JP2002345210A - Motor and excimer laser apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a motor apparatus which can realize reduction in size of apparatus and the cost of cooling by using in common a cooling jacket of the motor for cooling and heat generating part of the drive controller, and also to provide an excimer laser apparatus using the same motor apparatus to drive a laser gas stirring fan. SOLUTION: The excimer laser apparatus comprises a laser oscillation chamber 30, a gas stirring fan 31 located within the laser oscillation chamber 30, a motor 33 for driving the fan to drive the gas stirring fan 31, and an inverter 37 for supplying drive power to the fan driving motor 33 and controlling the fan driving motor 33. The fan driving motor 33 includes the cooling jacket 33 for cooling and also provided with a thermal coupling portion for thermally coupling the cooling jacket 36 and the heat generating part of the inverter 37.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electric motor, an electric motor device having a drive control device for supplying electric power to the electric motor and controlling the electric motor, and an excimer laser device using the electric motor device.

[0002]

2. Description of the Related Art FIG. 1 is a diagram showing a schematic configuration of a conventional excimer laser device of this kind. As shown in the figure, a gas stirring fan 11 is disposed in a laser oscillation chamber 10, and the gas stirring fan 11 is rotatably supported by bearings 12, 12 disposed at both ends of the laser oscillation chamber 10. 13 is driven. The motor 13 for driving a fan includes a stator 14 and a rotor 15, and a cooling jacket 16 is arranged on the outer periphery of the stator 14.

FIG. 2 is a diagram showing a configuration of a fan driving motor and an inverter device. The inverter device 21 includes a central control circuit section 27, a power conversion element section 28, and a heat radiating section 29.
2 are thermally coupled. A power cable 26 is connected to the inverter device 21, and the inverter device 21 and the motor 13 for driving the fan are connected by a power cable 23. Inverter device 21 to fan drive motor 1
The fan driving motor 13 is operated by supplying inverter output power to the motor 3 via a power cable 23. A cooling water inlet 25 and a cooling water outlet 24 are provided in the cooling jacket 16 of the motor 13 for driving a fan.
Cooling water W is supplied and drained.

[0004] Laser light generated by electrode discharge (not shown) inside the laser oscillation chamber 10 can be obtained stably because the gas between the discharge electrodes is always in a constant state. In order to obtain a stable state of the gas, it is necessary to constantly stir the gas in the laser oscillation chamber 10 and to move the gas existing between the discharge electrodes at a certain or more wind speed.

The fan driving motor 13 stirs the gas in the laser oscillation chamber 10 with the gas stirring fan 11 and keeps the gas between the discharge electrodes (not shown) at a predetermined wind speed or higher. It is always driving while outputting light. In many fan drive motors 13, the input power supplied from the drive power
The vehicle cannot be operated at 0% efficiency, but is operated at a predetermined efficiency. Therefore, a loss occurs with respect to the input power, and most of the loss is consumed in the form of heat radiation from the surface of the motor 13 for driving the fan.

In the conventional fan drive motor 13, the cooling jacket 16 is provided so as to surround the stator 14 as described above, and heat radiation due to loss of the fan drive motor 13 is efficiently absorbed by circulating cooling water. However, performance degradation and safety of the fan drive motor 13 are ensured.

[0007] Similarly, since the power supply device serving as the power source of the fan driving motor 13 needs to vary the rotation speed of the fan driving motor 13 to a predetermined frequency, the inverter device 21 is provided with the inverter device 21 as shown in FIG. Used. In this inverter device 21 as well, some heat is generated due to the power loss of the power conversion element unit 28 that internally performs frequency conversion, and in the worst case, thermal runaway of the power conversion element unit 28 occurs, making power conversion impossible. It is assumed that the operation control of the fan driving motor 13 is hindered.

As a countermeasure, in the prior art, a heat radiating portion 29 having a cooling means such as an air cooling fan is also provided inside the inverter device 21, and the heat radiating portion 29 is thermally connected to the power conversion element portion 28 through the thermal coupling portion 22. A structure is adopted in which the cooling is performed by coupling, and the operation of the power conversion element unit 28 is stabilized.

However, the cooling structure in which the inverter device 21 is provided with the heat radiating portion 29 provided as a cooling means by an air-cooling fan or the like increases the mechanical structure of the inverter device 21 itself, which is a power supply device, and reduces the driving parts such as the air-cooling fan. Since many devices need to be installed, there are problems that the number of failure factors increases, the cost of the entire excimer laser device increases, and the use of the device is limited due to an increase in the size of the device.

[0010]

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and has been made by sharing a cooling jacket of an electric motor for cooling the electric motor and cooling a heating portion of a drive control device. It is an object of the present invention to provide an electric motor device capable of reducing the size and cost of cooling and an excimer laser device using the electric motor device for driving a laser gas stirring fan.

[0011]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention is directed to an electric motor device comprising an electric motor and a drive control device for supplying driving electric power to the electric motor and controlling the electric motor. The electric motor has a cooling jacket for cooling, and a thermal coupling portion for thermally coupling the cooling jacket and the heat generating portion of the drive control device is provided.

As described above, by thermally connecting the cooling jacket of the motor and the heat generating portion of the drive control device with the thermal connection portion, the cooling jacket is used for cooling the motor and cooling the heat generating portion of the drive control device. As a result, the entire motor device can be reduced in size and cost for cooling can be reduced.

According to a second aspect of the present invention, in the electric motor device according to the first aspect, the drive control device is an inverter device.

When the drive control device is an inverter device as described above, the power conversion element portion, which is the heat generating portion of the inverter device, is thermally coupled to the cooling jacket of the motor at the thermal coupling portion, and the heat generated by the motor is generated. At the same time, the heat generated by the power conversion element can be efficiently cooled by the cooling jacket.

According to a third aspect of the present invention, there is provided a laser oscillation chamber, a gas stirring fan disposed in the laser oscillation chamber, a fan driving motor for driving the gas stirring fan, and a driving power for the fan driving motor. In the excimer laser device including a drive control device for supplying and controlling the fan drive motor, the fan drive motor has a cooling jacket for cooling, and the cooling jacket and the heat generating portion of the drive control device are connected to each other. A thermal coupling portion for thermally coupling is provided.

As described above, the cooling jacket of the fan driving motor and the heating section of the drive control device are thermally connected by the thermal connection section, so that the cooling jacket can be cooled by the motor and the heating section of the drive control device. Therefore, the size of the entire excimer laser device can be reduced and the cost of cooling can be reduced.

According to a fourth aspect of the present invention, in the excimer laser device according to the third aspect, the drive control device is an inverter device, and the thermal coupling part is provided with a cooling structure of the inverter in a cooling jacket of the fan driving motor. It is characterized by being integrated.

When the drive control device is an inverter device as described above, the power conversion element portion, which is a heat generating portion of the inverter device, is thermally coupled to the cooling jacket of the fan driving motor at the thermal coupling portion. The cooling jacket can efficiently cool the heat generated by the power conversion element simultaneously with the heat generated by the fan driving motor.

According to a fifth aspect of the present invention, in the excimer laser device according to the fourth aspect, the thermal coupling portion is obtained by coupling a heat generating portion of the inverter device to a cooling jacket of the motor by a heat transfer block. Features.

As described above, by connecting the heat generating portion of the inverter device to the cooling jacket of the electric motor by the heat transfer block, the power converting element portion and the like, which are the heat generating portion of the inverter device, are thermally connected to the cooling jacket with a simple configuration. Will be combined.

[0021]

Embodiments of the present invention will be described below with reference to the drawings. 3 to 5 are diagrams showing a schematic configuration of an excimer laser device using the motor device according to the present invention. FIG. 3 is an overall longitudinal sectional view, and FIG. 4 is a sectional view of a motor device for driving a gas stirring fan. FIG. 5 is a side view thereof.

As shown, as shown in FIG.
A gas stirring fan 31 is disposed inside the gas stirring fan 31. The gas stirring fan 31 is rotatably supported by bearings 32, 32 arranged at both ends of the laser oscillation chamber 30, and is driven by a fan driving motor 33. I have. The fan driving motor 33 includes a stator 34 and a rotor 35, and a cooling jacket 36 is provided on the outer periphery of the stator 34 (the outer periphery of the stator core). In the cooling jacket 36,
A cooling water inlet 43 and a cooling water outlet 42 are provided, and the cooling water W introduced from the cooling water inlet 43 efficiently cools heat due to power loss generated during operation of the fan driving motor 33. I have.

An inverter device 37 is mounted on the cooling jacket 36 of the motor 33 for driving the fan. The inverter device 37 includes a central control circuit 38 and a power conversion element unit 39, is connected to an input power cable 44, and is supplied with power from a power source (not shown). Inverter device 37
The power conversion element section 39 is thermally coupled to the cooling jacket 36 via the thermal coupling section 40. That is, the power conversion element section 39, which is a heating section of the inverter device 37, has an integral structure with the cooling jacket 36 of the fan driving motor 33 via the thermal coupling section 40. As a result, the cooling water supplied to the cooling jacket 36 allows the power conversion element 39 of the inverter device 37 to be driven similarly to the fan driving motor 33.
Is also cooled. A material having good thermal conductivity is used for the thermal coupling portion 40. For example, metal (Cu, Al) and the like. A resin material may be used to prevent the power conversion element of the power conversion element section 39 from being grounded.

The heat coupling portion 40 in the inverter device 37 attached to the cooling jacket 36 of the fan driving motor 33 is connected to the power conversion element portion 39 in the inverter device 37.
Is thermally coupled to the cooling jacket 36 to cool the heat generated by the
A method in which each power conversion element of the power conversion element section 39 is directly fastened to the cooling jacket 36 of the fan driving motor 33, and each power conversion element of the power conversion element section 39 is once thermally coupled to a heat transfer block or the like at once. For example, there is a method of thermally coupling the heat transfer block to the cooling jacket 36. In any case, the cooling jacket 3 is used to cool the heat-generating portion of the inverter device 37, which is a drive control device, and to cool the fan driving motor 33.
6 are shared.

In the above example, the inverter device 37 has a central control circuit 38 and a power conversion element section 39, and both the central control circuit 38 and the power conversion element section 39 are mounted on the cooling jacket 36 of the motor 33 for driving the fan. However, the present invention is not limited to this. For example, as shown in FIG. 6, a control circuit unit 47 including the central control circuit is separately provided, and the inverter device 37 and the control circuit unit 47 are connected to a control signal line. 45, the control power supply cable 46 is connected to the control circuit unit 47, and the power supply cable 48 is connected to the inverter device 37.

In the above example, the inverter device 37 is mounted on the cooling jacket 36, and the power conversion element portion 39 of the inverter device 37 is connected to the cooling jacket 3 via the thermal coupling portion 40.
6 shows an example in which a motor having a structure integrated with the motor 6 is used as the fan driving motor 33 for driving the gas stirring fan 31 of the excimer laser device. It is needless to say that the driving is not limited to the above. The motor device according to the present invention has a configuration in which a thermal coupling portion for thermally coupling the cooling jacket of the motor and the heat generating portion of the drive control device is provided. There is no particular limitation.

The drive control device is not limited to the inverter device. In other words, if the drive control device has a function of supplying drive power to the motor and a function of controlling the motor, the drive control device may be configured separately, May be configured.

[0028]

As described above, according to the present invention, the following excellent effects can be obtained.

According to the first aspect of the present invention, the cooling jacket of the electric motor is thermally connected to the heat generating portion of the drive control device by the thermal connection, so that the cooling jacket can be cooled and driven by the electric motor. Since it is commonly used for cooling the heat generating portion of the device, it is possible to reduce the size and cost of the entire electric motor device.

According to the second aspect of the present invention, since the drive control device is an inverter device, the power conversion element portion, which is a heat generating portion of the inverter device, is thermally connected to the cooling jacket of the motor at the thermal coupling portion. Thus, the cooling jacket can efficiently cool the heat generated by the power conversion element simultaneously with the heat generated by the motor. There is no need to provide cooling means such as an air-cooling fan in the inverter device, and the entire device can be reduced in size.

According to the third aspect of the present invention, the cooling jacket of the motor for driving the fan and the heat generating portion of the drive control device are thermally connected to each other by the thermal connection portion, so that the cooling jacket is cooled by the motor. And the cooling of the heat generating portion of the drive control device, so that the size of the entire excimer laser device and the cost of cooling can be reduced.

According to the fourth aspect of the present invention, the drive control device is an inverter device, so that the power conversion element portion, which is a heat generating portion of the inverter device, is thermally coupled to the cooling jacket of the fan driving motor. The cooling jacket is capable of efficiently cooling the heat generated by the electric power conversion element at the same time as the heat generated by the fan driving motor.

According to the fifth aspect of the present invention, by connecting the cooling structure of the inverter device to the cooling jacket of the motor by the heat transfer block, the power conversion element portion, which is the heat generating portion of the inverter device, has a simple configuration. It can be thermally coupled to the cooling jacket.

[Brief description of the drawings]

FIG. 1 is a diagram showing a schematic configuration of a conventional excimer laser device.

FIG. 2 is a diagram showing a configuration of a conventional fan driving motor and inverter device.

FIG. 3 is a longitudinal sectional view showing a schematic configuration of an excimer laser device according to the present invention.

FIG. 4 is a diagram showing a cross-sectional configuration of a motor device for driving a gas stirring fan of an excimer laser device according to the present invention.

FIG. 5 is a diagram showing a side configuration of a motor device for driving a gas stirring fan of an excimer laser device according to the present invention.

FIG. 6 is a diagram showing a cross-sectional configuration of a motor device for driving a gas stirring fan of an excimer laser device according to the present invention.

[Explanation of symbols]

 REFERENCE SIGNS LIST 30 laser oscillation chamber 31 gas stirring fan 32 bearing 33 motor for driving fan 34 stator 35 rotor 36 cooling jacket 37 inverter device 38 central control circuit 39 power conversion element section 40 thermal coupling section 42 cooling water discharge port 43 cooling water introduction port 44 input power cable 45 control signal line 46 control power cable 47 control circuit section 48 power cable

 ──────────────────────────────────────────────────続 き Continued on front page (72) Inventor Shinichi Sekiguchi 11-1 Haneda Asahimachi, Ota-ku, Tokyo Inside Ebara Corporation (72) Inventor Toshimitsu Ibarata 11-1 Haneda Asahi-cho, Ota-ku, Tokyo Shares (72) Inventor Hiroyasu Kawashima 11-1 Haneda Asahi-cho, Ota-ku, Tokyo F-term (reference) 5F071 AA06 EE04 JJ05 5H609 BB01 BB15 PP02 PP05 PP16 QQ04 QQ13 QQ23 RR26 RR37 RR42 RR69 RR73 5H611 AA09 BB01 BB04 PP01 UA04

Claims (5)

[Claims] 1. An electric motor device comprising: an electric motor; and a drive control device that supplies driving electric power to the electric motor and controls the electric motor, wherein the electric motor has a cooling jacket for cooling; An electric motor device, further comprising a thermal coupling portion for thermally coupling a heat generating portion of the drive control device. 2. The motor device according to claim 1, wherein the drive control device is an inverter device. 3. A laser oscillation chamber, a gas stirring fan disposed in the laser oscillation chamber, a fan driving motor for driving the gas stirring fan, and supplying driving power to the fan driving motor and driving the fan. An excimer laser device having a drive control device for controlling a motor for driving, wherein the fan drive motor has a cooling jacket for cooling, and thermally couples the cooling jacket and a heat generating portion of the drive control device. An excimer laser device comprising a thermal coupling part. 4. The excimer laser device according to claim 3, wherein the drive control device is an inverter device, and the thermal coupling unit integrates a cooling structure of the inverter with a cooling jacket of the fan driving motor. An excimer laser device, characterized in that: 5. An excimer laser device according to claim 4, wherein said thermal coupling portion is formed by coupling a heat generating portion of said inverter device to a cooling jacket of said electric motor by a heat transfer block. Laser device.