EP1142642B1 - Micropump for dispensing liquid droplets - Google Patents
Micropump for dispensing liquid droplets Download PDFInfo
- Publication number
- EP1142642B1 EP1142642B1 EP01810335A EP01810335A EP1142642B1 EP 1142642 B1 EP1142642 B1 EP 1142642B1 EP 01810335 A EP01810335 A EP 01810335A EP 01810335 A EP01810335 A EP 01810335A EP 1142642 B1 EP1142642 B1 EP 1142642B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- front surface
- micropump
- micropump according
- pump chamber
- ejection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/02—Burettes; Pipettes
- B01L3/0241—Drop counters; Drop formers
- B01L3/0268—Drop counters; Drop formers using pulse dispensing or spraying, eg. inkjet type, piezo actuated ejection of droplets from capillaries
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0887—Laminated structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/16—Surface properties and coatings
- B01L2300/161—Control and use of surface tension forces, e.g. hydrophobic, hydrophilic
- B01L2300/165—Specific details about hydrophobic, oleophobic surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0433—Moving fluids with specific forces or mechanical means specific forces vibrational forces
- B01L2400/0439—Moving fluids with specific forces or mechanical means specific forces vibrational forces ultrasonic vibrations, vibrating piezo elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
- G01N35/10—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
- G01N2035/1027—General features of the devices
- G01N2035/1034—Transferring microquantities of liquid
- G01N2035/1041—Ink-jet like dispensers
Definitions
- the invention relates to a micropump, as they are mainly used for dispensing small drops of liquid from the air in laboratory equipment for chemical, especially biochemical and medical examinations.
- the invention is based on the object to provide a generic micropump, in which the ejection of liquid drops with great reliability and low variation of the drop size.
- Fig. 1 shows an inventive micropump 1 in a holder 2, which z. B. can be mounted in a three-axis movable version of a Mikropipettiervorraum.
- the micropump 1 has (Fig. 2a, b) a base plate 3 made of glass, for. B. Borglas on with a flat top, which is connected to the underside of a thinner cover plate 4 made of silicon. From the otherwise equally flat underside of the cover plate 4, a pump chamber 5 is etched out of about 50 microns in height and a front of the same subsequent straight discharge channel 6 of the same height, which narrows to a section of constant cross-section, which ends in a discharge opening 7.
- an inflow channel 8 which ends in an inflow opening (not shown) connected to a storage vessel or a pump, for. B. may be connected to a dilutor.
- a plate-shaped piezoelectric element 9 is mounted as an actuator, which is controlled via leads 10.
- the piezoelectric element 9 and most of the cover plate 4 are protected by a cover 11. It can, as shown in Fig. 2a, be formed as a plastic cover or a potting compound - preferably a plastic - consist, with which the piezoelectric element 9 and the leads 10 are cast.
- the ejection opening 7 is approximately circular ( Figures 3a, b, 4). It is concentrically surrounded by a flat annular front surface 12. On the outside of the front surface 12 limiting edge connects to the same all around a rotationally symmetrical, in particular truncated cone-shaped, with the front surface 12 concentric side surface 13 at.
- the diameter of the ejection opening 7 is about 50 microns, that of the front surface 12 is about 150 microns.
- the surface area of the front surface 12 is therefore approximately 8 times the area of the ejection opening 7. It has been found that no disturbing accumulations of liquid can form on the front surface 12 under such conditions.
- the lower limit for the diameter of the front surface is given by manufacturing tolerances and requirements for robustness. Without too much effort to produce micropumps with front surfaces of about 200 microns to 250 microns in diameter, which, if one assumes a diameter of the ejection opening of about 50 microns, leads to area ratios of about 1:15 to 1:25. Also, a front surface diameter of 150 ⁇ m as stated above is still very feasible. Under most circumstances, the characteristics of the micropump are still within the limits of what is admissible, even in the case of much larger area ratios than stated above. Of course, the limit depends on other parameters as well as the requirements for the function of the micropump.
- the angle between the axis and a generatrix of the side surface 13 is about 30 °. If possible, it should not be greater than 60 °, so that, if necessary, a drainage of liquid from the front surface over its outer edge on the side surface to a sufficient extent. It has been found that the described formation of the side surface is also suitable to avoid the formation of liquid accumulations on the front surface when dipping the tip of the micropump from a liquid level when the same z. B. used as a pipette tip and therefore occasionally immersed to draw up liquid by means of a downstream pump.
- the preparation of the micropump according to the invention takes place largely in a manner known per se, in that a rectangular silicon plate, from which the pumping chamber, the ejection channel and the inflow channel have been etched out, is connected by anodic bonding to a likewise rectangular glass plate. Subsequently, by grinding by means of a diamond grinding wheel, the side surface 13 is applied and thus completed the tip of the micropump. Then, the piezoelectric element 9 and the electrical leads 10 are attached to the same and the cover 11. Finally, the front surface 12 and at least z. T. also coated the side surface 13.
- the delivery of liquid drops by means of the micropump is carried out as in known generic micropumps so that the cover plate 4 is bent by means of the piezoelectric element 9 abruptly down.
- the reduction in the volume of the pumping chamber 5 causes a pressure wave that passes through the discharge channel 6 to the outlet opening 7 and causes the ejection of a liquid drop from the same.
Landscapes
- Health & Medical Sciences (AREA)
- Clinical Laboratory Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Reciprocating Pumps (AREA)
- Nozzles (AREA)
- Micromachines (AREA)
Description
Die Erfindung betrifft eine Mikropumpe, wie sie vor allem zur Abgabe von kleinen Flüssigkeitstropfen aus der Luft in Laborgeräten für chemische, insbesondere biochemische und medizinische Untersuchungen eingesetzt werden.The invention relates to a micropump, as they are mainly used for dispensing small drops of liquid from the air in laboratory equipment for chemical, especially biochemical and medical examinations.
Bei bekannten gattungsgemässen Mikropumpen, mit denen Flüssigkeitstropfen aus der Luft abgegeben werden, liegt die Ausstossöffnung gewöhnlich exzentrisch in einer grösseren, im wesentlichen ebenen, meist rechteckigen Fläche. In EP-A-0 725 267 wurde zwar vorgeschlagen, die Spitze einer Mikropumpe pyramidenförmig auszubilden, doch werden keine näheren Angaben gemacht und es ist anzunehmen, dass sie tatsächlich einen Pyramidenstumpf bilden soll, in dessen verhältnismässig grosser ebener Frontfläche exzentrisch die Ausstossöffnung liegt. Eine gattungsgemäße Mikropumpe wird in WO-A-9826179 beschrieben.In known generic micropumps with which liquid drops are discharged from the air, the ejection opening is usually eccentric in a larger, substantially planar, usually rectangular area. Although it has been proposed in EP-A-0 725 267 to make the tip of a micropump pyramidal, no further details are given and it is to be assumed that it should actually form a truncated pyramid in whose comparatively large plane front face eccentrically lies the ejection opening. A generic micropump is described in WO-A-9826179.
Es hat sich jedoch gezeigt, dass eine grössere die Ausstossöffnung umgebende Frontfläche sich ungünstig auf die Zuverlässigkeit des Ausstosses der Flüssigkeitstropfen sowie die Reproduzierbarkeit der Tropfengrösse auswirkt. Dies liegt vor allem daran, dass sich an der Frontfläche leicht eine um die Ausstossöffnung konzentrierte Flüssigkeitsansammlung bildet, die den Tropfenausstoss in unkontrollierbarer Weise beeinflusst, u. U. sogar verhindert.However, it has been shown that a larger front surface surrounding the ejection opening has an unfavorable effect on the reliability of the ejection of the liquid drops and the reproducibility of the drop size. This is mainly due to the fact that at the front surface easily forms a concentrated around the discharge liquid accumulation, which influences the drop ejection in an uncontrollable manner, u. U. even prevented.
Der Erfindung liegt die Aufgabe zu Grunde, eine gattungsgemässe Mikropumpe anzugeben, bei welcher die Ausstossung von Flüssigkeitstropfen mit grosser Zuverlässigkeit und geringer Schwankung der Tropfengrösse erfolgt.The invention is based on the object to provide a generic micropump, in which the ejection of liquid drops with great reliability and low variation of the drop size.
Diese Aufgabe wird durch die Merkmale des Anspruchs 1 gelöst. Die Entstehung einer Flüssigkeitsansammlung in der Umgebung der Ausstossöffnung wird in der Regel vermieden. Aber auch im Fall, dass sich trotzdem - z. B. wegen einer nicht ganz präzisen Regelung des Flüssigkeitsnachschubs - eine solche Flüssigkeitsansammlung bildet, bleibt sie geringfügig und erreicht kein störendes Ausmass, da die Flüssigkeit seitlich abfliesst. Die Ausstossung von Flüssigkeitstropfen erfolgt somit ungestört und die Tropfengrösse hängt nur von den Eigenschaften der Flüssigkeit, von der Grösse der Ausstossöffnung und von der Ansteuerung des Aktuators ab.This object is solved by the features of claim 1. The formation of a fluid accumulation in the vicinity of the ejection opening is usually avoided. But even in the case that still -. B. because of a not very precise regulation of Flüssigkeitsnachschubs - forms such a fluid accumulation, it remains small and does not reach a disturbing extent, since the liquid flows off to the side. The ejection of liquid drops is thus undisturbed and the drop size depends only on the properties of the liquid, on the size of the ejection opening and on the control of the actuator.
Im folgenden wird die Erfindung anhand von Figuren, welche lediglich ein Ausführungsbeispiel darstellen, näher erläutert. Es zeigen
- Fig. 1
- eine Seitenansicht einer erfindungsgemässen Mikropumpe in einer Halterung,
- Fig. 2a
- vergrössert einen Längsschnitt durch den vorderen Teil der Mikropumpe von Fig. 1,
- Fig. 2b
- eine Unteransicht des in Fig. 2a dargestellten Teils der Mikropumpe,
- Fig. 3a
- nochmals vergrössert eine Seitenansicht der Spitze des in Fig. 2a,b dargestellten vorderen Teils der Mikropumpe,
- Fig. 3b
- eine Unteransicht der in Fig. 3a dargestellten Spitze und
- Fig. 4
- nochmals vergrössert eine Frontansicht der in Fig. 3a,b dargestellten Spitze.
- Fig. 1
- a side view of an inventive micropump in a holder,
- Fig. 2a
- Enlarges a longitudinal section through the front part of the micropump of Fig. 1,
- Fig. 2b
- 3 is a bottom view of the part of the micropump shown in FIG. 2a, FIG.
- Fig. 3a
- again enlarges a side view of the tip of the front part of the micropump shown in Fig. 2a, b,
- Fig. 3b
- a bottom view of the tip shown in Fig. 3a and
- Fig. 4
- once again enlarges a front view of the top shown in Fig. 3a, b.
Fig. 1 zeigt eine erfindungsgemässe Mikropumpe 1 in einer Halterung 2, welche z. B. in eine dreiachsig bewegbare Fassung einer Mikropipettiervorrichtung eingehängt werden kann. Die Mikropumpe 1 weist (Fig. 2a,b) eine Grundplatte 3 aus Glas, z. B. Borglas auf mit einer ebenen Oberseite, welche mit der Unterseite einer dünneren Deckplatte 4 aus Silizium verbunden ist. Aus der im übrigen gleichfalls ebenen Unterseite der Deckplatte 4 ist eine Pumpkammer 5 von ca. 50 µm Höhe herausgeätzt sowie ein vorn an dieselbe anschliessender gerader Ausstosskanal 6 gleicher Höhe, der sich zu einem Abschnitt konstanten Querschnitts verengt, welcher in einer Ausstossöffnung 7 endet. Am gegenüberliegenden Ende der Pumpkammer 5 schliesst über eine Engstelle ein Zuflusskanal 8 an, welcher in einer Zuflussöffnung (nicht dargestellt) endet, die mit einem Vorratsgefäss oder einer Pumpe, z. B. einem Dilutor verbunden sein kann. An einem der Pumpkammer 5 gegenüberliegenden Teil der Oberseite der Deckplatte 4 ist ein plattenförmiges Piezoelement 9 als Aktuator angebracht, das über Zuleitungen 10 angesteuert wird. Das Piezoelement 9 und der grösste Teil der Deckplatte 4 sind durch eine Abdeckung 11 geschützt. Sie kann, wie in Fig. 2a dargestellt, als Kunststoffdeckel ausgebildet sein oder aus einer Vergussmasse - vorzugsweise einem Kunststoff - bestehen, mit welcher das Piezoelement 9 und die Zuleitungen 10 vergossen sind.Fig. 1 shows an inventive micropump 1 in a
Die Ausstossöffnung 7 ist (Fig. 3a,b, 4) ungefähr kreisförmig. Sie ist konzentrisch von einer ebenen kreisringförmigen Frontfläche 12 umgeben. An der die Frontfläche 12 aussen begrenzenden Kante schliesst an dieselbe ringsum eine rotationssymmetrische, insbesondere kegelstumpfmantelförmige, mit der Frontfläche 12 konzentrische Seitenfläche 13 an. Der Durchmesser der Ausstossöffnung 7 beträgt etwa 50 µm, derjenige der Frontfläche 12 etwa 150 µm. Der Flächeninhalt der Frontfläche 12 beträgt also etwa das 8-fache der Fläche der Ausstossöffnung 7. Es hat sich gezeigt, dass sich bei solchen Verhältnissen keine störenden Flüssigkeitsansammlungen auf der Frontfläche 12 bilden können.The
Je kleiner das Flächenverhältnis ist, desto günstiger sind grundsätzlich die Eigenschaften der Mikropumpe hinsichtlich der Vermeidung störender Flüssigkeitsansammlungen im Bereich der Ausstossöffnung. Die untere Grenze für den Durchmesser der Frontfläche ist dabei durch Herstellungstoleranzen und Anforderungen an die Robustheit gegeben. Ohne allzu grossen Aufwand herstellbar sind Mikropumpen mit Frontflächen von etwa 200 µm bis 250 µm Durchmesser, was, wenn man von einem Durchmesser der Ausstossöffnung von ca. 50 µm ausgeht, auf Flächenverhältnisse von etwa 1:15 bis 1:25 führt. Auch ein Durchmesser der Frontfläche von 150 µm wie oben angegeben ist noch gut realisierbar. Unter den meisten Umständen liegen die Eigenschaften der Mikropumpe auch bei sehr viel grösseren Flächenverhältnissen als oben angegeben noch durchaus im Rahmen des Zulässigen. Die Grenze ist natürlich abhängig von anderen Parametern sowie den Anforderungen an die Funktion der Mikropumpe.The smaller the area ratio, the better the properties of the micropump are in principle with regard to the avoidance of interfering liquid accumulations in the area of the ejection opening. The lower limit for the diameter of the front surface is given by manufacturing tolerances and requirements for robustness. Without too much effort to produce micropumps with front surfaces of about 200 microns to 250 microns in diameter, which, if one assumes a diameter of the ejection opening of about 50 microns, leads to area ratios of about 1:15 to 1:25. Also, a front surface diameter of 150 μm as stated above is still very feasible. Under most circumstances, the characteristics of the micropump are still within the limits of what is admissible, even in the case of much larger area ratios than stated above. Of course, the limit depends on other parameters as well as the requirements for the function of the micropump.
Der Winkel zwischen der Achse und einer Mantellinie der Seitenfläche 13 liegt bei ca. 30°. Er sollte möglichst nicht grösser als 60° sein, damit nötigenfalls ein Abfliessen von Flüssigkeit von der Frontfläche über deren Aussenrand auf die Seitenfläche in ausreichendem Ausmass erfolgt. Es hat sich gezeigt, dass die beschriebene Ausbildung der Seitenfläche auch geeignet ist, die Bildung von Flüssigkeitsansammlungen an der Frontfläche beim Austauchen der Spitze der Mikropumpe aus einem Flüssigkeitsspiegel zu vermeiden, wenn dieselbe z. B. als Pipettenspitze verwendet und daher zum Aufziehen von Flüssigkeit etwa mittels einer nachgeschalteten Pumpe gelegentlich auch eingetaucht wird.The angle between the axis and a generatrix of the
Günstig für die Vermeidung von Flüssigkeitsansammlungen im Bereich der Ausstossöffnung 7 ist auch eine geringe Rauhigkeit der Oberfläche an der Frontfläche 12 und mindestens einem angrenzenden Bereich der Seitenfläche 13, die möglichst N4 oder geringer sein sollte. Sie kann durch eine geeignete Beschichtung vermindert werden, welche auch durch ihre chemische Zusammensetzung die Adhäsion der Flüssigkeit verringern kann. So kann sie je nach den Eigenschaften der Flüssigkeit hydrophob oder hydrophil sein. Bei Mikropumpen zur Abgabe wässriger Flüssigkeiten hat sich z. B. eine hydrophobe Plasmapolymerbeschichtung als günstig erwiesen.Favorable for the avoidance of accumulations of liquid in the area of the
Die Herstellung der erfindungsgemässen Mikropumpe erfolgt weitgehend in an sich bekannter Weise, indem eine rechteckige Siliziumplatte, aus welcher die Pumpkammer, der Ausstosskanal und der Zuflusskanal herausgeätzt wurden, durch anodisches Bonden mit einer ebenfalls rechteckigen Glasplatte verbunden wird. Anschliessend wird durch Schleifen mittels einer Diamantschleifscheibe die Seitenfläche 13 angelegt und somit die Spitze der Mikropumpe fertiggestellt. Dann werden das Piezoelement 9 und die elektrischen Zuleitungen 10 zu demselben sowie die Abdeckung 11 angebracht. Schliesslich werden die Frontfläche 12 und mindestens z. T. auch die Seitenfläche 13 beschichtet.The preparation of the micropump according to the invention takes place largely in a manner known per se, in that a rectangular silicon plate, from which the pumping chamber, the ejection channel and the inflow channel have been etched out, is connected by anodic bonding to a likewise rectangular glass plate. Subsequently, by grinding by means of a diamond grinding wheel, the
Die Abgabe von Flüssigkeitstropfen mittels der Mikropumpe erfolgt wie bei bekannten gattungsgemässen Mikropumpen so, dass die Deckplatte 4 mittels des Piezoelements 9 schlagartig nach unten durchgebogen wird. Die Verringerung des Volumens der Pumpkammer 5 verursacht eine Druckwelle, die durch den Ausstosskanal 6 zur Austrittsöffnung 7 läuft und die Ausstossung eines Flüssigkeitstropfens aus derselben bewirkt.The delivery of liquid drops by means of the micropump is carried out as in known generic micropumps so that the
- 11
- Mikropumpemicropump
- 22
- Halterungbracket
- 33
- Grundplattebaseplate
- 44
- Deckplattecover plate
- 55
- Pumpkammerpumping chamber
- 66
- Ausstosskanalejection channel
- 77
- Ausstossöffnungdelivery mouth
- 88th
- Zuflusskanalinlet channel
- 99
- Piezoelementpiezo element
- 1010
- Zuleitungenleads
- 1111
- Abdeckungcover
- 1212
- Frontflächefront surface
- 1313
- Seitenflächeside surface
Claims (10)
- Micropump (1) with a pump chamber (5) the volume of which can be reduced by means of an actuator, with a pipette tip and an ejection channel (6) leading from the pump chamber (5) to an ejection orifice (7) surrounded by a front surface (12), the front surface (12) of the pipette tip forming an essentially flat surface limited by an edge of a lateral surface (13) surrounding it, the micropump comprising a base plate (3) with a flat upper surface and a cover plate (4) bonded to this, so that together they form the pump chamber (5), the ejection channel (6), the ejection orifice (7) and the pipette tip, characterized in that the outer edge of the front surface (12) is essentially ring-shaped and the surface area of the front surface (12) is at most 25 times the area of the ejection orifice.
- Micropump according to Claim 1, characterized in that the surface area of the front surface (12) is at most 15 times the area of the ejection orifice (7).
- Micropump according to Claim 1 or 2, characterized in that the diameter of the front surface (12) is at most 250 µm and especially at most 200 µm.
- Micropump according to one of Claims 1 to 3, characterized in that the lateral surface (13) surrounding the front surface (12) is rotationally symmetrical, and preferably in the shape of a truncated pyramid.
- Micropump according to one of Claims 1 to 4, characterized in that the ejection orifice (7) is positioned essentially in the centre of the front surface (12).
- Micropump according to one of Claims 1 to 5, characterized in that the front surface (12) displays roughness of at most N4 as, preferably, does at least a contiguous portion of the adjacent edge zone of the lateral surface (13).
- Micropump according to one of Claims 1 to 6, characterized in that the front surface (12) is coated with a hydrophobic or hydrophilic substance, as, preferably, is at least a contiguous portion of the adjacent edge zone of the lateral surface (13).
- Micropump according to one of Claims 1 to 7, characterized in that the actuator is a flat piezo-element (9) arranged on the outer side of the cover plate (4) in a position opposite the pump chamber (5).
- Micropump according to one of Claims 1 to 8, characterized in that the silicon cover plate (4) is thinner than the glass base plate (3) and is made flat on its upper side opposite the pump chamber (5).
- Micropump according to one of Claims 1 to 9, characterized in that the pump chamber (5), the ejection channel (6) and the feed channel (8) all display the same height and are etched out of the otherwise flat underside of the cover plate (4).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH692002000 | 2000-04-07 | ||
| CH6922000 | 2000-04-07 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP1142642A2 EP1142642A2 (en) | 2001-10-10 |
| EP1142642A3 EP1142642A3 (en) | 2003-11-12 |
| EP1142642B1 true EP1142642B1 (en) | 2006-06-14 |
Family
ID=4529333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP01810335A Expired - Lifetime EP1142642B1 (en) | 2000-04-07 | 2001-04-03 | Micropump for dispensing liquid droplets |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US6530755B2 (en) |
| EP (1) | EP1142642B1 (en) |
| DE (1) | DE50110096D1 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10154601B4 (en) * | 2000-11-13 | 2007-02-22 | Agilent Technologies, Inc. (n.d.Ges.d.Staates Delaware), Palo Alto | A micro device with an integrated protruding electrospray emitter and a method of fabricating the micro device |
| FR2839662B1 (en) * | 2002-05-16 | 2005-12-02 | Centre Nat Rech Scient | DEVICE FOR LOCALLY DEPOSITING AT LEAST ONE BIOLOGICAL SOLUTION |
| US7517201B2 (en) * | 2005-07-14 | 2009-04-14 | Honeywell International Inc. | Asymmetric dual diaphragm pump |
| US8353864B2 (en) * | 2009-02-18 | 2013-01-15 | Davis David L | Low cost disposable infusion pump |
| US8197235B2 (en) * | 2009-02-18 | 2012-06-12 | Davis David L | Infusion pump with integrated permanent magnet |
| US20100211002A1 (en) * | 2009-02-18 | 2010-08-19 | Davis David L | Electromagnetic infusion pump with integral flow monitor |
| WO2016078340A1 (en) | 2014-11-17 | 2016-05-26 | 中国科学院微生物研究所 | Apparatus, system, and method for dispensing/mixing a small quantity of liquid |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4052320A (en) | 1975-08-29 | 1977-10-04 | Eastman Kodak Company | Telescoping serum separator and dispenser |
| DE3029718A1 (en) * | 1980-08-06 | 1982-02-18 | Eppendorf Gerätebau Netheler + Hinz GmbH, 2000 Hamburg | Liquid sampler and carrier for single-handed operation - has suction channel between suction inlet and retention chamber |
| US4389657A (en) * | 1980-11-03 | 1983-06-21 | Exxon Research And Engineering Co. | Ink jet system |
| JPS60104762A (en) * | 1983-11-10 | 1985-06-10 | Nippon Soken Inc | Electro-distorsion actuator and fuel injection valve |
| US4615360A (en) | 1985-09-05 | 1986-10-07 | Eastman Kodak Company | Means providing separation of exterior sheath of liquid on dispensing tip |
| US5094594A (en) | 1990-04-23 | 1992-03-10 | Genomyx, Incorporated | Piezoelectric pumping device |
| WO1996024040A2 (en) | 1995-02-01 | 1996-08-08 | Steffen Howitz | Electrically controllable micro-pipette |
| JPH09232227A (en) * | 1996-02-22 | 1997-09-05 | Dainippon Screen Mfg Co Ltd | Apparatus and method for discharging liquid |
| DE59707378D1 (en) | 1996-12-11 | 2002-07-04 | Gesim Ges Fuer Silizium Mikros | microejection |
| DE29708678U1 (en) | 1997-05-16 | 1997-08-07 | Institut für Mikrotechnik Mainz GmbH, 55129 Mainz | Micro diaphragm pump |
| DE19720482C5 (en) * | 1997-05-16 | 2006-01-26 | INSTITUT FüR MIKROTECHNIK MAINZ GMBH | Micro diaphragm pump |
| DE69914029T2 (en) * | 1998-08-31 | 2004-11-18 | Sysmex Corp. | Sample aspirator with two cooperating handling units |
-
2001
- 2001-03-26 US US09/817,309 patent/US6530755B2/en not_active Expired - Fee Related
- 2001-04-03 EP EP01810335A patent/EP1142642B1/en not_active Expired - Lifetime
- 2001-04-03 DE DE50110096T patent/DE50110096D1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE50110096D1 (en) | 2006-07-27 |
| US20010028854A1 (en) | 2001-10-11 |
| EP1142642A3 (en) | 2003-11-12 |
| US6530755B2 (en) | 2003-03-11 |
| EP1142642A2 (en) | 2001-10-10 |
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