CN110470239B - Laser profile sensor calibration system and method based on intersection point - Google Patents
Laser profile sensor calibration system and method based on intersection point Download PDFInfo
- Publication number
- CN110470239B CN110470239B CN201910724147.8A CN201910724147A CN110470239B CN 110470239 B CN110470239 B CN 110470239B CN 201910724147 A CN201910724147 A CN 201910724147A CN 110470239 B CN110470239 B CN 110470239B
- Authority
- CN
- China
- Prior art keywords
- profile sensor
- laser profile
- calibration
- laser
- dimensional
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention provides a system and a method for calibrating a laser profile sensor based on a cross point, which comprises the following steps: the calibration object is fixed on the two-dimensional workbench and can move along with the two-dimensional workbench, the laser profile sensor is positioned and fixed on the positioning mechanism, the calibration object is provided with two intersected planes, and the intersection line of the two intersected planes is over against the laser profile sensor; the computer is connected with the two-dimensional workbench and the laser profile sensor. The calibration object has two intersected planes, the intersection point of straight lines formed on the two planes by line laser is used as a space point, the laser contour sensor is calibrated by adopting a displacement method, and the calibration object has the outstanding advantages of simplicity, easiness in manufacturing, high calculation precision of space point coordinates, no influence of deformation and the like, and is suitable for contour calibration of any type.
Description
Technical Field
The invention relates to a calibration system and a calibration method in the technical field of measurement, in particular to a laser profile sensor calibration system and a laser profile sensor calibration method based on a cross point.
Background
The contour measurement plays an important role in the industrial manufacturing process, is widely applied to the fields of optical precision engineering, aerospace, robots, chip manufacturing, automobile manufacturing, underwater detection and the like, and becomes an essential link for function realization, equipment data acquisition, part data acquisition, precision analysis, quality detection and the like in more and more industrial application fields.
With higher and higher manufacturing accuracy, non-contact profile measurement is becoming the mainstream trend. Among them, the laser profile sensor based on the line structured light method gradually becomes a hot spot. The method has the outstanding advantages of non-contact, high precision, high speed, wide applicability and the like, and becomes the mainstream trend of contour measurement.
The current laser profile sensor can be divided into two types according to different optical imaging principles: one is a laser profile sensor based on a telecentric light path, which can ensure that the imaging size of a target is basically unchanged in a full-scale range without calibration and positioning, but the lens size is long, which causes large volume of a measuring head, inconvenient use and high cost. The other type is a laser profile sensor based on Sasa type imaging, the extension lines of the spatial positions of the laser, the receiving mirror and the photoelectric device are intersected at a spatial point, transverse focusing can be achieved, the measuring accuracy is high, the measuring head is small in size, strong in practicability and low in cost, and the laser profile sensor becomes a leading mode of development of the laser profile sensor. However, the nonlinearity of this type of laser profile sensor is very severe over the full-scale range, requiring full-scale calibration and nonlinear correction.
The existing laser profile sensor calibration methods can be divided into three types:
(1) a plane method: and adopting a planar chessboard pattern calibration plate and utilizing Zhangyingyou algorithm to calibrate. The method is simple and easy to implement and is widely used. However, the Zhangyingyou algorithm does not consider the optical particularity of the Sasa-type imaging, and the calibration algorithm has large residual error, so the calibration precision is low.
(2) A physical method: and a real object standard part with known size is adopted for calibration, so that the deviation of the contour algorithm can be directly calibrated. However, the number of contour feature points of the real object standard part is limited, the processing difficulty is high, and the whole measuring area cannot be covered.
(3) Displacement method: a calibration object with a specific shape is manufactured, the whole measuring area range is covered by displacement, and the displacement of the calibration object is measured by a high-precision displacement sensor. The method is simple and easy to implement, high in precision and wide in range, and has the greatest development prospect. However, the existing displacement calibration method adopts a spherical calibration object, and utilizes the sphere center as a space point for calibration, but the manufacturing difficulty of the spherical profile is large, the manufacturing error is directly introduced into the calibration process, and the calibration error is also directly generated by the measurement error of the circle center at different positions, thereby reducing the measurement accuracy of the laser profile sensor.
Disclosure of Invention
Aiming at the problems of low precision, poor efficiency, difficult manufacture of a real object calibration object and the like of the existing laser contour sensor calibration method, the invention provides a system and a method for calibrating a laser contour sensor based on a cross point.
According to a first aspect of the present invention, there is provided a cross-point based laser profile sensor calibration system, comprising: the calibration object is fixed on the two-dimensional workbench and can move along with the two-dimensional workbench, the laser profile sensor is positioned and fixed on the positioning mechanism, the calibration object is provided with two intersected planes, and the intersection line of the two intersected planes is over against the laser profile sensor; the computer is connected with the two-dimensional workbench and the laser profile sensor; wherein:
the two-dimensional workbench is controlled by the computer to realize translation in two orthogonal directions, and has output of displacement as a displacement reference;
line laser emitted by the laser profile sensor is projected to the left surface and the right surface of the calibration object, and two intersected linear stripes are respectively generated on two intersected planes of the calibration object, so that a space intersection point is generated;
the computer controls the two-dimensional working movement and drives the calibration object to move, so that the space intersection point moves in the whole measurement area of the laser profile sensor, meanwhile, the movement displacement from the two-dimensional worktable is obtained as a reference value, and in addition, the space point coordinate value from the laser profile sensor is obtained, so that the full-range calibration and calibration of the laser profile sensor are realized.
Preferably, the calibration object is made of a material having diffuse reflection characteristics.
Preferably, the included angle of two intersecting planes of the calibration object facing the laser profile sensor is between 30 ° and 150 °.
Preferably, the included angle of two intersecting planes of the calibration object facing the laser profile sensor is between 90 and 120 degrees.
Preferably, the two-dimensional workbench is a two-dimensional guide rail system with a built-in precise grating sensor, wherein the measurement precision of the precise grating is 3-5 times higher than the required calibration precision.
Preferably, the positioning mechanism is internally provided with a precise two-dimensional adjusting mechanism, so that a plane where the line laser emitted by the laser profile sensor is located is parallel to a moving plane of the two-dimensional workbench, and simultaneously, the line laser central line direction of the laser profile sensor is parallel to the longitudinal moving direction of the two-dimensional workbench.
According to a second aspect of the present invention, there is provided a laser profile sensor calibration method, including:
s1, fixing the calibration object on the two-dimensional workbench, acquiring the profile image of the calibration object by the laser profile sensor, synchronously reading the displacement values of the two dimensions of the two-dimensional workbench, and sending the displacement values into the computer for processing;
s2, acquiring data points of two straight contour lines of the calibration object;
s3, removing data points near the intersection point of the two straight line contour lines;
s4, performing least square straight line fitting on the straight line profiles at the left end and the right end by using the remaining profile data points after the processing of S3 to obtain corresponding fitted straight line equations;
s5, directly calculating the two-dimensional coordinate value of the intersection point of the two straight line contour lines by using the two fitted straight line equations obtained in the S4;
s6, subtracting the coordinate values of the intersection point of the two straight line contour lines obtained in the step S5 from the displacement value of the two-dimensional workbench to obtain a calibration deviation value;
and S7, sending the deviation value of S6 to the laser profile sensor and storing the deviation value as a calibration basis in actual profile measurement.
Preferably, in S2, a single-pixel-level edge extraction algorithm is used to obtain data points of two straight-line contour lines of the calibration object.
Preferably, in S3, the culling amount is not more than 10% of the total number of data points of the segment of the straight line profile.
Compared with the prior art, the invention has the following beneficial effects:
the laser profile sensor calibration system and method provided by the invention adopt the calibration object with two intersecting planes, so that a space point can be formed, the displacement method calibration of the whole measurement area of the laser profile sensor is realized, the calibration range is 100% covered, the interval of the calibration point is adjustable, and the laser profile sensor calibration system and method have the maximum adaptability and flexibility.
The calibration space point adopted by the laser profile sensor calibration system and method is obtained by two crossed straight line profiles through a fitting technology, the influence of lens distortion can be effectively overcome, the laser profile sensor calibration system and method have left and right fitting accuracy, and further the optimal calibration accuracy can be obtained.
The calibration object adopted by the laser profile sensor calibration system and method is simple and easy to implement, low in manufacturing cost, free of strict precision constraint, low in operation cost, good in universality and applicable to calibration of any laser profile sensor.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic diagram of a laser profile sensor calibration system according to an embodiment of the present invention;
FIG. 2 is a schematic view of a type of calibration object according to an embodiment of the present invention;
FIG. 3 is a calibration object image obtained by a laser profile sensor in accordance with an embodiment of the present invention;
FIG. 4 is a profile line extracted by the laser profile sensor of one embodiment of the present invention;
FIG. 5 is a schematic diagram of contour fitting lines and intersections according to one embodiment of the present invention;
in the figure, 1-a calibration object, 2-a two-dimensional workbench, 3-a laser profile sensor, 4-a positioning mechanism and 5-a computer.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications can be made by persons skilled in the art without departing from the spirit of the invention. All falling within the scope of the present invention.
Referring to fig. 1, which is a schematic composition diagram of a laser profile sensor calibration system according to an embodiment of the present invention, the laser profile sensor calibration system includes a calibration object 1, a two-dimensional table 2, a laser profile sensor 3, a positioning mechanism 4, and a computer 5, wherein: the calibration object 1 is fixed on the two-dimensional workbench and can move along with the two-dimensional workbench 1, the laser profile sensor 3 is positioned on the positioning mechanism 4 and is fixed, the calibration object 1 is provided with two intersected planes, and the intersection line of the two intersected planes is over against the laser profile sensor 3; the computer 5 is connected with the two-dimensional workbench 2 and the output end of the laser profile sensor 3; the two-dimensional workbench 2 can realize translation in two orthogonal directions under the control of the computer 5, and has output of displacement amount which can be used as a displacement reference; the laser contour sensor 3 is arranged on a positioning mechanism 4 at one side and is reliably fixed, line laser emitted by the laser contour sensor 3 is projected to the surface of the calibration object 1, and two crossed linear stripes and a space intersection point are respectively generated on two planes of the calibration object 1; the computer 5 is connected with the two-dimensional workbench 2 and the laser profile sensor 4, on one hand, the two-dimensional workbench 2 is controlled to move and the calibration object 1 is driven to move, so that the space intersection point moves in the whole measuring area of the laser profile sensor 4, on the other hand, the movement displacement from the two-dimensional workbench 2 is obtained to be used as a reference value, in addition, the space point coordinate value from the laser profile sensor 4 is obtained, and further, the calibration and calibration of the full range of the laser profile sensor 4 are realized.
In a preferred embodiment, the calibration object 1 is made of a material with diffuse reflection characteristics, so as to ensure the highest calibration precision; for example, it can be made of white ceramic material or high-stability white organic glass. The calibration object 1 can be made in various regular shapes, such as triangle, rectangle, polygon, but it is desirable that the included angle between two intersecting planes facing the laser profile sensor 4 is between 30 ° and 150 °, preferably between 90 ° and 120 °, i.e. a quadrangle, a pentagon, a hexagon, as shown in fig. 2.
In the preferred embodiment, the two-dimensional worktable 2 is made of a two-dimensional guide rail system with a built-in precise grating sensor, and the measurement precision of the precise grating is preferably 3-5 times higher than the required calibration precision. For example, if the measurement accuracy of the laser profile sensor is required to be ± 0.01mm, the measurement accuracy of the precise grating sensor built in the two-dimensional table 2 should preferably be not lower than ± 0.01 mm. The two-dimensional table 2 can be implemented using known techniques.
In the above embodiment, the positioning mechanism 4 is used for positioning and fixing the laser profile sensor 3, so as to ensure that the plane where the line laser emitted by the laser profile sensor 3 is located is parallel to the moving plane of the two-dimensional worktable 2, and simultaneously ensure that the line laser center line direction of the laser profile sensor 4 is parallel to the longitudinal moving direction of the two-dimensional worktable 2. In the preferred embodiment, the positioning mechanism 4 is provided with a precise adjusting mechanism inside, so that the plane of the line laser emitted by the laser profile sensor 4 is ensured to be parallel to the moving plane of the two-dimensional worktable 2, and the central line direction of the line laser of the laser profile sensor 4 is ensured to be parallel to the longitudinal moving direction (the z-axis direction in fig. 1) of the two-dimensional worktable 2. The positioning means 4 can be realized with the prior art.
Based on the structure of the system, the embodiment of the invention also provides a calibration method based on the laser profile sensor calibration system.
In a preferred embodiment, the laser profile sensor calibration method specifically comprises the following steps:
(1) fixing the calibration object 1 on the two-dimensional workbench 2, acquiring a profile image of the calibration object 1 by the laser profile sensor 3, synchronously reading displacement values Mx and My of two dimensions of the two-dimensional workbench 2 as shown in FIG. 3, and sending the displacement values Mx and My into the computer 5 for processing;
(2) acquiring data points of two straight line contour lines by adopting a single-pixel-level edge extraction algorithm; as shown in fig. 4, the data points of the left straight line contour are L0, L1, L2, …, and L12, respectively, and the data points of the right straight line contour are R0, R1, R2, …, and R10, respectively;
(3) data points near the intersection point of the two straight line contour lines are removed, the removal amount is preferably not more than 10% of the total data points, and the influence of the contour of the transition section on the straight line fitting precision is reduced; assuming that the number of data points of the left and right straight line profiles is 12 and 10 respectively in the previous example, 1 data point (i.e., L0 and R0) can be removed, so that the data points retained by the left and right straight lines are L1, L2, …, L12, R1, R2, …, and R10 respectively;
(4) respectively carrying out least square line fitting on the left and right linear profiles by using the residual profile data points to obtain corresponding fitted linear equations; for the previous example, fitting with the remaining L1, …, L12 and R1, …, R10 respectively, to obtain two left and right fitted linear equations, which are: y ═ ax + b and y ═ cx + d, as shown in fig. 5;
(5) calculating the coordinates of the intersection points of the left fitted straight line and the right fitted straight line by using the obtained fitted straight lines; for the previous example, the intersection coordinates are: x0 ═ d-b)/(a-c), y0 ═ ad-bc)/(a-c);
(6) respectively subtracting the calculated coordinate values (x0, y0) of the intersection point from the displacement values (Mx, My) of the two-dimensional workbench to obtain calibration deviation values; namely: Δ x-x 0-Mx, Δ y-y 0-My;
(7) the deviation values Δ x and Δ y are sent to the laser profile sensor 4 and stored, which can be used as a calibration basis in actual profile measurement.
According to the laser profile sensor calibration system and method provided by the embodiment of the invention, the calibration object with two intersecting planes is adopted, so that a space point can be formed, the displacement method calibration of the whole measurement area of the laser profile sensor is realized, the calibration range is 100% covered, the interval of the calibration point is adjustable, and the maximum adaptability and flexibility are realized; the two crossed linear profiles can effectively overcome the influence of lens distortion through a fitting technology, have left and right fitting precision, further obtain the optimal calibration precision, and can be suitable for the calibration of any laser profile sensor.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes and modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention.
Claims (8)
1. A laser profile sensor calibration system based on intersection points is characterized by comprising: the calibration object is fixed on the two-dimensional workbench and can move along with the two-dimensional workbench, the laser profile sensor is positioned and fixed on the positioning mechanism, the calibration object is provided with two intersected planes, and the intersection line of the two intersected planes is over against the laser profile sensor; the computer is connected with the two-dimensional workbench and the laser profile sensor; wherein:
the two-dimensional workbench is controlled by the computer to realize translation in two orthogonal directions, and has output of displacement as a displacement reference;
line laser emitted by the laser profile sensor is projected to the left surface and the right surface of the calibration object, and two intersected linear stripes are respectively generated on two intersected planes of the calibration object, so that a space intersection point is generated;
the computer controls the two-dimensional working movement and drives the calibration object to move, so that the space intersection point moves in the whole measurement area of the laser profile sensor, meanwhile, the movement displacement from the two-dimensional worktable is obtained as a reference value, and in addition, the space point coordinate value from the laser profile sensor is obtained, so that the full-range calibration and calibration of the laser profile sensor are realized.
2. The system for calibrating a laser profile sensor based on a cross point according to claim 1, wherein the calibration object is made of a material having diffuse reflection characteristics.
3. The system for calibrating a laser profile sensor based on a cross point according to claim 1, wherein the included angle between two intersecting planes of the calibration object facing the laser profile sensor is between 30 ° and 150 °.
4. The system for calibrating the laser profile sensor based on the intersection point as claimed in claim 1, wherein the two-dimensional worktable is a two-dimensional guide rail system with a built-in precise grating sensor, and the measurement precision of the precise grating is 3-5 times higher than the required calibration precision.
5. The system for calibrating a laser profile sensor based on a cross point according to any one of claims 1 to 4, wherein a precise two-dimensional adjusting mechanism is arranged in the positioning mechanism, so that a plane of a line laser emitted by the laser profile sensor is parallel to a moving plane of the two-dimensional worktable, and simultaneously, a line laser center line direction of the laser profile sensor is parallel to a longitudinal moving direction of the two-dimensional worktable.
6. A laser profile sensor calibration method using the cross-point based laser profile sensor calibration system according to any one of claims 1 to 5, comprising:
s1, fixing the calibration object on the two-dimensional workbench, acquiring the profile image of the calibration object by the laser profile sensor, synchronously reading the displacement values of the two dimensions of the two-dimensional workbench, and sending the displacement values into the computer for processing;
s2, acquiring data points of two straight contour lines of the calibration object;
s3, removing data points near the intersection point of the two straight line contour lines;
s4, performing least square line fitting on the left and right linear profiles respectively by using the remaining profile data points after the processing of S3 to obtain corresponding fitted linear equations;
s5, directly calculating the two-dimensional coordinate value of the intersection point of the two straight line contour lines by using the two fitted straight line equations obtained in the S4;
s6, subtracting the coordinate values of the intersection point of the two straight line contour lines obtained in the step S5 from the displacement value of the two-dimensional workbench to obtain a calibration deviation value;
and S7, sending the deviation value of S6 to the laser profile sensor and storing the deviation value as a calibration basis in actual profile measurement.
7. The method for calibrating a laser contour sensor according to claim 6, wherein in S2, a single-pixel edge extraction algorithm is used to obtain data points of left and right two straight line contour lines of the calibration object.
8. The method for calibrating a laser profile sensor according to claim 6, wherein in S3, the elimination amount is not more than 10% of the total data points of the linear profile.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910724147.8A CN110470239B (en) | 2019-08-07 | 2019-08-07 | Laser profile sensor calibration system and method based on intersection point |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910724147.8A CN110470239B (en) | 2019-08-07 | 2019-08-07 | Laser profile sensor calibration system and method based on intersection point |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110470239A CN110470239A (en) | 2019-11-19 |
| CN110470239B true CN110470239B (en) | 2021-05-18 |
Family
ID=68510387
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910724147.8A Active CN110470239B (en) | 2019-08-07 | 2019-08-07 | Laser profile sensor calibration system and method based on intersection point |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110470239B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112710994A (en) * | 2020-12-14 | 2021-04-27 | 上海交通大学烟台信息技术研究院 | Intersection-based calibrating device and method for Schum imaging system |
| CN114083536B (en) * | 2021-11-24 | 2023-09-08 | 易思维（杭州）科技有限公司 | Method for recovering hand-eye relationship of single-line structure light sensor by utilizing three-dimensional block |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2190487B (en) * | 1986-05-12 | 1989-12-13 | Gen Electric Plc | Profilometers |
| US8755053B2 (en) * | 2005-10-14 | 2014-06-17 | Applied Research Associates Nz Limited | Method of monitoring a surface feature and apparatus therefor |
| CN101334270B (en) * | 2008-07-25 | 2010-06-23 | 西安交通大学 | Laser line scanning feeler geometric transformation calibration and curved face interpolation correcting method and apparatus |
| CN206696898U (en) * | 2017-05-11 | 2017-12-01 | 四川大学 | three-dimensional reconstruction system |
| CN108180829B (en) * | 2017-12-28 | 2019-09-20 | 中国科学院西安光学精密机械研究所 | Method for measuring target space orientation with parallel line characteristics |
| CN108662987B (en) * | 2018-04-23 | 2021-06-08 | 西南交通大学 | Calibration method of 2D camera type laser measuring head |
| CN108844489A (en) * | 2018-06-25 | 2018-11-20 | 苏州乐佰图信息技术有限公司 | Using the method and camera calibration method of line laser structured light contour of object |
-
2019
- 2019-08-07 CN CN201910724147.8A patent/CN110470239B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN110470239A (en) | 2019-11-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107014312B (en) | A kind of integral calibrating method of mirror-vibrating line laser structured light three-dimension measuring system | |
| CN108198224B (en) | Linear array camera calibration device and calibration method for stereoscopic vision measurement | |
| CN101526336A (en) | Calibration method of linear structured light three-dimensional visual sensor based on measuring blocks | |
| Li et al. | Large depth-of-view portable three-dimensional laser scanner and its segmental calibration for robot vision | |
| CN111707189B (en) | Laser displacement sensor light beam direction calibration method based on binocular vision | |
| JPH1183438A (en) | Position calibration method for optical measuring device | |
| CN1354355A (en) | Laser linear scanning three-dimensional measurement double liquid knife virtual grid mapping calibrating method and equipment | |
| CN108709499A (en) | A kind of structured light vision sensor and its quick calibrating method | |
| CN105258710A (en) | High-precision camera principal point calibration method | |
| CN110470239B (en) | Laser profile sensor calibration system and method based on intersection point | |
| CN111256587A (en) | High-reflectivity surface three-dimensional measurement method based on double-line structured light scanning | |
| CN107726980B (en) | Calibration method of linear laser displacement sensor based on four-axis measuring machine | |
| CN102538707B (en) | Three dimensional localization device and method for workpiece | |
| CN110793439A (en) | Standard device for unifying coordinates of multi-sensor measuring machine and coordinate unifying method | |
| CN111028298B (en) | Convergent binocular system for rigid coordinate system space transformation calibration | |
| CN112710994A (en) | Intersection-based calibrating device and method for Schum imaging system | |
| JP4049272B2 (en) | Reference member for inspection master of optical 3D measuring machine | |
| JP6179366B2 (en) | Standard gauge, three-dimensional measuring apparatus, and calibration method for three-dimensional measuring apparatus | |
| CN109425292B (en) | Three-dimensional measurement system calibration device and method based on one-dimensional line structured light | |
| CN107036791B (en) | Device and method for measuring focal length, back intercept and discrimination of different coaxial optical system | |
| CN112945102B (en) | Precision platform precision metering and compensating method based on glass cutting technology | |
| CN110567391B (en) | Computer image measuring system and measuring method | |
| CN102192705B (en) | Non-contact type compound scanning measuring system | |
| KR101833055B1 (en) | 3-dimensional measuring system | |
| JP4494189B2 (en) | Accuracy measurement method and calibration method of non-contact image measuring machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |