CN111007079A - Method for improving defect detection resolution of high-reflection optical element - Google Patents
Method for improving defect detection resolution of high-reflection optical element Download PDFInfo
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- CN111007079A CN111007079A CN201911353154.8A CN201911353154A CN111007079A CN 111007079 A CN111007079 A CN 111007079A CN 201911353154 A CN201911353154 A CN 201911353154A CN 111007079 A CN111007079 A CN 111007079A
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- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9511—Optical elements other than lenses, e.g. mirrors
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Abstract
The invention provides a method for improving the defect detection resolution of a high-reflection optical element, which comprises the following steps: obtaining a reflectivity distribution measuring diagram of the high-reflection optical element by adopting a cavity ring-down technology; the improved deconvolution algorithm is used for carrying out deconvolution on the reflectivity distribution measuring diagram, the influence of the light spot size is eliminated, and the high-resolution real value of the reflectivity distribution of the high-reflection optical element is obtained, so that the defects are detected more accurately. Compared with the traditional optical cavity ring-down optical element defect detection technology, the method adopts a deconvolution method to recover the reflectivity distribution diagram, finally obtains the real value result of the reflectivity distribution of the optical element with higher resolution, and improves the detection precision.
Description
Technical Field
The invention relates to the technical field of optical detection, in particular to a method for improving the defect detection resolution of a high-reflection optical element.
Background
Precision highly reflective optical elements are widely used in various industrial fields. The high-reflection optical element, especially the optical film layer, has various defects in the film layer due to the material and the coating process, the defects are distributed in the film layer in a certain mode and density, and the defects are often the main reasons for causing laser damage of the high-reflection optical element. The rapid development of high-power laser technology has placed very high demands on the two-dimensional distribution of the reflectivity of highly reflective optical elements and their defect detection. Therefore, it is necessary to research the defect detection of the high-reflection optical element and find a method for improving the detection resolution.
At present, the defect detection method of the optical element includes a visual method, a filter imaging method, a spectrum analysis method and the like. The detection result has the problems of low efficiency, poor accuracy and the like. The visual method is that under dark field lighting environment, an observer directly observes the surface of the high-reflection optical element through a magnifying glass and judges the surface, and the method has low detection efficiency and precision and is limited by various factors. The filtering imaging method is similar to visual method in its basic principle, and has the difference that the filtering imaging is to replace human eye with optical sensor, and after being transmitted or reflected by the surface of the tested optical element, the filtering limits the low frequency or high frequency component in the light beam, and the left high frequency or low frequency component is imaged by the optical sensor, and the image is the image of defect in dark background, so as to judge the size and characteristics of the defect. The spectrum analysis method is that scattered light caused by element surface defects passes through a Fourier lens, energy of defect backward diffraction spectrum is obtained through light intensity distribution of a back focal plane, and then defect size and depth conditions are obtained through energy integration processing. The inspection system is composed of an optical section, a motion control section, and a computer and evaluates the surface defect side of the element by the energy of the reverse diffracted light.
Patent application CN109975319 provides a device for detecting surface quality of a planar optical element, in which a detection light beam emitted from a laser light source sequentially passes through a beam splitter, a laser beam expander, and a high-reflection mirror, and then enters a measured element through an integrating sphere to form a scattered light, and the size and angular distribution of the energy of the scattered light are analyzed to obtain the actual condition of a defect. The disadvantage of this method is that the detection system is too complex, the detection speed is slow and the specific location of the defect cannot be determined.
A new inspection method is required to accurately detect defects of the highly reflective optical element, and thus a cavity ring-down technique is introduced. The cavity ring-down (CRD) technique is a high-sensitivity detection technique based on a high-fineness resonant cavity, and determines the reflectivity of a mirror to be measured by measuring the ring-down time of light in the resonant cavity. The method is an absolute measurement method, does not need calibration, has high measurement sensitivity and simple device, is not influenced by the fluctuation of laser output power, and has incomparable advantages and wide application field compared with the traditional measurement method. The reflectivity distribution diagram of the high-reflection optical element is obtained through the cavity ring-down technology, the defect condition of the optical element is determined, and the sensitivity of defect detection is improved. However, the spot size of the probe beam in the conventional cavity ring-down technique is generally larger than the defect size, so that the resolution of defect detection is limited.
Disclosure of Invention
In view of the above, the present invention provides a method for improving the detection resolution of defects in a highly reflective optical element, so as to alleviate the technical problem of low detection resolution in the conventional detection technology.
The embodiment of the invention provides a method for improving the detection resolution of defects of a high-reflection optical element, which comprises the following steps:
obtaining a reflectivity distribution measuring diagram of a high-reflection optical element, wherein the reflectivity distribution measuring diagram is obtained by scanning the high-reflection optical element through an electric displacement table by adopting a cavity ring-down technology;
and carrying out deconvolution on the reflectivity distribution measurement diagram through an improved deconvolution algorithm to obtain a high-resolution real value of the reflectivity distribution of the high-reflection optical element, so that the defects are detected more accurately.
The deconvolution recovery of the reflectivity measurement diagram through an improved deconvolution algorithm to obtain a high-resolution real value result of the reflectivity distribution of the high-reflection optical element comprises the following steps:
obtaining an initial solution of the improved deconvolution algorithm, wherein the initial solution is an initial high-reflection optical element reflectivity value, and the initial solution for the first time is obtained by scanning the high-reflection optical element by adopting a cavity ring-down technology;
after the initial solution is obtained, executing the following iteration steps until a high-resolution real value of the reflectivity distribution of the high-reflection optical element is obtained;
determining an instrument response function through the input light spot parameters, and performing convolution calculation on the instrument response function and an initial solution to obtain a difference value of the initial solution and a convolution result;
correcting the difference value through an introduced relaxation function, and obtaining a new reflectivity value of the high-reflectivity optical element according to the reflectivity value of the high-reflectivity optical element and the corrected difference value;
obtaining a root mean square error through the difference value of the reflectivity value of the high-reflection optical element and the new reflectivity value;
judging whether the root mean square error is a minimum amount, and if the root mean square error is the minimum amount, taking a new reflectivity value of the high-reflection optical element as a real value result of the reflectivity distribution of the high-reflection optical element;
and if the root mean square error is not a small amount, taking the new reflectivity value of the high-reflection optical element as the initial solution, and continuing to execute the iteration steps until a result of the real value of the reflectivity distribution of the high-reflection optical element is obtained.
According to the real value of the reflectivity distribution of the high-reflection optical element obtained by the improved iterative algorithm, the defect condition of the high-reflection optical element can be determined more accurately.
The embodiment of the invention has the following beneficial effects: the embodiment of the invention provides a method for improving the defect detection resolution of a high-reflection optical element, which is applied to terminal equipment and comprises the following steps: obtaining a reflectivity distribution measuring diagram of the high-reflection optical element by adopting a cavity ring-down technology; the improved deconvolution algorithm is used for carrying out deconvolution on the reflectivity distribution measuring diagram, the influence of the light spot size is eliminated, and the high-resolution real value of the reflectivity distribution of the high-reflection optical element is obtained, so that the defects are detected more accurately. Compared with the traditional optical cavity ring-down optical element defect detection technology, the method adopts the deconvolution method to recover the reflectivity distribution diagram, finally obtains the real value result of the reflectivity distribution of the optical element with higher resolution, and improves the detection precision and resolution.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by the practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the embodiments of the present invention, the drawings used in the embodiments will be briefly described below. It is apparent that the drawings in the following description are of one embodiment of the invention, and that other drawings may be derived from those drawings by those skilled in the art.
FIG. 1 is a flowchart of a method for improving defect detection resolution of a high-reflectivity optical element according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a system for measuring reflectivity distribution of a highly reflective optical element using cavity ring-down techniques according to an embodiment of the present invention;
fig. 3 is a flowchart illustrating deconvolution performed on a reflectivity distribution measurement map by using an improved deconvolution algorithm to obtain a defect detection result of a high-reflectivity optical element according to an embodiment of the present invention;
fig. 4 is a flow chart of an improved deconvolution recovery algorithm provided by an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions of the present invention will be described in detail and fully below with reference to the accompanying drawings. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
A method for improving defect detection resolution of a high-reflection optical element is applied to a terminal device, and with reference to FIG. 1, the method comprises the following steps:
s101, obtaining a reflectivity distribution measuring diagram of the high-reflection optical element by adopting a cavity ring-down technology;
the embodiment of the invention aims at a reflectivity distribution measuring diagram of the high-reflection optical element obtained by scanning the electric displacement table by adopting the cavity ring-down technology, and obtains the real reflectivity value of the high-reflection optical element by an improved deconvolution recovery algorithm.
A system setup diagram for a reflectivity profile measurement of highly reflective optical elements using cavity ring-down techniques is shown in fig. 2.
Wherein, the laser generates laser beam, and the wavelength of the laser can be selected according to the requirement of the high-reflection optical element.
The light beam is reflected back and forth between the two cavity mirrors, the coupling mirror and the high-reflection optical element to be measured, wherein the two cavity mirrors are high-reflection mirrors with known reflectivity, and the coupling mirror is used for forming a folding cavity. The light transmitted from the cavity mirror is focused by the focusing lens and then received by the photoelectric detector.
The device comprises an electric displacement table, a detector, a scanning center, a scanning step length, a fitting calculation and a reflectivity distribution measurement diagram of the high-reflection optical element, wherein the element to be measured is loaded on the electric displacement table, the electric displacement table and the detector are respectively connected with terminal equipment (such as a computer) on the basis of axial movement, a user can preset the scanning center and the scanning step length on the computer, then the electric displacement table moves according to an instruction, the detector converts an optical signal into an electric signal, and the reflectivity distribution measurement diagram of the high-reflection optical element is.
S102, carrying out deconvolution restoration on the reflectivity distribution measurement diagram through an improved deconvolution algorithm to obtain a reflectivity true value detection result of the high-reflection optical element.
The deconvolution algorithm recovers the real reflectivity value of the high-reflection optical element by using the acquired reflectivity value, the input spot parameters and the like through an iterative optimization algorithm.
S103, for the detection of the high-reflection optical element, the defect can be calculated by obtaining the real reflectivity value, so that the detection is realized.
When the existing scattering analysis method is used for detecting an optical element, scattered light needs to be collected for analysis, a detection system is complex, and the specific position of a defect cannot be determined. Compared with the traditional optical cavity ring-down optical element defect detection technology, the method adopts a deconvolution method to recover the reflectivity distribution diagram, finally obtains the real value result of the reflectivity distribution of the optical element with higher resolution, and improves the detection precision. The detection method has the advantages of simple system device, no interference from the external environment, high detection precision and capability of relieving the technical problems that the detection system in the prior art is complex and the specific position of the defect cannot be determined.
The above description generally describes a method for improving the defect detection resolution of a highly reflective optical element, and the following detailed description describes the method.
Referring to fig. 3, deconvoluting the measured value of the reflectivity distribution of the highly reflective optical element by using the improved deconvolution algorithm to obtain the detection result of the true value of the reflectivity distribution of the highly reflective optical element includes:
s301, obtaining an initial solution of an improved deconvolution algorithm, wherein the initial solution of the first-time high-reflection optical element is obtained through actual measurement by an optical cavity ring-down technology, and a one-dimensional or two-dimensional reflectivity measurement result of the element to be measured can be obtained through presetting a scanning center and a scanning step length of a displacement table;
the deconvolution algorithm is generally realized based on a Van Cittert iterative algorithm, and a flow chart of the deconvolution algorithm for improving the detection resolution is provided by the invention aiming at the defect detection problem of the high-reflection optical element and is shown in FIG. 4, wherein the flow chart is the process of the nth iteration.
The first initial solution uses the data obtained by the optical element through the cavity ring-down system as the initial solution of the deconvolution algorithm. Wherein R ismRepresenting the detector measurement data.
The initial solution in the subsequent iteration process is an iteration process which is carried out by taking a result obtained after the last iteration is finished as the initial solution.
After obtaining the initial solution, the following iteration steps are executed until obtaining the result of the real value of the reflectivity distribution of the high-reflection optical element:
s302, carrying out convolution calculation through the input light spot function and the initial solution to obtain a difference value of the initial solution and a convolution result;
the basic idea of the iterative algorithm is similar to that of searching a filter, firstly, an initial solution is assumed to be solved, convolution calculation is carried out on the initial solution and an instrument response function, then difference calculation is carried out on the initial solution, and a first small difference is obtained;
s303, correcting the difference value through the introduced relaxation function, and obtaining a new reflectivity value according to the reflectivity measured value of the high-reflectivity optical element and the first small difference value;
in order to improve the unreal peak which grows along with the iterative process, a relaxation function is introduced, the relaxation function is multiplied by a first tiny difference value to correct the difference value, and the difference value is added with the reflectivity value of the high-reflectivity optical element to obtain a new reflectivity value;
s304, obtaining a root mean square error through the difference value of the reflectivity measured value and the new reflectivity value of the high-reflectivity optical element;
calculating the root mean square error of the new reflectivity value and the reflectivity measured value of the high-reflectivity optical element to obtain a second small difference value;
s305, judging whether the root mean square error is a minimum, wherein the judging process is determined according to an iteration trend, if the difference between the current root mean square error and the previous root mean square error is smaller than a certain order of magnitude, the root mean square error is a minimum, and iteration is converged;
s306, if the root mean square error is a minimum amount, taking the new reflectivity value of the high-reflection optical element as the detection result of the high-reflection optical element;
and S307, if the root mean square error is not a small amount, taking the new reflectivity value of the high-reflection optical element as the initial solution, and continuing to execute the iteration steps until the detection result of the high-reflection optical element is obtained.
Compared with the traditional high-reflection optical element defect detection mode, the invention has the following advantages:
1. the detection resolution of the defects of the high-reflection optical element can be improved. By pertinently obtaining the reflectivity measurement diagram of the high-reflection optical element, an improved deconvolution algorithm is provided to perform deconvolution on the reflectivity distribution measurement diagram, the influence of the size of a light spot is eliminated, and a high-resolution real value of the reflectivity distribution of the high-reflection optical element is obtained, so that the defect is more accurately detected;
2. the invention uses the cavity ring-down technology to collect data, has simple system device and is not influenced by the fluctuation of the laser output power.
Finally, it should be noted that: the above-mentioned embodiments are only specific embodiments of the present invention, which are used for illustrating the technical solutions of the present invention and not for limiting the same, and the protection scope of the present invention is not limited thereto, although the present invention is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: those skilled in the art can still make modifications or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some technical features, within the technical scope of the present disclosure; such modifications, changes or substitutions do not depart from the spirit and scope of the embodiments of the present invention, and they should be construed as being included therein. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (3)
1. A method of improving defect detection resolution of a highly reflective optical element, the method comprising:
obtaining a reflectivity distribution measuring diagram of a high-reflection optical element, wherein the reflectivity distribution measuring diagram is obtained by scanning the high-reflection optical element through an electric displacement table by adopting a cavity ring-down technology;
and carrying out deconvolution on the reflectivity distribution measurement diagram through an improved deconvolution algorithm to obtain a high-resolution real value of the reflectivity distribution of the high-reflection optical element, so that the defects are detected more accurately.
2. The method of claim 1, wherein deconvolving the reflectance measurement map by a modified deconvolution algorithm to obtain the high resolution true value of the reflectance distribution of the highly reflective optical element comprises:
obtaining an initial solution of the improved deconvolution algorithm, wherein the initial solution is an initial high-reflection optical element reflectivity value, and the initial solution for the first time is obtained by scanning the high-reflection optical element by adopting a cavity ring-down technology;
after the initial solution is obtained, executing the following iteration steps until a high-resolution real value of the reflectivity distribution of the high-reflection optical element is obtained;
determining an instrument response function through the input light spot parameters, and performing convolution calculation on the instrument response function and an initial solution to obtain a difference value of the initial solution and a convolution result;
correcting the difference value through an introduced relaxation function, and obtaining a new reflectivity value of the high-reflectivity optical element according to the reflectivity value of the high-reflectivity optical element and the corrected difference value;
obtaining a root mean square error through the difference value of the reflectivity value of the high-reflection optical element and the new reflectivity value;
judging whether the root mean square error is a minimum amount, and if the root mean square error is the minimum amount, taking a new reflectivity value of the high-reflection optical element as a real value result of the reflectivity distribution of the high-reflection optical element;
and if the root mean square error is not a small amount, taking the new reflectivity value of the high-reflection optical element as the initial solution, and continuing to execute the iteration steps until a result of the real value of the reflectivity distribution of the high-reflection optical element is obtained.
3. The method of claim 1, wherein the reflectivity profile of the highly reflective optical element is obtained using a cavity ring-down technique.
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