CN207365553U - A kind of device for producing high pure oxygen and High Purity Nitrogen - Google Patents

A kind of device for producing high pure oxygen and High Purity Nitrogen Download PDF

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Publication number
CN207365553U
CN207365553U CN201721339013.7U CN201721339013U CN207365553U CN 207365553 U CN207365553 U CN 207365553U CN 201721339013 U CN201721339013 U CN 201721339013U CN 207365553 U CN207365553 U CN 207365553U
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oxygen
tower
outlet
purity
inlet
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徐锋
李伟
陈琪
张金华
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SHANGHAI BAOSTEEL GAS CO Ltd
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SHANGHAI BAOSTEEL GAS CO Ltd
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Abstract

A kind of device for producing high pure oxygen and High Purity Nitrogen, including air compressor machine, chilldown system, prepurifier and ice chest;Main heat exchanger, expanding machine, subcooler, high-pressure tower, lower pressure column, domethanizing column and high-purity oxygen column are equipped with the ice chest;Prepurifier outlet divides two-way, is connected to main heat exchanger, high-pressure tower all the way;The expanded machine of another way is to main heat exchanger, then is connected to expander end, lower pressure column;High-pressure tower tower top outlet is connected to High Purity Nitrogen product supply pipeline;High-pressure tower oxygen-rich fluid outlet connection subcooler, divides two-way, is connected to lower pressure column all the way, another way is connected to domethanizing column;Lower pressure column purity nitrogen fluid outlet is connected to high-pressure tower;Demethanizer column overhead outlet connects high-purity oxygen column, and high-purity oxygen column tower reactor connects high-purity liquid oxygen product supply line.Single domethanizing column is provided with the utility model, the recovery rate of high pure oxygen, good economy performance can be improved on the basis of high-purity oxygen purity is ensured.

Description

Device for producing high-purity oxygen and high-purity nitrogen
Technical Field
The utility model belongs to the technical field of air separation purification, concretely relates to device of production high pure oxygen and high pure nitrogen.
Background
Industrial gases are likened to industrial "blood". With the rapid development of Chinese economy, industrial gas is one of the basic industrial factors of national economy, and the important position and the function in national economy are increasingly highlighted. Particularly, with the coming of the internet era, industries such as electronics and polysilicon are widely aroused, and the demand of high-purity gas, which is a superior generation in industrial gas, is more and more.
As a large amount of high-purity gases, high-purity oxygen and high-purity nitrogen are increasingly widely applied to the industries of electronics, polycrystalline silicon and the like, the current high-purity oxygen is mostly produced as a byproduct from air separation, the capacity is insufficient relative to the demand, and the high-purity nitrogen is obtained from a nitrogen production device by adopting a cryogenic rectification method.
At present, only a few devices can simultaneously prepare high-purity oxygen and high-purity nitrogen, but no device which can remove methane completely is arranged in the devices, during production, only a few parts of fluid which can ignore the content of methane is extracted from the middle part of a rectifying tower to be used as raw materials for producing the high-purity oxygen, so that the problem of low extraction rate is caused when the high-purity oxygen is produced, and the higher the purity of oxygen is, the lower the extraction rate is.
Therefore, it has not been widely used. For industries requiring the simultaneous application of high purity oxygen and high purity nitrogen, the requirements are still difficult to meet.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a device of production high pure oxygen and high pure nitrogen, can prepare two kinds of products of high pure oxygen and high pure nitrogen simultaneously, the high pure oxygen product oxygen content scope of obtaining is more than or equal to 99.999%, reach the standard of ultra-pure oxygen even, the oxygen content scope is more than or equal to 99.9999%, the high pure nitrogen product nitrogen content scope of obtaining is more than or equal to 99.999%, reach the standard requirement of high pure oxygen and "GB/T8979 pure nitrogen among national standard" GB/T14599 pure oxygen, high pure oxygen and ultra-pure oxygen "respectively, high pure nitrogen and high pure nitrogen among the ultra-pure nitrogen.
In order to achieve the above object, the utility model provides a following technical scheme:
a device for producing high-purity oxygen and high-purity nitrogen comprises an air compressor, a precooling system, a prepurifier and a cold box; the cold box is internally provided with a main heat exchanger, an expansion machine, a subcooler, a liquid nitrogen pump, a high-pressure tower, a low-pressure tower, a demethanizer and a high-purity oxygen tower; wherein,
the main heat exchanger is provided with at least two cooling inlets and outlets and at least two reheating inlets and outlets; the expansion machine consists of a pressurization part and an expansion part; the subcooler is provided with a cooling inlet and outlet and a reheating inlet and outlet; the top of the high-pressure tower is provided with a condenser, the tower body is provided with an air inlet and a pure nitrogen fluid inlet, the tower top is provided with a high-purity nitrogen fluid outlet, and the tower kettle is provided with an oxygen-enriched fluid outlet; the top of the low-pressure tower is provided with a condenser, the tower body is provided with an oxygen-enriched fluid inlet and an air inlet, the tower top is provided with a pure nitrogen fluid outlet, and the tower kettle is provided with an oxygen-enriched fluid outlet; the top of the demethanizer is provided with a condenser, the tower body is provided with an oxygen-enriched fluid inlet, the tower top is provided with an oxygen-containing fluid outlet, and the tower kettle is provided with a methane-enriched fluid outlet; the tower kettle of the high-purity oxygen tower is provided with a reboiler, the tower body is provided with an oxygen-containing fluid inlet, the tower top is provided with a nitrogen-containing fluid outlet, and the tower kettle is provided with a high-purity oxygen fluid outlet; the high-purity oxygen fluid outlet is a high-purity oxygen liquid outlet and/or a high-purity oxygen gas outlet;
the outlet of the air compressor is connected with the inlet of the precooling system, the outlet of the precooling system is connected with the inlet of the prepurifier, the outlet pipeline of the prepurifier is divided into two paths, one path is connected to the cooling inlet of the main heat exchanger in the cold box, and the other path is connected to the air inlet of the high-pressure tower through the cooling outlet; the other path is connected to the pressurization end of an expander in the cold box, the pressurization end of the expander is connected to the other cooling inlet of the main heat exchanger, the cooling outlet is connected to the expansion end of the expander, and the expansion end of the expander is connected to the air inlet of the low-pressure tower;
the high-purity nitrogen fluid outlet pipeline at the top of the high-pressure tower is connected to a reheating inlet of the main heat exchanger and then is connected to a high-purity nitrogen product supply pipeline through a reheating outlet; an oxygen-enriched fluid outlet pipeline of the tower kettle of the high-pressure tower is connected to a subcooler cooling inlet, the subcooler cooling outlet pipeline is divided into two paths, and one path is connected to the oxygen-enriched fluid inlet of the low-pressure tower; the other path is connected to the oxygen-enriched fluid inlet of the demethanizer;
a pure nitrogen fluid outlet at the top of the low-pressure tower is connected to a pure nitrogen fluid inlet of the high-pressure tower through a liquid nitrogen pump;
an oxygen-containing fluid outlet at the top of the demethanizer is connected to a high-purity oxygen column oxygen-containing fluid inlet;
a high-purity oxygen liquid outlet of the tower kettle of the high-purity oxygen tower is directly connected with a high-purity oxygen product supply pipeline; the high-purity oxygen outlet is connected to the reheating inlet of the main heat exchanger and then connected to the high-purity oxygen product supply pipeline.
And a heater is further arranged between the cold box and the pre-purifier, and an oxygen-enriched fluid outlet of the low-pressure tower kettle, a methane-enriched fluid outlet of the demethanizer tower kettle and a nitrogen-enriched fluid outlet of the high-purity oxygen tower top are converged through pipelines, connected to a reheating inlet of the subcooler, connected to a reheating inlet of the main heat exchanger through a cooler outlet, connected to the heater outside the cold box through a reheating outlet and connected with the pre-purifier.
Furthermore, the high-purity nitrogen fluid outlet pipeline at the top of the high-pressure tower is connected to the reheating inlet of the main heat exchanger, is connected to the purifier through the reheating outlet, and is further connected to the ultra-pure nitrogen product supply pipeline.
Preferably, the precooling system is a freeze dryer, and the prepurifier is a molecular sieve adsorption purifier.
Preferably, the prepurifier consists of two molecular sieve adsorption purifiers connected in parallel.
The utility model discloses in, set up the demethanizer of special desorption methane, in the demethanizer, through the rectification, carry out the desorption alone with the main impurity methane in the high-purity oxygen.
The utility model discloses in, to the oxygen boosting fluid that obtains from the high-pressure column tower cauldron, after the cooling pressurization, send into it and remove the methane tower, carry out the desorption to methane, after thoroughly removing methane, the oxygen boosting fluid gets into high pure oxygen tower further purification to obtain high pure oxygen product.
The utility model discloses in, adopt the cold box to keep warm, the oxygen boosting fluid that comes from the low pressure tower cauldron, the rich methane fluid of demethanizer tower cauldron and the rich nitrogen fluid of high purity oxygen tower top, and the high purity nitrogen on the high pressure tower top all can get into subcooler and main heat exchanger, as the cold source of air-purifying cooling, wherein, the cold source of cooling oxygen boosting fluid still can be regarded as to low pressure oxygen boosting fluid and rich methane fluid, the cold volume in low pressure oxygen boosting fluid and the rich methane fluid is exchanged the back, can regenerate the prepurifier after the heating, at the in-process that obtains high purity oxygen and high purity nitrogen, cold in the whole preparation process, the heat energy all obtains make full use of, the energy saving.
The utility model discloses in, in the prepurifier that is equipped with two parallelly connected molecular sieve absorption purifiers, two molecular sieve adsorbers work in turn, and a work, oxygen boosting fluid and the rich methane fluid that are heated regenerate, realize continuous operation. The condenser refers to heat exchange equipment which can condense hot fluid rising in the tower to generate cold fluid falling; the reboiler refers to a heat exchange device capable of heating a cold fluid descending in the column to produce a hot fluid ascending.
Compared with the prior art, the utility model discloses following beneficial effect has:
1) adopt the utility model discloses, compare in traditional adoption respectively that the big air-separating prepares high-purity oxygen product and nitrogen making device preparation high-purity nitrogen product, can prepare two kinds of products of high-purity oxygen and high-purity nitrogen simultaneously, cold, the heat energy homoenergetic in the whole preparation process obtain make full use of, the energy saving.
2) The utility model discloses a special desorption methane's unit can improve the extraction rate of high-purity oxygen on the basis of high-purity oxygen purity, preparation high-purity oxygen, high-purity liquid oxygen, perhaps prepares high-purity oxygen and high-purity liquid oxygen simultaneously, and high-purity oxygen product form is nimble.
Drawings
Figure 1 shows the device for producing high purity oxygen and nitrogen.
Detailed Description
Referring to fig. 1, the utility model discloses produce high pure oxygen and high pure nitrogen's device:
comprises an air compressor 1, a cold dryer 2, a prepurifier 3 and a cold box 4; the cold box 4 is internally provided with a main heat exchanger 41, an expansion machine 43, a subcooler 45, a liquid nitrogen pump 48, a high-pressure tower 42, a low-pressure tower 44, a demethanizer 46 and a high-purity oxygen tower 47; wherein,
the main heat exchanger 41 is provided with two cooling inlets and outlets and at least two reheating inlets and outlets; the expander 43 consists of two parts, namely pressurization and expansion; the subcooler 45 is provided with a cooling inlet and outlet and a reheating inlet and outlet; the top of the high-pressure tower 42 is provided with a condenser 421, the tower body is provided with an air inlet and a pure nitrogen fluid inlet, the tower top is provided with a high-purity nitrogen fluid outlet, and the tower kettle is provided with an oxygen-enriched fluid outlet; the top of the low-pressure tower 44 is provided with a condenser 441, the tower body is provided with an oxygen-enriched fluid inlet and an air inlet, the top of the tower is provided with a pure nitrogen fluid outlet, and the tower kettle is provided with an oxygen-enriched fluid outlet; the top of the demethanizer 46 is provided with a condenser 461, the tower body is provided with an oxygen-enriched fluid inlet, the tower top is provided with an oxygen-containing fluid outlet, and the tower kettle is provided with a methane-enriched fluid outlet; the tower kettle of the high-purity oxygen tower 47 is provided with a reboiler 471, the tower body is provided with an oxygen-containing fluid inlet, the tower top is provided with a nitrogen-rich fluid outlet, and the tower kettle is provided with a high-purity oxygen fluid outlet;
the outlet of the air compressor 1 is connected with the inlet of the cooling dryer 2, the outlet of the cooling dryer 2 is connected with the inlet of a pre-purifier 3, the pre-purifier 3 is formed by connecting two molecular sieve adsorption purifiers 31 and 31' in parallel, the outlet pipeline of the pre-purifier 3 is divided into two paths, one path is connected to the cooling inlet of a main heat exchanger 41 in a cooling box 4, and the other path is connected to the air inlet of a high-pressure tower 42 through a cooling outlet; the other path is connected to the pressurizing end of an expander 43 in the cold box 4, the pressurizing end of the expander 43 is connected to the other cooling inlet of the main heat exchanger 41, the cooling outlet is connected to the expansion end of the expander 43, and the expansion end of the expander 43 is connected to the air inlet of the low-pressure tower 44;
a high-purity nitrogen fluid outlet pipeline at the top of the high-pressure tower 42 is connected to a reheating inlet of the main heat exchanger 41 and then is connected to a high-purity nitrogen product supply pipeline through a reheating outlet; the oxygen-enriched fluid outlet pipeline of the tower kettle of the high-pressure tower 42 is connected to a cooling inlet of a subcooler 45, the cooling outlet pipeline of the subcooler 45 is divided into two paths, and one path is connected to the oxygen-enriched fluid inlet of the low-pressure tower 44; the other is connected to the oxygen-rich fluid inlet of the demethanizer 46;
a pure nitrogen fluid outlet at the top of the low-pressure tower 46 is connected to a pure nitrogen fluid inlet of the high-pressure tower 42 through a liquid nitrogen pump;
an oxygen-containing fluid outlet at the top of the demethanizer 46 is connected to an oxygen-containing fluid inlet of a high purity oxygen 47 tower, and a high purity oxygen fluid outlet at the bottom of the high purity oxygen 47 tower is connected to a high purity liquid oxygen product supply pipeline.
And a heater 5 is further arranged between the cold box 4 and the pre-purifier 3, an oxygen-enriched fluid outlet of the tower kettle of the low-pressure tower, a methane-enriched fluid outlet of the tower kettle of the demethanizer 46 and a nitrogen-containing fluid outlet of the tower top of the high-purity oxygen tower are converged through pipelines, connected to a reheating inlet of the subcooler 45, connected to a reheating inlet of the main heat exchanger 41 through an outlet of the cooler 45, connected to the heater 5 outside the cold box 4 through a reheating outlet, and connected with the pre-purifier 3.
Further, the reheating outlet of the main heat exchanger 41 is connected with a purifier 6.
The production process comprises the following steps:
raw material air enters an air compressor 1, is compressed to 10.5barg in multiple stages through the air compressor 1, is cooled to 40 ℃, enters a cold drying machine 2, and is cooled to 12 ℃ through the cold drying machine 2The air enters a pre-purifier 3 to adsorb moisture and CO in the air2And a hydrocarbon compound having 3 or more carbon atoms. In the treated purified air, the water content is less than or equal to 1ppm, and the carbon dioxide content is less than or equal to 1ppm, wherein in the prepurifier 3, two molecular sieve adsorbers 31 and 31' connected in parallel alternately work: one in operation and one in regeneration with heated contaminated nitrogen.
The purified air enters the cold box 4 and then is divided into two paths, one path of purified air accounting for 85 percent of the volume of the purified air is cooled to-163 ℃ through the main heat exchanger 41 and then enters the high-pressure tower 42 for rectification, the operating pressure of the high-pressure tower 42 is 9.9-10.3 barg, the operating temperature is-168 to-163 ℃, the theoretical plate number is 75, nitrogen is obtained at the tower top after rectification, the nitrogen is reheated to the normal temperature through the main heat exchanger 41 and then serves as a high-purity nitrogen product, the purity of the nitrogen meets the standard of high-purity nitrogen, and the content range of the nitrogen is more than or equal to 99.999 percent; the rest purified air enters a pressurizing end of an expander 43 for compression, enters a main heat exchanger 31 for cooling after being compressed to 13.5barg, enters the expander 43 for expansion after being cooled to minus 120 ℃, and enters a low-pressure tower 44 for rectification after being expanded to 2.8barg, the operating pressure of the low-pressure tower 44 is 2.4-2.7 barg, the operating temperature is minus 184-177 ℃, and the number of theoretical plates is 55; the oxygen-enriched fluid obtained in the tower bottom of the high-pressure tower 42 is subcooled to-167 ℃ by a subcooler 45 and then divided into two strands for throttling, one strand of the oxygen-enriched fluid (accounting for about 80 percent of the total oxygen-enriched fluid) is throttled to 2.8barg and enters the low-pressure tower 44 for rectification, the other strand of the oxygen-enriched fluid (accounting for about 20 percent of the total oxygen-enriched fluid) is throttled to 4.6barg and enters a demethanizer 46 for rectification, the operating pressure of the demethanizer 46 is 4.5-4.7 barg, the operating temperature is-172 ℃ to-177 ℃, and the number of theoretical plates is 20; the pure nitrogen fluid obtained at the top of the low pressure column 44 is pressurized to 10barg by a liquid nitrogen pump 48 and then enters the high pressure column 42 to participate in rectification.
The oxygen-enriched fluid enters a demethanizer 46 to remove methane and then is discharged from the top of the tower, the flow is throttled to 0.5barg and then enters a high-purity oxygen tower 47 to be rectified, the operating pressure of the high-purity oxygen tower 47 is 0.4-0.8 barg, the operating temperature is-148 ℃ -180 ℃, the number of theoretical plates is 60, and a high-purity oxygen product is obtained in the tower kettle after rectification, the purity of the high-purity oxygen product meets the standard of high-purity oxygen, the oxygen content range is more than or equal to 99.999%, and the extraction rate of the high-purity oxygen is 27%.
The oxygen-enriched fluid obtained from the tower kettle of the low-pressure tower 44, the methane-enriched liquid obtained from the tower kettle of the demethanizer 46 and the nitrogen-enriched fluid obtained from the tower top of the high-purity oxygen tower 47 are reheated to normal temperature through the subcooler 45 and the main heat exchanger 41 and then discharged out of the cold box 4.
Further, the oxygen-enriched fluid exiting the cold box 4 is passed through a heater 5 outside the cold box and then connected to the prepurifier 3.
And further purifying the obtained high-purity nitrogen product by a purifier 6 to obtain ultra-pure nitrogen with the nitrogen content range being more than or equal to 99.9999%.

Claims (6)

1. A device for producing high-purity oxygen and high-purity nitrogen is characterized by comprising an air compressor, a precooling system, a prepurifier and a cold box;
the cold box is internally provided with a main heat exchanger, an expansion machine, a subcooler, a liquid nitrogen pump, a high-pressure tower, a low-pressure tower, a demethanizer and a high-purity oxygen tower; wherein,
the main heat exchanger is provided with at least two cooling inlets and outlets and at least two reheating inlets and outlets;
the expansion machine consists of a pressurization part and an expansion part;
the subcooler is provided with a cooling inlet and outlet and a reheating inlet and outlet;
the top of the high-pressure tower is provided with a condenser, the tower body is provided with an air inlet and a pure nitrogen fluid inlet, the tower top is provided with a high-purity nitrogen fluid outlet, and the tower kettle is provided with an oxygen-enriched fluid outlet;
the top of the low-pressure tower is provided with a condenser, the tower body is provided with an oxygen-enriched fluid inlet and an air inlet, the tower top is provided with a pure nitrogen fluid outlet, and the tower kettle is provided with an oxygen-enriched fluid outlet;
the top of the demethanizer is provided with a condenser, the tower body is provided with an oxygen-enriched fluid inlet, the tower top is provided with an oxygen-containing fluid outlet, and the tower kettle is provided with a methane-enriched fluid outlet;
the tower kettle of the high-purity oxygen tower is provided with a reboiler, the tower body is provided with an oxygen-containing fluid inlet, the tower top is provided with a nitrogen-containing fluid outlet, and the tower kettle is provided with a high-purity oxygen fluid outlet; the high-purity oxygen fluid outlet is a high-purity oxygen liquid outlet and/or a high-purity oxygen gas outlet;
the outlet of the air compressor is connected with the inlet of the precooling system, the outlet of the precooling system is connected with the inlet of the prepurifier, the outlet pipeline of the prepurifier is divided into two paths, one path is connected to the cooling inlet of the main heat exchanger in the cold box, and the other path is connected to the air inlet of the high-pressure tower through the cooling outlet; the other path is connected to the pressurization end of an expander in the cold box, the pressurization end of the expander is connected to the other cooling inlet of the main heat exchanger, the cooling outlet is connected to the expansion end of the expander, and the expansion end of the expander is connected to the air inlet of the low-pressure tower;
the high-purity nitrogen fluid outlet pipeline at the top of the high-pressure tower is connected to a reheating inlet of the main heat exchanger and then is connected to a high-purity nitrogen product supply pipeline through a reheating outlet; an oxygen-enriched fluid outlet pipeline of the tower kettle of the high-pressure tower is connected to a subcooler cooling inlet, the subcooler cooling outlet pipeline is divided into two paths, and one path is connected to the oxygen-enriched fluid inlet of the low-pressure tower; the other path is connected to the oxygen-enriched fluid inlet of the demethanizer;
a pure nitrogen fluid outlet at the top of the low-pressure tower is connected to a pure nitrogen fluid inlet of the high-pressure tower through a liquid nitrogen pump;
an oxygen-containing fluid outlet at the top of the demethanizer is connected to a high-purity oxygen column oxygen-containing fluid inlet;
a high-purity oxygen liquid outlet of the tower kettle of the high-purity oxygen tower is directly connected with a high-purity oxygen product supply pipeline; the high-purity oxygen outlet is connected to the reheating inlet of the main heat exchanger and then connected to the high-purity oxygen product supply pipeline.
2. The apparatus according to claim 1, wherein a heater is disposed between the cold box and the pre-purifier, and the oxygen-rich fluid outlet of the low-pressure column, the methane-rich fluid outlet of the demethanizer column, and the nitrogen-rich fluid outlet of the top of the high-purity oxygen column are merged by pipes, connected to the re-heating inlet of the subcooler, connected to the re-heating inlet of the main heat exchanger via the outlet of the chiller, connected to the heater outside the cold box via the re-heating outlet, and connected to the pre-purifier.
3. The apparatus for producing high purity oxygen and nitrogen as claimed in claim 1, wherein the high purity nitrogen fluid outlet line at the top of the high pressure column is connected to the reheat inlet of the main heat exchanger, connected to the purifier via the reheat outlet, and connected to the high purity nitrogen product supply line.
4. The apparatus for producing high purity oxygen and nitrogen according to claim 1, wherein said pre-cooling system is a freeze dryer.
5. The apparatus for producing high purity oxygen and nitrogen in accordance with claim 1, wherein said prepurifier is a molecular sieve adsorption purifier.
6. The apparatus for producing high purity oxygen and nitrogen in accordance with claim 1 wherein said prepurifier consists of two molecular sieve adsorption purifiers connected in parallel.
CN201721339013.7U 2017-10-18 2017-10-18 A kind of device for producing high pure oxygen and High Purity Nitrogen Withdrawn - After Issue CN207365553U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107560320A (en) * 2017-10-18 2018-01-09 上海宝钢气体有限公司 A kind of method and device for producing high pure oxygen and High Purity Nitrogen
CN110207458A (en) * 2019-07-10 2019-09-06 上海联风能源科技有限公司 A kind of air is the high pure oxygen process units and its production method of raw material
CN110553466A (en) * 2018-05-31 2019-12-10 气体产品与化学公司 Method and apparatus for separating air using a split heat exchanger

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107560320A (en) * 2017-10-18 2018-01-09 上海宝钢气体有限公司 A kind of method and device for producing high pure oxygen and High Purity Nitrogen
CN107560320B (en) * 2017-10-18 2022-11-22 上海宝钢气体有限公司 Method and device for producing high-purity oxygen and high-purity nitrogen
CN110553466A (en) * 2018-05-31 2019-12-10 气体产品与化学公司 Method and apparatus for separating air using a split heat exchanger
CN110553466B (en) * 2018-05-31 2021-08-06 气体产品与化学公司 Method and apparatus for separating air using a split heat exchanger
CN110207458A (en) * 2019-07-10 2019-09-06 上海联风能源科技有限公司 A kind of air is the high pure oxygen process units and its production method of raw material
CN110207458B (en) * 2019-07-10 2024-04-02 上海联风气体有限公司 High-purity oxygen production device taking air as raw material and production method thereof

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