JP2006090870A - Micro fluid device - Google Patents

Micro fluid device Download PDF

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JP2006090870A
JP2006090870A JP2004277296A JP2004277296A JP2006090870A JP 2006090870 A JP2006090870 A JP 2006090870A JP 2004277296 A JP2004277296 A JP 2004277296A JP 2004277296 A JP2004277296 A JP 2004277296A JP 2006090870 A JP2006090870 A JP 2006090870A
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light
microfluidic device
bubbles
flow path
bubble
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JP4442884B2 (en
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Toshiji Shiraishi
利治 白石
Koichi Ono
航一 小野
Teruo Fujii
輝夫 藤井
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Aida Engineering Ltd
Enplas Corp
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Enplas Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a micro fluid device capable of controlling the generation number of bubbles and a size of the bubble, capable of flow-controlling a sample by simple structure, and allowing repeated use. <P>SOLUTION: A photo-absorber 8 exhibiting photo-absorptivity higher than other parts is arranged in a midway of a micro flow passage 5 through which a liquid flows, and light is emitted to the photo-absorber 8 from a light introducing part 19 of a light irradiation means 11 arranged opposedly with the micro flow passage 5 at a distance therefrom. The liquid in the micro flow passage 5 positioned with the photo-absorber 8 is heated to generate the bubbles 10 in the liquid. The size of the bubble is changed by controlling a light emission amount from the light introducing part 19 of the light irradiation means 11, so as to change a flow passage cross-sectional area of the micro flow passage 5. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

この発明は、生化学や分析化学等又は医学の分野等において、微量試料の混合、分離、分析等を行うために使用されるマイクロ流体デバイスに関し、特に、微量試料が流動する微小流路の流量制御を簡単に行えるようにしたマイクロ流体デバイスに関するものである。   The present invention relates to a microfluidic device used for mixing, separating, analyzing, and the like of a minute sample in biochemistry, analytical chemistry, etc. or in the medical field, and in particular, the flow rate of a minute channel through which the minute sample flows. The present invention relates to a microfluidic device that can be easily controlled.

近年、ガラス製又はプラスチック製のマイクロチップの内部に流路、反応部、分離部、検出部等の機能を有するミクロな空間を形成し、微量の試料をマイクロチップ内において高速に処理するマイクロ流体デバイスの開発が進んでいる。   In recent years, a microfluid that forms a micro space having functions such as a flow path, a reaction section, a separation section, and a detection section inside a glass or plastic microchip and processes a small amount of sample at high speed in the microchip. Device development is progressing.

（第１従来例）
図１２は、このようなマイクロ流体デバイス１０１であって、反応槽部１０２から分離部１０３に流動させる試料１０４の流動制御を、反応槽部１０２内に収容したガラスビーズや高分子ビーズ等の固体微粒子（以下、単にビーズと略称する）１０５で行うようにしたものである（特許文献１参照）。 (First conventional example)
FIG. 12 shows such a microfluidic device 101 in which the flow control of the sample 104 that flows from the reaction vessel 102 to the separation unit 103 is controlled by a solid such as glass beads or polymer beads contained in the reaction vessel 102. This is performed with fine particles (hereinafter simply referred to as beads) 105 (see Patent Document 1).

（第２従来例）
また、図１３は、マイクロ流体デバイスとして利用可能な液体搬送装置２０１を示すものである。この図１３に示す液体搬送装置２０１は、第１の流路２０２と第２の流路２０３が第３の流路２０４に対向するように開口しており、第１の流路２０２の開口部近傍と第２の流路２０３の開口部近傍とにそれぞれヒータ２０５，２０６が取り付けられ、これら第１の流路２０２の開口部と第２の流路２０３の開口部を開閉するダイアフラム状の弁体２０７が第３の流路２０４側に取り付けられている。そして、一方のヒータ２０５によって第１の流路２０２内の液体が加熱され、第１の流路２０２内の液体に気泡２０８が生じると、第１の流路２０２側の圧力が第２の流路２０３側の圧力よりも高くなり、弁体２０７が第１の流路２０２側の圧力で第２の流路２０３の開口部に押し付けられ、第２の流路２０３の開口部が弁体２０７によって塞がれ、第１の流路２０２と第３の流路２０４が連通するようになっている。また、他方のヒータ２０６によって第２の流路２０３内の液体が加熱され、第２の流路２０３内の液体に気泡２０８が生じると、第２の流路２０３側の圧力が第１の流路２０２側の圧力よりも高くなり、弁体２０７が第２の流路２０３側の圧力で第１の流路２０２の開口部に押し付けられ、第１の流路２０２の開口部が弁体２０７によって塞がれ、第２の流路２０３と第３の流路２０４が連通するようになっている（特許文献２参照）。 (Second conventional example)
FIG. 13 shows a liquid transport apparatus 201 that can be used as a microfluidic device. The liquid transport device 201 shown in FIG. 13 is opened so that the first flow path 202 and the second flow path 203 are opposed to the third flow path 204, and the opening of the first flow path 202 Heaters 205 and 206 are attached in the vicinity and in the vicinity of the opening of the second channel 203, respectively, and a diaphragm-like valve that opens and closes the opening of the first channel 202 and the opening of the second channel 203. A body 207 is attached to the third flow path 204 side. Then, when the liquid in the first flow path 202 is heated by one heater 205 and bubbles 208 are generated in the liquid in the first flow path 202, the pressure on the first flow path 202 side is changed to the second flow. The pressure is higher than the pressure on the path 203 side, the valve body 207 is pressed against the opening of the second flow path 203 by the pressure on the first flow path 202 side, and the opening of the second flow path 203 is The first flow path 202 and the third flow path 204 are in communication with each other. Further, when the liquid in the second channel 203 is heated by the other heater 206 and bubbles 208 are generated in the liquid in the second channel 203, the pressure on the second channel 203 side is changed to the first flow rate. The pressure becomes higher than the pressure on the path 202 side, and the valve body 207 is pressed against the opening of the first flow path 202 by the pressure on the second flow path 203 side, and the opening of the first flow path 202 becomes the valve body 207. The second flow path 203 and the third flow path 204 communicate with each other (see Patent Document 2).

（第３従来例）
また、混合槽内のヒータを加熱して、混合槽内の液体に気泡を生じさせ、その気泡を膨張・収縮させることにより、混合槽内の液体を撹拌・混合する技術が既に開発されている（特許文献３参照）。 (Third conventional example)
In addition, a technology for stirring and mixing the liquid in the mixing tank has already been developed by heating the heater in the mixing tank, generating bubbles in the liquid in the mixing tank, and expanding and contracting the bubbles. (See Patent Document 3).

（第４従来例）
また、電気分解により気泡を発生させ、その気泡で液体を移動させる技術が開発されている。この第４従来例に係るマイクロ流体デバイスの技術は、電気分解により気泡を発生させることができることはもちろんのこと、電気分解により気泡を消滅させることができるようになっている（特許文献４参照）。 (Fourth conventional example)
In addition, a technique has been developed in which bubbles are generated by electrolysis and a liquid is moved by the bubbles. The technology of the microfluidic device according to the fourth conventional example can eliminate bubbles by electrolysis as well as generating bubbles by electrolysis (see Patent Document 4). .

（その他の従来例）
なお、媒質内の微小気泡をレーザで捕捉し、その捕捉した微小気泡をレーザで誘導して微小容器内に注入する技術が知られている（第５従来例としての特許文献５参照）。 (Other conventional examples)
A technique is known in which microbubbles in a medium are captured by a laser, and the captured microbubbles are guided by a laser and injected into a microcontainer (see Patent Document 5 as a fifth conventional example).

特開２００１−４６２８号公報（特に、段落番号００１２参照）JP 2001-4628 A (refer to paragraph number 0012 in particular) 特開２００４−１２５１７２号公報（特に、段落番号００１９，００２０参照）JP 2004-125172 A (refer to paragraph numbers 0019 and 0020 in particular) 特開２００４−５３３７０号公報（特に、段落番号００１６参照）JP 2004-53370 A (refer to paragraph number 0016 in particular) 特開２００４−４３９７３号公報（特に、段落番号００１４，００１９，００２６，００２７参照）JP 2004-43973 A (refer in particular to paragraph numbers 0014, 0019, 0026, 0027) 特開２００３−１０６９５０号公報（特に、第１頁、段落番号０００６，００１９参照）Japanese Patent Laid-Open No. 2003-106950 (in particular, see page 1, paragraph numbers 0006 and 0019)

しかしながら、第１従来例のマイクロ流体デバイス１０１は、基板１０６に保護プレート１０７が貼り合わされるようになっており、反応槽部１０２の上部が保護プレート１０７で塞がれているため、反応槽部１０２内に収容したビーズ１０５を簡単に取り除くことが困難であり、ビーズ１０５の交換が困難である。また、このようなマイクロ流体デバイス１０１では、ビーズ１０５の完全な洗浄も困難である。したがって、このようなマイクロ流体デバイス１０１は、例えば、取り扱う液体（試料）１０４の種類を変えて成分分析するような場合、不純物の混入を防止して正確な分析を可能にするため、同一のものを繰り返し使用できないという問題があった。   However, in the microfluidic device 101 of the first conventional example, the protective plate 107 is bonded to the substrate 106, and the upper part of the reaction vessel 102 is closed by the protective plate 107. It is difficult to easily remove the beads 105 accommodated in the 102 and replacement of the beads 105 is difficult. Further, in such a microfluidic device 101, it is difficult to completely clean the beads 105. Therefore, such a microfluidic device 101 is the same in order to prevent mixing of impurities and enable accurate analysis when, for example, component analysis is performed by changing the type of liquid (sample) 104 to be handled. There was a problem that could not be used repeatedly.

また、第２従来例は、微小流路（第１の流路２０２，第２の流路２０３，第３の流路２０４）内にヒータ２０５，２０６やダイヤフラム状の弁体２０７を取り付けなければならず、構造が複雑であり、製作が容易でないという問題を有している。また、この第２従来例は、微小流路（２０２，２０３，２０４）内にヒータ２０５，２０６やダイアフラム状の弁体２０７が配置される構造であり、第１従来例と同様に、洗浄が容易でないため、取り扱う液体（試料）の種類を変えて成分分析等を行う場合、同一のものを繰り返し使用できないという問題があった。   Further, in the second conventional example, heaters 205 and 206 and a diaphragm-like valve body 207 are not attached in a minute flow path (first flow path 202, second flow path 203, and third flow path 204). In other words, the structure is complicated and the manufacturing is not easy. In addition, the second conventional example has a structure in which heaters 205 and 206 and a diaphragm-like valve body 207 are arranged in the micro flow path (202, 203, 204). As in the first conventional example, cleaning is performed. Since it is not easy, when performing component analysis etc. by changing the type of liquid (sample) to be handled, there is a problem that the same thing cannot be used repeatedly.

また、第３従来例は、混合槽内で単に気泡を膨張・収縮させるだけであり、気泡そのものの大きさや気泡の個数を制御できるようになっていなかった。そのため、この第３従来例の技術は、微小流路の流路断面積を多段に変化させ、微小流路内を移動させる液体流量を正確にコントロールするような技術（流量可変バルブの技術）に応用することができなかった。   In the third conventional example, the bubbles are simply expanded and contracted in the mixing tank, and the size of the bubbles and the number of bubbles cannot be controlled. For this reason, the technology of the third conventional example is a technology (flow rate variable valve technology) in which the flow rate of the liquid moving in the micro flow channel is accurately controlled by changing the cross-sectional area of the micro flow channel in multiple stages. I couldn't apply it.

また、第４従来例は、電気分解により気泡を発生させるようになっているので、導電性を有する液体中でしか気泡を発生させることができないといった問題や、液体中に留まっている帯電物質を電気分解する際に印加する電圧により動かしてしまうという問題があった。   Further, in the fourth conventional example, since bubbles are generated by electrolysis, there is a problem that bubbles can be generated only in a liquid having conductivity, or a charged substance remaining in the liquid. There was a problem that the electrolysis was caused by the applied voltage.

また、第５従来例は、単にレーザで気泡を捕捉して誘導させるだけの技術であり、気泡の個数や大きさをコントロールできるようになっていなかった。   Further, the fifth conventional example is a technique that merely captures and guides bubbles with a laser, and the number and size of the bubbles cannot be controlled.

そこで、本発明は、気泡の発生個数や気泡の大きさをコントロールでき、簡単な構造で試料の流動制御を行うことができると共に、繰り返し使用することができるマイクロ流体デバイスを提供することを目的とする。   Accordingly, an object of the present invention is to provide a microfluidic device that can control the number of bubbles generated and the size of bubbles, can control the flow of a sample with a simple structure, and can be used repeatedly. To do.

請求項１の発明は、液体が導入された流路内に、又は、この流路周辺に光を照射する光照射手段を有し、この光照射手段からの照射光によって前記流路内の液体を加熱し、前記流路内に気泡を発生させることを特徴とするマイクロ流体デバイスに関するものである。   The invention of claim 1 has a light irradiation means for irradiating light in or around the flow path into which the liquid is introduced, and the liquid in the flow path is irradiated by light emitted from the light irradiation means. The present invention relates to a microfluidic device characterized in that bubbles are generated in the flow path.

請求項２の発明は、液体が導入された流路内に、又は、この流路周辺に光を照射する光照射手段を有し、この光照射手段からの照射光によって前記流路内の液体を加熱し、前記流路内に気泡を発生させ、前記光照射手段からの照射光によって前記気泡の動きを制御することを特徴とするマイクロ流体デバイスに関するものである。   The invention of claim 2 has light irradiation means for irradiating light in or around the flow path into which the liquid is introduced, and the liquid in the flow path is irradiated by light emitted from the light irradiation means. The present invention relates to a microfluidic device in which bubbles are heated to generate bubbles in the flow path, and the movement of the bubbles is controlled by irradiation light from the light irradiation means.

請求項３の発明は請求項１又は２の発明に係るマイクロ流体デバイスに関するものであり、前記光照射手段は光を照射するための集光光学系を前記流路の近傍に配置したことを特徴するものである。   A third aspect of the invention relates to a microfluidic device according to the first or second aspect of the invention, wherein the light irradiating means includes a condensing optical system for irradiating light in the vicinity of the flow path. To do.

請求項４の発明は請求項１〜３のいずれかの発明に係るマイクロ流体デバイスに関するものであり、前記光照射手段は光を照射するための導光路を前記流路の近傍に配置したことを特徴とするものである。   A fourth aspect of the invention relates to a microfluidic device according to any one of the first to third aspects of the invention, wherein the light irradiating means includes a light guide path for irradiating light disposed in the vicinity of the flow path. It is a feature.

請求項５の発明は、請求項１〜４のいずれかの発明に係るマイクロ流体デバイスに関するものであり、前記光照射手段の照射光の出力を制御して、前記流路内に前記気泡を保持しておくことを特徴とするものである。   A fifth aspect of the present invention relates to a microfluidic device according to any one of the first to fourth aspects of the present invention, and controls the output of irradiation light of the light irradiation means to hold the bubbles in the flow path. It is characterized by keeping.

請求項６の発明は、請求項１〜５のいずれかの発明に係るマイクロ流体デバイスにおいて、前記光照射手段の光照射位置を変化させ、前記気泡をマランゴニ効果により移動させることができることを特徴とするものである。   The invention according to claim 6 is the microfluidic device according to any one of claims 1 to 5, wherein the light irradiation position of the light irradiation means is changed, and the bubbles can be moved by the Marangoni effect. To do.

請求項７の発明は、請求項１〜６のいずれかの発明に係るマイクロ流体デバイスにおいて、前記光照射手段によって光が照射される部位の近傍の前記流路の壁面部に他の壁面部より高い光吸収性を有する光吸収体を配置したことを特徴とするものである。   A seventh aspect of the present invention is the microfluidic device according to any one of the first to sixth aspects of the present invention, in which the wall surface portion of the flow path in the vicinity of the portion irradiated with light by the light irradiating means A light absorber having high light absorption is disposed.

請求項８の発明は、請求項１〜７のいずれかの発明に係るマイクロ流体デバイスにおいて、前記光吸収体の幅寸法及び高さ寸法を前記気泡の直径以下にしたことを特徴とするものである。   The invention according to claim 8 is the microfluidic device according to any one of claims 1 to 7, wherein the width dimension and the height dimension of the light absorber are made equal to or less than the diameter of the bubbles. is there.

請求項９の発明は、液体が導入された流路内に、又は、この流路周辺に光を照射する光照射手段を有し、この光照射手段によって光が照射される部位の近傍の壁面部に他の壁面部より高い光吸収性を有する光吸収体を配置した第一の光照射部と、光が照射される近傍の前記壁面部には前記光吸収体を配置しない第二の光照射部を設け、第一の光照射部で前記気泡を発生させ、第二の光照射部で前記気泡を制御することを特徴とするマイクロ流体デバイスに関するものである。   Invention of Claim 9 has a light irradiation means to irradiate light in the flow path into which the liquid was introduced, or the periphery of this flow path, and the wall surface in the vicinity of the part irradiated with light by this light irradiation means A first light irradiating part in which a light absorber having higher light absorption than the other wall surface part is disposed, and a second light in which the light absorber is not disposed on the wall surface part in the vicinity of light irradiation The present invention relates to a microfluidic device characterized in that an irradiation unit is provided, the bubbles are generated by a first light irradiation unit, and the bubbles are controlled by a second light irradiation unit.

請求項１０の発明は、請求項９の発明に係るマイクロ流体デバイスにおいて、前記光照射手段の照射光の出力を制御して、前記流路内に前記気泡を保持しておくことを特徴とするものである。   A tenth aspect of the invention is the microfluidic device according to the ninth aspect of the invention, wherein the bubble is held in the flow path by controlling the output of the irradiation light of the light irradiation means. Is.

請求項１１の発明は、請求項９又は１０の発明に係るマイクロ流体デバイスにおいて、前記光照射手段の光照射位置を変化させ、前記気泡をマランゴニ効果により移動させることができることを特徴とするものである。   An eleventh aspect of the invention is the microfluidic device according to the ninth or tenth aspect of the invention, characterized in that the light irradiation position of the light irradiation means can be changed and the bubbles can be moved by the Marangoni effect. is there.

請求項１２の発明は、請求項９〜１１のいずれかの発明に係るマイクロ流体デバイスにおいて、前記光吸収体の幅寸法又は高さ寸法を前記気泡の直径以下にしたことを特徴とするものである。   The invention of claim 12 is the microfluidic device according to any one of claims 9 to 11, wherein the width or height of the light absorber is made equal to or less than the diameter of the bubbles. is there.

請求項１３の発明は、請求項１〜１２のいずれかの発明に係るマイクロ流体デバイスにおいて、前記光照射手段の照射光の出力を制御して、前記気泡の大きさを任意の大きさに形成し、前記流路の流路断面積を前記気泡によって変えることを特徴とするものである。   A thirteenth aspect of the present invention is the microfluidic device according to any one of the first to twelfth aspects of the present invention, wherein the size of the bubbles is formed to an arbitrary size by controlling the output of the irradiation light of the light irradiation means. The channel cross-sectional area of the channel is changed by the bubbles.

請求項１４の発明は、請求項１〜１２のいずれかの発明に係るマイクロ流体デバイスにおいて、前記光照射手段からの光照射を断続的に行い、前記流路内を移動する液体を前記気泡によって分断することを特徴とするものである。   A fourteenth aspect of the present invention is the microfluidic device according to any one of the first to twelfth aspects of the present invention, wherein the light irradiation means intermittently irradiates light, and the liquid moving in the flow path is formed by the bubbles. It is characterized by dividing.

請求項１５の発明は、請求項１４の発明に係るマイクロ流体デバイスにおいて、前記光照射手段からの光照射の断続を適切に行い、前記流路内で前記液体を任意の量に計り取ることを特徴とするものである。   According to a fifteenth aspect of the present invention, in the microfluidic device according to the fourteenth aspect of the present invention, the light irradiation from the light irradiation means is appropriately interrupted and the liquid is measured in an arbitrary amount in the flow path. It is a feature.

請求項１６の発明は、請求項１〜１５のいずれかの発明に係るマイクロ流体デバイスにおいて、前記流路内の前記気泡を消滅又は小さくする気泡消去手段を配置したことを特徴とするものである。   A sixteenth aspect of the present invention is the microfluidic device according to any one of the first to fifteenth aspects, characterized in that bubble erasing means for eliminating or reducing the bubbles in the flow path is arranged. .

本発明のマイクロ流体デバイスは、微小流路内の液体（試料）に発生させる気泡の個数や気泡の大きさや位置をコントロールすることができ、簡単な構造で液体の流動制御を行うことができる。また、本発明のマイクロ流体デバイスは、気泡を可変バルブの弁体のように機能させることができる。また、本発明のマイクロ流体デバイスは、流路中に発生させた気泡を消去させることができるので洗浄が容易であり、新たな気泡を容易に発生させることができるので繰り返し使用することができる。   The microfluidic device of the present invention can control the number of bubbles generated in the liquid (sample) in the microchannel and the size and position of the bubbles, and can control the flow of the liquid with a simple structure. In addition, the microfluidic device of the present invention can cause bubbles to function like a valve body of a variable valve. In addition, the microfluidic device of the present invention can be used repeatedly because it can easily remove bubbles generated in the flow path and can easily generate new bubbles.

以下、本発明が適用されるマイクロ流体デバイスの実施形態を図面に基づいて説明する。
［第１形態］
図１乃至図２は、本発明の第１形態に係るマイクロ流体デバイス１を示すものである。このうち、図１は本発明の第１形態に係るマイクロ流体デバイス１を模式的に示す外観斜視図である。また、図２は、マイクロ流体デバイス１の構成を説明するために、後述する第２プレート部材を省略し、一部を拡大して示す模式的平面図である。 Hereinafter, embodiments of a microfluidic device to which the present invention is applied will be described with reference to the drawings.
[First form]
1 and 2 show a microfluidic device 1 according to a first embodiment of the present invention. 1 is an external perspective view schematically showing the microfluidic device 1 according to the first embodiment of the present invention. FIG. 2 is a schematic plan view showing a part of the microfluidic device 1 in an enlarged manner, omitting a second plate member to be described later.

これらの図において、このマイクロ流体デバイス１は、ＰＤＭＳ（ポリジメチルシロキサン）、ＰＣ（ポリカーボネート）、ＰＭＭＡ（ポリメチルメタクリレート）、ＰＳ（ポリスチレン）、非晶質ポリオレフィン等の光学特性に優れた樹脂材料又はガラス材料により形成された第１プレート部材２と、この第１プレート部材２に接着又は溶着等で固着される第２プレート部材３（説明の都合上、２点鎖線で示している）とからなっている。なお、本実施の形態においては、第２プレート部材３は、第１プレート部材２と同様の材料で形成されている。   In these drawings, the microfluidic device 1 is a resin material excellent in optical properties such as PDMS (polydimethylsiloxane), PC (polycarbonate), PMMA (polymethyl methacrylate), PS (polystyrene), amorphous polyolefin, or the like. A first plate member 2 formed of a glass material and a second plate member 3 (shown by a two-dot chain line for convenience of explanation) fixed to the first plate member 2 by adhesion or welding. ing. In the present embodiment, the second plate member 3 is formed of the same material as the first plate member 2.

第１プレート部材２は、その表面（第２プレート部材３が固着される面）４側に、断面が略矩形形状で且つ微小溝断面（例えば、溝幅が１００μｍで、溝深さが１３０μメートル）の微小溝５ａが形成されている。そして、第１プレート部材２の表面４に第２プレート部材３が固着されることにより、微小溝５ａの上方開口部が第２プレート部材３によって覆われ、微小溝５ａに対応する微小流路５が形成される。   The first plate member 2 has a substantially rectangular cross section on the surface (surface to which the second plate member 3 is fixed) 4 side and a micro groove cross section (for example, the groove width is 100 μm and the groove depth is 130 μm). ) Micro-grooves 5a are formed. Then, when the second plate member 3 is fixed to the surface 4 of the first plate member 2, the upper opening of the minute groove 5a is covered with the second plate member 3, and the minute flow path 5 corresponding to the minute groove 5a. Is formed.

この微小流路５の一端に望む部位の第２プレート部材３側には、試料注入孔６が形成されており、微小流路５の他端に望む部位に第２プレート部材３側には、試料排出孔７が形成されている。そして、この微小流路５の途中には、高い光吸収性を有する光吸収体８が配置されており、この光吸収体８が微小流路５の壁面の一部を構成している。この光吸収体８は、カーボン等の高光吸収物質を含む樹脂材料で形成されている。そして、この光吸収体８は、レーザ光Ｌが照射されると、そのレーザ光Ｌを効率的に吸収して光エネルギーを熱に変換し、微小流路５内に導入される液体を局所的に加熱して気泡１０を発生させるために使用される。そのため、微小流路５内の球状の気泡１０の投影面積（気泡１０の直径位置での断面積）よりも小さい受光面積となるような大きさに形成されている。   A sample injection hole 6 is formed on the second plate member 3 side of a portion desired for one end of the microchannel 5, and a portion desired for the other end of the microchannel 5 is disposed on the second plate member 3 side. A sample discharge hole 7 is formed. A light absorber 8 having high light absorptivity is disposed in the middle of the minute channel 5, and the light absorber 8 constitutes a part of the wall surface of the minute channel 5. The light absorber 8 is formed of a resin material containing a high light absorption substance such as carbon. When the light absorber 8 is irradiated with the laser light L, the light absorber 8 efficiently absorbs the laser light L to convert light energy into heat, and locally introduces the liquid introduced into the microchannel 5. Used to generate bubbles 10 by heating. For this reason, the light receiving area is smaller than the projected area of the spherical bubble 10 in the microchannel 5 (cross-sectional area at the diameter position of the bubble 10).

そして、この光吸収体８が配置された微小流路５の途中には、光照射手段１１が配置されている。光照射手段１１は、レーザ発生装置１２と、このレーザ発生装置１２からの光を集光手段（集光光学系）１３に案内する光導入部（導光路）１９と、この光導入部１９を介して導入された光の集光位置を光吸収体８側に向けて合わせる集光手段１３と、レーザ発生装置１２と外部電源１４とを接続する通電コントローラ１５と、を備えている。このうち、通電コントローラ１５は、レーザ発生装置１２への通電量を制御するようになっている。また、集光手段１３は、集光レンズを備えることはもちろんのこと、必要に応じて集光位置を微小流路５に沿って移動できる集光位置可変機構を備えるようにしてもよい。また、集光手段１３は、マイクロ流体デバイス１の第１プレート部材２又は第２プレート部材３に一体に形成してもよく、又、光照射手段１１の他の構成と共にマイクロ流体デバイス１の外部（別体）に配置してもよい。   And the light irradiation means 11 is arrange | positioned in the middle of the microchannel 5 in which this light absorber 8 is arrange | positioned. The light irradiation means 11 includes a laser generator 12, a light introduction part (light guide path) 19 for guiding the light from the laser generation apparatus 12 to a light collection means (light collection optical system) 13, and the light introduction part 19. A light condensing means 13 for adjusting the light condensing position of the light introduced through the light absorber 8 toward the light absorber 8 side, and an energization controller 15 for connecting the laser generator 12 and the external power source 14. Among these, the energization controller 15 controls the energization amount to the laser generator 12. In addition, the condensing unit 13 may include a condensing lens, and may include a condensing position variable mechanism that can move the condensing position along the microchannel 5 as necessary. The light condensing means 13 may be formed integrally with the first plate member 2 or the second plate member 3 of the microfluidic device 1, and together with other configurations of the light irradiating means 11, You may arrange | position to (separate body).

なお、本実施形態によれば、光吸収体８の受光面積を気泡（流量調整に使用する気泡）１０よりも小さくする構成であるため、集光手段１３を省略してもよい。このように集光手段１３を省略した場合、マイクロ流体デバイス１の構造を簡単化することができる。このような構造のマイクロ流体デバイス１にしても、光導入部１９から導入されたレーザ光Ｌの光エネルギーを極めて狭い受光面積の光吸収体８で吸収でき、レーザ光Ｌの光エネルギーを効率的に熱エネルギーに変換できるため、微小流路５内の液体に所望の気泡を生じさせることができる。   In addition, according to this embodiment, since it is the structure which makes the light-receiving area of the light absorber 8 smaller than the bubble (bubble used for flow volume adjustment) 10, the condensing means 13 may be abbreviate | omitted. Thus, when the condensing means 13 is omitted, the structure of the microfluidic device 1 can be simplified. Even in the microfluidic device 1 having such a structure, the light energy of the laser light L introduced from the light introducing portion 19 can be absorbed by the light absorber 8 having a very narrow light receiving area, and the light energy of the laser light L can be efficiently obtained. Therefore, desired bubbles can be generated in the liquid in the microchannel 5.

このような構成の本実施形態によれば、光導入部１９から導入したレーザ光Ｌを集光手段１３を介して光吸収体８に照射し、光吸収体８の近傍位置の液体を局所的に急速加熱し、液体中に溶解している気体を膨張させ、液体に気泡１０を生じさせる。この際、通電コントローラ１５によってレーザ発生装置１２への通電量を制御することにより、レーザ発生装置１２から出力されるレーザ光Ｌの照射エネルギーを可変に制御し、気泡１０の大きさを小から中へ、中から大に変化させ、微小流路５の液体が流動できる流路断面積を変化させて、液体の流動制御を多段に行うことができる。このように、本実施形態によれば、気泡１０を微小流路５の流量可変バルブ又は開閉バルブとして機能させることができる。   According to the present embodiment having such a configuration, the laser beam L introduced from the light introducing unit 19 is irradiated to the light absorber 8 through the condensing means 13, and the liquid in the vicinity of the light absorber 8 is locally applied. Is rapidly heated to expand the gas dissolved in the liquid, thereby generating bubbles 10 in the liquid. At this time, the energization controller 15 controls the amount of energization to the laser generator 12 to variably control the irradiation energy of the laser light L output from the laser generator 12, thereby reducing the size of the bubble 10 from small to medium. The flow control of the liquid can be performed in multiple stages by changing the cross-sectional area in which the liquid in the micro flow path 5 can flow from the middle to the large. Thus, according to the present embodiment, the bubble 10 can function as a variable flow rate valve or an open / close valve of the micro flow path 5.

また、本実施形態によれば、レーザ光Ｌを光吸収体８に照射するようになっているため、光エネルギーを効率的に熱に変換でき、光照射手段１１の消費電力量を低く抑えることができる。   Further, according to the present embodiment, since the light absorber 8 is irradiated with the laser light L, light energy can be efficiently converted into heat, and the power consumption of the light irradiation means 11 can be kept low. Can do.

また、本実施形態によれば、微小流路５の流量調整を気泡１０で行うようになっているため、微小流路５中に発生させた気泡１０を消去することにより、マイクロ流体デバイス１の洗浄が容易になる。また、本実施形態に係るマイクロ流体デバイス１は、消滅させた気泡とは別に、新たな気泡を容易に発生させることができるため、測定対象試料と洗浄残留試料とが混ざり合うような不具合を生じにくく、異なる試料の分析等を行う場合に、繰り返し使用することが可能になる。   In addition, according to the present embodiment, the flow rate adjustment of the microchannel 5 is performed with the bubbles 10, and therefore, by erasing the bubbles 10 generated in the microchannel 5, Easy to clean. In addition, since the microfluidic device 1 according to the present embodiment can easily generate new bubbles in addition to the extinguished bubbles, there is a problem that the measurement target sample and the cleaning residual sample are mixed. It is difficult to use repeatedly when analyzing different samples.

また、本実施形態において、集光手段１３が図示しない集光位置可変機構を備えている場合には、レーザ光Ｌで気泡１０を所定位置に捕捉して停止させておく（保持する）ことができることはもちろんのこと、レーザ光Ｌで捕捉した気泡１０をレーザ光Ｌの集光位置Ｐ１，Ｐ２，Ｐ３の変更に伴って移動させることが可能になる（図２参照）。また、本実施形態において、集光手段１３がマイクロ流体デバイス１と別体に設置される場合、集光手段１３を微小流路５に対して相対移動させることにより、気泡発生位置（Ｐ１）とは別の位置の液体を加熱し、気泡１０をマランゴニ効果によって移動させることができる。このように、集光手段１３が気泡移動手段としても機能する。なお、レーザ光Ｌで気泡１０を捕捉して停止させておくには、気泡１０に照射するレーザ光Ｌの照射エネルギーを気泡１０を成長させない程度の照射エネルギーに制御すればよい。このようにすると、気泡（気体）１０の屈折率と液体の屈折率の違いから、レーザ光Ｌによって気泡１０を微小流路５の壁面に押し付けるような力が生じ、そのレーザ光Ｌによって生じる力によって気泡１０が一定箇所に捕捉される。   In the present embodiment, when the condensing means 13 includes a condensing position variable mechanism (not shown), the bubble 10 is captured at a predetermined position by the laser light L and stopped (held). Needless to say, the bubble 10 captured by the laser beam L can be moved in accordance with the change of the condensing positions P1, P2 and P3 of the laser beam L (see FIG. 2). Moreover, in this embodiment, when the condensing means 13 is installed separately from the microfluidic device 1, by moving the condensing means 13 relative to the microchannel 5, the bubble generation position (P1) and Can heat the liquid at another location and move the bubbles 10 by the Marangoni effect. Thus, the condensing means 13 also functions as a bubble moving means. In order to capture and stop the bubble 10 with the laser light L, the irradiation energy of the laser light L applied to the bubble 10 may be controlled to an irradiation energy that does not cause the bubble 10 to grow. If it does in this way, from the difference of the refractive index of the bubble (gas) 10 and the refractive index of a liquid, the force which presses the bubble 10 against the wall surface of the microchannel 5 by the laser beam L will arise, and the force which the laser beam L produces | generates As a result, the bubbles 10 are trapped at a fixed location.

このような集光位置Ｐ１（Ｐ２，Ｐ３）を移動させることができる構成にすれば、図３に示すように、１個の気泡１０で複数の微小流路１６，１７の開閉を行うことが可能になる。   If such a condensing position P1 (P2, P3) can be moved, a plurality of microchannels 16, 17 can be opened and closed with one bubble 10, as shown in FIG. It becomes possible.

また、このような集光位置Ｐ１（Ｐ２，Ｐ３）を移動させることができる構成にすれば、図４に示すように、気泡１０にタンパク質，粒子状物質等の保持対象１８を吸着させ、保持対象１８を気泡１０で所定位置に保持又は移動させることができる。なお、保持対象１８を吸着した気泡１０をマランゴニ効果で移動できる本実施形態によれば、光ピンセットの技術を利用して保持対象１８を移動させる場合に比較し、保持対象１８に対する制限が少なくなる。例えば、光ピンセットの技術を利用し、保持対象１８を移動させる場合、保持対象１８の屈折率が液体よりも大きくなければならず、また、透明でなければならないという制限がある。   In addition, if such a condensing position P1 (P2, P3) can be moved, as shown in FIG. 4, the holding object 18 such as protein or particulate matter is adsorbed and held in the bubble 10. The object 18 can be held or moved to a predetermined position by the bubble 10. In addition, according to this embodiment in which the bubble 10 having adsorbed the holding object 18 can be moved by the Marangoni effect, the restriction on the holding object 18 is reduced as compared with the case where the holding object 18 is moved using the optical tweezer technology. . For example, when the holding object 18 is moved using the technique of optical tweezers, there is a limitation that the refractive index of the holding object 18 must be larger than that of the liquid and must be transparent.

また、このような集光位置Ｐ１（Ｐ２，Ｐ３）を移動させることができる構成にすれば、図５に示すように、微小流路５の所定位置（気泡１０を消去させたい位置）に気泡消去手段２０を配置し、その気泡消去手段２０の配置位置まで気泡１０を移動させた後、その気泡消去手段２０によって気泡を消去することができる。なお、本実施形態の気泡消去手段２０は、気体を透過させるが液体を透過させないシリコーンゴム（例えば、ＰＤＭＳ）等の材料で形成された第１プレート部材２の微小流路５の所定位置に、気泡１０を吸引するための負圧室２１を微小流路５に近接させて形成し、その負圧室２１内を外部のバキュームポンプ等の負圧発生手段（図示せず）によって吸引し、負圧室２１内の圧力が外気圧よりも１００ｋＰａ程度低くなるようにしてある。なお、負圧室２１と微小流路５とを仕切る壁部２２の肉厚は、気泡１０内部の気体の吸引が効率的に行えるように、極めて薄く（例えば、３０μｍ程度に薄く）なっている。このような構成によれば、気泡１０を形作る気体を負圧室２１内に吸引し、気泡１０を負圧室２１の形成位置で所望の大きさまで小さくするか（図５（ａ）〜（ｂ）参照）、又は完全に消滅させることが可能になる。ここで、気泡１０を所望の大きさまで小さくするか、又は気泡１０を完全に消滅させるかの選択は、負圧室２１内の圧力を調整することにより可能になる。そして、気泡１０の消滅後は、気泡１０に吸着された物質を微小流路５内で流動させることができる。   Further, if such a condensing position P1 (P2, P3) can be moved, as shown in FIG. 5, the bubble is placed at a predetermined position (position where the bubble 10 is to be erased) of the microchannel 5 as shown in FIG. After the erasing unit 20 is arranged and the bubble 10 is moved to the position where the bubble erasing unit 20 is arranged, the bubble erasing unit 20 can erase the bubble. In addition, the bubble erasing means 20 of the present embodiment is disposed at a predetermined position of the micro flow path 5 of the first plate member 2 formed of a material such as silicone rubber (for example, PDMS) that allows gas to pass but does not transmit liquid. A negative pressure chamber 21 for sucking the bubbles 10 is formed close to the micro flow path 5, and the inside of the negative pressure chamber 21 is sucked by a negative pressure generating means (not shown) such as an external vacuum pump. The pressure in the pressure chamber 21 is set to be about 100 kPa lower than the external pressure. Note that the wall portion 22 that partitions the negative pressure chamber 21 and the micro flow path 5 is extremely thin (for example, as thin as about 30 μm) so that the gas inside the bubble 10 can be efficiently sucked. . According to such a configuration, the gas forming the bubble 10 is sucked into the negative pressure chamber 21, and the bubble 10 is reduced to a desired size at the position where the negative pressure chamber 21 is formed (FIGS. 5A to 5B). )) Or completely disappear. Here, selection of whether the bubble 10 is reduced to a desired size or the bubble 10 is completely extinguished is made possible by adjusting the pressure in the negative pressure chamber 21. And after the bubble 10 disappears, the substance adsorbed in the bubble 10 can flow in the microchannel 5.

また、本実施形態によれば、光導入部１９から出射するレーザ光Ｌのエネルギーを通電コントローラ１５によってコントロールでき、気泡１０の発生のタイミングを所定の間隔で調節できるので、微小流路５を流動する液体を気泡１０によって所定量毎に正確に分離することができる。   In addition, according to the present embodiment, the energy of the laser light L emitted from the light introducing unit 19 can be controlled by the energization controller 15 and the generation timing of the bubbles 10 can be adjusted at a predetermined interval. The liquid to be separated can be accurately separated by the bubble 10 every predetermined amount.

また、本実施形態において、レーザ光Ｌの照射幅が５０〜６０μｍ程度であり、光吸収体８の加熱幅も同程度になり、１個の気泡１０が生じる。仮に、大きな気泡が成長する過程において、小さな気泡が複数生じたとしても、気泡のオストワルト成長により、複数の小さな気泡が大きな気泡に吸収され、１個の大きな気泡となる。   In the present embodiment, the irradiation width of the laser light L is about 50 to 60 μm, the heating width of the light absorber 8 is also the same, and one bubble 10 is generated. Even if a plurality of small bubbles are generated in the process of growing large bubbles, the plurality of small bubbles are absorbed into the large bubbles by the Ostwald growth of the bubbles and become one large bubble.

なお、本実施形態において、光導入部１９は、レーザ光Ｌを出射する態様を例示したが、これに限られず、レーザ光以外の光（例えば、キセノンランプ、水銀ランプ、ハロゲンランプ、ＬＥＤ）を照射する構成のものを使用するようにしてもよい。   In the present embodiment, the light introducing unit 19 exemplifies a mode of emitting the laser light L, but is not limited thereto, and light other than the laser light (for example, a xenon lamp, a mercury lamp, a halogen lamp, and an LED) You may make it use the thing of the structure which irradiates.

また、本実施形態において、レーザ光Ｌを光吸収体８に照射して発生させる気泡１０は、微小流路５と液体との接触角を制御することで、微小流路５の壁面から離れる球形状となるか、又は、微小流路５の壁面に沿った半球形状となるか制御することができる。微小流路５と液体との接触角を制御する方法としては、例えば、酸素プラズマ、エキシマＵＶ、シランカップリング、グラフト重合を利用した方法がある。
［第２形態］
図６は、第１形態の変形例であり、本発明の第２形態を示すものである。なお、本第２形態は、前述の第１形態の光吸収体８とは異なる態様の光吸収体８ａを示すものであるが、他の構成は第１形態と同様であるので、第１形態と同様の構成部分には同一符号を付し、第１形態と重複することになる説明を省略する。 In the present embodiment, the bubble 10 generated by irradiating the light absorber 8 with the laser light L is a sphere separated from the wall surface of the microchannel 5 by controlling the contact angle between the microchannel 5 and the liquid. It can be controlled whether it becomes a shape or a hemispherical shape along the wall surface of the microchannel 5. Examples of a method for controlling the contact angle between the microchannel 5 and the liquid include a method using oxygen plasma, excimer UV, silane coupling, and graft polymerization.
[Second form]
FIG. 6 is a modification of the first embodiment and shows a second embodiment of the present invention. In addition, although this 2nd form shows the light absorber 8a of the aspect different from the light absorber 8 of the above-mentioned 1st form, since another structure is the same as that of the 1st form, it is 1st form. The same reference numerals are given to the same components as those in FIG. 1, and the description that overlaps with the first embodiment will be omitted.

この図６に示すように、本実施形態のマイクロ流体デバイス１は、微小流路５に配置する光吸収体８ａの大きさを気泡１０の投影面積よりも大きな受光面積となるように形成し、光導入部１９からの光を集光手段１３によって光吸収体８ａ上に集光し、効率的に光エネルギーを熱エネルギーに変換できるようにして、微小流路５内の液体中に所望の気泡１０を発生させるようになっている。ここで、集光手段１３は、光吸収体８ａへのレーザ光Ｌの照射面積が気泡１０の光吸収体８ａへの投影面積よりも小さくなるように、レンズの倍率や焦点距離等が決定されている。   As shown in FIG. 6, the microfluidic device 1 of the present embodiment is formed such that the size of the light absorber 8a disposed in the microchannel 5 is a light receiving area larger than the projected area of the bubbles 10, The light from the light introducing portion 19 is condensed on the light absorber 8a by the condensing means 13 so that the light energy can be efficiently converted into heat energy, and a desired bubble is formed in the liquid in the microchannel 5. 10 is generated. Here, the magnification of the lens, the focal length, and the like of the condensing unit 13 are determined so that the irradiation area of the laser light L onto the light absorber 8a is smaller than the projected area of the bubble 10 onto the light absorber 8a. ing.

このような構成の本実施形態によれば、前述の第１形態と同様の効果を得ることができる。
［第３形態］
図７は、第１形態の変形例であり、本発明の第３形態を示すものである。なお、本第３形態は、前述の第１形態の気泡消去手段２０とは異なる態様の気泡消去手段２３を示すものであるが、他の構成は第１形態と同様であるので、第１形態と同様の構成部分には同一符号を付し、第１形態と重複することになる説明を省略する。 According to this embodiment having such a configuration, it is possible to obtain the same effect as that of the first embodiment.
[Third embodiment]
FIG. 7 shows a modification of the first embodiment and shows a third embodiment of the present invention. In addition, although this 3rd form shows the bubble elimination means 23 of the aspect different from the bubble elimination means 20 of the above-mentioned 1st form, since another structure is the same as that of a 1st form, 1st form The same reference numerals are given to the same components as those in FIG. 1, and the description that overlaps with the first embodiment will be omitted.

この図７に示すように、本実施形態のマイクロ流体デバイス１は、微小流路５内に親水性壁面領域２４と疎水性壁面領域２５とを形成し、気泡１０をほぼ球状体として利用する場合に、気泡１０を親水性壁面領域２４に保持し（図７（ａ）参照）、その気泡１０があたかも消滅したかのように潰す場合に、気泡１０を疎水壁面領域２５に移動させる（図７（ｂ）参照）。   As shown in FIG. 7, in the microfluidic device 1 of the present embodiment, a hydrophilic wall surface region 24 and a hydrophobic wall surface region 25 are formed in the microchannel 5 and the bubbles 10 are used as a substantially spherical body. In addition, when the bubble 10 is held in the hydrophilic wall region 24 (see FIG. 7A) and the bubble 10 is crushed as if it disappeared, the bubble 10 is moved to the hydrophobic wall region 25 (FIG. 7). (See (b)).

このような構成によれば、微小流路５は、親水性壁面領域２４の球状の気泡１０で流路が狭められ、液体の流動が制限されるが、気泡１０を疎水性壁面領域２５に移動させると、気泡１０の体積は同一であるが、気泡１０が疎水性壁面領域２５に押し付けられたように潰れ、球状の気泡１０で塞がれるようになっていた状態が解消され、液体が流動するための流路断面積を大きくすることができる。したがって、このような構成によっても、微小流路５の流路断面積を変化させることができる。   According to such a configuration, the microchannel 5 is narrowed by the spherical bubbles 10 in the hydrophilic wall region 24 and the flow of the liquid is restricted, but the bubbles 10 are moved to the hydrophobic wall region 25. Then, the volume of the bubbles 10 is the same, but the state in which the bubbles 10 are crushed as if they were pressed against the hydrophobic wall region 25 and blocked by the spherical bubbles 10 is eliminated, and the liquid flows. It is possible to increase the cross-sectional area of the flow path. Therefore, the channel cross-sectional area of the microchannel 5 can be changed also with such a configuration.

なお、本第３形態に前述の第２形態を適用し、疎水性壁面領域２５に負圧室２１を形成するように構成すれば、気泡１０が疎水性壁面領域２５で潰れるため、負圧室２１が形成された壁面と気泡１０との接触面積が第２形態の場合に比較して大きくなり、気泡１０を消滅させるまでに要する時間を短縮することができる（図５及び図７参照）。
［第４形態］
図８は、第１形態の変形例であり、本発明の第４形態を示すものである。なお、本第４形態は、前述の第１形態の気泡消去手段２０とは異なる態様の気泡消去手段２６を示すものであるが、他の構成は第１形態と同様であるので、第１形態と同様の構成部分には同一符号を付し、第１形態と重複することになる説明を省略する。 If the second embodiment is applied to the third embodiment and the negative pressure chamber 21 is formed in the hydrophobic wall region 25, the bubbles 10 are crushed by the hydrophobic wall region 25, and therefore the negative pressure chamber The contact area between the wall surface on which 21 is formed and the bubble 10 becomes larger than that in the second embodiment, and the time required until the bubble 10 disappears can be shortened (see FIGS. 5 and 7).
[Fourth form]
FIG. 8 shows a modification of the first embodiment and shows a fourth embodiment of the present invention. The fourth embodiment shows the bubble erasing unit 26 having a different form from the bubble erasing unit 20 of the first embodiment, but the other configuration is the same as that of the first embodiment. The same reference numerals are given to the same components as those in FIG. 1, and the description that overlaps with the first embodiment will be omitted.

この図８に示すように、本実施形態のマイクロ流体デバイス１は、微小流路５の壁面に気泡１０を収容するための凹み２７を形成し、気泡発生位置からこの凹み２７の形成位置まで気泡１０をマランゴニ効果によって移動させ、気泡１０を微小流路５から凹み２７内に収容する（退避させる）ようになっている。   As shown in FIG. 8, the microfluidic device 1 according to the present embodiment forms a recess 27 for containing the bubble 10 on the wall surface of the microchannel 5, and the bubble from the bubble generation position to the formation position of the recess 27. 10 is moved by the Marangoni effect, and the bubble 10 is accommodated (retracted) from the minute flow path 5 into the recess 27.

このような構成の本実施形態は、気泡１０を微小流路５内に保持すれば、微小流路５の流路断面積を狭めて流動制御を行うことができ、気泡１０を凹み２７内に収容すれば、気泡１０に吸着させた物質を微小流路５から退避させる（除去する）ことができると共に、微小流路５を全開状態にすることができる。   In the present embodiment having such a configuration, if the bubble 10 is held in the microchannel 5, flow control can be performed by narrowing the channel cross-sectional area of the microchannel 5, and the bubble 10 is placed in the recess 27. If accommodated, the substance adsorbed in the bubble 10 can be retracted (removed) from the microchannel 5 and the microchannel 5 can be fully opened.

なお、その他、気泡消去手段としては、超音波で気泡を破壊するものを使用してもよい。また、微小流路５内の液体を冷却することにより、気泡１０の体積を減少させたり、液体の気体の溶解度を高めて気泡を液体中に溶け込ませることが考えられる。   In addition, as the bubble erasing means, a device that breaks bubbles with ultrasonic waves may be used. Further, it is conceivable to cool the liquid in the microchannel 5 to reduce the volume of the bubbles 10 or to increase the solubility of the liquid gas so that the bubbles are dissolved in the liquid.

図９は、本発明を適用したマイクロ流体デバイス１の実施例１を模式的に示す図である。この図９に示すマイクロ流体デバイス１は、種類の異なる２種類の試料（液体）３０，３１を気泡１０によって所定量の液滴３０ａ，３１ａに分断し、その後に両液滴３０ａ，３１ａ同士を結合させるようになっている。なお、図９において、試料３０，３１が図中左側から右側方向に向かって流動するように、第１微小流路３２，第２微小流路３３と合流路３４に圧力が加えられている。   FIG. 9 is a diagram schematically showing Example 1 of the microfluidic device 1 to which the present invention is applied. The microfluidic device 1 shown in FIG. 9 divides two different types of samples (liquids) 30 and 31 into a predetermined amount of liquid droplets 30a and 31a by bubbles 10 and thereafter separates both liquid droplets 30a and 31a. It is supposed to be combined. In FIG. 9, pressure is applied to the first microchannel 32, the second microchannel 33, and the combined channel 34 so that the samples 30 and 31 flow from the left side to the right side in the drawing.

この図９に示すマイクロ流体デバイス１は、上記のような液体３０，３１の分断及び結合を行うため、第１の試料３０を流動させる第１微小流路３２と、第２の試料３１を流動させる第２微小流路３３と、これら第１微小流路３２と第２微小流路３３がＹ字状に合流する微小流路としての合流路３４とが第１プレート部材２に形成されている。そして、第１微小流路３２と第２微小流路３３の対応する位置には、それぞれ光照射手段１１の光導入部１９及び光吸収体８（８ａ）が配置されている。光照射手段１１は、第１形態において詳述したように、通電コントローラ１５によって通電制御されるようになっているため、第１微小流路３２及び第２微小流路３３に生じさせる気泡１０の大きさ及びタイミングを同一にすることができ、第１微小流路３２の第１の試料３０と第２微小流路３３の第２の試料３１とを気泡によって同量だけ分断できる。したがって、合流路３４において、第１の試料３０の分断された液滴３０ａと第２の試料３１の分断された液滴３１ａとが同一量だけ合流して結合し、下流側に流動する過程で所望の化学反応等が正確に行われる。   In the microfluidic device 1 shown in FIG. 9, in order to divide and combine the liquids 30 and 31 as described above, the first microchannel 32 that causes the first sample 30 to flow and the second sample 31 that flows. The first microplate 33 is formed with a second microchannel 33 to be formed, and a combined channel 34 as a microchannel in which the first microchannel 32 and the second microchannel 33 merge in a Y shape. . And the light introduction part 19 and the light absorber 8 (8a) of the light irradiation means 11 are each arrange | positioned in the position where the 1st microchannel 32 and the 2nd microchannel 33 respond | correspond. As described in detail in the first embodiment, the light irradiation means 11 is energized and controlled by the energization controller 15, so that the bubbles 10 generated in the first microchannel 32 and the second microchannel 33 The size and timing can be made the same, and the first sample 30 of the first microchannel 32 and the second sample 31 of the second microchannel 33 can be separated by the same amount by bubbles. Therefore, in the process in which the divided liquid droplet 30a of the first sample 30 and the divided liquid droplet 31a of the second sample 31 are merged and combined by the same amount in the combined flow path 34 and flow downstream. A desired chemical reaction or the like is accurately performed.

なお、本実施例１は、第１微小流路３２の第１の試料３０と第２微小流路３３の第２の試料３１とを同量だけ分断した後、その分断した同量の液滴３０ａ，３１ａ同士を結合する例を示したが、第１の試料３０と第２の試料３１を分断する気泡１０の大きさを変え、合流路３４で結合させる試料３０，３１の割合を変えるようにしてもよい。   In the first embodiment, the first sample 30 of the first microchannel 32 and the second sample 31 of the second microchannel 33 are divided by the same amount, and then the same amount of liquid droplets divided. Although the example which couple | bonds 30a and 31a was shown, changing the magnitude | size of the bubble 10 which divides the 1st sample 30 and the 2nd sample 31, and changing the ratio of the samples 30 and 31 couple | bonded by the merge channel 34 It may be.

また、本実施例１において、試料３０，３１の気泡１０による分断は、光照射手段１１による光照射の断続を適切に行うことにより制御される。ここで、光照射の断続を適切に行うとは、光照射の断続を所定時間毎に行うことや、光センサや静電容量式センサ等によって気泡１０と試料３０，３１の境目を検知し、その検知位置を基準にして光照射の断続を所定の制御タイミングで行うことなどをいう。   In the first embodiment, the separation of the samples 30 and 31 by the bubbles 10 is controlled by appropriately performing the light irradiation intermittently by the light irradiation means 11. Here, appropriately interrupting the light irradiation means that the light irradiation is intermittently performed every predetermined time, or the boundary between the bubble 10 and the samples 30 and 31 is detected by an optical sensor or a capacitance sensor, For example, the light irradiation is intermittently performed at a predetermined control timing based on the detection position.

図１０は、本発明を適用したマイクロ流体デバイス１の実施例２を模式的に示す図である。なお、図１０において、試料（液体）３０，３１が図中左側から右側方向に向かって流動するように、第１微小流路３２，第２微小流路３３と合流路３４に圧力が加えられている。   FIG. 10 is a diagram schematically showing Example 2 of the microfluidic device 1 to which the present invention is applied. In FIG. 10, pressure is applied to the first microchannel 32, the second microchannel 33, and the combined channel 34 so that the samples (liquids) 30 and 31 flow from the left side to the right side in the drawing. ing.

この図１０に示すマイクロ流体デバイス１は、第１プレート部材２に形成された第１微小流路３２と第２微小流路３３が合流路３４にＹ字状に合流するようになっており、第１微小流路３２側に光導入部１９と光吸収体８（８ａ）とが配置されている。そして、第１微小流路３２に配置された光吸収体８（８ａ）に光照射手段１１の光導入部１９からレーザ光Ｌを照射し、第１微小流路３２内の第１の試料３０に気泡１０を生じさせ、その気泡１０で第１微小流路３２を絞り、第１微小流路３２から合流路３４に流れ込む第１の試料３０と第２微小流路３３から合流路３４に流れ込む第２の試料３１の流量比率を適宜変えることができるようにしたものである。なお、第１微小流路３２に生じさせる気泡１０の大きさは、前述のように、光照射手段１１の光導入部１９から出射されるレーザ光Ｌの照射エネルギーを制御することにより変えることができる。   In the microfluidic device 1 shown in FIG. 10, the first microchannel 32 and the second microchannel 33 formed in the first plate member 2 are joined to the joint channel 34 in a Y shape, The light introduction part 19 and the light absorber 8 (8a) are arranged on the first microchannel 32 side. Then, the light absorber 8 (8 a) disposed in the first microchannel 32 is irradiated with the laser light L from the light introducing portion 19 of the light irradiation means 11, and the first sample 30 in the first microchannel 32 is irradiated. Bubbles 10 are generated, the first microchannel 32 is narrowed by the bubbles 10, and the first sample 30 flowing from the first microchannel 32 into the combined channel 34 and the second microchannel 33 flow into the combined channel 34. The flow rate ratio of the second sample 31 can be changed as appropriate. Note that the size of the bubble 10 generated in the first microchannel 32 can be changed by controlling the irradiation energy of the laser light L emitted from the light introduction unit 19 of the light irradiation unit 11 as described above. it can.

図１１は、本発明を適用したマイクロ流体デバイス１の実施例３を模式的に示す図である。なお、図１１において、試料（液体）３９が図中左側から右側方向に向かって流動するように、微小流路４０内に圧力が加えられている。   FIG. 11 is a diagram schematically showing Example 3 of the microfluidic device 1 to which the present invention is applied. In FIG. 11, pressure is applied in the microchannel 40 so that the sample (liquid) 39 flows from the left side to the right side in the drawing.

この図１１に示すマイクロ流体デバイス１は、第１プレート部材２に形成された微小流路４０の上流側から下流側に向かって順に第１の光照射手段４１、第２の光照射手段４２、第３の光照射手段４３が微小流路４０に沿って配置されている。   The microfluidic device 1 shown in FIG. 11 includes a first light irradiation means 41, a second light irradiation means 42, in order from the upstream side to the downstream side of the microchannel 40 formed in the first plate member 2. Third light irradiation means 43 is arranged along the microchannel 40.

そして、第１の光照射手段４１からの光が照射される第一の光照射部Ａには、微小流路４０の他の部分よりも高い光吸収性を発揮する光吸収体４４が配置されている。第１の光照射手段４１からのレーザ光Ｌが光吸収体４４に照射されると、光吸収体４４が光を吸収して発熱して微小流路４０の液体３９に気泡１０を生じさせる。このように、第１の光照射手段４１は、気泡１０を生じさせる気泡発生手段として機能する。なお、第１の光照射手段４１のレーザ光Ｌの照射を遮断するか、又は照射エネルギーを小さくすることにより、気泡１０が微小流路４０内を流動する液体３９によって下流側に運ばれる。   And in the 1st light irradiation part A to which the light from the 1st light irradiation means 41 is irradiated, the light absorber 44 which exhibits higher light absorptivity than the other part of the microchannel 40 is arrange | positioned. ing. When the light absorber 44 is irradiated with the laser light L from the first light irradiation means 41, the light absorber 44 absorbs the light and generates heat to generate the bubbles 10 in the liquid 39 in the microchannel 40. Thus, the 1st light irradiation means 41 functions as a bubble generation means which produces the bubble 10. FIG. Note that the bubble 10 is carried downstream by the liquid 39 flowing in the microchannel 40 by blocking the irradiation of the laser light L of the first light irradiation means 41 or reducing the irradiation energy.

第２の光照射手段４２からのレーザ光Ｌが照射される第二の光照射部Ｂ、及び第３の光照射手段４３からのレーザ光Ｌが照射される第三の光照射部Ｃには、光吸収体４４のような光を吸収しやすい物質を配置しないようになっている。その結果、微小流路４０内を液体３９とともに流動する気泡１０に対して第２の光照射手段４２からレーザ光Ｌを照射し、光圧でもって気泡１０を微小流路４０の壁面に押し付け、気泡１０を第二の光照射部Ｂに保持することができる。なお、この際、第２の光照射手段４２から出射されるレーザ光Ｌの照射エネルギーが大きいものであっても、第二の光照射部Ｂの微小流路４０の壁面が発熱しにくいため、第二の光照射部Ｂにおいて気泡１０が新たに生じたり、また気泡１０が成長するようなことがない。したがって、微小流路４０内の液体３９の流動速度に応じて第２の光照射手段４２のレーザ光Ｌの照射エネルギーを大きくしたとしても、発熱による前述の弊害を生じることなく気泡１０をより強い光圧をもって確実に第二の光照射部Ｂに保持することができる。このように、第２の光照射手段４２は、気泡１０を第二の光照射部Ｂに保持する気泡保持手段として機能する。   The second light irradiation unit B irradiated with the laser light L from the second light irradiation unit 42 and the third light irradiation unit C irradiated with the laser light L from the third light irradiation unit 43 include Further, a substance that easily absorbs light such as the light absorber 44 is not arranged. As a result, the laser beam L is irradiated from the second light irradiation means 42 to the bubble 10 flowing along with the liquid 39 in the microchannel 40, and the bubble 10 is pressed against the wall surface of the microchannel 40 with light pressure. The bubble 10 can be held in the second light irradiation part B. At this time, even if the irradiation energy of the laser light L emitted from the second light irradiation means 42 is large, the wall surface of the micro flow path 40 of the second light irradiation unit B hardly generates heat. In the second light irradiation part B, the bubble 10 is not newly generated or the bubble 10 does not grow. Therefore, even if the irradiation energy of the laser light L of the second light irradiation means 42 is increased in accordance with the flow speed of the liquid 39 in the microchannel 40, the bubbles 10 are made stronger without causing the above-described adverse effects due to heat generation. The second light irradiation part B can be reliably held with light pressure. As described above, the second light irradiation means 42 functions as a bubble holding means for holding the bubble 10 in the second light irradiation portion B.

第２の光照射手段４２のレーザ光Ｌの照射を遮断するか、又は照射エネルギーを小さくすることにより、気泡１０が第二の光照射部Ｂから第三の光照射部Ｃ側に微小流路４０内を流動する液体３９によって運ばれる。そして、この第三の光照射部Ｃにおいても、第３の光照射手段４３からのレーザ光Ｌによって第二の光照射部Ｂの場合と同様に気泡１０を保持することができる。このように、第３の光照射手段４３は、気泡１０を第三の光照射部Ｃに保持する気泡保持手段として機能する。   By blocking the irradiation of the laser light L of the second light irradiation means 42 or reducing the irradiation energy, the bubble 10 is moved from the second light irradiation part B to the third light irradiation part C side with a minute flow path. It is carried by a liquid 39 that flows within 40. Also in the third light irradiation part C, the bubbles 10 can be held by the laser light L from the third light irradiation means 43 as in the case of the second light irradiation part B. As described above, the third light irradiation means 43 functions as a bubble holding means for holding the bubble 10 in the third light irradiation portion C.

本発明を適用したマイクロ流体デバイスの模式的外観斜視図である。It is a typical external appearance perspective view of the microfluidic device to which this invention is applied. 本発明を適用したマイクロ流体デバイスの第２プレート部材を省略し且つ部分的に拡大して示す模式的平面図である。It is a typical top view which abbreviate | omits the 2nd plate member of the microfluidic device to which this invention is applied, and shows it partially expanded. 気泡により複数の流路を開閉する態様を示すマイクロ流体デバイスの模式的平面図である。It is a schematic plan view of the microfluidic device which shows the aspect which opens and closes several flow paths with air bubbles. 気泡の機能の一態様を示すための第１プレート部材の模式的平面図である。It is a typical top view of the 1st plate member for showing one mode of a bubble function. 気泡消去手段の第１態様を示すマイクロ流体デバイスの模式的平面図である。It is a typical top view of the microfluidic device which shows the 1st aspect of a bubble elimination means. 本発明を適用したマイクロ流体デバイスの第２形態を示す模式的平面図であり、図２に対応するマイクロ流体デバイスの模式的平面図である。It is a schematic plan view which shows the 2nd form of the microfluidic device to which this invention is applied, and is a schematic plan view of the microfluidic device corresponding to FIG. 本発明の第３形態を示す図であり、気泡消去手段の第２態様を示すマイクロ流体デバイスの模式的平面図である。It is a figure which shows the 3rd form of this invention, and is a typical top view of the microfluidic device which shows the 2nd aspect of a bubble elimination means. 本発明の第４形態を示す図であり、気泡消去手段の第３態様を示すマイクロ流体デバイスの模式的平面図である。It is a figure which shows the 4th form of this invention, and is a typical top view of the microfluidic device which shows the 3rd aspect of a bubble elimination means. 本発明の実施例１に係るマイクロ流体デバイスの模式的平面図である。It is a typical top view of the microfluidic device concerning Example 1 of the present invention. 本発明の実施例２に係るマイクロ流体デバイスの模式的平面図である。It is a typical top view of the microfluidic device concerning Example 2 of the present invention. 本発明の実施例３に係るマイクロ流体デバイスの模式的平面図である。It is a typical top view of the microfluidic device concerning Example 3 of the present invention. 第１従来例に係るマイクロ流体デバイスを示す図であり、（ａ）が保護プレートを取り外して示す模式的平面図、（ｂ）が（ａ）のＡ−Ａ線に沿って切断して示す断面図である。It is a figure which shows the microfluidic device which concerns on a 1st prior art example, (a) is a typical top view which removes a protection plate, (b) is the cross section which cut | disconnects and shows along the AA line of (a) FIG. 第２従来例に係る液体搬送装置の模式的平面図である。It is a typical top view of the liquid conveyance apparatus which concerns on a 2nd prior art example.

符号の説明Explanation of symbols

１……マイクロ流体デバイス、５，１６，１７，４０……微小流路、８，８ａ，４４……光吸収体、１０……気泡、１１……光照射手段、１３……集光手段（集光光学系、気泡移動手段）、１９……光導入部（導光路）、２０，２３，２６……気泡消去手段、３０ａ，３１ａ……液滴、３２……第１微小流路、３３……第２微小流路、３４……合流路（微小流路）、４１……第１の光照射手段（光照射手段）、４２……第２の光照射手段（光照射手段）、４３……第３の光照射手段（光照射手段）、Ａ……第一の光照射部、Ｂ……第二の光照射部   DESCRIPTION OF SYMBOLS 1 ... Microfluidic device, 5, 16, 17, 40 ... Micro flow path, 8, 8a, 44 ... Light absorber, 10 ... Bubble, 11 ... Light irradiation means, 13 ... Condensing means ( Condensing optical system, bubble moving means), 19... Light introducing portion (light guide path), 20, 23, 26... Bubble erasing means, 30 a, 31 a .. droplet, 32. 2nd microchannel, 34 ... Combined channel (microchannel), 41 ... 1st light irradiation means (light irradiation means), 42 ... 2nd light irradiation means (light irradiation means), 43 ... Third light irradiation means (light irradiation means), A ... First light irradiation section, B ... Second light irradiation section

Claims (16)

液体が導入された流路内に、又は、この流路周辺に光を照射する光照射手段を有し、この光照射手段からの照射光によって前記流路内の液体を加熱し、前記流路内に気泡を発生させることを特徴とするマイクロ流体デバイス。   A light irradiating means for irradiating light in or around the flow path into which the liquid is introduced, and the liquid in the flow path is heated by the irradiation light from the light irradiating means; A microfluidic device characterized by generating bubbles inside. 液体が導入された流路内に、又は、この流路周辺に光を照射する光照射手段を有し、この光照射手段からの照射光によって前記流路内の液体を加熱し、前記流路内に気泡を発生させ、前記光照射手段からの照射光によって前記気泡の動きを制御することを特徴とするマイクロ流体デバイス。   A light irradiating means for irradiating light in or around the flow path into which the liquid is introduced, and the liquid in the flow path is heated by the irradiation light from the light irradiating means; A microfluidic device characterized in that bubbles are generated therein and the movement of the bubbles is controlled by light emitted from the light irradiation means. 前記光照射手段は光を照射するための集光光学系を前記流路の近傍に配置したことを特徴とする請求項１又は２に記載のマイクロ流体デバイス。   The microfluidic device according to claim 1, wherein the light irradiating unit includes a condensing optical system for irradiating light in the vicinity of the flow path. 前記光照射手段は光を照射するための導光路を前記流路の近傍に配置したことを特徴とする請求項１〜３のいずれかに記載のマイクロ流体デバイス。   The microfluidic device according to any one of claims 1 to 3, wherein the light irradiation means includes a light guide path for irradiating light in the vicinity of the flow path. 前記光照射手段の照射光の出力を制御して、前記流路内に前記気泡を保持しておくことを特徴とする請求項１〜４のいずれかに記載のマイクロ流体デバイス。   The microfluidic device according to any one of claims 1 to 4, wherein the bubble is held in the flow path by controlling the output of the irradiation light of the light irradiation means. 前記光照射手段の光照射位置を変化させ、前記気泡をマランゴニ効果により移動させることができることを特徴とする請求項１〜５のいずれかに記載のマイクロ流体デバイス。   The microfluidic device according to any one of claims 1 to 5, wherein the light irradiation position of the light irradiation means can be changed and the bubbles can be moved by the Marangoni effect. 前記光照射手段によって光が照射される部位の近傍の前記流路の壁面部に他の壁面部より高い光吸収性を有する光吸収体を配置したことを特徴とする請求項１〜６のいずれかに記載のマイクロ流体デバイス。   7. A light absorber having higher light absorption than other wall surface portions is disposed on the wall surface portion of the flow path in the vicinity of a portion irradiated with light by the light irradiation means. A microfluidic device according to claim 1. 前記光吸収体の幅寸法及び高さ寸法を前記気泡の直径以下にしたことを特徴とする請求項１〜７のいずれかに記載のマイクロ流体デバイス。   The microfluidic device according to any one of claims 1 to 7, wherein a width dimension and a height dimension of the light absorber are set to be equal to or smaller than a diameter of the bubbles. 液体が導入された流路内に、又は、この流路周辺に光を照射する光照射手段を有し、この光照射手段によって光が照射される部位の近傍の壁面部に他の壁面部より高い光吸収性を有する光吸収体を配置した第一の光照射部と、光が照射される近傍の前記壁面部には前記光吸収体を配置しない第二の光照射部を設け、前記第一の光照射部で前記気泡を発生させ、前記第二の光照射部で前記気泡を制御することを特徴とするマイクロ流体デバイス。   There is a light irradiation means for irradiating light in or around the flow channel into which the liquid is introduced, and the wall surface portion near the portion irradiated with light by this light irradiation means is from other wall surface portions. A first light irradiating part in which a light absorber having high light absorptivity is disposed, and a second light irradiating part in which the light absorber is not disposed are provided on the wall surface in the vicinity where light is irradiated. A microfluidic device, wherein the bubbles are generated by one light irradiation unit and the bubbles are controlled by the second light irradiation unit. 前記光照射手段の照射光の出力を制御して、前記流路内に前記気泡を保持しておくことを特徴とする請求項９に記載のマイクロ流体デバイス。   10. The microfluidic device according to claim 9, wherein the bubble is held in the flow path by controlling the output of the irradiation light of the light irradiation means. 前記光照射手段の光照射位置を変化させ、前記気泡をマランゴニ効果により移動させることができることを特徴とする請求項９又は１０に記載のマイクロ流体デバイス。   11. The microfluidic device according to claim 9, wherein the light irradiation position of the light irradiation unit is changed, and the bubbles can be moved by the Marangoni effect. 前記光吸収体の幅寸法及び高さ寸法を前記気泡の直径以下にしたことを特徴とする請求項９〜１１のいずれかに記載のマイクロ流体デバイス。   The microfluidic device according to any one of claims 9 to 11, wherein a width dimension and a height dimension of the light absorber are made equal to or less than a diameter of the bubbles. 前記光照射手段の照射光の出力を制御して、前記気泡の大きさを任意の大きさに形成し、前記流路の流路断面積を前記気泡によって変えることを特徴とする請求項１〜１２のいずれかに記載のマイクロ流体デバイス。   The output of the irradiation light of the light irradiation means is controlled, the size of the bubble is formed to an arbitrary size, and the channel cross-sectional area of the channel is changed by the bubble. The microfluidic device according to any one of 12. 前記光照射手段からの光照射を断続的に行い、前記流路内を移動する液体を前記気泡によって分断することを特徴とする請求項１〜１２のいずれかに記載のマイクロ流体デバイス。   The microfluidic device according to any one of claims 1 to 12, wherein the light irradiation from the light irradiation means is intermittently performed, and the liquid moving in the flow path is divided by the bubbles. 前記光照射手段からの光照射の断続を適切に行い、前記流路内で前記液体を任意の量に計り取ることを特徴とする請求項１４のマイクロ流体デバイス。   The microfluidic device according to claim 14, wherein the light irradiation from the light irradiation unit is appropriately interrupted and the liquid is measured in an arbitrary amount in the flow path. 前記流路内の前記気泡を消滅又は小さくする気泡消去手段を配置したことを特徴とする請求項１〜１５のいずれかに記載のマイクロ流体デバイス。   The microfluidic device according to any one of claims 1 to 15, further comprising bubble erasing means for eliminating or reducing the bubbles in the flow path.
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