CN103695841A - Assembling method of mask assembly - Google Patents
Assembling method of mask assembly Download PDFInfo
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- CN103695841A CN103695841A CN201310613959.8A CN201310613959A CN103695841A CN 103695841 A CN103695841 A CN 103695841A CN 201310613959 A CN201310613959 A CN 201310613959A CN 103695841 A CN103695841 A CN 103695841A
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Abstract
The invention discloses an assembling method of a mask assembly. The method includes the steps of installation of shielding strips and installation of mask units. The shielding strips shield the gaps between adjacent mask units, and the strips mask do not shield the mask patterns on the mask units. According to the assembling method of mask assembly provided by the invention, in the step of installation of mask units, the fixed edges of the mask frame are first applied with predetermined external force, part of the external force is withdrawn every time a mask unit is installed, and the external force is completely withdrawn when all the mask units are installed, such that the mask frame maintains a basically same shape before the installation of the first mask unit and after installation of all the masks. The shielding strips also have supporting effect on the mask units to prevent sagging of the mask units due to own gravity, so as to improve the accuracy of the mask assembly and further improve the precision and quality of the product.
Description
Technical field
The present invention relates to OLED and manufacture field, relate in particular to a kind of assemble method of mask assembly.
Background technology
Due to organic electroluminescent LED (Organic Light-Emitting Diode, OLED) possesses luminous simultaneously, do not need that backlight, contrast gradient are high, thin thickness, visual angle is wide, speed of response is fast, can be used for flexibility panel, use temperature scope is wide, the characteristic of structure and the excellence such as processing procedure is simpler, is considered to the emerging utilisation technology of follow-on flat-panel screens.
While making the organic layer of OLED indicating meter, need to use the mask assembly that evaporation is used, as shown in Figure 1, for mask assembly integral planar structural representation, mask assembly comprises mask frame 11, mask plate 10, mask plate 10 is provided with by evaporation hole and arranges the mask pattern region 101 forming, 12 for being fixed on mask plate the solder joint forming on mask frame by laser welding, conventionally after mask plate being applied to certain tension force, by laser welding, be fixed on mask frame 11, and the tension force that mask plate 10 has is converted to the pulling force to mask frame 11, mask frame produces distortion under the pulling force effect of mask plate, and mask plate in evaporate process because self gravitation effect produces sagging, thereby have influence on the positional precision in evaporation hole, mask pattern region, positional precision is not high causes the of low quality of OLED indicating meter.Given this, need in the industry a kind of scheme that can head it off badly.
Summary of the invention
In view of this, the invention provides a kind of assemble method of mask assembly, improve the positional precision in the evaporation hole of mask assembly, thereby improve the quality of OLED indicating meter.
The assemble method that the invention provides a kind of mask assembly, comprising:
Bar step is covered in S1, installation: by one or more one group of opposite side that bar is installed on mask frame, fixed edges of described one group of opposite side formation mask frame of covering;
S2, installation mask unit step: the fixed edge that one or more mask unit is installed on to mask frame;
It is characterized in that, described in cover bar and block the gap between adjacent described mask unit, and described in cover bar and can the mask pattern region in described mask unit not produced and be blocked.
In addition, according to the assemble method of a kind of mask assembly disclosed by the invention, also there is following additional technical feature:
Further, before described S2 installs mask unit step, S1 also comprises installation support bar step after installing and covering bar step, another group opposite side that the two ends of one or more described support bars is individually fixed in to described mask frame, described another group opposite side forms the support edge of described mask frame.
Further, before bar step is covered in described S1 installation, also comprise support bar step is installed, the two ends of one or more described support bars are individually fixed in to another group opposite side of described mask frame, described another group opposite side forms the support edge of described mask frame.
Further, the two ends of described support bar by laser welding mode or by glue bonding way be fixed on mask frame two described in support edge, described in cover bar two ends by laser welding mode or by glue bonding way, be fixed on fixed edge described in mask frame two.
Further, described S2 installation mask unit step comprises:
S21, external force apply step: the described fixed edge to described mask frame applies predetermined external force;
S22, tension force apply step: use a pair of tension device to clamp respectively the clamping part at mask unit two ends, described tension device applies tension force at the length direction of described mask unit to described mask unit, makes described mask unit have certain tension force;
S23, contraposition installation steps: the described mask unit with some tension, by contraposition step and the contraposition of described mask frame, is individually fixed in to described fixed edge by the two ends of described mask unit after described mask unit and described mask frame accurate contraposition;
S24, external force are cancelled step: complete described contraposition installation steps, institute's externally applied forces is cancelled a part;
By one or many, carrying out described tension force applies step, described contraposition installation steps and described external force and cancels step, one or more described mask unit are installed on to a described mask frame, after installing all described mask unit, described external force is all cancelled, and obtains mask assembly.
Further, when described mask assembly only includes a mask unit, external force described in described step S24 is cancelled a part for described predetermined external force is all cancelled.
Further, described mask unit is installed on described mask frame from the central position of described fixed edge successively to end positions.
Further, in described contraposition installation steps, the two ends of described mask unit by laser welding mode be individually fixed in described mask frame two described in fixed edge.
Further, described S2 installs in mask unit step and also comprises the step of removing described clamping part, the step of the described clamping part of described removal after completing all described contraposition installation steps, carry out or complete each described contraposition installation steps after carry out.
Further, described mask unit is provided with one or more mask patterns region, and described mask pattern region is a large evaporation hole or is arranged and formed by a plurality of little evaporation holes.
Beneficial effect of the present invention is, before mask unit is installed on to mask frame, mask frame is applied to predetermined external force, after installing all mask unit, external force is all cancelled, the tension force that mask unit has is converted into the pulling force to mask frame two fixed edges, all mask unit are basic identical to the action effect of mask frame (action effect to mask shaped as frame shape) with the predetermined external force that first mask unit of installation applies before to the action effect of mask frame to the pulling force of mask frame, the shape that is mask frame remains unchanged substantially, cover bar and support bar and mask unit is played to the effect of support, reduce the sagging of in evaporate process mask unit, thereby improve the precision of mask assembly.
The aspect that the present invention is additional and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage will become from the following description of the accompanying drawings of embodiments and obviously and easily understand, wherein:
Figure 1 shows that the two dimensional structure schematic diagram of prior art mask assembly;
Figure 2 shows that and will cover bar and be installed on the two dimensional structure schematic diagram of mask frame;
Figure 3 shows that mask frame is provided with the two dimensional structure schematic diagram that covers bar and support bar;
Figure 4 shows that the two dimensional structure schematic diagram that support bar is installed on to mask frame;
Figure 5 shows that mask frame is provided with support bar and the two dimensional structure schematic diagram that covers bar;
Figure 6 shows that in Fig. 5 the cross section enlarged diagram along A-A direction;
Figure 7 shows that in Fig. 5 the cross section enlarged diagram along B-B direction;
Figure 8 shows that the two dimensional structure schematic diagram that mask frame is applied to predetermined external force;
Figure 9 shows that the floor map that the mask unit of first installation is applied to tension force;
Figure 10 shows that the two dimensional structure schematic diagram that the mask unit of first installation is installed on to mask frame;
Figure 11 shows that mask assembly assembling schematic diagram of the present invention;
Figure 12 shows that the two dimensional structure schematic diagram of a kind of mask assembly of the present invention;
Figure 13 shows that 120 part structure for amplifying schematic diagram in Figure 12;
Figure 14 shows that 120 part structure for amplifying schematic diagram in Figure 12;
Figure 15 shows that all mask unit are installed on to the two dimensional structure schematic diagram that mask frame is not removed clamping part;
Figure 16 shows that the two dimensional structure schematic diagram of a kind of mask assembly of the present invention;
Figure 17 shows that the two dimensional structure schematic diagram of a kind of mask assembly evaporation face of the present invention;
Figure 18 shows that the two dimensional structure schematic diagram of a kind of mask assembly ito surface of the present invention;
Figure 19 shows that the two dimensional structure schematic diagram of a kind of mask assembly evaporation face of the present invention.
Wherein, in Fig. 1,10 is mask plate, and 101 is mask pattern region, and 11 is mask frame, and 12 is solder joint;
In Fig. 2,20 for covering frame, and 201 is the fixed edge of mask frame, and 202 is the support edge of mask frame, and 21 for covering bar;
In Fig. 3,30 is support bar;
In Fig. 4,40 for covering bar fixed area;
In Fig. 5, A-A, B-B are for treating Anatomical observation direction;
In Fig. 6, t1 is the degree of depth of covering bar fixed area;
In Fig. 7, t2 is the degree of depth of support bar fixed area;
In Fig. 8, the predetermined external force of F for mask frame is applied;
In Fig. 9,90 is mask unit, and 901 is mask pattern region, and 91 is clamping part, and 1. 92Wei Banke district represents the mask unit of first installation, the tension force of G1 for the mask unit of first installation is applied;
In Figure 10,100 is solder joint, and F1 is for installing after first mask unit mask frame institute externally applied forces;
In Figure 11,2., 3., 4., 5., 6., 7. represent the mask unit of installing in certain sequence;
In Figure 12,120 for waiting to amplify observation part;
In Figure 13,130 is evaporation hole.
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Below by the embodiment being described with reference to the drawings, be exemplary, only for explaining the present invention, and can not be interpreted as limitation of the present invention.
Inventive concept of the present invention is as follows, due in prior art assembling mask assembly process in, when having after the mask plate of some tension is arranged on mask frame, the tension force that mask plate has is converted into the pulling force to mask frame, mask frame produces distortion under pulling force effect, thereby to the precision of product, quality, all can make a big impact, reduce good article rate simultaneously.The assemble method of a kind of mask assembly provided by the invention comprises installing and covers bar step, mask unit step is installed, in being installed, mask unit step first two fixed edges of mask frame are applied to predetermined external force, after often installing a mask unit, external force is all cancelled a part, complete after the installation steps of all mask unit after external force is all cancelled, mask unit is basic identical to the action effect of mask frame with the predetermined external force that first mask unit step of installation applies before to the pulling force of mask frame, the shape that is mask frame remains unchanged substantially, the support bar of installing and cover bar and mask unit is played to the effect of support, can reduce mask unit because of self gravitation effect produce sagging, so can well solve the not high problem of mask assembly precision in traditional technology, and then improve precision and the quality of product.
According to embodiments of the invention, a kind of assemble method that a kind of mask assembly is provided is provided, as shown in Fig. 2～Figure 19, comprising:
Bar step is covered in S1, installation: as shown in Figure 2, and by one or more one group of opposite side that bar 21 is installed on mask frame 20, fixed edges 201 of described one group of opposite side formation mask frame 20 of covering;
S2, installation mask unit step: the fixed edge 201 that one or more mask unit 90 is installed on to mask frame;
According to embodiments of the invention, before S2 installs mask unit step, S1 also comprises the step that support bar 30 is installed after installing and covering bar step, as shown in Figure 2 to 3, Figure 2 shows that two fixed edges 201 that one or more two ends of covering bar 21 are individually fixed in to mask frame 20, Figure 3 shows that mask frame is installing the two dimensional structure schematic diagram that covers the rear installation support bar 30 of bar 21.
According to embodiments of the invention, the step of support bar 30 is installed also can carry out before bar 21 steps are covered in S1 installation, if figure is as shown in Fig. 4～Fig. 5, Figure 4 shows that two support edges 202 that the two ends of one or more support bars 30 are individually fixed in to mask frame, Figure 5 shows that mask frame is installing the rear installation of support bar 30 and cover the two dimensional structure schematic diagram of bar 21.
As shown in Figure 4 to 7, mask frame 20 is provided with and covers bar fixed area 40 and support bar fixed area, be illustrated in figure 6 in Fig. 5 the cross section enlarged diagram along A-A direction, the two ends of covering bar 21 are placed in covering in bar fixed area on fixed edge 201, the degree of depth t1 that covers bar fixed area 40 is more than or equal to the thickness that covers bar, smooth to guarantee mask assembly ito surface, the one side that when ito surface is evaporation, mask assembly contacts with deposition substrate.Figure 7 shows that in Fig. 5 that, along the cross section enlarged diagram of B-B direction, the two ends of support bar 30 are placed in the support bar fixed area on support edge 202, the degree of depth t2 of support bar fixed area is more than or equal to the thickness of support bar 30, smooth to guarantee mask assembly ito surface.
According to embodiments of the invention, the two ends of support bar 30 are by laser welding mode or by glue bonding way, be fixed on two support edges 202 of mask frame 20, and mask frame two fixed edges 201 are fixed on by laser welding mode or by glue bonding way in the two ends of covering bar 21.
According to embodiments of the invention, S2 installs mask unit step and comprises:
S21, external force apply step: as shown in Figure 8, to mask frame 20(mask frame, be that the mask frame that covers bar is installed in Fig. 2) fixed edge 201 apply predetermined external force F;
S22, tension force apply step: use a pair of tension device to clamp respectively the clamping part 91 at mask unit 90 two ends, tension device applies tension force at the length direction of mask unit 90 to mask unit 90, making mask unit have certain tension force Gn(n is 1,2,3,4 ...), n the mask unit that n representative is installed, the tension force that Gn applies for the mask unit that n is installed, as shown in Figure 9, the tension force of G1 for the mask unit of first installation is applied;
S23, contraposition installation steps: as shown in figure 10, by the mask unit 90 with some tension by contraposition step and 20 contrapositions of mask frame, after mask unit 90 and mask frame 20 accurate contrapositions, the two ends of mask unit 90 are individually fixed in to two fixed edges 201, as shown in figure 10, the two dimensional structure schematic diagram that first mask unit two ends is 1. individually fixed in to two fixed edges 201 of mask frame 20,100 is solder joint;
S24, external force are cancelled step: complete contraposition installation steps, the predetermined external force applying is cancelled a part, external force becomes Fn(n after cancelling be 1,2,3,4 ...), n represents and cancels external force the n time, as shown in figure 10, the two dimensional structure schematic diagram that the mask unit that completes first installation is cancelled external force after 1. for the first time, F1 is for cancelling for the first time after a part of external force mask frame 20 externally applied forces;
By one or many, carrying out tension force applies step, contraposition installation steps and external force and cancels step, one or more mask unit 90 are installed on to a mask frame 20, and after installing all mask unit 90, external force is all cancelled, obtain mask assembly, as shown in Figure 12, Figure 16～Figure 19.
According to embodiments of the invention, when mask assembly only includes a mask unit 90, in step S24, external force is cancelled a part for predetermined external force F is all cancelled, as shown in figure 18, in Figure 18, mask assembly only includes a mask unit 90, and mask unit 90 is provided with a plurality of mask patterns region 901.
According to embodiments of the invention, mask unit 90 is installed on mask frame 201 from the central position of fixed edge 201 successively to end positions, as shown in figure 11, for mask assembly assembling schematic diagram, from the central position of two fixed edges 201 of mask frame 20, mask unit 90 is installed successively to two ends, by mask unit order 1., 2., 3., 4., 5., 6., 7., installs.
According to embodiments of the invention, in contraposition installation steps, the two ends of mask unit 90 are individually fixed in two fixed edges 201 of mask frame 20 by laser welding mode, and as shown in Figure 10, Figure 12,100 is solder joint.
According to some embodiments of the present invention, S2 installs in mask unit step and also comprises the step of removing clamping part 91, removes the step of clamping part 91 and after completing all contraposition installation steps, carries out or complete often carrying out after these contraposition installation steps.
As shown in Figure 15 ~ Figure 16, after completing all contraposition installation steps, remove clamping part 91, Figure 15 shows that all mask unit 90 are installed on to mask frame 20(clamping part 91 not to be removed), Figure 16 shows that the two dimensional structure schematic diagram of the mask assembly after 91 removals of clamping part in Figure 15.
As shown in Fig. 9 ~ Figure 11, remove clamping part 91 and carry out at every turn after completing S23 contraposition installation steps.
The clamping part 91 at mask unit 90 two ends and mask unit 90 structure that is formed in one, the clamping part 91 at 90 two ends of mask unit shown in Figure 15 is one-body molded with mask unit, can the clamping part in Figure 15 41 be removed by laser cutting mode, clamping part 91 in Figure 15 obtains mask assembly after removing, be the two dimensional structure schematic diagram of mask assembly ito surface as shown in figure 16, Figure 17 shows that the two dimensional structure schematic diagram of mask assembly evaporation face.
In Fig. 9, clamping part 91 is connected with mask unit 90 by Ban Ke district 92, removes the mode that clamping part 91 can remove by Yan Banke district 92, and Ban Ke district 92 forms when making mask unit 90, and the thickness in Ban Ke district 92 is less than the thickness of mask unit 40.
According to some embodiments of the present invention, mask unit 90 is provided with one or more mask patterns region 901, as shown in Figure 15～Figure 19, mask pattern region 901 is a large evaporation hole, or mask pattern region 901 is arranged and formed by a plurality of little evaporation holes as shown in Figure 12～Figure 14.
Be 120 part structure for amplifying schematic diagram in Figure 12 as shown in figure 13, each mask pattern region 901 is arranged and is formed by a plurality of little evaporation holes, evaporation hole 130 is little opening, and the shape in evaporation hole 130 is not limited to the rectangle shown in Figure 13, can be circular or other polygonized structure.
Figure 14 shows that the another kind of structure for amplifying schematic diagram of 120 parts in Figure 12, the opening that in Figure 14, evaporation hole 130 is strip.
In structure shown in Figure 10, Figure 11,1. the mask unit with some tension is installed on after mask frame 20, the tension force that mask unit has is converted to the pulling force to mask frame, 1. external force F is basic identical to the action effect of mask frame before with mask unit is installed to the action effect of mask frame for pulling force and external force F1, said action effect refers to the action effect that the shape of mask frame is produced, mask unit front and back are 1. being installed, the shape of mask frame 20 remains unchanged substantially.
Install all mask unit after 90s, external force F is basic identical on the impact of the shape generation of mask frame 20 before with first mask unit is installed in the impact that mask unit 90 produces the shape of mask frame 20 pulling force of mask frame 20, the shape that is mask frame 20 remains unchanged substantially, therefore can improve the precision in mask assembly evaporation hole, improve the quality of mask assembly.
According to embodiments of the invention, the material of mask unit 90 is nickel or nickel-base alloy or Invar alloy, and in order the two ends of mask unit to be welded to securely to two fixed edges 201 of mask frame 20, the material of mask frame 20 is identical with the material of mask unit 90.
Mask assembly cover bar 21 and support bar 30 is installed on mask frame conventionally near the one side of ITO, Figure 16 and the two dimensional structure schematic diagram that Figure 18 shows that mask assembly ito surface, Figure 17 and the two dimensional structure schematic diagram that Figure 19 shows that mask assembly evaporation face, mask assembly shown in Figure 17 is only installed and is covered bar 21, and the mask assembly shown in Figure 19 is provided with and covers bar 21 and support bar 30.
Beneficial effect of the present invention is, before mask unit 90 is installed on to mask frame 20, mask frame is executed to 20 two fixed edges 201 and apply predetermined external force F, after installing all mask unit 90, mask frame externally applied forces is all cancelled, the tension force that mask unit 90 has is converted into the pulling force to mask frame two fixed edges 201, all mask unit are basic identical to the action effect of mask frame 20 (action effect to mask shaped as frame shape) with the predetermined external force F that first mask unit of installation applies before to the action effect of mask frame to the pulling force of mask frame, the shape that is mask frame 20 remains unchanged substantially, support bar 30 and cover 21 pairs of mask unit 90 of bar and play a supporting role, reduce mask unit 90 because of self gravitation effect produce sagging, thereby improve the positional precision in evaporation hole, mask pattern region, improve precision and the quality of mask assembly product.
Although the specific embodiment of the present invention is described in detail with reference to a plurality of illustrative examples of the present invention, but it must be understood that, those skilled in the art can design multiple other improvement and embodiment, and these improve and within embodiment will drop on spirit and scope.Particularly, within the scope of aforementioned open, accompanying drawing and claim, can aspect the layout of component and/or subordinate composite configuration, make rational modification and improvement, and can not depart from spirit of the present invention.Except modification and the improvement of component and/or layout aspect, its scope is limited by claims and equivalent thereof.
Claims (10)
1. an assemble method for mask assembly, comprising:
S1, install and to cover bar step: by one or more, cover one group of opposite side that bar is installed on mask frame, described one group of opposite side forms the fixed edge of described mask frame;
S2, installation mask unit step: the fixed edge that one or more mask unit is installed on to mask frame;
It is characterized in that, described in cover bar and block the gap between adjacent described mask unit, and described in cover bar and can the mask pattern region in described mask unit not produced and be blocked.
2. the assemble method of mask assembly according to claim 1, it is characterized in that, before described S2 installs mask unit step, S1 also comprises installation support bar step after installing and covering bar step, another group opposite side that the two ends of one or more described support bars is individually fixed in to described mask frame, described another group opposite side forms the support edge of described mask frame.
3. the assemble method of mask assembly according to claim 1, it is characterized in that, before bar step is covered in described S1 installation, also comprise support bar step is installed, another group opposite side that the two ends of one or more described support bars is individually fixed in to described mask frame, described another group opposite side forms the support edge of described mask frame.
4. according to the assemble method of the mask assembly described in claim 1,2 or 3, it is characterized in that, the two ends of described support bar by laser welding mode or by glue bonding way be fixed on mask frame two described in support edge, described in cover bar two ends by laser welding mode or by glue bonding way, be fixed on fixed edge described in mask frame two.
5. according to the assemble method of the mask assembly described in claim 1,2 or 3, it is characterized in that, described S2 installs mask unit step and comprises:
S21, external force apply step: the described fixed edge to described mask frame applies predetermined external force;
S22, tension force apply step: use a pair of tension device to clamp respectively the clamping part at mask unit two ends, described tension device applies tension force at the length direction of described mask unit to described mask unit, makes described mask unit have certain tension force;
S23, contraposition installation steps: the described mask unit with some tension, by contraposition step and the contraposition of described mask frame, is individually fixed in to described fixed edge by the two ends of described mask unit after described mask unit and described mask frame accurate contraposition;
S24, external force are cancelled step: complete described contraposition installation steps, institute's externally applied forces is cancelled a part;
By one or many, carrying out described tension force applies step, described contraposition installation steps and described external force and cancels step, one or more described mask unit are installed on to a described mask frame, after installing all described mask unit, described external force is all cancelled, and obtains mask assembly.
6. the assemble method of mask assembly according to claim 5, is characterized in that, when described mask assembly only includes a mask unit, external force described in described step S24 is cancelled a part for described predetermined external force is all cancelled.
7. the assemble method of mask assembly according to claim 5, is characterized in that, described mask unit is installed on described mask frame from the central position of described fixed edge successively to end positions.
8. the assemble method of mask assembly according to claim 5, is characterized in that, in described contraposition installation steps, the two ends of described mask unit by laser welding mode be individually fixed in described mask frame two described in fixed edge.
9. the assemble method of mask assembly according to claim 5, it is characterized in that, described S2 installs in mask unit step and also comprises the step of removing described clamping part, the step of the described clamping part of described removal after completing all described contraposition installation steps, carry out or complete each described contraposition installation steps after carry out.
10. the assemble method of mask assembly according to claim 5, is characterized in that, described mask unit is provided with one or more described mask patterns region, and described mask pattern region is a large evaporation hole or is arranged and formed by a plurality of little evaporation holes.
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| CN201310613959.8A CN103695841A (en) | 2013-11-28 | 2013-11-28 | Assembling method of mask assembly |
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| CN103952666A (en) * | 2014-04-22 | 2014-07-30 | 四川虹视显示技术有限公司 | Novel evaporation mask plate tensioning method |
| CN104281747A (en) * | 2014-09-29 | 2015-01-14 | 京东方科技集团股份有限公司 | Fine mask screening process analysis method |
| CN104294212A (en) * | 2014-09-03 | 2015-01-21 | 安徽省大富光电科技有限公司 | Mask plate assembly |
| CN105714248A (en) * | 2016-04-01 | 2016-06-29 | 昆山允升吉光电科技有限公司 | Manufacturing method for high-precision composite mask plate assembly for evaporation |
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| CN106702318A (en) * | 2016-12-12 | 2017-05-24 | 京东方科技集团股份有限公司 | Mask frame, manufacturing method thereof and mask plate |
| WO2018000977A1 (en) * | 2016-06-28 | 2018-01-04 | 京东方科技集团股份有限公司 | Mask plate assembly, method for installing mask plate assembly and evaporation device |
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| WO2018099055A1 (en) * | 2016-11-30 | 2018-06-07 | 京东方科技集团股份有限公司 | Deposition mask and deposition method |
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| CN109943805A (en) * | 2019-03-29 | 2019-06-28 | 云谷（固安）科技有限公司 | Mask assembly assemble method and the mask assembly assembled by this method |
| CN110565050A (en) * | 2019-10-18 | 2019-12-13 | 云谷（固安）科技有限公司 | mask assembly and evaporation device |
| WO2020118949A1 (en) * | 2018-12-11 | 2020-06-18 | 武汉华星光电半导体显示技术有限公司 | Mask plate and mask apparatus using same |
| CN111945109A (en) * | 2019-05-14 | 2020-11-17 | 皮姆思株式会社 | Composite frame element for mask assembly for thin film vapor deposition and method for manufacturing same |
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