CN109527660A - A kind of electronic cigarette film heating sheets - Google Patents
A kind of electronic cigarette film heating sheets Download PDFInfo
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- CN109527660A CN109527660A CN201910047960.6A CN201910047960A CN109527660A CN 109527660 A CN109527660 A CN 109527660A CN 201910047960 A CN201910047960 A CN 201910047960A CN 109527660 A CN109527660 A CN 109527660A
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- film layer
- layer
- electronic cigarette
- thermal resistance
- adding thermal
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 73
- 239000003571 electronic cigarette Substances 0.000 title claims abstract description 44
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 33
- 230000001681 protective effect Effects 0.000 claims abstract description 30
- 239000000919 ceramic Substances 0.000 claims abstract description 26
- 238000005516 engineering process Methods 0.000 claims abstract description 24
- 238000004519 manufacturing process Methods 0.000 claims abstract description 24
- 230000008021 deposition Effects 0.000 claims abstract description 15
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims abstract description 15
- 229910001928 zirconium oxide Inorganic materials 0.000 claims abstract description 15
- 238000004140 cleaning Methods 0.000 claims abstract description 6
- 230000002209 hydrophobic effect Effects 0.000 claims abstract description 6
- 239000010410 layer Substances 0.000 claims description 109
- 238000005240 physical vapour deposition Methods 0.000 claims description 39
- 239000000463 material Substances 0.000 claims description 23
- 238000005229 chemical vapour deposition Methods 0.000 claims description 17
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 14
- 230000007704 transition Effects 0.000 claims description 14
- 238000000151 deposition Methods 0.000 claims description 11
- 238000002360 preparation method Methods 0.000 claims description 9
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 8
- 239000000853 adhesive Substances 0.000 claims description 8
- 230000001070 adhesive effect Effects 0.000 claims description 8
- 239000011651 chromium Substances 0.000 claims description 8
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 8
- 229910052709 silver Inorganic materials 0.000 claims description 8
- 239000004332 silver Substances 0.000 claims description 8
- 238000009966 trimming Methods 0.000 claims description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 7
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 7
- 239000004411 aluminium Substances 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 239000010949 copper Substances 0.000 claims description 7
- 238000007733 ion plating Methods 0.000 claims description 7
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 7
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 6
- 230000003064 anti-oxidating effect Effects 0.000 claims description 6
- 229910052804 chromium Inorganic materials 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 239000007769 metal material Substances 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 6
- 239000011241 protective layer Substances 0.000 claims description 6
- 239000002994 raw material Substances 0.000 claims description 6
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 6
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 5
- 239000002356 single layer Substances 0.000 claims description 5
- 230000006378 damage Effects 0.000 claims description 4
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 4
- 208000027418 Wounds and injury Diseases 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 239000007772 electrode material Substances 0.000 claims description 3
- 208000014674 injury Diseases 0.000 claims description 3
- 150000002484 inorganic compounds Chemical class 0.000 claims description 3
- 229910010272 inorganic material Inorganic materials 0.000 claims description 3
- 238000003698 laser cutting Methods 0.000 claims description 3
- 239000000314 lubricant Substances 0.000 claims description 3
- 238000000465 moulding Methods 0.000 claims description 3
- 239000013307 optical fiber Substances 0.000 claims description 3
- 238000007747 plating Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 230000000873 masking effect Effects 0.000 claims description 2
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 230000000391 smoking effect Effects 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 5
- 230000003647 oxidation Effects 0.000 abstract description 2
- 238000007254 oxidation reaction Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 9
- 241000208125 Nicotiana Species 0.000 description 6
- 235000002637 Nicotiana tabacum Nutrition 0.000 description 6
- 206010037660 Pyrexia Diseases 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 235000019504 cigarettes Nutrition 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- SNICXCGAKADSCV-JTQLQIEISA-N (-)-Nicotine Chemical compound CN1CCC[C@H]1C1=CC=CN=C1 SNICXCGAKADSCV-JTQLQIEISA-N 0.000 description 1
- 206010053615 Thermal burn Diseases 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229960002715 nicotine Drugs 0.000 description 1
- SNICXCGAKADSCV-UHFFFAOYSA-N nicotine Natural products CN1CCCC1C1=CC=CN=C1 SNICXCGAKADSCV-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Non-Adjustable Resistors (AREA)
Abstract
The invention discloses a kind of electronic cigarette film heating sheets; including the ceramic bare die by zirconium oxide or aluminium oxide production; pass through gas phase deposition technology outside ceramic bare die and is coated with " adding thermal resistance film layer "; and the thickness for being somebody's turn to do " adding thermal resistance film layer " passes through gas phase deposition technology outside adding thermal resistance film layer and is coated with " three proofings protective film layer " less than 2 μm；Gas phase deposition technology is applied to " the adding thermal resistance film layer " of electronic cigarette heating sheet, adding thermal resistance film layer realizes resistance precision ± 1%, reduce the circuit design difficulty of electronic smoking set, heating line image hotpoint face covering simultaneously, area of effective coverage >=95% of electronic cigarette also contacts part, heat and the temperature for realizing entire heating layer are uniform, promote electronic cigarette and suck mouthfeel；Gas phase deposition technology is applied to " the three proofings protective film layer " of electronic cigarette heating sheet, which can prevent resistance oxidation, high temperature resistant, have good conduction of heat, and promote the oleophobic hydrophobic function of heating sheet, reach the self-cleaning effect of heating sheet.
Description
Technical field
The present invention relates to low-power heating devices field, in particular to a kind of electronic cigarette film heating sheets.
Background technique
Electronic cigarette is a kind of electronic product for imitating cigarette, there is appearance, smog, taste and the feeling as cigarette.
It is means of not burning, be atomized etc. by heating, so that special smoke grenade and tobacco tar is volatilized nicotine and is free of tar, allows user
A kind of product sucked, achievees the effect that for cigarette harm reduction.
Currently, the electronic cigarette heating technique occurred in the market mainly includes center fever chip technology, center fever needle technology
Heating cup technology around.
The advantages of center fever chip technology: laminated structure, heating rate is fast, can obtain arbitrary Temperature Distribution；Reliably
Property it is high, heating material will not aoxidize, and acid-proof alkaline is excellent；Corrosion-resistant, high temperature resistant, temperature is relatively uniform, good heat conductivity,
Thermal compensation speed is fast.Disadvantage: there are the temperature difference in top and bottom, cause tobacco roasting insufficient or even have the smell of burning.
The advantages of center fever needle technology: club shaped structure, intensity is high, will not be broken off, high-temperature co-fired ceramics heater, causes
Close property is good, and heating wire is wrapped in ceramics completely, high reliablity is used for a long time, heating rate is fast, and uniformity is preferable, and solder joint is adopted
With 1000 DEG C of silver brazing techniques, solder joint is stablized, and is resistant to 350 DEG C of high temperature for a long time.Disadvantage: heating surface area is small, and there are temperature in top and bottom
Difference causes tobacco roasting insufficient or even has the smell of burning.
Surrounding heating cup technological merit: cup-like structure, fever is fast, and high reliablity, the service life is long, and ring fills segmentally heating, accurately
Control temperature.Disadvantage: power consumption, heat utilization ratio is low, and heat a part absorbs another part in the form of heat by tobacco and distributes
Go out, if it is heat-insulated do it is bad if, smoking set can scald one's hand.Also cigarette paper can be burnt up.
Current electronic cigarette heating technique is all based on " thick film printing technique " and " metal ceramic material as high temperature cofiring technology ", lacks
Point is that resistance accuracy is low, resistive circuit figure is not that all standing, resistive circuit width is different and fever tablet absorption residue tar etc.
Disadvantage.Thus, for these problems, need to improve.
Summary of the invention
The main purpose of the present invention is to provide a kind of electronic cigarette film heating sheets, can effectively solve in background technique
Problem.
To achieve the above object, the technical scheme adopted by the invention is as follows:
A kind of electronic cigarette film heating sheets, including the ceramic bare die by zirconium oxide or aluminium oxide production, it is characterised in that: the pottery
Pass through gas phase deposition technology outside porcelain bare die and be prepared with adding thermal resistance film layer, the thickness of the adding thermal resistance film layer is described less than 2 μm
Pass through gas phase deposition technology outside adding thermal resistance film layer and is prepared with three proofings protective film layer.
Preferably, the production raw material of the adding thermal resistance film layer includes silver, copper, aluminium, gold, and the material is low-resistivity
With the metal material of positive temperature coefficient, and the low-resistivity be lower than 5 Ω M, positive temperature coefficient > 1000ppm/ DEG C；Institute
Stating includes transition zone in adding thermal resistance film layer, which is one of zirconium oxide, aluminium oxide, nickel, chromium, and the transition zone
Thickness is no more than 100nm.
Preferably, the production method of the adding thermal resistance film layer:
S1: the selection of resistance material can according to electronic cigarette circuit for the demand of adding thermal resistance value and positive temperature coefficient value
To select silver, copper, aluminium, the materials such as gold, or by the way of multiple material stacking plated film realize accurate positive resistance temperature
Coefficient value control；
S2: the selection of transition zone can be on ceramic bare die first in order to improve the adhesive force of adding thermal resistance film layer and ceramic bases
One layer of transition zone is plated, material can choose zirconium oxide, aluminium oxide, nickel, chromium, and thickness is not higher than 100nm；
S3: film layer preparation method selects physical vapour deposition (PVD) or chemical vapor deposition, in order to enhance the attachment of adding thermal resistance film layer
Power, preferably magnetron sputtering and vacuum ion plating mode.
Preferably, the production raw material of the three proofings protective film layer includes silica, silicon nitride and silicon carbide, the three proofings
Protective film layer is single layer structure, which is high rigidity, anti-oxidation, film layer resistant to high temperatures.
Preferably, the three proofings protective film layer is double-layer structure, wherein one layer is high rigidity, anti-oxidation, protection resistant to high temperatures
Layer, another layer are the hydrophobic lubricant layer of oleophobic.
Preferably, the production method of the three proofings protective film layer:
S1, according to the difference of vapor deposition mode, can choose a kind of high rigidity, inorganic compound resistant to high temperature as three proofings guarantor
Cuticula layer material；
S2, the self-cleaning function in order to enhance three proofings protective layer are further added by one layer of titanium oxide or nitridation in three proofings protective film layer
The preparation method of titanium or fluoride, titanium oxide or titanium nitride or fluoride still uses physical vapour deposition (PVD) or chemical vapor deposition
Product, is realized in same heat with three proofings film layer；
S3, film layer preparation method select physical vapour deposition (PVD) or chemical vapor deposition, in order to enhance the attachment of three proofings protective film layer
Power, preferably magnetron sputtering and vacuum ion plating mode.
A kind of production method of electronic cigarette film heating sheets, comprising the following steps:
S1, conductive electrode production: positive and negative electrode first is printed in zirconium oxide or aluminium oxide ceramics substrate；Electrode material selects solderability
And the metal material that electric conductivity is excellent, the thickness thinning as far as possible in the case where ensuring solderability and electric conductivity；
S2, plated film: physical vapour deposition (PVD) is carried out to the potsherd by step S1 or chemical vapor deposition covers plated film, will be heated
Resistive layer and three proofings protective film layer prepare completion in the same heat, and 70% or so of electrode length will be covered by jig, and be kept away
Exempt to be coated with film layer, rest part is contacted with coating completely, and plated film time is depending on resistance value demand and adhesive force demand, respectively
Kind physical vapour deposition (PVD) and chemical vapor deposition manner can have larger difference；
S3, heating sheetmolding: the potsherd after step S2 plated film is taken out, after cooling, according to the heating chip size of design
Laser scribing carried out to potsherd, laser cutting machine can choose femtosecond, picosecond, optical fiber laser etc.；
S4, laser resistor trimming: straight in the heartcut for passing through the molding heating sheet of step S3 one using fully-automatic laser resistance adjuster
Line only cuts physical vapour deposition (PVD) film plating layer, minimizes the injury to ceramic base material, set so that the resistance value of heating sheet reaches
Count resistance value；And guarantee the symmetry of heating sheet figure, it is ensured that resistance value uniformity, after resistance trimming, the automatic sliver shape of potsherd
At finished product.
Compared with prior art, the invention has the following beneficial effects:
1, it prepared by " adding thermal resistance film layer " that gas phase deposition technology is applied to electronic cigarette heating sheet, realizes that resistance value controls precision
It is ± 1%, reduces the circuit design difficulty of electronic smoking set, the covering of heating line image hotpoint face, also contacts region is effectively covered
Capping product >=95%, replaces traditional line to cover, and heat and the temperature for realizing entire heating layer are uniform, promotes electronic cigarette and sucks
Mouthfeel；Gas phase deposition technology is applied to " the three proofings protective film layer " of electronic cigarette heating sheet, which can prevent resistance oxygen
Change, high temperature resistant have good conduction of heat, and the oleophobic hydrophobic function of significant increase heating sheet, reach electronic cigarette heating
The self-cleaning effect of piece reduces the attachment of tar and tobacco leaf residue on heating sheet surface and accumulates, mention compared to traditional envelope glaze handicraft
Smoking mouthfeel is risen, electronic cigarette heating sheet crash rate is reduced；Gas phase deposition technology includes " physical vapor deposition (PVD) " and " chemistry
It is vapor-deposited (CVD) ", wherein physical vapour deposition (PVD) includes " magnetron sputtering ", " vacuum evaporation ", " vacuum ion plating " etc. skill
Art；Chemical vapor deposition includes " sub-atmospheric CVD ", " low-pressure chemical vapor deposition ", " plasma-based Assisted Chemical Vapor
Deposition "；
2, electronic cigarette " adding thermal resistance film layer " use " transition zone "+" metallic resistance " double-layer structure improves resistive layer and ceramic base
The adhesion problem at bottom solves the inconsistent bring demoulding risk of thermal expansion coefficient between ceramic bases and metallic element；Electronics
Cigarette " adding thermal resistance film layer " realizes heating function using the metals such as silver, copper, aluminium, gold；Electronic cigarette " three proofings protective film layer " is using single
Layer or double-layer structure realize three proofings function, using silica (SiO2), silicon nitride (SiN) and silicon carbide in the film layer
(SiC), the materials such as titanium oxide or titanium nitride or fluoride；
3, electronic cigarette " adding thermal resistance film layer " use " face covering+laser resistor trimming " replaces the " simple of traditional heating piece manufacturing technology
Line covering " or " line covering+laser resistor trimming " technology, so that heating effect is more preferably, electronic cigarette sucks mouthfeel more preferably.
Detailed description of the invention
Fig. 1 is a kind of overall structure figure of electronic cigarette film heating sheets of the present invention；
Fig. 2 is a kind of structure chart of the ceramic bare die of electronic cigarette film heating sheets of the present invention；
Fig. 3 is the structure chart that a kind of ceramic bare die of electronic cigarette film heating sheets of the present invention plates adding thermal resistance film layer；
Fig. 4 is a kind of production process charts of electronic cigarette film heating sheets of the present invention.
In figure: 1, ceramic bare die；2, adding thermal resistance film layer；3, three proofings protective film layer.
Specific embodiment
To be easy to understand the technical means, the creative features, the aims and the efficiencies achieved by the present invention, below with reference to
Specific embodiment, the present invention is further explained.
Embodiment 1
As shown in Figure 1-3, a kind of electronic cigarette film heating sheets, including the ceramic bare die 1 by zirconium oxide or aluminium oxide production, ceramics
Adding thermal resistance film layer 2 is coated with by gas phase deposition technology outside bare die 1, and the thickness of the adding thermal resistance film layer 2 is heated less than 2 μm
Three proofings protective film layer 3 is coated with by gas phase deposition technology outside resistive layer 2；The production raw material of adding thermal resistance film layer 2 include silver,
Copper, aluminium, gold etc., material are the metal material of low-resistivity (lower than 5 Ω .m) and positive temperature coefficient (TCR > 0)；Add
It may include transition zone in thermal resistance film layer (2), which is zirconium oxide (ZrO2), aluminium oxide (Al2O3), nickel (Ni), chromium
One of (Cr), and the thickness of the transition zone is no more than 100nm.
The production method of adding thermal resistance film layer 2:
S1: the selection of resistance material, according to electronic cigarette circuit for the demand of adding thermal resistance value and TCR value, can choose silver,
The materials such as copper, aluminium, gold, or the control of accurate TCR value is realized in such a way that multiple material stacks plated film.
S2: the selection of transition zone can be in ceramic bare die in order to improve the adhesive force of adding thermal resistance film layer and ceramic bases
Upper first to plate one layer of transition zone, material can choose zirconium oxide (ZrO2), aluminium oxide (Al2O3), nickel (Ni), chromium (Cr), thickness
Not higher than 100nm；
S3: film layer preparation method can choose physical vapour deposition (PVD) or chemical vapor deposition, in order to enhance adding thermal resistance film layer
Adhesive force, preferably magnetron sputtering and vacuum ion plating mode.
By the way that gas phase deposition technology to be applied to the adding thermal resistance film layer 2 of electronic cigarette heating sheet, heating electricity in the present embodiment
It hinders film layer and realizes that resistance precision ± 1%, the covering of heating line image hotpoint face, area of effective coverage >=95% replace traditional line
Covering, heat and the temperature for realizing entire heating layer are uniform, promote electronic cigarette and suck mouthfeel, the circuit for reducing electronic smoking set is set
Count difficulty.
Embodiment 2
As shown in Figs 1-4, the production raw material of three proofings protective film layer 3 is silica (SiO2), silicon nitride (SiN) and silicon carbide
(SiC), three proofings protective film layer 3 is single layer structure, which is high rigidity, anti-oxidation, film layer resistant to high temperatures；Three proofings protective film
Layer 3 is double-layer structure, and one layer is high rigidity, anti-oxidation, protective layer resistant to high temperatures, and another layer is the hydrophobic lubricant layer of oleophobic.
The production method of three proofings protective film layer 3:
S1, according to the difference of vapor deposition mode, can choose a kind of high rigidity, inorganic compound resistant to high temperature as three proofings guarantor
Cuticula layer material, such as silica (SiO2), silicon nitride (SiN) and silicon carbide (SiC) etc.；
S2, the self-cleaning function in order to enhance three proofings protective layer, can be further added by three proofings protective film layer one layer of titanium oxide or
The preparation method of titanium nitride or fluoride, titanium oxide or titanium nitride or fluoride still use physical vapor deposition (PVD) or
Chemical vapor deposition (CVD) is realized in same heat with three proofings film layer；
S3, film layer preparation method, can choose physical vapour deposition (PVD) or chemical vapor deposition, in order to enhance three proofings protective film layer
Adhesive force, preferably magnetron sputtering and vacuum ion plating mode.
Gas phase deposition technology is applied to the three proofings protective film layer 3 of electronic cigarette heating sheet, the protective layer energy in the present embodiment
It enough prevents resistance oxidation, high temperature resistant, have good conduction of heat, and heating sheet is made to promote oleophobic hydrophobic function, reach
The self-cleaning effect of electronic cigarette heating sheet reduces tar and tobacco leaf residue on heating sheet surface compared to traditional envelope glaze handicraft
Attachment accumulation promotes smoking mouthfeel, reduces electronic cigarette heating sheet crash rate.
A kind of production method of electronic cigarette film heating sheets, comprising the following steps:
S1, conductive electrode production: positive and negative electrode first is printed in zirconium oxide or aluminium oxide ceramics substrate；Electrode material selection is " solderable
Property and electric conductivity are excellent " metal material, the thickness thinning as far as possible in the case where ensuring solderability and electric conductivity；
S2, plated film: physical vapour deposition (PVD) is carried out to the potsherd by step S1 or chemical vapor deposition covers plated film, will be heated
Resistive layer 2 and three proofings protective film layer 3 prepare completion in the same heat, electrode length 70% or so by it is shielded will be by
Jig masking, avoids being coated with film layer, rest part is contacted with coating completely.Plated film time is according to resistance value demand and adhesive force
Depending on demand, various physical vapour deposition (PVD)s and chemical vapor deposition manner can have larger difference；
S3, heating sheetmolding: the potsherd after step S2 plated film is taken out, after cooling, according to the heating chip size of design
Laser scribing carried out to potsherd, laser cutting machine can choose femtosecond, picosecond, optical fiber laser etc.；
S4, laser resistor trimming: straight in the heartcut for passing through the molding heating sheet of step S3 one using fully-automatic laser resistance adjuster
Line only cuts PVD film plating layer, the injury to ceramic base material is minimized, so that the resistance value of heating sheet reaches design resistance value；
And guarantee the symmetry of heating sheet figure, it is ensured that resistance value uniformity, after resistance trimming, the automatic sliver of potsherd forms finished product.
The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention.The technology of the industry
Personnel are it should be appreciated that the present invention is not limited to the above embodiments, and the above embodiments and description only describe this
The principle of invention, without departing from the spirit and scope of the present invention, various changes and improvements may be made to the invention, these changes
Change and improvement all fall within the protetion scope of the claimed invention.The claimed scope of the invention by appended claims and its
Equivalent thereof.
Claims (7)
1. a kind of electronic cigarette film heating sheets, including the ceramic bare die (1) by zirconium oxide or aluminium oxide production, it is characterised in that:
The ceramics bare die (1) is prepared with adding thermal resistance film layer (2) by gas phase deposition technology outside, the adding thermal resistance film layer (2)
For thickness less than 2 μm, the adding thermal resistance film layer (2) is prepared with three proofings protective film layer (3) by gas phase deposition technology outside.
2. a kind of electronic cigarette film heating sheets according to claim 1, it is characterised in that: the adding thermal resistance film layer (2)
Production raw material include silver, copper, aluminium, gold, the material is the metal material of low-resistivity and positive temperature coefficient, and this
Low-resistivity is lower than 5 Ω M, temperature-coefficient of electrical resistance > 1000ppm/ DEG C；It include transition zone in the adding thermal resistance film layer (2), it should
Transition zone is one of zirconium oxide, aluminium oxide, nickel, chromium, and the thickness of the transition zone is no more than 100nm.
3. a kind of electronic cigarette film heating sheets according to claim 2, it is characterised in that: the adding thermal resistance film layer (2)
Production method:
S1: the selection of resistance material can according to electronic cigarette circuit for the demand of adding thermal resistance value and positive temperature coefficient value
To select silver, copper, aluminium, golden material, or by the way of multiple material stacking plated film realize accurate positive resistance temperature system
Numerical Control；
S2: the selection of transition zone can be on ceramic bare die first in order to improve the adhesive force of adding thermal resistance film layer and ceramic bases
One layer of transition zone is plated, material can choose zirconium oxide, aluminium oxide, nickel, chromium, and thickness is not higher than 100nm；
S3: film layer preparation method selects physical vapour deposition (PVD) or chemical vapor deposition, in order to enhance the attachment of adding thermal resistance film layer
Power, preferably magnetron sputtering and vacuum ion plating mode.
4. a kind of electronic cigarette film heating sheets according to claim 1, it is characterised in that: the three proofings protective film layer (3)
Production raw material include silica, silicon nitride and silicon carbide, the three proofings protective film layer (3) is single layer structure, the single layer knot
Structure is high rigidity, anti-oxidation, film layer resistant to high temperatures.
5. a kind of electronic cigarette film heating sheets according to claim 4, it is characterised in that: the three proofings protective film layer (3)
For double-layer structure, wherein one layer is high rigidity, anti-oxidation, protective layer resistant to high temperatures, another layer is the hydrophobic lubricant layer of oleophobic.
6. a kind of electronic cigarette film heating sheets according to claim 4, it is characterised in that: the three proofings protective film layer (3)
Production method:
S1, according to the difference of vapor deposition mode, can choose a kind of high rigidity, inorganic compound resistant to high temperature as three proofings guarantor
Cuticula layer material；
S2, the self-cleaning function in order to enhance three proofings protective layer are further added by one layer of titanium oxide or nitridation in three proofings protective film layer
The preparation method of titanium or fluoride, titanium oxide or titanium nitride or fluoride still uses physical vapour deposition (PVD) or chemical vapor deposition
Product, is realized in same heat with three proofings film layer；
S3, film layer preparation method select physical vapour deposition (PVD) or chemical vapor deposition, in order to enhance the attachment of three proofings protective film layer
Power, preferably magnetron sputtering and vacuum ion plating mode.
7. a kind of production method of electronic cigarette film heating sheets, it is characterised in that: the following steps are included:
S1, conductive electrode production: positive and negative electrode first is printed in zirconium oxide or aluminium oxide ceramics substrate；Electrode material selects solderability
And the metal material that electric conductivity is excellent, the thickness thinning as far as possible in the case where ensuring solderability and electric conductivity；
S2, plated film: physical vapour deposition (PVD) is carried out to the potsherd by step S1 or chemical vapor deposition covers plated film, will be heated
Resistive layer (2) and three proofings protective film layer (3) prepare completion in the same heat, and 70% or so of electrode length will be by jig
Masking, avoids being coated with film layer, rest part is contacted with coating completely, and plated film time is according to resistance value demand and adhesive force demand
Depending on, various physical vapour deposition (PVD)s and chemical vapor deposition manner can have larger difference；
S3, heating sheetmolding: the potsherd after step S2 plated film is taken out, after cooling, according to the heating chip size of design
To potsherd carry out laser scribing, laser cutting machine can choose femtosecond, picosecond, optical fiber laser；
S4, laser resistor trimming: straight in the heartcut for passing through the molding heating sheet of step S3 one using fully-automatic laser resistance adjuster
Line only cuts physical vapour deposition (PVD) film plating layer, minimizes the injury to ceramic base material, set so that the resistance value of heating sheet reaches
Count resistance value；And guarantee the symmetry of heating sheet figure, it is ensured that resistance value uniformity, after resistance trimming, the automatic sliver shape of potsherd
At finished product.
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