CN1818552A - Micro-rotation top with double-stator electromagnetic suspension rotor - Google Patents
Micro-rotation top with double-stator electromagnetic suspension rotor Download PDFInfo
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- CN1818552A CN1818552A CN 200610024507 CN200610024507A CN1818552A CN 1818552 A CN1818552 A CN 1818552A CN 200610024507 CN200610024507 CN 200610024507 CN 200610024507 A CN200610024507 A CN 200610024507A CN 1818552 A CN1818552 A CN 1818552A
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Abstract
A micro rotation gyroscope with double stator and electromagnetic suspension rotator consists of top base body, top stator, micro rotator, bottom stator, bottom base body and seal ring .It features that micro rotator is a conductive ring; rotary coil sensing electrode and suspension-stabilizing coil prepared by photo etching-plating are applied on top and bottom base bodies; the structure of top stator is completely the same as the structure of bottom stator except spacing column of micro rotator is set on bottom stator.
Description
Technical field
What the present invention relates to is a kind of device of micro-electromechanical system field, specifically is a kind of micro-rotation top with double-stator electromagnetic suspension rotor.
Background technology
In the time of two more than ten years in the past, the micro machining process of domestic and international application silicon or body Micrometer-Nanometer Processing Technology have processed a variety of little oscillation gyros, but little for various reasons oscillation gyro is difficult to reach the high precision of traditional gyro.The nineties in last century, people such as Shearwood have proposed a kind of electromagnetic suspension micro-rotary gyro, the electromagnetic suspension micro-rotary gyro is made up of major parts such as planar coil, induction electrode and little rotors, and wherein planar coil is divided into three kinds of suspended coil, revolving coil and ballast coils again according to its function difference.The electromagnetic suspension micro-rotary gyro relies on electromagnetic induction principle and electromagnetic force theory to be suspended and rotates, the planar coil top is placed with little rotor, suspended coil is positioned at the position at close center, near suspended coil is revolving coil, revolving coil can be divided into heterogeneous, little rotor is in the rotating magnetic field, and what be in the stator coil outermost is ballast coil, and also distributing between the stator coil has the sensing capacitance electrode.
Find that through literature search U.S. Patent number is to prior art: 5955800, name is called: suspension system (Leivitation Systems).Mentioning this system in this patent literary composition is that following components is formed: a) maximum gauge is the high conductivity body of 1500 μ m; B) suspending power generation device; C) micro device that rotor is rotated.In this electromagnetic suspension micro-rotary gyro, adopt single stator structure.Single stator electromagnetic suspension micro-rotary gyro only provides electromagnetic confinement on the horizontal direction to little rotor, be under action of gravity, to form constraint in vertical direction, therefore, under the gravity field effect, single stator electromagnetic suspension micro-rotary gyro can not be operated in or handstand state.Even being operated in, single stator electromagnetic suspension micro-rotary gyro can obtain stable rotation under the horizontality, but its interference free performance is very poor, in case extraneous have a little disturbance, little rotor will out-of-balance condition, and these deficiencies have limited the application of electromagnetic suspension micro-rotary gyro.
Also find in the retrieval, in " Development of a levitated micromotor forapplication as a gyroscope " (progress that is used for gyro microactuator suspension motor) article of 85 pages of magazine " Sensors and Actuators " (sensor and actuator) the 83rd volumes (2000), people such as Shearwood have provided the achievement in research of single stator electromagnetic suspension micro-rotary gyro.At diameter is 520 microns, and thickness is 12 microns rotor, and the maximum (top) speed that obtains is 1000 commentaries on classics per minutes.This rotating speed does not reach the requirement of the little gyro of high precision far away.Have offset when analyzing one of reason that little rotor speed can not further improve in the literary composition and be little rotor rotation, along with the raising of rotating speed, the centrifugal force of little rotor increases, and final little rotor is dished out under action of centrifugal force, loses stable rotation.This is the intrinsic defective of single stator electromagnetic suspension micro-rotary gyro.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, a kind of double-stator electromagnetic suspension micro-rotary gyro is provided, make it adopt two stator sandwiched type structures, solved disadvantages of background technology, the measuring accuracy that can improve.
The present invention is achieved by the following technical solutions, the present invention includes: comprising: last matrix, last stator, little rotor, following stator, lower substrate, O-ring seal.Last stator and following stator are symmetrical structures, and last stator is located on the matrix and the formation of last matrix is fixedly connected; Following stator is on lower substrate, formation is fixedly connected with lower substrate, except having little rotor limited post on the stator down, last stator and following stator are identical, outer rim at lower substrate is provided with O-ring seal, O-ring seal and lower substrate form and are fixedly connected, and O-ring seal and last matrix form by bonding and be fixedly connected, little rotor last stator, down under the effect of stator field electromagnetic force stable suspersion in the closed cavity of last matrix, lower substrate and O-ring seal formation.
Respectively be distributed with four stable suspersion coils on upper and lower stator, the stable suspersion coil distributes in a circumferential direction axisymmetricly.The stable suspersion coil magnetic field makes little rotor stability be suspended in the central authorities of cavity at the magnetic field force of little rotor upper and lower surface induction.
Near on the position of upper and lower stator center eight revolving coils are being arranged respectively, each revolving coil all is connected with the alternating current of certain phase differential, and the rotating magnetic field of generation makes little rotor rotation.
Two sensing electrodes are all arranged in each suspending stabilized coil, and the differential capacitance that sensing electrode and little rotor form is used for the detection of little rotor space position.
In structure of the present invention, little working rotor is in the space magnetic field that upper and lower stator forms, the electromagnetic force of induction is with the central authorities of little rotor " clamping " at cavity, thereby the little rotor that suspends is controlled in certain height, has improved the impact resistance of little rotor on short transverse.Increase along with the stable suspersion electric current, little rotor hoverheight in cavity can not change, but improved the rigidity of little rotor on height and horizontal direction, the hoverheight of little rotor and vertically and the rigidity on the horizontal direction can be by change about the size of current of the suspending stabilized coil of stator regulate.Rigidity on the high horizontal direction helps the raising of little rotary speed of rotator.Double-stator structure can increase the rotary torque that rotating magnetic field produces greatly, and this is owing to increased the quantity of revolving coil than this structure of single stator structure, thereby has increased the intensity of rotating magnetic field; In addition, little rotor is controlled on the very little hoverheight, and this can improve the rotary torque of little rotor.
What existing electromagnetic suspension micro-rotary gyro adopted all is single stator structure, and little rotor rotation speed of this micro-rotary gyro is not high, and impact resistance is very poor, therefore can't reach practical level.The electromagnetic force that the double-stator electromagnetic suspension micro-rotary gyro that the present invention proposes produces by stator field up and down limited little rotor in the horizontal direction with the degree of freedom of vertical direction, increased the impact resistance of electromagnetic suspension rotor micro-rotary gyro, make the electromagnetic suspension rotor micro-rotary gyro to be applied, as the attitude control of the navigation of military weapon and guidance, micro-nano satellite, virtual reality etc. in a lot of fields.
Description of drawings
Fig. 1 is a general structure synoptic diagram of the present invention;
Fig. 2 is a stator 3-D view under the present invention;
Fig. 3 is the 3-D view of revolving coil of the present invention, anti-adhesion post and rotor limited post;
Fig. 4 is the vertical view of Fig. 3 structure;
Fig. 5 is the 3-D view of stable suspersion coil of the present invention;
Fig. 6 is the vertical view of Fig. 5 structure;
Fig. 7 is the little rotor 3-D view of the present invention.
Embodiment
As shown in Figure 1, the present invention includes: last matrix 1, last stator 2, little rotor 3, following stator 4, lower substrate 5, O-ring seal 6.Last stator 2 adopts fine machining method to be produced on the matrix 1 and 1 formation of last matrix is fixedly connected.Following stator 4 adopts fine machining method to be produced on the lower substrate 5 and lower substrate 5 formation are fixedly connected.Except being manufactured with little rotor limited post 12 on the stator 4 down, other structures and the last stator 2 of following stator 4 are identical.Adopting fine machining method to be manufactured with O-ring seal 6 and lower substrate 5 in the outer rim of lower substrate 5 forms and is fixedly connected.Be fixedly connected by bonding formation between O-ring seal 6 and the last matrix 1.Little rotor 3 last stator 2, down under the effect of stator 4 magnetic field electromagnetic forces stable suspersion in the closed cavity of last matrix 1, lower substrate 5 and O-ring seal 6 formation.
As shown in Figure 2, on following stator 4, be distributed with stable suspersion coil outer ring 8, sensing electrode 7, tie 13, stable suspersion coil inner ring 9, revolving coil 10, anti-adhesion post 11, little rotor limited post 12 from outside to inside successively.
Shown in Fig. 3,4, revolving coil 10 is positioned at the position at close center of following stator 4, and example of the present invention is selected 8 revolving coils for use, is symmetrical distribution in a circumferential direction.The external diameter of revolving coil 10 is bigger than the internal diameter of the little rotor 3 of annular.In order to form rotating magnetic field, adjacent revolving coil current and phase difference is 90 °.Anti-adhesion post 11 is arranged, stable suspersion coil and sensing electrode 7 high 3 to 5 microns that anti-adhesion post 11 constitutes than stable suspersion coil outer ring 8, stable suspersion coil inner ring 9, tie 13 in each revolving coil inside.When little gyro quit work, anti-adhesion post 11 can reduce the contact area between little rotor 3 and the following stator 4, can prevent the generation of little rotor 3 adhesions.
Shown in Fig. 5,6, each stable suspersion coil outer ring 8, tie 13 and stable suspersion coil inner ring 9 link together, and form the stable suspersion coil of sealing.The stable suspersion coil has 4, is symmetrical distribution at circumferencial direction.The stable suspersion coil is positioned at the outside of stator down.Stable suspersion coil outer ring 8 diameters are bigger than the external diameter of little rotor, and the diameter of stable suspersion coil inner ring 9 is littler than the external diameter of little rotor.When being connected with the phase place exchange current identical with amplitude in four stable suspersion coils, alternating magnetic field can induce electromagnetic force in little rotor.The electromagnetic force that little rotor 3 central authorities induce distributes near rotational symmetry, and it is made a concerted effort straight up, overcomes the suffered action of gravity of little rotor 3.Little rotor 3 outside electromagnetic forces are also for tilting, and when little rotor 3 does not have eccentric the time, there are not the component of horizontal direction in little rotor 3 outside electromagnetic forces near the rotational symmetry distribution yet.When there is when departing from the upper and lower relatively in the horizontal direction stator of little rotor 2,4 centers, because little rotor outside electromagnetic force no longer is symmetrical distribution, can produce the component on the horizontal direction, divide force direction to point to the center of circle, can prevent that little rotor from being dished out.Each stable suspersion coil inside all has a pair of sensing electrode 7, and the capacitance that forms between they and the little rotor 3 changes with the position of little rotor 3 is different with attitude.Eight sensing electrodes 7 form four and detect locus and the attitude that electric capacity can detect little rotor 3.
Except there not being little rotor limited post 12, other structures of last stator 2 and following stator 4 are identical.Because upper and lower stator 2,4 all can produce electromagnetic force, little rotor 3 not only can retrain motion in the horizontal direction under the effect of electromagnetic force, has also retrained the motion of in the vertical direction simultaneously, has increased impact resistance greatly.
As shown in Figure 7, little rotor 3 is a ring shaped conductor.The outer rim of ring shaped conductor is between stable suspersion coil outer ring 8, the inner ring 9, and the internal diameter of ring shaped conductor is littler than revolving coil 10 external diameters.
Stable suspersion coil and sensing electrode all are planar structures, and material generally adopts electric conductivity copper preferably, adopt photoetching to electroplate the fine machining method manufacturing.In order to reduce the dissipation of electromagnetic energy, matrix material adopts magnetic property ferrite preferably.Little rotor limited post 12 has very big height, can adopt accurate LiGA or the manufacturing of LiGA technology.The material of little rotor 3 is electric conductivity copper or an aluminium preferably, can adopt laser processing manufacturing.Anti-adhesion post 11 can graphically be realized by deposition of aluminium oxide.For the insulation between little rotor 3 and matrix upper conductor is provided, all deposit one deck insulating material on coil or the electrode.
Be connected with after the high-frequency alternating current in the suspending stabilized coil on last stator 2 and the play stator 4, under the effect of lower surface electromagnetic force thereon of little rotor 3, stable suspersion is in the chamber central authorities of upper and lower stator 2,4 compositions.When be connected with the alternating current of certain phase differential in revolving coil 10 after, the little rotor 3 behind the stable suspersion is in the rotating magnetic field, and the little rotor 3 that does not therefore have the machinery constraint will high speed rotating, produces gyroscopic effect.The attitude angle of the little rotor 3 of high-speed rotation can detect by the sensing electrode on the stator 2,4 about being positioned at 7 and obtain.
Claims (6)
1, a kind of micro-rotation top with double-stator electromagnetic suspension rotor, comprise: go up matrix (1), last stator (2), little rotor (3), following stator (4), lower substrate (5), O-ring seal (6), it is characterized in that: go up stator (2) and be located on the matrix (1), formation is fixedly connected with last matrix (1), following stator (4) is on lower substrate (5), and lower substrate (5) formation is fixedly connected, except having little rotor limited post (12) on the stator (4) down, last stator (2) and following stator (4) are identical, outer rim at lower substrate (5) is provided with O-ring seal (6), O-ring seal (6) and lower substrate (5) form and are fixedly connected, O-ring seal (6) and last matrix (1) form by bonding and are fixedly connected, and little rotor (3) is in last stator (2), stable suspersion is in last matrix (1) under the effect of following stator (4) magnetic field electromagnetic force, in the closed cavity that lower substrate (5) and O-ring seal (6) form.
2, micro-rotation top with double-stator electromagnetic suspension rotor according to claim 1, it is characterized in that, on following stator (4), be distributed with stable suspersion coil outer ring (8), sensing electrode (7), tie (13), stable suspersion coil inner ring (9), revolving coil (10), anti-adhesion post (11), little rotor limited post (12) from outside to inside successively.
3, micro-rotation top with double-stator electromagnetic suspension rotor according to claim 2, it is characterized in that, revolving coil (10) is positioned at the position at close center of following stator (4), be symmetrical distribution in a circumferential direction, the external diameter of revolving coil (10) is bigger than the internal diameter of annular little rotor (3), in order to form rotating magnetic field, adjacent revolving coil (10) current and phase difference is 90 °, in each revolving coil (10) inside anti-adhesion post (11) is arranged, anti-adhesion post (11) is than stable suspersion coil outer ring (8), stable suspersion coil inner ring (9), stable suspersion coil and high 3 to 5 microns of sensing electrode (7) that tie (13) constitutes.
4, according to claim 2 or 3 described micro-rotation top with double-stator electromagnetic suspension rotor, it is characterized in that, each stable suspersion coil outer ring (8), tie (13) and stable suspersion coil inner ring (9) link together, form the stable suspersion coil of sealing, the stable suspersion coil has 4, be symmetrical distribution at circumferencial direction, the stable suspersion coil is positioned at the outside of stator (4) down, each stable suspersion coil inside all has a pair of sensing electrode (7), the capacitance that forms between they and the little rotor (3) changes with the position of little rotor (3) is different with attitude, and eight sensing electrodes (7) form the locus and the attitudes of four detection little rotors of capacitance detecting (3).
According to claim 2 or 3 described micro-rotation top with double-stator electromagnetic suspension rotor, it is characterized in that 5, stable suspersion coil outer ring (8) diameter is bigger than the external diameter of little rotor (3), the diameter of stable suspersion coil inner ring (9) is littler than the external diameter of little rotor (3).
6, according to claim 1 or 3 described micro-rotation top with double-stator electromagnetic suspension rotor, it is characterized in that, little rotor (3) is a ring shaped conductor, the outer rim of ring shaped conductor is between stable suspersion coil outer ring (8), the stable suspersion coil inner ring (9), and the internal diameter of ring shaped conductor is littler than revolving coil (10) external diameter.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100245076A CN100451547C (en) | 2006-03-09 | 2006-03-09 | Micro-rotation top with double-stator electromagnetic suspension rotor |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2006100245076A CN100451547C (en) | 2006-03-09 | 2006-03-09 | Micro-rotation top with double-stator electromagnetic suspension rotor |
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| CN1818552A true CN1818552A (en) | 2006-08-16 |
| CN100451547C CN100451547C (en) | 2009-01-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2006100245076A Expired - Fee Related CN100451547C (en) | 2006-03-09 | 2006-03-09 | Micro-rotation top with double-stator electromagnetic suspension rotor |
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Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101216308B (en) * | 2008-01-10 | 2011-03-23 | 上海交通大学 | Circular and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor induced rotating micro gyroscope |
| CN104272062A (en) * | 2012-02-01 | 2015-01-07 | 快捷半导体公司 | MEMS multi-axis gyroscope z-axis electrode structure |
| US9246018B2 (en) | 2010-09-18 | 2016-01-26 | Fairchild Semiconductor Corporation | Micromachined monolithic 3-axis gyroscope with single drive |
| US9278846B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | Micromachined monolithic 6-axis inertial sensor |
| US9278845B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | MEMS multi-axis gyroscope Z-axis electrode structure |
| US9352961B2 (en) | 2010-09-18 | 2016-05-31 | Fairchild Semiconductor Corporation | Flexure bearing to reduce quadrature for resonating micromachined devices |
| US9444404B2 (en) | 2012-04-05 | 2016-09-13 | Fairchild Semiconductor Corporation | MEMS device front-end charge amplifier |
| US9488693B2 (en) | 2012-04-04 | 2016-11-08 | Fairchild Semiconductor Corporation | Self test of MEMS accelerometer with ASICS integrated capacitors |
| US9618361B2 (en) | 2012-04-05 | 2017-04-11 | Fairchild Semiconductor Corporation | MEMS device automatic-gain control loop for mechanical amplitude drive |
| US9625272B2 (en) | 2012-04-12 | 2017-04-18 | Fairchild Semiconductor Corporation | MEMS quadrature cancellation and signal demodulation |
| US9802814B2 (en) | 2012-09-12 | 2017-10-31 | Fairchild Semiconductor Corporation | Through silicon via including multi-material fill |
| US9856132B2 (en) | 2010-09-18 | 2018-01-02 | Fairchild Semiconductor Corporation | Sealed packaging for microelectromechanical systems |
| US10060757B2 (en) | 2012-04-05 | 2018-08-28 | Fairchild Semiconductor Corporation | MEMS device quadrature shift cancellation |
| US10065851B2 (en) | 2010-09-20 | 2018-09-04 | Fairchild Semiconductor Corporation | Microelectromechanical pressure sensor including reference capacitor |
| US10697994B2 (en) | 2017-02-22 | 2020-06-30 | Semiconductor Components Industries, Llc | Accelerometer techniques to compensate package stress |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| RU2156441C2 (en) * | 1996-08-26 | 2000-09-20 | Артюхов Евгений Алексеевич | Gear for suspension of ferromagnetic spherical rotor |
| RU2126135C1 (en) * | 1997-01-16 | 1999-02-10 | Государственное предприятие "Ижевский механический завод" | Magnetospheric gyroscope |
| CN1238694C (en) * | 2003-07-10 | 2006-01-25 | 上海交通大学 | Magnetic suspension rotor azimuth microgyro |
| CN100350215C (en) * | 2004-04-29 | 2007-11-21 | 上海交通大学 | Suspended rotor MEMS micro-gyroscope utilizing static and charge relaxation to work |
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2006
- 2006-03-09 CN CNB2006100245076A patent/CN100451547C/en not_active Expired - Fee Related
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101216308B (en) * | 2008-01-10 | 2011-03-23 | 上海交通大学 | Circular and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor induced rotating micro gyroscope |
| US9856132B2 (en) | 2010-09-18 | 2018-01-02 | Fairchild Semiconductor Corporation | Sealed packaging for microelectromechanical systems |
| US9278846B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | Micromachined monolithic 6-axis inertial sensor |
| US9278845B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | MEMS multi-axis gyroscope Z-axis electrode structure |
| US9352961B2 (en) | 2010-09-18 | 2016-05-31 | Fairchild Semiconductor Corporation | Flexure bearing to reduce quadrature for resonating micromachined devices |
| US9246018B2 (en) | 2010-09-18 | 2016-01-26 | Fairchild Semiconductor Corporation | Micromachined monolithic 3-axis gyroscope with single drive |
| US10050155B2 (en) | 2010-09-18 | 2018-08-14 | Fairchild Semiconductor Corporation | Micromachined monolithic 3-axis gyroscope with single drive |
| US10065851B2 (en) | 2010-09-20 | 2018-09-04 | Fairchild Semiconductor Corporation | Microelectromechanical pressure sensor including reference capacitor |
| CN104272062A (en) * | 2012-02-01 | 2015-01-07 | 快捷半导体公司 | MEMS multi-axis gyroscope z-axis electrode structure |
| CN104272062B (en) * | 2012-02-01 | 2016-05-18 | 快捷半导体公司 | MEMS (MEMS) multiaxis gyroscope Z axis electrode structure |
| US9488693B2 (en) | 2012-04-04 | 2016-11-08 | Fairchild Semiconductor Corporation | Self test of MEMS accelerometer with ASICS integrated capacitors |
| US9444404B2 (en) | 2012-04-05 | 2016-09-13 | Fairchild Semiconductor Corporation | MEMS device front-end charge amplifier |
| US10060757B2 (en) | 2012-04-05 | 2018-08-28 | Fairchild Semiconductor Corporation | MEMS device quadrature shift cancellation |
| US9618361B2 (en) | 2012-04-05 | 2017-04-11 | Fairchild Semiconductor Corporation | MEMS device automatic-gain control loop for mechanical amplitude drive |
| US9625272B2 (en) | 2012-04-12 | 2017-04-18 | Fairchild Semiconductor Corporation | MEMS quadrature cancellation and signal demodulation |
| US9802814B2 (en) | 2012-09-12 | 2017-10-31 | Fairchild Semiconductor Corporation | Through silicon via including multi-material fill |
| US10697994B2 (en) | 2017-02-22 | 2020-06-30 | Semiconductor Components Industries, Llc | Accelerometer techniques to compensate package stress |
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| CN100451547C (en) | 2009-01-14 |
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Granted publication date: 20090114 Termination date: 20120309 |