EP 2145696 A1 20100120 - Capacitive micromachined ultrasonic transducer and its fabrication method
Title (en)
Capacitive micromachined ultrasonic transducer and its fabrication method
Title (de)
Kapazitiver mikrogefertigter Ultraschallwandler und Verfahren zu seiner Herstellung
Title (fr)
Transducteur ultrasonique capacitif micro-usiné et procédé de fabrication correspondant
Publication
Application
Priority
EP 08160405 A 20080715
Abstract (en)
The invention relates to an electro-acoustic transducer (8) comprising a substrate (1) of a substrate material, a cavity (3) and a membrane (5) extending over at least a portion of the cavity. The cavity is arranged in the substrate material and the membrane is supported above the cavity by the substrate material. The invention further relates to a method of fabrication such an electro-acoustic transducer.
IPC 8 full level
B06B 1/02 (2006.01)
CPC (source: EP)
B06B 1/0292 (2013.01)
Citation (applicant)
- US 5619476 A 19970408 - HALLER MATTHEW I [US], et al
- US 5650572 A 19970722 - VONTZ THOMAS [DE]
- US 5870351 A 19990209 - LADABAUM IGAL [US], et al
- US 5894452 A 19990413 - LADABAUM IGAL [US], et al
- US 6004832 A 19991221 - HALLER MATTHEW ISAAC [US], et al
- US 7074634 B2 20060711 - FOGLIETTI VITTORIO [IT], et al
- US 2004085858 A1 20040506 - KHURI-YAKUB BUTRUS T [US], et al
- EP 1722595 A1 20061115 - MATSUSHITA ELECTRIC IND CO LTD [JP]
- FR 2897051 A1 20070810 - GEN ELECTRIC [US]
- US 5801069 A 19980901 - HARADA KENICHI [JP], et al
Citation (search report)
- [XY] EP 1722595 A1 20061115 - MATSUSHITA ELECTRIC IND CO LTD [JP]
- [X] FR 2897051 A1 20070810 - GEN ELECTRIC [US]
- [Y] US 5801069 A 19980901 - HARADA KENICHI [JP], et al
- [X] CALIANO ET AL: "A silicon microfabricated electrostatic transducer: 1 MHz transmission in air and in water", MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, vol. 53, no. 1-4, 1 June 2000 (2000-06-01), pages 573 - 576, XP022553248, ISSN: 0167-9317
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
DOCDB simple family (application)
EP 08160405 A 20080715