AU2002222123A1 - Electrostatic device - Google Patents

Electrostatic device

Info

Publication number
AU2002222123A1
AU2002222123A1 AU2002222123A AU2212302A AU2002222123A1 AU 2002222123 A1 AU2002222123 A1 AU 2002222123A1 AU 2002222123 A AU2002222123 A AU 2002222123A AU 2212302 A AU2212302 A AU 2212302A AU 2002222123 A1 AU2002222123 A1 AU 2002222123A1
Authority
AU
Australia
Prior art keywords
electrostatic device
electrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002222123A
Inventor
Rad H Dabbaj
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0030103A external-priority patent/GB0030103D0/en
Priority claimed from GB0102337A external-priority patent/GB0102337D0/en
Priority claimed from GB0119759A external-priority patent/GB0119759D0/en
Priority claimed from GB0126233A external-priority patent/GB0126233D0/en
Application filed by Individual filed Critical Individual
Publication of AU2002222123A1 publication Critical patent/AU2002222123A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H01G5/18—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
AU2002222123A 2000-12-11 2001-12-04 Electrostatic device Abandoned AU2002222123A1 (en)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
GB0030103A GB0030103D0 (en) 2000-12-11 2000-12-11 Electrostatic actuators
GB0030103 2000-12-11
GB0102337A GB0102337D0 (en) 2001-01-30 2001-01-30 Electrostatic devices
GB0102337 2001-01-30
GB0119759 2001-08-14
GB0119759A GB0119759D0 (en) 2001-08-14 2001-08-14 Electrostatic devices
GB0126233A GB0126233D0 (en) 2000-12-11 2001-11-01 Electrostatic devices
GB0126233 2001-11-01
PCT/GB2001/005349 WO2002049199A1 (en) 2000-12-11 2001-12-04 Electrostatic device

Publications (1)

Publication Number Publication Date
AU2002222123A1 true AU2002222123A1 (en) 2002-06-24

Family

ID=27447912

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002222123A Abandoned AU2002222123A1 (en) 2000-12-11 2001-12-04 Electrostatic device

Country Status (7)

Country Link
US (1) US7196599B2 (en)
EP (1) EP1344309A1 (en)
JP (1) JP2004516783A (en)
CN (1) CN1479964A (en)
AU (1) AU2002222123A1 (en)
CA (1) CA2430741A1 (en)
WO (1) WO2002049199A1 (en)

Families Citing this family (113)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7123216B1 (en) * 1994-05-05 2006-10-17 Idc, Llc Photonic MEMS and structures
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
WO1999052006A2 (en) 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
JP3748395B2 (en) * 2001-08-23 2006-02-22 株式会社日立製作所 Micromanipulator
US6574033B1 (en) 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
JP4109498B2 (en) * 2002-06-11 2008-07-02 松下電器産業株式会社 switch
ITTO20020593A1 (en) 2002-07-09 2004-01-09 Fiat Ricerche ELECTROSTATIC ACTUATOR, USED IN PARTICULAR FOR THE TRANSVERSAL HANDLING OF A WIRE SUPPLIED IN A TES MACHINE
JP4045274B2 (en) * 2002-08-26 2008-02-13 インターナショナル・ビジネス・マシーンズ・コーポレーション Diaphragm actuated micro electromechanical switch
TW200506479A (en) * 2003-08-15 2005-02-16 Prime View Int Co Ltd Color changeable pixel for an interference display
DE102004010150B9 (en) * 2004-02-27 2012-01-26 Eads Deutschland Gmbh High-frequency MEMS switch with bent switching element and method for its production
CN101095277A (en) * 2004-03-12 2007-12-26 斯里国际 Mechanical meta-materials
US7313242B2 (en) * 2004-03-16 2007-12-25 Palo Alto Research Center Incorporated Hypersonic transducer
CN100451737C (en) * 2004-04-23 2009-01-14 研究三角协会 Flexible electrostatic actuator
US7476327B2 (en) * 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
TWI233916B (en) * 2004-07-09 2005-06-11 Prime View Int Co Ltd A structure of a micro electro mechanical system
EP2246726B1 (en) * 2004-07-29 2013-04-03 QUALCOMM MEMS Technologies, Inc. System and method for micro-electromechanical operating of an interferometric modulator
US7564612B2 (en) * 2004-09-27 2009-07-21 Idc, Llc Photonic MEMS and structures
US7936497B2 (en) * 2004-09-27 2011-05-03 Qualcomm Mems Technologies, Inc. MEMS device having deformable membrane characterized by mechanical persistence
US7527995B2 (en) * 2004-09-27 2009-05-05 Qualcomm Mems Technologies, Inc. Method of making prestructure for MEMS systems
US7630119B2 (en) * 2004-09-27 2009-12-08 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing slippage between structures in an interferometric modulator
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7719500B2 (en) * 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
US7369296B2 (en) * 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7420725B2 (en) * 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7417783B2 (en) * 2004-09-27 2008-08-26 Idc, Llc Mirror and mirror layer for optical modulator and method
US7302157B2 (en) * 2004-09-27 2007-11-27 Idc, Llc System and method for multi-level brightness in interferometric modulation
US7321456B2 (en) * 2004-09-27 2008-01-22 Idc, Llc Method and device for corner interferometric modulation
US7554714B2 (en) * 2004-09-27 2009-06-30 Idc, Llc Device and method for manipulation of thermal response in a modulator
US7304784B2 (en) * 2004-09-27 2007-12-04 Idc, Llc Reflective display device having viewable display on both sides
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7893919B2 (en) * 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US7372613B2 (en) * 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
TWI252838B (en) * 2004-12-02 2006-04-11 Delta Electronics Inc Micro-switch
US7683429B2 (en) * 2005-05-31 2010-03-23 Semiconductor Energy Laboratory Co., Ltd. Microstructure and manufacturing method of the same
US7460292B2 (en) 2005-06-03 2008-12-02 Qualcomm Mems Technologies, Inc. Interferometric modulator with internal polarization and drive method
JP4580826B2 (en) * 2005-06-17 2010-11-17 株式会社東芝 Micromechanical devices, microswitches, variable capacitance capacitors, high-frequency circuits, and optical switches
EP2495212A3 (en) * 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. Mems devices having support structures and methods of fabricating the same
US7528529B2 (en) * 2005-10-17 2009-05-05 Semiconductor Energy Laboratory Co., Ltd. Micro electro mechanical system, semiconductor device, and manufacturing method thereof
US7630114B2 (en) * 2005-10-28 2009-12-08 Idc, Llc Diffusion barrier layer for MEMS devices
US7498715B2 (en) * 2005-10-31 2009-03-03 Xiao Yang Method and structure for an out-of plane compliant micro actuator
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7382515B2 (en) * 2006-01-18 2008-06-03 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US7550810B2 (en) * 2006-02-23 2009-06-23 Qualcomm Mems Technologies, Inc. MEMS device having a layer movable at asymmetric rates
EP1832550A1 (en) * 2006-03-10 2007-09-12 Seiko Epson Corporation Electrostatic actuation method and electrostatic actuator with integral electrodes for microelectromechanical systems
US7711239B2 (en) * 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US7649671B2 (en) 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7551419B2 (en) * 2006-06-05 2009-06-23 Sri International Electroadhesion
US7554787B2 (en) * 2006-06-05 2009-06-30 Sri International Wall crawling devices
US7385744B2 (en) * 2006-06-28 2008-06-10 Qualcomm Mems Technologies, Inc. Support structure for free-standing MEMS device and methods for forming the same
US7835061B2 (en) 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US20080043315A1 (en) * 2006-08-15 2008-02-21 Cummings William J High profile contacts for microelectromechanical systems
US7545552B2 (en) * 2006-10-19 2009-06-09 Qualcomm Mems Technologies, Inc. Sacrificial spacer process and resultant structure for MEMS support structure
WO2008072248A2 (en) * 2006-12-14 2008-06-19 Ramot At Tel-Aviv University Ltd. Tilting actuator with close-gap electrodes
US7706042B2 (en) 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US8421305B2 (en) * 2007-04-17 2013-04-16 The University Of Utah Research Foundation MEMS devices and systems actuated by an energy field
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US7625825B2 (en) * 2007-06-14 2009-12-01 Qualcomm Mems Technologies, Inc. Method of patterning mechanical layer for MEMS structures
US8068268B2 (en) * 2007-07-03 2011-11-29 Qualcomm Mems Technologies, Inc. MEMS devices having improved uniformity and methods for making them
US7936240B2 (en) * 2007-08-16 2011-05-03 Simon Fraser University Lithographically controlled curvature for MEMS devices and antennas
TWI330500B (en) * 2007-09-04 2010-09-11 Ind Tech Res Inst Speaker structure
DE102008005521B4 (en) 2008-01-23 2019-01-03 Robert Bosch Gmbh Capacitive transducer and method of making the same
US7863079B2 (en) 2008-02-05 2011-01-04 Qualcomm Mems Technologies, Inc. Methods of reducing CD loss in a microelectromechanical device
TWI384916B (en) * 2008-03-25 2013-02-01 Bruce C S Chou Micro structure with flexible printed circuit and method of manufacturing the same
US8138859B2 (en) * 2008-04-21 2012-03-20 Formfactor, Inc. Switch for use in microelectromechanical systems (MEMS) and MEMS devices incorporating same
US8797279B2 (en) 2010-05-25 2014-08-05 MCube Inc. Analog touchscreen methods and apparatus
US8928602B1 (en) 2009-03-03 2015-01-06 MCube Inc. Methods and apparatus for object tracking on a hand-held device
US8710597B1 (en) 2010-04-21 2014-04-29 MCube Inc. Method and structure for adding mass with stress isolation to MEMS structures
US8823007B2 (en) 2009-10-28 2014-09-02 MCube Inc. Integrated system on chip using multiple MEMS and CMOS devices
US8477473B1 (en) 2010-08-19 2013-07-02 MCube Inc. Transducer structure and method for MEMS devices
US8553389B1 (en) 2010-08-19 2013-10-08 MCube Inc. Anchor design and method for MEMS transducer apparatuses
US8421082B1 (en) 2010-01-19 2013-04-16 Mcube, Inc. Integrated CMOS and MEMS with air dielectric method and system
US8476129B1 (en) 2010-05-24 2013-07-02 MCube Inc. Method and structure of sensors and MEMS devices using vertical mounting with interconnections
DE102009028356A1 (en) * 2009-08-07 2011-02-10 Robert Bosch Gmbh Micromechanical component, light deflection device and production method for a micromechanical component and a light deflection device
US9709509B1 (en) 2009-11-13 2017-07-18 MCube Inc. System configured for integrated communication, MEMS, Processor, and applications using a foundry compatible semiconductor process
US8936959B1 (en) 2010-02-27 2015-01-20 MCube Inc. Integrated rf MEMS, control systems and methods
US8794065B1 (en) 2010-02-27 2014-08-05 MCube Inc. Integrated inertial sensing apparatus using MEMS and quartz configured on crystallographic planes
JP5471640B2 (en) * 2010-03-12 2014-04-16 富士通株式会社 Method for manufacturing MEMS device and substrate
US8367522B1 (en) 2010-04-08 2013-02-05 MCube Inc. Method and structure of integrated micro electro-mechanical systems and electronic devices using edge bond pads
KR20130100232A (en) 2010-04-09 2013-09-10 퀄컴 엠이엠에스 테크놀로지스, 인크. Mechanical layer of an electromechanical device and methods of forming the same
US8928696B1 (en) 2010-05-25 2015-01-06 MCube Inc. Methods and apparatus for operating hysteresis on a hand held device
US8869616B1 (en) 2010-06-18 2014-10-28 MCube Inc. Method and structure of an inertial sensor using tilt conversion
US8652961B1 (en) 2010-06-18 2014-02-18 MCube Inc. Methods and structure for adapting MEMS structures to form electrical interconnections for integrated circuits
US8993362B1 (en) 2010-07-23 2015-03-31 MCube Inc. Oxide retainer method for MEMS devices
CN103221333B (en) * 2010-09-18 2017-05-31 快捷半导体公司 Multi-die MEMS package
EP2616387B1 (en) 2010-09-18 2018-05-16 Fairchild Semiconductor Corporation Packaging to reduce stress on microelectromechanical systems
US8723986B1 (en) 2010-11-04 2014-05-13 MCube Inc. Methods and apparatus for initiating image capture on a hand-held device
WO2012095185A1 (en) * 2011-01-14 2012-07-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Micromechanical component
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
US8969101B1 (en) 2011-08-17 2015-03-03 MCube Inc. Three axis magnetic sensor device and method using flex cables
US9281763B2 (en) 2011-09-28 2016-03-08 DigitalOptics Corporation MEMS Row and column actuator control
US9350271B2 (en) * 2011-09-28 2016-05-24 DigitalOptics Corporation MEMS Cascaded electrostatic actuator
DE102013014881B4 (en) 2012-09-12 2023-05-04 Fairchild Semiconductor Corporation Enhanced silicon via with multi-material fill
ITTO20120853A1 (en) * 2012-09-28 2014-03-29 St Microelectronics Srl MEMS SPEAKER DEVICE WITH ELECTRONIC TEST CIRCUIT AND ITS TEST METHOD
DE102013209804A1 (en) * 2013-05-27 2014-11-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. ELECTROSTATIC ACTUATOR AND METHOD FOR MANUFACTURING THEREOF
WO2015045605A1 (en) * 2013-09-27 2015-04-02 カシオ計算機株式会社 Drive component and driving method for drive component
JP5880594B2 (en) * 2014-02-18 2016-03-09 カシオ計算機株式会社 Driving element and driving method
DE102015111425B4 (en) * 2014-07-18 2016-06-30 Klaus Kürschner Method and device for electrical force measurement by means of insulating thin film
DE102014225934B4 (en) * 2014-12-15 2017-08-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Electrostatically deflectable micromechanical component and method for its production
DE102015206774B4 (en) 2015-04-15 2018-10-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Micromechanical device with an actively bendable element
US10802588B2 (en) * 2015-09-17 2020-10-13 Qualcomm Incorporated Deflecting film with mechanical protrusion for actuation and tactile feedback
US10291151B2 (en) 2016-04-19 2019-05-14 Mems Start, Llc Flexure shear and strain actuator
US10222265B2 (en) * 2016-08-19 2019-03-05 Obsidian Sensors, Inc. Thermomechanical device for measuring electromagnetic radiation
US10958885B2 (en) 2016-08-26 2021-03-23 Mems Start, Llc Filtering imaging system including a light source to output an optical signal modulated with a code
US10368021B2 (en) 2016-08-26 2019-07-30 Mems Start, Llc Systems and methods for derivative sensing using filtering pixels
DE102017203722B4 (en) 2017-03-07 2021-11-25 Brandenburgische Technische Universität (BTU) Cottbus-Senftenberg MEMS AND METHOD OF MANUFACTURING THE SAME
EP3636588B1 (en) 2018-09-26 2023-10-25 Murata Manufacturing Co., Ltd. Mems frequency-tuning springs
US11713240B2 (en) * 2019-12-09 2023-08-01 Board Of Regents, The University Of Texas System Cellular array electrostatic actuator

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4356730A (en) * 1981-01-08 1982-11-02 International Business Machines Corporation Electrostatically deformographic switches
US4665610A (en) * 1985-04-22 1987-05-19 Stanford University Method of making a semiconductor transducer having multiple level diaphragm structure
US5206557A (en) * 1990-11-27 1993-04-27 Mcnc Microelectromechanical transducer and fabrication method
DE69227660T2 (en) * 1991-09-18 1999-04-22 Fujitsu Ltd., Kawasaki, Kanagawa Memory with floating head
US5479061A (en) * 1992-12-31 1995-12-26 University Of North Carolina Pleated sheet microelectromechanical transducer
US5563466A (en) * 1993-06-07 1996-10-08 Rennex; Brian G. Micro-actuator
US5434464A (en) * 1994-05-23 1995-07-18 Mcnc Unidirectional supporting structure for microelectromechanical transducers
US6000280A (en) * 1995-07-20 1999-12-14 Cornell Research Foundation, Inc. Drive electrodes for microfabricated torsional cantilevers
US5870007A (en) * 1997-06-16 1999-02-09 Roxburgh Ltd. Multi-dimensional physical actuation of microstructures
US6236491B1 (en) * 1999-05-27 2001-05-22 Mcnc Micromachined electrostatic actuator with air gap
US6327855B1 (en) * 2000-02-04 2001-12-11 Jds Uniphase Inc. Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods
US6275325B1 (en) * 2000-04-07 2001-08-14 Microsoft Corporation Thermally activated microelectromechanical systems actuator
US6545385B2 (en) * 2000-04-11 2003-04-08 Sandia Corporation Microelectromechanical apparatus for elevating and tilting a platform
US6456420B1 (en) * 2000-07-27 2002-09-24 Mcnc Microelectromechanical elevating structures
US6483056B2 (en) * 2000-10-27 2002-11-19 Daniel J Hyman Microfabricated relay with multimorph actuator and electrostatic latch mechanism

Also Published As

Publication number Publication date
US7196599B2 (en) 2007-03-27
CN1479964A (en) 2004-03-03
JP2004516783A (en) 2004-06-03
US20040056742A1 (en) 2004-03-25
WO2002049199A1 (en) 2002-06-20
EP1344309A1 (en) 2003-09-17
CA2430741A1 (en) 2002-06-20

Similar Documents

Publication Publication Date Title
AU2002222123A1 (en) Electrostatic device
AU2001228310A1 (en) Rear-projecting device
AU2002245172A1 (en) An electrostatic dust-filtering device
AU2001238137A1 (en) Communicating device
AU2001296810A1 (en) Balancing device
AU2002215121A1 (en) Interface device
AU7392501A (en) Connecting device
EP1180823A3 (en) Cable-connection or cable-joint device
AU2001279517A1 (en) Connecting device
AU2001241311A1 (en) Cap-signaling device
AU2002224137A1 (en) Coating device
AU2002220882A1 (en) Electrostatic clamping
AU2002227901A1 (en) Isolating device
AU2001254745A1 (en) Pellet-freezing device
AU2002214176A1 (en) Stop device
AU2001279774A1 (en) Suspension device
AU2001250678A1 (en) Holder-grasping device
AU2001238543A1 (en) Antiextrusion device
AU2001228493A1 (en) Adjusting device
AU2001266249A1 (en) Writing aid device
AU2002215241A1 (en) Paper-clipping device
AU6269700A (en) Forming device
AU1674602A (en) Skincare device
AU2001283078A1 (en) Eye-exercise device
AU2001281849A1 (en) Mechanical coin-testing device