CN108553089B - Method for preparing skin sensor based on sacrificial layer process and prepared product - Google Patents
Method for preparing skin sensor based on sacrificial layer process and prepared product Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 42
- 239000000758 substrate Substances 0.000 claims abstract description 117
- 239000004372 Polyvinyl alcohol Substances 0.000 claims abstract description 104
- 229920002451 polyvinyl alcohol Polymers 0.000 claims abstract description 104
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 43
- 238000010438 heat treatment Methods 0.000 claims abstract description 31
- 239000008367 deionised water Substances 0.000 claims abstract description 30
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 30
- 239000002861 polymer material Substances 0.000 claims abstract description 26
- 238000009987 spinning Methods 0.000 claims abstract description 12
- 238000004140 cleaning Methods 0.000 claims abstract description 11
- 239000011248 coating agent Substances 0.000 claims abstract description 8
- 238000000576 coating method Methods 0.000 claims abstract description 8
- 238000002360 preparation method Methods 0.000 claims description 19
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 16
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 16
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 238000004528 spin coating Methods 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 14
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 13
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 13
- -1 polydimethylsiloxane Polymers 0.000 claims description 13
- 239000010453 quartz Substances 0.000 claims description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 12
- 239000000843 powder Substances 0.000 claims description 10
- 229920002379 silicone rubber Polymers 0.000 claims description 9
- 229910052757 nitrogen Inorganic materials 0.000 claims description 8
- 239000011521 glass Substances 0.000 claims description 7
- 238000003756 stirring Methods 0.000 claims description 6
- 238000007664 blowing Methods 0.000 claims description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 5
- 229920001634 Copolyester Polymers 0.000 claims description 4
- 239000011324 bead Substances 0.000 claims description 3
- 238000004090 dissolution Methods 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
- 238000005303 weighing Methods 0.000 claims description 3
- 231100000252 nontoxic Toxicity 0.000 abstract description 4
- 230000003000 nontoxic effect Effects 0.000 abstract description 4
- 210000003491 skin Anatomy 0.000 description 33
- 239000003153 chemical reaction reagent Substances 0.000 description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- 239000000047 product Substances 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000003197 catalytic effect Effects 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000004945 silicone rubber Substances 0.000 description 4
- 230000008961 swelling Effects 0.000 description 4
- 230000001988 toxicity Effects 0.000 description 4
- 231100000419 toxicity Toxicity 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 3
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- 238000006073 displacement reaction Methods 0.000 description 3
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- 239000004065 semiconductor Substances 0.000 description 3
- 238000005411 Van der Waals force Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 229920005839 ecoflex® Polymers 0.000 description 2
- 239000012770 industrial material Substances 0.000 description 2
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- 238000012544 monitoring process Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000006136 alcoholysis reaction Methods 0.000 description 1
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- 229920005570 flexible polymer Polymers 0.000 description 1
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/80—Manufacture or treatment specially adapted for the organic devices covered by this subclass using temporary substrates
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
- A61B5/6801—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
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- H10K77/10—Substrates, e.g. flexible substrates
- H10K77/111—Flexible substrates
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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Abstract
The invention discloses a method for preparing a skin sensor based on a sacrificial layer process, which is characterized by comprising the following steps of: preparing polyvinyl alcohol solution by the step (1); step (2), cleaning a hard substrate; step (3) coating the prepared polyvinyl alcohol solution on a hard substrate in a spinning way, and then heating and curing to form a film to obtain a polyvinyl alcohol sacrificial layer; step (4) after a flexible high polymer material is spin-coated on the polyvinyl alcohol sacrificial layer, heating to solidify the high polymer material to form a flexible substrate; step (5) integrating a sensor element on a flexible substrate; putting the polyvinyl alcohol sacrificial layer into deionized water and heating the deionized water to completely dissolve the polyvinyl alcohol sacrificial layer; and (7) peeling the flexible substrate integrated with the sensor element from the hard substrate, so that the skin sensor is prepared. The invention can ensure the integrity of the sensor after stripping, and the polyvinyl alcohol sacrificial layer is soluble in water, non-toxic and harmless, safe and reliable in operation and low in cost.
Description
Technical Field
The invention belongs to the field of flexible electronic skin, and particularly relates to a method for preparing an epidermal sensor based on a sacrificial layer process and a prepared product.
Background
Currently, flexible electronic devices are favored by people due to their characteristics of being soft and stretchable, and are applied to increasingly wide fields. The skin sensor is one type of sensors, which can be attached to the skin to measure the movement and physiological signals of the human body or make medical diagnosis. The traditional rigid sensor has no soft characteristic and can not be in good contact with the skin, which not only limits the improvement of signal quality, but also blocks the development from static biological detection to dynamic biological detection. The epidermal sensor effectively overcomes the defects, can be directly adhered to the skin through Van der Waals force and keep conformal contact, ensures the signal quality, and can not generate relative displacement along with the movement of a human body, thereby being applied to dynamic monitoring.
Most of the skin sensors are of a multilayer film structure and are composed of a flexible substrate and a functional device. The flexible substrate is a carrier of the functional device and is a flexible high polymer material film, and the flexible and stretchable characteristics of the sensor are realized.
Different from the traditional hard substrate, the flexible substrate needs to be attached to other hard substrates in the preparation process of the sensor to realize the integration of other devices, and finally the flexible substrate needs to be released from the hard substrate. Since the skin sensor is soft and easy to deform, how to peel it off without damage is a current technical problem.
The commonly used sacrificial layers in the traditional semiconductor process, such as photoresist and the like, have great toxicity, so that the protection of operators is required to be enhanced in the production process, and the residual amount in the product is required to be strictly controlled; secondly, the traditional sacrificial layer needs to be dissolved by an organic reagent or etched by an inorganic reagent, the former generally causes the swelling phenomenon of most flexible high polymer materials to damage the sensor structure, the latter generally has strong toxicity and is difficult to be completely removed at the later stage, and part of the reagent even reacts with the flexible substrate and cannot be used. It can be seen that the conventional sacrificial layer process in the semiconductor process has many defects.
Disclosure of Invention
Aiming at least one of the defects or improvement requirements in the prior art, the invention provides a method for preparing a skin sensor based on a sacrificial layer process and a prepared product, which can ensure the integrity of the sensor after stripping, and the polyvinyl alcohol sacrificial layer is soluble in water, non-toxic and harmless, safe and reliable in operation and low in cost.
To achieve the above object, according to one aspect of the present invention, there is provided a method for manufacturing a skin sensor based on a sacrificial layer process, comprising the steps of:
adding polyvinyl alcohol powder into deionized water for dissolving to prepare polyvinyl alcohol solution, and standing for later use;
cleaning the hard substrate by sequentially adopting acetone, isopropanol and deionized water, and then blowing the hard substrate by using nitrogen;
step (3), the polyvinyl alcohol solution prepared in the step (1) is coated on a hard substrate in a rotating mode, then the hard substrate is placed on a hot plate to be heated, water is heated and evaporated, and polyvinyl alcohol is solidified into a film, so that a polyvinyl alcohol sacrificial layer is prepared;
step (4), after the flexible high polymer material is spin-coated on the polyvinyl alcohol sacrificial layer, heating to solidify the high polymer material to form a flexible substrate;
integrating a sensor element on a flexible substrate to prepare a sample;
step (6), putting the obtained sample into deionized water and heating to completely dissolve the polyvinyl alcohol sacrificial layer;
and (7) peeling the flexible substrate integrated with the sensor element from the hard substrate, so that the skin sensor is prepared.
Preferably, in the step (1), the mass fraction of polyvinyl alcohol in the polyvinyl alcohol solution is 8-12%;
the preparation method of the polyvinyl alcohol solution comprises the following steps: weighing polyvinyl alcohol powder with a predetermined mass by using a balance, measuring deionized water with a predetermined volume by using a measuring cylinder, pouring the deionized water into a beaker, slowly adding the polyvinyl alcohol powder into the beaker, and stirring by using a glass rod; after uniformly mixing, adding magnetic beads into the solution, stirring for 4-6 hours on a magnetic stirrer, and simultaneously heating to promote dissolution, wherein the heating temperature is 60-80 ℃; after the polyvinyl alcohol is completely dissolved, the solution is kept stand at room temperature for later use.
Preferably, in the step (3), the spin coating speed of the polyvinyl alcohol solution is 300-1000 rpm, the spin coating time is 2-5 minutes, and the thickness of the obtained polyvinyl alcohol sacrificial layer is 10-50 micrometers.
Preferably, in the step (3), the curing temperature of the polyvinyl alcohol is 60-120 ℃, and the curing time is 5-20 minutes.
Preferably, in the step (2), the hard substrate includes any one of a monocrystalline silicon wafer, a polycrystalline silicon wafer, an epitaxial wafer, a quartz wafer and a glass wafer.
Preferably, in the step (4), the thickness of the flexible substrate of the sensor element is 30 to 200 micrometers.
Preferably, in the step (4), the flexible high polymer material used as the substrate of the sensor element is any one of polydimethylsiloxane, copolyester and platinum-catalyzed silicone rubber; the spin coating speed, the spin coating time, the curing temperature and the curing time of the flexible high polymer material need to be adjusted according to the type of the material.
Preferably, in the step (6), when the polyvinyl alcohol sacrificial layer is dissolved, the heating temperature is 60-90 ℃, and the dissolving time is 6-10 hours.
To achieve the above object, according to a second aspect of the present invention, there is also provided a skin sensor product manufactured according to the method for manufacturing a skin sensor based on a sacrificial layer process as described above.
In order to achieve the above object, according to a third aspect of the present invention, the present invention further provides a multilayer sensor structure with a hard substrate easy to peel, including a hard substrate, a polyvinyl alcohol sacrificial layer, a flexible substrate, and a sensor element, which are connected in sequence from bottom to top;
the preparation method of the polyvinyl alcohol sacrificial layer comprises the following steps: coating a polyvinyl alcohol solution on a hard substrate in a spinning way, then placing the hard substrate on a hot plate for heating, so that water is heated and evaporated, and curing polyvinyl alcohol to form a film to obtain a polyvinyl alcohol sacrificial layer;
the preparation method of the flexible substrate comprises the following steps: after the flexible high polymer material is spin-coated on the polyvinyl alcohol sacrificial layer, heating to solidify the high polymer material to form a flexible substrate;
integrating a sensor element on a flexible substrate to obtain the multilayer sensor structure;
the multilayer sensor structure can strip the flexible substrate integrated with the sensor element from the hard substrate in a mode of dissolving the polyvinyl alcohol sacrificial layer by deionized water.
The above-described preferred features may be combined with each other as long as they do not conflict with each other.
Generally, compared with the prior art, the above technical solution conceived by the present invention has the following beneficial effects:
1. the method for preparing the skin sensor based on the sacrificial layer process has the advantages that the process is simple and easy to operate, the success rate is high, the sensor can be easily stripped from the hard substrate after the sacrificial layer is completely dissolved, the polyvinyl alcohol as the sacrificial layer material and the solvent water for dissolving the sacrificial layer do not react with the flexible substrate or generate a swelling phenomenon, and the integrity of the stripped sensor is ensured;
2. the sacrificial layer is made of polyvinyl alcohol which is an organic high polymer material dissolved in water, is colorless, transparent, nontoxic and harmless, avoids pollution to the environment, ensures the safety of production personnel and users, and has good film forming property;
3. polyvinyl alcohol is a widely used industrial material and is inexpensive, and the use of this material as a sacrificial layer can reduce costs.
Drawings
FIG. 1 is a schematic of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other. The present invention will be described in further detail with reference to specific embodiments.
According to an aspect of the present invention, as shown in fig. 1, the present invention provides a method for preparing a skin sensor based on a sacrificial layer process, comprising the steps of:
and (1) adding polyvinyl alcohol powder into deionized water 3 for dissolving to prepare polyvinyl alcohol solution, and standing for later use. Preferably, the mass fraction of the polyvinyl alcohol in the polyvinyl alcohol solution is 8-12%. The preparation method of the polyvinyl alcohol solution comprises the following steps: weighing polyvinyl alcohol powder with a predetermined mass by using balance, measuring deionized water 3 with a predetermined volume by using a measuring cylinder, pouring into a beaker, slowly adding the polyvinyl alcohol powder into the beaker, and stirring by using a glass rod; after uniformly mixing, adding magnetic beads into the solution, stirring for 4-6 hours on a magnetic stirrer, and simultaneously heating to promote dissolution, wherein the heating temperature is 60-80 ℃; after the polyvinyl alcohol is completely dissolved, the solution is kept stand at room temperature for later use.
And (2) cleaning the hard substrate 4 by sequentially adopting acetone 1, isopropanol 2 and deionized water 3, and then blowing by using nitrogen 5. Preferably, the hard substrate 4 is a monocrystalline silicon wafer, a polycrystalline silicon wafer, an epitaxial wafer, a quartz wafer, a glass wafer, or the like.
And (3) coating the polyvinyl alcohol solution prepared in the step (1) on a hard substrate 4 in a spinning mode, then placing the hard substrate 4 on a hot plate to be heated, so that water is heated and evaporated, and curing polyvinyl alcohol to form a film to obtain the polyvinyl alcohol sacrificial layer 6. Preferably, the spin coating speed of the polyvinyl alcohol solution is 300-1000 rpm, the spin coating time is 2-5 minutes, and the thickness of the obtained polyvinyl alcohol sacrificial layer 6 is 10-50 micrometers. Preferably, the curing temperature of the polyvinyl alcohol is 60-120 ℃, and the curing time is 5-20 minutes.
And (4) after the flexible high polymer material is spin-coated on the polyvinyl alcohol sacrificial layer 6, heating to solidify the high polymer material to form the flexible substrate 7. Preferably, the flexible substrate 7 has a thickness of 30 to 200 μm. Preferably, the flexible high polymer material used as the substrate of the sensor element 8 is any one of polydimethylsiloxane, copolyester and platinum-catalyzed silicone rubber; the spin coating speed, the spin coating time, the curing temperature and the curing time of the flexible high polymer material need to be adjusted according to the type of the material.
And (5) integrating the sensor element 8 on the flexible substrate 7 to obtain a sample. The sensor element 8 is an existing sensor element of various types, such as a temperature sensor, a humidity sensor, a pressure sensor, a smell sensor, and the like.
And (6) putting the obtained sample into deionized water 3 in a heat-resistant glass vessel 9 and heating to completely dissolve the polyvinyl alcohol sacrificial layer 6 (shown in figure 1e as the polyvinyl alcohol sacrificial layer in the dissolving process). Preferably, the heating temperature is 60-90 ℃ and the dissolving time is 6-10 hours when the polyvinyl alcohol sacrificial layer 6 is dissolved.
And (7) peeling the flexible substrate 7 integrated with the sensor element 8 from the hard substrate 4, so that the skin sensor is prepared.
The epidermis sensor is one kind of flexible electron device, is the multilayer film structure, comprises flexible base and functional device, possesses soft, tensile characteristic, can attach on skin surface. The flexible substrate is used as a carrier of a functional device and is made of soft and stretchable high polymer materials such as polydimethylsiloxane. The material has good insulation property to ensure the stable work of the functional device, and simultaneously has good biocompatibility, thereby avoiding causing allergic symptoms and reducing the uncomfortable feeling of long-term wearing. By adjusting the softness degree of the flexible substrate, the whole sensor has mechanical properties similar to those of the skin, so that the sensor can be closely attached to the surface of the skin through van der Waals force and keeps conformal contact with the skin, and the sensor can deform along with the movement of a human body and does not generate relative displacement. Compared with the traditional hard sensor, the epidermal sensor can be tightly attached to the skin and keep conformal contact on one hand, so that the contact area between the sensor and the skin is increased to the maximum extent, and the gap between the sensor and the skin is reduced, thereby being beneficial to accurately and stably acquiring human body motion and physiological signals by a functional device; on the other hand, the epidermal sensor has good wearability, can not generate relative displacement along with the motion of a human body, not only can be used for motion monitoring, but also can be worn for a long time, and collects richer and complete signals. Therefore, the epidermal sensor has great application potential.
Different from the traditional hard substrate, the flexible substrate needs to be attached to other hard substrates in the preparation process of the skin sensor to realize the integration of other devices, and finally the flexible substrate needs to be released from the hard substrate. Since the skin sensor is soft and easy to deform, how to peel it off without damage is a current technical problem. In order to solve the problem, the invention provides a preparation method based on a sacrificial layer process, and the integrity of the stripped sensor is ensured. The sacrificial layer is made of polyvinyl alcohol which is an organic high polymer material dissolved in water, is colorless, transparent, nontoxic and harmless, and has good film forming property. This material has many advantages over the sacrificial layers commonly used in conventional semiconductor processing. Firstly, the traditional sacrificial layer such as photoresist has great toxicity, so that the protection of operators is required to be enhanced in the production process, the residual amount in the product is required to be strictly controlled, and the polyvinyl alcohol is an environment-friendly material harmless to human bodies, so that the safety of the operators in the production process can be ensured, the residues of the material in the product are not required to be worried, and the complexity of operation and the production cost are reduced. Second, conventional sacrificial layers need to be dissolved with organic reagents or etched using inorganic reagents. The former generally causes swelling of most flexible high polymer materials to destroy the sensor structure, while the latter generally has strong toxicity and is difficult to remove completely at the later stage, and part of the reagent even reacts with the flexible substrate and cannot be used. And the polyvinyl alcohol sacrificial layer adopts water as a solvent, so that the polyvinyl alcohol sacrificial layer is safe and harmless, does not react with the flexible substrate or cause swelling, and does not pollute the environment. In addition, polyvinyl alcohol is a widely used industrial material and is inexpensive, and the use of such a material as a sacrificial layer can reduce the cost.
According to a second aspect of the invention, there is also provided a skin sensor product made according to the method for making a skin sensor based on a sacrificial layer process as described above.
According to a third aspect of the present invention, the present invention further provides a multilayer sensor structure with a hard substrate 4 easy to peel, including a hard substrate 4, a polyvinyl alcohol sacrificial layer 6, a flexible substrate 7, and a sensor element 8, which are connected in sequence from bottom to top.
The preparation method of the polyvinyl alcohol sacrificial layer 6 comprises the following steps: and (3) coating the polyvinyl alcohol solution on the hard substrate 4 in a spinning way, then placing the hard substrate 4 on a hot plate for heating, so that water is heated and evaporated, and curing the polyvinyl alcohol to form a film to obtain the polyvinyl alcohol sacrificial layer 6.
The preparation method of the flexible substrate 7 comprises the following steps: the flexible polymer material is spin coated on the polyvinyl alcohol sacrificial layer 6 and then heated to cure the polymer material to form the flexible substrate 7.
The multilayer sensor structure is made by integrating the sensor element 8 on a flexible substrate 7.
The multilayer sensor structure can be peeled off the flexible substrate 7 integrated with the sensor element 8 from the rigid substrate 4 by dissolving the polyvinyl alcohol sacrificial layer 6 with the deionized water 3.
The multilayer sensor structure can be an intermediate product of the preparation method of the invention, and the specific process steps can be referred to the preparation method.
The fabrication process of the sacrificial layer process-based skin sensor and the design of its key process parameters for mounting the present invention will be more clearly explained below with reference to some specific embodiments.
As a premise of each embodiment, firstly, the polyvinyl alcohol powder is added into deionized water 3 to be dissolved, and a polyvinyl alcohol solution is prepared and stands for standby.
Example 1:
a, selecting a 4-inch monocrystalline silicon wafer as a hard substrate 4, ultrasonically cleaning the polished surface of the silicon wafer by sequentially adopting acetone 1, isopropanol 2 and deionized water 3, wherein the cleaning time of each reagent is 2 minutes, finally blowing the surface by using nitrogen 5, and standing for later use.
b, coating a polyvinyl alcohol solution with the mass fraction of 10% on the hard substrate 4 in a spinning mode, wherein the spinning speed is 500 rpm, and the spinning time is 5 minutes. And then, the hard substrate 4 is placed on a hot plate to be heated at 80 ℃ for 20 minutes, so that water is heated and evaporated, and the polyvinyl alcohol is solidified into a film, thereby completing the preparation of the sacrificial layer. The polyvinyl alcohol is produced by Shanghai minister-start chemical technology Co., Ltd, the type is PVA1788, the polymerization degree is 1650-1850, and the alcoholysis degree is 88%.
c, coating polydimethylsiloxane on the polyvinyl alcohol sacrificial layer 6 in a spinning mode at the speed of 500 rpm for 3 minutes, and heating to cure the polydimethylsiloxane to obtain the flexible substrate 7. The manufacturer of the polydimethylsiloxane is Dow Corning company, the model is Sylgard 184, and the mass ratio of the prepolymer to the curing agent is 10: 1. The curing temperature was 80 ℃ and the curing time was 1 hour. The flexible substrate 7 has a thickness of 55 μm under this condition.
d integrating the sensor element 8 on the flexible substrate 7.
e, putting the sample into deionized water 3, and heating for 7 hours at 90 ℃ until the polyvinyl alcohol sacrificial layer 6 is completely dissolved.
f peeling the sensor off the silicon wafer. Thus, the skin sensor is completed.
The thickness of the flexible substrate 7 of the sensor obtained in this example was 55 microns.
Example 2:
a, selecting a 4-inch monocrystalline silicon wafer as a hard substrate 4, ultrasonically cleaning the polished surface of the silicon wafer by sequentially adopting acetone 1, isopropanol 2 and deionized water 3, wherein the cleaning time of each reagent is 2 minutes, finally blowing the surface by using nitrogen 5, and standing for later use.
b the material and preparation method of the sacrificial layer are the same as those of example 1.
c, spinning platinum catalytic silicon rubber as a substrate of the sensor on the polyvinyl alcohol sacrificial layer 6 at the speed of 800 rpm for 3 minutes, and standing at room temperature for 2 hours to cure the platinum catalytic silicon rubber to obtain the flexible substrate 7. The type of the platinum-catalyzed silicone rubber is Ecoflex 00-30, and the mass ratio of the two components is 1: 1. The substrate thickness under this condition was 50 microns.
d integrating the sensor element 8 on the flexible substrate 7.
e, putting the sample into deionized water 3, and heating for 8 hours at 80 ℃ until the polyvinyl alcohol sacrificial layer 6 is completely dissolved.
f peeling the sensor off the silicon wafer. Thus, the skin sensor is completed.
The thickness of the flexible substrate 7 of the sensor obtained in this example was 50 microns.
Example 3:
a, selecting a quartz plate with the diameter of 60mm as a hard substrate 4, ultrasonically cleaning the surface of the quartz plate by sequentially adopting acetone 1, isopropanol 2 and deionized water 3 for 2 minutes, finally drying the surface by using nitrogen 5, and standing for later use.
b the material and preparation method of the sacrificial layer are the same as those of example 1.
c spin coating polydimethylsiloxane as a substrate of the sensor on the polyvinyl alcohol sacrificial layer 6, wherein the spin coating speed is 650 rpm, the spin coating time is 3 minutes, and then heating to cure the polydimethylsiloxane. The manufacturer of the polydimethylsiloxane is Dow Corning company, the model is Sylgard 184, and the mass ratio of the prepolymer to the curing agent is 10: 1. The curing temperature was 80 ℃ and the curing time was 1 hour. The substrate thickness under this condition was 45 μm.
d integrating the sensor element 8 on the flexible substrate 7.
e, putting the sample into deionized water 3, and heating for 7 hours at 90 ℃ until the polyvinyl alcohol sacrificial layer 6 is completely dissolved.
And f, peeling the sensor from the quartz plate. Thus, the skin sensor is completed.
The thickness of the flexible substrate 7 of the sensor obtained in this example was 45 μm.
Example 4:
a, selecting a quartz plate with the diameter of 60mm as a hard substrate 4, ultrasonically cleaning the surface of the quartz plate by sequentially adopting acetone 1, isopropanol 2 and deionized water 3 for 2 minutes, finally drying the surface by using nitrogen 5, and standing for later use.
b the material and preparation method of the sacrificial layer are the same as those of example 1.
c, spinning platinum catalytic silicon rubber as a substrate of the sensor on the polyvinyl alcohol sacrificial layer 6 at the speed of 1000 rpm for 3 minutes, and standing at room temperature for 2 hours to cure the platinum catalytic silicon rubber to obtain the flexible substrate 7. The type of the platinum-catalyzed silicone rubber is Ecoflex 00-30, and the mass ratio of the two components is 1: 1. The substrate thickness under this condition was 40 microns.
d integrating the sensor element 8 on the flexible substrate 7.
e, putting the sample into deionized water 3, and heating for 8 hours at 80 ℃ until the polyvinyl alcohol sacrificial layer 6 is completely dissolved.
And f, peeling the sensor from the quartz plate. Thus, the skin sensor is completed.
The thickness of the flexible substrate 7 of the resulting sensor of this example was 40 microns.
Example 5:
a, selecting a quartz plate with the diameter of 60mm as a hard substrate 4, ultrasonically cleaning the surface of the quartz plate by sequentially adopting acetone 1, isopropanol 2 and deionized water 3 for 2 minutes, finally drying the surface by using nitrogen 5, and standing for later use.
b the material and preparation method of the sacrificial layer are the same as those of example 1.
c, coating polydimethylsiloxane on the polyvinyl alcohol sacrificial layer 6 in a spinning mode at the speed of 1000 rpm for 2 minutes, and heating to cure the polydimethylsiloxane to obtain the flexible substrate 7. The manufacturer of the polydimethylsiloxane is Dow Corning company, the model is Sylgard 184, and the mass ratio of the prepolymer to the curing agent is 10: 1. The curing temperature was 80 ℃ and the curing time was 1 hour. The substrate thickness under this condition was 30 μm.
d integrating the sensor element 8 on the flexible substrate 7.
e, putting the sample into deionized water 3, and heating for 7 hours at 90 ℃ until the polyvinyl alcohol sacrificial layer 6 is completely dissolved.
And f, peeling the sensor from the quartz plate. Thus, the skin sensor is completed.
The thickness of the flexible substrate 7 of the sensor obtained in this example was 30 μm.
Example 6:
unlike other embodiments, in step c, the copolyester is used as a substrate of the sensor, and other process parameters are adaptively adjusted.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (10)
1. A method for preparing a skin sensor based on a sacrificial layer process is characterized by comprising the following steps:
adding polyvinyl alcohol powder into deionized water for dissolving to prepare polyvinyl alcohol solution, and standing for later use;
cleaning the hard substrate by sequentially adopting acetone, isopropanol and deionized water, and then blowing the hard substrate by using nitrogen;
step (3), the polyvinyl alcohol solution prepared in the step (1) is coated on a hard substrate in a rotating mode, then the hard substrate is placed on a hot plate to be heated, water is heated and evaporated, and polyvinyl alcohol is solidified into a film, so that a polyvinyl alcohol sacrificial layer is prepared;
step (4), after the flexible high polymer material is spin-coated on the polyvinyl alcohol sacrificial layer, heating to solidify the high polymer material to form a flexible substrate;
integrating a sensor element on a flexible substrate to prepare a sample;
step (6), putting the obtained sample into deionized water and heating to completely dissolve the polyvinyl alcohol sacrificial layer;
and (7) peeling the flexible substrate integrated with the sensor element from the hard substrate, so that the skin sensor is prepared.
2. The method of manufacturing a skin sensor based on a sacrificial layer process according to claim 1, wherein: in the step (1), the mass fraction of polyvinyl alcohol in the polyvinyl alcohol solution is 8-12%;
the preparation method of the polyvinyl alcohol solution comprises the following steps: weighing polyvinyl alcohol powder with a predetermined mass by using a balance, measuring deionized water with a predetermined volume by using a measuring cylinder, pouring the deionized water into a beaker, slowly adding the polyvinyl alcohol powder into the beaker, and stirring by using a glass rod; after uniformly mixing, adding magnetic beads into the solution, stirring for 4-6 hours on a magnetic stirrer, and simultaneously heating to promote dissolution, wherein the heating temperature is 60-80 ℃; after the polyvinyl alcohol is completely dissolved, the solution is kept stand at room temperature for later use.
3. The method of manufacturing a skin sensor based on a sacrificial layer process according to claim 1, wherein: in the step (3), the spin-coating speed of the polyvinyl alcohol solution is 300-1000 rpm, the spin-coating time is 2-5 minutes, and the thickness of the obtained polyvinyl alcohol sacrificial layer is 10-50 microns.
4. The method of manufacturing a skin sensor based on a sacrificial layer process according to claim 1, wherein: in the step (3), the curing temperature of the polyvinyl alcohol is 60-80 ℃, and the curing time is 5-20 minutes.
5. The method of manufacturing a skin sensor based on a sacrificial layer process according to claim 1, wherein: in the step (2), the hard substrate includes any one of a monocrystalline silicon wafer, a polycrystalline silicon wafer, an epitaxial wafer, a quartz wafer and a glass wafer.
6. The method of manufacturing a skin sensor based on a sacrificial layer process according to claim 1, wherein: in the step (4), the thickness of the flexible substrate of the sensor element is 30-200 microns.
7. The method of manufacturing a skin sensor based on a sacrificial layer process according to claim 1, wherein: in the step (4), the flexible high polymer material used as the substrate of the sensor element adopts any one of polydimethylsiloxane, copolyester and platinum-catalyzed silicon rubber; the spin coating speed, the spin coating time, the curing temperature and the curing time of the flexible high polymer material need to be adjusted according to the type of the material.
8. The method of manufacturing a skin sensor based on a sacrificial layer process according to claim 1, wherein: in the step (6), when the polyvinyl alcohol sacrificial layer is dissolved, the heating temperature is 60-90 ℃, and the dissolving time is 6-10 hours.
9. Skin sensor product obtainable by a method for manufacturing a skin sensor based on a sacrificial layer process according to any of claims 1-8.
10. A multilayer sensor structure with a hard substrate easy to peel off is characterized in that: the sensor comprises a hard substrate, a polyvinyl alcohol sacrificial layer, a flexible substrate and a sensor element which are sequentially connected from bottom to top;
the preparation method of the polyvinyl alcohol sacrificial layer comprises the following steps: coating a polyvinyl alcohol solution on a hard substrate in a spinning way, then placing the hard substrate on a hot plate for heating, so that water is heated and evaporated, and curing polyvinyl alcohol to form a film to obtain a polyvinyl alcohol sacrificial layer;
the preparation method of the flexible substrate comprises the following steps: after the flexible high polymer material is spin-coated on the polyvinyl alcohol sacrificial layer, heating to solidify the high polymer material to form a flexible substrate;
integrating a sensor element on a flexible substrate to obtain the multilayer sensor structure;
the multilayer sensor structure strips the flexible substrate integrated with the sensor element from the hard substrate in a mode of dissolving the polyvinyl alcohol sacrificial layer by deionized water.
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| CN113185912A (en) * | 2021-03-16 | 2021-07-30 | 浙江大学 | Flexible thermal protection substrate for wearable electronic equipment and preparation method thereof |
| CN113465665B (en) * | 2021-06-29 | 2023-11-17 | 西北工业大学 | Preparation method of flexible integrated sensor |
| CN114098746B (en) * | 2021-10-18 | 2024-07-09 | 中国科学院深圳先进技术研究院 | Ultra-narrow high-density multi-relative independent-channel flexible electrode and preparation method and application thereof |
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