CN102564368A - Coordinates measuring head unit and coordinates measuring machine - Google Patents

Coordinates measuring head unit and coordinates measuring machine Download PDF

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Publication number
CN102564368A
CN102564368A CN2011102942297A CN201110294229A CN102564368A CN 102564368 A CN102564368 A CN 102564368A CN 2011102942297 A CN2011102942297 A CN 2011102942297A CN 201110294229 A CN201110294229 A CN 201110294229A CN 102564368 A CN102564368 A CN 102564368A
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measurement
head unit
coordinates
gauge head
mentioned
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CN102564368B (en
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松宫贞行
吉冈晋
上山修一
宫崎智之
新井雅典
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Mitutoyo Corp
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Mitutoyo Corp
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012Contact-making feeler heads therefor
    • G01B5/016Constructional details of contacts
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

The invention provides a coordinates measuring head unit and a coordinates measuring machine. A coordinates measuring head unit (10) is provided, which is compact, inexpensive, and capable of performing high-precision measurements at high speeds, and facilitates, for example, measurements conducted on machine tools or in-situ measurements on transport lines. The coordinates measuring head unit (10) includes: drive means (an X-axis drive section 14, a Y-axis drive section 16, and a Z-axis drive section 18), an integrated housing (13) for accommodating the drive means (14, 16, 18), and fixture means (fixture surface 20). The drive means allows a probe (12) to be moved by computer numerical control along a plurality of drive axis, which are orthogonal to each other, and abut against a measuring target (8) to measure the dimensions of the measuring target (8). The fixture means (20) is provided on one of side surfaces of the housing (13) to attach one of the drive means (14, 16, 18) to a support (a support 34 on a stand 32 secured to a base 30).

Description

Measurement of coordinates is with gauge head unit and coordinate measuring machine
Technical field
The present invention relates to measurement of coordinates with gauge head unit and coordinate measuring machine.Particularly relate to small-sized, cheap, can carry out scene (observations) in airborne measurements high-acruracy survey, in the lathe, pipeline etc. at a high speed and measure easy measurement of coordinates with the gauge head unit and have the coordinate measuring machine of this measurement of coordinates with the gauge head unit.
Background technology
As the measurement mechanism that carries out the high accuracy three-dimensional measurement of coordinates, known have a three dimensional coordinate measuring machine (below be also referred to as CMM).
But; CMM in the past; The general measure stroke is about 500mm; Bigger; This CMM in the past has gauge head, this gauge head have be used for carrying the bigger pedestal (base plate) put measuring object (for example workpiece) be used to make measure with probe (for example when contact, produce with measuring object the contact of activation signal contact sonde, obtain the non-contact optical probe etc. of the image of measuring object) the bigger door type that moves with respect to this pedestal or the framework of C font, this gauge head can make the framework of this type or C font mobile with respect to pedestal edge one axial (for example fore-and-aft direction); And another of the framework edge that can make this type or C font and an above-mentioned axial quadrature axially (for example left and right directions) relatively moves, thereby probe is moved with respect to the above-below direction of this gauge head edge with above-mentioned two axial quadratures.Thereby CMM is not the size of measuring position, but covers the size of whole measurement object, and must keep the precision that it measures the gamut of stroke.Therefore, CMM is large-scale and that the space is set is big, costs an arm and a leg, and is not suitable for airborne measurements or observes and measure.
In order to address the above problem; The applicant has proposed to be assembled into the simple type CMM that makes on the line in japanese kokai publication hei 6-34356 communique (below be called patent documentation 1), and (below be called patent documentation 2) proposed to be assembled into the CMM in the machining center in japanese kokai publication hei 11-325869 communique.
But the technology of patent documentation 1,2 all is to use the bigger large-scale CMM of measurement stroke to be prerequisite, to be assembled on lathe or the manufacturing line, therefore, to have the such problem in space that is provided with that costs an arm and a leg, needs broad.
On the other hand, in the application of reality, be mostly that with the small workpiece about external dimensions 40mm~100mm be measuring object, even perhaps big workpiece also is to measure the external diameter etc. of internal diameter or shaft portion and may not need big measurement stroke.In this case, even miniature workpiece also more adopt in the past measurement stroke bigger be the above CMM of 500mm, then CMM that the space is set is big much with respect to measuring object (part).
In addition; In the time will on lathe, measuring; The sensor (for example contact sonde) that consider to replace cutter and install and measure usefulness is measured; Therefore also there is the such problem of kinematic error that can not detect lathe in length measurement system (guide rail, scale) owing to use the member of lathe but in this case.
Summary of the invention
The present invention for solve above-mentioned in the past problem points and make, its problem is to provide small-sized, cheap, can carry out high-acruracy survey at a high speed, the airborne measurements in the lathe, the observation in the pipeline measure be easy to measurement of coordinates with the gauge head unit, have coordinate measuring machine, lathe and the pipeline of this measurement of coordinates with the gauge head unit.
The present invention is conceived to not need bigger situation to make in the local time of measuring less measuring object, bigger measuring object by the required stroke of high-acruracy survey that CMM carries out; Provide a kind of measurement of coordinates that has solved above-mentioned problem to use the gauge head unit; It is characterized in that; This measurement of coordinates has with the gauge head unit: driver part, and it is used for through computer numerical control (Computer Numerical Control; CNC) probe is moved along mutually orthogonal a plurality of driving axis, probe and measuring object are offseted fetch the size of measuring measuring object; The integrated housing that forms, it is used to hold this driver part; Installing component, it is arranged on arbitrary side of this housing, is used for any driver part of above-mentioned driver part is installed in supporting mass.
At this, can make above-mentioned driver part is the parts that line slideway, ball-screw and motor combination form.
In addition, above-mentioned probe is moved freely along three-dimensional, can the driver part that be used to this probe is moved along its axis be configured in above-mentioned installing component side.
Perhaps, the two-dimensional directional of above-mentioned probe edge and the axial quadrature of this probe is moved freely.
In addition, can change above-mentioned probe.
In addition, the present invention provides a kind of coordinate measuring machine, it is characterized in that, this coordinate measuring machine has: above-mentioned measurement of coordinates is used the gauge head unit; Pedestal, it is used for carrying puts measuring object; Support, it is used for using the gauge head unit at the above-mentioned measurement of coordinates of this pedestal upper support.
At this; The Z axle driver part that drives to above-below direction can be installed on above-mentioned support; The Y axle driver part of direction driving forwards, backwards is installed on this Z axle driver part, the X axle driver part of direction driving to the left and right is installed on this Y axle driver part, probe is installed on this X axle driver part.
In addition, can on said base, dispose and be used for the worktable traverse measurement object, that have the amount of movement measurement component.
In addition, can be before measuring beginning for the measuring object position alignment manually initially to adjust the position of above-mentioned measurement of coordinates with the gauge head unit.
In addition, through changing above-mentioned probe, also can make above-mentioned coordinate measuring machine play the effect of minute shape measuring machine or image measurement device.
In addition, the present invention provides a kind of lathe, it is characterized in that, this lathe is equipped with above-mentioned measurement of coordinates and uses the gauge head unit.
At this, need not the processing object in the processing on above-mentioned lathe be unloaded from this lathe, just can utilize above-mentioned measurement of coordinates this processing object to be measured with the probe of gauge head unit.
In addition, above-mentioned measurement of coordinates is associated with the length measurement system of lathe with moving of gauge head unit.
In addition, the present invention provides a kind of pipeline, it is characterized in that, above-mentioned measurement of coordinates is installed on this pipeline uses the gauge head unit.
At this, can the axial different a plurality of above-mentioned measurement of coordinates of probe be installed on the pipeline with the gauge head unit.
In addition, the present invention provides a kind of mechanical arm, it is characterized in that, this mechanical arm is equipped with above-mentioned measurement of coordinates and uses the gauge head unit.
In addition, the present invention provides a kind of portable coordinate measuring machine, and it is installed in above-mentioned coordinate measuring machine on the chassis with battery with driving and forms.
Adopt the present invention; Owing to reduced the measurement stroke of measurement of coordinates with the gauge head unit; Make itself and pedestal, support independent, therefore, it is small-sized, cheap that measurement of coordinates of the present invention uses the gauge head unit; Can carry out high-acruracy survey at a high speed, and the airborne measurements in the lathe or the observation in the pipeline are measured easily.Particularly, therefore can be implemented in the high speed that is difficult to realize among the large-scale CMM simultaneously and measure and high-acruracy survey because the measurement stroke is less.In addition, measurement of coordinates of the present invention also is easier to the assembling of gauge head unit to lathe or pipeline (also comprise and make line or detection line).
Particularly when the driver part that makes probe move freely, will be used to this probe is moved along its axis along three-dimensional is configured in above-mentioned installing component side, can carries out high accuracy three-dimensional and measure.
In addition, be used for carrying the pedestal put measuring object and be used at the above-mentioned measurement of coordinates of this pedestal upper support during having, can provide a kind of and be provided with that the space is very little, the microminiature CMM of high precision and cheapness with the support of gauge head unit.
In addition, be configured to the situation of from top view along fore-and-aft direction (Y direction) at the support that will constitute cantilever style structure, the lightest to laterally (X-direction) mobile load from top view, therefore, it is best to precision that X axle driving shaft is located at orlop.
And; Be provided with on the said base under the situation that is used for the worktable traverse measurement object, that have the amount of movement measurement component; Also can measure greater than the workpiece of measurement of coordinates with the stroke of gauge head unit; With make measurement of coordinates with gauge head unit self mobile phase ratio, can be cheap and measure accurately.
Particularly measurement of coordinates is being installed under the head of lathe or near the situation it with the gauge head unit, can utilizing with the independently high-precision length measurement system of the length measurement system of lathe and carry out airborne measurements.
Description of drawings
Will be with reference to the description of drawings preferred implementation, wherein, in all figure, similar element is assigned with similar Reference numeral, in the accompanying drawings:
Fig. 1 is that the stereographic map of the measurement of coordinates of embodiment of the present invention with the CMM of gauge head unit disposed in expression.
Fig. 2 is another routine figure of the probe that can change of expression.
Fig. 3 is the figure of relation of configuration and the error of expression drive division.
Fig. 4 is the figure of the formation of expression drive division.
Fig. 5 is illustrated in the stereographic map that has disposed the state of worktable on the CMM of Fig. 1.
Fig. 6 is that the stereographic map of the measurement of coordinates of embodiment of the present invention with the electric discharge machining apparatus of gauge head unit disposed in expression.
Fig. 7 is that the stereographic map of the measurement of coordinates of embodiment of the present invention with the major part of the pipeline of gauge head unit disposed in expression.
Fig. 8 is that the stereographic map of the measurement of coordinates of embodiment of the present invention with the mechanical arm of gauge head unit disposed in expression.
Fig. 9 is that the stereographic map of the measurement of coordinates of embodiment of the present invention with the two-dimensional coordinate measuring machine of gauge head unit disposed in expression.
Figure 10 is that the stereographic map of the measurement of coordinates of embodiment of the present invention with the portable CMM of gauge head unit disposed in expression.
Embodiment
Below, the embodiment that present invention will be described in detail with reference to the accompanying.
The measurement of coordinates that the disposes embodiment of the present invention CMM with the gauge head unit has been shown among Fig. 1.
The measurement of coordinates of this embodiment has to be used for making with gauge head unit 10 pops one's head in 12 along the mobile X axle drive division 14 freely of X-direction (left and right directions of figure); Be used for making this X axle drive division 14 to move Y axle drive division 16 freely along Y direction (fore-and-aft direction of figure); Be used for making this Y axle drive division 16 to move Z axle drive division 18 freely along Z-direction (above-below direction of figure); Be used to hold the incorporate housing 13 of these drive divisions; Be arranged on this housing 13 arbitrary side (being back surface) at this be used for above-mentioned Z axle drive division 18 is installed in the installing component (being installed surface) 20 on the supporting mass (is the supporting member 34 that is fixed on the support 32 on the pedestal 30 at this) at this.At this, it is 40mm~120mm that each axial measurement stroke for example can be made as X axle and Y direction, and Z-direction is 40mm.
Above-mentioned measurement of coordinates with gauge head unit 10 on; Utilize cable 19 to be connected with to be used to control the control device 40 of above-mentioned drive division 14,16,18, on this control device 40, be connected with and be used to the operating rod case (joystick box) 46 that sends measuring command or receive measurement data and carry out principal computer 42, the data processing software 44 of geometrical calculation and be used to send driving command.
Above-mentioned data processing software 44 for example have coordinate position and the diameter of the front end ball that is used for correcting probe 12 the probe calibration function, measure the temperature correction function of the size of coordinate and measuring object (for example workpiece), the spatial accuracy calibration function of static dynamically correction space precision etc. according to temperature correction.
Above-mentioned measurement of coordinates is installed in gauge head unit 10 on the supporting member 34 of support 32, and this support 32 is fixed on and is used for carrying the pedestal 30 of putting measuring object (omitting diagram).This supporting member 34 has and is used for the threaded portion 34A that screws togather with feed screw 38; The handle 36 that utilization is configured in support 32 upper ends can make this feed screw 38 rotate; Through turning handle 36; Can be before measuring beginning for the measuring object position alignment with the manual upper-lower position of initial adjustment supporting member 34, and then adjust the upper-lower position of measurement of coordinates with gauge head unit 10.
Like this, for example make supporting member 34 on the special stand that moves up and down on this support 32, can realize being provided with the little microminiature CMM in space through being installed in gauge head unit 10 at fixed support 32 on the pedestal 30, with measurement of coordinates.Probe 12 also can be changed, and adopts the contact sonde of that kind shown in Figure 1, profiling probe to constitute CMM, adopts small probe such shown in Fig. 2 A to constitute the minute shape measuring machine, adopts image probe such shown in Fig. 2 B to constitute the image measurement machine.
At this, will be used to make probe 12 to be configured in than X axle drive division 14 and Y axle drive division 16 and lean on installed surface 20 sides along its axial (being Z-direction) mobile Z axle drive division 18, be from following reason.Promptly; Shown in Fig. 3 (A); Under Z axle drive division 18 being configured in than X axle drive division 14 and the situation of Y axle drive division 16 by probe 12 sides (downside among the figure); Z axle drive division 18 places that are tilted in that caused by the X axle drive division 14 in the measuring process, Y axle drive division 16 mobile enlarge, and the error of 12 front ends (lower end among the figure) that cause popping one's head in increases.Relative therewith; Shown in Fig. 3 (B); Lean under the situation of installed surface 20 sides (upside among the figure) as this embodiment, Z axle drive division 18 being configured in than X axle drive division 14 and Y axle drive division 16; The mobile inclination that causes by the X axle drive division 14 in the measuring process, Y axle drive division 16 can not enlarge at Z axle drive division 18 places, and the error of 12 front ends of popping one's head in can not increase yet.
In addition, as the driving mechanism of X axle drive division 14, Y axle drive division 16, Z axle drive division 18, the combination of line slideway 14A, ball-screw 14B and the motor 14C of for example preferred use that kind shown in Figure 4 suppresses heating.This be owing to: when when making the drive division miniaturization use less housing, heat can be accumulated, and might cause the generation measuring error because of the heating of drive system.In addition, in the situation that does not have heating problem or adopted under the situation of heating countermeasures such as air-supply, cooling, for example also can use other drive systems such as linear motor.
In the example of Fig. 1; Measuring object directly carried to put on pedestal 30 carry out three-dimensional measurement; But shown in the variation as shown in Figure 5; Pedestal 30 upload put can along single shaft or twin shaft (being the single shaft of X-direction in the drawings) mobile, can enlarge measurement stroke along single shaft or biaxially oriented (be the single shaft direction of X axle in the drawings) by for example measuring object (workpiece) transfer table 31 of linear encoder output amount of movement with respect to measuring object (being connecting link in the drawings) 8.Like this, move, and make measurement of coordinates with gauge head unit 10 mobile phases ratio through making measuring object 8, can be cheap and enlarge the stroke of three-dimensional measurement accurately.Fig. 5 is the example of single shaft, but also can use the XY worktable of twin shaft.
In addition, transport is carried out programmed control, also manual travelling workpiece for conveying workpieces can utilize computing machine.In addition, also can be utilized in the mechanical arm that to use in the transport of single shaft, twin shaft and come conveying workpieces.
Illustrated among Fig. 6 measurement of coordinates has been installed in the example on the lathe (being electric discharge machining apparatus 50 in the drawings) with gauge head unit 10.Through small-sized measurement of coordinates is installed near head that machine tooling uses or its with gauge head unit 10, can carry out airborne measurements with comparalive ease.Since different with the situation that common sensor (contact sonde etc.) is installed, independently length measurement system and drive system had, therefore can not receive the influence of machine tool motion precision.
In addition, compare with the stroke of general lathe, measurement of coordinates is less with the stroke of gauge head unit 10, but under the situation of measuring a plurality of workpieces, sometimes workpiece is accommodated in the stroke of measurement of coordinates with gauge head unit 10 one by one.In this case, can only depend on measurement of coordinates to measure, but under the situation of measuring whole zone, measurement of coordinates is associated with moving of gauge head unit 10 with the length measurement system 52 of lathe with gauge head unit 10.
The assembling measurement of coordinates is not limited to electric discharge machining apparatus with the object of gauge head unit 10, can as patent documentation 2, be assembled in the machining center perhaps to be assembled in other lathes.
And; Measurement of coordinates is installed is used Working head portion or its periphery of the position expectation of gauge head unit 10 as lathe, if but can load and unload freely with respect to the worktable of lathe, also can not be installed in Working head portion periphery; And, even from independently also measuring the position with lathe.Promptly; Because measurement of coordinates is small-sized with gauge head unit 10; Therefore can realize flexible structure, can make the type that is assembled on the lathe, with the adjacent type of lathe, the type that disposes independently in the position that separates with lathe, from workpiece just from the lathe various configurations such as a plurality of of coming out to dispose on line.
In addition, in the above-described embodiment, any probe 12 axially all be above-below direction (being Z-direction) vertical among the figure, but also can make axially horizontal for horizontal direction of probe 12.
Illustrated among Fig. 7 near the travelling belt 60 of pipeline change probe 12 axially, disposed the example of a plurality of (being 2 in the drawings) measurement of coordinates with gauge head unit 10 with a vertical horizontal mode.
Through disposing a plurality of measurement of coordinates in this wise, can on pipeline, carry out on-line measurement rapidly with gauge head unit 10.
In addition, the configuration measurement of coordinates, can both for example as shown in Figure 8ly be installed on the arm 70 of robot no matter be to make any objects such as line, inspection line with the object of gauge head unit 10.
In addition, the Z axle drive division 18 that also can omit for example as shown in Figure 9 carries out the two-dimensional coordinate measurement.
And; Microminiature CMM shown in Figure 1 is installed on the chassis 80 with driving with battery 82, unlimited dispensing device 84 as illustrated in fig. 10; To wireless transmission measuring-signals such as receiving trap 86, arithmetic unit 88, display device 90, also can realize portable CMM.
Utilizability on the industry
The present invention is suitable for the measurement etc. of external diameter of internal diameter, axle in profiling measurement, hole of fin shape of turbocharger, the jet engine of profile, the for example internal combustion engine of complex-shaped finding.
Those skilled in the art can understand, and above-mentioned illustrative embodiments only is illustrative, so that the application of principle of the present invention to be shown.Under the premise without departing from the spirit and scope of the present invention, those skilled in the art can easily expect many other different configurations.
Quoting of related application
The disclosed full content that comprises instructions, accompanying drawing and claims of the Japanese patent application No.2010-215956 that on September 27th, 2010 submitted to is herein incorporated by reference.

Claims (17)

1. a measurement of coordinates is used the gauge head unit, it is characterized in that, this measurement of coordinates has with the gauge head unit:
Driver part, it is used for through computer numerical control probe being moved along mutually orthogonal a plurality of driving axis, probe and measuring object is offseted fetch the size of measuring measuring object;
The integrated housing that forms, it is used to hold this driver part;
Installing component, it is arranged on arbitrary side of this housing, is used for any driver part of above-mentioned driver part is installed in supporting mass.
2. measurement of coordinates according to claim 1 is used the gauge head unit, it is characterized in that,
Above-mentioned driver part is the parts that formed by line slideway, ball-screw and motor combination.
3. measurement of coordinates according to claim 1 and 2 is used the gauge head unit, it is characterized in that,
Above-mentioned probe moves freely along three-dimensional,
The driver part that is used to this probe is moved along its axis is configured in above-mentioned installing component side.
4. measurement of coordinates according to claim 1 and 2 is used the gauge head unit, it is characterized in that,
The two-dimensional directional of above-mentioned probe edge and the axial quadrature of this probe moves freely.
5. use the gauge head unit according to each described measurement of coordinates in the claim 1~4, it is characterized in that,
Above-mentioned probe can be changed.
6. a coordinate measuring machine is characterized in that, this coordinate measuring machine has:
Each described measurement of coordinates is used the gauge head unit in the claim 1~5;
Pedestal, it is used for carrying puts measuring object;
Support, it is used for using the gauge head unit at the above-mentioned measurement of coordinates of this pedestal upper support.
7. coordinate measuring machine according to claim 6 is characterized in that,
The Z axle driver part that drives to above-below direction is installed on above-mentioned support; The Y axle driver part of direction driving forwards, backwards is installed on this Z axle driver part; The X axle driver part of direction driving to the left and right is installed on this Y axle driver part, on this X axle driver part, probe is installed.
8. coordinate measuring machine according to claim 6 is characterized in that,
On said base, dispose and be used for the worktable traverse measurement object, that have the amount of movement measurement component.
9. according to each described coordinate measuring machine in the claim 6~8, it is characterized in that,
Can be before measuring beginning for the measuring object position alignment manually initially to adjust the position of above-mentioned measurement of coordinates with the gauge head unit.
10. according to each described coordinate measuring machine in the claim 6~9, it is characterized in that,
Through changing above-mentioned probe, also can make coordinate measuring machine play the effect of minute shape measuring machine or image measurement machine.
11. a lathe is characterized in that,
This lathe is equipped with in the claim 1~5 each described measurement of coordinates and uses the gauge head unit.
12. lathe according to claim 11 is characterized in that,
Need not the processing object in the processing on above-mentioned lathe be unloaded from this lathe, just can utilize above-mentioned measurement of coordinates this processing object to be measured with the probe of gauge head unit.
13. according to claim 11 or 12 described lathes, it is characterized in that,
Above-mentioned measurement of coordinates is associated with the length measurement system of lathe with moving of gauge head unit.
14. a pipeline is characterized in that,
Each described measurement of coordinates is installed on this pipeline in the claim 1~5 uses the gauge head unit.
15. pipeline according to claim 14 is characterized in that,
The axial different a plurality of above-mentioned measurement of coordinates that probe is installed on this pipeline is used the gauge head unit.
16. a mechanical arm is characterized in that,
This mechanical arm is equipped with in the claim 1~5 each described measurement of coordinates and uses the gauge head unit.
17. a portable coordinate measuring machine is characterized in that,
This movable type coordinate measuring machine is installed in each described coordinate measuring machine in the claim 6~10 on the chassis with battery with driving and forms.
CN201110294229.7A 2010-09-27 2011-09-26 Coordinates measuring head unit and coordinates measuring machine Active CN102564368B (en)

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JP2010-215956 2010-09-27
JP2010215956 2010-09-27

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