CN103294086B - Constant-temperature liquid circulating device and temperature-controlling method - Google Patents
Constant-temperature liquid circulating device and temperature-controlling method Download PDFInfo
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- CN103294086B CN103294086B CN201210045255.0A CN201210045255A CN103294086B CN 103294086 B CN103294086 B CN 103294086B CN 201210045255 A CN201210045255 A CN 201210045255A CN 103294086 B CN103294086 B CN 103294086B
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Abstract
The invention discloses a constant-temperature liquid circulating device which is used for conveying a constant-temperature liquid to an external device. The constant-temperature liquid circulating device comprises a refrigerating device unit, a circulating liquid loop unit and a controlling device. The refrigerating device comprises an electric three-way valve, an evaporation device, a condensing device, a compressor and an expansion device, the inlet end of the compressor is connected with one outlet end of the evaporation device, and the outlet end of the compressor is connected with the electric three-way valve; the circulating liquid loop unit comprises a temperature sensor, a frequency conversion device and a pump, the evaporation device is of a structure with three inlets and three outlets, the three inlets are respectively connected with the electric three-way valve, the expansion device and the external device, and the three outlets are respectively connected with the condensing device, the compressor and the pump. The controlling device is connected with the temperature sensor, the temperature sensor collects the temperature of the circulating liquid, and the controlling device is used for controlling the opening degree of the electric three-way valve according to the signal of the temperature sensor. The constant-temperature liquid circulating device is low in cost, small in size and capable of reducing system energy consumption.
Description
Technical field
The present invention relates to a kind of constant temp. liquid circulating device and Temp. control method, particularly relate to a kind of constant temp. liquid circulating device and the Temp. control method that apply to chip manufacturing factory.
Background technology
In the society that current " low-carbon (LC) " is economic prevailing, all trades and professions are all faced with huge pressure--" energy-conservation ", especially semicon industry.And this is also just to providing the attemperating unit of temperature controlled environment to propose higher design objective to semicon industry: the temperature-control range that can meet technological requirement, energy-saving and environmental protection, economic many index can be issued in assurance device normal operation again.
As shown in Figure 1 be widely used at present deielectric-coating etching chip manufacturing factory constant temp. liquid circulating device, this device has refrigerating circuit, circulation fluid loop and control loop 21, and wherein circulation fluid loop is by water pump 22, water tank 23, composition such as T-valve 24 grade.
This device temperature control process is divided into 2 grades, first by T-valve mixed flow coarse adjustment water tank inflow point temperature (2-3 DEG C lower than tank outlet temperature), and then is heated the temperature carried out regulating tank and export by well heater.Thus make the temperature remained constant of tank outlet, this shows:
1. no matter under any operating mode, all low than the temperature of the tank outlet set point 2-3 DEG C of temperature of T-valve outlet, so the refrigerating circuit cold that will export is more, then the power consumption of compressor increases, and Overall Power Consumption increases;
2. no matter this device is in normal temperature control state or intensification operating mode, and the well heater in water tank all can export, then Overall Power Consumption increases;
3. according to energy conservation principle, because in this device, refrigerating circuit need export more cold, then the heat needing condenser to exchange away also just increases, and the volume of condenser can be made like this to increase, be unfavorable for the miniaturization of equipment.
Summary of the invention
Technical matters to be solved by this invention is to provide that a kind of cost is low, volume is little, reduces constant temp. liquid circulating device and the Temp. control method thereof of system energy consumption.
In order to solve the problems of the technologies described above, present invention employs following technical scheme:
A kind of constant temp. liquid circulating device, for carrying constant temperature liquid to external device (ED), it comprises refrigerator unit, circulation fluid circuit units, control device:
Described refrigerator unit comprises electric T-shaped valve, expansion gear and the vaporising device be connected with electric T-shaped valve respectively, condensing unit and compressor, the entrance point of described compressor is connected with vaporising device endpiece, the endpiece of compressor is connected with electric T-shaped valve, the endpiece of described condensing unit is connected with expansion gear, wherein said vaporising device has three entrance points, three endpiece, three entrance points connect electric T-shaped valve respectively, expansion gear, external device (ED), three endpiece connect condensing unit respectively, compressor and circulation fluid circuit units, described circulation fluid circuit units comprises temperature sensor, converter plant and pump, an endpiece of described vaporising device is connected with the entrance point of described pump, described temperature sensor is installed between described pump and external device (ED), for gathering the temperature of circulation fluid, described converter plant is installed between described pump and control device,
Described control device connects described expansion gear, compressor and converter plant respectively, by carrying out frequency control to converter plant, regulate the rotating speed of pump, control the flow of the circulation fluid being transported to closed circuit unit, described control device also controls the aperture of electric T-shaped valve and the output of described refrigerator unit cold size for the signal according to temperature sensor.
Preferably, described expansion gear can adopt heating power expansion valve, electric expansion valve or orifice plate.Preferably, described compressor can select digital scroll compressor, invariable frequency compressor, frequency-changeable compressor.
Meanwhile, the Temp. control method that the present invention also provides a kind of constant temp. liquid circulating device to adopt, adopts above-mentioned constant temp. liquid circulating device, comprises the steps:
Temperature sensor gathers the temperature value of circulation fluid and sends to control device;
Control device judges the temperature value of the circulation fluid that described temperature sensor gathers and the size of setting value and according to above-mentioned judged result, control device sends action command to the compressor in refrigerator unit, electric T-shaped valve and expansion gear;
The instruction of described compressor, electric T-shaped valve and expansion gear receiving control device, the cold of corresponding adjustment compressor exports, the aperture of described electric T-shaped valve and the aperture of expansion gear, makes the temperature fast approaching setting value of circulation fluid.
Preferably, when the temperature value of the circulation fluid of temperature sensor collection is greater than setting value, control device sends action command to compressor, electric T-shaped valve in refrigerating plant, compressor exports with maximum cooling capacity, and the corresponding reduction of the aperture of electric T-shaped valve, compressor outlet is refluxed through the corresponding minimizing of cold-producing medium of evaporator heated side, makes the temperature value of circulation fluid close to setting value;
When the temperature value of the circulation fluid of temperature sensors collection is less than setting value, control device sends action command to electric T-shaped valve in refrigerating plant, under guarantee compressor normally runs, the corresponding increase of aperture of electric T-shaped valve, compressor outlet is refluxed through the corresponding increase of high-temperature gas cold-producing medium of evaporator heated side, makes the temperature of circulation fluid rapidly close to desired temperature.
Visible, the invention provides a kind of wide temperature range of control, there is provided again a kind of temperature control equipment that can be issued to energy-saving and environmental protection, economic many index in assurance device normal operation, its temperature being mainly used in etching machine etch chamber controls, and reaches following effect:
1. utilize threeway proportioning valve between compressor outlet and evaporator, increase by a hot gas bypass circuit, cancel the T-valve in outer loop liquid loop and well heater, reduce system energy consumption;
2., because the high-temperature gas of compressor outlet shunts a road heating for evaporator side, so reduce through the thermal load of condenser, heat exchanger volume is reduced, miniaturization of the apparatus, reduce costs.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of existing constant temp. liquid circulating device;
Fig. 2 is the schematic diagram of constant temp. liquid circulating device of the present invention.
Embodiment
Below in conjunction with Fig. 2, describe the preferably embodiment of patent of the present invention in detail:
As shown in Figure 2, the invention provides a kind of wide temperature range of control, provide again a kind of and can be issued to energy-saving and environmental protection, the temperature control equipment of economic many index and temperature control method in assurance device normal operation.This energy-efficient constant-temperature liquid circulating device comprises refrigerator unit 11, circulation fluid circuit units 12, control device 10 and external device (ED) 9.
Refrigerator unit 11 described above is for controlling to predetermined temperature by the temperature of circulation fluid, described refrigerator unit 11 comprises electric T-shaped valve 3, expansion gear 2 and the vaporising device 4 be connected with electric T-shaped valve 3 respectively, condensing unit 1 and compressor 5 etc., the entrance point of described compressor 5 is connected with an endpiece of vaporising device 4, the endpiece of compressor 5 is connected with electric T-shaped valve 3, the endpiece of described condensing unit 1 is connected with expansion gear 2, the high-temperature high-pressure refrigerant steam of described condensing unit 1 for compressor 5 is discharged, liquid refrigerant is condensed into by heat radiation, by flowing into vaporising device 4 after expansion gear 2, the gaseous steam of low pressure is gasificated into after the heat of liquid refrigerant absorption cycle liquid in vaporising device 4, be back to again be compressed into the steam of high pressure again by compressor 5 after in condensing unit 1, temperature can be reduced to the temperature of setting by circulation fluid after vaporising device 4.Particularly, described vaporising device 4 adopts three to enter three to go out formula evaporator, that is described vaporising device 4 is selected three to enter three to go out formula evaporator, described vaporising device 4 has three entrance points, three endpiece, three entrance points connect electric T-shaped valve 3 respectively, expansion gear 2, external device (ED) 9, three endpiece connect condensing unit 1, compressor 5 and circulation fluid circuit units 12 respectively.
Described circulation fluid circuit units 12 flows to external device (ED) 9 for circulation fluid temperature being reduced to design temperature, to ensure that external device (ED) 9 can be in the duty of constant temperature, this circulation fluid circuit units 12 comprises temperature sensor 8, converter plant 7 and pump 6, particularly, an endpiece of described vaporising device 4 is connected with the entrance point of described pump 6, for the circulation fluid of design temperature is transported to external device (ED) 9, described temperature sensor 8 is installed between described pump 6 and external device (ED) 9, for gathering the temperature of the constant temperature liquid being delivered to external device (ED) 9 by described pump 6, described converter plant 7 is installed between described pump 6 and control device 10, described pump 6 is controlled by control device 10, frequency control is carried out by converter plant 7, the flow of the circulation fluid being transported to closed circuit unit 12 is controlled.
Described control device 10 connects described expansion gear 2 respectively, compressor 5, electric T-shaped valve 3 and converter plant 7, by carrying out frequency control to converter plant 7, regulate the rotating speed of pump 6, the flow of the circulation fluid being transported to closed circuit unit 12 is controlled, described control device 10 can also according under different temperatures technological requirement, the signal that described temperature sensor 8 collects, and through calculation process, the aperture of performer electric T-shaped valve 3 and the output of described refrigerator unit 11 cold size are controlled, realize the function that circulation fluid temperature is accurately controlled.
Optionally, described expansion gear 2, can adopt heating power expansion valve, electric expansion valve or orifice plate.
Optionally, described compressor 5 can select digital scroll compressor, invariable frequency compressor, frequency-changeable compressor.
Meanwhile, please continue to refer to Fig. 2, the Temp. control method that the present invention also provides a kind of constant temp. liquid circulating device to adopt, adopts constant temp. liquid circulating device as above, comprises the steps:
Temperature sensor 8 gathers the temperature value of circulation fluid and sends to control device 10;
Control device 10 judges the temperature value of circulation fluid that described temperature sensor 8 gathers and the size of setting value and according to the result of above-mentioned judgement, compressor 5, electric T-shaped valve 3 and expansion gear 2 in control device 10 pairs of refrigerator unit 11 send action command;
The instruction of described compressor 5, electric T-shaped valve 3 and expansion gear 2 receiving control device 10, the cold of corresponding adjustment compressor 5 exports, the aperture of described electric T-shaped valve 3 and the aperture of expansion gear 2, makes the temperature fast approaching setting value of circulation fluid.
Particularly, constant temp. liquid circulating device of the present invention is under operation process requires, if the temperature value of the circulation fluid that temperature sensor 8 gathers is greater than setting value, compressor 5 in control device 10 pairs of refrigerating plants, electric T-shaped valve 3 sends action command, occur preventing compressor 5 excessive discharge temperature and liquid hit phenomenon and guarantee that refrigerating plant is under the energy-conservation normal operation of higher evaporating pressure, compressor 5 exports with maximum cooling capacity, and the corresponding reduction of the aperture of electric T-shaped valve 3 (namely compressor outlet backflow is through the corresponding minimizing of cold-producing medium of evaporator heated side), the corresponding increase of aperture of expansion gear 2, make the temperature value of circulation fluid close to setting value.
If the temperature value of the circulation fluid that temperature sensors 8 gathers is less than setting value, in control device 10 pairs of refrigerating plants, electric T-shaped valve 3 sends action command, under guarantee compressor 5 normally runs, the corresponding increase of aperture (namely compressor outlet backflow is through the corresponding increase of high-temperature gas cold-producing medium of evaporator heated side) of electric T-shaped valve 3, the corresponding reduction of aperture of expansion gear 2, makes the temperature of circulation fluid rapidly close to desired temperature.
Above-mentioned constant temp. liquid circulating device is owing to correctly can control to predetermined temperature the constant temperature liquid of supply external device (ED), so the well heater eliminated in circulation fluid circuit units and electric T-shaped valve, both decreased the consumption of electric energy, the layout of whole device also can be made compacter.
The high-temperature gas that above-mentioned constant temp. liquid circulating device exports due to compressor 5 shunts a road heating for vaporising device 4 side through electric T-shaped valve 3, so reduce through the thermal load of condensing unit 1, condensation vessel volume can be made to reduce.
Constant temp. liquid circulating device of the present invention except can energy-conservation except, can also miniaturization of the apparatus, make device more economical.
Above-described embodiment is illustrative principle of the present invention and effect thereof only, but not for limiting the present invention.Any those skilled in the art all without prejudice under spirit of the present invention and category, can carry out modifying to above-described embodiment and change.Therefore, the scope of the present invention, should listed by claims.
Claims (5)
1. a constant temp. liquid circulating device, for carrying constant temperature liquid to external device (ED) (9), it comprises refrigerator unit (11), circulation fluid circuit units (12) and control device (10), described refrigerator unit (11) comprises electric T-shaped valve (3), expansion gear (2) and the vaporising device (4) be connected with electric T-shaped valve respectively, condensing unit (1) and compressor (5), the entrance point of described compressor (5) is connected with an endpiece of vaporising device (4), the endpiece of compressor (5) is connected with electric T-shaped valve (3), the endpiece of described condensing unit (1) is connected with expansion gear (2), it is characterized in that,
Wherein said vaporising device (4) has three entrance points, three endpiece, three entrance points connect electric T-shaped valve (3), expansion gear (2), external device (ED) (9) respectively, and three endpiece connect condensing unit (1), compressor (5) and circulation fluid circuit units (12) respectively; Described circulation fluid circuit units (12) comprises temperature sensor (8), converter plant (7) and pump (6), an endpiece of described vaporising device (4) is connected with the entrance point of described pump (6), described temperature sensor (8) is installed between described pump (6) and external device (ED) (9), for gathering the temperature of circulation fluid, described converter plant (7) is installed between described pump (6) and control device (10);
Described control device (10) connects described expansion gear (2), compressor (5) and converter plant (7) respectively, by carrying out frequency control to converter plant (7), regulate the rotating speed of pump (6), control the flow of the circulation fluid being transported to circulation fluid circuit units (12), described control device (10) is also for controlling the aperture of electric T-shaped valve (3) and the output of described refrigerator unit (11) cold size according to the signal of temperature sensor (8).
2. constant temp. liquid circulating device according to claim 1, is characterized in that, described expansion gear (2) can adopt heating power expansion valve, electric expansion valve or orifice plate.
3. constant temp. liquid circulating device according to claim 1, is characterized in that, described compressor (5) can select digital scroll compressor, invariable frequency compressor, frequency-changeable compressor.
4. the Temp. control method that adopts of constant temp. liquid circulating device, adopts constant temp. liquid circulating device as claimed in claim 1, it is characterized in that, comprise the steps:
Temperature sensor (8) gathers the temperature value of circulation fluid and sends to control device (10);
Control device (10) judges the temperature value of circulation fluid that described temperature sensor (8) gathers and the size of setting value and sends action command according to above-mentioned judged result to the compressor (5) in refrigerator unit (11), electric T-shaped valve (3) and expansion gear (2);
The instruction of described compressor (5), electric T-shaped valve (3) and expansion gear (2) receiving control device (10), the cold of corresponding adjustment compressor (5) exports, the aperture of described electric T-shaped valve (3) and the aperture of expansion gear (2), makes the temperature fast approaching setting value of circulation fluid.
5. the Temp. control method that adopts of constant temp. liquid circulating device according to claim 4, is characterized in that,
The temperature value of the circulation fluid gathered when temperature sensor (8) is greater than setting value, control device (10) sends action command to compressor (5), electric T-shaped valve (3) in refrigerator unit (11), compressor (5) exports with maximum cooling capacity, and the corresponding reduction of aperture of electric T-shaped valve (3), compressor outlet is refluxed through the corresponding minimizing of cold-producing medium of evaporator heated side, makes the temperature value of circulation fluid close to setting value;
The temperature value of the circulation fluid gathered when temperature sensors (8) is less than setting value, control device (10) sends action command to electric T-shaped valve (3) in refrigerator unit (11), under guarantee compressor (5) normally runs, the corresponding increase of aperture of electric T-shaped valve (3), compressor outlet is refluxed through the corresponding increase of high-temperature gas cold-producing medium of evaporator heated side, makes the temperature of circulation fluid rapidly close to desired temperature.
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| CN201210045255.0A CN103294086B (en) | 2012-02-27 | 2012-02-27 | Constant-temperature liquid circulating device and temperature-controlling method |
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| CN103294086B true CN103294086B (en) | 2015-06-17 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106773153B (en) * | 2016-11-10 | 2019-10-25 | 武汉华星光电技术有限公司 | A kind of attemperator of etching solution |
| CN109210836A (en) * | 2017-06-29 | 2019-01-15 | 上海微电子装备（集团）股份有限公司 | Liquid temperature controlling device and method |
| CN112379704B (en) * | 2020-10-29 | 2022-02-18 | 北京京仪自动化装备技术有限公司 | Temperature control system for semiconductor production |
| CN112817347B (en) * | 2020-12-25 | 2022-05-24 | 北京京仪自动化装备技术股份有限公司 | Rapid temperature rise and drop system and control method thereof |
| CN112856841A (en) * | 2021-02-07 | 2021-05-28 | 爱美达（上海）热能系统有限公司 | Temperature control device |
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| EP0184200A2 (en) * | 1984-12-07 | 1986-06-11 | Hitachi, Ltd. | Air-cooled heat pump type refrigerating apparatus |
| CN1340145A (en) * | 1999-01-15 | 2002-03-13 | 约克国际有限公司 | Adaptive hot gas bypass control for centrifugal chillers |
| EP1610076A2 (en) * | 2004-06-24 | 2005-12-28 | Samsung Electronics Co., Ltd. | Cooling cycle apparatus and method of operating the same |
| CN2828675Y (en) * | 2005-07-11 | 2006-10-18 | 贺煜 | Environment protection heat pump |
| CN101587355A (en) * | 2009-06-30 | 2009-11-25 | 上海微电子装备有限公司 | Temperature control equipment and temperature control method thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CA2561123A1 (en) * | 2005-09-28 | 2007-03-28 | H-Tech, Inc. | Heat pump system having a defrost mechanism for low ambient air temperature operation |
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| EP0184200A2 (en) * | 1984-12-07 | 1986-06-11 | Hitachi, Ltd. | Air-cooled heat pump type refrigerating apparatus |
| CN1340145A (en) * | 1999-01-15 | 2002-03-13 | 约克国际有限公司 | Adaptive hot gas bypass control for centrifugal chillers |
| EP1610076A2 (en) * | 2004-06-24 | 2005-12-28 | Samsung Electronics Co., Ltd. | Cooling cycle apparatus and method of operating the same |
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| CN101587355A (en) * | 2009-06-30 | 2009-11-25 | 上海微电子装备有限公司 | Temperature control equipment and temperature control method thereof |
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Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |