DE59912305D1 - scanning Electron Microscope - Google Patents

scanning Electron Microscope

Info

Publication number
DE59912305D1
DE59912305D1 DE59912305T DE59912305T DE59912305D1 DE 59912305 D1 DE59912305 D1 DE 59912305D1 DE 59912305 T DE59912305 T DE 59912305T DE 59912305 T DE59912305 T DE 59912305T DE 59912305 D1 DE59912305 D1 DE 59912305D1
Authority
DE
Germany
Prior art keywords
electron microscope
scanning electron
scanning
microscope
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59912305T
Other languages
German (de)
Inventor
Erik Essers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority claimed from PCT/EP1999/001544 external-priority patent/WO1999046797A1/en
Application granted granted Critical
Publication of DE59912305D1 publication Critical patent/DE59912305D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
    • H01J2237/2608—Details operating at elevated pressures, e.g. atmosphere with environmental specimen chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE59912305T 1998-03-10 1999-03-10 scanning Electron Microscope Expired - Lifetime DE59912305D1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19810301 1998-03-10
DE19845329A DE19845329C2 (en) 1998-03-10 1998-10-01 Scanning electron microscope
PCT/EP1999/001544 WO1999046797A1 (en) 1998-03-10 1999-03-10 Scanning electron microscope

Publications (1)

Publication Number Publication Date
DE59912305D1 true DE59912305D1 (en) 2005-08-25

Family

ID=7860372

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19845329A Expired - Lifetime DE19845329C2 (en) 1998-03-10 1998-10-01 Scanning electron microscope
DE59912305T Expired - Lifetime DE59912305D1 (en) 1998-03-10 1999-03-10 scanning Electron Microscope

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19845329A Expired - Lifetime DE19845329C2 (en) 1998-03-10 1998-10-01 Scanning electron microscope

Country Status (1)

Country Link
DE (2) DE19845329C2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10233002B4 (en) * 2002-07-19 2006-05-04 Leo Elektronenmikroskopie Gmbh Objective lens for an electron microscopy system and electron microscopy system
DE102004037781A1 (en) 2004-08-03 2006-02-23 Carl Zeiss Nts Gmbh electron beam device
DE102006043895B9 (en) * 2006-09-19 2012-02-09 Carl Zeiss Nts Gmbh Electron microscope for inspecting and processing an object with miniaturized structures
DE102007010873B4 (en) * 2007-03-06 2009-07-30 Carl Zeiss Nts Gmbh objective lens
DE602007007468D1 (en) 2007-07-27 2010-08-12 Integrated Circuit Testing Magnetic lens arrangement
DE602007005631D1 (en) 2007-07-27 2010-05-12 Integrated Circuit Testing Electrostatic lens arrangement
DE102009041993B4 (en) * 2009-09-18 2020-02-13 Carl Zeiss Microscopy Gmbh Observation and analysis device
DE102010026169B4 (en) * 2010-07-06 2014-09-04 Carl Zeiss Microscopy Gmbh A particle beam system
EP2706554B1 (en) * 2012-09-10 2016-05-25 Fei Company Method of using a compound particle-optical lens
DE102014018555B3 (en) * 2014-12-15 2016-03-03 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Electrode carrier device and electron-optical lens for electrically charged particles and their use

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3638682A1 (en) * 1986-11-13 1988-05-19 Siemens Ag SPECTROMETER LENS FOR CARPUSULAR BEAM MEASUREMENT TECHNOLOGY
DE3703028A1 (en) * 1987-02-02 1988-09-01 Siemens Ag Scanning microscope
US4897545A (en) * 1987-05-21 1990-01-30 Electroscan Corporation Electron detector for use in a gaseous environment
US4785182A (en) * 1987-05-21 1988-11-15 Electroscan Corporation Secondary electron detector for use in a gaseous atmosphere
DE69233781D1 (en) * 1991-11-27 2010-04-01 Hitachi Ltd electron beam device
US5396067A (en) * 1992-06-11 1995-03-07 Nikon Corporation Scan type electron microscope
DE4236273A1 (en) * 1992-10-27 1993-07-01 Siemens Ag Lens for focussing electrons for specimen inspection - has field generated by coils and cone-shaped electrode set into entry section
US5412211A (en) * 1993-07-30 1995-05-02 Electroscan Corporation Environmental scanning electron microscope
JP3323021B2 (en) * 1994-12-28 2002-09-09 株式会社日立製作所 Scanning electron microscope and sample image observation method using the same
DE19605855A1 (en) * 1996-02-16 1997-08-21 Act Advanced Circuit Testing Detector lens for corpuscular beam devices

Also Published As

Publication number Publication date
DE19845329C2 (en) 2001-09-27
DE19845329A1 (en) 1999-09-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition