CN106925790B - The cooling quartzy lamps and lanterns of catalytic behavior of materials water - Google Patents
The cooling quartzy lamps and lanterns of catalytic behavior of materials water Download PDFInfo
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- CN106925790B CN106925790B CN201511010961.1A CN201511010961A CN106925790B CN 106925790 B CN106925790 B CN 106925790B CN 201511010961 A CN201511010961 A CN 201511010961A CN 106925790 B CN106925790 B CN 106925790B
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- cooling
- outer tube
- lanterns
- lamps
- pressing sleeve
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/14—Making metallic powder or suspensions thereof using physical processes using electric discharge
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Plasma Technology (AREA)
Abstract
The present invention relates to a kind of cooling quartzy lamps and lanterns of catalytic behavior of materials water, the lamps and lanterns are by upper bracket, powder feeding gun platform, tapered sleeve, powder feeding rifle, lock swivel nut, inner tube set, inner tube pressing sleeve, intermediate support, isocon, pressing sleeve on middle pipe, support plate, undersetting, pillar, pressing sleeve on outer tube, pressing sleeve under outer tube, pedestal, pillar sheath, water-cooled jacket, transition disc, pressing sleeve under middle pipe, axis, middle pipe, water inlet, outer tube, induction coil, inner tube, water outlet, pressing plate, cooling air import, ion-gas air inlet, igniter 31 and the assembling of multiple sealing rings are constituted, the present invention is used to manufacture the High-frequency plasma multifunctional powder production equipment of metal nano powder, with maintenance and it is easy to maintain, cooling and good heat dissipation effect, igniting is convenient, the advantages that energy utilization rate is high.
Description
Technical field:
The present invention relates to nano material manufacturing field, specifically a kind of high-frequency plasma for manufacturing metal nano powder
The cooling quartzy lamps and lanterns of catalytic behavior of materials water used in multi-functional power production equipment.
Background technique:
High-frequency plasma is also referred to as catalytic behavior of materials, and principle is the high-frequency electrical provided using radio-frequency induction coil
Magnetic field makes the collision of gas molecule fierceness, thermal ionization, and then realizes that energy conversion generates plasma.It is concentrated with energy, temperature
The advantages that spending height (about 10000K), electrodeless pollution.
High-frequency plasma multifunctional powder production equipment is realized single using high temperature, the etching action of high-frequency induction plasma
Matter nano-powder produce and oxide, nitride, carbide nano powder vapor- phase synthesis can also be used for hot spraying powder,
Spherical compactedization of 3D printing powder is a kind of novel powder production equipment and processing equipment.
Existing high-frequency plasma is usually to generate in the lamps and lanterns of ceramic tube or quartz glass tube, this kind of plasma is
High-temperature plasma, by taking argon plasma as an example, temperature can reach nearly ten thousand degree.There is cost using the lamps and lanterns of ceramic making
High, the sightless deficiency of plasma flame flow shape；The lamps and lanterns of quartz glass production are at low cost, transparent, operator can be made to hold very much
The easily pattern of observation plasma flame stream and position, facilitate operator to adjust various control parameters, to guarantee that plasma has
Good flame shape.
Quartz glass has very high dielectric strength and extremely low conductivity, is to remain under high temperature, high pressure and high frequency
Very high dielectric strength and resistance are kept, almost without dielectric loss in applied frequency band, therefore quartz glass is excellent
High-temperature dielectric insulating materials, this be using quartz glass production high-frequency plasma lamps and lanterns the main reason for.
1100 DEG C of quartz glass maximum continuous work temperature, 1300 DEG C of maximum short-term job temperature, compound stone is melted in crystal
English glass maximum continuous work temperature only has 950 DEG C, 1200 DEG C of maximum short-term job temperature.And plasma maximum temperature nearly ten thousand
Degree, so, if cooling is insufficient, the lamps and lanterns of quartz glass tube production are easy to scaling loss, failure due to high temperature.
In High-frequency plasma multifunctional powder production equipment (CN201110179097.3) use process, patented invention
People has found original lamps and lanterns, and there are many deficiencies, and such as: illuminant arrangement repairs in vapor tight tank body, safeguards inconvenience, and the cooling of lamps and lanterns is adopted
With gas cooling, heat dissipation effect is bad that lamps and lanterns is caused often to burn, and closed tank body, which absorbs energy of electromagnetic field, influences the effective of equipment
Power output, the deficiency of igniting inconvenience etc. have then been made original lamps and lanterns on summarizing empirical basis very big
It improves.
Summary of the invention:
The invention aims to provide a kind of cooling quartzy lamps and lanterns of catalytic behavior of materials water, lamps and lanterns maintenance and dimension
Shield is convenient, and cooling and good heat dissipation effect, igniting is convenient, and energy utilization rate is high.
The object of the present invention is achieved like this, and the cooling quartzy lamps and lanterns of catalytic behavior of materials water include upper bracket, send
Powder gun platform, tapered sleeve, powder feeding rifle, locking swivel nut, inner tube set, inner tube pressing sleeve, intermediate support, isocon, pressing sleeve, support on middle pipe
Plate, undersetting, pillar, pressing sleeve under pressing sleeve, pedestal, pillar sheath, water-cooled jacket, transition disc, middle pipe under pressing sleeve, outer tube on outer tube,
Axis, middle pipe, water inlet, outer tube, induction coil, inner tube, water outlet, pressing plate, cooling air import, ion-gas air inlet, igniting
Device and multiple sealing rings；The outer tube is arranged between undersetting and pedestal, and undersetting bottom is provided with pressing sleeve on outer tube, bottom
Seat is provided with pressing sleeve under outer tube above；Transition disc is provided below in the pedestal, and water-cooled jacket is provided below in the transition disc；Institute
State pillar it is at least a and along circumference be distributed, have support plate thereon, the support plate is used to support undersetting, the pressing plate
There is position multiple, for fixing undersetting and support plate；The middle pipe is arranged in outer tube, and middle pipe top on middle pipe by pressing
It covers sealed circle to clamp, middle pipe lower part is clamped by the sealed circle of pressing sleeve under middle pipe；The intermediate support is located above undersetting, interior
Portion is provided with isocon；The upper bracket is the production of the non-metal insulating materials such as ceramics, polytetrafluoroethylene (PTFE), is located on intermediate support
Face is internally provided with inner tube set, and inner tube is provided in inner tube set, and inner tube pressing sleeve is located at below inner tube set and is pressed from both sides by sealing ring
Tight inner tube；The powder feeding gun platform is located above support, and powder feeding rifle is clamped and is arranged on axis by tapered sleeve, locking swivel nut；The point
Firearm is arranged on the supporting plate, and for ignition location on the upside of powder feeding rifle, powder feeding rifle 4 has powder feeding and igniting dual function.
The advantages of the invention patent catalytic behavior of materials water cooling quartz lamps and lanterns:
1, the cooling quartzy lamps and lanterns main component of high-frequency plasma water of the present invention is coaxially arranged, by quartz glass production
Inner tube, middle pipe, outer tube, above three pipe are fixed by mechanical component, are sealed, and answer coil in outer tube sleeve thoughts.Lead in inner tube, middle pipe
Enter rotating Vortex working media gas, wherein inner tube gas is passed through gas along spiral inner wall for generating plasma in middle pipe
Rotation moves downward, for constraining plasma flame flow and giving the cooling of middle pipe；Cooling water is passed through in middle pipe and outer tube interlayer
Pipe and lamps and lanterns correlated parts cool, to manage not in guarantee because high temperature melting, breakage and sealing ring do not fail because of high temperature.
2, induction coil of the present invention generates alternating magnetic field in middle pipe, but working media gas is insufficient to allow to generate plasma
Body needs to apply high-frequency and high-voltage electric excitation at powder feeding rifle by igniter, under magnetic field and high-voltage electricity synergy, it can
In middle pipe formed plasma daughter, the plasma air-flow injected from top to bottom, middle pipe cooling air-flow drive, formed it is supreme and
Under continuumpiston flame stream, be discharged through lamps and lanterns bottom.Powder feeding rifle is water-cooling structure and coaxially arranged with inner tube, for
Inject raw material in plasma flame flow, raw material melt under plasma flame stream high temperature action, gasify or chemical breakdown, conjunction
At.To guarantee that lamps and lanterns are closed reliable, each position that couples has sealing ring to realize effectively sealing.
3, the present invention is the core in the High-frequency plasma multifunctional powder production equipment for manufacture metal nano powder,
There are constraint and guiding to make for generating high-temperature plasma flame stream under radio-frequency induction coil electromagnetic field excitation, and to plasma
With making raw material melt, gasify in plasma atmosphere, decompose, chemical combination.The technical field being related to includes electromagnetism science, material
Expect science, machine science, hydrodynamics.
4, the present invention can be using the quartz ampoule production inner tube of standard specification, plasma casing (pipe in i.e.) and water(-cooling) jacket
Manage (i.e. outer tube), do not need die sinking, it is customized, it is low in cost.
5, the present invention adopts the radiating mode being water-cooled and cools down to plasma casing, avoids plasma casing often because of height
Warm scaling loss, the deficiency frequently replaced keep production more stable, reliable.
6, present invention employs applying high pressure activation mode at powder feeding rifle to light a fire, igniting is more easier.
7, the present invention due to use water cooling mode, avoid the high temperature failure of lamps and lanterns sealing ring, make to seal it is relatively reliable,
The service life is longer, ensure that the degree of purity of the vacuum degree and production product inside equipment.
8, present invention eliminates the metal can covered on outside original lamps and lanterns, energy utilization rate is high, lamps and lanterns are easy to adjust.
Detailed description of the invention
Fig. 1 is overall structure of the present invention.
Fig. 2 is inner sleeve diversion trench arrangement schematic diagram of the present invention.
Fig. 3 is isocon diversion trench arrangement schematic diagram of the present invention.
Fig. 4 is powder feeding rifle structural schematic diagram of the present invention.
Specific embodiment:
The cooling quartzy lamps and lanterns of the catalytic behavior of materials water include upper bracket 1, powder feeding gun platform 2, tapered sleeve as shown in Figure 1:
3, powder feeding rifle 4, locking swivel nut 5, inner tube set 6, inner tube pressing sleeve 7, intermediate support 8, isocon 9, pressing sleeve 10, support plate on middle pipe
11, undersetting 12, pillar 13, pressing sleeve 15, pedestal 16, pillar sheath, water-cooled jacket 18, transition disc under pressing sleeve 14, outer tube on outer tube
19, pressing sleeve 20, axis 21, middle pipe 22, water inlet 23, outer tube 24, induction coil 25, inner tube 26, water outlet 27, pressing plate under middle pipe
28, cooling air import 29, ion-gas air inlet 30, igniter 31 and multiple sealing rings.
The outer tube 24 is arranged between undersetting 12 and pedestal 16, and 12 bottom of undersetting is provided with pressing sleeve on outer tube
14, pedestal 16 is provided with pressing sleeve 15 under outer tube above；Pressing sleeve 15 passes through sealing ring and compresses under pressing sleeve 14 and outer tube on the outer tube
Transition disc 19 is provided below in fixed outer tube 24, the pedestal 16, and water-cooled jacket 18 is provided below in the transition disc 19.
The induction coil 25 is the helical form (3~4 circle) that hollow copper tube turns to, and is connected with inside induction coil 25
Cooling water, 25 sets of the induction coil in 24 outside of outer tube and there are 2~4 millimeters of gaps with its outer wall.
At least 3, the pillar 13 and along 21 circle distribution of axis, has support plate 11, the support plate 11 is used for thereon
Undersetting 12 is supported, the pressing plate 28 has position multiple, for fixing undersetting 12 and support plate 11.
The middle pipe 22 is arranged in inside outer tube 24, and middle 22 top of pipe is clamped by the sealed circle of pressing sleeve 10 on middle pipe, middle pipe
22 lower parts are clamped by the sealed circle of pressing sleeve 20 under middle pipe.
Said inner tube 26, middle pipe 22, outer tube 24 are quartz glass (can also be made of ceramic materials), with the coaxial cloth of axis 21
It sets, inner tube 26, middle pipe 22, outer tube 24 diametrically have gap each other.
The intermediate support 8 is located above undersetting 12, is internally provided with isocon 9.
The upper bracket 1 is the production of the non-metal insulating materials such as ceramics, polytetrafluoroethylene (PTFE), is located above intermediate support 8, interior
Portion is provided with inner tube set 6, and inner tube 26 is provided in inner tube set 6, and inner tube pressing sleeve 7 is located at inner tube set 6 below and passes through sealing ring
Clamp inner tube 26.
Ion-gas air inlet 30 is provided on the upper bracket 1, the ion-gas air inlet 30 is connected with inner sleeve 6, institute
It states and is provided with cooling air import 29 on intermediate support 8, the cooling air import 29 is connected with isocon 9, opens on the pedestal 16
There is water inlet 23, undersetting 12 is provided with water outlet 27, and cooling water enters pedestal 16 from water inlet 23, flows through outer tube 24 and middle pipe
Interlayer between 22 enters undersetting 12, flows out through water outlet 27.
The powder feeding gun platform 2 is located above support 1, and powder feeding rifle 4 is clamped and is arranged in axis 21 by tapered sleeve 3, locking swivel nut 5
On.
The igniter 31 is arranged in support plate 11, ignition location in 4 upside of powder feeding rifle, powder feeding rifle 4 have powder feeding and
Igniting dual function.
Be equipped with necessary sealing element between the cooling quartzy lamps and lanterns associated components of the catalytic behavior of materials water, with effectively every
Exhausted water, gas connection.
As shown in Fig. 2, be provided with multiple oblique diversion trenches 32 being circumferentially evenly arranged in 6 upper surface of inner sleeve, guide from
Sub- gas enters inner tube 26 through inner sleeve 6 at whirlwind shape.
As shown in figure 3, being provided with multiple oblique diversion trenches 33 being circumferentially evenly arranged in the upper surface of isocon 9, guide
Middle pipe cooling air-flow is in whirlwind shape through pipe 22 in the entrance of isocon 9.
As shown in figure 4, powder feeding rifle 4 be metal component, by display pipe 36, flow blocking pipe 35, powder feeding pipe 34, water outlet connector 37,
Water supply connector 38 is combined by welding.
Claims (8)
1. a kind of cooling quartzy lamps and lanterns of catalytic behavior of materials water, it is characterised in that: the lamps and lanterns include upper bracket (1), powder feeding
Gun platform (2), powder feeding rifle (4), locking swivel nut (5), inner tube set (6), inner tube pressing sleeve (7), intermediate support (8), shunts tapered sleeve (3)
Manage (9), pressing sleeve (10) on middle pipe, support plate (11), undersetting (12), pillar (13), pressing sleeve under pressing sleeve (14), outer tube on outer tube
(15), pressing sleeve (20), axis (21), middle pipe under pedestal (16), pillar sheath, water-cooled jacket (18), transition disc (19), middle pipe
(22), water inlet (23), outer tube (24), induction coil (25), inner tube (26), water outlet (27), pressing plate (28), cooling air import
(29), ion-gas air inlet (30), igniter (31) and multiple sealing rings；The outer tube (24) is arranged in undersetting (12) and bottom
It between seat (16), is provided with pressing sleeve on outer tube (14) in undersetting (12) bottom, pedestal (16) is provided with pressing sleeve under outer tube above
(15)；The pedestal (16) is provided below transition disc (19), and water-cooled jacket (18) are provided below in the transition disc (19)；It is described
At least 3, pillar (13) and along axis (21) circle distribution, has support plate (11), the support plate (11) is used to support thereon
Undersetting (12), the pressing plate (28) have position multiple, for fixing undersetting (12) and support plate (11)；The middle pipe
(22) it is internal to be arranged in outer tube (24), middle pipe (22) top is clamped by the sealed circle of pressing sleeve (10) on middle pipe, middle pipe (22) lower part
It is clamped by the sealed circle of pressing sleeve (20) under middle pipe；The intermediate support (8) is located at undersetting (12) above, is internally provided with shunting
It manages (9)；The upper bracket (1) is the production of the non-metal insulating materials such as ceramics, polytetrafluoroethylene (PTFE), is located at intermediate support (8) above,
Inner tube set (6) are internally provided with, are provided with inner tube (26) in inner tube set (6), inner tube pressing sleeve (7) is located at inner tube set (6) below
And inner tube (26) are clamped by sealing ring；The powder feeding gun platform (2) is located at support (1) above, and powder feeding rifle (4) is by tapered sleeve (3), lock
Tight swivel nut (5), which clamps, to be arranged on axis (21)；The igniter (31) is arranged on support plate (11), and ignition location is in powder feeding
On the upside of rifle (4), powder feeding rifle (4) has powder feeding and igniting dual function.
2. the cooling quartzy lamps and lanterns of a kind of catalytic behavior of materials water according to claim 1, it is characterised in that: described outer
Pressing sleeve (15) by sealing ring is fixed outer tube (24) under pressing sleeve (14) and outer tube on pipe.
3. the cooling quartzy lamps and lanterns of a kind of catalytic behavior of materials water according to claim 1, it is characterised in that: the sense
Answering coil (25) is the helical form that hollow copper tube turns to, and is connected with cooling water, the line of induction inside induction coil (25)
Circle (25) covers in outer tube (24) face and there are 2~4 millimeters of gaps with its outer wall.
4. the cooling quartzy lamps and lanterns of a kind of catalytic behavior of materials water according to claim 1, it is characterised in that: in described
Pipe (26), middle pipe (22), outer tube (24) they are that quartz glass or ceramic material are made, are coaxially arranged with axis (21), inner tube (26),
Middle pipe (22), outer tube (24) diametrically have gap each other.
5. the cooling quartzy lamps and lanterns of a kind of catalytic behavior of materials water according to claim 1, it is characterised in that: on described
It is provided on support (1) ion-gas air inlet (30), the ion-gas air inlet (30) is connected with inner sleeve (6), the centre
It is provided on support (8) cooling air import (29), the cooling air import (29) is connected with isocon (9), the pedestal (16)
On be provided with water inlet (23), undersetting (12) is provided with water outlet (27), cooling water from water inlet (23) enter pedestal (16), stream
Enter undersetting (12) through the interlayer between outer tube (24) He Zhongguan (22), is flowed out through water outlet (27).
6. the cooling quartzy lamps and lanterns of a kind of catalytic behavior of materials water according to claim 1, it is characterised in that: in inner sleeve
Pipe (6) upper surface is provided with multiple oblique diversion trenches (32) being circumferentially evenly arranged, and guides ion-gas at whirlwind shape through inner sleeve
(6) enter inner tube (26).
7. the cooling quartzy lamps and lanterns of a kind of catalytic behavior of materials water according to claim 1, it is characterised in that: shunting
The upper surface of pipe (9) is provided with multiple oblique diversion trenches (33) being circumferentially evenly arranged, and pipe cooling air-flow is in whirlwind shape in guidance
Through managing (22) in isocon (9) entrance.
8. the cooling quartzy lamps and lanterns of a kind of catalytic behavior of materials water according to claim 1, it is characterised in that: described to send
Powder rifle (4) is metal component, by display pipe (36), flow blocking pipe (35), powder feeding pipe (34), water outlet connector (37) and water supply connector
(38) it is combined by welding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511010961.1A CN106925790B (en) | 2015-12-30 | 2015-12-30 | The cooling quartzy lamps and lanterns of catalytic behavior of materials water |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511010961.1A CN106925790B (en) | 2015-12-30 | 2015-12-30 | The cooling quartzy lamps and lanterns of catalytic behavior of materials water |
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| CN106925790A CN106925790A (en) | 2017-07-07 |
| CN106925790B true CN106925790B (en) | 2019-03-08 |
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| CN201511010961.1A Active CN106925790B (en) | 2015-12-30 | 2015-12-30 | The cooling quartzy lamps and lanterns of catalytic behavior of materials water |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108190562A (en) * | 2017-12-29 | 2018-06-22 | 中国航天空气动力技术研究院 | A kind of induction plasma heating nodularization supplies component powder |
| CN110402008B (en) * | 2019-08-26 | 2024-02-06 | 贵州正业龙腾新材料开发有限公司 | Cooling gas distribution device suitable for high-frequency plasma torch |
| CN111331148B (en) * | 2020-04-14 | 2022-09-20 | 中天智能装备有限公司 | ICP plasma cooling system |
| CN111479376B (en) * | 2020-06-01 | 2021-12-28 | 深圳先进技术研究院 | Atmospheric pressure injection frequency thermal plasma generator based on preionization ignition device |
| CN111872408B (en) * | 2020-08-20 | 2024-07-02 | 北京炬钛环保科技有限公司 | Powder purification device |
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| JPH06299209A (en) * | 1993-04-14 | 1994-10-25 | Sansha Electric Mfg Co Ltd | Formation of powder granule of magnetic material |
| CN201316616Y (en) * | 2008-11-20 | 2009-09-30 | 核工业西南物理研究院 | Water cooling radio frequency plasma reactor with ignition tunnel |
| CN203429247U (en) * | 2013-08-15 | 2014-02-12 | 苏州思博露光伏能源科技有限公司 | Manufacturing device of PECVD (plasma enhanced chemical vapor deposition) flexible solar cells |
| CN204191012U (en) * | 2014-10-09 | 2015-03-04 | 核工业西南物理研究院 | A kind of Novel double-anode plasma torch |
| CN104602429A (en) * | 2015-01-30 | 2015-05-06 | 清华大学 | Warm plasma generator |
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2015
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06299209A (en) * | 1993-04-14 | 1994-10-25 | Sansha Electric Mfg Co Ltd | Formation of powder granule of magnetic material |
| CN201316616Y (en) * | 2008-11-20 | 2009-09-30 | 核工业西南物理研究院 | Water cooling radio frequency plasma reactor with ignition tunnel |
| CN203429247U (en) * | 2013-08-15 | 2014-02-12 | 苏州思博露光伏能源科技有限公司 | Manufacturing device of PECVD (plasma enhanced chemical vapor deposition) flexible solar cells |
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Effective date of registration: 20190712 Address after: 725000 No. 37 Innovation Road, Hanbin District, Ankang City, Shaanxi Province Patentee after: Shaanxi Ankang San hang nano Polytron Technologies Inc Address before: 136001, Siping East Road, Siping City, Jilin Province, No. 309 Patentee before: SIPING GAOSIDA NANO MATERIAL & EQUIPMENT CO., LTD. |
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Denomination of invention: High-frequency induction plasma water-cooled quartz lamp Effective date of registration: 20190814 Granted publication date: 20190308 Pledgee: Ankang Hi-tech Industry Development Co., Ltd. Pledgor: Shaanxi Ankang San hang nano Polytron Technologies Inc Registration number: Y2019610000012 |
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