CN109640505A - A kind of large power high efficiency multipurpose microwave plasma torch - Google Patents
A kind of large power high efficiency multipurpose microwave plasma torch Download PDFInfo
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- CN109640505A CN109640505A CN201910137700.8A CN201910137700A CN109640505A CN 109640505 A CN109640505 A CN 109640505A CN 201910137700 A CN201910137700 A CN 201910137700A CN 109640505 A CN109640505 A CN 109640505A
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- 230000005540 biological transmission Effects 0.000 claims abstract description 11
- 239000007789 gas Substances 0.000 claims description 61
- 230000005284 excitation Effects 0.000 claims description 25
- 239000004020 conductor Substances 0.000 claims description 23
- 238000001914 filtration Methods 0.000 claims description 14
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 4
- 238000003780 insertion Methods 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 239000003570 air Substances 0.000 claims description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 239000001307 helium Substances 0.000 claims description 3
- 229910052734 helium Inorganic materials 0.000 claims description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 230000002035 prolonged effect Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000015556 catabolic process Effects 0.000 abstract description 4
- 210000002381 plasma Anatomy 0.000 description 108
- 150000002500 ions Chemical class 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003574 free electron Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 101000688543 Homo sapiens Shugoshin 2 Proteins 0.000 description 1
- 102100024238 Shugoshin 2 Human genes 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001808 coupling effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/461—Microwave discharges
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/461—Microwave discharges
- H05H1/4622—Microwave discharges using waveguides
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Abstract
It include: that microwave source, microwave transmission mechanism, plasma generator, the gas transportation machine structure etc. of microwave are provided the invention discloses a kind of large power high efficiency multipurpose microwave plasma torch；The microwave source and microwave transmission mechanism can make HIGH-POWERED MICROWAVES high efficiency of transmission, plasma generator can make microwave energy generate most strong-electromagnetic field at nozzle, strong-electromagnetic field breakdown passes through the Working medium gas at nozzle by configuring, and discharge, electric discharge makes intensive Working medium gas efficient plasma production plume.
Description
Technical field
The present invention relates to the technical field of plasma occurred based on microwave excitation, more particularly to a kind of large power high efficiency
Multipurpose microwave plasma torch.
Background technique
Plasma is one kind by free electron and charged ion physical form as main component, is widely present in universe
In, it is often considered to be the 4th state of substance, plasma can be divided into high-temperature plasma and two kinds of low temperature plasma, high temperature etc.
What gas ions only occurred when temperature is sufficiently high, such as the plasma that the sun and fixed star constantly issue, utilize high-temperature plasma
Body develops nuclear fusion, develops clean energy resource, and low temperature plasma is the plasma (electron temperature is very high) occurred at normal temperature,
Low temperature plasma, which is widely used, to be generated the key of plasma in a variety of production fields and is to provide an energy by atom
Outer-shell electron overcome nuclear constraint, and become the form of free electron and charged ion.
The method for providing energy mainly includes electric energy and two kinds of kinetic energy, and microwave plasma torch is that one kind passes through microwave discharge
The plasma producing apparatus of electric energy is provided, microwave discharge forms electromagnetic field of high frequency, and gas is excited and generates plasma, has
Feature more than active strong, excitation metastable atom, currently, common microwave plasma torch is 1985 annuity Qin Han of source
Et al. the MPT microwave plasma torch developed, or the microwave plasma torch improved on this basis, these plasmas
Torch can use under normal pressure, but all be mostly that plasma is generated in microwave waveguide, spray plasma by the face waveguide H
Plume, when plasma stream is sprayed from waveguide, temperature is higher, causes microwave waveguide to be easy to be burned, and microwave waveguide volume is big,
It is not easily mounted in equipment, is unfavorable for the promotion and application of product.
Summary of the invention
The present invention is intended to provide a kind of large power high efficiency multipurpose microwave plasma torch, to solve to exist in the prior art
Microwave plasma torch power is small, low efficiency, power is slightly larger, will result in microwave inner conductor and is easy to be burned, and microwave wave
Conductor product is big, the problem of being not easily mounted in equipment, be unfavorable for promotion and application.
In order to solve the above technical problems, one technical scheme adopted by the invention is that: it is multi-purpose to provide a kind of large power high efficiency
Way microwave plasma torch, comprising: microwave source, microwave transmission mechanism, the plasma generator, gas transportation machine of microwave are provided
Structure；The microwave source is adjustable power microwave source；The microwave transmission mechanism includes: and the sequentially connected waveguide excitation of microwave source
Head, waveguide junction circulator, three pins filtering matching tuner, waveguide resonant cavity；The three pins filtering matching tuner and waveguide
It is vertically connected between resonant cavity by waveguide bend；The intracavitary sliding of wave guide resonance is provided with waveguide short device；The waveguide
Short-circuiting device is located at the one end of waveguide resonant cavity far from waveguide bend；The plasma generator includes: and waveguide resonant cavity ten
The coaxial plasma generation cavity of word interconnection, excitation conductor, is located on coaxial plasma generation cavity nonmetallic discharge tube
Vortex generator, the fixed frame in portion；The lower openings of the coaxial plasma generation cavity form plasma nozzle；It is described non-
Metal discharge pipe is fixed on the inner wall of coaxial plasma generation cavity, and is passed through waveguide resonant cavity and extended to vortex generator；
The upper end of the excitation conductor is connected to vortex generator, and lower end extends to the plasma nozzle；The vortex generator
Include: the vortex generator shell being connect with the coaxial plasma generation cavity, be fixed on the intracorporal hair of vortex generator shell
Raw chamber short-circuiting device, oblique several intracorporal air inlet pipe of insertion vortex generator shell；The air inlet pipe is connected to coaxial plasma
In body generation cavity；The fixed frame top is fixed on waveguide resonant cavity, and lower part is fixedly connected with coaxial plasma generation cavity；
The air inlet pipe is connected to gas transportation machine structure；The gas transportation machine structure includes the several Working medium gas inputted in proportion.
Further, gas transportation machine structure includes: gas cylinder, the gas pipeline for being connected to gas cylinder and the air inlet pipe；It is described defeated
Feed channel is equipped with flowmeter, air gauge.
Further, the material of the three pins filtering matching tuner, the waveguide resonant cavity, the vortex generator
It is conductive metal.
Further, the material of the excitation conductor is high temperature resistant conductive metal.
Further, the side of the waveguide short device is equipped with pull lever；Described pull lever one end and waveguide short device connect
It connects, the other end extends to outside waveguide resonant cavity；One end in the pull lever far from waveguide short device is equipped with limited block.
Further, the spacing between three pins in the three pins filtering matching tuner is a quarter institute
State the integral multiple of microwave wavelength.
Further, the waveguide resonant cavity, the coaxial plasma generation cavity, the nonmetallic discharge tube, described
The length of excitation conductor is the integral multiple of a quarter microwave wavelength；It is described excitation outer conductor internal diameter be 10 ~
200mm, motivating the outer diameter of inner conductor is 1 ~ 50mm.
Further, the Working medium gas is argon gas, nitrogen, helium, oxygen, air, at least two gas in vapor
The mixed gas of body.
Further, the plasma nozzle is in up big and down small truncated cone shape.
Further, the waveguide junction circulator is loaded equipped with water cooling；Cavity outer wall occurs for the coaxial plasma equipped with scattered
Hot device.
The beneficial effects of the present invention are:
1. using the large power high efficiency multipurpose microwave plasma torch, HIGH-POWERED MICROWAVES is generated by microwave source, and pass through biography
It leads mechanism and is transmitted to plasma generator, by accurately calculating, make to generate high field, Working medium gas at coaxial cavity nozzle
It is input at plasma nozzle by nonmetallic discharge tube and is punctured by high field, produce plasma.In order to avoid
High-temperature plasma burns out plasma generator, and by accurately calculating, guide electromagnetic waves are only in plasma generator
It discharges at nozzle.The length of the excitation conductor is the integral multiple of a quarter microwave wavelength；It is led outside the excitation
The internal diameter of body is 10 ~ 200mm, and motivating the outer diameter of inner conductor is 1 ~ 50mm., so that microwave energy be made efficiently to act on working medium gas
Body reduces energy loss；
2. it is connected between matching tuner and waveguide resonant cavity by the way that waveguide bend is vertical by filtering three pins, it is humorous in waveguide
Plasma generator is connected on vibration chamber, microwave source and plasma generator is isolated, to reduce the leakage of microwave, hold
Easily reach radiation standard, it is safe to use.
Detailed description of the invention
Fig. 1 is the internal structure schematic side view of large power high efficiency multipurpose microwave plasma torch provided by the invention；
Appended drawing reference: 1- microwave source, 2- microwave transmission mechanism, 21- waveguide excitation head, 22- waveguide junction circulator, 221- water cooling are negative
It carries, tri- pin of 23- filtering matching tuner, tri- pins of 231-, 24- waveguide resonant cavity, 25- waveguide bend, 26- waveguide short
Device, 261- pull lever, 262- limited block, 3- plasma generator, 31- coaxial plasma generation cavity, 311- radiator,
The nonmetallic discharge tube of 32-, 33- excitation conductor, 34- vortex generator, 35- fixed frame, 36- plasma nozzle, 37- vortex hair
Raw device shell, 38- generation cavity short-circuiting device, 39- air inlet pipe, 4- gas transportation machine structure, 42- gas cylinder, 43- gas pipeline, 44- stream
Scale, 45- air gauge.
Specific embodiment
With reference to the accompanying drawing to the specific embodiment party of large power high efficiency multipurpose microwave plasma torch provided by the invention
Formula is described in detail.
In the description of the present invention, it should be noted that term " on ", "lower", "inner", "outside", " one end ", " other end "
Positional relationship is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of description of the present invention and simplification of the description, without
It is that the device of indication or suggestion meaning or part must have a particular orientation, be constructed and operated in a specific orientation, therefore not
It can be interpreted as limitation of the present invention, should not be construed as specific and particular meaning reference.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, belong to " installation ", " set
Have ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, be also possible to be electrically connected；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition
The concrete meaning of language in the present invention.
As shown in Figure 1, large power high efficiency multipurpose microwave plasma torch provided by the invention, comprising: provide microwave
Microwave source 1, microwave transmission mechanism 2, plasma generator 3, gas transportation machine structure 4；The microwave source 1 is power-adjustable microwave
Source；The microwave transmission mechanism 2 includes: and the sequentially connected waveguide excitation head 21 of microwave source 1, waveguide junction circulator 22, three pins
Filtering matching tuner 23, waveguide resonant cavity 24；Lead between the three pins filtering matching tuner 23 and waveguide resonant cavity 24
Waveguide bend 25 is crossed vertically to connect；Sliding is provided with waveguide short device 26 in the waveguide resonant cavity 24；The waveguide short device
26 are located at the one end of waveguide resonant cavity 24 far from waveguide bend 25；The plasma generator 3 includes: and waveguide resonant cavity 24
The coaxial plasma generation cavity 31 of right-angled intersection connection, excitation conductor 33, is located at coaxial plasma at nonmetallic discharge tube 32
Vortex generator 34, the fixed frame 35 on 31 top of generation cavity；The lower openings of the coaxial plasma generation cavity 31 are formed
Gas ions nozzle 36；The nonmetallic discharge tube 32 is fixed on the inner wall of coaxial plasma generation cavity 31, and passes through waveguide
Resonant cavity 24 extends to vortex generator 34；The upper end of the excitation conductor 33 is connected to vortex generator 34, and lower end extends to
The plasma nozzle 36；The vortex generator 34 includes: the vortex connecting with the coaxial plasma generation cavity 31
Generator body 37, the generation cavity short-circuiting device 38 being fixed in vortex generator shell 37, oblique insertion vortex generator shell
Several air inlet pipe 39 in 37；The air inlet pipe 39 is connected in coaxial plasma generation cavity 31；On the fixed frame 35
Portion is fixed on waveguide resonant cavity 24, and lower part is fixedly connected with coaxial plasma generation cavity 31；The air inlet pipe 39 is connected to
Gas transportation machine structure 4；The gas transportation machine structure 4 includes the several Working medium gas inputted in proportion.
In large power high efficiency multipurpose microwave plasma torch provided by the invention, microwave is generated by microwave source 1 and is led to
It crosses conduction mechanism 2 and is transmitted in the coaxial plasma generation cavity 31 of plasma generator 3 and short-circuit production occurs with excitation conductor 33
Raw high field, Working medium gas are input at plasma nozzle 36 by nonmetallic discharge tube 32 and are hit by high field
It wears, produces plasma, effectively control plasma stream not in the intracavitary appearance of wave guide resonance, avoid what waveguide was burned
Phenomenon occurs, and passes through the setting of plasma generator, plasma of the guide electromagnetic waves outside coaxial plasma generation cavity
It discharges at nozzle, the energy concentration for generating electric discharge acts on intensive Working medium gas molecule, to efficiently produce
Plasma stream.
In large power high efficiency multipurpose microwave plasma torch provided by the invention, the microwave source is the micro- of power-adjustable
Wave source, can use magnetron or all solid state microwave signal transmitter, power 1W~6KW range, power can single tube it is defeated
Out, it can also be exported with power combing, watt level is controllable, and frequency is 900MHz~2600MHz, not year-on-year by cooperation input
The mixed working fluid gas of example, the preferred Working medium gas can be in argon gas, nitrogen, helium, oxygen, air, vapor
The mixed gas of at least two gases, e.g., microwave are frequency 2450MHz, power 500W, correspond to the argon gas of Working medium gas:
Air=20%:80% generates 6000 DEG C of plasma, realizes the plasma for generating higher temperature, is sent out by coaxial plasma
The design of raw chamber keeps the temperature of electronics and ion in the plasma generated very high to the ratio between neutral gas temperature, can also be with
So that plasma torch is kept suitable temperature, and do not go out the output of homogeneous plasma under normal pressure, to be suitable for a variety of applications
Occasion realizes multipurpose, application easy to spread.
In large power high efficiency multipurpose microwave plasma torch provided by the invention, by the way that three pins are filtered matching tuning
It is connected between device 23 and waveguide resonant cavity 24 using waveguide bend 25 is vertical, coaxial plasma generation cavity 31 and waveguide resonant cavity
24 right-angled intersections connection, herein it should be noted that " the right-angled intersection connection " is by the interlude in waveguide resonant cavity
Radial through-hole (waveguide resonant cavity is tubulose, as shown in Figure 1) is opened up, plasma generator 3 is embedded in the radial through-hole, to reach
To the purpose that coaxial plasma generation cavity 31 is connect with 24 right-angled intersection of waveguide resonant cavity, to effectively control plasma
Body stream in the intracavitary appearance of wave guide resonance, does not avoid the phenomenon that waveguide is burned, also, sends out high-voltage power supply and plasma
Raw device isolation, thus reduce the leakage of microwave, be easy to reach radiation standard, it is safe to use, pass through the filtering of three pins
Effect with tuner is lost system impedance mesh power, filters out the clutter of microwave source, avoid interference of the clutter to main wave,
The loss for avoiding energy, improves plasma-generation efficiency.
In large power high efficiency multipurpose microwave plasma torch provided by the invention, by by the oblique insertion institute of air inlet pipe 39
It states in vortex generator, and several air inlets is set, can be three, be also possible to more, slanting angle can be with
Air inlet pipe and the waveguide resonant cavity 24(tubulose) axial line be in 1~89 °, thus make Working medium gas be transported to vortex hair
Angry Nei Shiyin air pressure and the oblique effect being passed through form the vortex of left or right rotation, improve the input efficiency of Working medium gas,
To keep plasma-generation efficiency higher.
In large power high efficiency multipurpose microwave plasma torch provided by the invention, gas transportation machine structure 4 includes: gas cylinder
42, it is connected to the gas pipeline 43 of gas cylinder 42 and the air inlet pipe 39；The gas pipeline 43 is equipped with flowmeter 44, air gauge
45, with the ratio and quantity that further accurately control air-flow inputs, it is precisely controlled the temperature for generating plasma, into one
Step has widened the scope of application of the plasma torch.
In large power high efficiency multipurpose microwave plasma torch provided by the invention, the three pins filtering matching tuner
23, the waveguide resonant cavity 24, the vortex generator 34 material be conductive metal, can be the conductive golds such as copper, aluminium, iron
Belong to, it is a quarter microwave that three pin is filtered to the spacing between three pins 231 in matching tuner 23
The integral multiple of wavelength；The waveguide resonant cavity 24, the coaxial plasma generation cavity 31, the nonmetallic discharge tube 32, institute
The length for stating excitation conductor is the integral multiple of a quarter microwave wavelength；It is described excitation outer conductor internal diameter be 10 ~
200mm, motivating the outer diameter of inner conductor is 1 ~ 50mm.To make microwave energy efficiently act on Working medium gas, reduce energy damage
It loses, to realize that microwave coupling effect in conduction is preferable, improves plasma generation efficiency.
In large power high efficiency multipurpose microwave plasma torch provided by the invention, the material of the excitation conductor 33 is resistance to
High-temperature electric conduction metal, can be the conductive metals such as tungsten, copper, iron, aluminium, and outer diameter can be set to 1mm~50mm, and and waveguide short
Device 26 is open circuit, to realize microwave discharge, high temperature resistant is used, and is prolonged its service life.
In large power high efficiency multipurpose microwave plasma torch provided by the invention, the side of the waveguide short device 26 is set
There is pull lever 261；Described 261 one end of pull lever is connect with waveguide short device 26, and the other end extends to outside waveguide resonant cavity 24；It is described
One end in pull lever 261 far from waveguide short device 26 is equipped with limited block 262, and setting with this configuration is pulling the drawing
When lever, the spacing of waveguide short device and nonmetallic discharge tube can be changed, to realize the conduction for adjusting microwave, make microwave
It can preferably be matched with Working medium gas, with efficient plasma production.
In large power high efficiency multipurpose microwave plasma torch provided by the invention, in order to ensure that Working medium gas can be comprehensive
Breakdown, the plasma nozzle 36 are in up big and down small truncated cone shape, it is ensured that electric field strength is uniform in taper face, Working medium gas energy
Enough breakdown comprehensively, do not waste Working medium gas, further improve plasma generation efficiency.
In large power high efficiency multipurpose microwave plasma torch provided by the invention, the waveguide junction circulator 22 is equipped with water
Cold load 221 evacuates the heat that microwave generates in conductive process, it is ensured that the normal conduction of microwave, described same
31 outer wall of axis plasma generation cavity is equipped with radiator 311, carries out cooling and heat dissipation to coaxial plasma generation cavity, in order to avoid because of plasma
Heat transfer damaged equipment, further extend the service life of the plasma torch.
Working principle: microwave source and microwave transmission mechanism can make HIGH-POWERED MICROWAVES high efficiency of transmission, plasma generator
Microwave energy can be made to generate most strong-electromagnetic field at nozzle, strong-electromagnetic field breakdown passes through by the Working medium gas of configuration at nozzle, and
It discharges, electric discharge makes intensive Working medium gas efficient plasma production plume.
The above description is only an embodiment of the present invention, is not intended to limit the scope of the invention, all to utilize this hair
Equivalent structure or equivalent flow shift made by bright specification and accompanying drawing content is applied directly or indirectly in other relevant skills
Art field, is included within the scope of the present invention.
Claims (10)
1. a kind of powerful efficient multi-purpose microwave plasma torch characterized by comprising provide microwave microwave source,
Microwave transmission mechanism, plasma generator, gas transportation machine structure；The microwave source is adjustable power microwave source；The microwave
Conduction mechanism includes: to match tuner, wave with the sequentially connected waveguide excitation head of microwave source, waveguide junction circulator, the filtering of three pins
Lead resonant cavity；It is connected between the three pins filtering matching tuner and waveguide resonant cavity by waveguide bend；The waveguide is humorous
Intracavitary sliding of shaking is provided with waveguide short device；The waveguide short device is located at the one end of waveguide resonant cavity far from waveguide bend；Institute
Stating plasma generator includes: the coaxial plasma generation cavity connecting with waveguide resonant cavity right-angled intersection, nonmetallic electric discharge
Pipe, excitation conductor, the vortex generator for being located at coaxial plasma generation cavity top, fixed frame；The coaxial plasma hair
The lower openings of raw chamber form plasma nozzle；The nonmetallic discharge tube is fixed on the inner wall of coaxial plasma generation cavity
On, and pass through waveguide resonant cavity and extend to vortex generator；The upper end of the excitation conductor is connected to vortex generator, and lower end is prolonged
Extend to the plasma nozzle；The vortex generator includes: the vortex hair connecting with the coaxial plasma generation cavity
Raw device shell, to be fixed on the intracorporal generation cavity short-circuiting device of vortex generator shell, oblique insertion vortex generator shell intracorporal several
A air inlet pipe；The air inlet pipe is connected in coaxial plasma generation cavity；The fixed frame top is fixed on waveguide resonant cavity
On, lower part is fixedly connected with coaxial plasma generation cavity；The air inlet pipe is connected to gas transportation machine structure；The gas conveying
Mechanism includes the several Working medium gas inputted in proportion.
2. large power high efficiency multipurpose microwave plasma torch according to claim 1, it is characterised in that: gas transportation machine
Structure includes: gas cylinder, the gas pipeline for being connected to gas cylinder and the air inlet pipe；The gas pipeline is equipped with flowmeter, air gauge.
3. large power high efficiency multipurpose microwave plasma torch according to claim 1, it is characterised in that: three pin
Filtering matching tuner, the waveguide resonant cavity, the vortex generator material be conductive metal.
4. large power high efficiency multipurpose microwave plasma torch according to claim 1, it is characterised in that: the excitation is led
The material of body is high temperature resistant conductive metal.
5. large power high efficiency multipurpose microwave plasma torch according to claim 1, it is characterised in that: the waveguide is short
The side of road device is equipped with pull lever；Described pull lever one end is connect with waveguide short device, and the other end extends to outside waveguide resonant cavity；Institute
It states one end in pull lever far from waveguide short device and is equipped with limited block.
6. large power high efficiency multipurpose microwave plasma torch according to claim 1, it is characterised in that: three pin
The spacing between three pins in filtering matching tuner is the integral multiple of a quarter microwave wavelength.
7. large power high efficiency multipurpose microwave plasma torch according to claim 1, it is characterised in that: the waveguide is humorous
Vibration chamber, the coaxial plasma generation cavity, the nonmetallic discharge tube, the excitation conductor length be a quarter
The integral multiple of the microwave wavelength；The internal diameter of the excitation outer conductor is 10 ~ 200mm, and motivating the outer diameter of inner conductor is 1 ~ 50mm.
8. large power high efficiency multipurpose microwave plasma torch according to claim 7, it is characterised in that: the working medium gas
Body be argon gas, nitrogen, helium, oxygen, air, in vapor at least two gases mixed gas.
9. large power high efficiency multipurpose microwave plasma torch according to claim 1, it is characterised in that: the plasma
Body nozzle is in up big and down small truncated cone shape.
10. large power high efficiency multipurpose microwave plasma torch according to claim 1, it is characterised in that: the waveguide
Circulator is loaded equipped with water cooling；The coaxial plasma occurs cavity outer wall and is equipped with radiator.
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| CN201910137700.8A CN109640505A (en) | 2019-02-25 | 2019-02-25 | A kind of large power high efficiency multipurpose microwave plasma torch |
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| CN201910137700.8A CN109640505A (en) | 2019-02-25 | 2019-02-25 | A kind of large power high efficiency multipurpose microwave plasma torch |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112105136A (en) * | 2020-10-22 | 2020-12-18 | 四川大学 | Ignition method of microwave plasma torch |
| CN112888134A (en) * | 2021-01-19 | 2021-06-01 | 成都奋羽电子科技有限公司 | Microwave plasma generating device |
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| US5153406A (en) * | 1989-05-31 | 1992-10-06 | Applied Science And Technology, Inc. | Microwave source |
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| CN112105136B (en) * | 2020-10-22 | 2021-07-27 | 四川大学 | Ignition method of microwave plasma torch |
| CN112888134A (en) * | 2021-01-19 | 2021-06-01 | 成都奋羽电子科技有限公司 | Microwave plasma generating device |
| CN112888134B (en) * | 2021-01-19 | 2024-03-08 | 成都奋羽电子科技有限公司 | Microwave plasma generating device |
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Application publication date: 20190416 |