CN105957896A - Super-junction power device and manufacturing method thereof - Google Patents
Super-junction power device and manufacturing method thereof Download PDFInfo
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- CN105957896A CN105957896A CN201610471130.2A CN201610471130A CN105957896A CN 105957896 A CN105957896 A CN 105957896A CN 201610471130 A CN201610471130 A CN 201610471130A CN 105957896 A CN105957896 A CN 105957896A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 238000005530 etching Methods 0.000 claims abstract description 15
- 239000012535 impurity Substances 0.000 claims description 94
- 238000000034 method Methods 0.000 claims description 33
- 230000015556 catabolic process Effects 0.000 claims description 28
- 239000002019 doping agent Substances 0.000 claims description 27
- 238000000407 epitaxy Methods 0.000 claims description 25
- 239000000203 mixture Substances 0.000 claims description 10
- 230000015572 biosynthetic process Effects 0.000 claims description 8
- 230000011218 segmentation Effects 0.000 claims description 7
- 230000005611 electricity Effects 0.000 claims description 3
- 238000006396 nitration reaction Methods 0.000 claims description 3
- 235000006508 Nelumbo nucifera Nutrition 0.000 claims description 2
- 240000002853 Nelumbo nucifera Species 0.000 claims description 2
- 235000006510 Nelumbo pentapetala Nutrition 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- 238000001039 wet etching Methods 0.000 claims description 2
- 238000005468 ion implantation Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 114
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 22
- 229920005591 polysilicon Polymers 0.000 description 22
- 239000004065 semiconductor Substances 0.000 description 18
- 239000000758 substrate Substances 0.000 description 18
- 150000002500 ions Chemical class 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 239000011229 interlayer Substances 0.000 description 6
- 238000002372 labelling Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 230000002146 bilateral effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000013517 stratification Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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- H01L29/063—Reduced surface field [RESURF] pn-junction structures
- H01L29/0634—Multiple reduced surface field (multi-RESURF) structures, e.g. double RESURF, charge compensation, cool, superjunction (SJ), 3D-RESURF, composite buffer (CB) structures
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Abstract
The invention discloses a super-junction power device. A super-junction structure is formed on an N-type epitaxial layer; each groove is filled with a P-type post in the super-junction structure; the side surface of each groove is of an inclined structure to facilitate etching and filling of the groove; a doping compensation layer formed through ion implantation is formed on the side surface of each groove; and the doping concentration of each doping compensation layer in the direction from the top part of the corresponding groove to the bottom part is gradually changed for compensating the influence of the widths of the grooves at different depths on the charge balance of the P-type posts and N-type posts, so that the charge balance of the P-type posts at different depths of the grooves and the adjacent N-type posts is improved to improve the puncture voltage of the super-junction power device. The invention further discloses a manufacturing method of the super-junction power device. The puncture voltage of the super-junction structure with the inclined structures on the side surfaces of the grooves can be improved; and meanwhile, the device can also has good anti-impact ability.
Description
Technical field
The present invention relates to semiconductor integrated circuit and manufacture field, particularly relate to a kind of superjunction (super junction)
Power device；The invention still further relates to the manufacture method of a kind of super junction power device.
Background technology
Super-junction structure is exactly alternately arranged N-type post and p-type post composition structure.If replaced vertically with super-junction structure
Bilateral diffusion MOS transistor (Vertical Double-diffused Metal-Oxide-Semiconductor, VDMOS)
N-type drift region in device, provides conduction path by N-type post in the on-state, and during conducting, p-type post does not provides
Conduction path；Jointly born reversed bias voltage by PN column in the off state, be the formation of superjunction metal-oxide half
Conductor field-effect transistor (Metal-Oxide-Semiconductor Field-Effect Transistor,
MOSFET).Super node MOSFET can be in the case of breakdown reverse voltage be consistent with traditional VDMOS device, by making
With the epitaxial layer of low-resistivity, and the conducting resistance of device is made to be greatly reduced.
As it is shown in figure 1, be Fig. 1 be groove be the structural representation of the existing super junction power device of ideal state；Here
It is introduced as a example by N-type super junction power device, the doping type of device is replaced accordingly and can obtain p-type
Super junction power device, is not described in detail p-type super junction power device here.As shown in Figure 1, N-type superjunction power
Device includes:
Semiconductor substrate such as silicon substrate 101, is formed with N-type epitaxy layer such as N-type silicon on the surface of Semiconductor substrate 101
Epitaxial layer 102, p-type post 103a that super-junction structure is formed from N-type epitaxy layer 102 and by each p-type post 103a
Between N-type epitaxy layer 102 composition the alternately arranged formation of N-type post.N-type epitaxy layer 102 the most also uses N EPI
Representing, p-type post 103a also represents with P post.
PXing Ti district 104 is formed at the top of each p-type post 103a.
Polysilicon gate 105 is formed at the top of the selection area in PXing Ti district 104 and is separated with gate dielectric layer mutually
Such as gate oxide, the surface in the PXing Ti district 104 covered by polysilicon gate 105 is for forming raceway groove, so p-type body
District 104 is as channel region.The grid structure being made up of polysilicon gate 105 and gate dielectric layer also extends into PXing Ti district 104
Outer N-type post surface.
The source region 106 being made up of N+ district is formed at the surface in PXing Ti district 104, the side of source region 106 and polysilicon gate
104 autoregistrations.
Interlayer film 107 is formed at the front of Semiconductor substrate 101 and by the polysilicon gate 105 of device, source region 106 He
PXing Ti district 104 grade covers.Contact hole 108 passes interlayer film 107 and the corresponding source region 106 of bottom or polysilicon
Grid 105 contact.The contact implanted layer 109 of P+ doping it is formed with in the bottom of the contact hole 108 of source region 106 correspondence,
The bottom of contact implanted layer 109 contacts with PXing Ti district 104.Source region 106 and PXing Ti district 104 is connect by top
Contact hole 108 is connected to the source electrode being made up of front metal layer 110；The polysilicon gate 105 contact hole 108 by top
It is connected to the grid being made up of front metal layer 110.
When super junction power device is MOSFET element, the Semiconductor substrate 101 highly doped by N-type forms drain region, and
The drain electrode being made up of metal layer on back is formed at the back side of Semiconductor substrate 101.
P-type post includes two kinds of formation process: one of which is for using repeatedly epitaxy technique to be formed, and this method has relatively
High cost and process time are long；Another kind is that the method inserted by grooving and P-type silicon is formed, the letter of this technique
List and efficiency are high.The method inserted by grooving and P-type silicon is formed p-type post 103a and uses the most.In Fig. 1
P-type post 103a use grooving to add process that P-type silicon inserts is formed.P-type post 103a in Fig. 1
The side of corresponding groove is vertical stratification, and this is a kind of perfect condition structure.
In actual state, the side of groove often has certain inclination angle, as in figure 2 it is shown, be groove be actual state
The structural representation of existing super junction power device；With structure difference shown in Fig. 1 it is, the p-type post 103b in Fig. 2
The side of corresponding groove has certain inclination angle, and this inclination angle make the top width of groove more than bottom width i.e. in
Up big and down small structure, this up big and down small groove structure is conducive to etching and the filling of groove.
As it is shown on figure 3, be breakdown voltage and the relation curve of charge balance rate of existing super junction power device shown in Fig. 2,
I.e. curve 201 is breakdown voltage and the relation curve of charge balance rate of existing super junction power device；For charge balance,
Ideal structure shown in Fig. 1 is the most constant due to the width of groove, easily realizes electric charge complete equipilibrium, in such cases,
Maximum breakdown voltage can be reached；Namely Nn×an=Np×apTime reach electric charge complete equipilibrium, this situation corresponding to horizontal stroke
Coordinate is situation time shown in dotted line 301, it is known that, this position corresponding to the fixed point of curve 201, so time hit
Wear voltage maximum, wherein NnRepresent the doping content of N-type post, anRepresent the width of N-type post, NpRepresent p-type post
Doping content, apRepresent the width of p-type post.
In the groove structure that actual state shown in Fig. 2 is corresponding, owing to the width of groove can change up and down, therefore cannot protect
Demonstrate,prove optimal Nn×an=Np×ap, technique is commonly made to Nn×an<Np×ap, to ensure that device has best anti-impact
Hit ability；But device electric breakdown strength loss is more, as in Fig. 3, abscissa is that the situation shown in straight line 302 is corresponding to real
The setting of the charge balance in the situation of border, the value that breakdown voltage is more relative to the position on summit meeting suppression ratio.In Fig. 3
It is N in abscissa is less than the region corresponding to the coordinate of dotted line 301n×an>Np×ap, i.e. Fig. 3 is write
Nn*an>Np*ap；It is N that abscissa is more than in the region corresponding to coordinate of dotted line 301n×an<Np×ap, i.e. institute in Fig. 3
The N writen*an<Np*ap.In the structure of the actual state shown in Fig. 2, why charge balance rate is arranged on abscissa
In coordinates regional more than dotted line 301, it is to ensure that device has last impact resistance, the arrow in Fig. 2
Dotted line 120 is N corresponding to charge balance raten×an<Np×apTime breakdown current flow to, it is clear that breakdown current is through P
Type post 103b；Arrow dotted line 121 is N corresponding to charge balance raten×an>Np×apTime breakdown current flow to, it is clear that
Breakdown current is through N-type post；Breakdown current has a bigger impact resistance through p-type post 103b, therefore
The charge balance rate of super-junction structure corresponding for actual state is typically all arranged on N by processn×an<Np×apRegion
In, but this can reduce the breakdown voltage of device.
Summary of the invention
The technical problem to be solved is to provide a kind of super junction power device, can improve and have groove side surface
The breakdown voltage of the super-junction structure of structure, can also make device have good impact resistance simultaneously.To this end, the present invention
Also provide for the manufacture method of a kind of super junction power device.
For solving above-mentioned technical problem, in the super junction power device that the present invention provides, N-type epitaxy layer is formed many
Individual groove, is filled with p-type post in the trench, the described p-type post that is filled in described groove and by described groove
Between described N-type epitaxy layer composition N-type post alternately arranged composition super-junction structure.
The side of described groove is that the bottom width of incline structure and described groove is less than top width, described to be conducive to
The etching of groove and filling.
Be formed through in the side of described groove ion implanting formed doping compensation layer, from the top of described groove to
In bottom direction, the doping content of described doping compensation layer is changed stepwise, for compensating the described ditch groove width at different depth
Degree is on described p-type post and the impact of the charge balance of described N-type post, thus improves at the different depth of described groove
The charge balance of described p-type post and adjacent described N-type post also thus improves the breakdown voltage of super junction power device.
Further improve and be, at the bottom position of described groove, the superposition described p-type of described doping compensation layer
The p type impurity total amount of post and described N-type post is more than N-type impurity total amount, in order to improve the anti-of described super junction power device
Impact capacity.
Further improving is that described doping compensation layer is n-type doping, from the top-to-bottom direction of described groove
The concentration of the N-type impurity of described doping compensation layer progressively diminishes.
Further improving and be, described doping compensation layer is p-type doping, from the top-to-bottom direction of described groove
The concentration of the p type impurity of described doping compensation layer progressively becomes big.
Further improve and be, from the top-to-bottom direction of described groove the impurity of described doping compensation layer by
N-type is transitioned into that the concentration of p-type and described N-type impurity progressively diminishes, the concentration of p type impurity progressively becomes big.
Further improve and be, the ion implanted layer of described doping compensation layer from the top-to-bottom direction of described groove
It is divided into more than two-stage nitration thus forms the stepping structure of doping content of described doping compensation layer.
Further improve and be, from the top-to-bottom direction of described groove, described N-type post Uniform Doped, described
P-type post Uniform Doped.
Further improving is that described super junction power device includes super-junction MOSFET device, IGBT device.
Further improving is that described super-junction MOSFET device includes the super-junction MOSFET device with shield grid.
For solving above-mentioned technical problem, the manufacture method of the super junction power device that the present invention provides comprises the steps:
Step one, offer N-type epitaxy layer, form hard mask layers in described N-type epitaxy layer, pass through chemical wet etching
Groove is formed the described hardmask layer open in region by technique.
Step 2, the segmentation etching shape of more than twice of described N-type epitaxy layer being carried out with described hard mask layers for mask
Become groove.
After each segmentation has etched, all the side of the described groove etched is carried out single compensation ion implanting
Doping, described groove is injected impurity superposition by each counterion after being formed completely and is formed and be positioned at the side of described groove
The doping compensation layer in face.
The side of described groove is that the bottom width of incline structure and described groove is less than top width, described to be conducive to
The etching of groove and follow-up filling.
Step 3, in the trench be filled with p-type epitaxial layer formed p-type post, remove described hard mask layers.
The described p-type post being filled in described groove and the N-type being made up of the described N-type epitaxy layer between described groove
Post alternately arranged composition super-junction structure；From the top-to-bottom direction of described groove, the doping of described doping compensation layer is dense
Degree is changed stepwise, for compensating the described groove width at different depth to described p-type post and the electric charge of described N-type post
The impact of balance, thus improve the described p-type post at the different depth of described groove and the electricity of adjacent described N-type post
Lotus balance also thus improves the breakdown voltage of super junction power device.
Further improve and be, at the bottom position of described groove, the superposition described p-type of described doping compensation layer
The p type impurity total amount of post and described N-type post is more than N-type impurity total amount, in order to improve the anti-of described super junction power device
Impact capacity.
Further improve and be: described doping compensation layer is n-type doping, from the top-to-bottom direction of described groove
The concentration of the N-type impurity of upper described doping compensation layer progressively diminishes.
Further improving is that in step 2, each counterion implanted dopant is all N-type impurity, from described groove
The counterion implanted dopant that on top-to-bottom direction, described doping compensation stacking adds reduces successively makes the dense of N-type impurity
Degree progressively diminishes.
Further improving and be, described doping compensation layer is p-type doping, from the top-to-bottom direction of described groove
The concentration of the p type impurity of described doping compensation layer progressively becomes big.
Further improving and be, in step 2, last counterion implanted dopant is p type impurity, mends for other each time
Repaying ion implanted impurity is N-type impurity, the counterion note of each N-type from the top-to-bottom direction of described groove
Entering impurity makes the concentration of N-type impurity of described doping compensation layer progressively diminish, and the counterion of last p-type injects
Impurity forms the described doping compensation of p-type doping after being overlapped the counterion implanted dopant of other each N-type
Layer, forms the concentration of the p type impurity of described doping compensation layer from the top-to-bottom direction of described groove and progressively becomes big
Structure.
Further improve and be, from the top-to-bottom direction of described groove the impurity of described doping compensation layer by
N-type is transitioned into that the concentration of p-type and described N-type impurity progressively diminishes, the concentration of p type impurity progressively becomes big.
Further improve and be: in step 2 last counterion implanted dopant be p type impurity, other each time
Counterion implanted dopant is N-type impurity, the counterion of each N-type from the top-to-bottom direction of described groove
Implanted dopant makes the concentration of the N-type impurity of described doping compensation layer progressively diminish, the counterion note of last p-type
Enter after the counterion implanted dopant of other each N-type is overlapped by impurity and form the top-to-bottom from described groove
On direction the concentration of described doping compensation layer and described N-type impurity that impurity is transitioned into p-type by N-type progressively diminish,
The concentration of p type impurity progressively becomes big.
Further improve and be, from the top-to-bottom direction of described groove, described N-type post Uniform Doped, described
P-type post Uniform Doped.
Further improving is that described super junction power device includes super-junction MOSFET device, IGBT device.
Further improving is that described super-junction MOSFET device includes the super-junction MOSFET device with shield grid.
The super-junction structure of the present invention uses inclined groove structure, utilizes inclined groove in etching groove and trench fill
In advantage, it is possible to be respectively increased stability and the concordance of trench etch process, improve the production of trench fill equipment
Ability also reduces cost and can reduce the defect of trench fill, thus reduces the leakage of the device caused due to defect
Electricity.
The present invention is by forming doping compensation layer in groove side surface, and by the doping type of doping compensation layer and concentration
It is configured, doping compensation layer can be made to be changed stepwise in doping content on the top-to-bottom direction of groove and compensate not
With the groove width of depth on p-type post and the impact of the charge balance of N-type post, it is thus possible to improve the different deep of groove
P-type post and the charge balance of adjacent N-type post at degree also thus improve the breakdown voltage of super junction power device.
It addition, after the present invention is by adding doping compensation layer, it is possible to the convenient charge balance rate to super-junction structure is carried out
Arrange, thus be easily achieved and make device have good impact resistance.
Accompanying drawing explanation
The present invention is further detailed explanation with detailed description of the invention below in conjunction with the accompanying drawings:
Fig. 1 be groove be the structural representation of the existing super junction power device of ideal state；
Fig. 2 be groove be the structural representation of the existing super junction power device of actual state；
Fig. 3 is breakdown voltage and the relation curve of charge balance rate of existing super junction power device shown in Fig. 2；
Fig. 4 is the structural representation of embodiment of the present invention super junction power device；
Fig. 5 is breakdown voltage and the relation curve of charge balance rate of embodiment of the present invention super junction power device；
Fig. 6 A-Fig. 6 L is the device architecture signal in each step of manufacture method of embodiment of the present invention super junction power device
Figure.
Detailed description of the invention
As shown in Figure 4, it is the structural representation of embodiment of the present invention super junction power device；Embodiment of the present invention superjunction merit
Rate device includes:
Semiconductor substrate such as silicon substrate 1, is formed with N-type epitaxy layer 2 such as N-type silicon epitaxy on Semiconductor substrate 1 surface
Layer 2；It is formed with multiple groove in N-type epitaxy layer 2, is filled with p-type post 4 in the trench, be filled in described ditch
Described p-type post 4 in groove and alternately arranged group of the N-type post being made up of the described N-type epitaxy layer 2 between described groove
Become super-junction structure.
The side of described groove is that the bottom width of incline structure and described groove is less than top width, described to be conducive to
The etching of groove and filling.
The doping compensation layer 3 that ion implanting is formed it is formed through, from the top of described groove in the side of described groove
In bottom direction, the doping content of described doping compensation layer 3 is changed stepwise, for compensating the described ditch at different depth
Well width is on described p-type post 4 and the impact of the charge balance of described N-type post, thus improves the different deep of described groove
Described p-type post 4 and the charge balance of adjacent described N-type post at degree also thus improve puncturing of super junction power device
Voltage.
From the top-to-bottom direction of described groove the ion implanted layer of described doping compensation layer 3 be divided into more than two-stage nitration from
And form the stepping structure of doping content of described doping compensation layer 3.Fig. 4 shows described doping compensation layer
The ion implanted layer of 3 is divided into three sections, and these three sections indicate with labelling 3a, 3b and 3c respectively, and corresponding to labelling 3a, section is folded
The impurity that 3 secondary ions inject, the impurity that section superposition corresponding to labelling 3b 2 secondary ions inject, labelling 3c are added
The impurity that corresponding section superposition 1 secondary ion injects.
In the embodiment of the present invention, at the bottom position of described groove, the superposition described P of described doping compensation layer 3
The p type impurity total amount of type post 4 and described N-type post is more than N-type impurity total amount, in order to improve described super junction power device
Impact resistance.
In the embodiment of the present invention, described doping compensation layer 3 can be n-type doping, and p-type is adulterated, or p-type and N-type
The mixing of doping, is now respectively described below:
Described doping compensation layer 3 is n-type doping, described doping compensation layer from the top-to-bottom direction of described groove
The concentration of the N-type impurity of 3 progressively diminishes.
Described doping compensation layer 3 adulterates for p-type, described doping compensation layer from the top-to-bottom direction of described groove
The concentration of the p type impurity of 3 progressively becomes big.
From the top-to-bottom direction of described groove, the impurity of described doping compensation layer 3 is transitioned into p-type by N-type
And the concentration of described N-type impurity progressively diminishes, the concentration of p type impurity progressively becomes big.
From the top-to-bottom direction of described groove, described N-type post Uniform Doped, described p-type post 4 Uniform Doped.
Described super junction power device includes super-junction MOSFET device, IGBT device.Described super-junction MOSFET device includes
There is the super-junction MOSFET device of shield grid (SGT).
As a example by super MOSFET element, also include:
PXing Ti district 5 is formed at the top of each p-type post 4.
Polysilicon gate 6 is formed at the top of the selection area in PXing Ti district 5 and is separated with gate dielectric layer such as grid mutually
Oxide layer, the surface in the PXing Ti district 5 covered by polysilicon gate 6 is for forming raceway groove, so PXing Ti district 5 conduct
Channel region.The grid structure being made up of polysilicon gate 6 and gate dielectric layer also extends into the N-type post table outside PXing Ti district 5
Face.
The source region 7 being made up of N+ district is formed at the surface in PXing Ti district 5, the side of source region 7 and polysilicon gate 104
Autoregistration.
Interlayer film 8 is formed at the front of Semiconductor substrate 1 and by the polysilicon gate 6 of device, source region 7 and PXing Ti district
5 grades cover.Contact hole 9 contacts through interlayer film 8 with corresponding source region 7 or the polysilicon gate 6 of bottom.In source region
The bottom of the contact hole 9 of 7 correspondences is formed with the contact implanted layer 10 of P+ doping, the bottom of contact implanted layer 10 and P
Xing Ti district 5 contacts.Source region 7 and PXing Ti district 5 is connected to by front metal layer 111 groups by the contact hole 9 at top
The source electrode become；Polysilicon gate 6 is connected to the grid being made up of front metal layer 111 by the contact hole 9 at top.
Formed drain region by the Semiconductor substrate 1 that N-type is highly doped, and formed by back-side gold at the back side of Semiconductor substrate 1
Belong to the drain electrode of layer composition.
As it is shown in figure 5, be breakdown voltage and the relation curve of charge balance rate of embodiment of the present invention super junction power device；
In order to compare, being also placed in curve 201 in Figure 5, this curve 201 is identical with the curve 201 in Fig. 3.Curve
202 is breakdown voltage and the relation curve of charge balance rate of embodiment of the present invention super junction power device.Comparison curves 201
With 202 understand, in the embodiment of the present invention by adding described doping compensation layer 3 after, it is possible to increase super-junction structure
Total PN impurity charge balance, when the charge balance rate of p-type post and N-type post keeps constant, due to super
Total PN impurity charge balance of junction structure increases, therefore can improve the breakdown voltage of device, namely at different horizontal strokes
At coordinate position, curve 202 is positioned at the top of curve 201, namely the value of the breakdown voltage of curve 202 correspondence wants big
Value in the breakdown voltage of the p-type post curve 201 identical with the charge balance rate of N-type post.Therefore embodiment of the present invention energy
Enough improve the breakdown voltage of device.It addition, the embodiment of the present invention does not change p-type to the raising of the breakdown voltage of device
The charge balance rate of post and N-type post, therefore device can also keep preferable impact resistance.
As shown in Fig. 6 A to Fig. 6 L, it it is the device in each step of manufacture method of embodiment of the present invention super junction power device
Structural representation, the manufacture method of embodiment of the present invention super junction power device comprises the steps:
Step one, as shown in Figure 6A, it is provided that N-type epitaxy layer 2, N-type epitaxy layer 2 is formed at Semiconductor substrate such as silicon
Substrate 1 surface.
As shown in Figure 6B, described N-type epitaxy layer 2 forms hard mask layers 401, by being lithographically formed photoresist
Figure 402 carries out groove and forms the definition in region, by etching technics, groove forms the described hard in region afterwards and covers
Mold layer 401 is opened.Remove photoetching offset plate figure 402 afterwards.
Step 2, with described hard mask layers 401 for mask, described N-type epitaxy layer 2 is carried out the segmentation of more than twice
Etching forms groove.
After each segmentation has etched, all the side of the described groove etched is carried out single compensation ion implanting
Doping, described groove is injected impurity superposition by each counterion after being formed completely and is formed and be positioned at the side of described groove
The doping compensation layer 3 in face.
The side of described groove is that the bottom width of incline structure and described groove is less than top width, described to be conducive to
The etching of groove and follow-up filling.
In the embodiment of the present invention, three segmentations etching is used to form groove altogether, particularly as follows:
As shown in Figure 6 C, carry out etching for the first time, form first paragraph groove 403a.
As shown in Figure 6 D, carry out for the first time counterion to be infused in the side of first paragraph groove 403a and be doped formation
Doped region 3a.
As illustrated in fig. 6e, carry out second time and etch, bottom first paragraph groove 403a, form second segment groove 403b.
As fig 6 f illustrates, carry out second time counterion and be infused in first paragraph groove 403a and second segment groove 403b
Side be all doped, the doped region 3a at top can superposition second time counterion inject doping, second
The side of section groove 403b can increase a doped region 3b.
As shown in Figure 6 G, carry out third time and etch, bottom second segment groove 403b, form the 3rd section of groove 403c.
As shown in figure 6h, carry out third time counterion and be infused in first paragraph groove 403a, second segment groove 403b
All being doped with the side of the 3rd section of groove 403c, the doped region 3a and doped region 3b at top can be in superposition
The doping of three counterion injections, can increase a doped region 3c in the side of the 3rd section of groove 403c.So,
Just formed doping compensation layer 3 by above-mentioned doped region 3a, 3b and 3c.
In the embodiment of the present invention, the doping of described doping compensation layer 3 can be:
Described doping compensation layer 3 is n-type doping, described doping compensation layer from the top-to-bottom direction of described groove
The concentration of the N-type impurity of 3 progressively diminishes.In step 2, each counterion implanted dopant is all N-type impurity, from institute
State the counterion implanted dopant of described doping compensation layer 3 superposition on the top-to-bottom direction of groove to reduce successively and make N
The concentration of type impurity progressively diminishes.
Or, described doping compensation layer 3 adulterates for p-type, described doping from the top-to-bottom direction of described groove
The concentration of the p type impurity of layer of compensation 3 progressively becomes big.In step 2, last counterion implanted dopant is that p-type is miscellaneous
Matter, other each counterion implanted dopant are N-type impurity, each N from the top-to-bottom direction of described groove
The counterion implanted dopant of type makes the concentration of the N-type impurity of described doping compensation layer 3 progressively diminish, last P
The counterion implanted dopant of type forms p-type doping after being overlapped the counterion implanted dopant of other each N-type
Described doping compensation layer 3, formed from the top-to-bottom direction of described groove the p-type of described doping compensation layer 3
The concentration of impurity progressively becomes big structure.
Or, from the top-to-bottom direction of described groove, the impurity of described doping compensation layer 3 is by N-type transition
Concentration to p-type and described N-type impurity progressively diminishes, the concentration of p type impurity progressively becomes big.In step 2 last
Secondary counterion implanted dopant be p type impurity, other each counterion implanted dopant be N-type impurity, from described ditch
On the top-to-bottom direction of groove, the counterion implanted dopant of each N-type makes the N-type impurity of described doping compensation layer 3
Concentration progressively diminish, the counterion of other each N-type is injected by the counterion implanted dopant of last p-type
Impurity forms impurity from the top-to-bottom direction of described groove and is transitioned into the institute of p-type by N-type after being overlapped
The concentration stating doping compensation layer 3 and described N-type impurity progressively diminishes, the concentration of p type impurity progressively becomes big.
Step 3, as shown in fig. 6i, is filled with p-type epitaxial layer in the trench and forms p-type post 4, filled
After need use cmp (CMP) planarize.Afterwards, as shown in Fig. 6 J, remove described hard and cover
Mold layer 401.
The described p-type post 4 that is filled in described groove and being made up of the described N-type epitaxy layer 2 between described groove
N-type post alternately arranged composition super-junction structure；Described doping compensation layer 3 from the top-to-bottom direction of described groove
Doping content is changed stepwise, for compensating the described groove width at different depth to described p-type post 4 and described N-type
The impact of the charge balance of post, thus improve the described p-type post 4 at the different depth of described groove and adjacent described
The charge balance of N-type post also thus improves the breakdown voltage of super junction power device.
In embodiment of the present invention method, at the bottom position of described groove, the superposition institute of described doping compensation layer 3
The p type impurity total amount stating p-type post 4 and described N-type post is more than N-type impurity total amount, in order to improve described superjunction power
The impact resistance of device.From the top-to-bottom direction of described groove, described N-type post Uniform Doped, described P
Type post 4 Uniform Doped.
Described super junction power device includes super-junction MOSFET device, IGBT device.Described super-junction MOSFET device includes
There is the super-junction MOSFET device of shield grid.When described super junction power device includes super-junction MOSFET device, such as Fig. 4
Shown in, also comprise the steps:
PXing Ti district 5 is formed at the top of each p-type post 4.
Sequentially forming gate dielectric layer such as gate oxide and polysilicon gate 6, polysilicon gate 6 is formed at the choosing in PXing Ti district 5
Determining the top in region and be separated with gate dielectric layer mutually, the surface in the PXing Ti district 5 covered by polysilicon gate 6 is used
In forming raceway groove, so PXing Ti district 5 is as channel region.The grid structure being made up of polysilicon gate 6 and gate dielectric layer
Also extend into the N-type post surface outside PXing Ti district 5.
Carrying out N+ and inject the source region 7 that formation is made up of N+ district, source region 7 is positioned at the surface in PXing Ti district 5, source region 7
Side and polysilicon gate 104 autoregistration.
Interlayer film 8 is formed and by the polysilicon gate 6 of device, source region 7 and PXing Ti district in the front of Semiconductor substrate 1
5 grades cover.
Forming contact hole 9, contact hole 9 contacts through interlayer film 8 with corresponding source region 7 or the polysilicon gate 6 of bottom.
After the opening of contact hole 9 is opened, metal filled before be additionally included in source region 7 correspondence the bottom of contact hole 9 carry out P+
Injecting the step of the contact implanted layer 10 forming P+ doping, the bottom of contact implanted layer 10 contacts with PXing Ti district 5.
Formed front metal layer 11, use lithographic etch process front metal layer 11 is patterned formation source electrode and
Grid, source region 7 and PXing Ti district 5 is connected to the source electrode being made up of front metal layer 111 by the contact hole 9 at top；
Polysilicon gate 6 is connected to the grid being made up of front metal layer 111 by the contact hole 9 at top.
The Semiconductor substrate 1 that N-type is highly doped is carried out thinning formation drain region, and drain region also can be thinning to Semiconductor substrate 1
After carry out N+ inject formed.And the drain electrode being made up of metal layer on back is formed at the back side of Semiconductor substrate 1.
Above by specific embodiment, the present invention is described in detail, but these have not constituted the limit to the present invention
System.Without departing from the principles of the present invention, those skilled in the art it may also be made that many deformation and improves, this
Also should be regarded as protection scope of the present invention a bit.
Claims (20)
1. a super junction power device, it is characterised in that: in N-type epitaxy layer, it is formed with multiple groove, described
Groove is filled with p-type post, the described p-type post that is filled in described groove and by the described N-type between described groove
The N-type post alternately arranged composition super-junction structure of epitaxial layer composition；
The side of described groove is that the bottom width of incline structure and described groove is less than top width, described to be conducive to
The etching of groove and filling；
Be formed through in the side of described groove ion implanting formed doping compensation layer, from the top of described groove to
In bottom direction, the doping content of described doping compensation layer is changed stepwise, for compensating the described ditch groove width at different depth
Degree is on described p-type post and the impact of the charge balance of described N-type post, thus improves at the different depth of described groove
The charge balance of described p-type post and adjacent described N-type post also thus improves the breakdown voltage of super junction power device.
2. super junction power device as claimed in claim 1, it is characterised in that: at the bottom position of described groove,
The described p-type post of the described doping compensation layer of superposition and the p type impurity total amount of described N-type post more than N-type impurity total amount,
In order to improve the impact resistance of described super junction power device.
3. super junction power device as claimed in claim 1, it is characterised in that: described doping compensation layer is n-type doping,
From the top-to-bottom direction of described groove, the concentration of the N-type impurity of described doping compensation layer progressively diminishes.
4. super junction power device as claimed in claim 1, it is characterised in that: described doping compensation layer is p-type doping,
From the top-to-bottom direction of described groove, the concentration of the p type impurity of described doping compensation layer progressively becomes big.
5. super junction power device as claimed in claim 1, it is characterised in that: from the top-to-bottom side of described groove
The concentration that the impurity of the most described doping compensation layer is transitioned into p-type and described N-type impurity by N-type progressively diminishes,
The concentration of p type impurity progressively becomes big.
6. super junction power device as described in any claim in claim 1 to 5, it is characterised in that: from described
On the top-to-bottom direction of groove, the ion implanted layer of described doping compensation layer is divided into more than two-stage nitration thus described in formation
The stepping structure of doping content of doping compensation layer.
7. super junction power device as described in any claim in claim 1 to 5, it is characterised in that: from described
On the top-to-bottom direction of groove, described N-type post Uniform Doped, described p-type post Uniform Doped.
8. super junction power device as described in any claim in claim 1 to 5, it is characterised in that: described super
Knot power device includes super-junction MOSFET device, IGBT device.
9. super junction power device as claimed in claim 8, it is characterised in that: described super-junction MOSFET device includes tool
There is the super-junction MOSFET device of shield grid.
10. the manufacture method of a super junction power device, it is characterised in that comprise the steps:
Step one, offer N-type epitaxy layer, form hard mask layers in described N-type epitaxy layer, pass through chemical wet etching
Groove is formed the described hardmask layer open in region by technique；
Step 2, the segmentation etching shape of more than twice of described N-type epitaxy layer being carried out with described hard mask layers for mask
Become groove；
After each segmentation has etched, all the side of the described groove etched is carried out single compensation ion implanting
Doping, described groove is injected impurity superposition by each counterion after being formed completely and is formed and be positioned at the side of described groove
The doping compensation layer in face；
The side of described groove is that the bottom width of incline structure and described groove is less than top width, described to be conducive to
The etching of groove and follow-up filling；
Step 3, in the trench be filled with p-type epitaxial layer formed p-type post, remove described hard mask layers；
The described p-type post being filled in described groove and the N-type being made up of the described N-type epitaxy layer between described groove
Post alternately arranged composition super-junction structure；From the top-to-bottom direction of described groove, the doping of described doping compensation layer is dense
Degree is changed stepwise, for compensating the described groove width at different depth to described p-type post and the electric charge of described N-type post
The impact of balance, thus improve the described p-type post at the different depth of described groove and the electricity of adjacent described N-type post
Lotus balance also thus improves the breakdown voltage of super junction power device.
The manufacture method of 11. super junction power device as claimed in claim 10, it is characterised in that: at described groove
At bottom position, the superposition described p-type post of described doping compensation layer and the p type impurity total amount of described N-type post are more than
N-type impurity total amount, in order to improve the impact resistance of described super junction power device.
The manufacture method of 12. super junction power device as claimed in claim 10, it is characterised in that: described doping compensation
Layer be n-type doping, from the top-to-bottom direction of described groove the concentration of the N-type impurity of described doping compensation layer by
Step diminishes.
The manufacture method of 13. super junction power device as claimed in claim 11, it is characterised in that: in step 2 each time
Counterion implanted dopant is all N-type impurity, described doping compensation stacking from the top-to-bottom direction of described groove
The counterion implanted dopant added reduces successively makes the concentration of N-type impurity progressively diminish.
The manufacture method of 14. super junction power device as claimed in claim 10, it is characterised in that: described doping compensation
Layer for p-type doping, from the top-to-bottom direction of described groove the concentration of the p type impurity of described doping compensation layer by
Step becomes big.
The manufacture method of 15. super junction power device as claimed in claim 14, it is characterised in that: last in step 2
Single compensation ion implanted impurity be p type impurity, other each counterion implanted dopant be N-type impurity, from described
On the top-to-bottom direction of groove, the counterion implanted dopant of each N-type makes the N-type impurity of described doping compensation layer
Concentration progressively diminish, the counterion of other each N-type is injected by the counterion implanted dopant of last p-type
Impurity forms the described doping compensation layer of p-type doping after being overlapped, formed from the top-to-bottom direction of described groove
The concentration of the p type impurity of upper described doping compensation layer progressively becomes big structure.
The manufacture method of 16. super junction power device as claimed in claim 10, it is characterised in that: from described groove
On top-to-bottom direction, the impurity of described doping compensation layer is transitioned into the dense of p-type and described N-type impurity by N-type
Degree progressively diminishes, the concentration of p type impurity progressively becomes big.
The manufacture method of 17. super junction power device as claimed in claim 16, it is characterised in that: last in step 2
Single compensation ion implanted impurity be p type impurity, other each counterion implanted dopant be N-type impurity, from described
On the top-to-bottom direction of groove, the counterion implanted dopant of each N-type makes the N-type impurity of described doping compensation layer
Concentration progressively diminish, the counterion of other each N-type is injected by the counterion implanted dopant of last p-type
Impurity forms impurity from the top-to-bottom direction of described groove and is transitioned into the institute of p-type by N-type after being overlapped
The concentration stating doping compensation layer and described N-type impurity progressively diminishes, the concentration of p type impurity progressively becomes big.
The manufacture method of super junction power device as described in any claim in 18. such as claim 10 to 17, its feature
It is: from the top-to-bottom direction of described groove, described N-type post Uniform Doped, described p-type post Uniform Doped.
The manufacture method of super junction power device as described in any claim in 19. such as claim 10 to 17, its feature
It is: described super junction power device includes super-junction MOSFET device, IGBT device.
The manufacture method of 20. super junction power device as claimed in claim 19, it is characterised in that: described super node MOSFET
Device includes the super-junction MOSFET device with shield grid.
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| CN107275221A (en) * | 2017-06-30 | 2017-10-20 | 上海华虹宏力半导体制造有限公司 | The manufacture method of super-junction device |
| CN107611030A (en) * | 2017-07-21 | 2018-01-19 | 上海华虹宏力半导体制造有限公司 | The manufacture method of super junction |
| CN109037312A (en) * | 2018-08-23 | 2018-12-18 | 惠州市乾野微纳电子有限公司 | A kind of superjunction IGBT and its manufacturing method with shield grid |
| CN109037312B (en) * | 2018-08-23 | 2024-04-09 | 无锡市乾野微纳科技有限公司 | Super-junction IGBT with shielding grid and manufacturing method thereof |
| CN109346524A (en) * | 2018-09-30 | 2019-02-15 | 重庆大学 | A kind of hyperconjugation VDMOS device with ladder concentration polysilicon side wall structure |
| CN111341829A (en) * | 2018-12-18 | 2020-06-26 | 深圳尚阳通科技有限公司 | Super junction structure and manufacturing method thereof |
| CN111293177A (en) * | 2020-02-28 | 2020-06-16 | 电子科技大学 | Power semiconductor device |
| CN111524798A (en) * | 2020-04-03 | 2020-08-11 | 电子科技大学 | Preparation method of deep-groove transverse pressure-resistant region with longitudinal linear variable doping |
| CN111524798B (en) * | 2020-04-03 | 2022-05-03 | 电子科技大学 | Preparation method of deep-groove transverse pressure-resistant region with longitudinal linear variable doping |
| CN115513275A (en) * | 2021-06-07 | 2022-12-23 | 华润微电子（重庆）有限公司 | Super junction MOSFET device |
| CN115188804A (en) * | 2022-09-14 | 2022-10-14 | 江苏长晶科技股份有限公司 | Super junction semiconductor device and manufacturing method thereof |
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