CN107843772A - Sensitivity multiplication vacuum gauge pipe group - Google Patents
Sensitivity multiplication vacuum gauge pipe group Download PDFInfo
- Publication number
- CN107843772A CN107843772A CN201610832495.3A CN201610832495A CN107843772A CN 107843772 A CN107843772 A CN 107843772A CN 201610832495 A CN201610832495 A CN 201610832495A CN 107843772 A CN107843772 A CN 107843772A
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- China
- Prior art keywords
- vacuum
- vacuum gauge
- thin film
- capacitor thin
- capacitor
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- 230000035945 sensitivity Effects 0.000 title claims abstract description 27
- 239000003990 capacitor Substances 0.000 claims description 50
- 239000010409 thin film Substances 0.000 claims description 44
- 239000010408 film Substances 0.000 claims description 10
- 230000004308 accommodation Effects 0.000 claims description 9
- 229910045601 alloy Inorganic materials 0.000 claims description 7
- 239000000956 alloy Substances 0.000 claims description 7
- 230000005611 electricity Effects 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 description 16
- 238000000034 method Methods 0.000 description 9
- 229910001090 inconels X-750 Inorganic materials 0.000 description 7
- 238000004458 analytical method Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010291 electrical method Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2605—Measuring capacitance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention provides a sensitivity multiplication vacuum gauge group, and relates to the technical field of semiconductors.
Description
Technical field
The present invention relates to technical field of semiconductors, more particularly to a kind of sensitivity enhancement vacuum gauge group.
Background technology
With the continuous progress of science and technology, many high-tech sectors need high vacuum environment.Especially in semiconductor
The many processing steps of manufacturing field need to carry out under condition of high vacuum degree, for example etch, the technique such as deposition.
In above-mentioned semiconductor manufacturing, the measurement for vacuum is often achieved by the way of vacuum gauge, such as
The measuring principle of capacitor thin film vacuum gauge is that gas is incorporated into measuring chamber by air inlet pipe, because gas pressure effect makes electric capacity
Film deforms upon, and causes the change of distance between capacitor thin film and fixed polar plate, and then causes capacitance therebetween
Change, recycle electrical method to measure capacitance, it is true to weigh to obtain the relation between capacitance and gas pressure by calibration
The size of reciprocal of duty cycle.
But those skilled in the art have found in practice process：
Vacuum gauge of the prior art Shortcomings in sensitivity, stability.
The content of the invention
In view of the above problems, it is proposed that the present invention so as to provide one kind overcome above mentioned problem or at least in part solve on
State a kind of sensitivity enhancement vacuum gauge group of problem.
In order to solve the above problems, the application provides a kind of sensitivity enhancement vacuum gauge group, and the vacuum gauge group is extremely
Including two vacuum gauges less, at least two vacuum gauge is set by the way of in parallel, wherein, the vacuum gauge bag
Include：One housing, the housing is interior to have an accommodation space；One capacitor thin film, the capacitor thin film are arranged at the accommodation space
It is interior, and the accommodation space is divided into detected space and vacuum space；One air inlet, the air inlet are arranged at the housing
On, and the detected space is connected by the air inlet with air inlet pipe；One fixed plate electrode, the fixed plate electrode are arranged at
In the vacuum space；One electrode, the electrode are arranged on the housing, and are connected with the fixed plate electrode；Wherein, institute
State capacitor thin film and the fixed plate electrode forms differential capacitor.
Preferably, the vacuum gauge also includes：One getter, it is arranged on the housing.
Preferably, the vacuum space is vacuum room.
Preferably, the capacitor thin film is Inconel X750 alloy capacitor thin films.
Preferably, the capacitor thin film is Inconel X750 Langaloy capacitor thin films.
Preferably, the capacitor thin film thickness is 10-50um.
Preferably, the capacitor thin film diameter 30-110mm.
The application has the beneficial effect that：
A kind of sensitivity enhancement vacuum gauge group that the application provides employs at least two vacuum gauges and is connected in parallel,
The size of capacitor thin film in whole measurement implementation process is effectively raised, improves the measurement sensitivity of whole vacuum.
Described above is only the general introduction of technical solution of the present invention, in order to better understand the technological means of the present invention,
And can be practiced according to the content of specification, and in order to allow above and other objects of the present invention, feature and advantage can
Become apparent, below especially exemplified by the embodiment of the present invention.
Brief description of the drawings
By reading the detailed description of hereafter preferred embodiment, it is various other the advantages of and benefit it is common for this area
Technical staff will be clear understanding.Accompanying drawing is only used for showing the purpose of preferred embodiment, and is not considered as to the present invention
Limitation.And in whole accompanying drawing, identical part is denoted by the same reference numerals.In the accompanying drawings：
Fig. 1 shows the structural representation of single vacuum gauge according to an embodiment of the invention；
Fig. 2 shows the instrumentation plan according to another two vacuum gauge of embodiment of the invention.
Embodiment
The exemplary embodiment of the disclosure is more fully described below with reference to accompanying drawings.Although the disclosure is shown in accompanying drawing
Exemplary embodiment, it being understood, however, that may be realized in various forms the disclosure without should be by embodiments set forth here
Limited.On the contrary, these embodiments are provided to facilitate a more thoroughly understanding of the present invention, and can be by the scope of the present disclosure
Completely it is communicated to those skilled in the art.
The embodiments of the invention provide a kind of sensitivity enhancement vacuum gauge group to employ the parallel connection of at least two vacuum gauges
Together, the size of capacitor thin film in whole measurement implementation process is effectively raised, improves the measurement spirit of whole vacuum
Sensitivity.
Specifically, the sensitive of capacitor thin film vacuum gauge is improved, it is necessary to calculation formula according to parallel plate capacitor size：To be designed, wherein ε represents dielectric constant, and S represents the area of fixed plate electrode, and d is two fixed electricity
The distance between pole plate and capacitor thin film, R are the radiuses of capacitor thin film.Simultaneously according to electric capacity parallel connection formula C=C1+C2, two
Capacitor thin film vacuum gauge is connected in parallel, and the whole electric capacity that measures can also increase.In practical operation, change the size of capacitor thin film
(size for changing S either d) or some are made in capacitance connection structure change (such as parallel connection of multiple electric capacity vacuum gauges)
To change the size of electric capacity, it is possible to strengthen the sensitivity of capacitor thin film vacuum gauge, electric capacity is bigger, and circuit measuring relative accuracy is just
It is higher.So for the embodiment of the present application, it is connected in parallel by two or even multiple vacuum gauges, you can with effective
The size of the capacitor thin film in whole measurement implementation process is improved, and then improves the sensitivity entirely measured.Further, lead to
The vacuum gauge for crossing multiple general sensitivity is connected in parallel, and the electric capacity that can effectively improve in whole measurement implementation process is thin
The size of film, also there is the effect for improving whole vacuum measurement precision.Specifically, for the volume cost in parallel of vacuum gauge
Application embodiment is not particularly limited, and can specifically be determined according to the needs of measurement accuracy and the feasibility of circuit analysis
The number of vacuum gauge.
Specifically, as shown in Figure 1, 2, the application provides a kind of sensitivity enhancement vacuum gauge group, the vacuum gauge
Group comprises at least two vacuum gauges, and at least two vacuum gauge is set by the way of in parallel, wherein, the vacuum gauge
Pipe includes：
One housing 1, the housing 1 is interior to have an accommodation space；
One capacitor thin film 3, the capacitor thin film 3 are arranged in the accommodation space, and the accommodation space be divided into by
Survey space 21 and vacuum space 22；
One air inlet 4, the air inlet 4 is arranged on the housing 1, and the detected space 21 passes through the air inlet
4 connect with air inlet pipe 5；
One fixed plate electrode 6, the fixed plate electrode 6 are arranged in the vacuum space 22；
One electrode 7, the electrode 7 are arranged on the housing 1, and are connected with the fixed plate electrode 6；
Wherein, the capacitor thin film 3 and the fixed plate electrode 6 form differential capacitor.
From the above as can be seen that fixed plate electrode 6 and float electrode film 3 constitute differential capacitor, and as survey
Measure two movable bridge arms of the electric bridge of circuit 9, when movable capacitor thin film 3 is in home position, capacitive differential zero.When tested
For gas after the entrance of air inlet pipe 5, the air pressure at air inlet in 4 detected space 21 can form gas with the air pressure in vacuum space 22
Pressure difference, the draught head on both sides cause capacitor thin film 3 to deform upon, and it is no longer zero to cause capacitive differential, now the uneven meeting of electric bridge
Produce electric signal.Above-said current signal can be obtained by the actual signal that can be weighed after being put into and detection is handled.
For the application, after two or even multiple vacuum gauge parallel connections, each thin-film capacitor can deform upon, production
Raw electric signal obtains higher sensitivity after the Balance Treatment of measuring circuit.Specifically, by above-mentioned multiple capacitor thin films
Parallel connection deforms upon, and is then electric signal the reacting condition of electric capacity, then is finally obtained by the analysis of electric signal final true
Reciprocal of duty cycle result, it is however generally that, the vacuum result has higher sensitivity and measurement essence than the analysis of single vacuum gauge electric signal
Degree.It is such as higher than single precision about one times with two vacuum gauge parallel connections, actual measured results.
Specifically, capacitor thin film described above can use Inconel X750 alloy capacitor thin films, and the alloy is not only
With good corrosion-resistant and oxidation resistant performance, also with good formability and welding performance.In further, the electricity
Inconel X750 Langaloy capacitor thin films can also be used by holding film.
In the size selection of the capacitor thin film, it is however generally that need to consider the whole area of the thickness of film and film
Relation, it is however generally that, the thickness of electric capacity is in 10-50um, diameter 30-110mm.
For a specific embodiment, obtained by the method for experiment：It is thin using Inconel X750 alloy electric capacity
Film, its thickness is 30um, a diameter of 50mm, and is tested by the way of two vacuum gauges are in parallel, and the data of acquisition are：
Sensitivity of the measurement sensitivity than single capacitor thin film vacuum gauge improves 80 about percent.
Further, the vacuum gauge group also includes getter 8, is arranged on the housing 1, wherein, getter 8 is used
Air in vacuum space 22, make the vacuum room in vacuum space, and then lift the accuracy and sensitivity entirely measured.
The embodiment of the present application has the beneficial effect that：
A kind of sensitivity enhancement vacuum gauge group that the embodiment of the present application provides employs the parallel connection of at least two vacuum gauges
Together, the size of capacitor thin film in whole measurement implementation process is effectively raised, improves the measurement spirit of whole vacuum
Sensitivity.
Further, the embodiment of the present application is connected in parallel by the vacuum gauge of multiple general sensitivity, can be effective
The whole measurement implementation process of raising in capacitor thin film size, also there is the effect for improving whole vacuum measurement precision.
Further, in the embodiment of the present application, capacitor thin film can use Inconel X750 alloy capacitor thin films, the conjunction
Gold not only has good corrosion-resistant and oxidation resistant performance, also with good formability and welding performance
Further, the embodiment of the present application is by using Inconel X750 alloy capacitor thin films, and its thickness is 30um, directly
Footpath is 50mm, and is tested by the way of two vacuum gauges are in parallel, and the data of acquisition are：Measurement sensitivity is than single electricity
Hold the sensitivity that film vacuum is regulated and improve 80 about percent.
Further, the air that the embodiment of the present application is used in vacuum space 22 by getter 8, makes in vacuum space
Vacuum room, and then lift the accuracy and sensitivity entirely measured.
It should be noted last that above embodiment is merely illustrative of the technical solution of the present invention and unrestricted,
Although the present invention is described in detail with reference to example, it will be understood by those within the art that, can be to the present invention
Technical scheme modify or equivalent substitution, without departing from the spirit and scope of technical solution of the present invention, it all should cover
Among scope of the presently claimed invention.
Claims (7)
- A kind of 1. sensitivity enhancement vacuum gauge group, it is characterised in that：The vacuum gauge group comprises at least two vacuum gauges, At least two vacuum gauge is set by the way of in parallel, wherein, the vacuum gauge includes：One housing, the housing is interior to have an accommodation space；One capacitor thin film, the capacitor thin film are arranged in the accommodation space, and the accommodation space is divided into detected space And vacuum space；One air inlet, the air inlet are arranged on the housing, and the detected space passes through the air inlet and air inlet pipe Connection；One fixed plate electrode, the fixed plate electrode are arranged in the vacuum space；One electrode, the electrode are arranged on the housing, and are connected with the fixed plate electrode；Wherein, the capacitor thin film and the fixed plate electrode form differential capacitor.
- 2. vacuum gauge group as claimed in claim 1, it is characterised in that the vacuum gauge also includes：One getter, it is arranged on the housing.
- 3. vacuum gauge group as claimed in claim 2, it is characterised in that the vacuum space is vacuum room.
- 4. vacuum gauge group as claimed in claim 1, it is characterised in that the capacitor thin film is InconelX750 alloys electricity Hold film.
- 5. vacuum gauge group as claimed in claim 4, it is characterised in that the capacitor thin film is the nickelic conjunctions of InconelX750 Gold capacitor film.
- 6. vacuum gauge group as claimed in claim 1, it is characterised in that the capacitor thin film thickness is 10-50um.
- 7. vacuum gauge group as claimed in claim 1, it is characterised in that the capacitor thin film diameter 30-110mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610832495.3A CN107843772A (en) | 2016-09-19 | 2016-09-19 | Sensitivity multiplication vacuum gauge pipe group |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610832495.3A CN107843772A (en) | 2016-09-19 | 2016-09-19 | Sensitivity multiplication vacuum gauge pipe group |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107843772A true CN107843772A (en) | 2018-03-27 |
Family
ID=61657283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610832495.3A Pending CN107843772A (en) | 2016-09-19 | 2016-09-19 | Sensitivity multiplication vacuum gauge pipe group |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107843772A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2136465Y (en) * | 1992-10-21 | 1993-06-16 | 清华大学 | Capacitive membrane pressure transducer with sputtering electrode |
| CN2288431Y (en) * | 1996-09-28 | 1998-08-19 | 上海无线电二十三厂 | Capacitive baroceptor |
| CN1225494A (en) * | 1998-02-04 | 1999-08-11 | 胡耿 | Shape-changeable and resilience film capacitor having additional electrode plate |
| CN1283267A (en) * | 1997-12-23 | 2001-02-07 | 尤纳克西斯巴尔策斯有限公司 | Capacitive vacuum measuring cell |
| CN1334451A (en) * | 2000-07-15 | 2002-02-06 | 山东省硅酸盐研究设计院 | Ceramic pressure sensor and differential pressure sensor |
| US20090158853A1 (en) * | 2007-12-20 | 2009-06-25 | Walter Christian Berner | Diaphragm pressure measuring cell arrangement |
| CN101776502A (en) * | 2008-12-24 | 2010-07-14 | 佳能安内华股份有限公司 | Capacitance diaphragm gauge and vaccum apparatus |
| CN105044390A (en) * | 2014-04-16 | 2015-11-11 | 富士电机株式会社 | Sensitivity inspection system and sensitivity inspection method |
-
2016
- 2016-09-19 CN CN201610832495.3A patent/CN107843772A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2136465Y (en) * | 1992-10-21 | 1993-06-16 | 清华大学 | Capacitive membrane pressure transducer with sputtering electrode |
| CN2288431Y (en) * | 1996-09-28 | 1998-08-19 | 上海无线电二十三厂 | Capacitive baroceptor |
| CN1283267A (en) * | 1997-12-23 | 2001-02-07 | 尤纳克西斯巴尔策斯有限公司 | Capacitive vacuum measuring cell |
| CN1225494A (en) * | 1998-02-04 | 1999-08-11 | 胡耿 | Shape-changeable and resilience film capacitor having additional electrode plate |
| CN1334451A (en) * | 2000-07-15 | 2002-02-06 | 山东省硅酸盐研究设计院 | Ceramic pressure sensor and differential pressure sensor |
| US20090158853A1 (en) * | 2007-12-20 | 2009-06-25 | Walter Christian Berner | Diaphragm pressure measuring cell arrangement |
| CN101776502A (en) * | 2008-12-24 | 2010-07-14 | 佳能安内华股份有限公司 | Capacitance diaphragm gauge and vaccum apparatus |
| CN105044390A (en) * | 2014-04-16 | 2015-11-11 | 富士电机株式会社 | Sensitivity inspection system and sensitivity inspection method |
Non-Patent Citations (1)
| Title |
|---|
| 孙雯君 等: "小型电容薄膜真空规的设计", 《真空与低温》 * |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20180327 |