CN103451729A - Growth method of square sapphire - Google Patents

Growth method of square sapphire Download PDF

Info

Publication number
CN103451729A
CN103451729A CN2013104244246A CN201310424424A CN103451729A CN 103451729 A CN103451729 A CN 103451729A CN 2013104244246 A CN2013104244246 A CN 2013104244246A CN 201310424424 A CN201310424424 A CN 201310424424A CN 103451729 A CN103451729 A CN 103451729A
Authority
CN
China
Prior art keywords
crystal
square
crucible
growth
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2013104244246A
Other languages
Chinese (zh)
Inventor
张向锋
贾宝申
陆玉龙
高培波
赵杰
江左林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOP CRYSTALS TECHNOLOGY Co Ltd
Original Assignee
TOP CRYSTALS TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOP CRYSTALS TECHNOLOGY Co Ltd filed Critical TOP CRYSTALS TECHNOLOGY Co Ltd
Priority to CN2013104244246A priority Critical patent/CN103451729A/en
Publication of CN103451729A publication Critical patent/CN103451729A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The embodiment of the invention provides a growth method of a square sapphire, and relates to the field of gem manufacturing. According to the method, bubbles formed on the upper parts of crystals in a preparation process are reduced, and the utilization rate of the crystals is improved. The method comprises the following steps of heating a raw material in a square crucible until the raw material is melted, adjusting the voltage, keeping a stable convection form on the surface of the melt in the square crucible and deviating a cold core away from the geometrical center position of the square crucible; adjusting a seed crystal position to obtain the seed crystal position gradually close to the liquid surface of the melt, meanwhile, adjusting the voltage, preheating the seed crystal, rotating in a matching manner by using the conventional lift process, meanwhile, adjusting the temperature, adjusting the size of the crystallization end part, finally covering the crystallization end part with the cold core and starting to shoulder the crystal; after shouldering to a predetermined size, slightly boosting the voltage to promote the completion of the shouldering, then continuously and slowly cooling to gradually grow and form the crystal, and boosting the voltage again when the crystal is grown to the growth tail end so as to smoothly end the crystal growth; reducing the voltage until a power supply is turned off, and gradually cooling the crystal in a single crystal furnace to finish crystal growth.

Description

A kind of square sapphire method of growth
Technical field
The present invention relates to jewel and manufacture field, relate in particular to a kind of square sapphire method of growth.
Background technology
Sapphire crystal (being commonly called as corundum) has uniqueness, good physicochemical property, particularly in 0.2 ~ 5.0 mu m waveband, has good light transmission, can be widely used in the fields such as infrared military equipment, satellite and space technology; And, because sapphire crystal also has dielectric insulation, constant characteristics such as specific inductivity, become one of most widely used substrate material.
At present, sapphire growth method mainly contains crystal pulling method, reverse mould method, kyropoulos, heat-exchanging method etc.Wherein, the most frequently used method when kyropoulos is current industrial production sapphire crystal, be characterized in, the crystal diameter when expanding shoulder suddenly becomes large and occurs in the growth stage casing that waist returns and melts contraction, bottom seamlessly transits ending, and the sapphire crystal therefore grown presents pyriform usually.
In realizing process of the present invention, the contriver finds that there are the following problems: because kyropoulos growing sapphire crystal optimum orientation is that A is to growth, and crystal bar extract direction be generally C to, extract vertically downward crystal bar from pyriform crystal ingot circumference, limit by the crystal ingot profile and cause the crystal utilization ratio low; And the circular crucible thermal field of existing growth pyriform crystal easily forms the bubble enrichment region on crystal top, thereby reduce the use value of crystal ingot, raise long brilliant cost.
 
Summary of the invention
The purpose of this invention is to provide a kind of sapphire method of growth rectangle, reduced the bubble that crystal top forms, and improved the crystal utilization ratio.
The embodiment of the present invention provides a kind of growth rectangle sapphire method, comprising:
Step 101, the raw material heated in square crucible extremely melt, and regulating voltage, make bath surface convection current form stable in square crucible, and make the cold heart depart from square crucible geometric centre position;
Step 102, slowly regulate the seed crystal position and make it move closer to melt liquid level, the while regulating voltage, avoid the seed crystal melting, the seed crystal preheating, utilize traditional czochralski process, coordinates rotation, determine and lift height at every turn according to the spreading rate of crystallization end, regulate temperature simultaneously, the size of crystallization control end, final crystallization end covers the cold heart and starts shouldering;
Step 103, crystal shouldering are to predetermined size, and boosted voltage impels shouldering to complete slightly, continue thereafter, slow cooling makes crystal growth and shaping gradually, when growing end again boosted voltage so that crystal growth ending smoothly;
Step 104, reduce voltage until powered-down, crystal is cooling gradually in single crystal growing furnace, long brilliant the end.
In described step 101, the described cold heart with depart from square crucible geometric centre position and be less than 20mm.
In described step 102, the seed crystal preheating is at its lower end of seed crystal and melt liquid level 2 ~ 10mm place's preheating 10~60 min.Eliminate stress.
In described step 102, utilize traditional czochralski process, coordinating the rotational speed rate of rotation is 0.2 ~ 15rpm.
In described step 104, crystal is cooled to gradually 200-300 ℃ in single crystal growing furnace.
The sapphire method of growth rectangle that the embodiment of the present invention provides, adopt square crucible, its thermal field is evenly distributed, and crystal top bubble population stable, that prepare is less, the crystal utilization ratio is high, and, the growth square crystal all significantly surpasses the pyriform crystal on crystal quality and utilization ratio, so the present invention has the potential of significantly promoting and impelling the more capable replacement of industry equipment.
The accompanying drawing explanation
Below in conjunction with drawings and Examples, the present invention is further described.
Fig. 1 is the square sapphire method flow diagram of a kind of growth that the embodiment of the present invention one provides;
The square sapphire crucible structure schematic diagram of a kind of growth that Fig. 2 provides for the embodiment of the present invention.
 
Embodiment
More in order to solve the crystal top bubble cluster that prior art prepares for the square sapphire method of growing, the problem that the crystal utilization ratio is low, the embodiment of the present invention provides a kind of growth square sapphire method.
As shown in Figure 1, a kind of square sapphire method of growth that the embodiment of the present invention provides, the method comprises:
Step 101, the raw material heated in square crucible extremely melt, and regulating voltage, make bath surface convection current form stable in square crucible, and make the cold heart and square crucible geometric centre position deviation be less than 20mm.
In the present embodiment, similar with growth pyriform sapphire crystal, utilize kyropoulos to prepare sapphire crystal, difference is, adopts square crucible to be prepared.By boosted voltage, by after the fusing of the raw material in square crucible, regulating voltage, make bath surface convection current form stable in square crucible, and make the cold heart depart from square crucible geometric centre position.Preferably, make the cold heart and square crucible geometric centre position deviation be less than 20mm.
It should be noted that, the actual needs that the square crucible thermal field that adopts of growth square crystal can be drawn the bar gauge lattice according to crystal designs different length ratios to improve the square crystal utilization ratio.In an embodiment of the present invention, as shown in Figure 2, the technical essential of preparation rectangle sapphire crystal is the length ratio of reasonable disposition square crystal 2, can before growing crystal, preset to draw excellent scheme and extract the utilization ratio of 2,4,6 inches crystal bars with raising square crystal 2; Adopt square crucible 1 and square tungsten cage heating member to be enclosed in square crucible periphery with same length and width ratio.Further, coordinate square crucible to adopt square tungsten cage heating element to present evenly linear to guarantee the inner thermal field of crucible.Can adopt square zirconia brick side screen thermal insulation layer or circular tungsten, molybdenum side screen thermal insulation layer (adopting square tungsten, molybdenum thermal insulation layer can produce the excessive and uncontrollable side screen distortion of amplitude so that confuse the inner temperature of crucible) outside square crucible, tungsten cage heating element.If adopted zirconia brick side screen thermal insulation layer can be used in conjunction with square burner hearth, so can save the furnace volume utilization ratio..
Step 102, slowly regulate the seed crystal position and make it move closer to melt liquid level, the while regulating voltage, avoid the seed crystal melting, the seed crystal preheating, utilize traditional czochralski process, coordinates rotation, determine and lift height at every turn according to the spreading rate of crystallization end, regulate temperature simultaneously, the size of crystallization control end, final crystallization end covers the cold heart and starts shouldering;
In the seeding technological process, slowly regulate the seed crystal position and make it move closer to melt liquid level, regulating voltage, avoid the seed crystal melting simultaneously.Preferably, lower end and melt liquid level 2 ~ 10mm place's preheating 10~60 min, to eliminate stress.Further, utilize traditional czochralski process, coordinate rotation, preferably speed of rotation is 0.2 ~ 15rpm.Determine and lift height at every turn according to the spreading rate of crystallization end, regulate temperature simultaneously, the size of crystallization control end, final crystallization end covers the cold heart and starts shouldering;
Step 103, crystal shouldering are to predetermined size, and boosted voltage impels shouldering to complete slightly, continue thereafter, slow cooling makes crystal growth and shaping gradually, when growing end again boosted voltage so that crystal growth ending smoothly;
The liquid of the thermal field of square crucible in crystal shouldering process flows back to Lu Yike and clearly flows along square crucible crest line, is conducive to get rid of crystal top bubble, improves the crystal growth quality.
Step 104, reduce voltage until powered-down, crystal is cooling gradually in single crystal growing furnace, long brilliant the end.
In order to be applicable to feeding, preferably, crystal is cooled to gradually 200-300 ℃ in single crystal growing furnace.
After taking turns long crystalline substance through one, from square crystal ingot, extract the crystal bar that specification is suitable (2,4,6in).Crystal bar grinds by end surface grinding, cylindrical barreling, flat limit and substrate slice or the diaphragm of making dimension are afterwards cut, grind, thrown to back segment.
Therefore, the sapphire method of growth rectangle that the embodiment of the present invention provides, adopt square crucible, its thermal field is evenly distributed, and crystal top bubble population stable, that prepare is less, the crystal utilization ratio is high, and the growth square crystal all significantly surpasses the pyriform crystal on crystal quality and utilization ratio, so the present invention has the potential of significantly promoting and impelling the more capable replacement of industry equipment.
The above; be only the specific embodiment of the present invention, but protection scope of the present invention is not limited to this, anyly is familiar with those skilled in the art in the technical scope that the present invention discloses; can expect easily changing or replacing, within all should being encompassed in protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of described claim.

Claims (5)

1. the sapphire method of growth rectangle, is characterized in that, comprising:
Step 101, the raw material heated in square crucible extremely melt, and regulating voltage, make bath surface convection current form stable in square crucible, and make the cold heart depart from square crucible geometric centre position;
Step 102, slowly regulate the seed crystal position and make it move closer to melt liquid level, the while regulating voltage, avoid the seed crystal melting, the seed crystal preheating, utilize traditional czochralski process, coordinates rotation, determine and lift height at every turn according to the spreading rate of crystallization end, regulate temperature simultaneously, the size of crystallization control end, final crystallization end covers the cold heart and starts shouldering;
Step 103, crystal shouldering are to predetermined size, and boosted voltage impels shouldering to complete slightly, continue thereafter, slow cooling makes crystal growth and shaping gradually, when growing end again boosted voltage so that crystal growth ending smoothly;
Step 104, reduce voltage until powered-down, crystal is cooling gradually in single crystal growing furnace, long brilliant the end;
The technical essential for preparing square sapphire crystal is that the length ratio of reasonable disposition square crystal can be preset before growing crystal and draws excellent scheme and extract the utilization ratio of 2,4,6 inches crystal bars to improve square crystal; The characteristics of side's crucible thermal field be its can adopt pros or to a certain degree within rectangular as the crucible planar profile, its tungsten cage heating member is enclosed in the crucible periphery with same length and width ratio.
2. method according to claim 1, is characterized in that, in described step 101, the described cold heart with depart from square crucible geometric centre position and be less than 20mm.
3. method according to claim 1 and 2, in described step 102, the seed crystal preheating is at its lower end of seed crystal and melt liquid level 2 ~ 10mm place's preheating 10~60 min, eliminates stress.
4. method according to claim 3, is characterized in that, in described step 102, utilizes traditional czochralski process, and coordinating the rotational speed rate of rotation is 0.2 ~ 15rpm.
5. method according to claim 4, is characterized in that, in described step 104, crystal is cooled to gradually 200-300 ℃ in single crystal growing furnace.
CN2013104244246A 2013-09-17 2013-09-17 Growth method of square sapphire Pending CN103451729A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2013104244246A CN103451729A (en) 2013-09-17 2013-09-17 Growth method of square sapphire

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2013104244246A CN103451729A (en) 2013-09-17 2013-09-17 Growth method of square sapphire

Publications (1)

Publication Number Publication Date
CN103451729A true CN103451729A (en) 2013-12-18

Family

ID=49734547

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2013104244246A Pending CN103451729A (en) 2013-09-17 2013-09-17 Growth method of square sapphire

Country Status (1)

Country Link
CN (1) CN103451729A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104264224A (en) * 2014-09-19 2015-01-07 天通控股股份有限公司 Growth method of large-size square sapphire crystal
CN104911708A (en) * 2015-06-15 2015-09-16 哈尔滨奥瑞德光电技术股份有限公司 Growth method for preparing square sapphire crystal by Kyropoulos process
CN106435717A (en) * 2016-08-24 2017-02-22 天通银厦新材料有限公司 Growth equipment and growth technology for 200-kg sapphire crystals
CN107881550A (en) * 2017-11-08 2018-04-06 中国科学院合肥物质科学研究院 A kind of crystal growth method by melt method of large-size crystals
CN109338460A (en) * 2018-09-30 2019-02-15 中国科学院合肥物质科学研究院 A method of control garnet crystal nucleus growth

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102127803A (en) * 2011-03-08 2011-07-20 中国科学院上海硅酸盐研究所 Growth method of rectangular specially-shaped sapphire crystal
CN102162130A (en) * 2011-05-26 2011-08-24 浙江昀丰新能源科技有限公司 Preparation method of sapphire monocrystalline
US20120186513A1 (en) * 2011-01-26 2012-07-26 DK AZTEC Co., Ltd Kyropoulos sapphire single crystal growing apparatus using elliptic crucible
CN102758251A (en) * 2012-08-08 2012-10-31 无锡鼎晶光电科技有限公司 Method for controlling sapphire seeding form of Kyropoulos method
CN102912430A (en) * 2012-11-15 2013-02-06 上海中电振华晶体技术有限公司 Sapphire crystal growth equipment and method
CN102943303A (en) * 2012-11-14 2013-02-27 上海施科特光电材料有限公司 Method to restrain bubbles in process of growing sapphire by using kyropoulos method
CN103422162A (en) * 2013-09-03 2013-12-04 无锡鼎晶光电科技有限公司 Single crystal furnace thermal field structure for square sapphire generation

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120186513A1 (en) * 2011-01-26 2012-07-26 DK AZTEC Co., Ltd Kyropoulos sapphire single crystal growing apparatus using elliptic crucible
CN102127803A (en) * 2011-03-08 2011-07-20 中国科学院上海硅酸盐研究所 Growth method of rectangular specially-shaped sapphire crystal
CN102162130A (en) * 2011-05-26 2011-08-24 浙江昀丰新能源科技有限公司 Preparation method of sapphire monocrystalline
CN102758251A (en) * 2012-08-08 2012-10-31 无锡鼎晶光电科技有限公司 Method for controlling sapphire seeding form of Kyropoulos method
CN102943303A (en) * 2012-11-14 2013-02-27 上海施科特光电材料有限公司 Method to restrain bubbles in process of growing sapphire by using kyropoulos method
CN102912430A (en) * 2012-11-15 2013-02-06 上海中电振华晶体技术有限公司 Sapphire crystal growth equipment and method
CN103422162A (en) * 2013-09-03 2013-12-04 无锡鼎晶光电科技有限公司 Single crystal furnace thermal field structure for square sapphire generation

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104264224A (en) * 2014-09-19 2015-01-07 天通控股股份有限公司 Growth method of large-size square sapphire crystal
CN104911708A (en) * 2015-06-15 2015-09-16 哈尔滨奥瑞德光电技术股份有限公司 Growth method for preparing square sapphire crystal by Kyropoulos process
CN104911708B (en) * 2015-06-15 2017-10-27 哈尔滨奥瑞德光电技术有限公司 Kyropoulos prepare the growing method of square sapphire crystal
CN106435717A (en) * 2016-08-24 2017-02-22 天通银厦新材料有限公司 Growth equipment and growth technology for 200-kg sapphire crystals
CN107881550A (en) * 2017-11-08 2018-04-06 中国科学院合肥物质科学研究院 A kind of crystal growth method by melt method of large-size crystals
CN109338460A (en) * 2018-09-30 2019-02-15 中国科学院合肥物质科学研究院 A method of control garnet crystal nucleus growth
CN109338460B (en) * 2018-09-30 2021-03-30 中国科学院合肥物质科学研究院 Method for controlling growth of garnet crystal nucleus

Similar Documents

Publication Publication Date Title
CN103422162A (en) Single crystal furnace thermal field structure for square sapphire generation
CN103451729A (en) Growth method of square sapphire
CN102628184B (en) Method for growing gem crystals by way of vacuum induction heating and device realizing method
CN202030861U (en) Heating device for polycrystalline silicon crystal growing furnace
CN102534758A (en) Growth method and growth device for bar-shaped sapphire crystals
CN104651935B (en) A kind of method that crucible rise method prepares high-quality sapphire crystal
CN103290470A (en) Diameter transitional czochralski silicon growing method
CN102978687B (en) Crystal growth method of polycrystalline silicon ingot
KR20150094628A (en) Method for producing monocrystalline silicon
CN103173850A (en) Monocrystalline silicon producing process
KR101680215B1 (en) Method for manufacturing silicone single crystal ingot and silicone single crystal ingot manufactured by the method
CN102560631A (en) Growth method and equipment of sapphire crystal
CN103243380A (en) Horizontally directional zone-melting crystallization preparation method for large-size Re:YAG series of laser crystals
CN103194791A (en) Horizontal directional region melt-crystallization preparation method of large-dimension plate-like sapphire mono-crystal
CN104073875A (en) Preparation method of large-size sapphire crystal dynamic temperature field
CN103422163A (en) Device and method for growing sapphire single crystals
CN104120488A (en) Dynamic-temperature-field preparation method for large-size C-axis sapphire crystal
CN203530480U (en) Equipment for growing sapphire single crystals
CN103205799A (en) Method for growing C-oriented white stone crystals
CN104711664A (en) Method for increasing large diameter float zone silicon crystal production quality
CN204138819U (en) Kyropoulos sapphire single crystal growth furnace insulation side screen
CN103469304B (en) Branched shaping sapphire crystallization device and long crystal method thereof
CN103255477A (en) Molded sapphire crystal growth method and apparatus thereof
CN102418144B (en) Manufacturing method of 4-inch C-directional sapphire crystal
CN102051686A (en) Method and device for growing large-size sodium yttrium tungstate crystals by two-stage heating and pulling process

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C12 Rejection of a patent application after its publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20131218