CN102557593A - YAG/Al2O3 diphase ceramic material and preparation method thereof - Google Patents
YAG/Al2O3 diphase ceramic material and preparation method thereof Download PDFInfo
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- CN102557593A CN102557593A CN2010105985656A CN201010598565A CN102557593A CN 102557593 A CN102557593 A CN 102557593A CN 2010105985656 A CN2010105985656 A CN 2010105985656A CN 201010598565 A CN201010598565 A CN 201010598565A CN 102557593 A CN102557593 A CN 102557593A
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- argon gas
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Abstract
The invention provides a YAG (Al5O12)/Al2O3 diphase ceramic material and a preparation method thereof. The YAG/Al2O3 diphase ceramic material comprises the following components, by mass percent: 5-70 percent of YAG and 95-30 percent of Al2O3. The preparation method for the diphase ceramic material comprises the following steps: (1), 4.68-15.59 percent of Al, 73.02-46.12 percent of Fe2O3 and 2.33-38.29 percent of Y2O3 are weighed; (2), a reaction material is placed into a die for press molding, an ignition agent is placed on the surface of a massive material after floating powder is blown away from the massive material, and the massive material with the ignition agent is loaded into a reactor; (3), 1-2MPa of argon gas is injected into the reactor in room temperature, and exhausting is performed after 2 minutes to enable the reaction material to be protected by the argon gas atmosphere; (4), the reactor is heated up, re-exhausting is performed after the temperature of the reactor rises up to 180-200 DEG C, and then 3-7MPa of argon gas is injected for continuous heating; and (5), the ignition agent is ignited when the temperature in the reactor reaches 250-300 DEG C to arouse thermit reaction, the product is cooled down to the room temperature along with the reactor under protection of argon gas, and Fe in the product is removed to obtain the diphase ceramic material.
Description
Technical field
The present invention has narrated a kind of YAG/Al
2O
3The preparation method of diphase ceramic material.
Background technology
As high-temperature structural ceramics, YAG/Al
2O
3Diphase ceramic material is the novel hot machine material that gets most of the attention, and it has overcome SiC and Si
3N
4Deng the intensive oxidation behavior of non-oxide ceramics under high-temperature condition, be suitable for high temperature and work for a long time.At present, preparation Y
2O
3/ Al
2O
3The method of diphase ceramic material generally was divided into for two steps: at first, and preparation YAG (Y
3Al
5O
12) nano powder or presoma powder; Then, become diphase ceramic material through high temperature sintering.Because the preparation method of YAG nano powder or presoma powder is complicated and be inappropriate for scale operation.
Summary of the invention
The purpose of this invention is to provide a kind of YAG/Al
2O
3Diphase ceramic material and preparation method thereof.
The present invention is YAG/Al
2O
3Diphase ceramic material and preparation method thereof, YAG/ Al
2O
3Diphase ceramic material, by mass percentage, its component is: YAG is 5~70%, Al
2O
3Be 95%~30%.
YAG/ Al
2O
3The preparation method of diphase ceramic material the steps include:
(1) according to mass percent, takes by weighing: Al 4.68~15.59%, Fe
2O
373.02 Y~46.12%,
2O
32.33~38.29%;
(2) place mould to carry out pressure forming the reaction mass that mixes; After the lumpy material of forming blown away floating powder, in the reactor drum of after detonator is put on its surface, packing into;
(3) at room temperature, in reactor drum, charge into 1~2MPa argon gas, final vacuum in 2 minutes is in the argon gas atmosphere protection reaction mass;
(4) heat, exhaust once more when the temperature of reaction vessel is raised to 180~200 ℃, the argon gas that charges into 3~7MPa afterwards continues heating; The detonator burning causes thermite reaction when temperature in the reaction vessel reaches 250 ℃~300 ℃, discharges a large amount of heat, and resultant cools to room temperature with the furnace under argon shield, remove the Fe in the resultant, has just obtained YAG/Al
2O
3Diphase ceramic material.
The invention has the beneficial effects as follows that existing preparing method's two steps are simplified, and preparation flow is simple, is suitable for suitability for industrialized production.
The laboratory sample that obtains optical micro analysis, XRD analysis, sem analysis, density detection, Mechanics Performance Testing have been carried out.
Description of drawings
Fig. 1 is the microhardness curve of matrix material of the present invention, and Fig. 2 is the fracture toughness property curve, and Fig. 3 is the density curve.
Embodiment
Embodiment 1:
Al:24.12, Fe by mass percentage
2O
3: 71.33, Y
2O
3: 4.56 take by weighing raw material powder; With the load weighted material powder stainless steel jar mill of packing into, in planetary ball mill, mix then, the ball milling time is 16 hours, and rotating speed is 150r/min, and ball-to-powder weight ratio is 1:2, and ball-milling medium is Al
2O
3Ball.Place the mould of being furnished with the copper ground with the forming under the pressure of pressing machine the reaction mass that mixes then at 60MPa; After the lumpy material of forming blown away floating powder, in the thermite reaction of after detonator is put on its surface, packing into the container; At room temperature, in reaction vessel, charge into the 2MPa argon gas, final vacuum in 2 minutes is in the argon gas atmosphere protection reaction mass; Heating then, exhaust once more when the temperature of reaction vessel is raised to 200 ℃, the argon gas that charges into 7MPa afterwards continues heating; The detonator burning causes the first layer material generation thermite reaction simultaneously when temperature in the reaction vessel reaches 298 ℃, discharges a large amount of heat; Cut off heating power supply this moment; The big calorimetric that one deck material is emitted in reaction is kept and continued reaction down, and is intact up to whole material reactions, generates YAG/Al
2O
3Diphase ceramic material.The content of YAG is in the material: 15.94%, and all the other are Al
2O
3Its performance data is: microhardness is 10.3GPa, and fracture toughness property is 2.33MPa/m
1/2, density is 92.2%.
Embodiment 2:
Al:23.07, Fe by mass percentage
2O
3: 68.22, Y
2O
3: 8.71 take by weighing raw material powder; With the load weighted material powder stainless steel jar mill of packing into, in planetary ball mill, mix then, the ball milling time is 16 hours, and rotating speed is 150r/min, and ball-to-powder weight ratio is 1:2, and ball-milling medium is Al
2O
3Ball.Place the mould of being furnished with the copper ground with the forming under the pressure of pressing machine the reaction mass that mixes then at 60MPa; After the lumpy material of forming blown away floating powder, in the thermite reaction of after detonator is put on its surface, packing into the container; At room temperature, in reaction vessel, charge into the 2MPa argon gas, final vacuum in 2 minutes is in the argon gas atmosphere protection reaction mass; Heating then, exhaust once more when the temperature of reaction vessel is raised to 200 ℃, the argon gas that charges into 7MPa afterwards continues heating; The detonator burning causes the first layer material generation thermite reaction simultaneously when temperature in the reaction vessel reaches 302 ℃, discharges a large amount of heat; Cut off heating power supply this moment; The big calorimetric that one deck material is emitted in reaction is kept and continued reaction down, and is intact up to whole material reactions, generates YAG/Al
2O
3Diphase ceramic material.The content of YAG is in the material: 29.21%, and all the other are Al
2O
3Its performance data is: microhardness is 9.3GPa, and fracture toughness property is 2.32MPa/m
1/2, density is 94.1%.
Embodiment 3:
Al:22.10, Fe by mass percentage
2O
3: 65.37, Y
2O
3: 12.52 take by weighing raw material powder; With the load weighted material powder stainless steel jar mill of packing into, in planetary ball mill, mix then, the ball milling time is 16 hours, and rotating speed is 150r/min, and ball-to-powder weight ratio is 1:2, and ball-milling medium is Al
2O
3Ball.Place the mould of being furnished with the copper ground with the forming under the pressure of pressing machine the reaction mass that mixes then at 60MPa; After the lumpy material of forming blown away floating powder, in the thermite reaction of after detonator is put on its surface, packing into the container; At room temperature, in reaction vessel, charge into the 2MPa argon gas, final vacuum in 2 minutes is in the argon gas atmosphere protection reaction mass; Heating then, exhaust once more when the temperature of reaction vessel is raised to 200 ℃, the argon gas that charges into 7MPa afterwards continues heating; The detonator burning causes the first layer material generation thermite reaction simultaneously when temperature in the reaction vessel reaches 306 ℃, discharges a large amount of heat; Cut off heating power supply this moment; The big calorimetric that one deck material is emitted in reaction is kept and continued reaction down, and is intact up to whole material reactions, generates YAG/Al
2O
3Diphase ceramic material.The content of YAG is in the material: 40.45%, and all the other are Al
2O
3Its performance data is: microhardness is 8.0GPa, and fracture toughness property is 2.26MPa/m
1/2, density is 93.7%.
Embodiment 4:
Al:21.22, Fe by mass percentage
2O
3: 62.75, Y
2O
3: 16.03 take by weighing raw material powder; With the load weighted material powder stainless steel jar mill of packing into, in planetary ball mill, mix then, the ball milling time is 16 hours, and rotating speed is 150r/min, and ball-to-powder weight ratio is 1:2, and ball-milling medium is Al
2O
3Ball.Place the mould of being furnished with the copper ground with the forming under the pressure of pressing machine the reaction mass that mixes then at 60MPa; After the lumpy material of forming blown away floating powder, in the thermite reaction of after detonator is put on its surface, packing into the container; At room temperature, in reaction vessel, charge into the 2MPa argon gas, final vacuum in 2 minutes is in the argon gas atmosphere protection reaction mass; Heating then, exhaust once more when the temperature of reaction vessel is raised to 200 ℃, the argon gas that charges into 7MPa afterwards continues heating; The detonator burning causes the first layer material generation thermite reaction simultaneously when temperature in the reaction vessel reaches 287 ℃, discharges a large amount of heat; Cut off heating power supply this moment; The big calorimetric that one deck material is emitted in reaction is kept and continued reaction down, and is intact up to whole material reactions, generates YAG/Al
2O
3Diphase ceramic material.The content of YAG is in the material: 50.10%, and all the other are Al
2O
3Its performance data is: microhardness is 10.9GPa, and fracture toughness property is 2.27MPa/m
1/2, density is 99.7%.
Content and microhardness, fracture toughness property, the density of YAG among above 4 embodiment are distinguished curve plotting figure: Fig. 1, Fig. 2, Fig. 3.From figure, can find out its performance: microhardness all between 8.0-13.4 GPa, fracture toughness property is all at 1.77-2.33 MPa/m
1/2Between, density is all between 91.9-99.7%.
The laboratory sample that obtains optical micro analysis, XRD analysis, sem analysis, density detection, Mechanics Performance Testing have been carried out.
Performances more of the present invention such as following table:
Hardness is measured on HBRVU-187.5 type Bu Luoweishi optics sclerometer, and its test condition is: load 4.9N loads time length 12s; Fracture toughness property adopts pressing in method, calculates according to vickers hardness number, and density adopts Archimedes's drainage to record.
Claims (3)
1.YAG/ Al
2O
3Diphase ceramic material, by mass percentage, its component is: YAG is 5~70%, Al
2O
3Be 95%~30%.
2. YAG/ Al according to claim 1
2O
3Diphase ceramic material, its Vickers' hardness are 8.0~13.4 GPa, and fracture toughness property is 1.77~2.33 MPa/m
1/2, density is 91.9~99.7%.
3.YAG/ Al
2O
3The preparation method of diphase ceramic material the steps include:
(1) according to mass percent, takes by weighing: Al 4.68~15.59%, Fe
2O
373.02 Y~46.12%,
2O
32.33~38.29%;
(2) place mould to carry out pressure forming the reaction mass that mixes; After the lumpy material of forming blown away floating powder, in the reactor drum of after detonator is put on its surface, packing into;
(3) at room temperature, in reactor drum, charge into 1~2MPa argon gas, final vacuum in 2 minutes is in the argon gas atmosphere protection reaction mass;
(4) heat, exhaust once more when the temperature of reaction vessel is raised to 180~200 ℃, the argon gas that charges into 3~7MPa afterwards continues heating; The detonator burning causes thermite reaction when temperature in the reaction vessel reaches 250 ℃~300 ℃, discharges a large amount of heat, and resultant cools to room temperature with the furnace under argon shield, remove the Fe in the resultant, has just obtained YAG/ Al
2O
3Diphase ceramic material.
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016173528A1 (en) * | 2015-04-30 | 2016-11-03 | 深圳市光峰光电技术有限公司 | Luminescent ceramic used for high-power light source, and light-emitting device |
CN107915481A (en) * | 2017-11-22 | 2018-04-17 | 中国科学院过程工程研究所 | A kind of nanostructured Yt aluminum garnet-base transparent ceramic material, preparation method and the usage |
CN114277340A (en) * | 2020-09-28 | 2022-04-05 | 中微半导体设备(上海)股份有限公司 | Component, method for forming plasma-resistant coating, and plasma reaction apparatus |
Citations (2)
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CN1124784A (en) * | 1994-04-05 | 1996-06-19 | 中国科学院兰州化学物理研究所 | Process for preparing hard synthetic material |
CN1171379A (en) * | 1996-07-01 | 1998-01-28 | 宇部兴产株式会社 | Ceramic composite material and porous ceramic material |
-
2010
- 2010-12-21 CN CN2010105985656A patent/CN102557593A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1124784A (en) * | 1994-04-05 | 1996-06-19 | 中国科学院兰州化学物理研究所 | Process for preparing hard synthetic material |
CN1171379A (en) * | 1996-07-01 | 1998-01-28 | 宇部兴产株式会社 | Ceramic composite material and porous ceramic material |
Non-Patent Citations (2)
Title |
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李建平 等: "自蔓延高温合成耐火材料", 《耐火材料》 * |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016173528A1 (en) * | 2015-04-30 | 2016-11-03 | 深圳市光峰光电技术有限公司 | Luminescent ceramic used for high-power light source, and light-emitting device |
CN107915481A (en) * | 2017-11-22 | 2018-04-17 | 中国科学院过程工程研究所 | A kind of nanostructured Yt aluminum garnet-base transparent ceramic material, preparation method and the usage |
CN114277340A (en) * | 2020-09-28 | 2022-04-05 | 中微半导体设备(上海)股份有限公司 | Component, method for forming plasma-resistant coating, and plasma reaction apparatus |
CN114277340B (en) * | 2020-09-28 | 2023-12-29 | 中微半导体设备(上海)股份有限公司 | Component, method for forming plasma-resistant coating, and plasma reaction apparatus |
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Application publication date: 20120711 |