CN111751013B - Aberration measuring method for optical imaging and optical imaging method - Google Patents

Aberration measuring method for optical imaging and optical imaging method Download PDF

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CN111751013B
CN111751013B CN202010645403.7A CN202010645403A CN111751013B CN 111751013 B CN111751013 B CN 111751013B CN 202010645403 A CN202010645403 A CN 202010645403A CN 111751013 B CN111751013 B CN 111751013B
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CN111751013A (en
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安其昌
刘欣悦
张景旭
李洪文
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Abstract

The invention discloses an optical imaging aberration measuring method and an optical imaging method.A used optical imaging system is used for generating a path of reference light and a path of measuring light, emitting the measuring light to a measured sample and acquiring the measuring light reflected by the measured sample, and imaging the measured sample according to the reference light and the interference light of the measuring light returned by the measured sample. The imaging device of the optical imaging system is used for capturing light in the interference light, which belongs to the first waveband range, to realize pre-focus imaging to obtain a first light intensity distribution image, capturing light in the interference light, which belongs to the second waveband range, to realize post-focus imaging to obtain a second light intensity distribution image, and obtaining aberration information of the imaging of the optical imaging system according to the first light intensity distribution image and the second light intensity distribution image, so that corresponding correction can be performed according to imaging aberration, and the imaging precision is improved.

Description

Aberration measuring method for optical imaging and optical imaging method
Technical Field
The invention relates to the technical field of optical interference imaging, in particular to an aberration measurement method of optical imaging. The invention also relates to an optical imaging method.
Background
Optical Coherence Tomography (OCT) is a new three-dimensional Tomography technology, which is based on the principle of low Coherence interference to obtain the depth direction tomographic ability, and can reconstruct two-dimensional or three-dimensional images of biological tissues or internal structures of materials by scanning. Compared with the conventional imaging means, the optical coherence tomography has unique advantages, the imaging effect of the optical coherence tomography is close to pathology, and the optical coherence tomography has the advantages of no wound and no radiation, real-time observation of living bodies, high resolution, deep imaging in tissues, 3D image data acquisition and the like. At present, the OCT technology has been widely used in clinical diagnosis and treatment.
However, in practical application, due to interference of the internal structure of the tested sample, aberration exists, and the imaging effect is influenced.
Disclosure of Invention
In view of the above, an objective of the present invention is to provide an aberration measuring method for optical imaging and an optical imaging method, which can improve the imaging accuracy by measuring the aberration existing in the optical imaging for corresponding correction.
In order to achieve the purpose, the invention provides the following technical scheme:
an optical imaging system is used for generating a path of reference light and a path of measuring light, transmitting the measuring light to a measured sample and acquiring the measuring light reflected by the measured sample, and imaging the measured sample according to interference light generated by interference caused by the convergence of the reference light and the measuring light returned by the measured sample;
the optical imaging system comprises an imaging device, wherein the imaging device is used for capturing light in the interference light, which belongs to a first waveband range, to realize pre-focus imaging to obtain a first light intensity distribution image, and capturing light in the interference light, which belongs to a second waveband range, to realize post-focus imaging to obtain a second light intensity distribution image;
the method comprises the following steps: and obtaining aberration information imaged by the optical imaging system according to the first light intensity distribution image and the second light intensity distribution image.
Preferably, the obtaining aberration information imaged by the optical imaging system according to the first light intensity distribution image and the second light intensity distribution image includes:
is provided with
Figure BDA0002572930430000021
Substituting this equation into the following equation (2) yields the following equation (4):
Figure BDA0002572930430000022
wherein,
Figure BDA0002572930430000023
a first light intensity distribution image is represented,
Figure BDA0002572930430000024
a second light intensity distribution image is represented,
Figure BDA0002572930430000025
representing the position coordinate in the pupil, I0Representing the total light intensity of the input, Δ z representing P1、P2Distance of conjugate position from entrance pupil, P1Representing the image plane in front of the focal point, P2The distance between a pre-focus imaging plane and a focal plane of the imaging device or the distance between a post-focus imaging plane and the focal plane of the imaging device is represented;
Figure BDA0002572930430000026
and solving the formula (4) to obtain the aberration imaged by the optical imaging system.
Preferably, the obtaining aberration information imaged by the optical imaging system according to the first light intensity distribution image and the second light intensity distribution image includes:
and inputting a result of subtracting the first light intensity distribution image and the second light intensity distribution image into a pre-trained preset neural network model, and outputting aberration information imaged by the optical imaging system by the preset neural network model.
Preferably, the light-transmitting hole of the imaging device is divided into a first region and a second region, the imaging device captures light belonging to a first wavelength band range in the interference light through the first region of the light-transmitting hole to implement the in-focus imaging, and captures light belonging to a second wavelength band range in the interference light through the second region of the light-transmitting hole to implement the in-focus imaging.
Preferably, the central wavelength of the first wavelength band range corresponds to an upper limit of a reference light wavelength band range, the central wavelength of the second wavelength band range corresponds to a lower limit of the reference light wavelength band range, and the reference light and the measuring light have the same wavelength band range.
Preferably, the imaging device includes a first filter element for capturing light belonging to a first wavelength band range in the interference light and a second filter element for capturing light belonging to a second wavelength band range in the interference light.
Preferably, the imaging device comprises an optical assembly for converging the interference light to the optoelectronic imaging device, and the first filter element and the second filter element are arranged on one side of the optical assembly close to the optoelectronic imaging device.
An optical imaging method, an applied optical imaging system is used for generating a path of reference light and a path of measuring light, emitting the measuring light to a measured sample and obtaining the measuring light reflected by the measured sample, and imaging the measured sample according to interference light generated by interference of the reference light and the measuring light returned by the measured sample;
the optical imaging system comprises an imaging device and a compensation element, wherein the imaging device is used for capturing light in the interference light, which belongs to a first waveband range, to realize in-focus imaging to obtain a first light intensity distribution image, and capturing light in the interference light, which belongs to a second waveband range, to realize in-focus imaging to obtain a second light intensity distribution image, and the compensation element is used for changing wavefront information of the measuring light;
the method comprises the following steps:
measuring and obtaining aberration information imaged by the optical imaging system by the aberration measuring method of the optical imaging;
and controlling the compensation element to change the wavefront information of the measuring light according to the measured aberration information, so that the aberration of an image containing the structural information of the measured sample obtained according to the interference light is reduced.
Preferably, the compensation element includes a reflection element that is provided on a propagation optical path of the measurement light and guides propagation of the measurement light by reflecting the measurement light, and the reflection element changes wavefront information of the measurement light by changing a surface shape of the reflection surface.
Preferably, the optical imaging system further includes a light source, a coupling device, a reference device and a spectrum measuring device, the light source is configured to emit light, the coupling device is configured to divide the light emitted by the light source into one path as reference light to be input to the reference device and another path as measuring light, and the spectrum measuring device is configured to measure spectrum information of interference light generated by the convergence of the reference light and the measuring light returned by the sample to be measured.
According to the optical imaging aberration measurement method provided by the invention, the applied optical imaging system is used for generating one path of reference light and one path of measurement light, transmitting the measurement light to the measured sample and acquiring the measurement light reflected back by the measured sample, and the measured sample is imaged according to the interference light generated by interference caused by the convergence of the reference light and the measurement light returned by the measured sample. The optical imaging system comprises an imaging device, wherein the imaging device is used for capturing light in the interference light, which belongs to the first waveband range, to realize pre-focus imaging to obtain a first light intensity distribution image, capturing light in the interference light, which belongs to the second waveband range, to realize post-focus imaging to obtain a second light intensity distribution image, and obtaining aberration information imaged by the optical imaging system according to the first light intensity distribution image and the second light intensity distribution image. The aberration measuring method of the optical imaging can measure and obtain the aberration existing in the optical imaging system, so that corresponding correction can be carried out according to the imaging aberration, and the imaging precision can be improved.
The optical imaging method provided by the invention can achieve the beneficial effects.
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In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic diagram of an aberration measurement method for optical imaging according to an embodiment of the present invention;
FIG. 2 is a schematic view of a light-passing aperture of an imaging device of an optical imaging system according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of an imaging device of an optical imaging system according to an embodiment of the invention;
FIG. 4 is a flow chart of a method for optical imaging according to an embodiment of the present invention;
fig. 5 is a schematic diagram of an optical imaging system applied in the embodiment of the present invention.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the drawings in the embodiment of the present invention, and it is obvious that the described embodiment is only a part of the embodiment of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The embodiment of the invention provides an optical imaging aberration measuring method, wherein an applied optical imaging system is used for generating a path of reference light and a path of measuring light, transmitting the measuring light to a measured sample and acquiring the measuring light reflected by the measured sample, and imaging the measured sample according to interference light generated by interference due to the convergence of the reference light and the measuring light returned by the measured sample.
The optical imaging system comprises an imaging device, wherein the imaging device is used for capturing light in the interference light, which belongs to the first waveband range, to realize pre-focus imaging to obtain a first light intensity distribution image, and capturing light in the interference light, which belongs to the second waveband range, to realize post-focus imaging to obtain a second light intensity distribution image.
The aberration measurement method includes: and obtaining aberration information imaged by the optical imaging system according to the first light intensity distribution image and the second light intensity distribution image. The method includes the steps that light which belongs to the first wave band range and light which belongs to the second wave band range in interference light are captured simultaneously through an imaging device, the interference light is imaged before being focused and imaged after being focused simultaneously, corresponding imaging is conducted to form a first light intensity distribution image and a second light intensity distribution image, and then according to the first light intensity distribution image and the second light intensity distribution image, namely the light intensity distribution image of the imaging before being focused and the light intensity distribution image of the imaging after being focused, aberration information can be obtained. Therefore, the aberration measuring method of the optical imaging of the embodiment can measure and obtain the aberration existing in the optical imaging system, so that corresponding correction can be carried out according to the imaging aberration, and the imaging precision can be improved.
The method for measuring the aberration information of the optical imaging system according to the obtained first light intensity distribution image and the second light intensity distribution image specifically comprises the following steps:
is provided with
Figure BDA0002572930430000051
Substituting this equation into the following equation (2) yields the following equation (4):
Figure BDA0002572930430000061
wherein,
Figure BDA0002572930430000062
a first light intensity distribution image is represented,
Figure BDA0002572930430000063
a second light intensity distribution image is represented,
Figure BDA0002572930430000064
representing the position coordinate in the pupil, I0Representing the total light intensity of the input, Δ z representing P1、P2Distance of conjugate position from entrance pupil, P1Representing the image plane in front of the focal point, P2The distance between a pre-focus imaging plane and a focal plane of the imaging device or the distance between a post-focus imaging plane and the focal plane of the imaging device is represented;
Figure BDA0002572930430000065
and solving the formula (4) to obtain the aberration imaged by the optical imaging system.
The aberration of the optical imaging system measured by the method of the embodiment refers to wavefront aberration, wavefront aberration information is obtained by obtaining wavefront curvature, the wavefront curvature is a second derivative of wavefront, and the relationship between the wavefront curvature and optical phase distribution meets the poisson equation. The principle on which the method calculates the wavefront aberration information is based on is that the local curvature change of the wavefront at the pupil can cause the corresponding light intensity distribution of the pre-focus image and the post-focus image to change correspondingly. Referring to fig. 1, fig. 1 is a schematic diagram illustrating a principle of an aberration measurement method of optical imaging according to the present embodiment, and calculates wavefront information according to the following formula (1) according to a transmission equation of a near-field electromagnetic wave:
Figure BDA0002572930430000066
wherein,
Figure BDA0002572930430000067
which represents the light intensity distribution of the light,
Figure BDA0002572930430000068
it is shown that the phase distribution is,
Figure BDA0002572930430000069
represents the position coordinate within the pupil, is a gradient operator, whose calculation results in a slope,. v2The result of the calculation is the curvature for the laplacian operator. It can be seen that the wavefront information obtained by the calculation is related to both the wavefront slope and the wavefront curvature.
For an adaptive optical system, generally, the defocus amount is only a few focal depths, the defocused star point image is very close to the pupil shape, and after subtraction, it can be considered that:
Figure BDA00025729304300000610
thus, equation (1) can be approximated by equation (2):
Figure BDA0002572930430000071
wherein,
Figure BDA0002572930430000072
a first light intensity distribution image is represented,
Figure BDA0002572930430000073
a second light intensity distribution image is represented,
Figure BDA0002572930430000074
representing the position coordinate in the pupil, I0Representing the total light intensity of the input, Δ z representing P1、P2Distance of conjugate position from entrance pupil, P1Representing the image plane in front of the focal point, P2And the distance between the imaging plane before the focus and the focal plane of the imaging device or the distance between the imaging plane after the focus and the focal plane of the imaging device.
Is provided with
Figure BDA0002572930430000075
Substituting this equation into the following equation (2) yields the following equation (4):
Figure BDA0002572930430000076
and solving the Poisson equation of the formula (4) to obtain the wavefront information. In fig. 1F denotes a focal point of the imaging device.
Preferably, the center wavelength of the first wavelength band range may be set to correspond to the upper limit of the reference light (or measurement light) wavelength band range, and the center wavelength of the second wavelength band range may be set to correspond to the lower limit of the reference light (or measurement light) wavelength band range, the reference light and the measurement light having the same wavelength band range. Therefore, the wavelengths of the light in the first waveband range and the light in the second waveband range are different as much as possible, the positions of the imaging focuses of the two parts of light are different, and the pre-focus imaging and the post-focus imaging can be performed simultaneously.
In a specific implementation, the light-transmitting hole of the imaging device may be divided into a first region and a second region, and the imaging device captures light belonging to a first wavelength band range in the interference light through the first region of the light-transmitting hole to implement the pre-focus imaging, and captures light belonging to a second wavelength band range in the interference light through the second region of the light-transmitting hole to implement the post-focus imaging. Referring to fig. 2, fig. 2 is a schematic diagram of a light-passing hole of an imaging device of an optical imaging system according to the present embodiment, the light-passing hole of the imaging device is divided into a first area 100 and a second area 101, and a first band range light and a second band range light in interference light are captured through the first area 100 and the second area 101, respectively.
More specifically, the imaging device includes a first filter element for capturing light in the first wavelength band range of the interference light and a second filter element for capturing light in the second wavelength band range of the interference light. The first filter element allows light belonging to a first wavelength band range of the interference light to pass and blocks light belonging to other wavelength bands to pass, and the second filter element allows light belonging to a second wavelength band range of the interference light to pass and blocks light belonging to other wavelength bands to pass. Specifically, a first filter element may be disposed in a first region of the imaging device light-passing hole, and a second filter element may be disposed in a second region of the imaging device light-passing hole.
Optionally, the imaging device may include an optical assembly for converging the interference light to the optoelectronic imaging device, and the first filter element and the second filter element are disposed on a side of the optical assembly close to the optoelectronic imaging device. Referring to fig. 3 exemplarily, fig. 3 is a schematic diagram of an imaging device of an optical imaging system of this embodiment, and as can be seen from the diagram, the imaging device includes an optical assembly 130, a photoelectric imaging device 133, a first filter element 131 and a second filter element 132, the first filter element 131 and the second filter element 132 are disposed on a side of the optical assembly 130 close to the photoelectric imaging device 133, and after passing through the optical assembly 130, the interference light is converged to the photoelectric imaging device 133 through the first filter element 131 and the second filter element 132, and the interference light is converged to the photoelectric imaging device 133. Alternatively, the optical assembly 130 may be, but is not limited to, a plano-convex lens, and the photoelectric imaging Device 133 may be, but is not limited to, a Charge Coupled Device (CCD).
The aberration measurement method of optical imaging in the embodiment utilizes the characteristic that the same optical imaging system has different focal depths corresponding to different wavelengths, and respectively collects the far-field images of the sample arm with certain defocusing amount on two sides of the focal plane in a single exposure mode. The characteristic that the curvature sensing aperture is small in influence is utilized, complete wavefront distortion information is finally obtained through a synthesis algorithm based on the sub-field detection of the fundus, namely the extended target. And the whole wavefront information is obtained by utilizing the bilateral symmetry of the aberration of the human eyes and through nonlinear fitting of a neural network.
Preferably, in the method of this embodiment, the aberration information of the optical imaging system is obtained according to the first light intensity distribution image and the second light intensity distribution image, a subtraction result of the first light intensity distribution image and the second light intensity distribution image may be input into a pre-trained preset neural network model, and the aberration information imaged by the optical imaging system is output by the preset neural network model. In practical application, aberration information of the optical imaging system can be described by a Zernike polynomial, and accordingly, the output of the preset neural network model can be set as an intrinsic Zernike polynomial coefficient through training. In specific implementation, the first light intensity distribution image and the second light intensity distribution image may be rotated, aligned, subtracted, and the result after subtraction is used as input and the intrinsic zernike polynomial coefficient is used as output to train the neural network model.
Correspondingly, the embodiment of the invention also provides an optical imaging method, wherein an applied optical imaging system is used for generating a path of reference light and a path of measuring light, emitting the measuring light to a measured sample and acquiring the measuring light reflected by the measured sample, and imaging the measured sample according to the interference light generated by the interference generated by the convergence of the reference light and the measuring light returned by the measured sample.
The optical imaging system comprises an imaging device and a compensation element, wherein the imaging device is used for capturing light in the interference light, which belongs to the first waveband range, to realize in-focus imaging to obtain a first light intensity distribution image, and capturing light in the interference light, which belongs to the second waveband range, to realize in-focus imaging to obtain a second light intensity distribution image, and the compensation element is used for changing wavefront information of the measuring light.
Referring to fig. 4, fig. 4 is a flowchart of an optical imaging method according to the present embodiment, where the method includes the following steps:
s20: measuring and obtaining aberration information imaged by the optical imaging system by the aberration measuring method of the optical imaging;
s21: and controlling the compensation element to change the wavefront information of the measuring light according to the measured aberration information, so that the aberration of an image containing the structural information of the measured sample obtained according to the interference light is reduced.
In the optical imaging method of the embodiment, the imaging device captures light belonging to the first waveband range and light belonging to the second waveband range in the interference light simultaneously, the interference light is imaged before focusing and imaged after focusing simultaneously, the interference light is correspondingly imaged into a first light intensity distribution image and a second light intensity distribution image, and then aberration information can be obtained according to the first light intensity distribution image and the second light intensity distribution image, namely the light intensity distribution image imaged before focusing and the light intensity distribution image imaged after focusing. Therefore, the optical imaging method of the embodiment can measure and obtain the aberration existing in the optical imaging system, can correct the aberration of the optical imaging system by changing the wavefront information of the measuring light according to the imaging aberration, reduces the interference, and can improve the imaging precision.
In the optical imaging method of the embodiment, the optical imaging system can adopt a frequency domain optical coherence tomography basic framework to allow the measuring light to penetrate through the measured sample, the measured sample does not interfere with each other after the optical signal is refracted by the depth layer due to the structure difference, and the imaging result including the structure information of the depth layer of the measured sample can be obtained according to the interference result and the spectral information. Illustratively, the measurement light may be a weak infrared laser capable of imaging different levels of subcutaneous tissue.
In a specific implementation, the compensation element may include a reflection element disposed on a propagation path of the measurement light to guide the propagation of the measurement light by reflecting the measurement light, and the reflection element changes wavefront information of the measurement light by changing a surface shape of the reflection surface. Therefore, the aberration of the optical imaging system is corrected by changing the wavefront information of the measuring light, the interference is reduced, and the diffraction limit imaging is realized.
In an implementation manner, please refer to fig. 5, fig. 5 is a schematic diagram of an optical imaging system applied in this embodiment, and it can be seen from the diagram that the optical imaging system further includes a light source 10, a coupling device 11, a reference device 12, and a spectrum measuring device 14, where the light source 10 is configured to emit light, the coupling device 11 is configured to split one path of light emitted by the light source 10 as reference light and input the reference light to the reference device 12, and split the other path of light as measuring light, and the spectrum measuring device 14 is configured to measure spectrum information of interference light where the reference light and the measuring light returned by the measured sample are converged and interfered.
The optical imaging system further comprises a light splitting element 16, wherein the light splitting element 16 is used for transmitting the measuring light output by the coupling device 11 so that the measuring light is incident on the measured sample 18, reflecting the measuring light reflected by the measured sample 18 to the imaging device 13, and transmitting the reference light returned by the reference device 12 to the imaging device 13. Wherein a compensation element 17 is arranged in the propagation path of the measuring light.
Preferably, the light source 10 and the coupling means 11, the coupling means 11 and the reference means 12, the coupling means 11 and the spectral measuring means 14 all transmit light via fiber optic connections. Accordingly, the system further includes a coupler 15 for coupling out light propagating in the optical fiber, and the coupler 15 couples out light propagating in the optical fiber connected to the coupling device 11 to be incident on the light splitting element 16.
The aberration measuring method and the optical imaging method for optical imaging provided by the present invention are described in detail above. The principles and embodiments of the present invention are explained herein using specific examples, which are presented only to assist in understanding the method and its core concepts. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention.

Claims (9)

1. An optical imaging aberration measuring method is characterized in that an applied optical imaging system is used for generating a path of reference light and a path of measuring light, transmitting the measuring light to a measured sample and acquiring the measuring light reflected by the measured sample, and imaging the measured sample according to interference light generated by interference due to the convergence of the reference light and the measuring light returned by the measured sample;
the optical imaging system comprises an imaging device, wherein the imaging device is used for capturing light in the interference light, which belongs to a first waveband range, to realize pre-focus imaging to obtain a first light intensity distribution image, and capturing light in the interference light, which belongs to a second waveband range, to realize post-focus imaging to obtain a second light intensity distribution image;
the method comprises the following steps: obtaining aberration information imaged by the optical imaging system according to the first light intensity distribution image and the second light intensity distribution image;
the imaging device captures light in the interference light, which belongs to a first waveband range, through the first area of the light through hole so as to realize in-focus imaging, and captures light in the interference light, which belongs to a second waveband range, through the second area of the light through hole so as to realize in-focus imaging.
2. The aberration measurement method for optical imaging according to claim 1, wherein obtaining aberration information imaged by the optical imaging system based on the first light intensity distribution image and the second light intensity distribution image comprises:
is provided with
Figure FDA0003108115920000011
Substituting this equation into the following equation (2) yields the following equation (4):
Figure FDA0003108115920000012
wherein,
Figure FDA0003108115920000013
a first light intensity distribution image is represented,
Figure FDA0003108115920000014
a second light intensity distribution image is represented,
Figure FDA0003108115920000015
representing the position coordinate in the pupil, I0Representing the total light intensity of the input, Δ z representing P1、P2Distance of conjugate position from entrance pupil, P1Representing the image plane in front of the focal point, P2The distance between a pre-focus imaging plane and a focal plane of the imaging device or the distance between a post-focus imaging plane and the focal plane of the imaging device is represented;
Figure FDA0003108115920000021
and solving the formula (4) to obtain the aberration imaged by the optical imaging system.
3. The aberration measurement method for optical imaging according to claim 1, wherein obtaining aberration information imaged by the optical imaging system based on the first light intensity distribution image and the second light intensity distribution image comprises:
and inputting a result of subtracting the first light intensity distribution image and the second light intensity distribution image into a pre-trained preset neural network model, and outputting aberration information imaged by the optical imaging system by the preset neural network model.
4. The aberration measuring method according to claim 1, wherein the central wavelength of the first wavelength band corresponds to an upper limit of a reference light wavelength band range, the central wavelength of the second wavelength band corresponds to a lower limit of the reference light wavelength band range, and the reference light and the measuring light have the same wavelength band range.
5. The aberration measuring method according to claim 1, wherein the imaging device includes a first filter element for capturing light belonging to a first wavelength band range in the interference light and a second filter element for capturing light belonging to a second wavelength band range in the interference light.
6. The method of aberration measurement according to claim 5, wherein the imaging apparatus includes an optical assembly for converging the interference light to an optoelectronic imaging device, and the first filter element and the second filter element are disposed on a side of the optical assembly near the optoelectronic imaging device.
7. An optical imaging method is characterized in that an applied optical imaging system is used for generating a path of reference light and a path of measuring light, emitting the measuring light to a measured sample and acquiring the measuring light reflected by the measured sample, and imaging the measured sample according to interference light generated by interference due to the convergence of the reference light and the measuring light returned by the measured sample;
the optical imaging system comprises an imaging device and a compensation element, wherein the imaging device is used for capturing light in the interference light, which belongs to a first waveband range, to realize in-focus imaging to obtain a first light intensity distribution image, and capturing light in the interference light, which belongs to a second waveband range, to realize in-focus imaging to obtain a second light intensity distribution image, and the compensation element is used for changing wavefront information of the measuring light;
the method comprises the following steps:
obtaining aberration information imaged by the optical imaging system by measuring the aberration measuring method of optical imaging according to any one of claims 1 to 6;
and controlling the compensation element to change the wavefront information of the measuring light according to the measured aberration information, so that the aberration of an image containing the structural information of the measured sample obtained according to the interference light is reduced.
8. The optical imaging method according to claim 7, wherein the compensation element includes a reflection element that is provided on a propagation optical path of the measurement light and guides propagation of the measurement light by reflecting the measurement light, the reflection element changing wavefront information of the measurement light by changing a surface shape of the reflection surface.
9. The optical imaging method according to claim 7, wherein the optical imaging system further comprises a light source, a coupling device, a reference device and a spectrum measuring device, the light source is used for emitting light, the coupling device is used for splitting one path of light emitted by the light source into reference light and inputting the reference light into the reference device, and splitting the other path of light into measuring light, and the spectrum measuring device is used for measuring spectrum information of interference light generated by interference of the combination of the reference light and the measuring light returned by the measured sample.
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