CN109831866A - A kind of double rings electrode coplanar discharge plasma producing apparatus - Google Patents
A kind of double rings electrode coplanar discharge plasma producing apparatus Download PDFInfo
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- CN109831866A CN109831866A CN201711180889.6A CN201711180889A CN109831866A CN 109831866 A CN109831866 A CN 109831866A CN 201711180889 A CN201711180889 A CN 201711180889A CN 109831866 A CN109831866 A CN 109831866A
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Abstract
The invention belongs to lower temperature plasma technology fields, and in particular to a kind of double rings electrode coplanar discharge plasma producing apparatus.The present apparatus is formed by power supply and the Crossed Circle electrode unit close-packed arrays being imbedded in dielectric layer；The Crossed Circle electrode unit includes inner rings of electrode and outer ring electrode, inner rings of electrode and outer ring electrode are imbedded in certain depth in dielectric layer, inner rings of electrode ground connection, high frequency, the high-voltage electrode of outer ring electrode connection high voltage power supply, it can produce large area homogeneous plasma after multiple Crossed Circle electrode unit combinations, dielectric layer surface between the inner rings of electrode and outer ring electrode, generates coplanar discharge plasma under action of high voltage, and plasma is evenly distributed.
Description
Technical field
The invention belongs to lower temperature plasma technology fields, and in particular to a kind of double rings electrode coplanar discharge plasma hair
Generating apparatus.
Background technique
Lower temperature plasma technology is modified on the surface of the material, film deposition, plasma source and plasma etching etc.
Aspect is widely used.In actual application, a kind of large area, uniform, efficient plasma generator generally need.
Dielectric barrier discharge is a kind of a kind of discharge type that dielectric layer is added between discharge electrode.Due to depositing for medium
Keep electric discharge more stable, and it is excessive and form the danger of electric arc to avoid electric current.Dielectric barrier discharge is atmosphere pressure discharging
Important method.Coplanar discharge is a kind of important form of dielectric barrier discharge, other two kinds of shapes relative to dielectric barrier discharge
Formula: electrode can be placed in side by body electric discharge, creeping discharge and coplanar discharge, coplanar discharge, be realized in plasma generator
The purpose of side generation plasma.This makes coplanar discharge have greater advantage in practical applications: due to electric in coplanar discharge
Pole is placed in ipsilateral and buries among medium, and plasma results from dielectric surface and has certain thickness, and this structure can be with
Material surface modifying, film deposition are carried out to the biggish device surface of thickness, simultaneously because electrode increases peace in the same side
Quan Xing.
In the coplanar discharge device being commonly designed, structure is alternatively arranged using linear electrode positive and negative electrode, it may be assumed that use straight line
Electrode is that bury electrode in dielectric layer be " linear electrode " arrangement, adjacent electrode be coupled with high voltage power supply high-voltage end and
Ground terminal, positive and negative electrode are alternatively arranged.Due to the variation of physical characteristic after the error and generation electric discharge of accuracy of electrode processing, directly
After the gas discharge that line electrode positive and negative electrode is alternatively arranged constructional device generates, region of discharge is easily generated and is formed in some regions
Current channel enhancing, this, which results in plasma, may only result from the side of " linear electrode ", rather than in entire coplanar Jie
Region generates between any two " linear electrode " in the side space of matter discharge-blocking device, and such coplanar dielectric impedance is put
The plasma that electric installation generates has apparent inhomogeneities.In addition, linear electrode array is not easy to array, it is difficult to realize big
Electrod-array in area coplanar discharge plasma source and non-planar coplanar discharge structure.
Summary of the invention
The purpose of the present invention is in view of the foregoing defects the prior art has, provide a kind of double rings electrode coplanar discharge etc. from
Daughter generating device.
Technical scheme is as follows:
A kind of double rings electrode coplanar discharge plasma producing apparatus, by power supply and the Crossed Circle being imbedded in dielectric layer electricity
Pole unit close-packed arrays form；The Crossed Circle electrode unit includes inner rings of electrode and outer ring electrode, and inner rings of electrode and outer ring are electric
It is extremely imbedded in certain depth in dielectric layer, inner rings of electrode ground connection, outer ring electrode connects the high frequency of high voltage power supply, high voltage electricity
Pole can produce large area homogeneous plasma after multiple Crossed Circle electrode unit combinations, in the inner rings of electrode and outer ring
Dielectric layer surface between electrode, generates coplanar discharge plasma under action of high voltage, and plasma is evenly distributed.
A kind of double rings electrode coplanar discharge plasma producing apparatus, the material of the Crossed Circle electricity body unit be graphite,
Metal or alloy.
The interval of a kind of double rings electrode coplanar discharge plasma producing apparatus, the Crossed Circle electrode unit is smaller, and one
As for less than 3mm.
A kind of double rings electrode coplanar discharge plasma producing apparatus, the shape of the Crossed Circle electrode unit are triangle
Shape, quadrangle, pentagon, hexagon, decagon, dodecagon or combinations thereof.
The thickness of a kind of double rings electrode coplanar discharge plasma producing apparatus, the inner rings of electrode and outer ring electrode is less than
2mm,
The width of a kind of double rings electrode coplanar discharge plasma producing apparatus, the inner rings of electrode and outer ring electrode is less than
2mm。
A kind of double rings electrode coplanar discharge plasma producing apparatus, the inner rings of electrode and outer ring electrode spacing are less than
10mm, close-packed arrays form large area coplanar discharge plasma producing apparatus in plane or spherical surface.
The beneficial effects of the present invention are:
A kind of double rings electrode coplanar discharge plasma producing apparatus of the invention, by multiple rings being imbedded in dielectric layer
Shape electrode unit close-packed arrays form；One annular electrode unit is by certain thickness, inside and outside two triangles, quadrangle, five sides
The annular electrode of shape, hexagon, decagon, dodecagon or combinations thereof is constituted.Under use state, the double rings electrode unit
Inside and outside two ring electrode is grounded and connects respectively high frequency, high voltage, and all double rings electrodes are all imbedded in certain depth under dielectric layer.
Under energized state, between the double rings electrode, coplanar discharge plasma, plasma point are generated under action of high voltage
Cloth is uniform.It can produce large area homogeneous plasma after multiple double rings electrode unit combinations.
This technology realizes large area coplanar discharge with the double rings electrode for the polygonal shape for being connected to two poles
Electrod-array in plasma source and non-planar coplanar discharge structure, solve in the prior art using " linear electrode " just,
In the spaced coplanar discharge device of cathode, the plasma that device generates, which has apparent inhomogeneities and is not easy array, is asked
Topic.A kind of double rings electrode coplanar discharge plasma producing apparatus of the present invention can be used for sending out for coplanar discharge plasma
Generating apparatus can generate homogeneous plasma between any two " double rings electrode " under low pressure, hyperbar or atmospheric pressure,
It can be used for the fields such as material surface modifying.
Detailed description of the invention
Fig. 1 be a kind of double rings electrode coplanar discharge plasma producing apparatus of the invention an annular electrode unit and
The structural schematic diagram of tie-portion；
Fig. 2 is a kind of multiple annular electrode unit battle arrays of double rings electrode coplanar discharge plasma producing apparatus of the invention
List intention；
Fig. 3 is a kind of multiple double rings electrode unit battle arrays of double rings electrode coplanar discharge plasma producing apparatus of the invention
Column schematic top plan view；
Fig. 4 is that an a kind of double rings electrode of double rings electrode coplanar discharge plasma producing apparatus of the invention is illustrated
Figure；
Fig. 5 is that a kind of double rings electrode vertical view of double rings electrode coplanar discharge plasma producing apparatus of the invention is shown
It is intended to；
In figure: 1 is inner rings of electrode, and 2 be outer ring electrode, and 3 be the width of inner rings of electrode, and 4 be inner rings of electrode and outer ring electrode
Spacing.
Specific embodiment
The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
As shown, a kind of double rings electrode coplanar discharge plasma producing apparatus of the invention is by power supply and is imbedded in Jie
Crossed Circle electrode unit close-packed arrays in matter layer form；The Crossed Circle electrode unit includes inner rings of electrode 1 and outer ring electrode
2, inner rings of electrode 1 and outer ring electrode 2 are imbedded in certain depth in dielectric layer.Under use state, the double rings electrode unit
Inner rings of electrode 1 is grounded, and outer ring electrode 2 connects high frequency, the high-voltage electrode of high voltage power supply.
Under energized state, dielectric layer surface between the inner rings of electrode 1 and outer ring electrode 2, in action of high voltage
Lower generation coplanar discharge plasma, plasma are evenly distributed.
It can produce large area homogeneous plasma after multiple Crossed Circle electrode unit combinations.
The material of the Crossed Circle electricity body unit is graphite, metal or alloy；The interval of Crossed Circle electrode unit is smaller, and one
As for less than 3mm.
The shape of Crossed Circle electrode unit be triangle, quadrangle, pentagon, hexagon, decagon, dodecagon or its
Combination；The thickness of inner rings of electrode 1 and outer ring electrode 2 is less than 2mm, and the width 3 of inner rings of electrode 1 and outer ring electrode 2 is less than 2mm.
Inner rings of electrode 1 and 2 spacing 4 of outer ring electrode are less than 10mm, can close-packed arrays in plane or spherical surface, form large area
Coplanar discharge plasma producing apparatus.
The interior double rings electrode is buried in dielectric layer certain depth when work, it is bicyclic to be respectively connected to connecing for the power supply
Ground terminal or high frequency, high voltage end, under the action of high frequency, high voltage, the dielectric layer surface above paired electrode will generate coplanar
Electric discharge forms plasma.
It is described to be used for coplanar discharge plasma producing apparatus, it can be generated under low pressure, hyperbar or atmospheric pressure
Even plasma can be used for material surface modifying, film deposition, light source or other application.
Those of ordinary skill in the art will understand that the embodiments described herein, which is to help reader, understands this hair
Bright principle, it should be understood that protection scope of the present invention is not limited to such specific embodiments and embodiments.This field
Those of ordinary skill's scientific research according to the present invention make and various do not depart from the other each of essence of the invention by disclosed the technical disclosures
The specific variations and combinations of kind, these variations and combinations are still within the scope of the present invention.
Claims (7)
1. a kind of double rings electrode coplanar discharge plasma producing apparatus, by power supply and the Crossed Circle electrode being imbedded in dielectric layer
Unit close-packed arrays form；The Crossed Circle electrode unit includes inner rings of electrode (1) and outer ring electrode (2), inner rings of electrode (1) and
Outer ring electrode (2) is imbedded in certain depth in dielectric layer, inner rings of electrode (1) ground connection, and outer ring electrode (2) connects high voltage power supply
High frequency, high-voltage electrode can produce large area homogeneous plasma after multiple Crossed Circle electrode unit combinations, and feature exists
In:
Dielectric layer surface between the inner rings of electrode (1) and outer ring electrode (2), generates coplanar put under action of high voltage
Electro-plasma, plasma are evenly distributed.
2. a kind of double rings electrode coplanar discharge plasma producing apparatus as described in claim 1, it is characterised in that: described double
The material of annular electro body unit is graphite, metal or alloy.
3. a kind of double rings electrode coplanar discharge plasma producing apparatus as described in claim 1, it is characterised in that: described double
The interval of annular electrode unit is smaller, typically less than 3mm.
4. a kind of double rings electrode coplanar discharge plasma producing apparatus as described in claim 1, it is characterised in that: described double
The shape of annular electrode unit is triangle, quadrangle, pentagon, hexagon, decagon, dodecagon or combinations thereof.
5. a kind of double rings electrode coplanar discharge plasma producing apparatus as described in claim 1, it is characterised in that: in described
The thickness of ring electrode (1) and outer ring electrode (2) is less than 2mm.
6. a kind of double rings electrode coplanar discharge plasma producing apparatus as described in claim 1, it is characterised in that: in described
The width (3) of ring electrode (1) and outer ring electrode (2) is less than 2mm.
7. a kind of double rings electrode coplanar discharge plasma producing apparatus as described in claim 1, it is characterised in that: in described
Ring electrode (1) and outer ring electrode (2) spacing (4) are less than 10mm, and in being formed in plane or spherical surface, large area is coplanar to put close-packed arrays
Electro-plasma generating device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711180889.6A CN109831866B (en) | 2017-11-23 | 2017-11-23 | Double-ring electrode coplanar discharge plasma generating device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711180889.6A CN109831866B (en) | 2017-11-23 | 2017-11-23 | Double-ring electrode coplanar discharge plasma generating device |
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| Publication Number | Publication Date |
|---|---|
| CN109831866A true CN109831866A (en) | 2019-05-31 |
| CN109831866B CN109831866B (en) | 2023-10-20 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111617716A (en) * | 2020-06-09 | 2020-09-04 | 常州大学 | Metal honeycomb type plasma discharge reactor |
| CN113511439A (en) * | 2021-06-30 | 2021-10-19 | 南京工业大学 | Be used for municipal administration kitchen garbage transfer deodorizing device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111617716A (en) * | 2020-06-09 | 2020-09-04 | 常州大学 | Metal honeycomb type plasma discharge reactor |
| CN113511439A (en) * | 2021-06-30 | 2021-10-19 | 南京工业大学 | Be used for municipal administration kitchen garbage transfer deodorizing device |
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| CN109831866B (en) | 2023-10-20 |
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