CN117268361A - MEMS single-axis gyroscope - Google Patents
MEMS single-axis gyroscope Download PDFInfo
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- CN117268361A CN117268361A CN202311498622.7A CN202311498622A CN117268361A CN 117268361 A CN117268361 A CN 117268361A CN 202311498622 A CN202311498622 A CN 202311498622A CN 117268361 A CN117268361 A CN 117268361A
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- 238000001514 detection method Methods 0.000 claims abstract description 148
- 239000000758 substrate Substances 0.000 claims description 10
- 238000013459 approach Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 10
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 9
- 230000002457 bidirectional effect Effects 0.000 description 3
- 230000002238 attenuated effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
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Abstract
The invention relates to the technical field of single-axis gyroscopes, and discloses an MEMS single-axis gyroscope, which comprises two gyroscope units, wherein each gyroscope unit comprises: a mass block; the driving electrode is arranged on the mass block; the decoupling frame is elastically connected with the mass block; the detection frames are provided with detection electrodes for detecting the angular velocity in the second direction; the two ends of the first connecting beam are respectively connected with the decoupling frame and the detection frame; the second connecting beam can rotate along a second direction, and two ends of the second connecting beam are respectively connected with the two detection frames; the third connecting beam can deform along a third direction and is respectively connected with the mass block and the decoupling frame; the mass blocks of the two gyro units are connected through a fourth connecting beam capable of rotating along a third direction. The MEMS single-axis gyroscope disclosed by the invention has the advantages that the reliability of the MEMS single-axis gyroscope in vibration and impact environments is improved, common-mode signals are restrained, the measurement precision is increased, the measurement of the diagonal speed is realized through the full difference, and the detection sensitivity is improved.
Description
Technical Field
The invention relates to the technical field of single-axis gyroscopes, in particular to an MEMS single-axis gyroscope.
Background
The gyroscope is a sensor for measuring rotational angular velocity or angular displacement, wherein the MEMS gyroscope is widely used in the fields of electronics, automobiles, aviation and the like due to the advantages of small volume, low power consumption, good circuit integration and the like. The MEMS gyroscope realizes detection by utilizing the Coriolis effect, the conventional MEMS gyroscope generally adopts a symmetrical double-mass block structure, two mass blocks synchronously and reversely move in a driving state, two mass blocks respectively generate secondary resonance movement in the Coriolis force direction in a detection state, and finally the Coriolis force signals are detected in a differential output mode.
Disclosure of Invention
Based on the above, the present invention aims to provide a MEMS uniaxial gyroscope, which suppresses the influence of vibration and impact in the driving direction on the structure, increases the measurement accuracy, realizes the measurement of the angular velocity by the full differential, and improves the detection sensitivity.
In order to achieve the above purpose, the invention adopts the following technical scheme:
a MEMS single axis gyroscope comprising two gyroscopic units, each comprising:
the two mass blocks are distributed along a first direction;
the driving electrodes are arranged on one mass block, and can respectively drive the two mass blocks to synchronously and reversely reciprocate along the first direction;
the decoupling frames are elastically connected with one mass block, and can move along with the mass block;
the two detection frames correspond to the two decoupling frames respectively, each detection frame is provided with a detection electrode capable of detecting the angular speed in the second direction, the detection frames can move along the third direction along with the decoupling frames, and the first direction, the second direction and the third direction are perpendicular to each other;
the first connecting beam can stretch along the first direction, and two ends of the first connecting beam are respectively connected with the decoupling frame and the detection frame;
the two ends of the second connecting beam are respectively connected with the two detection frames, and the second connecting beam can rotate along the second direction;
a third connecting beam capable of deforming in a third direction and connected to the mass and the decoupling frame, respectively;
the mass blocks of the two gyro units are connected through a fourth connecting beam, and the fourth connecting beam can rotate along the third direction.
As a preferable scheme of the MEMS uniaxial gyroscope, the first direction is an X-axis direction, the second direction is a Y-axis direction, the third direction is a Z-axis direction, and the detection frame and a substrate opposite to the detection frame form the detection electrode; or the first direction is the Y-axis direction, the second direction is the X-axis direction, the third direction is the Z-axis direction, and the detection frame and the substrate opposite to the detection frame form the detection electrode.
As an optimized scheme of the MEMS single-axis gyroscope, the third connecting beam is a first driving decoupling beam capable of deforming along the Z-axis direction, the first driving decoupling beam comprises a first vertical beam and two first cross beams, the first vertical beam extends along the second direction, two ends of the first vertical beam are respectively connected with the two first cross beams, the first cross beams extend along the first direction, two ends of one of the first cross beams are respectively connected with the mass blocks, and two ends of the other first cross beam are respectively connected with the decoupling frame.
As a preferable scheme of MEMS unipolar gyroscope, the gyro unit still includes first anchor point and can follow the first detection fixed beam that the third direction warp, first detection fixed beam includes second vertical beam and two second crossbeams, the second vertical beam is followed the second direction extends and its both ends respectively with two the second crossbeam links to each other, the second crossbeam is followed the first direction extends, one of them the both ends of second crossbeam respectively with first anchor point links to each other, another the both ends of second crossbeam respectively with the detection frame links to each other.
As a preferable scheme of the MEMS single-axis gyroscope, the first direction is an X-axis direction, the second direction is a Z-axis direction, the third direction is a Y-axis direction, the movable part of the detection electrode is arranged on the detection frame, the third connecting beam is a second driving decoupling beam which can stretch along the Y-axis direction, and the second driving decoupling beam is respectively connected with the mass block and the decoupling frame.
As an optimized scheme of MEMS single-axis gyroscope, the gyro unit further comprises a second anchor point and a second detection fixed beam, the second detection fixed beam can stretch out and draw back along the third direction, and two ends of the second detection fixed beam are respectively connected with the second anchor point and the detection frame.
As a preferable scheme of the MEMS single-axis gyroscope, the MEMS single-axis gyroscope further comprises a detection connecting beam, the detection connecting beam can stretch and retract along the directions of approaching or separating from the two gyro units, and two ends of the detection connecting beam are respectively connected with the detection frames of the two gyro units.
As an optimized scheme of the MEMS single-axis gyroscope, the gyroscope unit further comprises a third anchor point and a driving fixed beam, the driving fixed beam can stretch and retract along the first direction, and two ends of the driving fixed beam are respectively connected with the third anchor point and the mass block.
As a preferable scheme of MEMS unipolar gyroscope, the second tie-beam includes first turning block, first straight beam, second straight beam and third straight beam, the gyro unit still includes the fourth anchor point, first straight beam the second straight beam reaches the third straight beam all with first turning block links to each other, first straight beam with one the detection frame links to each other, the second straight beam with the fourth anchor point links to each other, the third straight beam with another the detection frame links to each other.
As an optimized scheme of the MEMS single-axis gyroscope, the fourth connecting beam comprises a second rotating block, a fourth straight beam, a fifth straight beam and a sixth straight beam, the gyroscope unit further comprises a fifth anchor point, the fourth straight beam, the fifth straight beam and the sixth straight beam extend along the first direction and are connected with the second rotating block, the fourth straight beam is connected with one gyroscope unit mass block, the fifth straight beam is connected with the fifth anchor point, and the sixth straight beam is connected with the other gyroscope unit mass block.
The beneficial effects of the invention are as follows:
according to the MEMS single-axis gyroscope disclosed by the invention, the second connecting beam elastically connects the two detection frames of each gyroscope unit, the fourth connecting beam elastically connects the mass blocks of the two gyroscope units, the reliability of the MEMS single-axis gyroscope in vibration and impact environments is improved, each detection frame is provided with the detection electrode capable of detecting the angular velocity in the second direction, the two gyroscope units comprise four detection electrodes, the four detection electrodes form four differential electrodes, and further the differential electrodes are formed, so that the detection of the angular velocity in the second direction is realized, the detection sensitivity is improved, the common mode signal is restrained, the measurement precision is increased, the driving and the detection bidirectional decoupling of the decoupling frame, the first connecting beam and the third connecting beam are realized, and the measurement precision is further increased.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following description will briefly explain the drawings needed in the description of the embodiments of the present invention, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to the contents of the embodiments of the present invention and these drawings without inventive effort for those skilled in the art.
FIG. 1 is a schematic diagram of a MEMS single-axis gyroscope according to a first embodiment of the present invention;
FIG. 2 is a schematic diagram of a part of a MEMS uniaxial gyroscope according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a MEMS single-axis gyroscope in a driving state according to a first embodiment of the present invention;
FIG. 4 is a schematic diagram of a MEMS single-axis gyroscope in a detection state according to a first embodiment of the present invention;
FIG. 5 is a schematic diagram of a MEMS single-axis gyroscope according to a second embodiment of the present invention;
FIG. 6 is a schematic diagram of a part of the structure of a MEMS single-axis gyroscope according to a second embodiment of the present invention;
FIG. 7 is a schematic diagram of a MEMS single-axis gyroscope in a driving state according to a second embodiment of the present invention;
FIG. 8 is a schematic diagram of a MEMS single-axis gyroscope in a detection state according to a second embodiment of the present invention;
fig. 9 is a schematic diagram of a MEMS uniaxial gyroscope according to a third embodiment of the present invention.
In the figure:
11. a mass block; 12. A decoupling frame; 13. A detection frame;
21. a driving electrode; 22. Driving the detection electrode; 23. A detection electrode;
31. a first connecting beam; 32. a second connection beam; 321. a first rotating block; 322. a first straight beam; 323. a second straight beam; 324. a third straight beam; 33. a fourth connecting beam; 331. a second rotating block; 332. a fourth straight beam; 333. a fifth straight beam; 334. a sixth straight beam;
41. a first drive decoupling beam; 411. a first vertical beam; 412. a first cross beam; 42. a second drive decoupling beam; 43. driving the connecting beam;
51. a first anchor point; 52. a second anchor point; 53. a third anchor point; 54. a fourth anchor point; 55. a fifth anchor point;
61. a first detection fixed beam; 611. a second vertical beam; 612. a second cross beam; 62. a second detection fixed beam; 63. detecting a connecting beam; 64. and driving the fixed beam.
Detailed Description
In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved more clear, the technical solutions of the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to fall within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first position" and "second position" are two different positions.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixed or removable, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
Example 1
The embodiment provides a MEMS single-axis gyroscope, as shown in fig. 1 and 2, including two gyro units arranged side by side, each gyro unit includes two mass blocks 11, two sets of driving electrodes 21, two decoupling frames 12, two detection frames 13, a first connecting beam 31, a second connecting beam 32, a third connecting beam and a fourth connecting beam 33, two mass blocks 11 are elastically connected along a first direction, each set of driving electrodes 21 is disposed on one mass block 11, two sets of driving electrodes 21 can respectively drive two mass blocks 11 to synchronously and reversely reciprocate along the first direction, each decoupling frame 12 is elastically connected with one mass block 11, the decoupling frames 12 can move along with the mass blocks 11, two detection frames 13 respectively correspond to the two decoupling frames 12, each detection frame 13 is provided with a detection electrode 23, the detection electrodes 23 can detect the angular velocity of the second direction, the detection frames 13 can move along the decoupling frames 12 along the third direction, the first direction, the second direction and the third connecting beam 31 can vertically deform along the third direction, the third connecting beam 33 can vertically deform along the third direction, the two third connecting beams and the third direction, the two decoupling frames 12 can respectively rotate along the third direction, the two third connecting beams and the third direction, the two decoupling frames 13 can respectively deform along the third direction, the third direction and the two end directions can respectively, the third direction can respectively, and the third direction can respectively deform along the third direction, and the third direction can respectively, and the third direction.
Specifically, as shown in fig. 1 and 2, the first direction is the X-axis direction, the second direction is the Y-axis direction, the third direction is the Z-axis direction, two gyro units are arranged along the Y-axis direction, each detection frame 13 and the substrate opposite thereto form a detection electrode 23, and the detection electrode 23 can detect the angular velocity in the Y-axis direction. The two gyro units are distributed along the Y-axis direction, the two mass blocks 11 of each gyro unit are elastically connected along the X-axis direction, under the driving state, the two groups of driving electrodes 21 of each gyro unit can respectively drive the two mass blocks 11 to synchronously and reversely reciprocate along the X-axis direction, and when the angular velocity along the Y-axis direction is detected, the detection frame 13 can move along the Z-axis direction along with the decoupling frame 12.
The MEMS single-axis gyroscope provided in this embodiment, the second connecting beam 32 elastically connects the two detecting frames 13 of each gyroscope unit, the fourth connecting beam 33 elastically connects the mass blocks 11 of the two gyroscope units, the reliability of the MEMS single-axis gyroscope in vibration and impact environments is improved, the detecting electrodes 23 capable of detecting the angular velocity in the Y-axis direction are provided on each detecting frame 13, the two gyroscope units include four detecting electrodes 23, the four detecting electrodes 23 form four differential electrodes, and further form a fully differential electrode, so that the detection of the angular velocity in the Y-axis direction is realized, the sensitivity of the detection is improved, the common mode signal is suppressed, and the measurement precision is increased. The added decoupling frame 12, the first connecting beam 31 and the third connecting beam realize bidirectional decoupling of driving and detection, and further increase the measurement precision.
As shown in fig. 1 and 2, each gyro unit of the present embodiment further includes a driving connection beam 43 and two sets of driving detection electrodes 22, each set of driving detection electrodes 22 is disposed on one mass block 11, the driving detection electrodes 22 can reflect the motion condition of the mass block 11, and the two mass blocks 11 of the same gyro unit are connected through the driving connection beam 43, so as to implement elastic connection between the two mass blocks 11 of the same gyro unit.
The first connecting beam 31 of this embodiment is a U-shaped beam capable of deforming along the X-axis direction, one end of the U-shaped beam is connected with the decoupling frame 12, the other end is connected with the detection frame 13, and in the driving state, the mass block 11 drives the decoupling frame 12 to move along the X-axis direction, and since the first connecting beam 31 can deform along the X-axis direction, the first connecting beam 31 is stationary, and unidirectional decoupling driven to detection is achieved.
The third connection beam in this embodiment is a first driving decoupling beam 41 capable of deforming along the Z-axis direction, as shown in fig. 2, the first driving decoupling beam 41 includes a first vertical beam 411 and two first beams 412, the first vertical beam 411 extends along the Y-axis direction and two ends of the first vertical beam are respectively connected with the two first beams 412, the first beams 412 extend along the X-axis direction, two ends of one of the first beams 412 are respectively connected with the mass block 11, and two ends of the other first beam 412 are respectively connected with the decoupling frame 12. The rigidity of the first driving decoupling beam 41 in the X-axis direction and the Y-axis direction is more than 6 times of the rigidity of the Z-axis direction, so that the first driving decoupling beam 41 can move along with the movement of the mass block 11 in the X-axis direction, when the angular velocity in the Y-axis direction is detected, the decoupling frame 12 moves by the coriolis force in the Z-axis direction, the first driving decoupling beam 41 deforms along the Z-axis direction along with the rotation of the decoupling frame 12, the rotation of the decoupling frame 12 is attenuated by the first driving decoupling beam 41, the influence of detection on the driving is prevented, and the unidirectional decoupling of the driving is detected. It can be seen that the first connection beam 31 and the first drive decoupling beam 41 of the present embodiment enable bidirectional decoupling of drive and detection between the mass 11 and the detection frame 13.
As shown in fig. 1, the gyro unit of the present embodiment further includes four first anchor points 51 and two first detection fixing beams 61 capable of being deformed along the Z-axis direction, the first detection fixing beams 61 include a second vertical beam 611 and two second cross beams 612, the second vertical beam 611 extends along the Y-axis direction and both ends thereof are respectively connected with the two second cross beams 612, the second cross beams 612 extend along the X-axis direction, both ends of one of the second cross beams 612 are respectively connected with the first anchor points 51, and both ends of the other second cross beam 612 are respectively connected with the detection frame 13. The rigidity of the first detection fixed beam 61 in the X-axis direction and the rigidity of the first detection fixed beam 61 in the Y-axis direction are more than 6 times of the rigidity of the first detection fixed beam in the Z-axis direction, when the angular velocity of the first detection fixed beam in the Y-axis direction is detected, the decoupling frame 12 moves by the coriolis force in the Z-axis direction, the detection frame 13 moves along with the movement of the decoupling frame 12, the first detection fixed beam 61 deforms along the Z-axis direction along with the rotation of the detection frame 13, the movement of the detection frame 13 approaches to the translation, and the measurement linearity is improved.
As shown in fig. 1 and 2, the MEMS uniaxial gyroscope of the present embodiment further includes a detection connection beam 63, the detection connection beam 63 is capable of extending and contracting in a direction in which the two gyro units approach or depart from each other, both ends of the detection connection beam 63 are respectively connected to the two second connection beams 32, the two second connection beams 32 respectively belong to the two gyro units, and the detection connection beam 63 realizes indirect connection of the two detection frames 13 of the two gyro units. The additionally arranged second connecting beam 32 can isolate the frequencies of the same-direction movement and the opposite movement of the two detection frames 13 adjacent to the two gyro units, so that the synchronous opposite movement of the two detection frames 13 adjacent to the two gyro units in the detection state is facilitated. In other embodiments, one end of the detection connection beam 63 may be directly connected to one detection frame 13 of one gyro unit, and the other end of the detection connection beam 63 may be directly connected to one detection frame 13 of another gyro unit, which is specifically set according to actual needs.
As shown in fig. 1 and 2, the gyro unit of the present embodiment further includes a third anchor point 53 and a driving fixing beam 64, where the third anchor point 53 is fixed on the substrate, the driving fixing beam 64 can stretch along the X-axis direction, and two ends of the driving fixing beam 64 are respectively connected with the third anchor point 53 and the mass block 11, so as to implement elastic connection between the mass block 11 and the substrate, and ensure that the mass block 11 can move relative to the substrate.
As shown in fig. 1, the number of the second connection beams 32 in the present embodiment is two, each second connection beam 32 corresponds to one gyro unit, specifically, the second connection beam 32 includes a first rotating block 321, a first straight beam 322, a second straight beam 323, and a third straight beam 324, the gyro unit further includes a fourth anchor point 54, the first straight beam 322, the second straight beam 323, and the third straight beam 324 all extend along the Y-axis direction and are all connected to the first rotating block 321, the first straight beam 322 is connected to one detection frame 13, the second straight beam 323 is connected to the fourth anchor point 54, and the third straight beam 324 is connected to another detection frame 13. It should be noted that, in this embodiment, the number of the fourth anchor points 54 is two, and each fourth anchor point 54 and the two first anchor points 51 adjacent thereto are formed into one anchor point.
As shown in fig. 1, the number of the fourth connecting beams 33 in the present embodiment is two, one fourth connecting beam 33 is located at one end of two gyro units, the other fourth connecting beam 33 is located at the other end of two gyro units, each fourth connecting beam 33 includes a second rotating block 331, a fourth straight beam 332, a fifth straight beam 333 and a sixth straight beam 334, each fourth straight beam 332, each fifth straight beam 333 and each sixth straight beam 334 extends along the X-axis direction and is connected to the second rotating block 331, each fourth straight beam 332 is connected to the mass block 11 of one gyro unit, each sixth straight beam 334 is connected to the mass block 11 of the other gyro unit, each gyro unit further includes a fifth anchor point 55, and each fifth straight beam 333 is connected to the fifth anchor point 55. The number of the fifth anchor points 55 in this embodiment is two, and each fifth anchor point 55 and two third anchor points 53 adjacent to the fifth anchor point 55 are formed into one anchor point.
In the driving state, as shown in fig. 3, the driving electrode 21 drives the corresponding mass blocks 11 to move along the X-axis direction, the two mass blocks 11 of each gyro unit move towards the direction approaching to or separating from each other at the same time, the two adjacent mass blocks 11 of the two gyro units move along the opposite direction, each mass block 11 drives the decoupling frame 12 connected with the two mass blocks to synchronously move, at this time, the fourth connecting beam 33 rotates along the Z-axis direction by taking the connection point of the second rotating block 331 and the fifth straight beam 333 as a fulcrum, so that the adjacent mass blocks 11 of different gyro units are guaranteed to reversely move along the X-axis direction, at this time, the decoupling frame 12 cannot drive the detection frame 13 to move due to the fact that the first connecting beam 31 can stretch along the X-axis direction, unidirectional decoupling from driving to detection is realized, and the influence of driving on detection is avoided.
When the angular velocity in the Y-axis direction is detected, as shown in fig. 4, the decoupling frame 12 receives coriolis force along the Z-axis direction, the detection frame 13 connected with the decoupling frame 12 moves along with it due to the presence of the first connecting beam 31, the mass block 11 does not move along with the movement of the decoupling frame 12 along the Z-axis direction due to the presence of the first driving decoupling beam 41, unidirectional decoupling of detection driving is achieved, influence of detection on driving is avoided, at this time, the second connecting beam 32 rotates along the Y-axis direction with the connection point of the first rotating block 321 and the second straight beam 323 as a fulcrum, four differential electrodes are formed by the four detecting electrodes 23, and the four differential electrodes form a fully differential structure, thereby improving the sensitivity of the MEMS single-axis gyroscope.
Example two
As shown in fig. 5 and 6, the difference between the present embodiment and the first embodiment is that the first direction is the X-axis direction, the second direction is the Z-axis direction, the third direction is the Y-axis direction, the two gyro units are arranged along the X-axis direction, the two mass blocks 11 of each gyro unit are not elastically connected by the driving connection beam 43, and the two mass blocks 11 of each gyro unit are connected only by the fourth connection beam 33. Each of the detection frames 13 of the present embodiment forms a detection electrode 23 capable of detecting the angular velocity in the Z-axis direction with the substrate facing it. In the driving state, the two groups of driving electrodes 21 of each gyro unit can respectively drive the two masses 11 to synchronously and reversely reciprocate along the X-axis direction, and the detection frame 13 can move along the Y-axis direction along with the decoupling frame 12 when detecting the angular velocity in the Z-axis direction.
The movable portion of the detection electrode 23 in this embodiment is disposed on the detection frame 13, and the third connection beam is a second driving decoupling beam 42 that can extend and retract along the Y-axis direction, and the second driving decoupling beam 42 is connected to the mass block 11 and the decoupling frame 12 respectively, that is, the second driving decoupling beam 42 in this embodiment replaces the first driving decoupling beam 41 in the first embodiment. The rigidity of the second driving decoupling beam 42 in the X-axis direction and the Z-axis direction is more than 6 times of the rigidity of the Y-axis direction, so that the second driving decoupling beam 42 can move along with the movement of the mass block 11 in the X-axis direction, when the angular velocity in the Z-axis direction is detected, the decoupling frame 12 moves by the coriolis force in the Y-axis direction, the second driving decoupling beam 42 deforms along the Y-axis direction along with the rotation of the decoupling frame 12, the rotation of the decoupling frame 12 is attenuated by the second driving decoupling beam 42, the influence of detection on the driving is prevented, and the unidirectional decoupling of the driving is detected.
As shown in fig. 5 and 6, the gyro unit of the present embodiment further includes a second anchor point 52 and a second detection fixing beam 62, the second detection fixing beam 62 is capable of extending and contracting along the Y-axis direction, and two ends of the second detection fixing beam 62 are respectively connected to the second anchor point 52 and the detection frame 13. That is, the second anchor point 52 of the present embodiment replaces the first anchor point 51 of the first embodiment, and the second detection fixing beam 62 of the present embodiment replaces the first detection fixing beam 61 of the first embodiment. The rigidity of the second detection fixing beam 62 in the X-axis direction and the Z-axis direction is more than 6 times of the rigidity in the Y-axis direction, when the angular velocity in the Z-axis direction is detected, the decoupling frame 12 moves by the coriolis force in the Y-axis direction, the detection frame 13 moves along with the movement of the decoupling frame 12, and the second detection fixing beam 62 deforms along the Y-axis direction along with the rotation of the detection frame 13, so that the movement of the detection frame 13 is translational, and the measurement linearity is improved.
In the driving state, as shown in fig. 7, the driving electrode 21 drives the corresponding mass blocks 11 to move along the X-axis direction, the two mass blocks 11 of each gyro unit move towards the direction approaching to or away from each other, the two adjacent mass blocks 11 of the two gyro units move along the opposite direction, each mass block 11 drives the decoupling frame 12 connected with the two mass blocks to move, at this time, the fourth connecting beam 33 rotates along the Z-axis direction by taking the connection point of the second rotating block 331 and the fifth direct beam 333 as a fulcrum, so that the adjacent mass blocks 11 of different gyro units are guaranteed to reversely move along the X-axis direction, at this time, the first connecting beam 31 can stretch along the X-axis direction, so that the decoupling frame 12 cannot drive the detection frame 13 to move, unidirectional decoupling driven to detection is realized, and the influence of driving on detection is avoided.
When the angular velocity in the Z-axis direction is detected, as shown in fig. 8, the decoupling frame 12 receives coriolis force along the Y-axis direction, the detection frame 13 connected with the decoupling frame 12 moves along with the first connecting beam 31, the mass block 11 does not move along with the movement of the decoupling frame 12 along the third direction due to the existence of the second driving decoupling beam 42, unidirectional decoupling of detection driving is achieved, influence of detection on driving is avoided, at this time, the second connecting beam 32 rotates along the Z-axis direction by taking the connection point of the first rotating block 321 and the second straight beam 323 as a fulcrum, and meanwhile, four differential electrodes are formed by the four detection electrodes 23, so that the sensitivity of the MEMS single-axis gyroscope is improved.
Example III
As shown in fig. 9, this embodiment is different from the first embodiment in that the first direction is the Y-axis direction, the second direction is the X-axis direction, the third direction is the Z-axis direction, the detection frame 13 and the substrate facing it form a detection electrode 23, and the detection electrode 23 can detect the angular velocity in the X-axis direction. The two gyro units are distributed along the X-axis direction, the two mass blocks 11 of each gyro unit are elastically connected along the Y-axis direction, in a driving state, the two groups of driving electrodes 21 of each gyro unit can respectively drive the two mass blocks 11 to synchronously and reversely reciprocate along the Y-axis direction, and when the angular velocity along the X-axis direction is detected, the detection frame 13 can move along the Z-axis direction along with the decoupling frame 12. That is, the MEMS uniaxial gyroscope of the present embodiment is a structure obtained by rotating the uniaxial gyroscope of the first embodiment for detecting the Y-axis direction by 90 ° clockwise or counterclockwise, and will not be described here again.
Note that the above is only a preferred embodiment of the present invention and the technical principle applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, while the invention has been described in connection with the above embodiments, the invention is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the invention, which is set forth in the following claims.
Claims (10)
1. A MEMS uniaxial gyroscope comprising two gyroscopic elements, each comprising:
the two mass blocks are distributed along a first direction;
the driving electrodes are arranged on one mass block, and can respectively drive the two mass blocks to synchronously and reversely reciprocate along the first direction;
the decoupling frames are elastically connected with one mass block, and can move along with the mass block;
the two detection frames correspond to the two decoupling frames respectively, each detection frame is provided with a detection electrode capable of detecting the angular speed in the second direction, the detection frames can move along the third direction along with the decoupling frames, and the first direction, the second direction and the third direction are perpendicular to each other;
the first connecting beam can stretch along the first direction, and two ends of the first connecting beam are respectively connected with the decoupling frame and the detection frame;
the two ends of the second connecting beam are respectively connected with the two detection frames, and the second connecting beam can rotate along the second direction;
a third connecting beam capable of deforming in a third direction and connected to the mass and the decoupling frame, respectively;
the mass blocks of the two gyro units are connected through a fourth connecting beam, and the fourth connecting beam can rotate along the third direction.
2. The MEMS uniaxial gyroscope of claim 1 wherein the first direction is an X-axis direction, the second direction is a Y-axis direction, the third direction is a Z-axis direction, and the sense frame and a substrate directly opposite thereto form the sense electrode; or the first direction is the Y-axis direction, the second direction is the X-axis direction, the third direction is the Z-axis direction, and the detection frame and the substrate opposite to the detection frame form the detection electrode.
3. The MEMS single-axis gyroscope of claim 2, wherein the third connection beam is a first driving decoupling beam capable of deforming along a Z-axis direction, the first driving decoupling beam includes a first vertical beam and two first cross beams, the first vertical beam extends along the second direction and has two ends respectively connected to the two first cross beams, the first cross beams extends along the first direction, two ends of one of the first cross beams are respectively connected to the mass blocks, and two ends of the other first cross beam are respectively connected to the decoupling frame.
4. The MEMS single-axis gyroscope of claim 2, wherein the gyroscope unit further comprises a first anchor point and a first detection fixed beam capable of deforming along the third direction, the first detection fixed beam comprising a second vertical beam and two second cross beams, the second vertical beam extending along the second direction and having two ends respectively connected to the two second cross beams, the second cross beams extending along the first direction, wherein two ends of one of the second cross beams are respectively connected to the first anchor point, and two ends of the other of the second cross beams are respectively connected to the detection frame.
5. The MEMS uniaxial gyroscope of claim 1 wherein the first direction is an X-axis direction, the second direction is a Z-axis direction, the third direction is a Y-axis direction, the movable portion of the sense electrode is disposed on the sense frame, the third connecting beam is a second driven decoupling beam that is retractable along the Y-axis direction, and the second driven decoupling beam is connected to the mass and the decoupling frame, respectively.
6. The MEMS single-axis gyroscope of claim 5, wherein the gyroscope unit further comprises a second anchor point and a second detection fixed beam, the second detection fixed beam being retractable along the third direction, two ends of the second detection fixed beam being connected to the second anchor point and the detection frame, respectively.
7. The MEMS uniaxial gyroscope of claim 1 further comprising a sense connection beam that is retractable in a direction in which the two gyro units approach or depart from each other, both ends of the sense connection beam being connected to the sense frames of the two gyro units, respectively.
8. The MEMS uniaxial gyroscope of claim 1 wherein the gyroscope unit further comprises a third anchor point and a drive fixed beam, the drive fixed beam being retractable along the first direction, two ends of the drive fixed beam being connected to the third anchor point and the mass respectively.
9. The MEMS single-axis gyroscope of claim 1, wherein the second connection beam comprises a first rotating block, a first straight beam, a second straight beam, and a third straight beam, the gyroscope unit further comprises a fourth anchor, the first straight beam, the second straight beam, and the third straight beam are all coupled to the first rotating block, the first straight beam is coupled to one of the detection frames, the second straight beam is coupled to the fourth anchor, and the third straight beam is coupled to the other of the detection frames.
10. The MEMS single-axis gyroscope of claim 1, wherein the fourth connecting beam includes a second rotating block, a fourth straight beam, a fifth straight beam, and a sixth straight beam, the gyroscope unit further includes a fifth anchor point, the fourth straight beam, the fifth straight beam, and the sixth straight beam each extend along the first direction and are each coupled to the second rotating block, the fourth straight beam is coupled to the mass of one of the gyroscope units, the fifth straight beam is coupled to the fifth anchor point, and the sixth straight beam is coupled to the mass of another of the gyroscope units.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117490673A (en) * | 2024-01-02 | 2024-02-02 | 南京元感微电子有限公司 | Triaxial MEMS gyroscope for inhibiting cross-axis coupling |
| CN117490672A (en) * | 2024-01-02 | 2024-02-02 | 南京元感微电子有限公司 | Integrated triaxial gyroscope |
| CN117739941A (en) * | 2024-02-21 | 2024-03-22 | 苏州亿波达微系统技术有限公司 | Single-axis MEMS gyroscope |
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2023
- 2023-11-13 CN CN202311498622.7A patent/CN117268361A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117490673A (en) * | 2024-01-02 | 2024-02-02 | 南京元感微电子有限公司 | Triaxial MEMS gyroscope for inhibiting cross-axis coupling |
| CN117490672A (en) * | 2024-01-02 | 2024-02-02 | 南京元感微电子有限公司 | Integrated triaxial gyroscope |
| CN117490672B (en) * | 2024-01-02 | 2024-03-01 | 南京元感微电子有限公司 | Integrated triaxial gyroscope |
| CN117490673B (en) * | 2024-01-02 | 2024-03-12 | 南京元感微电子有限公司 | Triaxial MEMS gyroscope for inhibiting cross-axis coupling |
| CN117739941A (en) * | 2024-02-21 | 2024-03-22 | 苏州亿波达微系统技术有限公司 | Single-axis MEMS gyroscope |
| CN117739941B (en) * | 2024-02-21 | 2024-05-14 | 苏州亿波达微系统技术有限公司 | Single-axis MEMS gyroscope |
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