CN215338348U

CN215338348U - Three-axis gyroscope

Info

Publication number: CN215338348U
Application number: CN202121119799.8U
Authority: CN
Inventors: 丁希聪; 凌方舟; 蒋乐跃; 黄黎
Original assignee: Meixin Semiconductor Tianjin Co ltd
Current assignee: Meixin Semiconductor Tianjin Co ltd
Priority date: 2021-05-24
Filing date: 2021-05-24
Publication date: 2021-12-28
Anticipated expiration: 2031-05-24

Abstract

The present invention provides a three-axis gyroscope comprising: a first driving frame located on the left side and capable of performing a resonant motion in the up-down direction along the Y-axis; a second driving frame, which is positioned at the right side, is parallel to the first driving frame and is spaced apart from the first driving frame by a predetermined distance, and is capable of performing a resonant motion along the Y-axis in the opposite direction to the first driving frame; an X/Y gyro structure connected between the first driving frame and the second driving frame; the Z gyro structure is connected to the outer sides of the first driving frame and the second driving frame; the X/Y gyro structure and the Z gyro structure are mutually independent, and the X/Y gyro structure and the Z gyro structure are driven by the first driving frame and the second driving frame together. Compared with the prior art, the X/Y gyroscope structure and the Z gyroscope structure of the three-axis gyroscope are driven by the same two driving frames, and the X/Y gyroscope structure and the Z gyroscope structure are independent, so that the three-axis gyroscope has the advantages of high integration level and small quadrature error.

Description

Three-axis gyroscope

[ technical field ] A method for producing a semiconductor device

The utility model relates to the technical field of micro mechanical systems, in particular to a lever type three-axis gyroscope.

[ background of the utility model ]

The gyroscope is a sensor for measuring angular rate, is one of core devices of the inertial technology, and plays an important role in the fields of modern industrial control, aerospace, national defense and military, consumer electronics and the like.

The development of a spinning top can be roughly divided into three stages:

the first stage is a traditional mechanical rotor gyro which has high precision and plays an irreplaceable role on military strategic weapons such as nuclear submarines, intercontinental strategic missiles and the like, but has larger volume, complex manufacturing process, high price, long period and unsuitability for batch production; the second stage is an optical detection gyroscope which mainly comprises a laser gyroscope and a fiber-optic gyroscope and mainly utilizes the Sagnac effect, and the optical detection gyroscope has the advantages of no rotating part, higher precision, important function in navigation and aerospace, larger volume, higher cost and difficult integration; the third stage is a micromechanical gyroscope which is developed in the 90 s of the 20 th century, the research of which is started later, but the micromechanical gyroscope is developed rapidly by virtue of the unique advantages of small volume, low power consumption, light weight, batch production, low price, strong overload resistance and integration, is suitable for civil fields of aircraft navigation, automobile manufacturing, digital electronics, industrial instruments and the like and modern national defense and military fields of unmanned aerial vehicles, tactical missiles, intelligent bombs, military aiming systems and the like, has wide application prospect and is more and more concerned by people.

With the increasing demand of the consumer market, the requirements on the size and the performance of a Micro-Electro-Mechanical System (MEMS) gyroscope are higher, the gyroscope is changed from a single-axis gyroscope to a three-axis gyroscope, the early three-axis gyroscope consists of three independent single-axis gyroscopes, and an independent driving structure is required to be included, so the overall structure size is large. In the current consumer-grade application, the gyroscope is generally a single-chip three-axis gyroscope and is characterized in that the driving is shared, and an X/Y/Z gyroscope mass block is reasonably arranged, but the three-axis gyroscope also has the problems of larger size, low integration level and large quadrature error.

Referring to the chinese invention patent CN108225295A, which discloses a three-axis gyroscope with tuning fork driving effect, the three-axis gyroscope structure disclosed in this patent designs a steering structure ingeniously, the left and right mass blocks are used for detecting the Y/Z axis angular rate, the central mass block is used for detecting the X axis angular rate, but obviously its integration level is not high, and the common mass block of the Y/Z mass blocks is easy to generate coupling; continuing to refer to the chinese invention patent CN110926445A, it discloses a three-axis MEMS gyroscope, the micro gyroscope structure disclosed in this patent is a shared drive, and its innovation point is that the design of the X/Y gyroscope structure is novel, and the X/Y gyroscope interacts and is arranged in the middle of the driving frame and is supported by the central anchor point, the Z-axis gyroscopes are distributed on both sides of the X/Y gyroscope and are connected to the middle gyroscope structure. The integrated structure is novel and reasonable in design and high in integration level, but the Z-axis gyroscope is not directly decoupled, and the problems of low sensitivity and large quadrature error can be faced.

Therefore, a new technical solution is needed to solve the problems of low integration level and large quadrature error of the three-axis gyroscope in the prior art.

[ Utility model ] content

One of the objectives of the present invention is to provide a three-axis gyroscope with high integration and small quadrature error.

According to one aspect of the utility model, there is provided a three-axis gyroscope comprising: a first driving frame located on the left side and capable of performing a resonant motion in the up-down direction along the Y-axis; a second driving frame, which is positioned at the right side, is parallel to the first driving frame and is spaced apart from the first driving frame by a predetermined distance, and is capable of performing a resonant motion along the Y-axis in the opposite direction to the first driving frame; an X/Y gyro structure connected between the first driving frame and the second driving frame; the Z gyro structure is connected to the outer sides of the first driving frame and the second driving frame; the X/Y gyroscope structure and the Z gyroscope structure are mutually independent, and the X/Y gyroscope structure and the Z gyroscope structure are driven by the first driving frame and the second driving frame together.

Compared with the prior art, the X/Y gyroscope structure and the Z gyroscope structure of the three-axis gyroscope are driven by the same two driving frames, and the X/Y gyroscope structure and the Z gyroscope structure are independent from each other. When the angular velocities in different directions are induced, the X/Y gyroscope structure and the Z gyroscope structure are independent from each other and do not influence each other due to the Coriolis effect, so that the orthogonal error can be reduced, and the detection precision is improved.

[ description of the drawings ]

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise. Wherein:

FIG. 1 is a schematic diagram of the overall structure of a three-axis gyroscope in one embodiment of the present invention;

FIG. 2 is a schematic structural diagram of the X/Y gyroscope structure shown in FIG. 1 according to the present invention;

FIG. 3 is a schematic structural diagram of the Z-gyroscope structure shown in FIG. 1 in accordance with the present invention;

FIG. 4 is a schematic diagram of the three-axis gyroscope of FIG. 1 according to the present invention in a driven configuration;

FIG. 5 is a schematic diagram of the X-axis of the three-axis gyroscope shown in FIG. 1 according to the present invention;

FIG. 6 is a schematic diagram of the Y-axis of the three-axis gyroscope shown in FIG. 1 according to the present invention;

FIG. 7 is a schematic view of the Z-axis of the tri-axis gyroscope shown in FIG. 1 according to the present invention;

FIG. 8 is an enlarged schematic view of the first drive frame region shown in FIG. 1;

FIG. 9 is an enlarged schematic view of the X/Y center-coupled beam region shown in FIG. 1;

fig. 10 is an enlarged schematic view of the Z-mass region shown in fig. 1.

Wherein, 1 a-left drive frame (or first drive frame); 1 b-right drive frame (or second drive frame); 2 a-upper mass Y (or first mass); 2 b-lower mass Y (or second mass); 2 c-left mass X (or third mass); 2 d-right mass X (or fourth mass); 2 e-left mass Z (or first Z mass); 2 f-right mass Z (or second Z mass); 2 g-left detection frame (or first Z detection frame); 2 h-right detection frame (or second Z detection frame);

3a.1-3 a.6-first drive electrodes; 3a.7-3 a.12-second drive electrodes; 3b.1 — first drive feedback electrode; 3 b.2-a second drive feedback electrode; 3 c.1-a first Y-axis detection electrode, 3 c.2-a second Y-axis detection electrode; 3 d.1-a first X-axis detection electrode, 3 d.2-a second X-axis detection electrode; 3 e.1-a first Z-axis detection electrode, 3 e.2-a second Z-axis detection electrode;

4a.1 and 4 a.3-first drive frame support beam, 4a.2 and 4 a.4-second drive frame support beam; 4 b.1-a first X/Y drive coupling beam, 4 b.2-a second X/Y drive coupling beam; 4c.1 first Z-drive coupling beam, 4 c.2-second Z-drive coupling beam; 4 d.1-a first X/Y steering beam, 4 d.2-a second X/Y steering beam, 4 d.3-a third X/Y steering beam and 4 d.4-a fourth X/Y steering beam; 4 e.1-a first X/Y connecting beam, 4 e.2-a second X/Y connecting beam, 4 e.3-a third X/Y connecting beam, 4 e.4-a fourth X/Y connecting beam; 4f-X/YZ center coupling beam; 4 g.1-4 g.4-a first Z-shaped connecting beam, 4 g.5-4 g.8-a second Z-shaped connecting beam; 4 h.1-4 h.4-first Z detection frame support beam, 4 h.5-4 h.8-second Z detection frame support beam; 4j.1 and 4 i.2-lever beams; 4 j.1-4 j.4 lever support beam;

5a.1 and 5 a.3-first drive frame anchor, 5a.2 and 5 a.4-second drive frame anchor; 5 b.1-a first X/Y steering beam anchor point, 5 b.2-a second X/Y steering beam anchor point, 5 b.3-a third X/Y steering beam anchor point and 5 b.4-a fourth X/Y steering beam anchor point; 5 c.1-5 c.4 first Z detection frame support beam anchor points, 5 c.5-5 c.8 second Z detection frame support beam anchor points; 5d.1 ~ 5d.4 lever beam anchor point.

[ detailed description ] embodiments

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.

Reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic may be included in at least one implementation of the utility model. The appearances of the phrase "in one embodiment" in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Unless otherwise specified, the terms connected, and connected as used herein mean electrically connected, directly or indirectly.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "secured," "coupled," and the like are to be construed broadly; for example, the connection can be fixed, detachable or integrated; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other suitable relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

Aiming at the problems in the prior art, the utility model provides a three-axis gyroscope. Fig. 1 is a schematic diagram of a three-axis gyroscope according to an embodiment of the present invention; please refer to fig. 2, which is a schematic structural diagram of the X/Y gyroscope structure shown in fig. 1 according to the present invention; fig. 3 is a schematic structural diagram of the Z-gyroscope structure shown in fig. 1 according to the present invention. As can be seen from fig. 2 and 3, the three-axis gyroscope shown in fig. 1 includes a first drive frame 1a, a second drive frame 1b, an X/Y gyro structure, and a Z gyro structure. The first driving frame 1a is located on the left side, and can perform a resonant motion in the up-down direction along the Y axis. The second driving frame 1b is positioned at the right side, parallel to and spaced apart from the first driving frame 1a by a predetermined distance, and is capable of performing a resonant motion along the Y-axis in the opposite direction to the first driving frame 1 a. The X/Y gyro structure is connected between the first driving frame 1a and the second driving frame 1b, and is capable of sensing an X-axis angular velocity and a Y-axis angular velocity. The Z gyro structure is connected to the outside of the first driving frame 1a and the second driving frame 1b, and can sense a Z-axis angular velocity. The X/Y gyroscope structure and the Z gyroscope structure are independent of each other and are not directly connected with each other, and the X/Y gyroscope structure and the Z gyroscope structure are driven by the first driving frame 1a and the second driving frame 1b together. The three-axis gyroscope is reasonable and compact in structure and high in integration level. When the angular velocities in different directions are induced, the X/Y gyroscope structure and the Z gyroscope structure are independent from each other and do not influence each other due to the Coriolis effect, so that the orthogonal error can be reduced, and the detection precision is improved.

In order to better explain the structure of the three-axis gyroscope according to the present invention, a three-dimensional rectangular coordinate system may be established, and in the embodiment shown in fig. 1-3, in the plane where the base of the three-axis gyroscope is located, the direction parallel to the first driving frame 1a and the second driving frame 1b is taken as the Y-axis, the direction perpendicular to the first driving frame 1a and the second driving frame 1b is taken as the X-axis, the X-axis and the Y-axis are taken as coordinate axes to determine the Z-axis, the central point a of the X/Y gyroscope structure is taken as the origin of coordinates, and the three-dimensional rectangular coordinate system established by the X-axis, the Y-axis and the Z-axis is embodied in fig. 1-3.

As shown in fig. 1-3 and 8, the three-axis gyroscope further includes: first drive frame anchors 5a.1 and 5 a.3; first drive frame support beams 4a.1 and 4a.3 connected between the first drive frame anchor points 5a.1, 5a.3 and the first drive frame 1 a; second drive frame anchors 5a.2 and 5 a.4; second drive frame support beams 4a.2 and 4a.4 connected between second drive frame anchor points 5a.2 and 5a.4 and second drive frame 1 b; first drive electrodes 3a.1-3a.6 and first drive feedback electrodes 3b.1 disposed within the first drive frame 1 a; second drive electrodes 3a.7-3a.12 and second drive feedback electrodes 3b.2 arranged in a second drive frame 1 b.

The first driving electrodes 3a.1-3a.6, the first driving feedback electrodes 3a.1, the second driving electrodes 3a.7-3a.12 and the second driving feedback electrodes 3b.2 are fixedly arranged on a substrate (not shown), the first driving frame 1a is connected with first driving frame anchors 5a.1 and 5a.3 through first driving frame support beams 4a.1 and 4a.3, the first driving frame 1a and the first driving frame support beams 4a.1 and 4a.3 are suspended above the substrate, the second driving frame 1b is connected with second driving frame anchors 5a.2 and 5a.4 through second driving frame support beams 4a.2 and 4a.4, and the second driving frame 1b and the second driving frame support beams 4a.2 and 4a.4 are suspended above the substrate. The

driving frames

1a and 1b and the driving frame support beams 4a.1-4a.4 are of the same thickness and are of a suspension structure, and the anchor points 5a.1-5a.4 are of a non-suspension structure and are directly connected with the substrate to play a supporting role.

In the specific embodiment shown in fig. 1-3, the first and

second driving frames

1a and 1b are identical in structure and are symmetrically arranged (or distributed in bilateral symmetry) about the Y-axis. The first driving frame 1a is connected with first driving frame anchor points 5a.1 and 5a.3 through first driving frame support beams 4a.1 and 4a.3 respectively, the first driving electrodes 3a.1-3a.6 are sequentially arranged in the first driving frame 1a along the Y-axis direction (or the up-down direction), and the first driving feedback electrode 3b.1 is positioned between two adjacent first driving electrodes 3a.3 and 3 a.4. The second driving frame 1b is connected with second driving frame anchor points 5a.2 and 5a.4 through second driving frame support beams 4a.2 and 4a.4 respectively, the second driving electrodes 3a.7-3a.12 are sequentially arranged in the second driving frame 1b along the Y-axis direction (or the up-down direction), and the second driving feedback electrode 3b.2 is positioned between two adjacent second driving electrodes 3a.9 and 3 a.10. The driving frame support beams 4a.1-4a.4 are all in the same U-shaped structure, the opening direction of the driving frame support beams is parallel to the X axis, the driving frame support beams 4a.1 and 4a.3 are symmetrically distributed about the X axis, and the driving frame support beams 4a.2 and 4a.4 are symmetrically distributed about the X axis; the drive frame anchors 5a.1 and 5a.3 are symmetrically distributed about the X-axis and the drive frame anchors 5a.2 and 5a.4 are symmetrically distributed about the X-axis.

As shown in fig. 4, the first drive frame 1a is driven in a resonant motion along the Y-axis by applying a drive voltage across the first drive electrodes 3a.1-3 a.6; the second drive frame 1b is driven in a resonant movement along the Y-axis in the opposite direction to the first drive frame 1a by applying a drive voltage over the second drive electrodes 3a.7-3 a.12. Fig. 4 shows by way of example only one direction of movement of the first drive frame 1a and the second drive frame 1b along the Y-axis. For a detailed scheme of applying a driving voltage to the driving electrode to drive the driving frame to perform a resonant motion along the Y-axis, reference may be made to the related art, and details thereof will not be provided herein.

In one embodiment, the X/Y gyroscope structure comprises: the device comprises a first X/Y driving coupling beam 4b.1, a second X/Y driving coupling beam 4b.2, a first mass block 2a, a second mass block 2b, a third mass block 2c, a fourth mass block 2d, four steering beam anchor points 5 b.1-5 b.4 and four steering beams 4 d.1-4 d.4. The first mass block 2a, the second mass block 2b, the third mass block 2c and the fourth mass block 2d are respectively arranged at four positions, namely the upper position, the lower position, the left position and the right position of a central point A of the X/Y gyroscope structure, the first mass block 2a is arranged adjacent to the third mass block 2c and the fourth mass block 2d, the second mass block 2b is arranged adjacent to the third mass block 2c and the fourth mass block 2d, the third mass block 2c is connected with the first driving frame 1a through the first X/Y driving coupling beam 4b.1, and the fourth mass block 2d is connected with the second driving frame 2b through the second X/Y driving coupling beam 4 b.2. Each steering beam 5 b.1-5 b.4 is connected with a corresponding steering beam anchor point 4 d.1-4 d.4, and two adjacent mass blocks are connected through a corresponding steering beam. Wherein, when the first driving frame 1a performs a resonant motion along the Y-axis and the second driving frame 1b performs a resonant motion along the Y-axis in the opposite direction to the first driving frame 1a, the first driving frame 1a drives the third mass block 2c to perform resonant motion along the Y axis through the first X/Y driving coupling beam 4b.1, the second driving frame 1b drives the fourth mass block 2d to perform resonant motion along the Y axis in the direction opposite to that of the third mass block 2c through the second X/Y driving coupling beam 4b.2, the third mass block 2c and the fourth mass block 2d further drive the first mass block 2a to perform resonant motion along the X axis through the corresponding steering beams (e.g., the steering beams 4d.1 and 4d.2), the second mass 2b is in turn driven by corresponding steering beams (e.g. steering beams 4d.3 and 4d.4) into a resonant movement along the X-axis, which is opposite to the first mass 2 a. A certain number of damping holes can be arranged on the mass blocks 2 a-2 d of the X/Y gyroscope structure and used for reducing damping and improving the quality factor and the sensitivity of the gyroscope.

In one embodiment, the X/Y gyroscope structure further comprises: an X/Y center coupling beam 4f located at a center point A of the X/Y gyroscope structure; four X/Y connecting beams 4 e.1-4 e.4 respectively connected to the inner sides of the corresponding mass blocks, wherein each connecting beam is connected to the X/Y central coupling beam 4 f; a first Y-axis detection electrode 3c.1 disposed below the first mass block 2 a; a second Y-axis detection electrode 3c.2 disposed below the second mass block 2 b; a first X-axis detection electrode 3d.1 disposed below the third mass block 2 c; a second X-axis detection electrode 3d.2 arranged below the fourth mass block 2 d. When the input of the Y-axis angular velocity is sensed, the first mass block 2a and the second mass block 2b move reversely along the Z-axis direction, the first Y-axis detection electrode 3c.1 detects the distance change with the first mass block 2a, the second Y-axis detection electrode 3c.2 detects the distance change with the second mass block 2b, specifically, the capacitance of the first Y-axis detection electrode 3c.1 and the capacitance of the second Y-axis detection electrode 3c.2 which are sensitive to the Y-axis angular velocity are increased and decreased, the capacitance change caused by the Y-axis angular velocity is obtained by difference of the first Y-axis detection electrode 3c.1 and the second Y-axis detection electrode 3c.2, and the input Y-axis angular velocity is further obtained; when the input of the X-axis angular velocity is sensed, the third mass block 2c and the fourth mass block 2d are caused to move reversely along the Z-axis direction, the first X-axis detection electrode 3d.1 detects the distance change with the third mass block 2c, the second X-axis detection electrode 3d.2 detects the distance change with the fourth mass block 2d, specifically, the capacitance of the first X-axis detection electrode 3d.1 and the capacitance of the second X-axis detection electrode 3d.2 which are sensitive to the X-axis angular velocity are increased and decreased, the difference between the two capacitance changes caused by the X-axis angular velocity are obtained, and the input X-axis angular velocity is further obtained.

In the particular embodiment shown in fig. 1, the first and second X/Y drive coupling beams 4b.1 and 4b.2 are structurally identical and symmetrical about the Y axis; the four mass blocks 2 a-2 d in the X/Y gyroscope structure have the same structure and respectively comprise a rectangular part and an isosceles trapezoid part; the four mass blocks 2 a-2 d are integrally symmetrical about the X axis and the Y axis; the four steering beams 4 d.1-4 d.4 are integrally symmetrical about the X axis and the Y axis; the four steering beam anchor points 5 b.1-5 b.4 are integrally symmetrical about the X axis and the Y axis; the X-axis detection electrodes 3d.1 and 3d.2, the Y-axis detection electrodes 3c.1 and 3c.2 and the steering beam anchor points 5 b.1-5 b.4 are fixedly arranged on the substrate; four mass blocks 2 a-2 d, four steering beams 4 d.1-4 d.4, X/Y driving coupling beams 4b.1 and 4b.2, an X/Y central coupling beam 4f and four X/Y connecting beams 4 e.1-4 e.4 of the X/Y gyroscope structure are suspended above the substrate. Four steering beams 4 d.1-4 d.4 are respectively positioned at four corners of a graph formed by four mass blocks 2 a-2 d in the X/Y gyroscope structure; the four steering beam anchor points 5 b.1-5 b.4 are respectively positioned at four corners of a graph formed by four mass blocks 2 a-2 d of the X/Y gyroscope structure; the four steering beams 4 d.1-4 d.4 are respectively connected with the four steering beam anchor points 5 b.1-5 b.4 in a one-to-one corresponding manner; two adjacent masses are connected by a corresponding one of the steering beams, for example, the X/Y steering beam 4d.1 connects the third mass 2c and the first mass 2a, the X/Y steering beam 4d.2 connects the first mass 2a and the fourth mass 2d, the X/Y steering beam 4d.3 connects the second mass 2b and the third mass 2c, and the X/Y steering beam 4d.4 connects the fourth mass 2d and the second mass 2 b.

In the specific embodiment shown in fig. 1, each steering beam 4 d.1-4 d.4 is a pentagon formed by a square with one corner removed, in each pentagon, one corner is connected with a corresponding steering beam block anchor point, and the other two corners adjacent to the corner are respectively connected with two corresponding adjacent mass blocks in the X/Y gyroscope structure. The X/Y central coupling beam 4f is of a concentric circle structure, and the center of the circle is the central point A of the X/Y gyroscope structure; the four X/Y connecting beams 4 e.1-4 e.4 are identical in structure, the four X/Y connecting beams 4 e.1-4 e.4 are symmetrical with respect to the X axis and the Y axis, and each X/Y connecting beam 4 e.1-4 e.4 comprises a plurality of hollow straight beam parts with the lengths gradually reduced from outside to inside and a connecting part for connecting the hollow straight beams; wherein the X/Y connection beams 4e.1 and 4e.2 positioned at the left and right sides of the X/Y center coupling beam 4f are placed in parallel to the Y axis (or placed in the up-down direction), and the X/Y connection beams 4e.3 and 4e.4 positioned at the up-down sides of the X/Y center coupling beam 4f are placed in parallel to the X axis (or placed in the left-right direction).

As shown in fig. 1, 3 and 10, the Z gyro structure includes:

a first Z drive coupling beam 4c.1 and a second Z drive coupling beam 4 c.2;

the first Z detection frame 2g is positioned on one side, away from the X/Y gyro structure, of the first driving frame 1a, is connected with the first driving frame 1a through a first Z driving coupling beam 4c.1, and is internally defined with a first Z space;

the first Z mass block 2e is positioned in the first Z space and is connected with the first Z detection frame 2g through first Z connecting beams 4 g.1-4 g.4;

the second Z detection frame 2h is positioned on one side, away from the X/Y gyro structure, of the second driving frame 1b, is connected with the second driving frame 1b through a second Z driving coupling beam 4c.2, and is internally defined with a second Z space;

the second Z mass block 2f is positioned in the second Z space and is connected with the second Z detection frame 2h through second Z connecting beams 4 g.5-4 g.8;

when the first driving frame 1a performs resonant motion along the Y axis and the second driving frame 1b performs resonant motion along the Y axis in the direction opposite to the first driving frame 1a, the first driving frame 1a drives the first Z mass block 2e to perform resonant motion along the Y axis through the first Z driving coupling beam 4c.1, the first Z detecting frame 2g and the first Z connecting beams 4g.1 to 4g.4, and the second driving frame 1b drives the second Z mass block 2f to perform resonant motion along the Y axis in the direction opposite to the first Z mass block 2e through the second Z driving coupling beam 4c.2, the second Z detecting frame 2h and the second Z connecting beams 4g.5 to 4 g.8.

In the particular embodiment shown in fig. 1, 3 and 10, the first and second Z drive coupling beams 4c.1 and 4c.2 are identical in structure and symmetrical about the Y axis; the first Z detection frame 2g and the second Z detection frame 2h are identical in structure and symmetrical about the Y axis; the first Z mass 2e and the second Z mass 2f are structurally identical and symmetrical about the Y axis; the first Z connecting beams 4 g.1-4 g.4 and the second Z connecting beams 4 g.5-4 g.8 are symmetrical with respect to the X axis and the Y axis as a whole. The number of the first Z connecting beams 4 g.1-4 g.4 is four, wherein two first Z connecting beams 4g.1 and 4g.3 are respectively positioned at the upper end and the lower end of the left side of the first Z mass block 2e, the other two first Z connecting beams 4g.2 and 4g.4 are respectively positioned at the upper end and the lower end of the right side of the first Z mass block 2e, and the first Z connecting beams 4 g.1-4 g.4 are placed in parallel to the Y-axis direction (or placed along the up-down direction); the number of the second Z connecting beams 4 g.5-4 g.8 is four, wherein two second Z connecting beams 4g.5 and 4g.7 are respectively located at the upper end and the lower end of the left side of the second Z mass block 2f, the other two second Z connecting beams 4g.6 and 4g.8 are respectively located at the upper end and the lower end of the right side of the second Z mass block 2f, and the second Z connecting beams 4 g.5-4 g.8 are placed in parallel to the Y axis direction (or placed along the up-down direction). The first Z mass block 2e and the second Z mass block 2f can be provided with a certain number of damping holes for reducing damping and improving the sensitivity of the Z-axis gyroscope.

As shown in fig. 1, 3 and 10, the Z-gyro structure further includes:

a first Z detection frame support beam anchor point 5 c.1-5 c.4;

first Z-detection frame support beams 4 h.1-4 h.4 connected between first Z-detection frame support beam anchor points 5 c.1-5 c.4 and a first Z-detection frame 2 g;

a second Z detection frame support beam anchor point 5 c.5-5 c.8;

and the second Z detection frame support beams 4 h.5-4 h.8 are connected between the second Z detection frame support beam anchor points 5 c.5-5 c.8 and the second Z detection frame 2 h.

In the specific embodiment shown in fig. 1, 3 and 10, four first Z-detection frame support beam anchors 5 c.1-5 c.4 are provided, wherein two first Z-detection frame support beam anchors 5c.1, 5c.2 are respectively located at the left and right ends of the top of the first Z-detection frame 2g, and the other two first Z-detection frame support beam anchors 5c.3, 5c.4 are respectively located at the left and right ends of the bottom of the first Z-detection frame 2 g; four first Z detection frame support beams 4 h.1-4 h.4 are provided, wherein two first Z detection frame support beams 4h.1 and 4h.2 are respectively positioned at the left end and the right end of the top of the first Z detection frame 2g, and the other two first Z detection frame support beams 4h.3 and 4h.4 are respectively positioned at the left end and the right end of the bottom of the first Z detection frame 2 g; each first Z-test frame support beam is connected between a corresponding one of the first Z-test frame support beam anchor points and a corner of the corresponding first Z-test frame. Four second Z detection frame support beam anchor points 5 c.5-5 c.8 are provided, wherein two second Z detection frame support beam anchor points 5c.5 and 5c.6 are respectively positioned at the left end and the right end of the top of the second Z detection frame 2h, and the other two second Z detection frame support beam anchor points 5c.7 and 5c.8 are respectively positioned at the left end and the right end of the bottom of the second Z detection frame 2 h; four second Z detection frame support beams 4 h.5-4 h.8 are provided, wherein two second Z detection frame support beams 4h.5 and 4h.6 are respectively positioned at the left end and the right end of the top of the second Z detection frame 2h, and the other two second Z detection frame support beams 4h.7 and 4h.8 are respectively positioned at the left end and the right end of the bottom of the second Z detection frame 2 h; each second Z-test frame support beam is connected between a corresponding one of the second Z-test frame support beam anchor points and a corner of a corresponding one of the second Z-test frames. The first Z detection frame support beam anchor points 5 c.1-5 c.4 and the second Z detection frame support beam anchor points 5 c.5-5 c.8 are integrally symmetrical about an X axis and a Y axis; the first Z detection frame support beams 4 h.1-4 h.4 and the second Z detection frame support beams 4 h.5-4 h.8 are U-shaped beams, and the opening direction of the U-shaped beams is parallel to the X axis; the first Z detection frame support beams 4 h.1-4 h.4 and the second Z detection frame support beams 4 h.5-4 h.8 are symmetrical with respect to the X axis and the Y axis as a whole.

As shown in fig. 1, 3 and 10, the Z-gyro structure further includes:

a first Z-axis detection electrode 3e.1 disposed within the first Z mass 2 e;

a second Z-axis detection electrode 3e.2 disposed within the second Z mass 2 f;

when the input of the angular speed of the Z axis is sensed, the first Z mass block 2e and the second Z mass block 2f move reversely along the X axis direction, the first Z axis detection electrode detects the change of the distance between the 3e.1 and the first Z mass block 2e, and the second Z axis detection electrode 3e.2 detects the change of the distance between the second Z mass block 2 f. Specifically, the capacitance of the first Z-axis detection electrode 3e.1 and the capacitance of the second Z-axis detection electrode 3e.2, which sense the Z-axis angular velocity, are increased and decreased, and the difference between the two increases and decreases to obtain the capacitance change caused by the Z-axis angular velocity, thereby obtaining the input Z-axis angular velocity.

As shown in fig. 1, 3 and 10, the Z-gyro structure further includes:

the lever beam anchor points are 5 d.1-5 d.4;

the lever support beams 4 j.1-4 j.4;

and the lever beams 4i.1 and 4i.2 are connected with the lever beam anchor points 5 d.1-5 d.4 through the lever support beams 4 j.1-4 j.4 (or are connected with the lever beam anchor points 5 d.1-5 d.4 through the lever support beams 4 j.1-4 j.4, and the lever beams 4i.1 and 4i.2 are suspended on the substrate), the lever beams 4 i.1-4 i.2 are connected with the first Z detection frame 2g and the second Z detection frame 2h, and the lever beams 4 i.1-4 i.2 are arranged to enable the first Z detection frame 2g and the second Z detection frame 2h to move reversely along the Y axis.

In the specific embodiment shown in fig. 1, 3 and 10, there are two lever beams 4i.1, 4i.2, wherein one lever beam 4i.1 is located on top of the first Z detection frame 2g and the second Z detection frame 2h, and wherein one end of the one lever beam 4i.1 is connected to the top of the first Z detection frame 2g, and the other end thereof is connected to the top of the second Z detection frame 2h, and wherein it is connected to the corresponding lever beam anchor point 5d.1, 5d.2 through the corresponding lever support beam 4j.1, 4 j.2; another lever beam 4i.2 is located at the bottom of the first Z detection frame 2g and the second Z detection frame 2h, said another lever beam 4i.2 being connected at one end to the bottom of the first Z detection frame 2g and at the other end to the bottom of the second Z detection frame 2h, and being connected at its middle to the corresponding lever beam anchor point 5d.3, 5d.4 by the corresponding lever support beam 4j.3, 4 j.4.

In the specific embodiment shown in fig. 1, 3 and 10, the two lever beams 4i.1 and 4i.2 are both T-shaped structures, each T-shaped structure includes a cross rod portion and a vertical rod portion located in the middle of the cross rod, one end of the cross rod portion of the T-shaped structure is one end of the lever beam, the other end of the cross rod portion is the other end of the lever beam, and the vertical rod portion is the middle of the lever beam. The number of the lever beam anchor points 5 d.1-5 d.4 is four, the number of the lever support beams 4 j.1-4 j.4 is four, wherein two lever beam anchor points 5d.1 and 5d.2 are respectively positioned at the left side and the right side of a vertical rod part of a T-shaped structure 4i.1, two lever support beams 4j.1 and 4j.2 are respectively positioned at the left side and the right side of the vertical rod part of the T-shaped structure 4i.1, and the two lever beam anchor points 5d.1 and 5d.2 are respectively connected with the vertical rod part of the T-shaped structure 4i.1 through corresponding one lever support beam 4j.1 and 4 j.2; the other two lever beam anchor points 5d.3, 5d.4 are respectively located at the left and right sides of the vertical rod part of the other T-shaped structure 4i.2, the other two lever support beams 4j.3, 4j.4 are respectively located at the left and right sides of the vertical rod part of the other T-shaped structure 4i.2, and the other two lever beam anchor points 5d.3, 5d.4 are respectively connected with the vertical rod part of the other T-shaped structure 4i.2 through the corresponding one lever support beam 4j.3, 4 j.4. Wherein the two lever beams 4i.1, 4i.2 are symmetrical about the X-axis; the four lever beam anchor points 5 d.1-5 d.4 are integrally symmetrical about the X axis and the Y axis; the four lever support beams 4 j.1-4 j.4 are symmetrical with respect to the X-axis and the Y-axis as a whole.

The Z-axis detection electrodes 3e.1 and 3e.2, the first Z detection frame support beam anchor points 5 c.1-5 c.4, the second Z detection frame support beam anchor points 5 c.5-5 c.8, the lever beam anchor points 5 d.1-5 d.4 are arranged on the substrate, and the first Z driving coupling beam 4c.1 and the second Z driving coupling beam 4c.2, the first Z detection frame 2g, the second Z detection frame 2h, the first Z mass block 2e, the second Z mass block 2f and the two lever beams 4i.1 and 4i.2 of the Z gyro structure are suspended above the substrate.

The detection principle of the three-axis gyroscope shown in fig. 1 of the present invention is described below.

First, X/Y axis gyroscope detection principle

Fig. 4 is a schematic diagram showing a structural state of the three-axis gyroscope shown in fig. 1 when driven. The first driving frame 1a and the second driving frame 1b on the left and right sides generate reverse resonance motion along the Y-axis direction by applying driving voltage, and the X/Y gyroscope structure is driven to move. The specific process is that the first driving frame 1a and the second driving frame 1b drive the third mass block 2c and the fourth mass block 2d to generate a vertical reverse resonant motion along the Y axis direction through the X/Y driving coupling beams 4b.1 and 4b.2, and the third mass block 2c and the fourth mass block 2d drive the first mass block 2a and the second mass block 2b to generate a horizontal (or horizontal) reverse resonant motion along the X axis through the X/Y steering beams 4d.1 to 4d.4 arranged around, so that the first mass block 2a, the second mass block 2b, the third mass block 2c and the fourth mass block 2d integrally move along the clockwise or counterclockwise direction.

Fig. 5 is a schematic diagram showing a structural state of the three-axis gyroscope shown in fig. 1 during X-axis detection. When the angular velocity of the X axis is input, the Coriolis effect can generate Coriolis force to drive the third mass block 2c and the fourth mass block 2d to move in an out-of-plane reverse direction along the Z axis direction, X axis detection electrodes 3d.1 and 3d.2 arranged below the third mass block 2c and the fourth mass block 2d are sensitive to the change of the distance, further, self capacitances of the X axis detection electrodes 3d.1 and 3d.2 can be changed accordingly, and the angular velocity of the X axis can be obtained through the change of the detection capacitance.

Fig. 6 is a schematic view of a structural state of the three-axis gyroscope shown in fig. 1 during Y-axis detection according to the present invention. When the Y-axis angular rate is input, the Coriolis effect can generate Coriolis force to drive the first mass block 2a and the second mass block 2b to move in an out-of-plane reverse direction along the Z-axis direction, Y-axis detection electrodes 3c.1 and 3c.2 arranged below the first mass block 2a and the second mass block 2b are sensitive to the change of the distance, the self capacitance of the Y-axis detection electrodes 3c.1 and 3c.2 can be changed accordingly, and the size of the Y-axis angular rate can be obtained through the change of the detection capacitance.

Two-axis and Z-axis gyroscope detection principle

As shown in fig. 4, the first driving frame 1a and the second driving frame 1b on the left and right sides generate reverse resonant motion along the Y-axis direction by applying the driving voltage, so as to drive the Z-gyroscope structure to move. The specific process is that the first driving frame 1a and the second driving frame 1b drive the first Z detection frame 2g and the second Z detection frame 2h on the outer sides of the first driving frame 1a and the second driving frame 1b to generate vertical reverse resonant motion along the Y-axis direction through the Z-driving coupling beams 4c.1 and 4c.2, the first Z mass block 2e and the second Z mass block 2f are respectively arranged in the first Z detection frame 2g and the second Z detection frame 2h, and the first Z detection frame 2g and the second Z detection frame 2h drive the first Z mass block 2e and the second Z mass block 2f to generate vertical reverse resonant motion along the Y-axis direction.

Fig. 7 is a schematic view of a structural state of the three-axis gyroscope shown in fig. 1 during Z-axis detection according to the present invention. When the Z-axis angular rate is input, the Coriolis effect can generate Coriolis force to drive the first Z mass block 2e and the second Z mass block 2f to move reversely along the X-axis direction, Z detection electrodes 3e.1 and 3e.2 respectively arranged in the first Z mass block 2e and the second Z mass block 2f are sensitive to the change of the distance, further the capacitance of the Z detection electrodes 3e.1 and 3e.2 can change along with the change, and the Z-axis angular rate can be obtained through the change of the detection capacitance.

In summary, in the three-axis gyroscope according to the present invention, when the first driving frame 1a and the second driving frame 1b drive the mass blocks 2a to 2f to move, the displacement of the mass blocks 2a to 2f in the sensitive direction is negligible, and the angular rate signal detection is not affected. When the gyroscope is sensitive to different direction angular rates, the corresponding mass blocks move due to the Coriolis effect without influencing other mass blocks, so that the triaxial gyroscope designed by the utility model can reduce orthogonal errors and improve the detection precision.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example" or "some examples" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples described in this specification can be combined and combined by one skilled in the art.

While embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and not to be construed as limiting the present invention, and that changes, modifications and variations may be made therein by those of ordinary skill in the art within the scope of the present invention.

Claims

1. A three-axis gyroscope, comprising:

a first driving frame located on the left side and capable of performing a resonant motion in the up-down direction along the Y-axis;

a second driving frame, which is positioned at the right side, is parallel to the first driving frame and is spaced apart from the first driving frame by a predetermined distance, and is capable of performing a resonant motion along the Y-axis in the opposite direction to the first driving frame;

an X/Y gyro structure connected between the first driving frame and the second driving frame;

the Z gyro structure is connected to the outer sides of the first driving frame and the second driving frame;

the X/Y gyroscope structure and the Z gyroscope structure are mutually independent, and the X/Y gyroscope structure and the Z gyroscope structure are driven by the first driving frame and the second driving frame together.

2. The tri-axial gyroscope of claim 1, further comprising:

a first drive frame anchor point;

a first drive frame support beam connected between the first drive frame anchor point and the first drive frame;

a second drive frame anchor point;

a second drive frame support beam connected between the second drive frame anchor point and the second drive frame;

a first driving electrode and a first driving feedback electrode arranged in the first driving frame;

a second driving electrode and a second driving feedback electrode arranged in the second driving frame;

driving the first driving frame to perform a resonant motion along the Y-axis by applying a driving voltage on the first driving electrode;

the second driving frame is driven to perform a resonant motion along the Y-axis in an opposite direction to the first driving frame by applying a driving voltage to the second driving electrode.

3. The tri-axial gyroscope of claim 2,

first drive electrode, first drive feedback electrode, second drive electrode and second drive feedback electrode are fixed to be set up in the basement, and first drive frame is connected with first drive frame anchor point through first drive frame supporting beam, and first drive frame supporting beam suspension are in the basement top, and second drive frame is connected with second drive frame anchor point through second drive frame supporting beam, and second drive frame supporting beam suspension are in the basement top.

4. The three-axis gyroscope of claim 1, wherein the X/Y gyroscope structure comprises:

the first X/Y driving coupling beam and the second X/Y driving coupling beam;

the first mass block, the second mass block, the third mass block and the fourth mass block are respectively arranged at the upper, lower, left and right positions of a central point A of the X/Y gyroscope structure, the first mass block, the third mass block and the fourth mass block are adjacently arranged, the second mass block, the third mass block and the fourth mass block are adjacently arranged, the third mass block is connected with the first driving frame through the first X/Y driving coupling beam, and the fourth mass block is connected with the second driving frame through the second X/Y driving coupling beam;

the four steering beam anchor points and the four steering beams, wherein each steering beam is connected with one corresponding steering beam anchor point, and two adjacent mass blocks are connected through one corresponding steering beam;

wherein, when the first driving frame carries out resonant motion along the Y axis and the second driving frame carries out resonant motion along the Y axis in the direction opposite to that of the first driving frame, the first driving frame drives the third mass block to carry out resonant motion along the Y axis through the first X/Y driving coupling beam, the second driving frame drives the fourth mass block to carry out resonant motion along the Y axis in the direction opposite to that of the third mass block through the second X/Y driving coupling beam, the third mass block and the fourth mass block further drive the first mass block to carry out resonant motion along the X axis through the corresponding steering beams, and the second mass block is further driven to carry out resonant motion along the X axis in the direction opposite to that of the first mass block through the corresponding steering beams,

the X-axis and the Y-axis are perpendicular and define a plane in which the X/Y gyroscope structure lies, and the Z-axis is perpendicular to the plane defined by the X-axis and the Y-axis.

5. The tri-axial gyroscope of claim 4, wherein the X/Y gyroscope structure further comprises:

an X/Y center coupling beam located at the center point A of the X/Y gyro structure,

and the four connecting beams are respectively connected to the inner sides of the corresponding mass blocks, and each connecting beam is connected to the X/Y central coupling beam.

6. The tri-axial gyroscope of claim 5, wherein the X/Y gyroscope structure further comprises:

a first Y-axis detection electrode disposed below the first mass block;

a second Y-axis detection electrode disposed below the second mass block;

a first X-axis detection electrode disposed below the third mass block;

a second X-axis detection electrode arranged below the fourth mass block;

when the input of the Y-axis angular velocity is sensed, the first mass block and the second mass block move reversely along the Z-axis direction, the first Y-axis detection electrode detects the change of the distance from the first mass block, the second Y-axis detection electrode detects the change of the distance from the second mass block, the capacitance of the first Y-axis detection electrode and the capacitance of the second Y-axis detection electrode are increased and decreased, the capacitance change caused by the Y-axis angular velocity is obtained through the difference of the first Y-axis detection electrode and the second Y-axis detection electrode, and the input Y-axis angular velocity is obtained; similarly, when the input of the X-axis angular velocity is sensed, the third mass block and the fourth mass block are caused to move reversely along the Z-axis direction, the distance between the first X-axis detection electrode and the third mass block is changed, the distance between the second X-axis detection electrode and the fourth mass block is changed, the capacitance of the first X-axis detection electrode and the capacitance of the second X-axis detection electrode are increased and decreased, the difference between the first X-axis detection electrode and the second X-axis detection electrode is changed by the capacitance caused by the X-axis angular velocity, and the input X-axis angular velocity is obtained.

7. The tri-axial gyroscope of claim 6,

the four steering beams are respectively positioned at four corners of a graph consisting of four mass blocks in the X/Y gyroscope structure;

the four steering beam anchor points are respectively positioned at four corners of a graph consisting of the four mass blocks of the X/Y gyroscope structure,

the X/Y central coupling beam is of a concentric circle structure, and the center of the circle is the central point A of the X/Y gyroscope structure;

each connecting beam comprises a plurality of hollow straight beam parts with the lengths gradually reduced from outside to inside and a connecting part for connecting the hollow straight beams.

8. The tri-axial gyroscope of claim 7,

each steering beam is a pentagon formed by a square with one corner removed,

one corner of each pentagon is connected with one corresponding steering beam block anchor point, the other two corners adjacent to the corner are respectively connected with two corresponding adjacent mass blocks in the X/Y gyro structure,

the four mass blocks in the X/Y gyroscope structure comprise a rectangular part and an isosceles trapezoid part,

the four mass blocks are integrally symmetrical about an X axis and a Y axis;

the four steering beams are integrally symmetrical about an X axis and a Y axis;

the four steering beam anchor points are integrally symmetrical about an X axis and a Y axis;

the mass block of the X/Y gyroscope structure can be provided with a certain number of damping holes for reducing damping and improving the quality factor and sensitivity of the gyroscope,

the X-axis detection electrode, the Y-axis detection electrode and the steering beam anchor point are fixedly arranged on a substrate, and four mass blocks, four steering beams, an X/Y driving coupling beam, a central coupling beam and four connecting beams of the X/Y gyroscope structure are suspended above the substrate.

9. The tri-axial gyroscope of claim 1, wherein the Z-gyroscope structure comprises:

a first Z drive coupling beam and a second Z drive coupling beam;

the first Z detection frame is positioned on one side, away from the X/Y gyro structure, of the first driving frame, is connected with the first driving frame through a first Z driving coupling beam, and defines a first Z space therein;

the first Z mass block is positioned in the first Z space and is connected with the first Z detection frame through a first Z connecting beam;

the second Z detection frame is positioned on one side, away from the X/Y gyro structure, of the second driving frame, is connected with the second driving frame through a second Z driving coupling beam, and defines a second Z space therein;

the second Z mass block is positioned in the second Z space and is connected with the second Z detection frame through a second Z connecting beam;

when the first driving frame carries out resonant motion along the Y axis and the second driving frame carries out resonant motion opposite to the first driving frame along the Y axis, the first driving frame drives the first Z mass block to carry out resonant motion along the Y axis through the first Z driving coupling beam, the first Z detection frame and the first Z connecting beam, and the second driving frame drives the second Z mass block to carry out resonant motion opposite to the first Z mass block along the Y axis through the second Z driving coupling beam, the second Z detection frame and the second Z connecting beam.

10. The tri-axial gyroscope of claim 9, wherein the Z-gyroscope structure further comprises:

a first Z detection frame support beam anchor point;

a first Z-sense frame support beam connected between the first Z-sense frame support beam anchor point and a first Z-sense frame;

a second Z detection frame support beam anchor point;

a second Z sense frame support beam connected between the second Z sense frame support beam anchor point and a second Z sense frame.

11. The tri-axial gyroscope of claim 10,

the number of the first Z detection frame support beam anchor points is four, wherein two first Z detection frame support beam anchor points are respectively positioned at the left end and the right end of the top of the first Z detection frame, and the other two first Z detection frame support beam anchor points are respectively positioned at the left end and the right end of the bottom of the first Z detection frame; the number of the first Z detection frame supporting beams is four, wherein two first Z detection frame supporting beams are respectively positioned at the left end and the right end of the top of the first Z detection frame, and the other two first Z detection frame supporting beams are respectively positioned at the left end and the right end of the bottom of the first Z detection frame; each first Z detection frame support beam is connected between a corresponding first Z detection frame support beam anchor point and a corresponding corner of the first Z detection frame;

the number of the second Z detection frame support beam anchor points is four, wherein two second Z detection frame support beam anchor points are respectively positioned at the left end and the right end of the top of the second Z detection frame, and the other two second Z detection frame support beam anchor points are respectively positioned at the left end and the right end of the bottom of the second Z detection frame; the number of the second Z detection frame supporting beams is four, wherein two second Z detection frame supporting beams are respectively positioned at the left end and the right end of the top of the second Z detection frame, and the other two second Z detection frame supporting beams are respectively positioned at the left end and the right end of the bottom of the second Z detection frame; each second Z-test frame support beam is connected between a corresponding one of the second Z-test frame support beam anchor points and a corner of a corresponding one of the second Z-test frames.

12. The tri-axial gyroscope of claim 9, wherein the Z-gyroscope structure further comprises:

a first Z-axis detection electrode disposed within the first Z mass block;

a second Z-axis detection electrode disposed within the second Z mass block;

when the input of the Z-axis angular velocity is sensed, the first Z mass block and the second Z mass block move reversely along the X-axis direction, the first Z-axis detection electrode detects the change of the distance with the first Z mass block, the second Z-axis detection electrode detects the change of the distance with the second Z mass block, the capacitance of the first Z-axis detection electrode and the capacitance of the second Z-axis detection electrode are increased and decreased, the difference between the first Z-axis detection electrode and the second Z-axis detection electrode obtains the capacitance change caused by the Z-axis angular velocity, and further obtains the input Z-axis angular velocity,

the first Z mass block and the second Z mass block can be provided with a certain number of damping holes for reducing damping and improving the sensitivity of the Z-axis gyroscope.

13. The tri-axial gyroscope of claim 9,

the number of the first Z-shaped connecting beams is four, wherein two first Z-shaped connecting beams are respectively positioned at the upper end and the lower end of the left side of the first Z-shaped mass block, and the other two first Z-shaped connecting beams are respectively positioned at the upper end and the lower end of the right side of the first Z-shaped mass block;

the number of the second Z-shaped connecting beams is four, two second Z-shaped connecting beam subsections are located at the upper end and the lower end of the left side of the second Z mass block, and the other two second Z-shaped connecting beam subsections are located at the upper end and the lower end of the right side of the second Z mass block.

14. The tri-axial gyroscope of claim 9, wherein the Z-gyroscope structure further comprises:

the lever beam anchors;

a lever support beam;

and the lever beam is connected with the lever beam anchor point through the lever supporting beam, the lever beam is connected with the first Z detection frame and the second Z detection frame, and the lever beam is used for promoting the first Z detection frame and the second Z detection frame to move reversely along the Y axis.

15. The tri-axial gyroscope of claim 14, wherein the lever beams are two,

one lever beam is positioned at the tops of the first Z detection frame and the second Z detection frame, one end of the lever beam is connected with the top of the first Z detection frame, the other end of the lever beam is connected with the top of the second Z detection frame, and the middle of the lever beam is connected with the anchor point of the corresponding lever beam through the corresponding lever support beam;

and the other lever beam is positioned at the bottoms of the first Z detection frame and the second Z detection frame, one end of the other lever beam is connected with the bottom of the first Z detection frame, the other end of the other lever beam is connected with the bottom of the second Z detection frame, and the middle part of the other lever beam is connected with the anchor point of the corresponding lever beam through the corresponding lever support beam.

16. The tri-axial gyroscope of claim 15,

the two lever beams are of a T-shaped structure, the T-shaped structure comprises a transverse rod part and a vertical rod part positioned in the middle of the transverse rod, one end of the transverse rod part of the T-shaped structure is one end of each lever beam, the other end of the transverse rod part of each lever beam is the other end of each lever beam, the vertical rod part of each lever beam is the middle of each lever beam, four lever beam anchor points are arranged, four lever support beams are arranged, two lever beam anchor points are respectively positioned on the left side and the right side of the vertical rod part of one T-shaped structure, two lever support beams are respectively positioned on the left side and the right side of the vertical rod part of one T-shaped structure, and the two lever beam anchor points are respectively connected with the vertical rod part of one T-shaped structure through corresponding lever support beams; the other two lever beam anchor points are respectively positioned at the left side and the right side of the vertical rod part of the other T-shaped structure, the other two lever supporting beams are respectively positioned at the left side and the right side of the vertical rod part of the other T-shaped structure, and the other two lever beam anchor points are respectively connected with the vertical rod part of the other T-shaped structure through the corresponding lever supporting beam.