CN109807453B

CN109807453B - Welding method of high-purity copper rotary target

Info

Publication number: CN109807453B
Application number: CN201910203658.5A
Authority: CN
Inventors: 伍温良
Original assignee: Dongguan Omat Puttering Target Co ltd
Current assignee: Dongguan Omat Puttering Target Co ltd
Priority date: 2019-03-18
Filing date: 2019-03-18
Publication date: 2020-10-02
Anticipated expiration: 2039-03-18
Also published as: CN109807453A

Abstract

The invention discloses an end welding method of a high-purity copper rotary target. The method can prevent the high-purity copper rotary target material from deforming, the coaxiality of the copper alloy end and the high-purity rotary target material is high, the generation of internal stress is effectively reduced, the welding effect of the interface of the copper alloy end and the high-purity rotary target material is good, and the air tightness of the welding interface is good.

Description

Welding method of high-purity copper rotary target

Technical Field

The invention relates to the technical field of rotary targets, in particular to a welding method of a high-purity copper rotary target.

Background

The rotary target material is widely applied to the advanced fields of electronics, communication, superconduction, aerospace and the like. The rotary target is tubular, the utilization efficiency is high, but the processing is not easy, and the rotary target of high-purity copper is soft in texture and easy to deform in the use process, so that an end head and a tail cover made of copper alloy are required to be respectively installed at two ends of a high-purity copper rotary target, then the copper alloy end head and the copper alloy tail cover are respectively assembled and welded with a high-purity copper target pipe, the outer side of a welding interface is welded by using an electron beam, a T-shaped step is generally used at the butt joint, and the deformation or relative dislocation of the interface of the copper alloy end head and the high-purity copper target pipe occurs due to the influence of thermal deformation in the welding process, so that the welding quality is influenced, the coaxiality is poor, the sealing performance is poor, and larger internal stress.

For solving the problem, the patent application No. CN201820246325.1 is provided with an interference fit angle at the inner end face of the interface between the copper alloy end and the high-purity copper target tube, so as to provide a space to adapt to the thermal deformation generated in the welding process, and solve the problem of deformation or dislocation of the welding interface, but in practical production, the interference fit angle is present between the copper alloy end and the high-purity copper target tube, which is easy to shake during welding positioning, resulting in inaccurate alignment during welding, and the welding interface is easy to perform dislocation welding.

The existing interface welding is generally continuous welding clockwise or anticlockwise along an interface, the continuous welding enables the temperature of a welded part of a high-purity rotary target material and a copper alloy end to be higher, the temperature of an unwelded part to be lower, and the temperature difference between the welded part and the unwelded part to be larger.

Disclosure of Invention

Aiming at the defects in the prior art, the invention aims to provide the welding method of the high-purity copper rotary target, which can prevent the high-purity rotary target from deforming, has high coaxiality between the copper alloy end and the high-purity rotary target, effectively reduces the generation of internal stress, and has good welding effect and good air tightness of a welding interface between the copper alloy end and the high-purity rotary target.

In order to achieve the purpose, the invention adopts the technical scheme that: a welding method of a high-purity copper rotary target comprises the following steps:

1) cleaning the welding surface and the surface of the high-purity copper rotary target to remove an oxide layer and oil stains on the welding surface and the surface of the high-purity copper rotary target,

the high-purity copper rotary target comprises a high-purity copper target pipe, a copper alloy end and a copper alloy tail cover, wherein the copper alloy end and the copper alloy tail cover are respectively installed at two ends of the high-purity copper target pipe;

the welding surface of the copper alloy end and the welding surface of the high-purity copper target material pipe are butted and connected to form a connecting gap of the outer wall of the pipe, the welding surface of the copper alloy tail cover and the welding surface of the high-purity copper target material pipe are butted and connected to form a connecting gap of the outer wall of the pipe, the connecting gap is a tail cover welding port, the end welding port or the tail cover welding port fixed on the rotary fixing part is a welding end, and the end welding port or the tail cover welding port not fixed on the rotary fixing part is a to-be-welded end;

2) fixing the copper alloy end and the copper alloy tail cover at two ends of the high-purity copper target tube by using a fixture device to form a high-purity copper welding target tube, placing the high-purity copper rotary target in vacuum electron beam welding equipment, fixing the copper alloy end or the copper alloy tail cover at a rotary fixing part of the vacuum electron beam welding equipment,

3) a welding preparation step, wherein vacuum degree in the vacuum electron beam welding equipment reaches 10E-3Pa by starting the vacuum electron beam welding equipment for vacuumizing, the focusing current of the vacuum electron beam welding equipment is set at 400-500 milliamperes, the filament voltage is set at 30-50V, the high voltage is set at 60-80KV,

4) and a welding step, comprising the following sub-steps,

4.1) spot welding and positioning, namely respectively carrying out spot welding on four welding points by an electron beam of vacuum electron beam welding equipment to ensure that a copper alloy end head or a copper alloy tail cover of a welding end is preliminarily welded and positioned on the high-purity copper target pipe, the four welding points are respectively and evenly distributed at an end welding port or a tail cover welding port of the welding end, the first welding point is opposite to the second welding point, a fourth welding point is arranged between the first welding point and the second welding point along the clockwise direction, a third welding point is arranged between the second welding point and the first welding point, a high-purity copper rotating target is rotated by a rotating and fixing part in the welding process, the electron beam sequentially welds the high-purity copper target pipe according to the sequence of the first welding point, the second welding point, the third welding point and the fourth welding point,

4.2) arc welding, wherein four welding arcs are evenly distributed at the end welding port or the tail cover welding port of the welding end, the four welding arcs are respectively welded in arc sections through electron beams of vacuum electron beam welding equipment, so that the copper alloy end or the copper alloy tail cover of the welding end is deeply welded and fixed on the high-purity copper target material pipe, a first welding arc is arranged between a third welding point and the first welding point along the clockwise direction, a third welding arc is arranged between the first welding point and the fourth welding point, a second welding arc is arranged between the fourth welding point and the second welding point, a fourth welding arc is arranged between the second welding point and the third welding point, a high-purity copper rotating target rotates through a rotating fixing part in the welding process, the first welding arc, the second welding arc, the third welding arc and the fourth welding arc are sequentially welded in arc sections along the clockwise direction by using the electron beams to the high-purity copper target material pipe,

4.3), a full-circle welding step, namely performing circumferential welding on an end welding port or a tail cover welding port of a welding end along the clockwise direction by using an electron beam of vacuum electron beam welding equipment, wherein a first welding point, a second welding point, a third welding point, a fourth welding point, a first welding arc, a second welding arc, a third welding arc and a fourth welding arc form the circumference of a complete end welding port or tail cover welding port, the high-purity copper rotating target is rotated by rotating the fixed part in the welding process to complete the welding of the welding end, and the vacuum in the vacuum electron beam welding equipment is relieved by inflating the vacuum electron beam welding equipment;

5) a welding preparation step of fixing the end to be welded on the rotary fixing part to be converted into a welding end, and repeating the welding preparation step and the welding step to complete the welding of the other welding end;

6) and a post-finishing inspection step, removing craters from the welding positions of the end welding port and the tail cover welding port through a lathe, detecting the air tightness of the welding positions of the end welding port and the tail cover welding port by using a helium mass spectrometer leak detector, if the leak rate of the welding positions is more than 4 multiplied by 10E-10 Pa.m, unsatisfactory the air tightness, fixing one end, unsatisfactory the air tightness, at the rotating fixing part, repeating 4.4), a round-finishing welding step and 6), a post-finishing inspection step, and finishing welding the copper alloy end and the copper alloy tail cover with the high-purity copper target pipe respectively until the leak rates of the welding positions of the end welding port and the tail cover welding port are not more than 4 multiplied by 10E-10 Pa.m/s.

In a further technical scheme, the electron beam current in the spot welding positioning step is a first electron beam current, the intensity of the first electron beam current is set to be 20-30 milliamperes, the electron beam current in the arc welding step is a second electron beam current, the intensity of the second electron beam current is set to be 60-80 milliamperes, the electron beam current in the full-circle welding step is a third electron beam current, and the intensity of the third electron beam current is set to be 60-90 milliamperes.

In a further technical scheme, in the step of spot welding positioning, the first welding point, the second welding point, the third welding point and the fourth welding point are respectively welded for 2-3 seconds, the welding depth is 1-2mm, in the step of arc welding, the first welding arc, the second welding arc, the third welding arc and the fourth welding arc are respectively welded for 2.5-5 seconds, the welding depth is 7-10mm, in the step of full circle welding, the circumferential welding time of the end welding port or the tail cover welding port is 12-18 seconds, and the welding depth is 5-7 mm.

In a further technical scheme, in the target fixing step, the distance between the end welding port or the tail cover welding port and the rotating fixing part is set to be 200 mm.

In a further technical scheme, the vacuum electron beam welding equipment comprises a movable welding platform, at least one support frame is arranged in the middle of the movable welding platform in a sliding mode, one end of the movable welding platform is provided with the rotary fixing portion and the electron beam emitter, the high-purity copper welding target tube is fixedly installed on the vacuum electron beam welding equipment through the rotary fixing portion, the high-purity copper welding target tube is rotatably placed on the support frame, and the high-purity copper welding target tube is rotated through the rotary fixing portion in the welding process.

In a further technical scheme, the method further comprises 7) a straightening step after the post-straightening checking step, wherein the straightening step comprises the following substeps,

7.1) preparing, namely, hoisting and moving the high-purity copper rotary target to straightening equipment, placing the high-purity copper rotary target on a rack of the straightening equipment,

wherein the high-purity copper rotary target comprises a high-purity copper target tube, a copper alloy end and a copper alloy tail cover, the copper alloy end and the copper alloy tail cover are respectively welded and installed with two ends of the high-purity copper target tube, an end welding port is arranged at the joint of the copper alloy end and the high-purity copper target tube, a flange is fixed on the outer wall of the end port of the copper alloy end, the flange and the copper alloy end are coaxially arranged,

the straightening equipment comprises a rack, a heating device, a rotary clamping device, a fixed bearing device, a semi-automatic straightening device and a straightening measuring device;

7.2) fixing, namely coaxially clamping and fixing one end of the high-purity copper rotating target welded with the copper alloy tail cover on a rotating clamping device of the straightening device, movably placing one end of the high-purity copper rotating target welded with the copper alloy end head on a fixed supporting device, rotating the high-purity copper rotating target relative to the fixed supporting device through the rotation of the rotating clamping device,

the semi-automatic straightening device is positioned on the outer side of the fixed supporting device, the end welding port is positioned between the fixed supporting device and the semi-automatic straightening device, and the heating device is positioned above the end welding port;

7.3), an alignment point determination step, comprising the following sub-steps,

7.31), a measuring tool placing step, wherein the lowest end of a measuring rod of the straightening and measuring device is abutted against the edge of a port of the inner wall of the copper alloy end head, the measuring rod is fixedly positioned at a position point, a corresponding initial value is formed on a measuring meter by pressing the measuring rod downwards for a certain distance, and meanwhile, a certain downwards measuring stroke is formed on the measuring rod,

wherein the straightening measuring device is fixed on a frame of the straightening equipment and is provided with a measuring rod and a measuring meter, the measuring rod is connected with the measuring meter, the displacement change of the measuring rod is reflected in the numerical value change of the measuring meter,

7.32) and a straightening point measuring step, wherein the copper alloy end head is rotated by starting the rotating and clamping device, if the copper alloy end head and the high-purity copper target tube are not coaxial, the copper alloy end head deflects in the rotating process, so that a measuring rod abutting against the edge of a port of the copper alloy end head moves up and down, the value in the measuring meter is correspondingly changed, the maximum value and/or the minimum value of the maximum change amplitude of the relative initial value in the measuring meter is recorded,

7.33), an alignment point and an alignment value determining step, wherein the smallest value among the initial value, the maximum value of the maximum variation amplitude of the initial value and the minimum value of the maximum variation amplitude of the initial value is recorded as an inner alignment point, the inner alignment point and the axis of the high-purity copper target tube form an alignment surface, the point of the outer wall of the flange plate of the end port of the copper alloy end corresponding to the inner alignment point is determined as an outer alignment point, the inner alignment point and the outer alignment point are both positioned in the alignment surface, the alignment surface is rotated to be vertical by rotating the high-purity copper rotary target through a rotating and clamping device, the outer alignment point is the lowest position of the alignment surface, the half of the difference between the maximum value of the maximum values of the initial value and the maximum variation amplitude of the initial value and the value corresponding to the measurement table of the inner alignment point is an alignment value, the outer alignment point is rotated to the lowest point of the high-purity copper,

7.34) fixing the straightening point, namely locking the high-purity copper rotary target by using a fixed bearing device to ensure that the straightening surface is kept vertical, and keeping the outer straightening point at the lowest position of the straightening surface in the straightening process;

7.4) straightening and heating, namely moving a heating device to an end welding interface, and heating the temperature of the end welding interface to 300-500 ℃ through the heating device;

7.5) semi-automatic straightening, namely, the abutting part is lifted to push against the outer straightening point, so that the copper alloy end head deforms along the radial direction, thereby improving the straightness between the high-purity copper target tube and the copper alloy end head, the lowest point of the measuring rod is abutted against the inner straightening point, the semi-automatic straightening device is manually controlled to lift the abutting part to push against the outer straightening point, when the increasing value of the measuring meter is equal to the straightening value, the operation of the semi-automatic straightening device is manually stopped, meanwhile, the heating device stops heating the welding port of the end head, the high-purity copper rotary target is cooled to normal temperature,

the semi-automatic straightening device comprises a jack controller, a motor, a quantitative transmission rod and a jack, wherein the jack comprises an abutting part, a power input end and an abutting driving part, the abutting driving part is in driving connection with the abutting part, the power input end is connected with the abutting driving part, the jack controller is electrically connected with the motor, the output end of the motor is connected with the quantitative transmission rod, the quantitative transmission rod is connected with the power input end, and the motor drives the quantitative transmission rod to rotate so that the power input of the power input end is quantitative input, and therefore the abutting distance of the abutting part is quantitatively controlled;

7.6) and a straightening inspection step, wherein after the high-purity copper rotary target is cooled to normal temperature, the straightening point determining step is repeated to carry out straightening inspection on the straightness of one end of the high-purity copper rotary target provided with the copper alloy end, if the straightening value measured by the measuring meter is less than or equal to 0.3mm, the straightening is finished, if the straightening value measured by the measuring meter is greater than 0.3mm, the straightening heating step, the semi-automatic straightening step and the straightening inspection step are repeated until the straightening value is less than or equal to 0.3mm in the straightening inspection step, and the straightening is finished.

Among the further technical scheme, through along the axis direction of copper alloy end encircles the setting heating device is right the end welding mouth heats, cools down the copper alloy end through the cooling portion that sets up at heating device's side, and the cooling portion is located the top of copper alloy end port, through setting up at the temperature measurement portion of one side at the copper alloy end to the end welding mouth with the ring flange carries out the temperature measurement, and wherein, alignment equipment includes the controller, and heating device, cooling portion and temperature measurement part are electric connection in the controller respectively.

In a further technical solution, in the semi-automatic straightening step, the temperature measuring part measures the temperature of the port edge of the copper alloy tip, when the temperature of the port edge of the copper alloy end head is higher than 40 ℃, the controller starts the cooling part to cool the port edge of the copper alloy end head, when the temperature of the port edge of the copper alloy end is less than or equal to 40 ℃, the controller controls the cooling part to stop cooling the port edge of the copper alloy end, in the semi-automatic straightening step, when the heating device stops heating the end welding port, the controller starts the cooling end to cool the end welding port, and meanwhile, the controller starts the temperature measuring part to measure the temperature of the end welding port, and when the temperature measuring part measures that the temperature of the end welding port reaches a normal temperature value, the controller controls the cooling part to stop cooling the end welding port.

In a further technical scheme, the welding surface of the copper alloy end head and the welding surface of the high-purity copper target material pipe are abutted and coaxially arranged, and a connecting part is arranged on the welding surface of the copper alloy end head, the welding surface of the high-purity copper target tube is provided with an installation part, the outer edge of the connecting part is provided with a connecting top platform, the outer edge of the installation part is provided with an installation step, the connecting part is installed on the installation part, the inner side of the connecting part opposite to the outer edge is provided with a first binding surface, the first binding surface is obliquely arranged relative to the axis of the connecting part, the inner side of the installation part opposite to the outer edge is provided with a second binding surface, the second binding surface is obliquely arranged relative to the axis of the installation part, the position, the gradient and the shape and size of the first binding surface are respectively adapted to, when connecting portion and installation department location are connected, first binding face and second binding face wainscot installation connect top platform and installation step wainscot installation.

In a further technical scheme, the clamp device comprises a top cover fixing piece, a top cover and a pull rod, wherein the top cover is used for abutting against the copper alloy end which is coaxially arranged with the high-purity copper target tube; the opposite pull rod is used for penetrating through the high-purity copper target material pipe and is movably connected with the copper alloy tail cover of the high-purity copper target material pipe; one end face of the top cover is abutted and mounted at the outer end of the copper alloy end, an opposite-pull through hole is formed in the middle of the top cover along the axis direction of the top cover, a first connecting portion and a second connecting portion are arranged at two ends of the opposite-pull rod respectively, the first connecting portion penetrates through the opposite-pull through hole to be movably abutted and connected with the top cover fixing piece, the top cover fixing piece is matched with the first connecting portion in shape and size, and the second connecting portion is movably connected with the copper alloy tail cover.

After adopting the structure, compared with the prior art, the invention has the advantages that:

1. the welding method can effectively reduce the overall temperature of the welding position of the welding end in the welding process, prevent the deformation caused by expansion with heat and contraction with cold due to large temperature difference between the welded area and the non-welded area of the welding end in the welding process, and has the advantages of small welding deformation, good welding effect and high yield.

2. The welding method can effectively avoid the accumulation of welding heat in the welding process, and has high alignment degree of the welding port and low leakage rate of the welding port.

Drawings

The invention is further illustrated with reference to the following figures and examples.

FIG. 1 is a structural sectional view of a high purity copper rotary target of the present invention.

FIG. 2 is a sectional view showing the structure of the jig apparatus for high purity copper rotary targets of the present invention.

FIG. 3 is a structural cross-sectional view of a top cover of the fixture apparatus of the present invention.

FIG. 4 is a structural cross-sectional view of the tie-rod of the clamping device of the present invention.

FIG. 5 is a sectional view of the tail cap of the clamping apparatus of the present invention.

Fig. 6 is a schematic structural view of the straightening apparatus of the present invention.

Fig. 7 is a schematic view of the second end of the frame of the straightening apparatus of the present invention.

FIG. 8 is an enlarged view of a portion of one of the embodiments of the present invention at A in FIG. 1.

Fig. 9 is an exploded view of the fig. 8 component of the present invention.

FIG. 10 is a weld division of the tip weld or tail cap weld of the weld end of the present invention.

In the figure: 02-high-purity copper rotary target, 03-high-purity copper target tube, 04-copper alloy end and 05-copper alloy tail cover;

11-mounting part, 12-mounting step, 13-second binding face, 14-mounting top platform and 15-mounting wall body;

21-connecting part, 22-connecting top platform, 23-first binding face, 24-connecting step, 25-connecting wall body and 27-connecting column;

30-top cover, 31-top cover fixing piece, 32-connecting hole, 33-connecting cavity and 34-embedded platform;

40-pair of pull rods, 41-first connecting part, 42-second connecting part and 43-rod body;

50-tail cover, 51-tail cover fixing piece, 52-mounting cavity, 53-mounting hole and 54-mounting channel

60-a frame, 61-a heating device, 62-a cooling part, 63-a rotating clamping device, 64-a straightening measuring device and 65-a controller;

70-a semi-automatic straightening device, 71-a butting part, 72-a power input end and 73-a butting driving part;

80-fixed supporting device, 81-upper supporting bracket, 82-lower supporting bracket and 83-locking device;

90-first weld, 91-second weld, 92-third weld, 93-fourth weld, 94-first weld, 95-second weld, 96-third weld, 97-fourth weld.

Detailed Description

The following are merely preferred embodiments of the present invention, and do not limit the scope of the present invention.

A method for welding a high-purity copper rotary target, which is shown in fig. 1-10, comprises the following steps:

1) a cleaning step, cleaning the welding surface and the surface in the high-purity copper rotating target 02 to remove the oxidation layer and the oil stain in the welding surface and the surface of the high-purity copper rotating target 02,

the specific cleaning method is to carry out ultrasonic cleaning on the welding surface and the surface of the high-purity copper rotary target 02 by using deionized water, or to use a chemical metal cleaning agent to clean the welding surface and the surface of the high-purity copper rotary target 02 so as to clean oxide layers and oil stains on the welding surface and the surface of the high-purity copper rotary target 02. The welding surface and the surface of the high-purity copper rotating target 02 respectively comprise a welding surface of a copper alloy end 04, a copper alloy tail cover 05 and a high-purity copper target material pipe 03 and the surface of the outer pipe wall.

The high-purity copper rotary target 02 comprises a high-purity copper target pipe 03, a copper alloy end 04 and a copper alloy tail cover 05, wherein the copper alloy end 04 and the copper alloy tail cover 05 are respectively installed at two ends of the high-purity copper target pipe 03, one ends of the copper alloy end 04 and the copper alloy tail cover 05 are respectively provided with a welding surface, two ends of the high-purity copper target pipe 03 are respectively provided with a welding surface, and the welding surfaces of the copper alloy end 04 and the copper alloy tail cover 05 are respectively abutted to the welding surface of the high-purity copper target pipe 03;

the welding surface of the copper alloy end 04 and the welding surface of the high-purity copper target tube 03 are butted and connected to form a connecting gap of the outer wall of the tube, the welding surface of the copper alloy tail cover 05 and the welding surface of the high-purity copper target tube 03 are butted and connected to form a connecting gap of the outer wall of the tube, the connecting gap is a tail cover welding port, the end welding port or the tail cover welding port fixed on the rotary fixing part is a welding end, and the end welding port or the tail cover welding port not fixed on the rotary fixing part is a to-be-welded end;

2) fixing the copper alloy end 04 and the copper alloy tail cover 05 at two ends of the high-purity copper target tube 03 respectively by using a fixture device to form a high-purity copper welding target tube, placing the high-purity copper rotating target 02 in vacuum electron beam welding equipment, fixing the copper alloy end 04 or the copper alloy tail cover 05 at a rotating fixing part of the vacuum electron beam welding equipment,

the copper alloy end 04 and the copper alloy tail cover 05 are respectively fixed at two ends of the high-purity copper target tube 03 through the fixture device, the copper alloy end 04 and the copper alloy tail cover 05 are prevented from being separated, moved or shaken from the high-purity copper target tube 03 in the welding process, and the copper alloy end 04 and the copper alloy tail cover 05 are respectively in a fixed state with the high-purity copper target tube 03 in the welding process, so that the coaxiality of the welded copper alloy end 04 and the welded copper alloy tail cover 05 and the high-purity copper target tube 03 is ensured.

Specifically, the vacuum electron beam welding equipment comprises a movable welding platform, at least one support frame is arranged in the middle of the movable welding platform in a sliding mode, a rotary fixing portion and an electron beam emitter are arranged at one end of the movable welding platform and used for emitting electron beams used in welding, the welding end of the high-purity copper welding target tube is fixedly installed on the vacuum electron beam welding equipment through the rotary fixing portion, the rotary fixing portion enables the high-purity copper rotary target 02 to rotate in the welding process, and the high-purity copper target tube 03 is rotatably placed on the support frame.

In the target fixing step, the distance between the end welding port or the tail cover welding port and the rotary fixing part is set to be 200 mm.

The welding surface of the copper alloy end 04 and the welding surface of the high-purity copper target tube 03 are connected in a butting mode to form a connecting gap of the outer wall of the tube, the welding surface of the copper alloy tail cover 05 and the welding surface of the high-purity copper target tube 03 are connected in a butting mode to form a connecting gap of the outer wall of the tube, the end welding port or the tail cover welding port fixed to the rotary fixing portion is a welding end, and the end welding port or the tail cover welding port which is not fixed to the rotary fixing portion is an end to be welded;

3) a welding preparation step, wherein vacuum degree in the vacuum electron beam welding equipment reaches 10E-3Pa by starting the vacuum electron beam welding equipment for vacuumizing, the focusing current of the vacuum electron beam welding equipment is set at 400-500 milliamperes, the filament voltage is set at 30-50V, and the high voltage is set at 60-80 KV;

after the basic parameters of the vacuum electron beam welding equipment and the vacuum environment of the welding are prepared, the welding is started. The end welding method comprises three steps of welding an end welding port or a tail cover welding port, wherein the first step is spot welding, the second step is arc section welding, and the third step is circumferential welding. The existing welding method is one-time whole circumference welding along the clockwise or anticlockwise direction of the welding port of the outer wall of the tube, the welding method continuously welds at one end, so that the welded end continuously accumulates heat, the temperature of the welded end is higher, the temperature of the unwelded end is lower, the temperature difference between the welded area and the unwelded area at the welding port is large, the welding port is deformed due to thermal expansion and cold contraction, the welding surface of the copper alloy end 04 or the copper alloy tail cover 05 at the welding end cannot be aligned with the welding surface of the high-purity copper target tube 03, the welding seam is large, the leakage rate of the welding port does not reach the standard, or the coaxiality tolerance of the high-purity copper target tube 03 and the copper alloy end 04 is increased due to the uneven thickness of the welding seam caused by the staggered welding surface, and the linearity of the high-purity copper rotary target 02 does not reach.

4) And a welding step, comprising the following sub-steps,

4.1), spot welding location step, carry out spot welding to four welding points respectively through the electron beam current of vacuum electron beam welding equipment, make the preliminary welding location in high-purity copper target pipe 03 of copper alloy end 04 or copper alloy tail-hood 05 of welding end, four welding points evenly distributed are respectively at the end welding mouth or the tail-hood welding mouth of welding end, first welding point 90 is relative with second welding point 91, along clockwise, be provided with fourth welding point 93 between first welding point 90 and second welding point 91, be provided with third welding point 92 between second welding point 91 and first welding point 90, it is rotatory to make high-purity copper rotation target 02 through rotatory fixed part in welding process, the electron beam current welds according to first welding point 90, second welding point 91, third welding point 92 and fourth welding point 93's order to high-purity copper welding target pipe in proper order.

The reason that the high-purity copper welding target material pipe is subjected to spot welding firstly is that the welding area of the spot welding is small, the welding time is short, the generated welding heat is relatively small, the welding process cannot be affected by expansion caused by heat and contraction caused by cold due to accumulation of the welding heat, under the condition, the welding surface of the welding end is aligned with the welding surface of the high-purity copper target material pipe 03 firstly through the welding point, the welding surface is prevented from deforming and shifting in the welding process, and the welding end and the high-purity copper target material pipe 03 are subjected to positioning welding.

The end welding port or the tail cover welding port with four welding points evenly distributed at the welding end uniformly fixes the whole circumferential position, firstly welds the first welding point 90, then welds the second welding point 91 which is farthest away from the first welding point 90, because the position of the second welding point 91 is far away from the first welding point 90, the heat generated by the second welding point 91 during welding is difficult to be superposed with the heat generated by the first welding point 90, then welds the third welding point 92, then welds the fourth welding point 93 which is farthest away from the third welding point 92, and similarly, because the position of the third welding point 92 is far away from the fourth welding point 93, the heat generated by the third welding point 92 during welding is difficult to be superposed with the heat generated by the fourth welding point 93, thereby effectively avoiding the heat superposition phenomenon generated during welding, and the distribution of the welding points and the welding sequence arrangement of the welding points are all for reducing the mutual accumulation of the heat generated during welding, the heat accumulation is prevented from influencing the welding process of the welding port.

Specifically, the electron beam current in the spot welding positioning step is a first electron beam current, and the intensity of the first electron beam current is set to be 20-30 milliamperes. The first welding point 90, the second welding point 91, the third welding point 92 and the fourth welding point 93 are respectively welded for 2-3 seconds, and the welding depth is 1-2 mm. The method has the advantages that the fixing effect is achieved in a short welding time, so that the time is as short as possible, the welding depth can achieve the fixing effect, and deep welding is not needed.

4.2) arc welding step, evenly distributing four welding arcs at the end welding port or the tail cover welding port of the welding end, respectively welding the four welding arcs in arc sections through electron beam, deeply welding and fixing the copper alloy end 04 or the copper alloy tail cover 05 of the welding end on the high-purity copper target material pipe 03, arranging a first welding arc 94 between a third welding point 92 and the first welding point 90, a third welding arc 96 between the first welding point 90 and the fourth welding point 93, a second welding arc 95 between the fourth welding point 93 and the second welding point 91, arranging a fourth welding arc 97 between the second welding point 91 and the third welding point 92, rotating the high-purity copper rotating target 02 by a rotating and fixing part in the welding process, and sequentially welding the first welding arc 94, the second welding arc 95, the first welding arc 95 and the second welding arc 95 in the clockwise direction on the high-purity copper target material pipe by using the electron beam, The third welding arc 96 and the fourth welding arc 97 are welded in arc sections;

and after the spot welding positioning step is finished, welding the end welding opening or the tail cover welding opening of the welding end formally. The four welding arcs respectively have a welding starting point and a welding ending point, the starting point and the welding ending point of each welding arc are determined along the clockwise direction, the starting point is the first arc of each welding arc along the clockwise direction, and the ending point is the last arc of each welding arc. Firstly welding the first welding arc 94, welding the second welding arc 95 which is farthest away from the first welding arc 94, and certainly, avoiding the welding mouth from deforming due to the superposition of heat generated in the welding process, wherein the starting point of the fourth welding arc 97 is the end point of the second welding arc 95, the second welding arc 95 is just welded, the temperature at the end point of the second welding arc 95 is higher, and the starting point of the third welding arc 96 is far away from the end point of the second welding arc 95, so that after the second welding arc 95 is welded, the third welding arc 96 is most suitable to be welded, and after the third welding arc 96 is welded, the fourth welding arc 97 which is far away from the third welding arc 96 is welded, in such a way, the accumulation of welding heat in the welding process can be effectively avoided, meanwhile, the overall temperature of the welding part of the welding end in the welding process can be reduced, and the situation that the temperature difference between the welding part of the welding end and the non-welding part in the welding process is large, so as to cause the deformation due to cold contraction, therefore, the welding method has good welding effect and high yield.

Specifically, the electron beam current in the arc welding step is the second electron beam current, the intensity of the second electron beam current is set to be 60-80 milliamperes, and in the arc welding step, the first welding arc 94, the second welding arc 95, the third welding arc 96 and the fourth welding arc 97 are respectively welded for 2.5-5 seconds, and the welding depth is 7-10 mm.

In the arc welding step, the copper alloy end 04 or the copper alloy tail cover 05 at the welding end needs to be deeply welded and fixed on the high-purity copper target tube 03, so the welding depth in the step is deeper than that in the spot welding positioning step, and the welding of the welding part is realized mainly through the step, so the welding quality in the step also directly influences the final welding quality, the butt and alignment of the welding surface of the welding end and the welding surface of the high-purity copper target tube 03 can be ensured in the welding process, and the final welding quality is ensured. The arc-segment welding and the arc-segment welding sequence of the end welding port or the tail cover welding port of the welding end can effectively ensure the butting and alignment of the welding surfaces, and the condition of displacement or deformation between the welding surfaces caused by the superposition or accumulation of heat in the welding process is prevented.

In this step, the welding of the tip weld or tail cap weld of the weld end is completed for one circumference, and the tip weld or tail cap weld of the weld end is initially completed.

4.3), a full-circle welding step, namely, carrying out circumferential welding on an end welding port or a tail cover welding port of a welding end along the clockwise direction through electron beam current, wherein a first welding point 90, a second welding point 91, a third welding point 92, a fourth welding point 93, a first welding arc 94, a second welding arc 95, a third welding arc 96 and a fourth welding arc 97 form the complete circumference of the end welding port or the tail cover welding port, the high-purity copper rotating target 02 is rotated by rotating the fixing part in the welding process to complete the welding of a welding end, and the vacuum in the vacuum electron beam welding equipment is relieved by inflating the vacuum electron beam welding equipment;

the step is supplementary welding after the arc welding step, and is mainly used for supplementary welding aiming at the part of the welding depth or the welding position which is not welded in place in the arc welding step, so that the welding effect in the arc welding step is further strengthened, and the welding effect of the end welding port or the tail cover welding port of the welding end is better.

Specifically, the electron beam current in the rounding welding step is the third electron beam current, the intensity of the third electron beam current is set to be 60-90 milliamperes, the circumferential welding time of the end welding opening or the tail cover welding opening is 12-18 seconds in the rounding welding step, and the welding depth is 5-7 mm.

after the step is finished, welding of the end welding port and the tail cover welding port is finished.

6) And a post-finishing inspection step, removing craters from the welding positions of the end welding port and the tail cover welding port through a lathe, detecting the air tightness of the welding positions of the end welding port and the tail cover welding port by using a helium mass spectrometer leak detector, if the leakage rate of the welding positions is more than 4 multiplied by 10E-10 Pa.m, performing post-finishing inspection until the leakage rates of the welding positions of the end welding port and the tail cover welding port are not more than 4 multiplied by 10E-10 Pa.m/s, and finishing the welding of the copper alloy end 04 and the copper alloy tail cover 05 with the high-purity copper target material pipe 03 respectively, wherein the end welding portion and the tail cover welding port are fixed on a rotating fixing part by fixing the end with the air tightness not more than the requirements, and repeating the 4.4), the full-round welding step and the 6) and the post-.

The welding position is subjected to crater removal through a lathe, the surface of the welding position is smoother, and meanwhile, the airtightness of the welding position of the end welding opening and the tail cover welding opening is detected by using a helium mass spectrometer leak detector so as to ensure that the welded high-purity copper rotary target 02 meets the production requirements.

After the post-alignment checking step, 7) and an alignment step, wherein the alignment step comprises the following substeps,

7.1) and a preparation step, namely, hoisting and moving the high-purity copper rotary target 02 to the straightening equipment, and placing the high-purity copper rotary target on a rack 60 of the straightening equipment.

The high-purity copper rotary target 02 comprises a high-purity copper target pipe 03, a copper alloy end 04 and a copper alloy tail cover 05, wherein the copper alloy end 04 and the copper alloy tail cover 05 are respectively welded with two ends of the high-purity copper target pipe 03, an end welding port is formed in the joint of the copper alloy end 04 and the high-purity copper target pipe 03, a flange is fixed on the outer wall of the port of the copper alloy end 04, and the flange and the copper alloy end 04 are coaxially arranged.

The straightening equipment comprises a frame 60, a heating device 61, a rotary clamping device 63, a fixed supporting device 80, a semi-automatic straightening device 70 and a straightening measuring device 64;

7.2) and fixing, namely coaxially clamping and fixing one end of the high-purity copper rotating target 02 welded with the copper alloy tail cover 05 to a rotating clamping device 63 of the straightening device, movably placing one end of the high-purity copper rotating target 02 welded with the copper alloy end 04 in a fixed supporting device 80, and rotating through the rotating clamping device 63 to enable the high-purity copper rotating target 02 to rotate relative to the fixed supporting device 80.

The semi-automatic straightening device 70 is positioned on the outer side of the fixed supporting device 80, the outer side of the fixed supporting device 80 is positioned from the fixed supporting device 80 to the side provided with the copper alloy end 04, the inner side of the fixed supporting device 80 is positioned from the fixed supporting device 80 to the side provided with the copper alloy tail cover 05, an end welding port is positioned between the fixed supporting device 80 and the semi-automatic straightening device 70, and the heating device 61 is positioned above the end welding port;

at this time, one end of the copper alloy tail cover 05 is clamped and fixed on the rotary clamping device 63, and the high-purity copper rotary target 02 needs to be rotated in the subsequent step, so that the rotary clamping device 63 needs to clamp the high-purity copper rotary target 02 to prevent the high-purity copper rotary target from shaking or moving in the rotating process. However, the high-purity copper target tube 03 is made of a soft material, and if the high-purity copper target tube 03 is clamped, the high-purity copper target tube 03 is easily deformed or the outer wall of the tube is easily scratched. Therefore, the copper alloy tail cover 05 is clamped on the rotary clamping device 63, the copper alloy tail cover 05 is made of hard materials, and the copper alloy tail cover 05 cannot be damaged; the deformation or scratch of the high-purity copper target material pipe 03 can be avoided, the clamping requirement can be met, the high-purity copper rotary target 02 is prevented from shaking in the rotating process, and the use is safe.

Specifically, the fixed bearing device 80 is provided with an upper bearing bracket 81 and a lower bearing bracket 82, the upper bearing bracket 81 is hinged to the lower bearing bracket 82, the lower bearing bracket 82 is slidably mounted in the middle of the rack 60, after the upper bearing bracket 81 and the lower bearing bracket 82 are connected and fixed, a hollow fixed bearing hole is formed in the middle of the fixed bearing device 80 along the length direction of the straightening device, and at least two fixed bearing columns are formed in the inner side of the fixed bearing hole in a protruding manner towards the central point direction of the fixed bearing hole.

More specifically, in the fixing step, the fixed bearing device 80 and the rotary clamping device 63 are coaxially installed, the upper bearing bracket 81 and the lower bearing bracket 82 are respectively provided with at least one bearing column, the upper bearing bracket 81 and the lower bearing bracket 82 are separated and opened, when the high-purity copper target tube 03 is placed on the top surface of the bearing column of the lower bearing bracket 82, the high-purity copper target tube 03 is placed on the fixed bearing device 80, the surface of the bearing column closest to the outer wall of the high-purity copper target tube 03 is the top surface of the bearing column, the top surface of the bearing column abuts against the high-purity copper target tube 03, the bearing column supports the high-purity copper target tube 03 to be horizontal, and meanwhile, the coaxial installation of the high-purity copper target tube 03 and the rotary clamping device 63 is ensured. The coaxiality of the copper alloy tail cover 05, the high-purity copper target material pipe 03 and the rotary clamping device 63 is ensured.

Specifically, a locking device 83 is provided on one side of the fixed supporting device 80, and the locking device 83 includes a first locking portion provided on one side of the upper supporting bracket 81 and a second locking portion provided on the lower supporting bracket 82, the position of the second locking portion corresponding to the position of the first locking portion, and the first locking portion is in locking connection with the second locking portion. The first locking part and the second locking part are movably connected, including but not limited to a snap connection or a threaded connection, preferably a threaded connection, and the movable connection of the threaded connection can be adjusted more finely according to specific situations.

7.31), measuring tool places the step, and the bottommost end of the measuring stick of alignment measuring device 64 supports in the port edge of copper alloy end 04 inner wall, and the measuring stick is fixed to be located a position point, thereby forms a corresponding initial numerical value on the gauge through pushing down the measuring stick certain distance, and the measuring stick also is formed with certain decurrent measurement stroke simultaneously.

Wherein the initial value is larger than twice the alignment value, and in practical operation, the range of the twice alignment value is 0.6-0.7mm, and preferably, the initial value of the measuring table is set to be 2-3 mm. The initial value is set so that the lowest end of the measuring rod always abuts against the edge of the copper alloy end 04 in the measuring process, and the lowest end of the measuring rod is prevented from being separated from the abutting part of the copper alloy end 04, so that inaccurate data measurement is caused.

Specifically, the alignment measuring device 64 is fixed to the frame 60 of the alignment apparatus, the alignment measuring device 64 is provided with a measuring rod and a measuring meter, the measuring rod is connected to the measuring meter, and the displacement change of the measuring rod is in response to the value change of the measuring meter.

7.32) and a straightening point measuring step, wherein the rotating clamping device 63 is started to enable the copper alloy end 04 to rotate, if the copper alloy end 04 and the high-purity copper target tube 03 are not coaxial, the copper alloy end 04 deflects in the rotating process, and the measuring rod abutting against the edge of the port of the copper alloy end 04 moves up and down, so that the value in the measuring meter changes correspondingly, and the maximum value and/or the minimum value of the maximum change amplitude of the relative initial value in the measuring meter are recorded.

7.33), and a step of determining an alignment point and an alignment value, wherein the smallest value among the initial value, the maximum value of the maximum variation amplitude of the relative initial value and the minimum value of the maximum variation amplitude of the relative initial value is recorded as an inner alignment point, the inner alignment point and the axis of the high-purity copper target pipe 03 form an alignment surface, a point of the outer wall of the flange plate of the port 04 of the copper alloy end head corresponding to the inner alignment point is determined as an outer alignment point, and the inner alignment point and the outer alignment point are both positioned in the alignment surface, the high-purity copper rotary target 02 is rotated through the rotary clamping device 63, so that the straightening surface is rotated to be vertical, the outer straightening point is the lowest position of the straightening surface, half of the difference between the maximum value of the initial value and the value with the maximum change amplitude relative to the initial value and the corresponding value of the measuring meter of the inner straightening point is the straightening value, and the outer straightening point is rotated to the lowest point of the high-purity copper rotary target 02 in the vertical direction.

7.34) fixing the straightening point, namely locking the high-purity copper rotary target 02 by the fixed supporting device 80 to ensure that the straightening surface is kept vertical, and keeping the outer straightening point at the lowest position of the straightening surface in the straightening process;

the step mainly finds out the alignment point and the alignment value, prepares for the subsequent semi-automatic alignment step, and the alignment effect is accurate by taking the accurate alignment point and the accurate alignment value as the basis. Preferably, the alignment measuring device 64 is a dial gauge. The existing alignment measuring device 64 uses infrared rays for measurement, the accuracy of the infrared ray measurement can only reach about 2mm, the accuracy of the infrared ray measurement is too low to meet the requirement of actual production on alignment, and the accuracy of a dial indicator is about 0.01mm, so that the requirement of actual production on alignment accuracy can be fully met. The accuracy of the straightening measuring device 64 is selected as a precondition that the straightness accords with the standard, and the straightening equipment is high in straightening straightness accuracy and high in straightening passing rate and serves as a foundation guarantee.

Specifically, in the step of determining the alignment point, the high-purity copper target tube 03 rotates relative to the support column of the lower support bracket 82; the top surface of the supporting column of the lower supporting bracket 82 abuts against the outer wall of the high-purity copper target tube 03, the supporting column of the lower supporting bracket 82 supports the high-purity copper target tube 03 at the moment, the coaxiality of the high-purity copper target tube 03 and the rotary clamping device 63 is kept, and the high-purity copper rotary target 02 is prevented from shaking in the rotating process.

7.4) straightening and heating, namely moving the heating device 61 to an end welding interface, and heating the temperature of the end welding interface to 300-500 ℃ through the heating device 61; the optimal heating value range is 380-420 ℃, the melting point of the copper alloy is about 1083 ℃, the copper alloy is softer than the copper alloy in a normal temperature state under the condition of the heating temperature, when the copper alloy is manually straightened, the copper alloy end 04 can be pushed by only using smaller jacking force, the operation difficulty coefficient is reduced, the straightening accuracy is better improved, meanwhile, the copper alloy end 04 can be pushed to a position needing straightening in a shorter time, the straightening time is favorably shortened, the production efficiency is improved, the straightening part is directly and rigidly pushed and straightened by the existing straightening mode without heating, the operation difficulty is high, the straightening part can reach the position needing straightening by using larger jacking force, the straightening time is long, and the high-purity copper rotary target 02 is easily damaged by rigid pushing.

Preferably, the heating device 61 is ring-shaped, in the alignment heating step, the heating device 61 is heated around the end welding port, the heating device 61 is arranged with a certain length along the axial direction of the high-purity copper rotating target 02, and can also cover the area beside the end welding port, and the enlarged heating area is easier to align. The heating device 61 may be heated by various methods, including but not limited to liquid fuel heating, gas fuel heating, electric heating element heating, electromagnetic induction heating, ultrasonic heating, and the like.

More specifically, the end weld joint is heated by the heating device 61 surrounding the setting along the axis direction of the copper alloy end 04, the copper alloy end 04 is cooled by the cooling part 62 arranged beside the heating device 61, the cooling part 62 is arranged above the port of the copper alloy end 04, and the temperature of the end weld joint and the flange is measured by the temperature measuring part arranged on one side of the copper alloy end 04.

Wherein, the straightening device comprises a controller 65, and the heating device 61, the cooling part 62 and the temperature measuring part are respectively and electrically connected to the controller 65.

Specifically, in the straightening and heating step, the first locking part and the second locking part are connected in a locking manner, the top surfaces of the bearing columns of the upper bearing bracket 81 and the lower bearing bracket 82 are respectively abutted against the outer wall of the high-purity copper target tube 03, and the high-purity copper rotary target 02 is locked and positioned by the fixed bearing brackets; preferably, the lower supporting bracket 82 is provided with two supporting columns, the upper supporting bracket 81 is provided with one supporting column, the supporting columns of the upper supporting bracket 81 are arranged on a symmetry axis in the vertical direction of the high-purity copper rotating target 02, and the three supporting columns are respectively and evenly distributed along the circumference of the fixed supporting device 80 at intervals. Two bearing columns of the lower bearing bracket 82 support the high-purity copper rotary target 02 respectively, the coaxiality of the high-purity copper rotary target 02 and the rotary clamping device 63 is guaranteed, the high-purity copper rotary target 02 is located in the fixed bearing hole, the bearing column of the upper bearing bracket 81 is matched with the bearing column of the lower bearing bracket 82, the high-purity copper rotary target 02 is locked and clamped by the first locking portion and the second locking portion, the high-purity copper rotary target 02 is prevented from moving during alignment, and preparation is made for semi-automatic alignment.

7.5) and a semi-automatic straightening step, wherein the abutting part 71 is lifted to push against the outer straightening point, so that the copper alloy end 04 is deformed along the radial direction, the straightness between the high-purity copper target tube 03 and the copper alloy end 04 is improved, the lowest point of the measuring rod is abutted against the inner straightening point, the semi-automatic straightening device 70 is manually controlled to enable the abutting part 71 to lift to push against the outer straightening point, when the added value of the measuring meter is equal to the straightening value, the operation of the semi-automatic straightening device 70 is manually stopped, meanwhile, the heating device 61 stops heating the end welding port, and the high-purity copper rotary target 02 is cooled to the normal temperature.

The semi-automatic straightening device 70 comprises a jack controller, a motor, a quantitative transmission rod and a jack, wherein the jack comprises an abutting part 71, a power input end 72 and an abutting driving part 73, the abutting driving part 73 is in driving connection with the abutting part 71, the power input end 72 is connected with the abutting driving part 73, the jack controller is electrically connected with the motor, the output end of the motor is connected with the quantitative transmission rod, the quantitative transmission rod is connected with the power input end 72, the motor drives the quantitative transmission rod to rotate so that the power input of the power input end 72 is quantitative input, and therefore the abutting distance of the abutting part 71 is quantitatively controlled; the existing detection and correction machine is an automatic correction machine, the measurement result or the correction value of the automatic correction needs to be transmitted to the controller 65 through a circuit, the controller 65 analyzes and processes related data and then feeds back a control command to the execution component for execution, time is needed for data transmission, analysis, feedback and execution component reaction, although the time is short, the relative hysteresis of the execution component action is caused by a time difference between the data transmission and the data analysis and the execution of the execution component, and the high-purity copper target tube 03 is subjected to overpressure due to the fact that the execution is not timely due to the fact that the execution is delayed. The straightening method provided by the invention is operated by manually controlling the semi-automatic straightening device 70, data transmission, analysis and feedback execution are not needed, the straightening operation is timely, more specifically, the existing manual straightening determines the ascending pushing distance of the straightening device according to the judgment of the experience of an operator, the accuracy is difficult to guarantee, and meanwhile, the production efficiency is low. The semi-automatic straightening method controls the rotation of the output shaft of the motor through the jack controller, transmits the rotation power of the output shaft of the motor to the power input end 72 through the quantitative transmission rod, ensures that the power of the power input end 72 is quantitative, ensures that the ascending pushing distance of the abutting part 71 is quantitative, and simultaneously ensures the straightening accuracy of the semi-automatic straightening device 70. The semi-automatic straightening method has high straightening precision and high production efficiency. Because of heating the terminal weld joint before the alignment, the copper alloy end 04 material during the alignment becomes soft, and the alignment can be realized to the manual work utilizing the less jacking force of semi-automatic coalignment 70, easy operation more is favorable to improving the accuracy of alignment, and the time spent is short, and the alignment precision is high. The heating part is cooled after being straightened, so that the copper alloy end 04 is fixed by soft hardening, the straightening effect is more favorably kept, and the straightening effect is good. Preferably, the semi-automatic straightening device 70 is a jack with 5T ballast specification, and the jacking force of the jack with 5T specification is more suitable for the hardness of the copper alloy end 04 of the invention when the copper alloy end is heated to 300-500 ℃.

More specifically, in the semi-automatic straightening step, the temperature measuring unit measures the temperature of the port edge of the copper alloy tip 04, when the temperature of the port edge of the copper alloy tip 04 is greater than 40 ℃, the controller 65 starts the cooling unit 62 to cool the port edge of the copper alloy tip 04, and when the temperature of the port edge of the copper alloy tip 04 is less than or equal to 40 ℃, the controller 65 controls the cooling unit 62 to stop cooling the port edge of the copper alloy tip 04. Port edge to copper alloy end 04 cools down, prevents that the temperature of temperature measurement department is high and receive the damage, and temperature measurement portion works in suitable operating temperature and suitable humidity simultaneously, guarantees that temperature measurement portion's measurement is accurate. Cooling portion 62 comprises a hard stay tube of material and an output tube with adjustable shape, stay tube and output tube connection, the mouth of pipe position of output tube accessible change the crookedness of output tube and adjusting the output tube, the mouth of pipe position of output tube generally is located the top at the port edge of copper alloy end 04, there are a variety to the cooling mode of copper alloy end 04 through cooling portion 62 realization, include but not only be limited to and utilize liquid cooling or gaseous cooling, if cooling portion 62 cools down with the mode of dripping in the top at the port edge of copper alloy end 04.

In the semi-automatic straightening step, when the heating device 61 stops heating the end welding port, the controller 65 starts the cooling part 62 to cool the end welding port, and simultaneously the controller 65 starts the temperature measuring part to measure the temperature of the end welding port, and when the temperature of the end welding port measured by the temperature measuring part reaches a normal temperature value (the normal temperature value refers to a temperature of about 25 ℃), the controller 65 controls the cooling part 62 to stop cooling the end welding port.

In the semi-automatic alignment step, after the operation of the power input end 72 is manually stopped, the locking connection between the first locking part and the second locking part is released, and the high-purity copper rotary target 02 can rotate relative to the top surface of the support column, so that preparation is made for the rotation of the high-purity copper rotary target 02 in the alignment inspection step.

6) And a straightening inspection step, namely after the high-purity copper rotary target 02 is cooled to normal temperature, repeating the straightening point determining step to perform straightening inspection on the straightness of one end of the high-purity copper rotary target 02 provided with the copper alloy end 04, finishing the straightening if the straightening value measured by the measuring meter is less than or equal to 0.3mm, repeating the straightening heating step, the semi-automatic straightening step and the straightening inspection step if the straightening value measured by the measuring meter is greater than 0.3mm, and finishing the straightening until the straightening value is less than or equal to 0.3mm in the straightening inspection step.

The following is the comparison of the experimental data of the alignment procedure of the present invention with the data of the existing full-automatic alignment method:

contrast item	The alignment method of the alignment step of the present invention	Existing full-automatic straightening method
			Proportion of 1-time qualified alignment	100%	76%
Proportion of qualified products after 2 times of straightening	0	21%
			Proportion of qualified products aligned for more than 2 times	0	3%
Mean value of alignment coaxiality tolerance	0.17mm	0.26mm
			When aligned once for use	10-17 min/time	15-35 min/time
When aligned once for average use	13 minutes	25 minutes

Table 1 shows the comparison of the experimental data of the present invention with the data of the prior alignment method

Table 1 shows that the advantageous effects of the alignment method of the alignment step of the present invention over the prior art are:

1. the invention adopts a semi-automatic straightening method to realize the straightening of the high-purity copper rotary target 02 aiming at the high-purity copper rotary target 02 with softer metal material, avoids the overpressure phenomenon generated on the high-purity copper rotary target 02 due to the reaction hysteresis caused by the time needed by data analysis, feedback and action reaction in the automatic straightening, and has high reaction speed of manual straightening and good straightening effect.

2. The welding joint of the high-purity copper rotating target 02 is heated in the straightening process, the high-purity copper rotating target 02 is straightened under the condition that the material of the high-purity copper rotating target 02 is relatively soft but not melted, the high-purity copper rotating target 02 can be pushed only by using smaller jacking force, the operation difficulty coefficient is reduced, the straightening accuracy is better improved, and meanwhile, the welding joint is heated during straightening and cooled after straightening, so that the welding joint is fixed by soft hardening, and the straightening effect is better maintained.

3. The straightening method is a detection device with high manual straightening and combination precision, so that the straightening precision is higher, repeated straightening is avoided, the straightening production efficiency is improved, and the straightened high-purity copper rotary target 02 has high yield.

The straightening apparatus according to the present invention is described in detail below.

The straightening apparatus, as shown in fig. 6 to 7, includes a frame 60 and a heating device 61, the frame 60 is provided with a first end and a second end, the heating device 61 is installed at the second end of the frame 60, the first end of the frame 60 is provided with a rotating clamping device 63, the second end of the frame 60 is provided with a fixed supporting device 80, the fixed supporting device 80 is slidably installed on the frame 60, the second end of the frame 60 is provided with a semi-automatic straightening device 70, the semi-automatic straightening device 70 is installed outside the fixed supporting device 80, and the second end of the frame 60 is provided with a straightening measuring device 64 for measuring the straightness of the high-purity copper rotating target 02.

The outer side of the fixed bearing means 80 is the side of the fixed bearing means 80 to the second end of the frame 60 and the inner side of the fixed bearing means 80 is the side of the fixed bearing means to the first end of the frame 60. The inner side of the fixed bearing hole is the side closer to the central point of the fixed bearing hole.

Specifically, the heating device 61 is used for heating the copper alloy end 04 of the high-purity copper rotary target 02, the heating device 61 is arranged around the copper alloy end 04, the cooling part 62 is arranged beside the heating device 61, the cooling part 62 is positioned above the port edge of the copper alloy end 04, the heating device 61 heats one end of the high-purity copper rotary target 02 which needs to be straightened, so as to soften the copper alloy end 04 for straightening, the cooling part 62 is used for cooling the heated metal, the heating device 61 further comprises a temperature measuring part which measures the temperature of the port edge of the copper alloy end 04, if the temperature of the port edge of the copper alloy end 04 is too high, the temperature lowering part 62 is activated to lower the temperature of the port edge of the copper alloy tip 04, and when the temperature of the temperature measuring part is lowered to a predetermined temperature, the temperature lowering section 62 stops lowering the temperature of the port of the copper alloy tip 04, and the temperature of the port of the copper alloy tip 04 is maintained within a predetermined temperature range during the straightening. This rotatory target 02 of high-purity copper heats earlier the alignment afterward cooling is fixed again, prevents the alignment bounce, and the alignment is effectual.

Specifically, the fixed bearing device 80 is provided with an upper bearing bracket 81 and a lower bearing bracket 82, the upper bearing bracket 81 is hinged to the lower bearing bracket 82, the lower bearing bracket 82 is slidably mounted in the middle of the rack 60, after the upper bearing bracket 81 and the lower bearing bracket 82 are connected and fixed, a hollow fixed bearing hole is formed in the middle of the fixed bearing device 80 along the length direction of the straightening device, and at least two fixed bearing columns are formed in the inner side of the fixed bearing hole in a protruding manner towards the central point direction of the fixed bearing hole. The upper bearing bracket 81 and the lower bearing bracket 82 provide a bearing space for the high-purity copper rotary target 02, the rotary target passes through the fixed bearing hole, one end of a copper alloy tail cover 05 of the high-purity copper rotary target 02 is fixed on the rotary clamping device 63, a copper alloy end 04 is placed at one end close to the semi-automatic straightening device 70, the high-purity copper rotary target 02 is driven to rotate through clamping and fixing of the rotary clamping device 63, more specifically, the rotary clamping device 63 is a three-jaw chuck, and the high-purity copper rotary target 02 can rotate relative to the fixed degree device.

More specifically, a locking device 83 is provided on one side of the fixed supporting device 80, and various locking connection structures can be used for the locking purpose, such as a snap-fit structure or a screw connection, and the locking device 83 includes a first locking portion provided on one side of the supporting bracket 81 and a second locking portion provided on the lower supporting bracket 82, the position of the second locking portion corresponds to the position of the first locking portion, and the first locking portion is in locking connection with the second locking portion, preferably, the first locking portion is in screw connection with the second locking portion.

The frame 60 is provided with a controller 65, and the controller 65 is connected with the rotary clamping device 63 in a control mode. The rotating and clamping device 63 is used for rotating the high-purity copper rotating target 02 under the control of the controller 65, and during operation, workers only need to control the controller 65 to rotate the high-purity copper rotating target 02.

The rotating clamping device 63 and the fixed supporting device 80 are coaxially arranged, and the high-purity copper rotating target 02 is coaxially arranged with the rotating clamping device 63 and the fixed supporting device 80 respectively.

The welding surface of the copper-copper alloy end 04 is abutted against and coaxially mounted with the welding surface of the high-purity copper target tube 03, a connecting part 21 is arranged on the welding surface of the copper-copper alloy end 04, a mounting part 11 is arranged on the welding surface of the high-purity copper target tube 03, a connecting top platform 22 is arranged on the outer edge of the connecting part 21, a mounting step 12 is arranged on the outer edge of the mounting part 11, the connecting part 21 is mounted on the mounting part 11, a first abutting surface 23 is arranged on the inner side of the connecting part 21 opposite to the outer edge, a second abutting surface 13 is arranged on the inner side of the mounting part 11 opposite to the outer edge, the second abutting surface 13 is obliquely arranged relative to the axis of the mounting part 11, the position, the inclination and the shape of the first abutting surface 23 are respectively matched with the second abutting surface 13, and when the connecting part 21 is positioned and connected with the mounting part 11, the first abutting surface 23 is abutted against the second abutting, the connecting top platform 22 is mounted flush with the mounting step 12.

The inner side and the outer side of the high-purity copper target tube 03 and the copper alloy end 04 are relative concepts, the side closer to the axial line position of the high-purity copper target tube 03 and the copper alloy end 04 is the inner side, and the side far away from the axial line position of the high-purity copper target tube 03 and the copper alloy end 04 is the outer side or the outer edge. The outer and inner sides of the first attachment surface 23 and the second attachment surface 13 are: the side closer to the axial line positions of the high-purity copper target tube 03 and the copper alloy tip 04 is the inner side, and the side far away from the axial line positions of the high-purity copper target tube 03 and the copper alloy tip 04 is the outer side or the outer edge. The end of the high-purity copper target tube 03, which has a contact surface with the copper alloy end 04, is the inner end of the copper alloy end 04, and the end away from the high-purity copper target tube 03 and the copper alloy end 04 is the outer end of the copper alloy end 04, i.e. the end of the high-purity copper target tube 03, which has no contact surface with the copper alloy end 04, is the outer end of the copper alloy end 04.

After the copper alloy end 04 is welded with the high-purity copper target tube 03, the connecting step 24 is in surface contact with the mounting top platform 14, the mounting step 12 is in surface contact with the connecting top platform 22, and the first binding surface 23 is in surface contact with the second binding surface 13.

The invention sets the first binding face 23 on the connecting part 21, the second binding face 13 on the mounting part 11, when the connecting part 21 and the mounting part 11 are positioned and welded, the first binding face 23 and the second binding face 13 are surface-mounted in surface contact, the mounting step 12 and the connecting top platform 22 are surface-mounted in surface contact, thereby forming a clamping and positioning structure, so that the high-purity copper target tube 03 and the copper alloy end 04 are fixed, because the contact face of the high-purity copper target tube 03 and the copper alloy end 04 is composed of the first binding face 23, the second binding face 13, the connecting top platform 22 and the mounting step 12, the four faces are respectively surface-contacted correspondingly in pairs, the contact face between the faces is increased, the contact between the faces is more stable and firm, the shaking or moving condition is effectively avoided, and the first binding face 23 and the second binding face 13 are an inclined plane, and a certain angle is formed with the connecting top platform 22 and the mounting step 12 correspondingly, the positions of the high-purity copper target material pipe 03 and the copper alloy end 04 are limited and fixed, dislocation or displacement of the high-purity copper target material pipe 03 and the copper alloy end 04 in the welding process is effectively prevented, fixing and positioning of a welding interface are effectively guaranteed, and the welding effect of the interface is good.

In a more preferred embodiment, one side end of the first attachment surface 23 is connected to the connecting top platform 22, the other side end of the first attachment surface 23 is provided with a connecting step 24, one side end of the second attachment surface 13 is connected to the mounting step 12, the other side end of the first attachment surface 23 is provided with the mounting top platform 14, the connecting step 24 and the mounting top platform 14 are adapted in position and shape, the mounting step 12 and the connecting top platform 22 are adapted in position and shape, when the connecting portion 21 and the mounting portion 11 are connected in a positioning manner, the connecting step 24 and the mounting top platform 14 are connected in a propping manner, and the mounting step 12 and the connecting top platform 22 are connected in a propping manner. Increased at connecting portion 21 and connected step 24, installation department 11 has increased installation top platform 14, when connecting portion 21 and installation department 11 location installation, connect step 24 and the installation top platform 14 wainscot installation, thereby further increased the area of contact of connecting portion 21 with installation department 11, make the location of connecting portion 21 and installation department 11 more firm, first binding face 23 is an inclined plane with second binding face 13 simultaneously, respectively correspondingly with connect step 24 and installation top platform 14 and be formed with certain angle, make high pure copper target pipe 03 and copper alloy end 04's position further spacing fixed.

Specifically, the first attachment surface 23 forms a first included angle with the axis, the first included angle is 10 degrees to 45 degrees, the second attachment surface 13 forms a second included angle with the axis, the first included angle is 10 degrees to 45 degrees, and the first included angle and the second included angle are equal. Preferably, the angle between the first included angle and the second included angle is 10 degrees to 25 degrees, and when the angle between the first included angle and the second included angle is 10 degrees to 45 degrees, the angle between the first attaching surface 23 and the second attaching surface 13 is smaller, so that the whole contact surface of the connecting portion 21 and the mounting portion 11 is stable in structure and durable. The contact surface structure refers to a surface structure formed by correspondingly contacting and attaching the connecting step 24, the mounting step 12, the connecting top platform 22, the mounting top platform 14, the first attaching surface 23 and the second attaching surface 13.

Specifically, the connecting portion 21 protrudes from the end face of the copper alloy end 04, and the mounting portion 11 protrudes from the end face of the high purity copper target tube 03.

More specifically, the connecting step 24, the mounting step 12, the connecting top platform 22 and the mounting top platform 14 are all annular, the connecting step 24 has the same cross section as the mounting top platform 14, the mounting step 12 has the same cross section as the connecting top platform 22, the connecting top platform 22 is located on the end face of the copper alloy end 04, the connecting step 24 is far away from the end face of the copper alloy end 04 connected with the top platform 22, the mounting top platform 14 is located on the end face of the high-purity copper target tube 03, and the mounting step 12 is far away from the end face of the high-purity copper target tube 03 provided with the mounting top platform 14.

In a preferred embodiment, as shown in fig. 8, the first attaching surface 23 is located between the connecting step 24 and the connecting top platform 22, the connecting step 24 is located inside the first attaching surface 23, the connecting top platform 22 is located outside the first attaching surface 23, the second attaching surface 13 is located between the mounting step 12 and the mounting top platform 14, the mounting top platform 14 is located inside the second attaching surface 13, and the mounting step 12 is located outside the second attaching surface 13.

The connecting part 21 comprises a connecting wall body 25 protruding out of the end face of the copper alloy end 04, the connecting wall body 25 is positioned outside the copper alloy end 04, the mounting part 11 comprises a mounting wall body 15 protruding out of the end face of the high-purity copper target pipe 03, and the mounting wall body 15 is positioned inside the high-purity copper target pipe 03.

The fixture device comprises a counter pull rod 40, a top cover 30 and a top cover fixing piece 31, wherein the high-purity copper target material pipe 03, the copper alloy end 04 and the copper alloy tail cover 05 are coaxially arranged, and the middle parts of the high-purity copper target material pipe 03 and the copper alloy end 04 in the axial direction are respectively hollow. The top cover 30 is used for abutting against a copper alloy end 04 which is coaxially arranged with the high-purity copper target material pipe 03; the counter-pull rod 40 is used for penetrating through the high-purity copper target tube 03 and movably connected with the copper alloy tail cover 05 of the high-purity copper target tube 03; one end face of the top cover 30 is abutted and mounted at the outer end of the copper alloy end 04, an opposite-pulling through hole is formed in the middle of the top cover 30 along the axis direction of the top cover 30, a first connecting portion 41 and a second connecting portion 42 are respectively arranged at two ends of the opposite-pulling rod 40, the first connecting portion 41 penetrates through the opposite-pulling through hole to be movably abutted and connected with the top cover fixing member 31, the top cover fixing member 31 is matched with the first connecting portion 41 in shape and size, and the second connecting portion 42 is movably connected with the copper alloy tail cover 05.

The end of the copper alloy end 04 far away from the end of the high-purity copper target tube 03 is the outer end of the copper alloy end 04, and the end of the copper alloy end 04 closer to the end of the high-purity copper target tube 03 is the inner end of the copper alloy end 04. The end of the copper alloy tail cover 05 far away from the end of the high-purity copper target tube 03 is the outer end of the copper alloy tail cover 05, and the end of the copper alloy tail cover 05 closer to the end of the high-purity copper target tube 03 is the inner end of the copper alloy tail cover 05. The end of the top cover 30 far away from the end of the high-purity copper target tube 03 is the outer end of the top cover 30, and the end of the top cover 30 closer to the end of the high-purity copper target tube 03 is the inner end of the top cover 30.

The high-purity copper target tube 03 is a target tube made of copper metal with purity of more than 4N, the high-purity copper target tube 03 is high in metal purity, particularly a pure copper tube, and is soft in texture, the high-purity copper target tube 03 can be used only by fixing the high-purity copper target tube 03 through a fixing device when in use, the high-purity copper target tube 03 is soft in texture, the high-purity copper target tube 03 is directly fixed on the high-purity copper target tube 03 through the fixing device when in use, deformation of the high-purity copper target tube 03 is easily caused, therefore, a copper alloy end 04 and a copper alloy tail cover 05 which are hard in texture are respectively arranged at two ends of the high-purity copper target tube 03, the fixing device is respectively fixed at the copper alloy end 04 and the copper alloy tail cover 05, and deformation of the high-purity copper target tube 03 can be effectively prevented due.

The copper alloy end 04 and the copper alloy tail cover 05 need to be welded and installed at two ends of the high-purity copper target tube 03, before welding, the copper alloy end 04 and the copper alloy tail cover 05 need to be fixed and positioned with the high-purity copper target tube 03 respectively by using the fixture device, so that displacement or dislocation in the welding process is prevented, and meanwhile, the high-purity copper target tube 03 is prevented from deforming.

Because the high-purity copper target tube 03 and the copper alloy end 04 are both hollow, the clamp device firstly inserts the counter-pull rod 40 into the hollow part of the high-purity copper target tube 03, the second connecting part 42 of the counter-pull rod 40 reaches one end of the high-purity copper target tube 03 connected with the copper alloy tail cover 05, the second connecting part 42 is fixedly connected with the copper alloy tail cover 05, the top cover 30 is arranged at the first connecting part 41 of the counter-pull rod 40 at the end of the high-purity copper target tube 03 provided with the copper alloy end 04, then the top cover fixing part 31 is fixedly connected with the first connecting part 41, after the fixing part and the first connecting part 41 are arranged, the inner end part of the top cover 30 is connected with the outer end part of the copper alloy end 04 in an abutting mode, and the inner end part of the copper alloy tail cover 05 is connected. This fixture device directly contacts the clamping with copper alloy end 04 and copper alloy tail-hood 05 respectively, the material of copper alloy end 04 and copper alloy tail-hood 05 is harder, be difficult to warp, thereby avoided high-purity copper target pipe 03 to take place because the clamping condition of deformation appears excessively tight, thereby guaranteed the welding quality of interface when copper alloy end 04 and copper alloy tail-hood 05 respectively with high-purity copper target pipe 03 assembly welding, the condition of aversion or dislocation in the welding process has been prevented from taking place, and simultaneously, this fixture device overall structure is simple and practical.

Specifically, the top cover fixing member 31, the top cover 30, the counter pull rod 40, the copper alloy end 04, the high-purity copper target tube 03 and the copper alloy tail cover 05 are all coaxially mounted. The opposite-pulling through hole penetrates through the top cover 30 and comprises a connecting hole 32 and a connecting cavity 33, the connecting hole 32 is connected with the connecting cavity 33, the connecting hole 32 is located at the outer end of the top cover 30, the connecting cavity 33 is located at the inner end of the top cover 30, a rod body 43 is arranged in the middle of the opposite-pulling rod 40, two ends of the rod body 43 are respectively connected with the first connecting portion 41 and the second connecting portion 42, the cross section of the connecting hole 32 is matched with the shape and the size of the cross section of the first connecting portion 41, and/or the cross section of the rod body 43 is matched with the shape and the size of the cross section of the connecting cavity 33, when the opposite-pulling rod 40 is installed on the top cover 30, one end of the rod body 43 is located in the. Connection mounting hole 53 has been seted up at top cap mounting 31's middle part, the inner wall of connecting mounting hole 53 is provided with the screw thread, the lateral wall of first connecting piece encircles and is provided with the screw thread, first connecting piece inserts connection mounting hole 53 and top cap mounting 31 threaded connection, the cross section of connecting hole 32 and the shape size phase-match of the cross section of first connecting portion 41, or the cross section of the body of rod 43 and the shape size phase-match of the cross section of connecting chamber 33 are in order to make to be fixed in top cap 30 to pull rod 40, prevent to rock after pull rod 40 is fixed.

One end surface of the rod body 43 is located at the middle of the connecting cavity 33. After the whole fixture device is installed, one end face of the rod body 43 is located in the middle of the connecting cavity 33, so that when the pull rod 40 and the top cover 30 are installed, sundries exist between one end of the rod body 43 and the connecting hole 32, the top cover 30 and the copper alloy end 04 cannot be connected in an abutting mode, clamping is not tight, and the fixing effect of the fixture is affected.

The inner end of the top cover 30 is reduced towards the center direction and protrudes along the axis direction to form an embedded platform 34, the embedded platform 34 is embedded and installed at the outer end part of the copper alloy end 04, and the shape and the size of the embedded platform 34 are matched with the shape and the size of the hollow part of the outer end part of the copper alloy end 04. The embedded platform 34 is clamped at the outer end part of the copper alloy end 04, so that the top cover 30 is positioned in the hollow part of the copper alloy end 04, and relative shaking between the top cover 30 and the copper alloy end 04 is effectively prevented.

The first connection portion 41 is movably connected with the top cover fixing member 31, and the second connection portion 42 is movably connected with the copper alloy tail cover 05, however, there are various movable connection manners, such as a snap connection, a threaded connection, and the like, which can realize the connection structure of the present invention, and preferably, the threaded connection manner is adopted, the first connection portion 41 is threadedly connected with the top cover fixing member 31, and the second connection portion 42 is threadedly connected with the copper alloy tail cover 05. The thread connection can adjust the tightness between the 21 threaded connection parts in real time according to the length of the specific high-purity copper target material pipe 03, and the controllability is larger, the application range is wider, fine adjustment can be performed according to specific conditions, and the practical use is more convenient. More specifically, the inner end face of the copper alloy tail cover 05 is convexly provided with a connecting column 27, the second connecting portion 42 is in threaded connection with the connecting column 27, and after the opposite pull rod 40 and the copper alloy tail cover 05 are installed, the end face of the connecting column 27 abuts against the end face of the rod body 43.

When the copper alloy end 04 and the copper alloy tail cover 05 are respectively welded and assembled with the high-purity copper target tube 03, the copper alloy tail cover 05 needs to be fixed on a welding device, and the copper alloy tail cover 05 is small in height and difficult to fix, so that the tail cover 50 is installed at the outer end part of the copper alloy tail cover 05, specifically, the clamp device comprises the tail cover 50 and a tail cover fixing piece 51, an installation through hole is formed in the middle of the tail cover 50 along the axis direction, and the tail cover fixing piece 51 penetrates through the installation through hole to be connected with the copper alloy tail cover 05.

The inner end face of the tail cover 50 is recessed to form a mounting cavity 52, the outer end part of the copper alloy tail cover 05 is mounted in the mounting cavity 52, the shape and size of the mounting cavity 52 are matched with the shape and size of the outer contour of the copper alloy tail cover 05, and after the clamp device and the copper alloy end 04 are mounted, the outer end face of the copper alloy tail cover 05 abuts against the mounting cavity 52. The outer end of the copper alloy tail cover 05 is embedded in the mounting cavity 52, so that the copper alloy tail cover 05 and the mounting cavity 52 are fixed in a limiting mode, and the copper alloy tail cover 05 is prevented from shaking relative to the mounting cavity 52.

The mounting through hole comprises a mounting hole 53 and a mounting channel 54, the mounting hole 53 is connected with the mounting channel 54, threads are arranged on the inner wall of the mounting hole 53, and the tail cover fixing piece 51 penetrates through the mounting channel 54 and then is in threaded connection with the copper alloy tail cover 05 through the mounting hole 53. The outer end part of the copper alloy tail cover 05 is provided with a mounting connection hole 32, threads are arranged in the mounting connection hole 32, threads are arranged on the inner wall of the mounting hole 53, the tail cover fixing piece 51 is of a screw structure, the tail cover fixing piece 51 is in threaded connection with the mounting hole 53, meanwhile, the tail cover fixing piece 51 penetrates through the mounting hole 53 to be in threaded connection with the mounting connection hole 32 at the outer end part of the copper alloy tail cover 05, and therefore the tail cover 50 is mounted on the copper alloy tail cover 05.

The mounting hole 53 is provided coaxially with the mounting cavity 52, and the cross section of the mounting hole 53 is smaller than that of the mounting cavity 52. Thereby the tip bulge of afterbody mounting can block in the terminal surface between installation cavity 52 and mounting hole 53, further reaches spacing fixed purpose, has further strengthened the clamping effect.

The following table 2 is a comparison of experimental data of the tip welding method of the present invention with data of the existing tip full circle one-time welding method:

contrast item	The invention relates to a method for welding end heads	Existing end head rounding one-time welding method
			Ratio of qualified welding for 1 welding	95%	75%
Ratio of qualified welding after reworking	5%	25%
			Proportion of welding finished for 1 time and qualified without straightening	85%	30%
Proportion of welding finished for 1 time and straightening qualified for 1 time	14%	52.5%
			Average value of target coaxiality tolerance after 1 welding	0.27mm	0.55mm

Table 2 shows the comparison of the experimental data of the present invention with the data of the prior alignment method

The above comparative terms are explained below:

the proportion of qualified welding in one welding process means the proportion of qualified leakage rate detected after the copper alloy end 04 and the copper alloy tail cover 05 are respectively welded with the high-purity copper target material pipe 03.

The proportion that welding is qualified after reworking means that the copper alloy end 04 and the copper alloy tail cover 05 are welded with the high-purity copper target material pipe 03 respectively, but the detected leakage rate is unqualified, and the unqualified part of the leakage rate needs to be welded again and detected again until the proportion is qualified.

The proportion of qualified welding which is finished at one time and does not need to be straightened means that the leakage rate of the copper alloy end 04 and the copper alloy tail cover 05 which are respectively welded with the high-purity copper target tube 03 is qualified, and meanwhile, the proportion of qualified straightness of the copper alloy end 04 and the high-purity copper target tube 03 is also detected.

The proportion that the welding is completed once and the straightening is qualified once means that the copper alloy end 04 and the copper alloy tail cover 05 are respectively welded with the high-purity copper target pipe 03, the leakage rate is detected to be qualified, meanwhile, the straightness of the copper alloy end 04 and the high-purity copper target pipe 03 is detected to be unqualified, and the proportion that the straightness is qualified after the straightening is performed once is used.

The mean value of the target coaxiality tolerance after one welding means that the leakage rate of the copper alloy end 04 and the copper alloy tail cover 05 which are welded with the high-purity copper target pipe 03 respectively is qualified, and the mean value of the coaxiality tolerance between the copper alloy end 04 and the high-purity copper target pipe 03 is the mean value. (the tolerance value of the coaxiality between the copper alloy end 04 and the high-purity copper target material pipe 03 is less than or equal to 0.3mm, the copper alloy end is qualified)

Table 2 shows that the advantageous effects of the alignment method of the alignment step of the present invention over the prior art are:

1. the welding method can effectively reduce the overall temperature of the welding position of the welding end in the welding process, prevent the deformation caused by expansion with heat and contraction with cold due to large temperature difference between the welded area and the non-welded area of the welding end in the welding process, and has the advantages of small welding deformation, good welding effect, high yield and high welding efficiency.

The above description is only a preferred embodiment of the present invention, and for those skilled in the art, the present invention should not be limited by the description of the present invention, which should be interpreted as a limitation.

Claims

1. The welding method of the high-purity copper rotary target is characterized by comprising the following steps of:

1) a cleaning step, cleaning the welding surface and the surface of the high-purity copper rotary target (02) to remove the oxidation layer and oil stain on the welding surface and the surface of the high-purity copper rotary target (02),

the high-purity copper rotary target (02) comprises a high-purity copper target pipe (03), a copper alloy end (04) and a copper alloy tail cover (05), wherein the copper alloy end (04) and the copper alloy tail cover (05) are respectively installed at two ends of the high-purity copper target pipe (03), one ends of the copper alloy end (04) and the copper alloy tail cover (05) are respectively provided with a welding surface, two ends of the high-purity copper target pipe (03) are respectively provided with a welding surface, and the welding surfaces of the copper alloy end (04) and the copper alloy tail cover (05) are respectively abutted to the welding surface of the high-purity copper target pipe (03);

the welding surface of the copper alloy end (04) and the welding surface of the high-purity copper target tube (03) are butted and connected to form a tube outer wall connecting gap which is an end welding port, the welding surface of the copper alloy tail cover (05) and the welding surface of the high-purity copper target tube (03) are butted and connected to form a tube outer wall connecting gap which is a tail cover welding port, the end welding port or the tail cover welding port fixed on the rotary fixing part is a welding end, and the end welding port or the tail cover welding port which is not fixed on the rotary fixing part is a to-be-welded end;

2) fixing a copper alloy end (04) and a copper alloy tail cover (05) at two ends of a high-purity copper target tube (03) by using a fixture device to form a high-purity copper welding target tube, placing a high-purity copper rotary target (02) in vacuum electron beam welding equipment, fixing the copper alloy end (04) or the copper alloy tail cover (05) at a rotary fixing part of the vacuum electron beam welding equipment,

4) and a welding step, comprising the following sub-steps,

4.1) and spot welding and positioning, wherein four welding points are respectively subjected to spot welding through an electron beam of vacuum electron beam welding equipment, so that a copper alloy end head (04) or a copper alloy tail cover (05) of a welding end is preliminarily welded and positioned on a high-purity copper target pipe (03), the four welding points are respectively and evenly distributed at an end welding port or a tail cover welding port of the welding end, a first welding point (90) is opposite to a second welding point (91), a fourth welding point (93) is arranged between the first welding point (90) and the second welding point (91), a third welding point (92) is arranged between the second welding point (91) and the first welding point (90), a high-purity copper rotating target (02) is rotated through a rotary fixing part in the welding process, and the electron beam sequentially performs spot welding on the high-purity copper welding target pipe according to the first welding point (90), the second welding point (91), A third welding point (92) and a fourth welding point (93),

4.2) arc welding, wherein four welding arcs are evenly distributed at the end welding port or the tail cover welding port of the welding end, the four welding arcs are respectively welded in arc sections through electron beams of vacuum electron beam welding equipment, so that a copper alloy end (04) or a copper alloy tail cover (05) at the welding end is deeply welded and fixed on a high-purity copper target tube (03), a first welding arc (94) is arranged between a third welding point (92) and a first welding point (90) along the clockwise direction, a third welding arc (96) is arranged between the first welding point (90) and a fourth welding point (93), a second welding arc (95) is arranged between the fourth welding point (93) and a second welding point (91), a fourth welding arc (97) is arranged between the second welding point (91) and the third welding point (92), and a fixing part is rotated to rotate a high-purity copper rotary target (02) in the welding process, the high-purity copper welding target material tube is sequentially welded to a first welding arc (94), a second welding arc (95), a third welding arc (96) and a fourth welding arc (97) in an arc-dividing section along the clockwise direction by using an electron beam,

4.3) performing full-circle welding, namely performing circumferential welding on an end welding port or a tail cover welding port of a welding end in a clockwise direction through an electron beam of vacuum electron beam welding equipment, wherein a first welding point (90), a second welding point (91), a third welding point (92), a fourth welding point (93), a first welding arc (94), a second welding arc (95), a third welding arc (96) and a fourth welding arc (97) form a complete circumference of the end welding port or the tail cover welding port, rotating a fixing part to enable a high-purity copper rotating target (02) to rotate in a welding process to complete welding of the welding end, and inflating the vacuum electron beam welding equipment to relieve vacuum in the vacuum electron beam welding equipment;

6) and a post-finishing inspection step, wherein craters are removed from the welding positions of the end welding opening and the tail cover welding opening through a lathe, the airtightness of the welding positions of the end welding opening and the tail cover welding opening is detected by using a helium mass spectrometer leak detector, if the leakage rate of the welding positions is more than 4 multiplied by 10E-10 Pa.m. each second, the airtightness does not meet the requirement, one end with the airtightness not meeting the requirement is fixed on the rotary fixing part, and then 4.4, 6 and 6) are repeated, and the post-finishing inspection step is carried out until the leakage rates of the welding positions of the end welding opening and the tail cover welding opening are not more than 4 multiplied by 10E-10 Pa.m/s, so that the welding of the copper alloy end (04) and the copper alloy tail cover (05) with the high-purity copper target pipe (03) is completed.

2. The method for welding a high purity copper rotary target according to claim 1, wherein: the electron beam current in the spot welding positioning step is a first electron beam current, the intensity of the first electron beam current is set to be 20-30 milliamperes,

the electron beam current in the arc welding step is a second electron beam current, the intensity of the second electron beam current is set to be 60-80 milliamperes,

and the electron beam current in the full circle welding step is a third electron beam current, and the intensity of the third electron beam current is set to be 60-90 milliamperes.

3. The method for welding a high purity copper rotary target according to claim 2, wherein: in the step of spot welding positioning, the first welding point (90), the second welding point (91), the third welding point (92) and the fourth welding point (93) are respectively welded for 2-3 seconds, the welding depth is 1-2mm,

in the arc welding step, the first welding arc (94), the second welding arc (95), the third welding arc (96) and the fourth welding arc (97) are respectively welded for 2.5-5 seconds, the welding depth is 7-10mm,

in the full circle welding step, the circumferential welding time of the end welding port or the tail cover welding port is 12-18 seconds, and the welding depth is 5-7 mm.

4. The method for welding a high purity copper rotary target according to claim 3, wherein: in the target fixing step, the distance between the end welding port or the tail cover welding port and the rotating fixing part is set to be 200 mm.

5. The method for welding a high purity copper rotary target according to claim 4, wherein: the vacuum electron beam welding equipment comprises a movable welding platform, wherein at least one support frame is arranged in the middle of the movable welding platform in a sliding mode, one end of the movable welding platform is provided with a rotary fixing part and an electron beam emitter, the high-purity copper welding target tube is fixedly installed on the vacuum electron beam welding equipment through the rotary fixing part, the high-purity copper target tube (03) is rotatably placed on the support frame, and the rotary fixing part enables the high-purity copper welding target tube to rotate in the welding process.

6. The method for welding a high purity copper rotary target according to any one of claims 1 to 5, wherein: after the post-alignment checking step, the method also comprises 7) an alignment step, wherein the alignment step comprises the following substeps,

7.1) preparing, namely, hoisting and moving the high-purity copper rotary target (02) to straightening equipment, placing the high-purity copper rotary target on a rack (60) of the straightening equipment,

wherein the high-purity copper rotary target (02) comprises a high-purity copper target tube (03), a copper alloy end (04) and a copper alloy tail cover (05), the copper alloy end (04) and the copper alloy tail cover (05) are respectively welded with two ends of the high-purity copper target tube (03), an end welding opening is arranged at the joint of the copper alloy end (04) and the high-purity copper target tube (03), a flange is fixed on the outer wall of the end opening of the copper alloy end (04), and the flange and the copper alloy end (04) are coaxially arranged,

the straightening device comprises a rack (60), a heating device (61), a rotary clamping device (63), a fixed supporting device (80), a semi-automatic straightening device (70) and a straightening measuring device (64);

7.2) fixing, namely coaxially clamping and fixing one end of a high-purity copper rotating target (02) welded with a copper alloy tail cover (05) to a rotating clamping device (63) of straightening equipment, movably placing one end of the high-purity copper rotating target (02) welded with a copper alloy end (04) on a fixed supporting device (80), and rotating the high-purity copper rotating target (02) relative to the fixed supporting device (80) through the rotation of the rotating clamping device (63),

the semi-automatic straightening device (70) is positioned on the outer side of the fixed supporting device (80), the end welding port is positioned between the fixed supporting device (80) and the semi-automatic straightening device (70), and the heating device (61) is positioned above the end welding port;

7.31) and a measuring tool placing step, wherein the lowest end of a measuring rod of the straightening and measuring device (64) is abutted against the edge of the port of the inner wall of the copper alloy end head (04), the measuring rod is fixedly positioned at a position point, a corresponding initial numerical value is formed on a measuring meter by pressing the measuring rod downwards for a certain distance, and meanwhile, a certain downward measuring stroke is formed on the measuring rod,

wherein the straightening measuring device (64) is fixed on a frame (60) of the straightening equipment, the straightening measuring device (64) is provided with a measuring rod and a measuring meter, the measuring rod is connected with the measuring meter, the displacement change of the measuring rod is reflected in the value change of the measuring meter,

7.32) and a straightening point measuring step, wherein the copper alloy end (04) is rotated by starting the rotating and clamping device (63), if the copper alloy end (04) is not coaxial with the high-purity copper target tube (03), the copper alloy end (04) deflects in the rotating process, so that the measuring rod abutting against the edge of the port of the copper alloy end (04) moves up and down, the value in the measuring meter is correspondingly changed, and the maximum value and/or the minimum value of the maximum change amplitude of the relative initial value in the measuring meter is recorded,

7.33), an alignment point and an alignment value determining step, wherein the smallest value of the initial value, the largest maximum value of the variation amplitude of the initial value and the largest minimum value of the variation amplitude of the initial value is recorded as an inner alignment point, the inner alignment point and the axis of the high-purity copper target tube (03) form an alignment surface, the point of the outer wall of the flange plate of the port of the copper alloy end head (04) corresponding to the inner alignment point is determined as an outer alignment point, the inner alignment point and the outer alignment point are both positioned in the plane, the high-purity copper rotary target (02) is rotated by a rotating and clamping device (63) to rotate the alignment surface to be vertical, the outer alignment point is the lowest position of the alignment surface, the half of the difference between the maximum value of the variation amplitudes of the initial value and the maximum value of the variation amplitude of the initial value and the corresponding value of the measurement table of the inner alignment point is an alignment value, the outer alignment point is rotated to the lowest point of the high-,

7.34) fixing the straightening point, namely locking the fixed bearing device (80) to the high-purity copper rotary target (02) to ensure that the straightening surface is kept vertical, and keeping the outer straightening point at the lowest position of the straightening surface in the straightening process;

7.4) straightening and heating, namely moving the heating device (61) to the end welding interface, and heating the temperature of the end welding interface to 300-500 ℃ through the heating device (61);

7.5) semi-automatic straightening, namely, the abutting part (71) is lifted to push against the outer straightening point to enable the copper alloy end (04) to deform along the radial direction, so that the straightness between the high-purity copper target tube (03) and the copper alloy end (04) is improved, the lowest point of the measuring rod abuts against the inner straightening point, the semi-automatic straightening device (70) is manually controlled to enable the abutting part (71) to lift to push against the outer straightening point, when the added value of the measuring meter is equal to the straightening value, the operation of the semi-automatic straightening device (70) is manually stopped, meanwhile, the heating device (61) stops heating the end welding port, the high-purity copper rotary target (02) is cooled to the normal temperature,

the semi-automatic straightening device (70) comprises a jack controller, a motor, a quantitative transmission rod and a jack, wherein the jack comprises a butting part (71), a power input end (72) and a butting driving part, the butting driving part is in driving connection with the butting part (71), the power input end (72) is connected with the butting driving part, the jack controller is electrically connected with the motor, the output end of the motor is connected with the quantitative transmission rod, the quantitative transmission rod is connected with the power input end (72), and the motor drives the quantitative transmission rod to rotate so that the power input of the power input end (72) is quantitative input, and therefore the pushing distance of the butting part (71) is quantitatively controlled;

7.6) and a straightening inspection step, wherein after the high-purity copper rotary target (02) is cooled to normal temperature, the straightening point determining step is repeated to carry out straightening inspection on the straightness of one end of the high-purity copper rotary target (02) provided with the copper alloy end (04), if the straightening value measured by the measuring meter is less than or equal to 0.3mm, the straightening is finished, and if the straightening value measured by the measuring meter is greater than 0.3mm, the straightening heating step, the semi-automatic straightening step and the straightening inspection step are repeated until the straightening value is less than or equal to 0.3mm in the checking step, the straightening is finished.

7. The method for welding a high purity copper rotary target according to claim 6, wherein: the heating device (61) arranged around the axis direction of the copper alloy end (04) heats the end welding opening, the cooling part (62) arranged beside the heating device (61) cools the copper alloy end (04), the cooling part (62) is positioned above the port of the copper alloy end (04), the temperature of the end welding opening and the flange plate is measured by the temperature measuring part arranged at one side of the copper alloy end (04),

the straightening equipment comprises a controller (65), and the heating device (61), the cooling part (62) and the temperature measuring part are respectively and electrically connected to the controller (65).

8. The method of claim 7, wherein the welding of the high purity copper rotary target comprises: in the semi-automatic straightening step, the temperature measuring part measures the temperature of the port edge of the copper alloy end (04), when the temperature of the port edge of the copper alloy end (04) is higher than 40 ℃, the controller (65) starts the cooling part (62) to cool the port edge of the copper alloy end (04), when the temperature of the port edge of the copper alloy end (04) is less than or equal to 40 ℃, the controller (65) controls the cooling part (62) to stop cooling the port edge of the copper alloy end (04),

in the semi-automatic alignment step, heating device (61) stop right during the heating of end welding mouth, controller (65) start cooling portion (62) cool down end welding mouth, and controller (65) start simultaneously temperature measurement portion carries out temperature measurement to end welding mouth, and when temperature measurement portion measured end welding mouth's temperature and reached normal temperature value, controller (65) control cooling portion (62) stopped to cool down end welding mouth.

9. The method for welding a high purity copper rotary target according to claim 1, wherein: the welding surface of the copper alloy end (04) and the welding surface of the high-purity copper target tube (03) are abutted and coaxially mounted, a connecting portion (21) is arranged on the welding surface of the copper alloy end (04), an installation portion (11) is arranged on the welding surface of the high-purity copper target tube (03), a connecting top platform (22) is arranged at the outer edge of the connecting portion (21), an installation step (12) is arranged at the outer edge of the installation portion (11), the connecting portion (21) is installed on the installation portion (11), a first binding surface (23) is arranged on the inner side, opposite to the outer edge, of the connecting portion (21), the first binding surface (23) is obliquely arranged relative to the axis of the connecting portion (21), a second binding surface (13) is arranged on the inner side, opposite to the outer edge, of the installation portion (11), the second binding surface (13) is obliquely arranged relative to the axis of the installation portion (11, The inclination and the shape are respectively adapted to the second binding surface (13),

when the connecting part (21) is connected with the mounting part (11) in a positioning way, the first binding surface (23) and the second binding surface (13) are mounted in a binding way, and the connecting top platform (22) and the mounting step (12) are mounted in a binding way.

10. The method for welding a high purity copper rotary target according to claim 1, wherein: the clamp device comprises a top cover fixing piece (31), a top cover (30) and a counter pull rod (40),

the top cover (30) is used for abutting against the copper alloy end head (04) which is coaxially arranged with the high-purity copper target tube (03);

the counter-pull rod (40) is used for penetrating through the high-purity copper target material pipe (03) and movably connected with the copper alloy tail cover (05) of the high-purity copper target material pipe (03);

one end face of the top cover (30) abuts against and is installed at the outer end of the copper alloy end (04), a split through hole is formed in the middle of the top cover (30) along the axis direction of the top cover (30), a first connecting portion (41) and a second connecting portion (42) are respectively arranged at two ends of the split rod (40), the first connecting portion (41) penetrates through the split through hole to be movably abutted against and connected with the top cover fixing piece (31), the top cover fixing piece (31) is matched with the first connecting portion (41) in shape and size, and the second connecting portion (42) is movably connected with the copper alloy tail cover (05).