CN115417586A - Glass laser welding method and device - Google Patents

Glass laser welding method and device Download PDF

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Publication number
CN115417586A
CN115417586A CN202211122651.9A CN202211122651A CN115417586A CN 115417586 A CN115417586 A CN 115417586A CN 202211122651 A CN202211122651 A CN 202211122651A CN 115417586 A CN115417586 A CN 115417586A
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laser beam
glass
laser
sample
glass sample
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CN115417586B (en
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荣佑民
黄禹
陈航
吴从义
王雪辉
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00Re-forming shaped glass
    • C03B23/20Uniting glass pieces by fusing without substantial reshaping
    • C03B23/203Uniting glass sheets

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention discloses a glass laser welding method and a device, which comprises the following steps: processing a sample; fixing a sample; the invention can form flat laser heat action area and molten pool shape, so that more melts can enter into the welding gap to join, thereby realizing high-efficiency and high-quality welding of glass.

Description

Glass laser welding method and device
Technical Field
The invention relates to the field of ultrafast laser processing, in particular to a glass laser welding method and a glass laser welding device.
Background
At present, glass is widely used as a packaging material of a bio-implant chip, and an ultrafast laser glass welding technology is applied to a glass packaging and welding process of the bio-implant chip.
However, due to the gaussian distribution and focusing characteristics of the laser beam, energy is deposited at a focus of the laser, then due to a plasma shielding effect, a laser action point gradually develops towards a light source along an optical axis until the energy density of the laser is weakened to be insufficient to excite plasma, the laser action point returns to the focus again, and finally a heat action molten pool area with the focus developing longitudinally at the lower part is formed.
The distribution of the molten pool area causes that most of the molten materials can not enter the welding gap to participate in connection, thereby increasing the difficulty of engineering realization and causing the problem of low welding efficiency.
Disclosure of Invention
The invention mainly aims to provide a glass laser welding method and a glass laser welding device, which can form a flat laser heat action area and a molten pool shape, so that more molten materials can enter a welding gap to participate in connection, and high-quality welding of glass is realized.
In order to realize the purpose, the invention adopts the technical scheme that:
in one aspect, a glass laser welding method is provided, which includes the following steps:
sample treatment:
cleaning the surface of a glass sample to be welded, wherein the glass sample to be welded comprises a first glass sample and a second glass sample;
sample fixation:
stacking a first glass sample and a second glass sample, forming a welding gap between the lower surface of the first glass sample and the upper surface of the second glass sample, and fixing the first glass sample and/or the second glass sample by using a clamp;
shaping a laser beam:
shaping the spatial distribution of the incident laser beam by using a laser beam shaping device so as to compress the energy distribution of the incident laser beam in the propagation direction of the laser beam and expand the energy distribution of the incident laser beam in the direction perpendicular to the propagation direction of the laser beam;
sample processing:
focusing the shaped laser beam below the upper surface of the second glass sample;
and driving the first glass sample and the second glass sample to synchronously move along a preset welding track, or driving the laser beam to move along the preset welding track so as to finish the welding of the glass samples.
Preferably, a welding gap is formed between the lower surface of the first glass sample and the upper surface of the second glass sample.
Preferably, after shaping the spatial distribution of the incident laser beam, one laser form of a planar multifocal, a line spot and a flat top light or a laser beam form formed by combining several laser forms is obtained.
Preferably, the distance between a focus formed by focusing the shaped laser beam below the upper surface of the second glass sample and the upper surface of the second glass sample is less than 200 μm.
Preferably, the laser is an ultrafast laser, the pulse width is less than 12ps, and the repetition frequency is greater than 1kHz.
Preferably, the laser pulse overlap ratio is greater than 80%.
There is also provided a glass laser welding apparatus comprising:
a laser for generating an incident laser beam;
a beam expander for expanding the incident laser beam;
a reflector for reflecting the expanded laser beam;
a laser beam shaping device for shaping the spatial distribution of the reflected laser beam to compress it in the laser
The energy distribution of the beam propagation direction is enlarged, and the energy distribution of the beam in the direction perpendicular to the propagation direction of the laser beam is enlarged.
And a focusing objective lens for focusing the shaped laser beam to form a focal point at a predetermined position.
Preferably, the laser beam shaping device includes a diaphragm or a diffractive optical element.
There is also provided a glass laser welding apparatus comprising:
a laser for generating an incident laser beam;
a beam expander for expanding the incident laser beam;
the spatial light modulator is used for shaping the spatial distribution of the expanded laser beam so as to compress the energy distribution of the laser beam in the laser beam propagation direction through shaping and expand the energy distribution of the laser beam in the direction vertical to the laser beam propagation direction;
the laser beam after being shaped by the spatial light modulator enters the light guide system to complete light path conversion, and the focusing objective lens is used for focusing the laser beam after the light path conversion is completed so as to form a focus at a preset position.
Preferably, the light guide system comprises a 4f system, a first lens and a second lens, wherein the 4f system comprises a first 4f system reflector and a second 4f system reflector; and the first lens, the first 4f system reflector, the second lens and the second 4f system reflector are arranged at intervals in sequence in the propagation direction of the laser beam.
Compared with the prior art, the invention has the following beneficial effects:
according to the invention, the laser beam with Gaussian distribution is shaped, the energy distribution in the laser beam propagation direction is compressed, the energy distribution in the direction perpendicular to the laser beam propagation direction is enlarged, and a compressed and flat laser heat action area and a molten pool shape are formed, so that more melts can enter a welding gap to participate in connection, the length of a welding seam is greatly extended, the welding efficiency is improved, and the sealing property of the welding seam is improved, thereby realizing high-efficiency high-quality welding of glass.
Drawings
FIG. 1 is a flowchart showing the steps of a glass laser welding method in example 1 of the present invention;
FIG. 2 is a schematic view of the installation and fixation of a glass sample;
FIG. 3a is a schematic view of the propagation direction of a laser beam and the direction perpendicular thereto;
FIG. 3b is a schematic illustration of a laser beam being shaped into a planar multifocal and line spot;
FIG. 4 is a schematic view of a heat affected zone and a melt pool formed by a laser beam of the prior art and the present invention;
FIG. 5 is a schematic configuration view of a glass laser welding apparatus in embodiment 2 of the present invention;
FIG. 6 is a schematic view showing the structure of a glass laser welding apparatus in embodiment 3 of the present invention.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.
Example 1:
as shown in fig. 1, the present embodiment provides a glass laser welding method, which is applicable to glass packaging of a bio-implant chip, and specifically includes the following steps:
s1, sample treatment:
the method comprises the following steps of cleaning the surface of a glass sample to be welded by adopting solvents such as water and alcohol, removing obvious dirt such as dust and fingerprints, eliminating the influence of large particles on a welding gap, and avoiding the influence on the transparency and the attractiveness of a welded product, wherein in the embodiment, the glass sample to be welded comprises a first glass sample G1 and a second glass sample G2, and the first glass sample G1 is positioned above the second glass sample G2;
s2, sample fixation:
placing a first glass sample G1 and a second glass sample G2 in a laminated manner, forming a welding gap P1 of 1-30 μm (preferably 10 μm) between the lower surface of the first glass sample G1 and the upper surface of the second glass sample G2, and fixing the first glass sample G1 and/or the second glass sample G2 by using clamps A1 and A2 to prevent the samples from sliding off in the processing process;
meanwhile, the thermal pressure generated when the subsequent laser beam acts on the welding gap P1 can generate thrust on the upper and lower layers of glass, so that the welding gap P1 is increased, and the molten material generated by the action of the laser beam cannot fill the welding gap P1, so that the glass welding fails, and the relative positions of the first glass sample G1 and the second glass sample G2 can be limited through the arrangement of the clamp, so that the molten material is prevented from being pushed away by the thermal pressure, the molten material can be fully filled into the welding gap P1, and the welding quality is ensured;
s3, shaping a laser beam:
as shown in fig. 3a, a laser beam shaping device such as a Spatial Light Modulator (SLM), a Diffractive Optical Element (DOE), or a diaphragm is used to shape the Spatial distribution of the incident laser beam, so as to compress the energy distribution in the laser beam propagation direction 3 and expand the energy distribution in the direction 4 perpendicular to the laser beam propagation direction 3, so as to obtain the laser beam shape in the form of planar multiple focal point, linear spot, flat-top Light, or a combination thereof; in this embodiment, the laser is an ultrafast laser, the pulse width is less than 12ps, the repetition frequency is greater than 1kHz, and the lap joint rate is greater than 80%;
as shown in fig. 3b, which is a schematic diagram illustrating shaping of the laser beam into a multi-focus line spot, since the shape of the laser thermal action area is directly related to the laser energy distribution, shaping of the laser beam into a plane multi-focus line spot is more conducive to expansion of the laser thermal action area along the weld direction, so as to expand the length of the weld pool and enhance the welding effect of the melt;
s4, sample processing:
focusing the shaped laser beam below the upper surface of the second glass sample G2, and enabling the distance between the formed focus 5' and the upper surface of the second glass sample G2 to be less than 200 mu m;
and driving the first glass sample G1 and the second glass sample G2 to synchronously move along a preset welding track through a moving device such as a displacement table or the like, or driving the laser beam to move along the preset welding track so as to finish the welding of the glass samples.
The conventional ultrafast laser glass welding technique performs a welding process using a gaussian beam, as shown in part (a) of fig. 4, to form a heat application region 7 of a longitudinally developed, inverted droplet-shaped structure in the glass, wherein a focus 5 is located at the bottom end of the heat application region 7. Therefore, a molten pool with a limited length can be formed only in a very small part (i.e. the shaded part 6) of the welding gap P1, only a small part of the melt generated in the thermal action region 7 can enter the molten pool to participate in the connection with the glass sample, and other parts of the melt (such as the melt which acts inside the glass sample and is far away from the welding gap P1) can not enter the molten pool to participate in the connection, so that not only can the laser energy be wasted, but also the length of the weld formed in the molten pool is extremely limited, and the high-quality welding of the glass can not be realized.
As shown in part (b) of fig. 4, the technical solution of the present application shapes the gaussian-distributed beam to perform energy homogenization and dispersion on the laser beam along the welding gap P1 direction (i.e., the direction 4 perpendicular to the laser beam propagation direction 3), that is, to compress the energy distribution in the laser beam propagation direction 3 and expand the energy distribution in the direction 4 perpendicular to the laser beam propagation direction 3. After the energy distribution is adjusted, the generated plasma cannot continuously absorb subsequent laser energy and continuously develops longitudinally along the laser beam propagation direction 3, so that the plasma can only move in the area near the focus 5 and continuously absorbs the laser energy to deposit, thereby inhibiting the unfavorable result of longitudinal development of a laser heat action area and forming a compressed and flat heat action area 7'.
Thus, the heat affected zone 7 'can form a long molten pool in most of the welding gap P1 (i.e., the shaded portion 6') into which the melt can enter to participate in the connection of the glass sample, so that the length of the weld is greatly extended, the welding efficiency is improved, and the sealing property of the weld is improved, thereby achieving efficient and high-quality welding of glass.
Example 2:
the present embodiment provides a glass laser welding apparatus for implementing the glass laser welding method according to embodiment 1, as shown in fig. 5, including:
a laser 10 for generating an incident laser beam L;
a beam expander 20 for expanding the incident laser beam L;
a mirror 30 for reflecting the expanded laser beam L;
a laser beam shaping device 40, which is used for shaping the spatial distribution of the reflected laser beam L to compress the energy distribution thereof in the laser beam propagation direction 3 and expand the energy distribution thereof in the direction 4 perpendicular to the laser beam propagation direction 3, so as to obtain the laser beam form in the form of plane multiple focus, line spot, flat top or combination thereof; preferably, the laser beam shaping device 40 includes a diaphragm or a Diffractive Optical Elements (DOE);
and a focus objective lens 50 for focusing the shaped laser beam L to form a focal point at a predetermined position.
Example 3:
the present embodiment provides a glass laser welding apparatus for implementing the glass laser welding method according to embodiment 1, as shown in fig. 6, including:
a laser 100 for generating an incident laser beam L;
a beam expander 200 for expanding the incident laser beam L;
a Spatial Light Modulator (SLM) 300, configured to shape and reflect Spatial distribution of the expanded laser beam L, so as to compress energy distribution of the laser beam in the laser beam propagation direction 3 by shaping and expand energy distribution of the laser beam in a direction 4 perpendicular to the laser beam propagation direction 3, so as to obtain a laser beam form in the form of planar multiple focal points, linear Light spots, flat top Light, or a combination thereof;
and a light guide system and a focusing objective 500, wherein the laser beam L shaped and reflected by the spatial light modulator 300 enters the light guide system to complete the optical path conversion, and the focusing objective 500 is used for focusing the laser beam L with the optical path conversion completed so as to form a focus at a predetermined position.
Specifically, the light guide system includes a 4f system, a first lens 402 and a second lens 403, where the 4f system includes a first 4f system mirror 400 and a second 4f system mirror 401; and the first lens 402, the first 4f system mirror 400, the second lens 403, and the second 4f system mirror 401 are sequentially disposed at intervals in the propagation direction of the laser beam L.
In summary, the present invention shapes the laser beam with gaussian distribution to homogenize and disperse the energy of the laser beam along the direction of the welding seam, compress the energy distribution in the direction of the laser beam propagation, and expand the energy distribution in the direction perpendicular to the direction of the laser beam propagation to form a compressed and flat laser heat action area and a molten pool shape, so that more melts can enter the welding gap to join, the length of the welding seam is greatly extended, and the sealing performance of the welding seam is improved, thereby realizing the high quality welding of glass.
In the present invention, the term "plurality" means two or more unless explicitly defined otherwise. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items. The terms "mounted," "connected," "fixed," and the like are used broadly and should be construed to mean, for example, that the elements are connected, either fixedly, detachably, or integrally, or indirectly through intervening elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
It will be understood that when an element is referred to as being "mounted to," "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.
In the description of the present specification, the description of "one embodiment," "some embodiments," "specific embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (10)

1. A glass laser welding method is characterized by comprising the following steps:
sample treatment:
cleaning the surface of a glass sample to be welded, wherein the glass sample to be welded comprises a first glass sample and a second glass sample;
sample fixation:
the method comprises the following steps of (1) placing a first glass sample and a second glass sample in a stacking mode, forming a welding gap between the lower surface of the first glass sample and the upper surface of the second glass sample, and fixing the first glass sample and/or the second glass sample by using a clamp;
shaping a laser beam:
shaping the spatial distribution of the incident laser beam by using a laser beam shaping device so as to compress the energy distribution of the incident laser beam in the propagation direction of the laser beam and expand the energy distribution of the incident laser beam in the direction perpendicular to the propagation direction of the laser beam;
sample processing:
focusing the shaped laser beam below the upper surface of the second glass sample;
and driving the first glass sample and the second glass sample to synchronously move along a preset welding track, or driving the laser beam to move along the preset welding track so as to finish the welding of the glass samples.
2. The glass laser welding method of claim 1, wherein the lower surface of the first glass sample is welded to the second glass sample
A welding gap is formed between the upper surfaces of the two glass samples.
3. The glass laser welding method of claim 1, wherein the spatial distribution of the incident laser beam is controlled
After shaping, one laser form or a laser beam form formed by combining several laser forms in a plane multi-focus, a line spot and a plane top light is obtained.
4. The glass laser welding method of claim 1, wherein the shaped laser beam is focused on a first side of the laser beam
The distance between the focus formed below the upper surfaces of the two glass samples and the upper surface of the second glass sample is less than 200 μm.
5. The glass laser welding method of claim 1, wherein the laser is an ultrafast laser with a small pulse width
At 12ps, the repetition rate is greater than 1kHz.
6. The glass laser welding method of claim 5, wherein the laser pulse overlap ratio is greater than 80%
A glass laser welding apparatus, comprising:
a laser for generating an incident laser beam;
a beam expander for expanding the incident laser beam;
a reflector for reflecting the expanded laser beam;
a laser beam shaping device for shaping the spatial distribution of the reflected laser beam to compress it in the laser
The energy distribution of the beam propagation direction is enlarged, and the energy distribution of the beam propagation direction is enlarged in the direction perpendicular to the laser beam propagation direction.
7. And a focusing objective lens for focusing the shaped laser beam to form a focal point at a predetermined position.
8. The glass laser welding apparatus of claim 7, wherein the laser beam shaping device comprises an aperture or a diffractive optical element.
9. A glass laser welding apparatus, comprising:
a laser for generating an incident laser beam;
a beam expander for expanding the incident laser beam;
the spatial light modulator is used for shaping the spatial distribution of the expanded laser beam so as to compress the energy distribution of the laser beam in the laser beam propagation direction through shaping and expand the energy distribution of the laser beam in the direction vertical to the laser beam propagation direction;
the laser beam shaped by the spatial light modulator enters the light guide system to complete light path conversion, and the focusing objective lens is used for focusing the laser beam subjected to the light path conversion to form a focus at a preset position.
10. The glass laser welding apparatus of claim 9, wherein the light guiding system comprises a 4f system, a first lens, and a second lens, wherein the 4f system comprises a first 4f system mirror and a second 4f system mirror; and the first lens, the first 4f system reflector, the second lens and the second 4f system reflector are arranged at intervals in sequence in the propagation direction of the laser beam.
CN202211122651.9A 2022-09-15 2022-09-15 Glass laser welding method and device Active CN115417586B (en)

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CN117529126A (en) * 2023-12-20 2024-02-06 珠海博吉光电科技有限公司 Perovskite battery laser welding packaging technology

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