CN211595787U - Non-interference guide rail of horizontal continuous sputtering coating machine - Google Patents
Non-interference guide rail of horizontal continuous sputtering coating machine Download PDFInfo
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- CN211595787U CN211595787U CN201921894447.2U CN201921894447U CN211595787U CN 211595787 U CN211595787 U CN 211595787U CN 201921894447 U CN201921894447 U CN 201921894447U CN 211595787 U CN211595787 U CN 211595787U
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Abstract
The utility model discloses a horizontal continuous sputtering coating machine non-interference guide rail, which comprises a box body, a fan and a three-way pipe, the utility model has simple and reasonable structural design, when in work, a square workpiece to be coated is placed on a carrying disc, a motor drives a driving gear, a middle wheel and a driven gear to rotate, so that a guide post drives the carrying disc to move, and the left and right positions of the carrying disc are limited in the moving process to prevent the carrying disc from generating horizontal displacement; the external coating device coats the workpiece through the water inlet, and the heater and the temperature sensor heat the workpiece and control the heating temperature, so that the coating effect is better; the fan dries the workpiece through the three-way pipe, so that the working efficiency of the device is higher; the silencing layer is used for silencing the device so as to prevent the device from influencing the surrounding environment when in use; the screen plate prevents the heat generated when the motor works from influencing the service life of the motor.
Description
Technical Field
The utility model relates to a large range, in particular to a non-interference guide rail of a horizontal continuous sputtering coating machine.
Background
The continuous horizontal sputtering machine is a machine which bombards cathode target material at high speed by using charged ions generated by gas discharge under the action of an electric field under the condition of high vacuum, so that target material atoms and molecules are escaped and deposited on a substrate to form a film, and a transmission mode that a chain is driven by a transmission motor to rotate so as to drive a transmission guide wheel to make a carrying disc advance is widely applied.
The transmission mode used by the prior continuous horizontal sputtering machine has the defects that the carrying disc is inconvenient to transmit and is easy to displace in the transmission process; the film is not convenient to air dry after being coated; the inside of the apparatus is not convenient to ventilate. Accordingly, one skilled in the art provides a non-interference guide rail for a horizontal continuous sputter coating machine to solve the above problems of the background art.
Disclosure of Invention
An object of the utility model is to provide a horizontal continuous sputtering coating machine does not have interference guide rail to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme:
a horizontal continuous sputtering coating machine non-interference guide rail comprises a box body, a fan and a three-way pipe, wherein cushion blocks are arranged at four corners of the lower end of the box body; the left side of the upper end of the box body is provided with a fan, the center of the upper end of the box body is provided with a water inlet, the upper end of the water inlet is provided with a three-way pipe, and the left end of the three-way pipe is fixedly connected with the fan through a pipeline; the right end of the three-way pipe is fixedly connected with an external coating agent supply device; a disc is arranged at the lower end of the water inlet, a temperature sensor is arranged in the center of the lower end of the disc, and a spray head is arranged at the lower end of the disc; a fixed seat is arranged at the lower end in the box body, a rectangular groove is arranged at the lower end in the fixed seat, a motor is arranged at the center of the lower end of the rectangular groove, a coupler is arranged on an output shaft of the motor, and a driving gear is arranged at one end, away from the motor, of the coupler; the left side and the right side of the driving gear are both provided with intermediate wheels, the intermediate wheels are meshed with driven gears, and guide columns are arranged at the meshed upper ends of the driven gears; the periphery of the inner wall of the fixed seat is adhered with a silencing layer; the upper end in the fixed seat is provided with a roller, and the upper end of the roller is provided with a carrying disc; heaters are arranged on the left side and the right side of the upper part in the box body.
As a further aspect of the present invention: and a throttle valve is arranged on the water inlet.
As a further aspect of the present invention: the box body and the center of the lower end of the fixing seat are provided with a ventilating screen plate for ventilating the fixing seat, so that the service life of the motor is prevented from being influenced by generated heat when the motor works.
As a further aspect of the present invention: the sound attenuation layer is made of foam plastics.
As a further aspect of the present invention: the motor, the heater, the fan and the temperature sensor are electrically connected with an external controller through leads.
As a further aspect of the present invention: the heater is of the type LBN-BNC, the temperature sensor is of the type TP21TP100, and the external controller is of the type E5 EKL-R1 TC.
Compared with the prior art, the beneficial effects of the utility model are that:
1. the utility model discloses the during operation will be treated coating film side work piece and placed on carrying the dish, and the motor drives driving gear, intermediate wheel, driven gear and rotates, makes the guide pillar drive and carries the dish and remove, and removes the in-process and carry on spacingly to carrying the position about of dish to prevent to carry the dish and produce horizontal displacement.
2. When the utility model works, the external film coating device coats the workpiece through the water inlet, the heater and the temperature sensor heat the workpiece and control the heating temperature, so that the film coating effect is better; the fan air-dries the work piece through the three-way pipe, makes the work efficiency of device higher.
3. When the utility model works, the silencing layer silences the device to prevent the device from influencing the surrounding environment when in use; the screen plate prevents the heat generated when the motor works from influencing the service life of the motor.
Drawings
FIG. 1 is a schematic view of a horizontal continuous sputter coater non-interference guide rail.
FIG. 2 is a schematic structural diagram of a fixing seat in a non-interference guide rail of a horizontal continuous sputter coating machine.
In the figure: the device comprises a box body 1, a cushion block 2, a screen plate 3, a rectangular groove 4, a motor 5, a driving gear 6, an intermediate wheel 7, a driven gear 8, a silencing layer 10, a guide post 11, a fixed seat 12, a roller 13, a carrying disc 14, a heater 15, a fan 16, a three-way pipe 17, a water inlet 18, a disc 19, a temperature sensor 20, a spray head 21 and a conveyor belt 22.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-2, in an embodiment of the present invention, a horizontal continuous sputter coating machine non-interference guide rail includes a box 1, a fan 16 and a three-way pipe 17, wherein four corners of the lower end of the box 1 are respectively provided with a cushion block 2; a fan 16 is arranged on the left side of the upper end of the box body 1, a water inlet 18 is arranged in the center of the upper end of the box body 1, a three-way pipe 17 is arranged at the upper end of the water inlet 18, and the left end of the three-way pipe 17 is fixedly connected with the fan 16 through a pipeline; the right end of the three-way pipe 17 is fixedly connected with an external coating agent supply device; a disc 19 is arranged at the lower end of the water inlet 18, a temperature sensor 20 is arranged at the center of the lower end of the disc 19, and a spray head 21 is arranged at the lower end of the disc 19; a fixed seat 12 is arranged at the lower end in the box body 1, a rectangular groove 4 is arranged at the lower end in the fixed seat 12, a motor 5 is arranged at the center of the lower end of the rectangular groove 4, a coupler is arranged on an output shaft of the motor 5, and a driving gear 6 is arranged at one end, far away from the motor 5, of the coupler; the left side and the right side of the driving gear 6 are both provided with intermediate wheels 7, the intermediate wheels 7 are meshed with driven gears 8, and guide columns 11 are arranged at the meshed upper ends of the driven gears 8; the sound attenuation layer 10 is adhered to the periphery of the inner wall of the fixed seat 12; the upper end in the fixed seat 12 is provided with a roller 13, and the upper end of the roller 13 is provided with a carrying disc 14; heaters 15 are arranged on the left side and the right side of the upper part in the box body 1.
A throttle valve is arranged on the water inlet 18.
The net plate 3 capable of ventilating is arranged at the center of the lower ends of the box body 1 and the fixing seat 12 to ventilate the fixing seat 12, so that the service life of the motor 5 is not influenced by the generated heat when the motor 5 works.
The sound damping layer 10 is provided as a foam.
The motor 5, the heater 15, the fan 16 and the temperature sensor 20 are electrically connected with an external controller through leads.
The heater 15 is of the type LBN-BNC, the temperature sensor 20 is of the type TP21TP100, and the external controller is of the type E5 EKL-R1 TC.
The utility model discloses a theory of operation is:
the utility model relates to a horizontal continuous sputtering coating machine non-interference guide rail, when in work, a square workpiece to be coated is placed on a carrying disc 14, a motor 5 drives a driving gear 6, an intermediate wheel 7 and a driven gear 8 to rotate, so that a guide post 11 drives the carrying disc 14 to move, and the left and right positions of the carrying disc 14 are limited in the moving process to prevent the carrying disc 14 from generating horizontal displacement; an external coating device coats a film on a workpiece through a water inlet 18, and a heater 15 and a temperature sensor 20 heat the workpiece and control the heating temperature, so that the coating effect is better; the fan 16 air-dries the workpiece through the three-way pipe 17, so that the working efficiency of the device is higher; the sound-deadening layer 10 silences the device to prevent the device from affecting the surrounding environment during use; the screen 3 prevents the heat generated when the motor 5 works from influencing the service life of the motor 5.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (6)
1. A horizontal continuous sputter coating machine non-interference guide rail comprises a box body (1), a fan (16) and a three-way pipe (17), and is characterized in that cushion blocks (2) are arranged at four corners of the lower end of the box body (1); a fan (16) is arranged on the left side of the upper end of the box body (1), a water inlet (18) is arranged in the center of the upper end of the box body (1), a three-way pipe (17) is arranged at the upper end of the water inlet (18), and the left end of the three-way pipe (17) is fixedly connected with the fan (16) through a pipeline; the right end of the three-way pipe (17) is fixedly connected with an external coating agent supply device; a disc (19) is arranged at the lower end of the water inlet (18), a temperature sensor (20) is arranged at the center of the lower end of the disc (19), and a spray head (21) is arranged at the lower end of the disc (19); a fixed seat (12) is arranged at the inner lower end of the box body (1), a rectangular groove (4) is arranged at the inner lower end of the fixed seat (12), a motor (5) is arranged at the center of the lower end of the rectangular groove (4), a coupler is arranged on an output shaft of the motor (5), and a driving gear (6) is arranged at one end, far away from the motor (5), of the coupler; the left side and the right side of the driving gear (6) are both provided with intermediate wheels (7), the intermediate wheels (7) are meshed with driven gears (8), and the meshed upper ends of the driven gears (8) are provided with guide columns (11); the periphery of the inner wall of the fixed seat (12) is adhered with a sound attenuation layer (10); the upper end in the fixed seat (12) is provided with a roller (13), and the upper end of the roller (13) is provided with a carrying disc (14); heaters (15) are arranged on the left side and the right side of the upper part in the box body (1).
2. The non-interference guide rail of the horizontal continuous sputter coating machine according to claim 1, characterized in that a throttle valve is provided on the water inlet (18).
3. The non-interference guide rail of the horizontal continuous sputter coating machine according to claim 1 is characterized in that the center of the lower ends of the box body (1) and the fixed seat (12) is provided with a ventilating screen plate (3).
4. A horizontally continuous sputter coater non-interfering guide rail according to claim 1, characterised in that said sound-damping layer (10) is provided as a foamed plastic.
5. The horizontal continuous sputter coating machine non-interference guide rail of claim 1, characterized in that the motor (5), the heater (15), the fan (16) and the temperature sensor (20) are electrically connected with an external controller through wires.
6. The non-interference guide rail of claim 1, wherein the heater (15) is of type LBN-BNC and the temperature sensor (20) is of type TP21TP 100.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921894447.2U CN211595787U (en) | 2019-11-05 | 2019-11-05 | Non-interference guide rail of horizontal continuous sputtering coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921894447.2U CN211595787U (en) | 2019-11-05 | 2019-11-05 | Non-interference guide rail of horizontal continuous sputtering coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211595787U true CN211595787U (en) | 2020-09-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921894447.2U Active CN211595787U (en) | 2019-11-05 | 2019-11-05 | Non-interference guide rail of horizontal continuous sputtering coating machine |
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| CN (1) | CN211595787U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113802105A (en) * | 2021-09-07 | 2021-12-17 | 无锡爱尔华光电科技有限公司 | Chain vacuum coating equipment |
-
2019
- 2019-11-05 CN CN201921894447.2U patent/CN211595787U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113802105A (en) * | 2021-09-07 | 2021-12-17 | 无锡爱尔华光电科技有限公司 | Chain vacuum coating equipment |
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