechanism around the virtual short bar 131.

[Configuration of second transfer arm]
The second transfer arm 200 has substantially the same shape as the first transfer arm 100 in plan view, but in order to avoid interference with the first transfer arm 100 in the height direction, the height position of each component member is It has been decided. That is, as shown in FIGS. 1 and 2, the second transfer arm 200 is coaxially disposed through the bearing 6 inside the hollow cylindrical rotation drive shaft R ₂ whose rotation center axis O coincides with the apparatus center axis. An imaginary line connected to the circular plate 209 fixed to the upper end of the solid rotation drive shaft R ₃ formed by the arm 212 supported at one end by a bearing (not shown) and the rotation center axis O and the bearing of the arm 212. Is a short node 230, which is opposed to the short node 230 and connects the end of the arm 212 and the end of one arm 211 of the swivel arm 10 (an enlarged view of the virtual short 131 in FIG. 2). And the joints 68 and 69 of the short node 231 that are shared by providing upper and lower steps with the arms 211 and 212 of the first parallel link 210, respectively. Supported as rotating shaft A second parallel link 220 in which the ends of the two arms 221 and 222 arranged in parallel are connected to each other, and an arm 211 that slightly extends the joints 68 and 69 at both ends of the short node 230 of the first parallel link 210. The lower surface connection plate 62 attached to end fulcrums 64 and 65 provided at the member ends of 212 via bearings (not shown), and the joints 68 and 69 on the arms 221 and 222 side of the second parallel link 220. The upper surface connection plate 61 attached to the intermediate fulcrums 66 and 67 located slightly inside by a predetermined amount via bearings (not shown), and the lower surface connection plate 62 and the restriction fixed to the outer ends of the upper surface connection plate 61 It is located at the opposite end of the parallel holding part 60 composed of the plate spring 63 as a member and the joints 68 and 69 of the second parallel link 220, and a part thereof functions as the short node 232. It is connected by a bearing (not shown), and a transport block plate 270. end effector 271 is articulated for mounting the conveying object such as a substrate, not shown.

  The shapes of the above-described end effectors 171, 271 and transfer table plates 170, 270 are exactly the same in the first transfer arm 100 and the second transfer arm 200, but in the present embodiment, they are schematically shown for the sake of simplification. The shape is shown. The shape may be set so as to have an optimal fork shape or the like according to the size, weight, etc. of the substrate to be placed, liquid crystal glass or the like (not shown). As will be described later, as the material of the members constituting each parallel link, various metal materials such as stainless steel and aluminum can be appropriately selected in order to achieve a predetermined rigidity and mass reduction effect. Needless to say, the shape of the arm can be set to an appropriate size and shape as long as it can be held via a bearing at a predetermined support position and there is no interference of members in the deformation of the link shape.

[Explanation of extension / retraction operations in the substrate transfer device]
An example of the extension / retraction operation of the twin arm of the substrate transfer apparatus of the present invention will be schematically described with reference to FIGS. As shown in FIG. 2, the twin arm in the apparatus of the present invention is in an initial state, and the first transfer arm and the second transfer arm 200 are in a predetermined bent state, and the respective transfer table plates do not interfere vertically. It has a substantially rhomboid shape that is symmetrical with respect to the X-axis in plan view, and that appears to overlap. As shown in FIGS. 2 to 4, when a predetermined rotational force is applied to the drive rotation shaft by the drive unit, the second transport arm 200 has a short end (that is, a transport plate) on the free end side. It extends so as to move linearly along the X-axis direction. The configuration of the parallel holding portion of the parallel link at this time will be described later.

The second transfer arm 200 has substantially the same shape as the first transfer arm 100 in plan view, but in order to avoid interference with the first transfer arm 100 in the height direction, the height position of each component member is It has been decided. That is, as shown in FIG. 1 and FIG. 2, when the second transfer arm 200 is disposed coaxially with a hollow cylindrical rotary drive shaft R ₁ positioned on the outermost side and a bearing on the inner side thereof, a hollow cylindrical shape is provided. The rotation shaft R ₂ is synchronized with the rotation drive shaft R ₂ and rotated in the same direction (clockwise direction), while the solid rotation drive shaft R ₃ is stopped. As a result, the second parallel link of the second transfer arm 200 is rotated by 2θ in a state where the turning arm 10 (arms 111 and 211) is rotated by θ in the direction of the arrow, and as shown in FIG. The plate 270 moves linearly in the X-axis direction, and there is a timing at which the first parallel link 210 and the second parallel link 220 overlap in the vertical direction (see FIG. 3). Finally, as shown in FIG. 4, the end effector 271 of the second transfer arm 200 reaches the farthest portion from the rotation center axis O. At this time, the first transfer arm 100 is in a retracted state.

[Configuration of parallel holding part]
The link model diagrams of FIGS. 6 to 8 schematically show the overall operation of the substrate transfer apparatus described above (FIG. 2: operation from the initial state to FIG. 4: extended state) in a diagram. . 5A to 5C show link model diagrams of the linear movement operation of the second transfer arm 200. FIG.

  First, the structure of the parallel holding part as a connection part of both the links for the linear motion of the first parallel link and the second parallel link will be described with reference to FIGS. In FIG. 5, in the illustrated second transfer arm 200, only 2XX XX is given for simplification of symbols, and English characters are given to the vertices of each link. The first parallel link 10 is composed of arms 11 and 12, a rotation center axis O and a short node 30 between the joints A and B, and a lower surface connecting plate 62 that connects the end fulcrums C and D. On the other hand, the second parallel link 20 includes the arms 21 and 22, the short nodes 32, and the upper surface connection plate 61 that connects the intermediate fulcrums I and J near the joints E and F of the arms 11 and 22. In this structure, the end portion of the lower surface connecting plate 62 and the end portion of the upper surface connecting plate 61 are connected by a plate spring 63 having a predetermined rigidity as a restricting member, whereby the parallel links 10 and 20 are deformed. A parallel holding portion 60 is configured to reliably hold the linear movement of the transport table plate 70 in the X-axis direction. 5A to 5C schematically show the positional relationship of the parallel holding portion 60 in each state viewed from the side surfaces of the upper surface connection plate 61, the lower surface connection plate 62, and the plate spring 63.

  In the present invention, a steel plate having a thickness of 0.2 mm and a width of 80 mm is used as a plate spring as a restricting member, and the ends of the plate spring are bolts (not shown) on the end surfaces of the upper surface connection plate 61 and the lower surface connection plate 62. (See Fig. 5 (a) and others). Further, when the substrate transfer apparatus 1 is bent or extended, a straight line (CD) connecting the end fulcrums C and D and a straight line (IJ) connecting the intermediate fulcrums I and J are located in the Y-axis direction with the joints E and F interposed therebetween. The relative position changes by the same amount. The above-described leaf spring 63 is set to a margin length that can absorb the displacement in the Y direction of the coupling plates 61 and 62 caused by the relative position change. The restriction member is not limited to the above-mentioned dimensions as long as it is a member having torsional rigidity capable of absorbing the displacement in the Y direction and restraining the displacement in the X direction. Needless to say, it can be done. In addition, various linear guides, link mechanisms, and the like can be used as long as the mechanism can achieve the same displacement regulation and achieve the same effect.

  Further, as another embodiment of the parallel holding portion 60 formed in the connection between the first parallel link 10 and the second parallel link 20 described above, the end fulcrums I and J are on the center lines on the arms 21 and 22, respectively. The joints E and F are provided at positions extended by a predetermined amount, and a flat parallelogram is formed at the four points of the joints E and F and the end fulcrums I and J. Similarly, the intermediate fulcrums C and D are respectively connected to the arms. 11 and 12 may be provided at bearing positions arranged on the arms 11 and 12 close to the joints E and F on the center line on the center line 11 and 12, so that a parallelogram of the same shape may be formed.

Hereinafter, extension and retraction operations by the twin arms of the substrate transfer apparatus 1 described above will be described with reference to FIGS. Note that the alphabetical symbol of the link apex on the first transfer arm 100 side will be described by subscript 1 and the second transfer arm 200 side will be appended with subscript 2.
From the initial state of FIG. 2, the hollow cylindrical rotary drive shaft R ₁ that supports the swivel arm 10 on the outermost side is coaxially arranged inside the hollow cylindrical rotary drive shaft R _1, and the circular plate is supported at the upper end. and a hollow cylindrical rotary drive shaft R _2, in synchronization with turning in the same direction (clockwise), during the stop state actual rotation drive shaft R _3. By this operation, the turning arm 10 fastened to the upper end of the rotation drive shaft R ₁ rotates around the rotation center axis O. As a result, the first parallel link 210 of the second transport arm 200 has Since the arm 11 rotates while the direction is fixed, as shown in FIGS. 6 to 8, the parallelogram (□ A ₂ B ₂ E ₂ F ₂ ) and the parallelogram (□ F ₂ E ₂ C). ₂ D ₂ ) is transformed from a flat quadrangle (FIG. 6) to a rectangle (FIG. 7) to a flat quadrangle (FIG. 8) according to the turning motion. However, as described above, the side I ₂ J ₂ and the side C ₂ D ₂ are restrained from shifting in the X-axis direction by the parallel holding portion 60, so that the parallelogram (□ F ₂ E ₂ I ₂ J ₂ ) is deformed, and the parallelogram (□ G ₂ H ₂ E ₂ F ₂ ) is also deformed. Because of this time _{A 2 F 2 = B 2 E} 2 = G 2 F 2 = H 2 E 2 and _{D 2 F 2 = C 2 E} 2 = J 2 F 2 = I 2 E 2 the relationship, sides G ₂ Since H ₂ is always located on the side A ₂ B ₂ , that is, on the trajectory of the short node 30, the transport plate 270 can linearly move on the line C in the direction of the arrow X.

On the other hand, as described above, when the hollow cylindrical rotary drive shaft R ₁ and the hollow cylindrical rotary drive shaft R ₂ are synchronized and rotated in the same direction, the solid rotary drive shaft R ₃ is stopped. For the first transfer arm 100, the parallelogram (□ A ₁ B ₁ E ₁ F ₁ ) of the first parallel link 110 and the parallelogram (□ G ₁ H ₁ E ₁ F ₁ ) of the second parallel link 120 are used. ) Is the same as the swiveling operation of the carrier plate 170 as a result of the retreating operation from the initial state. The twin arms finally have the positional relationship shown in FIG.

Note that the above-described extending and retracting operations of the twin arms cause the first transfer arm 100 and the second transfer arm 200 to operate in opposite directions, that is, support the swivel arm 10 on the outermost side from the initial state of FIG. The hollow cylindrical rotary drive shaft R ₁ and the solid rotary drive shaft R ₃ located on the innermost side are synchronized and rotated in the same direction (counterclockwise direction), and the hollow cylindrical rotary drive shaft R 3 By setting ₂ to the stop state, as shown in FIG. 9, the first transfer arm 100 can be extended and the second transfer arm 200 can be retracted.

Moreover, the actual rotation drive shaft R ₃ in a hollow cylindrical rotary drive shaft R ₁ a hollow cylindrical rotary drive shaft R _2, when pivoted in the same direction all synchronized to the first transfer arm 100 first The two transfer arms 200 can rotate the whole arm in a state in which each arm shape and the mutual relation are maintained.

  In the above explanation, for example, in FIG. 2, considering the interference such as the set member width, the turning angle of the turning arm is set to about 120 °, and the parallel link is turned when the turning arm rotates about θ = about 60 °. Has been described by taking as an example a model that rotates about 120 ° (= 2θ) from the initial angle, but as in the other embodiments shown in FIGS. 10 and 11, for example, the links shown in FIGS. Even in the operation process of the link mechanism based on the model diagram, by appropriately designing the initial angle and arm shape formed by the arm member, it is possible to operate while avoiding interference between the members during operation of the arm member. This makes it possible to realize more accurate and efficient substrate conveyance.

The cross-sectional view which showed typically one Example of the board | substrate conveying apparatus by this invention. The top view which showed the initial state of the twin arm shown in FIG. The top view which showed the expansion | extension and retraction | saving process of the twin arm shown in FIG. The top view which showed the expansion | extension state and retracted state of the twin arm shown in FIG. The state explanatory drawing which showed the bending | flexion and expansion | extension state of the arm by a link model figure in steps. The link model figure which showed the initial state shown in FIG. 2 with the diagram. The link model figure which showed the expansion | extension and retraction | saving process shown in FIG. 3 with the diagram. The link model figure which showed the expansion | extension state and evacuation state which were shown in FIG. 4 with the diagram. FIG. 5 is a plan view showing an extended state and a retracted state by an arm opposite to the case shown in FIG. 4. The top view which showed the initial state by the other Example of a twin arm. The top view which showed the expansion | extension state and retracted state of the twin arm shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Substrate transfer apparatus 4 Base plate 10 Turning arm 100 1st transfer arm 200 2nd transfer arm 110,120,210,220 Parallel link 111,112,121,122 Arm 211,212,221,222 Arm 50,60 Parallel Holding portions 54, 55, 64, 65 End fulcrums 52, 62 Lower surface connecting plates 51, 61 Upper surface connecting plates 53, 63 Leaf springs 130, 230 Virtual short bars 131, 231 Short bars 170, 270 Carrying plate R _i drive rotation Axis (i = 1,2,3)

Claims (3)

The short link of the first parallel link and the short link of the second parallel link are connected in common, and the arm of the first parallel link and the second are connected by a turning motion applied to the arm end of the first parallel link. A first transfer arm that linearly moves a transfer table provided at a short node on the free end side of the second parallel link by changing an angle formed by the arms of the parallel link; and substantially the same shape as the first transfer arm; A second transfer arm that operates, and a coaxial drive source that drives the first transfer arm and the second transfer arm are provided, and the first transfer arm and the second transfer arm are provided by applying an operation from the coaxial drive source. In the substrate transfer apparatus in which the linear movement of one transfer table and the retreat operation of the other are performed in synchronization with each other,
A swivel arm in which an arm to which a swiveling operation of the first parallel link of the first transfer arm is applied and an arm to which a swiveling operation of the first parallel link of the second transfer arm is provided are integrally formed with a predetermined bending angle. And a predetermined swivel operation is given to the swivel arm from one drive source of the coaxial drive source, and either the first or second transfer arm is synchronized with the other drive source of the coaxial drive source. A swiveling motion in the same direction is applied, and the transport base of the transport arm to which the swivel motion is imparted is retracted and the transport base of the other transport arm is linearly moved out of the first or second transport arms. A substrate transfer device.   In the first transfer arm and the second transfer arm, a first connection for connecting between the end fulcrums obtained by extending the arms of the first parallel links by a predetermined amount from the joints constituting the shared short nodes. 2. A member and a second connecting member that connects intermediate fulcrums on a predetermined amount on each arm from the joint of each of the second parallel links is connected by a restricting member. The board | substrate conveyance apparatus of description.   3. The substrate transfer apparatus according to claim 1, wherein the restricting member is a plate-like spring member spanned between the first connecting member and the second connecting member.

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