CN105058985B - By can independent actuation chamber top oar control ink droplet directivity inkjet nozzle assembly - Google Patents

Abstract

A kind of inkjet nozzle assembly, this inkjet nozzle assembly has: for accommodating a nozzle chambers of ink, and this nozzle chambers includes at the bottom of a chamber and top, a chamber, and this chamber is pushed up to have and is defined in one of them nozzle opening；And multiple removable oar, these removable oars define the part that this chamber is pushed up.The plurality of oar is activatable to cause ink droplet to eject from this nozzle opening.Each oar includes a hot bending musical form actuator, and each actuator is to be individually controllable by corresponding drive circuit system, and the direction so making ink droplet eject from this nozzle opening is controllable by independently moving of each oar.

Description

By can independent actuation chamber top oar control ink droplet directivity inkjet nozzle assembly

The application is that application number 201080070167.5, the entitled of 1 day October 2010 applying date " have public affairs on the nozzle plate The altogether ink jet-print head of strip conductor " the divisional application of patent application.

Technical field

The present invention relates to printer field, and particularly relate to inkjet printhead arts.Present invention primarily develop for improving high score The print quality of resolution printhead and printing head performance.

Background technology

Having invented many different printing types, a large amount of types therein are presently using.Known print form has many Plant the method for carrying out this print media of labelling with mark of correlation medium.Conventional print form includes hectograph printing, laser printing Beat with copy device, dot matrix type impact printer, heat-sensitive paper printer, film recorder, thermal wax printer, dye sublimation Print machine and ink-jet printer, have drop on demand and the two kinds of forms that flow continuously.When considering the cost of structure and operation etc., speed When degree, quality, reliability, simplicity, the printer of each type has advantage and the problem of himself.

In recent years, inkjet printing (ink of the most each independent pixel derives from one or more ink nozzle) field day Benefit is popular, and this is mainly due to its cheap and multiduty character.

The many different technologies about inkjet printing are invented.About the investigation to this field, with reference to the article of J Moore: " non-back-strike print: introduce and history looks forward to (Non-Impact Printing:Introduction and Historical Perspective) ", hard copy output device (Output Hard Copy Devices), editor Du Beike (Dubeck) and S thanks You are (Sherr), page 207 to 220 (1988).

Ink-jet printer itself presents so that many is dissimilar.Continuous ink stream is utilized to seem to trace back at least in inkjet printing Nineteen twenty-nine, wherein the stream continuously of No. 1941001 of Hassell (Hansell) a kind of simple form disclosed in U.S. Patent is quiet Electricity inkjet printing.

The United States Patent (USP) 3596275 of this Witter (Sweet) also discloses the process that a kind of continuous inkjet prints, including by height Frequently electrostatic field adjusts this ink jet stream with the step causing ink droplet to separate.This technology is still used by some manufacturers, including Ai Ermu Ztel (Elmjet) and match angel (Scitex) (referring also to No. 3373437 United States Patent (USP) of Si Weite et al.).

Piezoelectric ink jet printer is also the inkjet-printing device of a kind of common type.Kai Se (Kyser) et al. is the 3946398th In number United States Patent (USP) (1970) (this patent uses diaphragm operator scheme), Zuo Ertan (Zolten) is in United States Patent (USP) 3683212 (1970) in (which disclosing the extrusion operation pattern of piezoquartz), Si Dimu (Stemme) is at No. 3747120 In United States Patent (USP) (1972) (which disclosing piezoelectric operated beam mode), Huo Jinsi (Howkins) is the 4459601st In number United States Patent (USP) (which disclosing the actuating of the piezoelectric push dynamic model formula of ink jet stream) and luxuriant and rich with fragrance thatch Bake (Fischbeck) In United States Patent (USP) 4584590 (which disclosing the type of shear mode of piezoelectric transducer element), disclose piezoelectric system.

Recently, thermal inkjet-printing has become the most popular inkjet printing form.Inkjet technology includes by remote rattan (Endo) etc. People neutralizes, at GB 2007162 (1979), those technology that special (Vaught) difficult to understand et al. discloses in United States Patent (USP) 4490728. The inkjet technology that upper two reference papers disclose all relies on the activation of electric heating actuator, and this activation causes at narrow and small sky Between (such as nozzle) is formed bubble, thus cause ink to be ejected into relevant printing from the hole being connected to this small space On medium.Beating of electric heating actuator is utilized as the manufacturers such as Canon (Canon) and Hewlett-Packard (Hewlett Packard) have manufactured Printing equipment is put.

As from foregoing teachings, many different types of printing techniques are available.It is desirable that a kind of printing technique should have There is multiple desired attribute.These include cheap structure and operation, high-speed cruising, safety and continuous print longtime running etc..Often Item technology may be in cost, speed, quality, reliability, power use, the simplicity of structure, running, ruggedness and consumption Aspect has advantage and the shortcoming of himself.

The applicant has disclosed too much page width printing head design.When comparing with more conventional cross sliding type ink jet-print head, across The fixed page width printing head that more page width extends presents the design challenge of multiple uniqueness.Such as, page width printing head is typically by many Individual single printhead ic (IC) builds, and these integrated circuits must carry out seamless link to provide high printed product Matter.The applicant has been described for the multiple printhead with shifted nozzle cross-section so far, and this cross section makes multiple nozzle arrange energy Enough page widths of crossing between adjacent printhead ic carry out seamless printing and (see No. 7,390,071 and No. 7,290,852 United States Patent (USP), these patents is incorporated herein by reference).The additive method that page width prints is (such as HP Edgeline^TMSkill Art) use staggered printhead module, this inevitably increases the size of print zone and need medium feed machine extraly Structure is to maintain and suitably the aliging of print zone.Nozzle desirable to provide a kind of replacement designs, and the design of this nozzle allows one to be used for The new method of structure page width printing head.

Typically, page width printing head includes that multiple " redundancy " nozzle is arranged, and these nozzles row can be used for dead nozzle and compensates or for adjusting The peak power requirements of whole printhead (seeing the 7th, 465,017 and 7,252, No. 353 United States Patent (USP)s, pass through by these patents Quote and be combined in this).Contrary with landscape orientation head, it is the specific question in fixed page width printing head that dead nozzle compensates, because Dielectric substrate only each nozzle in once-through printhead during printing.Redundancy inevitably increases page width printing head Cost and complexity, and desirably farthest reduce while the suitable mechanism that dead nozzle compensates still providing One or more redundam nozzle are arranged.

Be further desirable to is to provide more page width printing heads, and these page width printing heads can control the cloth of (such as) ink droplet Put and/or point resolution.

What being to provide of being further desirable to had MEMS and a cmos layer substitutes integrated printhead.It is especially desirably Big degree ground reduces undesirable " ground bounce " phenomenon and thus improves the overall electrical efficiency of printhead.

Summary of the invention

In first aspect, it is provided that a kind of inkjet nozzle assembly, this inkjet nozzle assembly includes:

For accommodating a nozzle chambers of ink, this nozzle chambers includes at the bottom of a chamber and top, a chamber, and this chamber is pushed up to have and is defined in it In a nozzle opening；And

Multiple removable oars, it is at least some of that these removable oars define that this chamber is pushed up, and the plurality of oar is can Activate to cause ink droplet to eject from this nozzle opening, each oar includes a hot bending musical form actuator, this hot bending Musical form actuator includes:

One top thermoelasticity crossbeam, this top thermoelasticity crossbeam is connected on drive circuit system；And

One passive crossbeam in bottom, the passive crossbeam in this bottom is molten on this thermoelasticity crossbeam, so makes when electric current is by being somebody's turn to do During thermoelasticity crossbeam, this thermoelasticity crossbeam is relative to this passive beam expansion, thus causes a corresponding oar towards this spray Bend at the bottom of the chamber in mouth chamber,

The most each actuator is to be individually controllable by corresponding drive circuit system, so makes ink droplet from this nozzle The direction ejected in opening is controllable by independently moving of each oar.

Term " nozzle assembly " and " nozzle " are used interchangeably as used herein.Therefore, " nozzle assembly " or " nozzle " refers to one Plant the device ejecting ink droplet when activating." nozzle assembly " or " nozzle " generally include a nozzle chambers with nozzle opening with And at least one actuator.

Optionally, this nozzle assembly is arranged on one substrate, and a passivation layer of wherein this substrate defines this nozzle At the bottom of the chamber in chamber.

Optionally, it is that separate and multiple sidewall extends to limit between at the bottom of top, this chamber and this chamber at the bottom of top, this chamber and this chamber This nozzle chambers.

Optionally, this nozzle assembly includes a pair relative oar, and these oars are positioned in the either side of this nozzle opening On.

Optionally, this nozzle assembly includes the oar of two pairs of opposed, and these oars are to position relative to this nozzle opening 's.

Optionally, these oars are moveable relative to this nozzle opening.

Optionally, each oar defines a sections of this nozzle opening, so makes this nozzle opening and these oars It is moveable relative at the bottom of this chamber.

Optionally, this thermoelasticity crossbeam is made up of a kind of vananum.

Optionally, this passive crossbeam is made up of selected from the material of lower group at least one, and this group is made up of the following: silicon oxide, Silicon nitride and silicon oxynitride.

Optionally, this passive crossbeam includes be made up of first passive crossbeam in top and be made up of silicon nitride silicon oxide The individual second passive crossbeam in bottom.

Optionally, top, this chamber is coated with a kind of polymeric material.This polymeric material may be configured at each oar and is somebody's turn to do A kind of mechanical seal is provided between one standing part on top, chamber, thus during farthest reducing the actuating of these oars Ink leaks.Alternately, this polymeric material can have and is limited to multiple opening therein, so makes in each paddle A kind of fluid-tight is there is between one standing part on thing and top, this chamber.

Optionally, this polymeric material is made up of a kind of polymer siloxane.

Optionally, this polymer siloxane is in the group that polysilsesquioxane and polydimethylsiloxane form.

Optionally, these actuators by control following at least one and be individually controllable:

Lead to the timing (timing) of multiple driving signals of each actuator, in order to provide the coordination of the plurality of oar to move； And

Lead to the power of multiple driving signals of each actuator.

Optionally, drive the power of signal by least one control following:

These drive the voltage of signal；And

These drive the pulse width of signal.

In the further aspect relevant with this first aspect, it is provided that a kind of ink jet-print head integrated circuit, this integrated circuit Including:

One substrate including drive circuit system；And

Arranging multiple inkjet nozzle assemblies over the substrate, each inkjet nozzle assembly includes:

For accommodating a nozzle chambers of ink, this nozzle chambers include at the bottom of the chamber limited by the upper surface of this substrate and Top, one chamber, this chamber defines a nozzle opening in top；And

Multiple removable oars, it is at least some of that these oars define that this chamber is pushed up, and the plurality of oar is to cause Dynamic to cause ink droplet to eject from this nozzle opening, each oar includes a hot bending musical form actuator, this hot bending musical form Actuator includes:

The top thermoelasticity crossbeam being connected on this drive circuit system；And

One passive crossbeam in bottom, the passive crossbeam in this bottom is molten to this thermoelasticity crossbeam, so makes to work as electric current During by this thermoelasticity crossbeam, this thermoelasticity crossbeam is relative to this passive beam expansion, thus causes a corresponding oar court And bend at the bottom of the chamber of this nozzle chambers,

The most each actuator is individually controllable by corresponding drive circuit system, so makes ink droplet open from this nozzle The direction ejected in Kou is controllable by independently moving of each oar.

Optionally, the upper surface of this substrate is limited by a passivation layer, and this passivation layer is disposed in a drive circuit system On layer.

In second aspect, it is provided that a kind of fixed page width ink jet printhead, this printhead is by docking end-to-end on page width Multiple printhead ics are constituted, and this printhead includes the one or more nozzles row extended along the longitudinal axis of this printhead, Each nozzle package includes multiple nozzle, and wherein one or more in these nozzles are each configured to along this longitudinal axis multiple Ink droplet is launched on predetermined difference position.

Optionally, these one or more nozzles each can be configured to along this longitudinal axis 2,3,4,5,6 or 7 differences Ink droplet is launched on position.

Optionally, each nozzle can be configured in a two-dimentional district with preliminary dimension on multiple predetermined difference positions Launch ink droplet.

Optionally, this district is substantially circular or generally oval, and the barycenter of wherein barycenter and this nozzle in this district Corresponding.

Optionally, these one or more nozzles can be configured on the either side of a main point position and this main point position extremely Ink droplet is launched on a few secondary point position.

Optionally, each nozzle in first group is configured to send out on multiple predetermined difference positions along this longitudinal axis Penetrate ink droplet, wherein within two nozzle pitches of the dead nozzle that each nozzle in this first group is positioned in this printhead, One of them nozzle pitch is defined as the minimum fore-and-aft distance between a pair nozzle in same nozzle row.

Optionally, each nozzle in a nozzle row is configured to send out on multiple predetermined difference positions along this longitudinal axis Penetrate ink droplet, so make print point density exceed the spray nozzle density of this printhead.

Optionally, every pair of printhead ic of docking defines an attachment areas, and wherein crosses over this attachment areas Nozzle pitch has exceeded a nozzle pitch, the minimum that a nozzle pitch is defined as between a pair nozzle in same nozzle row Fore-and-aft distance.

Optionally, each nozzle in one of them second group is configured to along this longitudinal axis in multiple predetermined difference positions Upper transmitting ink droplet, at least one some position that the plurality of predetermined point position is included in this attachment areas.

In the third aspect, it is provided that a kind of fixed page width ink jet printhead, this printhead includes the longitudinal axis along this printhead The one or more nozzles row extended, the most each nozzle is configured to along this longitudinal axis on multiple predetermined difference positions Launch ink droplet, so make print point density exceed the spray nozzle density of this printhead.

Optionally, each nozzle can be configured to launch ink on 2,3,4,5,6 or 7 difference positions along this longitudinal axis Drip.

Optionally, each nozzle can be configured to launch ink on multiple predetermined difference positions along the axis of pitch of this printhead Drip.

Optionally, this print point density is at least twice of spray nozzle density of this printhead.

Optionally, each nozzle is configured in a row time (line-time) launch more than once, during one of them row Between be defined as print media and advance through the time that first row of this printing is spent.

In fourth aspect, it is provided that a kind of fixed page width ink jet printhead, this printhead includes the longitudinal axis along this printhead The one or more nozzles row extended, the most each nozzle can be configured to along this longitudinal axis on multiple predetermined difference positions Launching ink droplet, each nozzle has a main point position associated there, and wherein this printhead is configured to by from one The selected nozzle worked that individual dead nozzle is positioned in same nozzle row carries out printing to compensate this dead nozzle, and this is selected The nozzle worked be configured on the main point position being associated with this dead nozzle launch at least some ink droplet and At least some ink droplet is launched on the main point position of himself.

Optionally, this selected nozzle worked is positioned at this dead nozzle at a distance of one, two, three or four nozzle joints Away from distance, one of them nozzle pitch be defined as same nozzle row in a pair nozzle between minimum fore-and-aft distance.

Optionally, this printhead is configured to compensate this dead nozzle by following steps:

Identify this dead nozzle；

Select a nozzle worked to compensate this dead nozzle；And

It is configured to the selected nozzle worked on the main point position being associated with this dead nozzle launch at least some Ink droplet.

Optionally, this selected nozzle worked is configured within the period of a row time be associated with this dead nozzle Main point position launch the first ink droplet and on the main point position of himself, launch the second ink droplet, one of them row time It is defined as print media and advances through the time that first row of this printing is spent.

Optionally, each nozzle can be configured to send out on multiple predetermined difference positions along the axis of pitch of this printhead further Penetrate ink droplet.

Optionally, this selected nozzle worked was configured in the period being less than five row times more than a row time The main point position being associated with this dead nozzle is launched the first ink droplet and on the main point position of himself, launches the Two ink droplets.

Optionally, being perpendicular to each ink droplet that the ink jet face of this printhead ejects causes this ink to be dropped in a corresponding master On position to be put.

Optionally, this printhead is configured to compensate multiple by carrying out printing from the corresponding multiple selected nozzle worked Dead nozzle.

Optionally, this printhead does not have the nozzle row of redundancy.

In a further aspect relevant with this fourth aspect, it is provided that a kind of beating for fixed page width ink jet printhead Print head integrated circuit, this printhead ic includes the one or more nozzles row extended along its longitudinal axis, the most each spray Mouth is configured to launch ink droplet on multiple predetermined difference positions along this longitudinal axis, and each nozzle has associated there One main point position, wherein this printhead ic is configured to by being positioned in same nozzle row from a dead nozzle A selected nozzle worked carry out printing to compensate this dead nozzle, this selected nozzle worked is configured to Launch at least some ink droplet on the main point position being associated with this dead nozzle and launch on the main point position of himself At least some ink droplet.

At the 5th aspect, it is provided that a kind of fixed page width ink jet printhead, this printhead includes the longitudinal axis along this printhead The one or more nozzles row extended, this printhead is made up of multiple printhead modules, and these printhead modules have leap page width And dock, the first and second contrary ends, the every pair of printhead module of docking limits a public attachment areas, wherein across The more nozzle pitch of this attachment areas has exceeded a nozzle pitch, and a nozzle pitch is defined as a pair in same nozzle row At minimum fore-and-aft distance between nozzle, and the first end of the first printhead module being wherein positioned at a docking centering extremely A few first jet is configured to be transmitted into by ink droplet among a corresponding attachment areas.

Optionally, at least one second nozzle at the second end of the second printhead module being positioned at this docking centering is configured to Ink droplet is transmitted in the attachment areas of this correspondence, so makes the relative first end from multiple adjacent printhead modules With the first and second nozzles in the second end, ink droplet is transmitted among this public attachment areas.

Optionally, each first jet is configured to launch ink droplet on multiple predetermined difference positions along this longitudinal axis, should At least one some position that multiple predetermined difference positions are included in this attachment areas.

Optionally, each first and second nozzles are configured to along this longitudinal axis on corresponding multiple predetermined difference position Launch corresponding ink droplet, at least one some position that corresponding multiple predetermined difference position is each included in this attachment areas Put.

Optionally, the point in this attachment areas is away from roughly the same with a nozzle pitch.

Optionally, first and second nozzle each is configured to launch more than once within the period of a row time, one of them The row time is defined as the time that print media is spent by first row of this printing.

Optionally, the multiple nozzles positioned towards this first end are configured to be partial to this first end and launch ink droplet, and towards Multiple nozzles of the second end location are configured to be partial to this second end and launch ink droplet.

Optionally, deflection depends on the distance of each nozzle and the center of corresponding printhead module, so make closer to Multiple nozzles of this centralized positioning launch ink droplet with the deflection less than the multiple nozzles further from this centralized positioning.

Optionally, equalization point is away from more than a nozzle pitch.

Optionally, equalization point has gone out greatly less than 1% away from than a nozzle pitch.

Optionally, unless compensated for a dead nozzle, otherwise each nozzle in this printhead is configured on only one point position Launch ink droplet.

At the 6th aspect, it is provided that a kind of printhead ic (IC), this printhead ic includes along its longitudinal axis The one or more nozzles row extended, this printhead IC has and limits page width for engaging ground connection with other printhead IC The first end of printhead and the second end, each nozzle has a main point position associated there, is wherein positioned at this At least one first jet at first end is configured to except launching at least some ink droplet on the main point position of himself Outside, also be partial to this first end launch at least some ink droplet.

Optionally, it is positioned at least one second first jet at this second end to be configured to except in himself main point Launch outside at least some ink droplet on position, be also partial to this second end and launch at least some ink droplet.

Optionally, this first jet is configured to be partial to this first end one ink of transmitting within a row time or less period Dripping and launch an ink droplet on the main point position of himself, one of them row time is defined as print media and advances through The time that one row of this printhead IC is spent.

Optionally, each second nozzle is configured to be partial to this second end transmitting one within a row time or less period Ink droplet and on the main point position of himself launch an ink droplet.

Optionally, the point of the nozzle pitch of this printhead IC and print point away from identical, the wherein nozzle pitch quilt of this printhead IC The fore-and-aft distance being defined as between a pair nozzle in same nozzle row, and put away from a pair point being defined as in same print line Between fore-and-aft distance.

Optionally, this first jet is configured to being partial to this first end is between 1 nozzle pitch and 3 nozzle pitches At least some ink droplet is launched in the case of Ju Li.

Optionally, each nozzle comes first attachment areas at this first end and second at this second end Connect and extend between region.

Optionally, the width that this first attachment areas and this second attachment areas have is defined as one in this printhead IC Minimum range between edge and a nozzle.

Optionally, the width that this first attachment areas has is between 0.5 nozzle pitch and 3.5 nozzle pitches, and is somebody's turn to do The width that second attachment areas has is between 0.5 nozzle pitch and 3.5 nozzle pitches

Optionally, when this printhead IC is for time fixing, and the printable area of at least one nozzle row is the longitudinal direction being longer than this nozzle row Scope.

At the 7th aspect, it is provided that a kind of printhead ic for fixed page width printing head (IC), this printhead IC Including at least one nozzle row extended along its longitudinal axis, wherein the length corresponding to the printable area of this nozzle row is to be longer than this The length of nozzle row.

Optionally, the length that the length of this printable area is arranged than this nozzle has grown at least one nozzle pitch, one of them nozzle Pitch is defined as the minimum fore-and-aft distance between a pair nozzle in this nozzle is arranged.

Optionally, this printable area is up to go out eight nozzle pitches than this nozzle platoon leader.

Optionally, this printable area corresponding to being arranged a line point printed by this nozzle.

Optionally, this printhead includes that multiple nozzle is arranged, and wherein the length corresponding to the printable area of respective nozzle row is to be longer than often The length of individual nozzle row.

Optionally, this printable area has extended beyond each end of this nozzle row.

Optionally, be positioned at least one first jet at a first end of this printhead IC be configured to be partial to this One end launches ink droplet.

Optionally, deflection depends on the distance of each nozzle and this first end, so make with this first end closer to Multiple nozzles of location, ground are being more partial to this first end in the case of compared with multiple nozzles of this first end more far orientation Launch ink droplet.

Optionally, it is positioned at least one second nozzle at a contrary the second end of this printhead IC to be configured to partially Ink droplet is launched to this second end.

Optionally, deflection depends on the distance of each nozzle and the center of this printhead IC, so makes closer to this Center and multiple nozzles of positioning with more send out away from the deflection that multiple nozzles of this centralized positioning are the least Penetrate ink droplet.

Optionally, the multiple nozzles being positioned in the central area of this printhead IC are configured to be generally perpendicular to this printhead IC Ink jet face launch ink droplet.

Optionally, the equalization point in this printable area is away from more than a nozzle pitch.

Optionally, this equalization point has gone out greatly less than 1% away from than a nozzle pitch.

Optionally, unless compensated for a dead nozzle, otherwise each nozzle in this printhead is all arranged in only one point position Upper transmitting ink droplet.

In eighth aspect, it is provided that a kind of method for controlling the direction that ink droplet ejects from inkjet nozzle, this inkjet nozzle Including: a nozzle chambers, this nozzle chambers has top, a chamber, and a nozzle opening is limited at wherein；And it is multiple removable Oar, it is at least some of that these removable oars define that this chamber is pushed up, and each oar includes that a hot bending musical form activates Device, the method comprises the following steps:

Activate a first hot bending musical form actuator by the first corresponding drive circuit system, so make one corresponding the One oar bends towards at the bottom of a chamber of this nozzle chambers；

Activate a second hot bending musical form actuator by the second corresponding drive circuit system, so make one corresponding the Two oars bend towards at the bottom of a chamber of this nozzle chambers；And

Thus from this nozzle opening, eject ink droplet,

Wherein the actuating of this first hot bending musical form actuator and this second hot bending musical form actuator is by this first drive circuit system System and this second drive circuit system are independently controlled, in order to control the direction that ink droplet ejects from this nozzle opening.

Optionally, this first actuator and this second actuator by control following at least one and be controlled independently:

Lead to the timing of the multiple driving signals of each in the first actuator and this second actuator, in order to provide the plurality of paddle The coordination of thing is moved；And

Lead to the power of the multiple driving signals of each in these actuators, in order to cause the asymmetric shifting of the plurality of oar Dynamic.

Optionally, before this second actuator, activate this first actuator to provide ink droplet injection in the first direction, Or before this first actuator, activate this second actuator to provide ink droplet injection in a second direction.

Optionally, be supplied to the power of this first actuator more than the power being supplied to this second actuator, or be supplied to this second The power of actuator is more than the power being supplied to this first actuator.

Optionally, drive the power of signal by least one control following:

These drive the voltage of signal；And

These drive the pulse width of signal.

Optionally, the oar of two pairs of opposed positions relative to this nozzle opening.

Optionally, the method farther includes step further below:

Activate a 3rd hot bending musical form actuator by the first corresponding drive circuit system, so make one corresponding the Three oars bend towards at the bottom of a chamber of this nozzle chambers；

Activate a 4th hot bending musical form actuator by the second corresponding drive circuit system, so make one corresponding the Two oars bend towards at the bottom of a chamber of this nozzle chambers,

Wherein this first, second, third and the 4th the actuating of hot bending musical form actuator be by corresponding first, second, the Three and the 4th drive circuit system is independently controlled, in order to control the direction that ink droplet ejects from this nozzle opening.

Optionally, these oars are moveable relative to this nozzle opening.

Optionally, each oar defines a sections of this nozzle opening, so makes this nozzle opening and these oars It is moveable relative at the bottom of this chamber.

At the 9th aspect, it is provided that a kind of method that a dead nozzle in fixed page width printing head is compensated, this printing Head has one or more nozzles row of the longitudinal axis extension along this printhead, and each nozzle includes what multiple hot bending musical form activated Oar, these oars can be configured to launch ink droplet, each nozzle on multiple predetermined difference positions along this longitudinal axis Having a main point position associated there, the method comprises the following steps:

Identify this dead nozzle；

Select to be positioned at a nozzle worked in same nozzle row with this dead nozzle；And

The nozzle that work selected from this launches at least some ink droplet on the main point position being associated with this dead nozzle.

Optionally, the method further includes steps of

The nozzle that work selected from this launches at least some ink droplet on the main point position of himself.

Optionally, this selected nozzle worked is positioned in this dead nozzle at a distance of one, two, three or four sprays The distance of mouth pitch, one of them nozzle pitch be defined as between a pair nozzle in same nozzle row minimum longitudinally away from From.

Optionally, the method further includes steps of

Make print media to be laterally advanced past one row of this fixing printing head within the period of a row time；

The nozzle that work selected from this launches the first ink droplet on the main point position being associated with this dead nozzle；And

The nozzle that work selected from this launches the second ink droplet on the main point position of himself,

Wherein this selected nozzle worked launches this first ink droplet and this second ink droplet within the period of a row time.

Optionally, this selected nozzle worked launches this first ink droplet and this second ink droplet with random order.

Optionally, each nozzle can be configured to send out on multiple predetermined difference positions along the axis of pitch of this printhead further Penetrate ink droplet.

Optionally, the method further includes steps of

A print media is made laterally to be advanced past this fixed printhead with the speed of each one row of row time；

The nozzle that work selected from this launches the first ink droplet on the main point position being associated with this dead nozzle；And

The nozzle that work selected from this launches second ink droplet on the main point position of himself,

Wherein this selected nozzle worked launch within period less than five row times more than a row time this first Ink droplet and this second ink droplet.

Optionally, this dead nozzle is identified by detection corresponding to the resistance of one or more actuators of this dead nozzle.

At the tenth aspect, it is provided that a kind of in fixed page width printing head with exceeded a dot density of spray nozzle density carry out beat The method of print, multiple printhead ics that this fixed page width printing head is docked end-to-end by crossing over page width are constituted, should Printhead has at least one nozzle row extended along its longitudinal axis, and the method comprises the following steps:

A kind of print media is made laterally to be advanced past this fixed printhead with the speed of each one row of row time；

From this nozzle arrange multiple predetermined nozzle launch ink droplet to form multiple continuous print print lines,

Wherein make a reservation for along this longitudinal axis multiple in the period of each comfortable row time of at least some in these predetermined nozzle Difference position on launch ink droplet, so make the print point density in each print line exceed spray nozzle density.

At the 11st aspect, it is provided that a kind of ink jet-print head, this ink jet-print head includes:

One substrate, this substrate includes a drive circuit system layer；

Multiple nozzle assemblies, the plurality of nozzle assembly is disposed on the upper surface of this substrate and is arranged in along this printhead longitudinally In the one or more nozzles row extended, each nozzle assembly includes: a nozzle chambers, and this nozzle chambers has and limited by this upper surface At the bottom of a fixed chamber；With the top, a chamber separated at the bottom of this chamber；And an actuator, this actuator is for from being limited to this chamber A nozzle opening in top sprays ink；

One nozzle plate, this nozzle plate extends across this printhead, and this nozzle plate at least partially defines top, these chambeies；And

At least one strip conductor being disposed on this nozzle plate, this strip conductor along this printhead longitudinal extension and and these Row is parallel for nozzle, and wherein this strip conductor is via the multiple conductor stakes extended between this drive circuit system layer and this strip conductor And the common reference plane being connected in this drive circuit system layer.

Optionally, one ground plane of this common reference planes bound or a power plane.

Optionally, this printhead includes at least one first strip conductor, and wherein this first strip conductor is directly connected to neighbour On multiple actuators at least one nozzle row of this first strip conductor nearly.

Optionally, this printhead farther includes at least one second strip conductor, and wherein this second strip conductor the most directly connects Receive any actuator.

Optionally, this first strip conductor extends continuously along this printhead, in order to for each actuator in arranging at this nozzle One common reference plane is provided.

Optionally, this first strip conductor extends discontinuously along this printhead, in order to for one group of actuating in arranging at this nozzle Device provides a common reference plane.

Optionally, this first strip conductor is positioned between a pair nozzle row of correspondence, and this first strip conductor is for right at this In two nozzles row in multiple actuators this common reference plane is provided.

Optionally, each actuator has the first terminal being directly connected on this first strip conductor and is connected to this driving Second terminal on a driving transistor in Circuits System layer.

Optionally, top, each chamber includes at least one actuator, and this first terminal of each actuator via relative to this One strip conductor extends transversely with to be crossed over multiple lateral connectors of this nozzle plate and is connected to this first strip conductor.

Optionally, this second terminal is via the actuator stake extended between this drive circuit system layer and this second terminal It is connected to this driving transistor.

Optionally, these actuator stakes are perpendicular to the plane of this first strip conductor.

Optionally, top, each chamber includes at least one removable oar, and this removable oar includes a corresponding thermal flexure Formula actuator, this oar is towards being moveable at the bottom of the chamber of a corresponding nozzle chambers, in order to cause ink from this nozzle opening In eject, wherein this hot bending musical form actuator includes:

One top thermoelasticity crossbeam, this top thermoelasticity crossbeam has first terminal and the second terminal；And

One passive crossbeam in bottom, the passive crossbeam in this bottom is molten on this thermoelasticity crossbeam, so makes when electric current is by being somebody's turn to do During thermoelasticity crossbeam, this thermoelasticity crossbeam is relative to this passive beam expansion, thus causes a corresponding oar towards this spray Bend at the bottom of the chamber in mouth chamber.

Optionally, this thermoelasticity crossbeam and this strip conductor are coplanar.

Optionally, this thermoelasticity crossbeam is made up of identical material with this strip conductor.

Optionally, this nozzle plate is made up of a kind of ceramic material.

Optionally, this drive circuit system layer includes a driving field effect transistor (FET), each driving to each actuator FET includes: a grid, and this grid is for receiving a logical transmission signal；One source electrode, this source electrode and a power supply are put down Face electrical communication；And a drain electrode, this drain electrode and a ground plane electrical communication, this driving FET is one below:

PFET, wherein this actuator is connected between its drain electrode and this ground plane；Or

NFET, wherein this actuator is connected between power plane and its source electrode.

Optionally, this driving FET is pFET and this first strip conductor provides this ground plane；And further, wherein This first terminal of this actuator is connected on this first strip conductor and this second terminal of this actuator is connected to this pFET's In drain electrode.

Optionally, this second strip conductor provides this power plane and is connected on the source electrode of this pFET.

Optionally, this driving FET is nFET and this first strip conductor offer power plane；And further, wherein should This first terminal of actuator is connected on this first strip conductor and this second terminal of this actuator is connected to the source of this nFET Extremely go up.

Optionally, this second strip conductor provides this ground plane and is connected in the drain electrode of this nFET.

At the 12nd aspect, it is provided that a kind of printhead ic for ink jet-print head (IC), the integrated electricity of this printhead Road includes:

One substrate, this substrate includes a drive circuit system layer；

Multiple nozzle assemblies, the plurality of nozzle assembly is disposed on the upper surface of this substrate and is arranged at along this printhead IC In one or more nozzles row of longitudinal extension, each nozzle assembly includes: a nozzle chambers, and this nozzle chambers has by table on this At the bottom of the chamber that face limits；At the bottom of the chamber separated at the bottom of this chamber；And an actuator, this actuator is for from being limited to this A nozzle opening in top, chamber sprays ink；

One nozzle plate, this nozzle plate extends across this printhead IC, and this nozzle plate at least partially defines top, these chambeies；With And

At least one strip conductor being molten on this nozzle plate, this strip conductor sprays along this printhead longitudinal extension and with these Row is parallel for mouth, and wherein this strip conductor is via the multiple conductor stakes extended between this drive circuit system layer and this strip conductor The common reference plane being connected in this drive circuit system layer.

Optionally, one ground plane of this common reference planes bound or a power plane.

Optionally, this strip conductor is disposed on or below this nozzle plate.

Accompanying drawing explanation

Let us now refer to the figures the multiple optional embodiment describing the present invention the most by way of example, in the accompanying drawings:

Fig. 1 is the sectional side at the inkjet nozzle assembly being partially fabricated formed after the first step sequence of nozzle chambers sidewall View；

Fig. 2 is the perspective view of the inkjet nozzle assembly being partially fabricated shown in Fig. 4；

Fig. 3 is the inkjet nozzle assembly being partially fabricated after the second step sequence of nozzle chambers filled polyimide Side cross-sectional view；

Fig. 4 is the perspective view of the inkjet nozzle assembly being partially fabricated shown in Fig. 3；

Fig. 5 be formed adapter stake until chamber, chamber top third step sequence after an inkjet nozzle assembly being partially fabricated Side cross-sectional view；

Fig. 6 is the perspective view of the inkjet nozzle assembly being partially fabricated shown in Fig. 5；

Fig. 7 is the sectional side at the inkjet nozzle assembly being partially fabricated formed after the 4th sequence of steps of conductive metal sheet View；

Fig. 8 is the perspective view of the inkjet nozzle assembly being partially fabricated shown in Fig. 7；

Fig. 9 is a spray being partially fabricated after the 5th sequence of steps of the active beam member of formation hot bending musical form actuator The side cross-sectional view of injection nozzle assembly；

Figure 10 is the perspective view of the inkjet nozzle assembly being partially fabricated shown in Fig. 9；

Figure 11 is after the 6th sequence of steps that one mobile cavity top including this hot bending musical form actuator of formation is divided The side cross-sectional view of the inkjet nozzle assembly being partially fabricated；

Figure 12 is the perspective view of the inkjet nozzle assembly being partially fabricated shown in Figure 11；

Figure 13 is deposited at hydrophobic polymer layer and after the 7th sequence of steps by optical patterning (photopattern) The side cross-sectional view of the inkjet nozzle assembly that is partially fabricated；

Figure 14 is the perspective view of the inkjet nozzle assembly being partially fabricated shown in Figure 13；

Figure 15 is the side cross-sectional view of the inkjet nozzle assembly formed completely；

Figure 16 is the fragmentary, perspective view of the inkjet nozzle assembly shown in Figure 15；

Figure 17 is the plane graph of an inkjet nozzle with relative removable chamber top oar and a movable sprinklers opening；

Figure 18 is to have an ink-jet of moveable multiple relative top, chamber oars for a fixed nozzle opening The plane graph of nozzle；

Figure 19 is the simplified electrical circuit diagram of the two actuator in inkjet nozzle shown in independently controlled Figure 17；

Figure 20 is the flat of a part for a printhead of the multiple inkjet nozzles including having top, four moveable chambeies oar Face figure；

Figure 21 shows the two-dimentional printable area for one of inkjet nozzle shown in Figure 20；

Figure 22 is the part being configured so that print point density higher than an ink jet-print head of the spray nozzle density of printhead Side view；

Figure 23 is the side view of the part being configured for the ink jet-print head that dead nozzle compensates；

Figure 24 is the plane graph of the ink jet-print head being made up of the printhead IC of five docking；

Figure 25 is the plane graph of a single printhead IC；

Figure 26 is the perspective view of the end regions of printhead IC shown in Figure 25；

Figure 27 is the perspective view of the attachment areas between a pair printhead IC as shown in figure 25；

Figure 28 is the perspective view of the attachment areas of a pair printhead IC, and printhead IC is included being configured for printing to by this Nozzle in attachment areas；

Figure 29 is the side view of a printhead IC, and wherein printable area is the nozzle row being longer than correspondence；

Figure 30 is the side view of a printhead IC, and plurality of end nozzle is configured for printing to the attachment section of correspondence In territory；

Figure 31 is the plane graph of a part with the printhead IC arranging strip conductor on the nozzle plate；

Figure 32 is the simplified electrical circuit diagram being connected to drive an actuator on pFET；

Figure 33 is the simplified electrical circuit diagram being connected to drive an actuator on nFET；And

Figure 34 is the plane graph of a part for the printhead IC of a replacement with the strip conductor being arranged on the nozzle plate.

Detailed description of the invention

Manufacture process including the inkjet nozzle assembly of top, removable chamber oar

For the sake of completeness and according to background, existing description being used for manufactures a kind of inkjet nozzle group including top, removable chamber oar One process of part (or " nozzle "), top, this chamber oar has a hot bending musical form actuator.Shown in Figure 15 and Figure 16 Completed inkjet nozzle assembly 100 uses hot bending musical form brake function, wherein a removable oar in top, nozzle chambers chamber 4 bend towards substrate 1, thus cause ink to be sprayed.This manufacture process is at the applicant US 2008/0309728 earlier Number and No. 2008/0225077 U.S. Publication case of US in described, the content of these publication is incorporated herein by reference.So And, it will be appreciated that, corresponding manufacture process may be used for manufacturing any inkjet nozzle assembly described here and even manufacturing Printhead and printhead ic (IC).

The starting point that MEMS manufactures is to have the standard CMOS wafer of CMOS drive circuit system, this drive circuit system It is arranged among one or more upper stratas of a passivation of silicon wafers.At the end of MEMS manufacture process, this wafer is cut into Multiple single printhead ics (IC), the most each IC includes a CMOS drive circuit system layer and multiple spray Nozzle assembly.

In the sequence of steps shown in Fig. 1 and Fig. 2, initially the silicon oxide layer of 8 microns is deposited on the upper surface of substrate 1. The degree of depth of silicon oxide defines the degree of depth of a nozzle chambers 5 for inkjet nozzle.At this SiO₂After layer deposition, entered Row etching, to limit multiple walls 4, is clearly shown that in fig. 2, and these walls will become the sidewall of nozzle chambers 5.

As shown in Figure 3 and Figure 4, then fill this nozzle chambers 5 with photoresist or polyimides 6, this photoresist or Polyimides serves as the sacrificial support for subsequent deposition process.Polyimides 6 is rotated on wafer by standard technique, Being carried out UV solidification and/or roasting firmly and then carry out chemical-mechanical planarization (CMP), this chemical-mechanical planarization is at this SiO₂Stop at the top surface of wall 4.

In fig. 5 and fig., form the top, chamber 7 of this nozzle chambers 5 and extend downwardly into multiple high connductivity of multiple electrode 2 Property actuator stake 8.Initially, by the SiO of 1.7 microns₂Layer is deposited on polyimides 6 and wall 4.This SiO₂Layer defines spray The top, chamber 7 in mouth chamber 5.It follows that by anisotropy DRIE using standard, wall 4 forms a pair via, downwards Arrive these electrodes 2.This etching makes this pair of electrodes 2 be exposed by respective via.It follows that by use Learn plating, fill these vias with high-conductive metal such as copper.Copper stake 8 to deposition carries out CMP, at this SiO₂Top, chamber component Stop on 7, to provide planar structure.Visible, the copper actuator stake 8 formed during electroless copper and corresponding electrode 2 phase Meet, thus provide the linear conductance path on up to top, chamber 7.

In figures 7 and 8, multiple metal gasket 9 is formed by depositing and etch the aluminium lamination of 0.3 micron.Can use Any high-conductive metal (such as aluminum, titanium etc.) and should depositing with about 0.5 micron or less thickness, in order to not to spray The global flatness of nozzle assembly causes the most serious impact.These metal gaskets 9 be limited by etching to be positioned in On the component 7 of top, in actuator stake 8 and chamber, in predetermined " bending area " of thermoelasticity actively beam member.Will of course be appreciated that It is that these metal gaskets 9 are not strictly necessary, and the sequence of steps shown in Fig. 7 and Fig. 8 can eliminate from manufacture process.

In figure 9 and in figure 10, a thermoelasticity actively beam member 10 is formed at SiO₂On top, chamber 7.By being molten to this Actively on beam member 10, SiO₂The part on top, chamber 7 serves as the bottom passive crossbeam structure of a mechanical thermal bending-type actuator Part 16, this mechanical thermal bending-type actuator is limited with passive crossbeam 16 by active crossbeam 10.Thermoelasticity actively beam member 10 can be made up of any applicable thermoelastic material (such as titanium nitride, TiAlN and aluminium alloy).As at 2002 12 In the applicant's No. 11/607,976 U. S. application earlier months 4 days submitted to explanation (disclosure of which is by quoting knot Be combined in this), vananum is preferred material because vananum be combined with high thermal expansion, low-density and high Young's modulus this A little favorable property.

In order to form actively beam member 10, the standard PECVD of initially passing through deposits the active crossbeam material of 1.5 microns Layer.Subsequently, by using standard metal to etch this crossbeam material to limit this active thermal Spring beams component 10.Complete After becoming this metal etch, and as shown in Figure 9 and Figure 10, actively beam member 10 includes a portion nozzle opening 11 With one distortion transverse beam elements 12, this transverse beam elements be connected electrically to via these actuator stakes 8 in each end power supply and On ground electrode 2.This plane transverse beam elements 12 extends from the top of first (power supply) actuator stake and bends 180 degree and return Go back to the top of second (ground connection) actuator stake.

Referring now still to Fig. 9 and Figure 10, these metal gaskets 9 are oriented to for promoting the electric current in the region of potential high electrical resistance. One metal gasket 9 is to be positioned on the bending area of this transverse beam elements 12 and be sandwiched in active beam member 10 with passive Between beam member 16.Another metal gasket 9 is positioned between the top of actuator stake 8 and the end of transverse beam elements 12.

With reference to Figure 11 and Figure 12, then etch SiO₂Top, chamber 7 is to limit a nozzle opening 13 and one in chamber completely in pushing up Movably cantilever oar 14.Oar 14 includes a hot bending musical form actuator 15, this hot bending musical form actuator itself by This passive beam member of active thermal Spring beams component 10 and lower floor 16 is constituted.Nozzle opening 13 is limited at the paddle on top, chamber In thing 14, this nozzle opening is so made to be moved by this actuator during activating.Such as the applicant the 11/607,976th Described in number U. S. application (being incorporated herein by reference), nozzle opening 13 is same relative to the configuration that oar 14 is fixing It is possible.

Peripheral space around this removable oar 14 or gap 17 are by a standing part 18 points of this oar with top, chamber Every.This gap 17 allows this removable oar 14 to bend to when actuator 15 activates in nozzle chambers 5 and towards substrate 1 Bending.

With reference to Figure 13 and Figure 14, then deposit on whole nozzle assembly a polymeric layer 19 and to its be etched with The most again limit this nozzle opening 13.As described in US 2008/0225077 (its content is incorporated herein by reference), Before etching this nozzle opening 13, this polymeric layer 19 can be protected with a removable thin metal layer (not shown).

Polymeric layer 19 performs some functions.First, this polymeric layer is filled with gap 17 to push up 7 at oar 14 with chamber Standing part 18 between provide mechanical seal.If this polymer has of a sufficiently low Young's modulus, then anti-during activating While only ink is escaped by gap 17, this actuator still can bend towards substrate 1.Secondly, this polymer has high hydrophobic Property, thus farthest reduce ink and gush out from the nozzle chambers of relative hydropathic and flood the ink jet face 21 of this printhead Tendency.3rd, this polymer serves as protective layer, thus promotes the maintenance of printhead.

As described in the 12/508th, No. 564 U. S. application (its content is incorporated herein by reference), polymeric layer 19 is permissible By the siloxanes being polymerized, (any polymer such as polydimethylsiloxane (PDMS) or from polysilsesquioxane series is constituted. Polysilsesquioxane is generally of empirical formula (RSiO_1.5)_n, wherein R is hydrogen or organic group, and n represents polymer chain The integer of length.This organic group can be C_1-12Alkyl (such as methyl), C_1-10Aryl (such as phenyl) or C_1-16Aralkyl Base (such as benzyl).This polymer chain can have any length as known in the art (such as, n is from 2 to 10,000, 10 to 5000 or 50 to 1000).Suitably the instantiation of polysilsesquioxane is poly-(methyl silsesquioxane) and poly-(phenyl Silsesquioxane).

Return to last manufacturing step, and as shown in Figure 15 and Figure 16, lose through to nozzle chambers 5 from the rear side of substrate 1 Carve an ink service duct 20.Although this ink service duct 20 is shown as and the nozzle opening in Figure 15 and Figure 16 13 alignment, but this ink service duct may be positioned such that with this nozzle opening be deviation certainly.

After the etching of ink service duct, by using (such as) O₂Plasma carries out being ashed (front side ashing or rear side ash Change) remove this polyimides 6 being filled with nozzle chambers 5, in order to nozzle assembly 100 is provided.

There is relative a pair and may move the inkjet nozzle assembly of top, chamber oar

Such as best image in Figure 12, the inkjet nozzle assembly previously described by the applicant include a removable oar 14 with Eject for making ink pass nozzle opening 13.

With reference to Figure 17, this figure schematically shows the spray including a pair relative chamber top oar 14A and 14B with plane graph Injection nozzle assembly 200.For the sake of clarity, top polymeric layer 19 is from described here, with all sprays shown in plane graph Injection nozzle removes.Additionally, for the sake of clarity, the feature that all inkjet nozzle assemblies described here have is given similar Reference number.

Oar 14A and 14B each has hot bending musical form actuator 15A and 15B of correspondence, these hot bending musical form actuators Limited by a top thermoelasticity crossbeam and a passive crossbeam in bottom in the way of identical with above-mentioned inkjet nozzle 100.Additionally, Each hot bending musical form actuator (and the most each oar) is by right in the CMOS drive circuit system layer of substrate 1 The drive circuit system answered is individually controllable.This allows the first actuator 15A (with therefore the first oar 14A) only Stand on the second actuator 15B (with therefore the second oar 14B) and be controlled.

Figure 17 shows a nozzle assembly 200 with relative oar 14A and 14B, and the most each oar limits One sections of this nozzle opening 13.Therefore, during activating, nozzle opening 13 will move along with these oars.

Figure 18 shows the replacement nozzle assembly 210 with relative oar 14A and 14B, and the most each oar is relative It is moveable in nozzle opening 13.In other words, nozzle opening 13 is limited among the standing part on top, chamber 7.Certainly, It will be appreciated that two kinds of nozzle assemblies 200 and 210 as shown in figs. 17 and 18 are within the scope of the present invention.

Figure 19 shows the relative power amount for controlling to be supplied to each actuator 15A and 15B of nozzle assembly 200 Ball bearing made figure.When using potentiometer 202 to change the quantity of power being supplied to actuator 15B, actuator 15A receives Total power.

The experimental of one group of different potentials meter resistance is used to measure it was demonstrated that different maximum oar speed is to be supplied by reduction The quantity of power of actuator 15B should be arrived and attainable.Such as, when quantity of power is equal, maximum oar speed is about the same. But, when increasing this potentiometer resistance, the maximum oar speed of oar 14B is substantially reduced relative to oar 14A. Such as, the maximum oar speed of oar 14B can be reduced to oar 14A maximum oar speed less than 75%, Less than 50% or less than 25%.

This species diversity of maximum oar speed and then ink droplet directivity is had significant impact.Therefore, supplied by control The relative power amount of each actuator 15A and 15B should be arrived, the direction ejected in drops out from nozzles opening 13 can be controlled. In an experiment, ink droplet direction can with on printer page the most about 4 points of deflection away from.Therefore, can be embodied as from a nozzle The point of-4 ,-3 ,-2 ,-1,0 ,+1 ,+2 ,+3 and+4 is away from (and all intervenient non-integer point positions), wherein " 0 " is defined as being sprayed produced main point position by the ink droplet being perpendicular to ink jet face.As discussed in further detail below Stating, this result has important derivative impact for the design of page width ink jet printhead.

Certainly, for experiment purpose, use potentiometer 202 to make it possible to easily investigate the scope of power parameter.But, The timing of brake function is controlled also by the alternative or additional ways being supplied to the power of each actuator as control The ink droplet injection of deflection can be realized.Such as, actuator 15A can be before or after actuator 15B receives its actuating signal Receive it and activate signal, thus cause asymmetric oar to move and the ink droplet injection of deflection.

Additionally, the power being fed to each actuator can be controlled by changing the pulse width driving signal.It practice, This change is supplied to the method for the power of each actuator and is probably when using CMOS drive circuit system most viable, Especially in the case of hope changes " aloft (on-the-fly) " ink droplet direction.

There is the inkjet nozzle assembly of top, four removable chambeies oar

Nozzle assembly 200 and 210 direction made it possible to along ink droplet is sprayed by an axis shown in Figure 17 and Figure 18 is controlled System.Typically (and most useful), this axis will be the longitudinal axis of elongated page width printing head, and multiple nozzles are arranged along this axis Extend.But, can realize ink droplet directivity is entered one relative to the plural oar of nozzle opening arrangement by using Step controls.

Figure 20 shows that a part for the printhead including multiple inkjet nozzle assembly 220, each nozzle assembly 220 are wrapped Include four removable oar 14A, 14B, 14C and the 14D arranged relative to this fixed nozzle opening 13.From nozzle chambers Multiple damping columns 221 assist control ink droplet injection characteristics of stretching out of sidewall and the refilling of chamber, especially lose at one of actuator In the case of effect.

Four shown in Figure 20 oar arrange in, ink droplet injection can be moved by the coordination of these four oars and along one Bar or two axis (longitudinal axis and axis of pitch) deflections.Therefore, ink droplet can be ejected in the two-dimentional district of print media Any position on, this position typically has circle or the area elliptica launching nozzle at its barycenter.

Figure 21 shows the part of a nozzle row with multiple nozzle 220, the longitudinal axis that these nozzles are arranged along this nozzle Line is spaced apart from each other the distance of a nozzle pitch.The oval district 222 of print media shows such region: be positioned this Ink droplet can be launched to this region by transmitting nozzle (" 0 ") at the barycenter in oval district.As shown in figure 21, this Penetrate nozzle (" 0 ") can be transmitted on any some position in this two-dimensional elliptic shape district 222.

Transversely axis (being i.e. perpendicular to nozzle row's longitudinal axis) launches the ability of ink droplet it is meant that spray from nozzle assembly 220 Ink droplet need not the most synchronize generation of other nozzles in arranging with same nozzle.Typically, owning in a page width printing head Launching nozzle to launch within the period of a row time, this row time is that print media laterally advances through first row of printing Time of being spent of distance.But, a transmitting nozzle of the ability with the axis of pitch injection ink droplet along printhead is permissible It is configured to before or after this nozzle, launch ink droplet a print line and still make this ink droplet be directed at this same print line.Cause This, nozzle assembly 220 makes page width printing head be designed to have than nozzle assembly 200 and 210 greater flexibility.

Additionally, top, multiple chambeies oar add can be supplied to each nozzle always spray power.Therefore, the nozzle of four oars Design is more suitable for the injection of viscous fluid than the design of two oars or an oar.Similarly, the spray of two oars Mouth design is more more effective than the design of an oar.

Can also be by increasing the length of actuator crossbeam and/or offer has the serpentine shaped actuator crossbeam of multiple turnover and increases The power of each individual actuators.Serpentine shaped actuator crossbeam has been retouched in No. 7,611,225 United States Patent (USP) of the applicant Stating, the content of this patent is incorporated herein by reference.Therefore, the present invention also provides for being suitable for injection and has relatively high viscosity (example Such as, the viscosity higher than water) the high power inkjet nozzle of fluid.

There is the ink jet-print head of high dot density

In typical page width printing head, each transmitting nozzle (that is, selects to be used for by the print data that received by printhead Carry out the nozzle launched) launch once within a row time.Additionally, each nozzle ejects ink droplet, so make ink droplet Fall in the main point position being associated with this nozzle.When a nozzle is injected on its main point position being associated, ink droplet sprays Penetrate the ink jet face being typically normal to printhead.Therefore, in traditional page width printing head, the spray nozzle density of printhead with The dot density of printer page is corresponding.Such as, a page width nozzle row with nozzle pitch n has printing a little away from n's A line point, the wherein distance between nozzle pitch and some distance and neighbor point between the barycenter being respectively defined as adjacent nozzles.

But, inkjet nozzle assembly 200,210 and 220 makes printhead can be designed such that, print point is away from being less than The nozzle pitch of printhead, and therefore print point density has exceeded the spray nozzle density of printhead.

Figure 22 shows a part for page width printing head 230, and wherein print point is away from the nozzle pitch being less than printhead.Illustrate Three nozzles 231 in same nozzle row, these nozzles are spaced apart with nozzle pitch n.These nozzles each can be by (example As) nozzle assembly 210 (as shown in Figure 18) composition.The longitudinal axis represented by arrow 236 from the ink droplet edge of each nozzle Line is sprayable on multiple difference positions of 235 on print media.As shown in Figure 22, Figure 23, Figure 29 and Figure 30, It (that is, towards observer and relative to the longitudinal axis of printhead or printhead IC is horizontal that print media 235 is fed out paper To).

Referring now still to Figure 22, each nozzle 231 is configured within the period of a row time on two difference positions injection ink Material: a some position is to be sprayed produced main point position 232, another position 234 by the ink droplet being perpendicular to printhead plane Being produced by the ink of deflection is sprayed, the ink injection of this deflection makes ink be dropped in the centre of these main point positions.Cause This, the point of generation less than nozzle pitch n, so makes print point density exceed the spray nozzle density of printhead away from d.

In the example that figure 22 illustrates, nozzle pitch n is a little twice away from d, however, it should be noted that nozzle pitch n with The point any ratio away from d is all configurable for printhead so that n > d.Such as, if each nozzle is when a row In print in its main point position and two other positions (such as, on the either side of main point position), then will be real Now with the point of n=3d away from printing.

Attainable actual point is fed through the limiting of speed of printhead away from only being refilled speed by ink chamber relative to print media System.The modeling of the applicant shows, and when page 60 per minute, ink chamber can be recharged at least within a row time Twice, in order to permission prints with the twice of the dot density that typical fixed page width printing head is typically implemented.Certainly, subtract The speed (such as, to 30ppm) of slow print media feeding will allow higher dot density.

So, fixing page width printing head can realize the versatility similar with scan-type printhead.In scan-type printhead, It is well known that print point density can increase by printing with relatively low velocity, because scan-type printhead strides across often row and carries out Scanning and printing on many difference positions of having an opportunity according to scanning speed.Fixing page width printing head shown in Figure 22 230 have similar versatility, although and print speed more faster than traditional scan-type printhead, but still be capable of with The highest dot density (such as, 3200dpi) prints.

Dead nozzle compensates

The mechanism that the dead nozzle that the applicant is described previously in fixed page width printing head compensates.As used herein, " dead nozzle " represents nozzle or the injection in the case of drop speeds or ink droplet directivity control deficiency not spraying any ink The nozzle of ink.Generally " dead nozzle " by actuator fault cause (this fault be via detection circuitry be easiest to identify Nozzle failures reason), it is also possible to be by can not move on the non-removable tamper in nozzle opening or ink jet face The chip removed causes, and these blockings or fragment hide or part overlaid nozzle opening.

Typically, the dead nozzle in fixed page width printing head compensates needs to be discharged into row printing (as the by the nozzle of redundancy Described in 7,465, No. 017 and the 7th, 252, No. 353 United States Patent (USP), these patents is incorporated herein by reference).This tool That have disadvantageously, one or more nozzles that this printhead needs redundancy are arranged, thus inevitably increase printhead cost.

Alternately, the visual effect of dead nozzle can launch (preferably " excessive exercise ") by making a nozzle of neighbouring dead nozzle And it is compensated (as described in the 6th, 575, No. 549 United States Patent (USP), the content of this patent is incorporated herein by reference).Real On border, this relates to the amendment printing mask farthest to reduce the overall visual impact of dead nozzle.

Inkjet nozzle assembly 200,210 and 220 makes it possible in the case of need not redundam nozzle row or changing printing mask Carry out dead nozzle compensation.Figure 23 shows a part for a page width printing head 240, in wherein being arranged by same nozzle One dead nozzle 242 is compensated by the individual neighbouring nozzle 243 worked.

Showing three nozzles in same nozzle row, each free nozzle assembly 210 of these nozzles constitutes (as shown in figure 18). Central nozzle 242 is dead or otherwise breaks down, and the adjacent nozzles 243 on the either side of central nozzle 242 Normally work with 244.

From the ink droplet of each nozzle 243 and 244 worked along the sprayable (court on print media 235 of longitudinal axis 236 Observer feeds, multiple difference positions as shown in Figure 23).Nozzle 243 within the period of a row time by ink droplet It is injected on himself main point position 247 and the main point position 248 that is associated with dead nozzle 242.Therefore, nozzle 243 The dead nozzle 242 during same nozzle is arranged is compensated by printing two points within the period of a row time.Certainly, follow-up In the row time, nozzle 244 can substitute for nozzle 243 to compensate dead nozzle 242, so makes nozzle 243 divide together with 244 The load compensation workload to dead nozzle.Additionally, depend on that attainable deflection ink droplet sprays degree, this one or more compensation is sprayed Mouth need not be directly adjacent to dead nozzle.Such as, these one or more compensation nozzles may be positioned such that with dead nozzle at a distance of-4 ,-3, -2 ,-1 ,+1 ,+2 ,+3 or+4 nozzle pitches, so that many different spray nozzles can share the benefit to a dead nozzle Repay workload.

Figure 23 show need nozzle 243 within a row time himself main point position 247 and with dead nozzle 242 The sight of ink droplet is launched on the main point position 248 being associated.Certainly, print mask and mainly indicate the period a row time Which nozzle of interior needs is launched.Need dead nozzle to launch in the specific row time if printing mask, then one applicable The nozzle worked need not the feelings that carry out launching within the period of this specific row time on the main point position of himself Can preferentially compensate under condition.So, the selection compensating nozzle the most farthest reduces adjacent with dead nozzle The needs of multiple nozzles worked.It practice, in many examples and according to this printing mask, it is possible to avoid need one Individual compensation nozzle was launched twice within a row time.

Alternately, the printhead being made up of multiple nozzle assemblies 220 not necessarily can distribute to this dead nozzle Make compensation nozzle in the case of launching, realize dead nozzle mutually in colleague's time to compensate.Because nozzle assembly 220 can be transmitted into Have on any some position in two-dimentional district and (include the some position of the axis of pitch along printhead), so the compensation to dead nozzle can To be deferred to the later row time or to advance to the previous row time.This allows to realize more preferably in the selection compensating nozzle and timing Versatility.

Dead nozzle is typically by detecting what the resistance corresponding to one or more actuators of this dead nozzle identified.This side Method can advantageously carry out dynamic dead nozzle identification and compensation.But, for identifying that the additive method of dead nozzle (such as, makes By the optical technology of predetermined print patterns) be certainly possible to.

There is the page width printing head of connection

In addition to the monoblock type page width printing head suffering the impact of low-down wafer yield, the page width printing head of the applicant leads to It is docking together end-to-end constructs usually through multiple printhead IC are crossed over a page width.

Figure 24 shows the arrangement of five printhead IC 251A to 251E, and these printheads dock end-to-end and form one Photograph width printhead (photowidth printhead) 250, and Figure 25 shows single printhead IC 251.Will be appreciated by It is that longer page width printing head (such as, A4 printhead and wide format print head) can be by by right for more printhead IC 251 It is connected together and manufactures.In this way multiple printhead IC are docking together and this have the advantage that and farthest reduce printing Sector width, this so that eliminate the requirement alignd point-device between print media with printhead.But, and with reference to figure 26 and Figure 27, the printhead IC being docking together have the drawback that be difficult to cross over docking printhead IC between connection Region 257 prints.This is because nozzle 255 can not be fabricated onto until the outermost edge 258 of each printhead IC, because of For must edge maintain an inevitable amount " dead space " 259, for realize structural soundness and permission beat many Individual print head IC is docking together.Therefore, the actual nozzle pitch between the IC of docking is inevitably greater than printhead IC A nozzle pitch in nozzle row.

Therefore, page width printing head must be designed to cross over attachment areas seamlessly print a little.Referring again to Figure 24 to Figure 27, The applicant have been described for so far for by the printhead IC adjoined to construct the solution of the problem of page width printing head.Such as figure Best image in 27, shifted nozzle triangle 253 be effectively filled with from neighbouring docking printhead IC nozzle it Between gap.By adjusting the timing of the nozzle 255 launched in shifted triangle 253 (that is, by making these nozzles More late transmitting is arranged than the nozzle of its correspondence), this attachment areas 257 can be crossed over and seamlessly print a little.This shifted spray The function of mouth triangle 253 is at large described in the 7th, 390, No. 071 and the 7th, 290, No. 852 United States Patent (USP), these patents Content be incorporated herein by reference.

Figure 27 also show multiple adhesive pad 75 of a longitudinal edge location along printhead IC and multiple alignment primary standard substance 76.Adhesive pad 75 connects via lead-in wire bonding (not shown), with the CMOS drive circuit system in printhead IC Power and logical signal are provided.Alignment primary standard substance 76 allows to use the optical alignment instrument (not shown) being suitable for make docking Printhead IC is in alignment with each other during printhead configuration.

Although shifted nozzle triangle 253 provides the abundant solution party carrying out the problem printed for leap attachment areas Case, but still suffer from some problem.First, shifted nozzle triangle 253 must be supplied ink, and at longitudinal extension Rear side ink service duct in sharp-pointed kink the supply of the nozzle in ink to triangle 253 may be adversely affected. Second, shifted nozzle triangle 253 reduces wafer yield, because this shifted nozzle triangle adds each beating The width of print head IC 251；Effectively, each printhead IC must have the width being large enough to hold r+2 nozzle row, even if This printhead IC only has r nozzle row.

Nozzle assembly 200,210 and 220 described here sprays in multiple predetermined difference positions along longitudinal axis due to it The ability of ink droplet, it is provided that cross over each attachment areas for printhead IC being linked together simultaneously and maintain consistent point away from this The solution of individual problem.Additionally, and as shown in figure 28, having continual nozzle row (that is, does not has shown in Figure 27 Shifted nozzle triangle 253) printhead IC 260 can be docking together.The design of this printhead IC not only promotes The supply that ink is arranged along each nozzle, and improve wafer yield.Substantially, have two kinds to compensate for crossing over this The possible method of " absent " nozzle of attachment areas 257.

In first method, the multiple nozzles positioned towards the either end of printhead IC 260 are configured to the end that deflection is corresponding Ink droplet is sprayed in portion, and the nozzle simultaneously towards the centralized positioning of printhead IC 260 is perpendicular to ink jet face to spray ink droplet.Ginseng Examining Figure 29, it is shown that printhead IC 260, wherein the nozzle 264 towards right hand edge location is configured to be partial to right hand edge spray Penetrate ink droplet.Similarly, the nozzle 262 towards left hand edge location is configured to be partial to left hand edge to spray ink droplet.Towards beating The nozzle 266 of the centralized positioning of print head IC is configured to be perpendicular to ink jet face injection ink droplet.Although nozzle 262,264 and 266 have a different ink droplet injection characteristics, but certainly, are all Figure 18,19 or 20 shown types at them, have control In the sense that the nozzle of the capability in ink droplet direction, these nozzles are all identical.

The degree of deflection depends on the distance of specific nozzle and printhead IC 260 center.Be positioned that printhead IC extremely locates that A little nozzles are configured to spray ink droplet more on the bias than those nozzles towards printhead IC centralized positioning.This from printhead IC Outside gradually the opening in center of 260 make it possible to cross over the length of printhead IC maintain consistent point away from.

Although Figure 29 has been greatly exaggerated to show " the opening " of ink droplet injection, it is to be understood, however, that as this result opened, The equalization point of the ink droplet of injection is away from the nozzle pitch that can be slightly larger than printhead IC 260.But, in arranging at each nozzle, there is number Hundred or thousands of nozzle time, the dot density caused will be insignificant relative to the minimizing of spray nozzle density.Typically, although ink Drip injection to open, but equalization point goes out greatly less than 1% away from by the nozzle pitch than printhead.

Owing to the ink droplet of the deflection on printhead IC 260 edge sprays, the actual printable area of specific nozzle row is to be longer than this spray The length of mouth row.This printable area can be than 1 to 8 nozzle pitch of nozzle platoon leader.This printable area extended allows to beat Print head IC prints in the attachment areas 257 between adjacent printhead IC 260, thus eliminate shown in Figure 27 shifted Nozzle triangle 253.

Certainly, it is equally possible that the nozzle being only positioned printhead IC end has the ink droplet injection of deflection.But, The width of typical attachment areas 257 (that is, in the printhead IC of a pair docking, arrange from same nozzle in nozzle between Width) give timing, this arrangement of ink droplet that typically having shown in Figure 29 is opened injection is preferred.This maximum journey Add the degree that " absent " nozzle in attachment areas 257 can be compensated by adjacent multipair printhead IC degree.

The printhead IC 260 of the ink droplet injection that having shown in Figure 29 is opened has the advantage, that and there is not the compensation of dead nozzle Or when needing with higher point density prints, each nozzle was only launched once within a row time, made the length of printable area simultaneously Extend beyond the length of the nozzle row of correspondence.In an alternative method, printhead IC 270 may be configured so that often The selected nozzle at the extreme place of individual nozzle row was launched more than once within a row time, in order to compensate in this attachment areas " absent " nozzle.

With reference to Figure 30, it is shown that printhead IC 270, the most most of nozzles are perpendicular to the ink jet face of this printhead IC to be come Injection ink droplet.But, at least one nozzle 272 at the extreme place of a nozzle row is configured on main point position 274 Injection ink droplet (that is, being perpendicular to ink jet face) is also sprayed on the secondary point position 276 of the corresponding end of deflection printhead IC Penetrate ink droplet.In other words, nozzle 272 be configured in the way of similar with the nozzle 231 in high density printing head 230, Two ink droplets are sprayed within a row time.But, these nozzles 272 maintain consistent point away from d, so make nozzle save The point of whole printable area of printhead IC 270 is typically equal to crossed over away from d away from n.

Although printhead IC 270 have do not sacrifice relative to nozzle pitch a little away from advantage, but this printhead also have following lack Point: need nozzle 272 at the two ends that each nozzle is arranged with the twice of the frequency of other nozzles 271 to spray ink.Therefore, Nozzle 272 is more easy to wear-out failure, and therefore printhead IC 260 is done as solution printhead IC being docking together Method is the most preferred.

The MEMS/CMOS improved is integrated

One importance of MEMS print head design is the collection of MEMS actuator and lower floor's CMOS drive circuit system Become.In order to make the brake function of nozzle occur, from the electric current of a driving transistor in CMOS drive circuit system layer Must flow upwardly in MEMS layer, through this actuator and (such as, arrive back down to CMOS drive circuit system layer Ground plane in cmos layer).When having thousands of actuator in a printhead IC, the efficiency of current flow path should maximize Farthest to reduce overall print head loss of efficiency.

Up to now, the applicant has been described for having at MEMS actuator (being positioned in top, nozzle chambers chamber) and lower floor CMOS The nozzle assembly of a pair linear stake extended between drive circuit system layer.It practice, show that these are put down in fig. 5 and fig. The manufacture of the actuator stake of row, and be described at this.Contrary with more tortuous current channel, extend up to MEMS The linear copper stake of layer has shown and has improved printhead efficiency.But, still suffer from the MEMS printhead to the applicant (with beat Print head IC) the leeway that improves of electrical efficiency.

Claimed with the problem controlled from the thousands of brake functions of public CMOS power plane and ground plane are associated For " ground bounce ".Ground bounce is commonly known problem in IC design, this problem due to public power plane with A large amount of device is had to be powered and especially deteriorate between ground plane.Ground bounce generally describes and crosses over power plane or ground plane Undesirable voltage drop, this undesirable voltage drop can produce from the source that many is different.The Typical sources bag of ground bounce Include: series resistance (" IR pressure drop "), self-induction and the mutual inductance between ground plane and power plane.These phenomenons each may be used Ground bounce can be promoted by undesirably reducing the electric potential difference between power plane and ground plane.The electric potential difference reduced can not Cause integrated circuit electrical efficiency with avoiding reduces, and is the most more particularly the electrical efficiency causing printhead IC Reduce.It is to be understood, however, that the arrangement of power plane and ground plane and configuration and connection may fundamentally affect and connect Ground bounce-back and the aggregate efficiency of printhead.

With reference to Figure 31, show in plan view a part for printhead IC 300, this part has longitudinal extension and is parallel to spray Multiple strip conductors of mouth row.For the sake of clarity, Figure 31 has removed uppermost polymeric layer 19.

Multiple nozzles 210 (being described in detail in conjunction with Figure 18) are arranged at the longitudinal axis extension along printhead IC 300 Among multiple nozzles row.Figure 31 shows a pair nozzle row 302A and 302B, but printhead IC 300 can include more certainly Nozzle is arranged.Nozzle row 302A and 302B is paired and offsets with one another, and one of them nozzle row 302A is responsible for printing " even number " Point and another nozzle row 302B are responsible for printing " odd number " point.In these printheads of the applicant, nozzle row typically with This mode is paired, as the most visible in such as Figure 28.

First strip conductor 303 is positioned between nozzle row 302A and 302B.First strip conductor 303 is deposited on printhead On the nozzle plate 304 of IC 300, this nozzle plate defines that 7 (seeing Figure 10) are pushed up in nozzle chambers chamber.Therefore, the first strip conductor 303 with the thermoelasticity crossbeams 10 of these actuators 15 be generally coplanar and can during MEMS manufacture by with this Thermoelasticity crossbeam material (such as vananum) is co-deposited and is formed.The electric conductivity of strip conductor 303 can be by MEMS The deposition of another conductive metal layer (such as copper, titanium, aluminum etc.) during manufacture and improve further.Such as, it is to be understood, however, that Metal level can deposit (as co-deposited with the metal gasket 9 shown in Fig. 8) before the deposition of this thermoelasticity crossbeam material.Can To use the simple modification to the etching mask for metal gasket 9 to limit strip conductor 303.Therefore, strip conductor 303 can To include that multiple metal level is to optimize electric conductivity.

Each actuator 15 has first terminal, and this first terminal is connected directly to first via a lateral connector 305 Strip conductor 303.As will in Figure 31 visible, each actuator from two nozzles row 302A and 302B has even It is connected to the first terminal of the first strip conductor 303.First strip conductor 303 is connected to lower floor via multiple conductor stakes 307 A common reference plane in CMOS drive circuit system layer, the actuating that these conductor stakes 307 Fig. 6 above in conjunction describes Device stake 8 is similarly produced.Therefore, strip conductor 303 can extend continuously along printhead IC 300, in order to for this Each actuator in arranging nozzle provides common reference plane.As will be discussed in more detail below, depend on driving at CMOS Using nFET or pFET in dynamic Circuits System, the common reference plane that nozzle is arranged between 302A and 302B can be Power plane or ground plane.

Alternately, strip conductor 303 can extend discontinuously along printhead IC 300, wherein each part of strip conductor Common reference plane is provided for one group of actuator.At strip conductor when separating into problem, discontinuous strip conductor 303 may It is preferred, but strip conductor works the most in the same manner as described above.

Second terminal of each actuator 15 is via the actuating extended between actuator and CMOS drive circuit system layer Device stake 8 and connect this and drive on FET to the lower floor in CMOS drive circuit system layer.In each actuator stake 8 and Fig. 6 Actuator stake 8 all fours that illustrates also is formed during MEMS manufactures in the same manner.Therefore, each actuator 15 can To be individually controlled by corresponding driving FET.

In Figure 31, a pair second strip conductor 310A and 310B are also along printhead IC 300 longitudinal extension and be in this pair The both sides of nozzle row 302A and 302B.Second strip conductor 310A and 310B supplements this first strip conductor 303.Change sentence Talking about, if the first strip conductor 303 is a power plane, then these second strip conductors are ground plane.On the contrary, If the first strip conductor 303 is ground plane, then these second strip conductors are power plane.Second strip conductor 310A It is not directly connected on actuator 15 with 310B；But, they are connected to CMOS via multiple conductor stakes 307 and drive electricity Corresponding reference plane (power supply or ground) in the system layer of road.

It is to be understood, however, that these second strip conductors 310 can be according to the side being quite analogous to above-mentioned first strip conductor 303 Formula is formed during MEMS manufactures.Therefore, these second strip conductors 310 be generally made up of thermoelasticity crossbeam material and Can be multilamellar to strengthen electric conductivity.

First strip conductor 303 and the second strip conductor 310 act primarily as effect to be reduced in CMOS drive circuit system layer The series resistance of corresponding reference plane.Therefore, by providing the reference corresponding with this cmos layer in MEMS layer Multiple strip conductors of plane-parallel type electrical connection, by the simple application of Ohm's law, significantly reduce these reference plane All-in resistance.Generally, these strip conductors are configured for farthest reducing their resistance, such as by as much as possible Maximize its width or the degree of depth.

The series resistance of ground plane or power plane due to these strip conductors in MEMS layer can reduce at least 25%, At least 50%, at least 75% or at least 90%.Likewise it is possible to reduce ground plane or the self-induction of power plane similarly.Connect The series resistance of both ground level and power plane and this of self-induction are substantially reduced and contribute to farthest reducing printhead IC The ground bounce of 300, thus improve printhead efficiency.The present inventor understands, in the printhead IC 300 that figure 31 illustrates, Mutual inductance between power plane and ground plane is also reduced, but the quantitative analysis of mutual inductance needs complicated modeling, that is out this The scope disclosed.

Figure 32 and Figure 33 provides pFET and nFET and drives the simplification cmos circuit figure of transistor.As shown in figure 31, This driving transistor (nFET or pFET) is connected directly to the second terminal of each actuator 15 via actuator stake 8.

In Figure 32, actuator 15 is connected between the drain electrode of a pFET and ground plane (" Vss ").Power plane (" Vpos ") is connected to the source electrode of this pFET, and grid receives logical transmission signal.When pFET receives low electricity at grid (due to NAND gate) during pressure, electric current flows through this pFET and actuator 15 is activated.In this pFET electrical road, The first terminal of this actuator is connected to the ground plane provided by the first strip conductor 303, simultaneously the second terminal of this actuator It is connected to this pFET.Therefore, these second strip conductors provide power plane.

In fig. 33, actuator 15 is connected between power plane (" Vpos ") and the source electrode of a nFET.Ground plane (" Vss ") is connected to the drain electrode of this nFET, and grid receives logical transmission signal.When this nFET receives high electricity at grid (due to AND gate) during pressure, electric current flows through this nFET and actuator 15 is activated.In this nFET circuit, should The first terminal of actuator is connected to the power plane provided by the first strip conductor 303, and the second terminal of this actuator is even simultaneously It is connected to this nFET.Therefore, these second strip conductors provide ground plane.

It is to be understood, however, that according to Figure 32 and Figure 33, the first strip conductor 303 and the second strip conductor 310 and pFET or NFET is compatible.

Certainly, as described above, the advantage of strip conductor is used to be not limited to the nozzle 210 shown in Figure 31.There is any class Any printhead IC of the actuator of type can be benefited in principle from above-mentioned strip conductor.

Figure 34 shows printhead IC 400, and this printhead includes that multiple nozzle 100 (uses and combine the nozzle described in Figure 16 Similar type), the plurality of nozzle is arranged among a pair nozzle row 302A and 302B of longitudinal extension.First conductor rail Road 303 extends between this pair nozzle row 302A and 302B, and these second strip conductors 310A and 310B is positioned at this A pair nozzle row both sides.Each actuator 15 of corresponding nozzle 100 has: the first end terminal, it is via a lateral connection Device 305 is connected on the first strip conductor 303；And second end terminal, it is connected to lower floor FET via an actuator stake 8 On.Thus, it will be understood that, at strip conductor 303 and 310 owing to being connected in lower floor's CMOS drive circuit system In the sense that providing common reference plane in corresponding reference plane, printhead IC 400 acts as similarly with printhead IC 300 With.Additionally, the first strip conductor 303 is connected directly in a terminal of each actuator, in order to for nozzle row 302A and Each actuator in 302B provides common reference plane.

Those of ordinary skill in the art it will be appreciated that without departing substantially from the situation of broadly described the spirit or scope of the present invention Under, the present invention illustrated in a particular embodiment can be made many change and/or amendment.Therefore, these enforcements of the present invention That example is the most all considered as illustrative and nonrestrictive.

Claims (20)

1. an inkjet nozzle assembly, this inkjet nozzle assembly includes:

For accommodating a nozzle chambers of ink, this nozzle chambers includes at the bottom of a chamber and top, a chamber, and this chamber is pushed up to have and is defined in it In a nozzle opening；And

Multiple removable oars, it is at least some of that described removable oar defines that this chamber is pushed up, and the plurality of oar is can Activate to cause ink droplet to eject from this nozzle opening, each oar includes a hot bending musical form actuator, this hot bending Musical form actuator includes:

One top thermoelasticity crossbeam, this top thermoelasticity crossbeam is connected on drive circuit system；And

One passive crossbeam in bottom, the passive crossbeam in this bottom is molten on this thermoelasticity crossbeam, so makes when electric current leads to When crossing this thermoelasticity crossbeam, this thermoelasticity crossbeam relative to this passive beam expansion, thus cause a corresponding oar towards Bend at the bottom of the chamber of this nozzle chambers,

The most each hot bending musical form actuator is to be individually controllable by corresponding drive circuit system, so makes ink droplet The direction ejected from this nozzle opening is controllable by independently moving of each oar.

2. inkjet nozzle assembly as claimed in claim 1, wherein, this nozzle assembly is arranged on one substrate, and At the bottom of wherein a passivation layer of this substrate defines the chamber of this nozzle chambers.

3. inkjet nozzle assembly as claimed in claim 1, wherein, is that separate and multiple sides at the bottom of top, this chamber and this chamber Wall extends to limit this nozzle chambers between at the bottom of top, this chamber and this chamber.

4. inkjet nozzle assembly as claimed in claim 1, wherein, this inkjet nozzle assembly includes a pair relative oar, One of them oar is positioned on the side of this nozzle opening, and other in which oar is positioned in this nozzle opening On opposite side.

5. inkjet nozzle assembly as claimed in claim 1, wherein, this inkjet nozzle assembly includes the oar of two pairs of opposed, Described oar positions relative to this nozzle opening.

6. inkjet nozzle assembly as claimed in claim 1, wherein, described oar is to may move relative to this nozzle opening 's.

7. inkjet nozzle assembly as claimed in claim 1, wherein, each oar defines a joint of this nozzle opening Section, it is moveable relative at the bottom of this chamber for so making this nozzle opening and described oar.

8. inkjet nozzle assembly as claimed in claim 1, wherein, this thermoelasticity crossbeam is made up of a kind of aluminium alloy.

9. inkjet nozzle assembly as claimed in claim 1, wherein, this passive crossbeam is selected from the material of lower group by least one Constituting, this group is made up of the following: silicon oxide, silicon nitride and silicon oxynitride.

10. inkjet nozzle assembly as claimed in claim 1, wherein, this passive crossbeam include being made up of silicon oxide the The one passive crossbeam in top and the second passive crossbeam in bottom being made up of silicon nitride.

11. inkjet nozzle assemblies as claimed in claim 1, wherein, top, this chamber is coated with a kind of polymeric material.

12. inkjet nozzle assemblies as claimed in claim 1, wherein, described hot bending musical form actuator be by control with down to One item missing and be individually controllable:

Lead to the timing of multiple driving signals of each in described hot bending musical form actuator, in order to provide the plurality of oar Coordinate mobile；And

Lead to the power of multiple driving signals of each in described hot bending musical form actuator.

13. inkjet nozzle assemblies as claimed in claim 12, wherein, the power driving signal is by least one control following System:

The voltage of described driving signal；And

The pulse width of described driving signal.

14. 1 kinds of ink jet-print head integrated circuits, this ink jet-print head integrated circuit includes:

One substrate including drive circuit system；And

Arranging multiple inkjet nozzle assemblies over the substrate, each inkjet nozzle assembly includes:

For accommodating a nozzle chambers of ink, this nozzle chambers include at the bottom of the chamber limited by the upper surface of this substrate and Top, one chamber, this chamber defines a nozzle opening in top；And

Multiple removable oars, it is at least some of that described oar defines that this chamber is pushed up, and the plurality of oar is to cause Dynamic to cause ink droplet to eject from this nozzle opening, each oar includes a hot bending musical form actuator, this hot bending musical form Actuator includes:

The top thermoelasticity crossbeam being connected on this drive circuit system；And

One passive crossbeam in bottom, the passive crossbeam in this bottom is molten to this thermoelasticity crossbeam, so makes to work as electric current During by this thermoelasticity crossbeam, this thermoelasticity crossbeam is relative to this passive beam expansion, thus causes a corresponding oar court And bend at the bottom of the chamber of this nozzle chambers,

The most each hot bending musical form actuator is individually controllable by corresponding drive circuit system, so make ink droplet from The direction ejected in this nozzle opening is controllable by independently moving of each oar.

15. ink jet-print head integrated circuits as claimed in claim 14, wherein, the upper surface of this substrate is by a passivation Layer limits, and this passivation layer is disposed on a drive circuit system layer.

16. 1 kinds are used for the method controlling the direction that ink droplet ejects from inkjet nozzle assembly, and this inkjet nozzle assembly is such as power Profit requires the inkjet nozzle assembly according to any one of 1-13, and the method comprises the following steps:

Activate a first hot bending musical form actuator by the first corresponding drive circuit system, so make one corresponding the One oar bends towards at the bottom of a chamber of this nozzle chambers；

Activate a second hot bending musical form actuator by the second corresponding drive circuit system, so make one corresponding the Two oars bend towards at the bottom of a chamber of this nozzle chambers；And

Thus from this nozzle opening, eject ink droplet,

Wherein the actuating of this first hot bending musical form actuator and this second hot bending musical form actuator is by this first drive circuit system System and this second drive circuit system are independently controlled, in order to control the direction that ink droplet ejects from this nozzle opening.

17. methods as claimed in claim 16, wherein, this first hot bending musical form actuator and this second hot bending musical form activate Device by control following at least one and be controlled independently:

Lead to the timing of the multiple driving signals of each in the first hot bending musical form actuator and this second hot bending musical form actuator, with Just the coordination providing the plurality of oar is moved；And

Lead to the multiple driving signals of each in described first hot bending musical form actuator and described second hot bending musical form actuator Power, in order to cause the asymmetric movement of the plurality of oar.

18. methods as claimed in claim 17, wherein, activated this first hot bending before this second hot bending musical form actuator Musical form actuator to provide ink droplet injection in the first direction, or activated before this first hot bending musical form actuator this Two hot bending musical form actuators are to provide ink droplet injection in a second direction.

19. methods as claimed in claim 17, wherein, are supplied to the power of this first hot bending musical form actuator more than supply To the power of this second hot bending musical form actuator, or it is supplied to the power of this second hot bending musical form actuator more than being supplied to this first The power of hot bending musical form actuator.

20. methods as claimed in claim 16, wherein, the method for following at least one:

Compensate the dead nozzle in printhead；

Increase the print point density of printhead to exceed spray nozzle density；

The print zone of longitudinal extension printhead；And

The attachment areas of adjacent printhead ic prints.