CN104603640A - 辐射探测器元件 - Google Patents
辐射探测器元件 Download PDFInfo
- Publication number
- CN104603640A CN104603640A CN201480001837.6A CN201480001837A CN104603640A CN 104603640 A CN104603640 A CN 104603640A CN 201480001837 A CN201480001837 A CN 201480001837A CN 104603640 A CN104603640 A CN 104603640A
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- Prior art keywords
- soldered ball
- photodiode
- soldered
- radiation detector
- main shaft
- Prior art date
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Abstract
本发明总体上涉及一种辐射探测器元件,其中,光电二极管通过至少一个包括两个熔合的焊球的连接被横向地固定到探测器元件基板,其中,所述两个熔合的焊球中的第一个接触所述光电二极管,并且所述两个熔合的焊球中的第二个接触所述探测器元件基板。本发明还涉及一种横向地附接两个基板,具体为构造上述辐射探测器元件的方法。本发明还涉及包括至少一个辐射探测器元件的成像系统。
Description
技术领域
本发明总体上涉及辐射探测器元件和构造辐射探测器元件的方法。本发明还涉及包括至少一个辐射探测器元件的成像系统。此外,本发明涉及横向附接方法。
背景技术
用于探测诸如X射线或可见光的电磁辐射的探测器被使用在许多应用中,包括医学和安全成像、天体物理学以及照相机。美国专利7968853中公开了辐射探测器的一个范例。其中描述的所谓“双层探测器”包括面向X射线源的层叠的闪烁体的二维阵列。光电二极管的有源区域被光学地耦合到层叠的闪烁体。光电二极管和闪烁体关于基板被横向地取向,所述基板通常与专用集成电路(ASIC)和输出电子器件连接。
光电二极管由基板通过电导的连接来支撑。这要求与足够的机械强度相结合的高精确度。公知的连接包括被附接到光电二极管的金属钉(通常是一系列层叠的柱状凸起),所述光电二极管穿透到基板上的导电粘合剂的沉积层中。然而,已经证明,使用该构造方法来构造足够准确且可靠的连接是一种挑战,所述连接是在机械上坚固的和/或没有接触不良、打开和短路的,同时维持足够的柔性以承受机械应力、热应力以及旋转应力。
这些问题也常常与其他(微)电或(微)机械的应用一起遇到,其中,零件需要被可靠地固定在关于彼此的横向取向上。
发明内容
本发明提供了一种辐射探测器元件,所述辐射探测器元件包括:至少一个光电二极管,其具有沿着第一主轴延伸的第一主表面;和探测器元件基板,其具有沿着关于所述第一主轴被横向地取向的第二主轴延伸的第二主表面,其中,所述光电二极管通过至少一个连接与所述探测器元件基板电接触,其中,所述连接包括两个熔合的焊球,其中,所述两个熔合的焊球中的每个的第一个接触所述光电二极管,并且所述两个熔合的焊球中的每个的第二个接触所述探测器元件基板。这样的辐射探测器元件被结实地构造,其中,所述光电二极管利用电学上可靠且机械上结实而又足够柔性的连接横向地连接到所述探测器元件。
在本发明的辐射探测器元件的实施例中,光电二极管的第一主轴关于探测器元件基板的第二主轴基本上被垂直取向。根据本发明的辐射探测器元件的实施例,第一主表面位于第一平面中,并且第二主表面位于第二平面中,其中,第一平面和第二平面关于彼此被横向地对准。在本发明的辐射探测器元件的其他实施例中,包括被耦合到光电二极管的闪烁材料,其中,所述闪烁材料优选地包括两个层叠的闪烁层。本发明的辐射探测器元件的另一实施例包括被耦合到光电二极管的辐射屏蔽元件,优选地包括钨的屏蔽元件。在本发明的辐射探测器元件的另一实施例中,包括至少32个连接,优选地包括至少36个连接,并且包括至少16个光电二极管。这些实施例单独地或组合地类似于公知的辐射探测器元件,但是具有光电二极管与探测器元件基板之间的改进的连接。在本发明的辐射探测器元件的另一实施例中,第一焊球和/或第二焊球的成分包括铋,优选为铋-锡合金。具有该成分的焊球是特别适合的,这是因为该成分具有相对低的熔化温度,使得在制造或处理期间对熔化焊球暴露的操作温度或高温能够保持尽可能地低,从而使周围的材料和结构不退化,并且降低能源成本。此外,能够通过改变铋含量来获得所期望的机械强度。甚至更优选地,铋-锡合金将为铋-锡-铟合金,这是因为铟甚至更能降低熔化温度。
本发明还指向根据本发明的包括至少一个辐射探测器元件的医学成像设备。所述医学成像设备可以是计算机断层摄影设备。这样的医学成像设备具有更加可靠的探测器元件,这可以降低构造成本和将来可能的维修或更换成本或延长设备的寿命。
本发明还指向一种用于构造辐射探测器的方法,所述辐射探测器包括:至少一个光电二极管,其具有沿着第一主轴延伸的第一主表面;和探测器元件基板,其具有沿着第二主轴延伸的第二主表面;所述方法包括以下步骤:将第一焊球应用于所述光电二极管的所述第一主表面;将第二焊球应用于所述探测器元件基板的所述第二主表面;压扁所述第一焊球和/或所述第二焊球;定位所述光电二极管,使得所述第一主轴关于所述第二主轴以角度α被横向地取向,其中,所述第一焊球和所述第二焊球关于彼此被邻近地放置,使得所述第一焊球在加热后膨胀时将湿润所述第二焊球;将所述第一焊球和所述第二焊球加热到高于所述第一焊球和所述第二焊球的熔点的温度。该方法提供了一种被结实地构造的辐射探测器元件,其中,所述光电二极管利用电学上可靠且机械上坚固而又足够柔性的连接横向地连接到所述探测器元件。
用于构造辐射探测器的方法的实施例包括将闪烁层和/或屏蔽层应用于光电二极管以产生类似于公知的辐射探测器元件的光电二极管,但是具有光电二极管与探测器元件基板之间的改进的连接。在用于构造辐射探测器的方法的其他实施例中,角度α在80°与90°之间,优选地在85°与90°之间,更优选地在89°与90°之间,并且最优选地在89.5°与90°之间。通过偏置角度α,归因于加热的焊球的收缩被考虑,以达到根据本发明的辐射探测器元件的优选实施例的关于探测器元件基板几乎完全垂直对准的光电二极管。
本发明还指向一种将第一零件横向地附接到第二零件的方法,其中,所述第一零件具有沿着第一主轴延伸的第一主表面,并且所述第二零件具有沿着第二主轴延伸的第二主表面;所述方法包括以下步骤:将第一焊球应用于所述第一零件的所述第一主表面;将第二焊球应用于所述第二零件的所述第二主表面;压扁所述第一焊球和/或第二焊球;定位所述第一零件,使得所述第一主轴关于所述第二主轴以角度α被横向地取向,其中,所述第一焊球和所述第二焊球关于彼此被邻近地放置,使得所述第一焊球在加热后膨胀时将湿润所述第二焊球;将所述第一焊球和所述第二焊球加热到高于所述第一焊球和所述第二焊球的熔点的温度。利用该方法,利用电学上可靠且机械上坚固而又足够柔性的连接可以将两个零件关于彼此被横向地结实地附接。
在两种主要方法的实施例中,压扁第一焊球和/或第二焊球的步骤包括压制第一焊球和/或第二焊球,优选地以低于第一焊球和/或第二焊球或者要被压制的焊球的熔化温度的温度处进行加热压制。以环境温度与刚刚低于焊球的熔化温度之间的温度进行压制产生对周围的材料和结构较少的热负荷的压扁步骤。如果压制发生在升高的温度下(但低于焊球的(一个或多个)熔化温度),则压制能够以较低的机械强度来完成,这减少了归因于压制的可能的损坏风险。在两种主要方法的其他实施例中,第一焊球和第二焊球具有小于500微米,优选地近似为300微米的直径。可以很容易获得具有这样的直径的商业可获得的焊球。在两种主要方法的其他实施例中,加热步骤包括激光加热。这允许对焊球进行精确的、局部的以及很好定时的加热而使尽可能少的热量暴露于周围的材料和结构。在两种主要方法的其他实施例中,存在至少两个第一焊球和至少两个第二焊球,所述至少两个第一焊球和至少两个第二焊球在加热步骤中被同时加热。这允许快速地处理并且减少通过时间。
在两种主要方法的其他实施例中,焊球可以被压扁到原始焊球直径的大约三分之一。这允许在必要的压制条件与在加热后润湿属性之间的良好平衡。
本领域普通技术人员在阅读和理解以下的详细描述后仍将理解本发明的其他方面和实施例。在阅读优选实施例的以下详细描述后,多个额外的优点和益处对于本领域普通技术人员将变得明显。
附图说明
本发明通过以下附图来进行图示:
图1示出了医学成像设备,具体为计算机断层摄影设备(现有技术)的示意图。
图2示出了根据本发明的辐射探测器的示意性透视图。
图3示出了根据本发明的辐射探测器的示意性侧视图。
图4示出了根据本发明方法的包括由两个熔合的焊球横向地附接的两个零件的结构的示意性侧视图。
图5示出了根据本发明的横向地附接两个零件的方法的示意图。
本发明可以采取各种部件和部件的布置、以及各种处理操作和处理操作的安排的形式。附图仅用于图示优选实施例的目的而不应被解释为限制本发明。为了更好地进行可视化,可以省略某些特征或者尺寸可以不是按比例的。
具体实施方式
在下文中,作为非限制性范例,使用用于计算机断层摄影设备的基于闪烁体的探测器来对本发明的各个方面进行解释。本领域技术人员应当理解,本发明不限于该范例,而是可以被广泛地扩展以覆盖其他医学成像设备和非医学成像设备以及其他辐射探测器,包括直接转换探测器和光学辐射探测器。甚至更一般地,所描述的构造方法可以是与针对其他(微)电和(微)机械设备相关的,在所述其他(微)电和(微)机械设备中,具有诸如用于微处理器的单边引出线存储器的两个零件的可靠的横向地附接的需要。
图1示出了医学成像设备,更具体为计算机断层摄影设备1的示意图。X射线辐射探测器2和X射线源被安装在可转动的机架3上。诸如患者的要被扫描的对象被定位在可移动的工作台5上,所述工作台5在扫描期间移动穿过检查区域6,同时机架3围绕检查区转动并且X射线源3发射X射线辐射。穿过对象的X射线辐射由X射线探测器2来探测,在所述X射线探测器2中,探测到的X射线辐射被转换为电子信息,所述电子信息在其他处理装置(未示出)中被进一步处理为显示给诸如医生的用户的视觉信息。
探测器2可以使用诸如闪烁的各种不同的原理来将X射线辐射转换成电子信息,其中,X射线辐射被转换成在另一波长处的辐射。所述辐射然后被馈入光学耦合的光电二极管,所述光学耦合的光电二极管重新发射作为电子的辐射(光电效应)。备选的转化方法是直接转换,在所述直接转换中,X射线在直接转换材料(例如,碲锌镉或碲化镉)中被直接转换成电子。在一些配置中,闪烁体、光电二极管和/或直接转换层针对各种原因(例如,改进的辐射俘获、像素尺寸减小等)关于基板被横向地(通常是基本上垂直地)取向。电子信息被电传输到基板,电子信息被从所述基板上进一步传输到其他处理装置。因此,垂直的零件需要在离散的位置处与基板进行可靠的电接触。同时,在垂直的零件与基板之间的机械连接需要是结实的。这是意义重大的,这是因为垂直的零件通常不直接接触基板(以避免电短路),而是仅通过一系列连接被连接。这些连接需要是导电且机械上坚固而又足够柔性的,以保持垂直的零件的重量和抗电势转动。
光电探测器2的范例被示出在图2和图3中。这两个附图分别以示意性的透视图和侧视图的形式描绘了所谓的双层探测器元件的有源部分。光电探测器通常包括若干这样的探测器元件。如作为非限制性范例能够看到的,这样的光电探测器包括基板21。所述基板可以被耦合到其他处理装置(例如,ASIC)并且被耦合到安装器件,以将探测器元件安装在诸如机架4的另一结构上,以及被耦合到其他电布线和连接。光电探测器还包括光转换元件(在该范例中为闪烁体23)和屏蔽元件24。使用闪烁体堆栈23来探测X射线辐射,所述闪烁体堆23包括两个垂直地层叠的闪烁体231、232,每个对具有不同波长的X射线辐射敏感。闪烁体堆23被光学地耦合到光电二极管22。屏蔽元件24(通常是钨屏蔽元件)可以被附接到光电二极管22,以屏蔽光电二极管22本身不受到直接的X射线辐照(以避免在光电二极管之内的X射线的直接转换)。屏蔽元件24通常被附接到与面向闪烁体23的一侧相对的光电二极管的一侧。屏蔽元件通常延伸超出并越过光电二极管22的顶部,以最佳地屏蔽光电二极管22不受到直接的辐照。光电二极管22通过n行连接25被耦合到探测器元件基板21,其中,每个连接可以是导电的;n可以是从1到至少32的范围,这是因为这提供了足够的连接和连接强度。最优选的,n为36以允许其他电接触或非电接触。所述连接优选地基本上被均匀地间隔在光电二极管22的主表面上。术语“均匀地间隔”和“基本上均匀地间隔”应当在本发明的上下文中被理解为在两个对象之间具有相同的距离,变化最多为10%,优选地变化最多为5%,更优选地变化最多为2%,最优选地没有变化,其中,变化可以是在任一方向上(更短或更长的距离)。光电探测器22的主表面421的主轴422的取向关于探测器元件21的主表面412的主轴411是横向的,优选地基本上是垂直的。所述取向优选地为正好90度,但可以具有到任一侧的1度的最大变化,以仍然获得良好工作的光电探测器。
探测器元件2一般包括至少一个光电二极管,但通常包括在探测器元件基板21上的p行平行的闪烁体、光电二极管以及屏蔽元件,其中,p的范围为从2到至少16;p优选地为16,但也可以是更高或更低的。
如在图3中能够最清晰地看到的,在该范例中,基板21和光电二极管22仅通过连接25进行连接而不与彼此直接物理接触。因此,机械负担完全在连接25上,这需要具有足够的强度,但是仍需要保持细长并且允许一些弹性。
在该具体的实施例中,光电二极管22每个为6mm高、18mm宽并且100微米厚,p为16,n为36,并且连接25都是根据本发明的电导连接,所述电导连接被以具有小于1%的变化的500微米的间隔均匀间隔开。这产生特别良好测试的实施例,但是本发明当然允许朝更小(或更大)的焊球的尺寸和/或间隔缩放。在该实施例中,光电二极管22关于基板21以89.5与90.5度之间的角度被垂直地取向。
图4描绘了连接25的一个特写。单个的连接25包括从第一焊球451和第二焊球452熔合的熔合的焊球45。在本发明的上下文中,术语“第一焊球”和“第二焊球”可以意指非熔合的单独的第一焊球和第二焊球,以及通常对应于原始的各自的第一焊球和第二焊球的熔合的焊球的部分。在本发明的上下文中,其也可以用于被压扁(“压印”(coin))的第一焊球或第二焊球。每个熔合的焊球45利用熔合的焊球45的第一焊球451接触零件42(其在该具体范例中是光电二极管22)的主表面421,并且利用熔合的焊球45的第二焊球452接触基板41(其在该范例中对应于探测器元件基板21)的主表面411。术语焊球在本领域中是公知的术语,对于所述术语焊球,本领域技术人员应当理解,初始的焊球具有基本上球形形状,但是每个焊球可以具有稍微不完美的球形形状,例如,稍微被压扁的或椭圆形形状。而且,在本发明的上下文中,术语“焊球”具体地包括合适的、可热熔化或可熔合的球,其一般不与焊接处理相关联(例如,诸如有机(例如,聚合)球或无机(例如,陶瓷)球的非金属球)。
原则上,连接25可以由任何材料组成,例如,通常使用的锡-银-铜(SAC)合金。然而,归因于在在微电子中,特别是在辐射探测器中的若干种材料对高温的有限阻抗,优选地连接45具有一种具有相对低的熔化温度的成分。特别合适的焊球成分包含铋,例如,铋铟(BiIn)、铋-锡(BiSn)或铋-锡-铟(BiSnIn),其中,铋的量通常决定机械强度(更多铋通常意味着更高的机械强度)。优选地,使用共晶成分。共晶铋锡(BiSn)是最为优选的,这是因为其具有相对低的熔点(140摄氏度),同时仍然维持高的强度。BiSn中铟的添加允许使用甚至更低的熔化焊料。不要求第一焊球451的成分与第二焊球452的成分相同或相似。在本发明的实施例中,要被压印的焊球的成分具有比其他焊球(例如,具有BiSn成分的其他焊球)的熔化温度更低的熔化温度(例如,BiSnIn)。这允许对压印、熔化和/或熔合条件以及在压印、熔化和/或熔合后的属性的更多的控制。
被熔合为熔合的焊球45的焊球451和452可以具有适合于具体连接的任何尺寸。然而,如果焊球太大,高温或长的加热时期对于适当地将它们熔合在一起可以是必要的,这可以会使其他材料中的一些退化。因此,优选地使用具有最多为500微米的直径d1、d2的焊球。最优选的是焊球具有300微米的直径d1、d2。这对于在商业上可广泛获得的焊球是常见的直径。第一焊球451的直径d1与第二焊球452的直径d2相同是优选的但不是要求的。
焊球451和452关于彼此越接近,熔合后的机械强度和电通路越坚固。然而,可以需要更多的能量来将焊球熔合在一起。根据本发明的用于辐射探测器元件2的平衡机械强度、电传导性以及处理属性的特别合适的配置是当焊球451、452具有300微米的直径d1、d2时,在垂直的零件42与基板41之间的间隙c为140微米,在第一焊球451的中间与基板41之间的距离a为280微米,并且在第二焊球452的中间与垂直的零件42之间的距离b为300微米。对于距离a、b、c中的每个可以在每个方向上具有10%的变化,以最佳地从该配置中受益。
图5描绘了使用构造作为非限制性范例的辐射探测器元件的根据本发明的将第一零件横向地附接到第二零件的方法的示意性表示。
在步骤501中,第一焊球451被应用于第一零件42的主表面421,在该范例中,所述第一零件42可以是光电二极管。在该范例36中,具有300微米的直径的第一焊球451被应用为具有沿着行的500微米的间距,所述行沿着距第一零件42的一侧近似150微米的第一零件42的侧。第一焊球451可以使用各种应用技术(例如,印刷技术(例如,喷墨等技术)、模板印刷技术、冲压技术或对于本领域技术人员常见的任何其他技术)来应用。在该范例中,焊球451被模板印刷到第一零件42的第一主表面421上。
在可以在先前的步骤之前、与之同时或之后执行的步骤511中,一行第二焊球452被应用于第二零件41的主表面411。如先前的步骤所提到的,可以使用相同或相似的应用技术。该行中的第二焊球452之间的间隔应当与第一零件一侧附近的行中的第一焊球451之间的间隔实际上可能相同。优选地,具有小于1%的变化。最优选地,所述间隔刚好相同。这确保了第一焊球451与第二焊球452之间的良好的空间取向。这允许适当的对准,这将产生最佳的连接强度和电导性。在该范例36中,具有300微米直径的间隔500微米的第二焊球被应用于第二零件,在该范例中,所述第二零件为探测器元件基板21。第二焊球在这种情况下使用喷射(例如,落球(balldrop))技术来应用,这是因为在基板21的主表面411上没有焊料停留。
在步骤502中,第一焊球451或第二焊球452中的至少一个被压扁为盘状形状。这是在本领域所公知的压印。焊球被压扁以确保在加热步骤505中第一焊球451将最佳地熔合到第二焊球452。当被压扁的焊球被熔化时,其将(归因于其表面能)具有通过恢复回球形形状而减少其自由表面的趋势。当因此膨胀的被压扁的熔化的焊球遇到另一焊球时,它们将更加有效地进行湿润并且生成与第一焊球和第二焊球二者将一直具有球形形状的情况下相比更大的接触面,这是因为在这种情况下将没有在前面的聚结的显著驱动。优选地,压印第一焊球451(也参见图3,其中,被压扁的第一焊球451’被描绘出),这是因为在加热期间它们将通常处于非水平配置中,并且然后,如果它是相反方向的,则归因于重力,被压印的焊球将因此更加有效地向第二熔化的焊球452膨胀。对于被压扁的第一和焊球第二焊球,这是可能的,但不是要求的。本领域技术人员公知的任何压扁技术可以用于压印焊球,但是优选的方法是以低于要被压印的焊球的熔化温度的温度利用热压来压制焊球。这促进了有限压制力下的压制,同时焊球仍然相对坚固并且在零件上是不可移动的,并且产生良好定义且稳定的压印。焊球优选地被压扁到近似其原始直径的三分之一(具有10%的变化)。这产生在压扁力与润湿属性之间的良好平衡。在本范例中,使用刚刚低于第一焊球451’的熔点的压制温度来压扁第一焊球451,以获得在90与100微米之间的厚度的压印。在该范例中,不压印第二焊球452。
在步骤503中,额外的材料或层43可以应用于第一零件。在该范例中,可以是包括对着第二闪烁体材料232的层叠的第一闪烁体材料231的闪烁体层的光转换层,具体为闪烁体层23被应用于光电探测器22的一侧,并且钨屏蔽层24被附接到光电探测器22的相对侧。这两个层使用粘合剂,具体为光学粘合剂来附接。本领域技术人员应当理解,对于其他应用,没有额外的层或材料或者不同类型的额外的层或材料可以被附接到第一零件42或第二零件41。
在步骤504中,第一零件42的主轴422和第二零件41的主轴412被定位,使得它们是以角度α横向的。角度α取决于所要求的(在加热后的)最终位置。归因于由于焊球熔合的收缩,以比所要求的最终位置稍微较小的角度定位第一零件和第二零件是必要的。第一零件42和第二零件41应当被进一步定位,使得在第一零件42上的第一焊球的行中的第一焊焊球451中的每个至少靠近第二零件42上的第二焊球452的行中的第二焊球451中的一个。第一焊球和第二焊球轻触是允许的,但不是必要的。应当通过确保被压扁的焊球在加热后膨胀时足以湿润其他焊球来确定距离。因此,距离应当优选地小于焊球中的一个的半径。在本范例中,角度α为89.5度,其产生在熔合后光电二极管22关于基板21几乎正好地垂直取向。在被压扁的第一焊球451’与第二焊球之间的距离小于两个焊球的原始(预压扁的)半径。
在步骤505中,两个焊球在其熔化温度以上被加热以允许它们熔合。温度应当在足够高以确保快速熔化过程和短曝光时间与足够低以避免对其他部件的热损伤之间进行平衡。加热可以以各种方式来完成,例如,在被加热大气中的(短)停留、将焊球与被加热的元件接触,或优选地,使用激光加热。利用激光加热能够准确地并且在短的、良好定义的时间段之内加热焊球,这产生仍然允许一些弹性的细长的连接。曝光时间可以通过使用快门系统以交替地阻挡所发射的激光束和让其通过来进行控制。也可以使用脉冲激光系统。例如通过使用透镜系统可以加宽激光束,以允许整行第一焊球和第二焊球的一致的照明。这排除了准确射束定位系统或多个激光束的使用。可以使用任何激光系统,只要焊球吸收足够的激光能量来将焊球的温度提高到高于它们的(一个或多个)熔化温度。优选地,第一零件和第二零件在加热期间被保持在他们所取向的位置中(例如,通过使它们保持在用于定位的器件中)。在加热焊球之后,允许将所述焊球冷却并硬化到它们的最终位置中。
如在步骤506中所图示的,可以重复该过程来将更多个第一零件42横向地应用于第二零件41,以便制作根据本发明的辐射探测器。通常将16个光电二极管22应用于探测器元件基板21。按顺序重复先前的步骤中的每个不是必要的。例如,将p行第二焊球452(p>1,优选地p=16)应用在第二基板41上并且执行用于在定位和加热之前的p个第一零件42的步骤501至503是有益的。
尽管在附图和前面的描述中已经对本发明进行了详细的图示和描述,但是这样的图示和描述应当被认为是图示性的或范例性的,而非限制性的;本发明不限于所公开的实施例。
通过包括至少步骤501、511、502、504以及505的方法可获得的任何结构被认为落在本发明的范围之内。而且,用于垂直地附接能够执行根据本发明的方法的两个零件的设备(因此至少包括用于沉积第一焊球和第二焊球的器件,用于横向地定位两个零件的定位器件以及加热器件)落入本发明范围之内。辐射探测器还可以是直接转换辐射探测器,其中,闪烁体材料被诸如CZT或CdTE的直接转换材料替代,并且代替光电二极管,使用交替垂直结构(例如,被附接到直接转换材料的支撑条带或计算机芯片)。
本领域技术人员通过研究附图、公开内容以及权利要求,在实践请求保护的发明时能够理解和实现对所公开的实施例的其他变型。在权利要求书中,“包括”一词不排除其他元件或步骤,并且词语“一”或“一个”不排除多个。单个处理器或其他单元可以实现在权利要求中记载的若干项的功能。尽管在互不相同的从属权利要求中记载的特定措施,但是这并不指示不能有效地使用这些措施的组合。
Claims (15)
1.一种辐射探测器元件(2),包括:至少一个光电二极管(22),其具有沿着第一主轴(222)延伸的第一主表面(221);和探测器元件基板(21),其具有沿着关于所述第一主轴横向地取向的第二主轴(212)延伸的第二主表面(211),其中,所述光电二极管通过至少一个连接(24、45)与所述探测器元件基板电接触,其中,所述连接包括两个熔合的焊球(251、451、252、452),其中,所述两个熔合的焊球中的第一个(251、451)接触所述光电二极管,并且所述两个熔合的焊球中的第二个(251、452)接触所述探测器元件基板。
2.根据权利要求1所述的辐射探测器元件,其中,所述光电二极管(22)的所述第一主轴(222)关于所述探测器元件基板(21)的所述第二主轴(212)被基本上垂直地取向。
3.根据权利要求1所述的方法,其中,所述第一焊球(451)和/或所述第二焊球(452)的成分包含铋,优选为铋-锡合金或铋-锡-铟合金。
4.根据权利要求1所述的辐射探测器元件,还包括被耦合到所述光电二极管的闪烁材料(23),其中,所述闪烁材料优选地包括两个层叠的闪烁层(231、232)。
5.根据权利要求1所述的辐射探测器元件,还包括被耦合到所述光电二极管的辐射屏蔽元件(24),优选为包括钨的屏蔽元件。
6.根据权利要求1所述的辐射探测器元件,包括至少32个连接,优选地包括至少36个连接;并且,包括至少16个光电二极管。
7.根据前述权利要求中的任一项所述的辐射探测器元件,其中,所述第一主表面位于第一平面中,并且所述第二主表面位于第二平面中,所述第一平面和所述第二平面关于彼此横向地对准。
8.一种诸如计算机断层摄影设备的医学成像设备(1),包括至少一个根据前述权利要求中的任一项所述的辐射探测器元件(2)。
9.一种用于构造辐射探测器的方法,所述辐射探测器包括:至少一个光电二极管,其具有沿着第一主轴延伸的第一主表面;和探测器元件基板,其具有沿着第二主轴延伸的第二主表面;所述方法包括以下步骤:
-将第一焊球应用(501)于所述光电二极管的所述第一主表面;
-将第二焊球应用(511)于所述探测器元件基板的所述第二主表面;
-压扁(502)所述第一焊球和/或所述第二焊球;
-定位(504)所述光电二极管,使得所述第一主轴关于所述第二主轴以角度α被横向地取向,其中,所述第一焊球和所述第二焊球关于彼此被邻近地放置,使得所述第一焊球在加热后膨胀时将湿润所述第二焊球;
-将所述第一焊球和所述第二焊球加热(505)到高于所述第一焊球和所述第二焊球的熔点的温度。
10.根据权利要求9所述的方法,还包括将闪烁层(43)和/或屏蔽层(44)应用于所述光电二极管(42)。
11.根据权利要求9所述的方法,其中,α在80°与90°之间,优选地在85°与90°之间,更优选地在89°与90°之间,并且最优选地在89.5°与90°之间。
12.根据权利要求9所述的方法,其中,压扁(502)所述第一焊球和/或所述第二焊球的所述步骤包括压制所述第一焊球和/或所述第二焊球,优选地以低于所述第一焊球和/或所述第二焊球或者要被压制的焊球的熔化温度的温度进行加热压制。
13.根据权利要求9所述的方法,其中,所述第一焊球和所述第二焊球具有小于500微米,优选地近似为300微米的直径。
14.根据权利要求9所述的方法,其中,加热(505)的所述步骤包括激光加热。
15.根据权利要求9所述的方法,其中,存在至少两个第一焊球和至少两个第二焊球,所述至少两个第一焊球和至少两个第二焊球在加热的所述步骤中被同时加热。
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Also Published As
Publication number | Publication date |
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BR112015008750A2 (pt) | 2017-07-04 |
JP2015537194A (ja) | 2015-12-24 |
US9748300B2 (en) | 2017-08-29 |
CN104603640B (zh) | 2018-03-30 |
WO2015032865A1 (en) | 2015-03-12 |
EP3042395B1 (en) | 2017-03-08 |
EP3042395A1 (en) | 2016-07-13 |
JP5966091B2 (ja) | 2016-08-10 |
RU2015104180A (ru) | 2017-10-10 |
US20160276387A1 (en) | 2016-09-22 |
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